A dynamic detection and rapid adjustment device for laser spot and its adjustment method

Abstract

The present invention discloses a fast adjustment device for dynamic detection of laser spots. The adjustment device includes a substrate and a detection and adjustment mechanism disposed on the surface of the substrate. Its adjustment method includes the following steps: S01, generating a first test optical path and a second test optical path for the incident laser beam, and blocking the second test optical path through a light blocker so that the CCD sensor can only measure the laser beam irradiated along the first test optical path. In the present invention, through the setting of a positive lens and a prism, astigmatism and roundness can be corrected, that is, roundness is corrected first, and then astigmatism is corrected, so as to ensure that when the laser is used for a long time, the spot roundness and astigmatism can still be close to the ideal state. In the present invention, real-time dynamic optical path correction is performed through the first adjustment mirror and the second adjustment mirror, and the monitoring process does not affect the actual processing process.

Description

Technical Field

[0001] The present invention relates to the technical field of laser processing, and particularly relates to a laser spot dynamic detection and rapid adjustment device and an adjustment method thereof. Background Art

[0002] Laser and ultrasound have become the focus of research on online methods for metal additive manufacturing due to their non-contact, wide frequency band, and high efficiency characteristics. Especially in the field of microfabrication, laser processing has advantages that cannot be compared with traditional mechanical processing.

[0003] This is because the laser spot can be easily focused to the um size, but it is very difficult to achieve this scale in mechanical processing.

[0004] Moreover, it can be known from the characteristics of the laser that the performance of the laser focused spot is determined by the laser spot before focusing. The roundness, astigmatism, and beam quality M of the original spot 2 will all be transmitted to the focused spot. In the field of fine processing, it is obviously desired that the laser spot has a roundness close to 100% and an astigmatism close to 0.

[0005] However, on the other hand, in the case of long-term use of the laser, due to the aging of the lenses and crystals, and the relaxation of stress, the resonator (the function of the optical resonator is to select the light with a certain frequency and consistent direction for the most preferential amplification, while suppressing the light with other frequencies and directions. Any photon that does not move along the axis of the resonator will quickly escape from the cavity and no longer contact the working medium. The generation of laser is realized in the optical resonator. Specifically: the photons moving along the axis will continue to move forward in the cavity, and will be continuously reflected by the two mirrors and run back and forth to generate oscillations. When running, they will continuously meet the excited particles and generate stimulated radiation. The photons moving along the axis will continue to multiply, forming a strong light beam with the same propagation direction, frequency, and phase in the cavity, which is the laser) will inevitably change (for example, temperature changes may cause thermal expansion of the material, resulting in displacement or deformation of optical components (such as mirrors)). Even if the spot is close to perfect when leaving the factory, the spot will still change after being used for a period of time (that is, the roundness of the laser spot decreases, for example, drops below 100%, and at the same time, an astigmatism value is generated). This leads to irreversible changes in the processed morphology as the use time extends.

[0006] Therefore, solving the problem of how to ensure that the roundness and astigmatism of the laser spot can still be close to the ideal state during long-term use of the laser proposed by the above-mentioned prior art becomes the subject to be studied and solved by the present invention. Summary of the Invention

[0007] The present invention provides a laser spot dynamic detection and rapid adjustment device and an adjustment method thereof, aiming to solve the technical problems proposed in the above background art.

[0008] To achieve the above object, the technical solution adopted by the present invention is: a laser spot dynamic detection and rapid adjustment device. The adjustment device includes a substrate and a detection and adjustment mechanism arranged on the surface of the substrate. The detection and adjustment mechanism includes a negative lens, a positive lens rotation mechanism equipped with a positive lens, a prism rotation mechanism equipped with a prism, a first adjustment mirror, a second adjustment mirror, a first beam splitter, a second beam splitter, a first folding mirror, a second folding mirror, a focusing lens, a first parallel plate, a second parallel plate, a CCD sensor, a signal processing box, and a light blocker;

[0009] Along the laser beam irradiation direction, the negative lens, the positive lens rotation mechanism, the prism rotation mechanism, the first adjustment mirror, the second adjustment mirror, the first beam splitter, and the second beam splitter are arranged in sequence;

[0010] Among them, when the laser beam irradiates on the first beam splitter, part of the light passes through the first beam splitter to form a first outgoing light, and the other part of the light is reflected on the surface of the first beam splitter to form a first test optical path;

