Double-axis angle feedback MEMS (Micro Electro Mechanical System) micromirror and preparation method thereof

By designing a comb tooth structure with biaxial angular feedback in MEMS micromirror, the problem of the impact of scanning accuracy in unstable environments is solved, and a higher precision micromirror rotation angle closed-loop control is achieved, and the integration and application fields of micromirror are improved.

CN119902365APending Publication Date: 2025-04-29ANHUI CHINA SCI MW ELECTRONIC TECH CO LTD +1
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Patent Information

Application Number
CN202311403175.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-10-27
Publication Date
2025-04-29

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Abstract

The invention provides a biaxial angle feedback MEMS micromirror and a preparation method thereof, a comb tooth structure is arranged in the MEMS micromirror and comprises movable comb teeth, fixed driving comb teeth and fixed feedback comb teeth, the movable comb teeth and the fixed driving comb teeth form a driving comb tooth group, and the movable comb teeth and the fixed feedback comb teeth form a feedback comb tooth group. On the premise that the performance and the size of the MEMS micromirror are not affected, the feedback comb tooth sets easy to be compatible and integrated are designed, the number of the feedback comb tooth sets is basically the same as that of the driving comb tooth sets, the feedback capacitance variable quantity of the MEMS micromirror is larger, and higher-precision micromirror rotation angle closed-loop control is achieved through the change of the feedback capacitance; in addition, the MEMS micromirror provided by the invention is small in size, high in integration level, completely compatible in manufacturing technology, more cost-saving and beneficial to further expansion of the application field of the MEMS micromirror.
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Citation Information

Patent Citations

  • Vertical comb drive MOEMS (micro opticalelectronic mechanics system) micromirror and manufacturing method thereof

    CN105353506A

  • Two-dimensional electrostatic scanning micromirror

    CN110703430A

  • MEMS micromirror with double-sided electrode structure, and preparation method thereof

    CN113376826A

  • MEMS micromirror and preparation method thereof

    CN114779463A

  • Two-dimensional MEMS scanning micromirror and preparation method thereof

    CN115236849A

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