一种基于二维R-TiO2的偏振光增强气敏传感器
By preparing two-dimensional rutile phase titanium oxide on a SiO2/Si substrate and applying polarized light excitation, the problems of low sensitivity and slow response of TiO2-based gas sensors were solved, and the gas sensing performance was significantly improved.
CN119901788BActive Publication Date: 2026-07-17SOUTHWEST JIAOTONG UNIV
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SOUTHWEST JIAOTONG UNIV
- Filing Date
- 2025-02-07
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
TiO2-based gas sensors suffer from low sensitivity and slow response and recovery rates.
Method used
Two-dimensional rutile phase titanium oxide (R-TiO2) was prepared on a SiO2/Si substrate, and a gas sensor was formed by combining micro-nano fabrication technology and applying polarized light-assisted excitation.
Benefits of technology
It significantly improves the performance of gas sensing, with a 7.5-fold increase in responsiveness and a 50% reduction in response time, resulting in a faster response.
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Figure CN119901788B_ABST
Abstract
本发明公开了一种基于二维R‑TiO2的偏振光增强气敏传感器，首先在SiO2 / Si基板上制备二维金红石相氧化钛，然后通过微纳加工技术制成气敏传感器；该气敏传感器在偏振光辅助作用下能够提高气敏传感性能。具体是，在气敏传感器使用时，将入射光通过线偏振器转换成线偏振光对传感器进行照射激发。在SiO2 / Si基板上制备二维金红石相氧化钛的方法：S1、通过电子束蒸发在SiO2 / Si基板上沉积纯Ti金属层；S2、通过自限制气固界面氧化法在SiO2 / Si基板上制成金红石相氧化钛；S3、采用机械剥离法将SiO2 / Si基板上的金红石相氧化钛剥离成少层的二维纳米片。本发明通过施加偏振光作为激发光，增加了2D R‑TiO2传感器的光生载流子浓度，从而进一步提升了其气敏传感性能。
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