[0011] When the first outgoing light passing through the first beam splitter irradiates on the second beam splitter, part of the first outgoing light passes through the second beam splitter to form an outgoing optical path, and the other part of the first outgoing light is reflected on the surface of the second beam splitter to form a second test optical path;

[0012] The light blocker is arranged on the first test optical path and the second test optical path to block the first test optical path or the second test optical path;

[0013] The focusing lens, the first parallel plate, the second parallel plate, and the CCD sensor are arranged in sequence along a straight line direction to form the rear section of the test optical path; the first parallel plate and the second parallel plate are each movably arranged relative to the substrate, and the first parallel plate and the second parallel plate can respectively enter the rear section of the test optical path or avoid it;

[0014] The first folding mirror is correspondingly arranged with the first beam splitter to reflect the first test optical path towards the focusing lens; the second folding mirror is correspondingly arranged with the second beam splitter to reflect the second test optical path towards the focusing lens, that is, the rear section of the test optical path;

[0015] The CCD sensor is used to measure the roundness and astigmatism of the laser beam;

[0016] The signal processing box is used to transmit the data measured by the CCD sensor to the computer and receive the instructions transmitted by the computer.

[0017] In the above solution, the explanations of relevant contents are as follows:

[0018] In the above solution, the substrate is mainly used to fix or place the detection and adjustment mechanism, and is not limited to a plate.

[0019] In the above solution, "optical path" is an optical term, referring to the path that light rays travel from a light source through an optical system (such as lenses, mirrors, etc.) to reach a specific point.

[0020] Among them, when the laser beam passes through the first beam splitter and the second beam splitter, it will be divided into four strands, which are hereinafter referred to as the first strand, the second strand, the third strand, and the outgoing strand for illustration:

[0021] After passing through the positive lens rotation mechanism, the prism rotation mechanism, the first adjustment mirror, and the second adjustment mirror, the laser beam will irradiate onto the first beam splitter. At this time, it will be divided into two strands from one strand. That is, the first strand and the second strand (i.e., the first outgoing light ray) are generated. The first strand is reflected by the first beam splitter, transmitted to the first folding mirror, and then through the focusing lens, the first parallel plate, and the second parallel plate, and then transmitted to the CCD sensor, thus forming the first test optical path.

[0022] The second strand (i.e., the first outgoing light ray) irradiates onto the second beam splitter. At this time, one strand in the second strand will be divided into two strands, namely the third strand and the outgoing strand.

[0023] At this time, the outgoing strand passes through the second beam splitter to form the outgoing optical path;

[0024] The third strand is transmitted to the second folding mirror through the reflection of the second beam splitter, and then through the first folding mirror, the focusing lens, the first parallel plate, and the second parallel plate, and then transmitted to the CCD sensor to form the second test optical path.

[0025] Testing the first test optical path and the second test optical path means that the CCD sensor detects the laser beam transmitted along the first test optical path and the second test optical path.

[0026] In a further technical solution, both the first beam splitter and the second beam splitter are coated with an antireflection film of the required wavelength, and the transmittance is 99.5%;

[0027] Both the first folding mirror and the second folding mirror are coated with a reflection film of the required wavelength, and the reflectivity is greater than 99.9%.

[0028] In the above solution, the antireflection film of the required wavelength refers to the antireflection film selected according to the wavelength of the laser beam to increase the transmittance;

[0029] The reflection film of the required wavelength refers to the reflection film selected according to the wavelength of the laser beam; to increase the reflectivity.

[0030] The present invention also provides an adjustment method based on a laser spot dynamic detection and rapid adjustment device, including the following steps: S01, generating the first test optical path and the second test optical path of the incident laser beam, and blocking the second test optical path through a light blocker so that the CCD sensor can only measure the laser beam irradiating along the first test optical path;

[0031] S02. Switch the positions of the first parallel flat plate and the second parallel flat plate to obtain three sets of measurement data without passing through both, passing through one of them, and passing through both, and based on the three sets of measurement data, obtain the initial roundness and initial astigmatism of the laser beam reflected onto the CCD sensor;

[0032] S03. According to the obtained initial roundness, start the positive lens rotation mechanism and adjust the roundness by adjusting the tilt of the positive lens, while the CCD sensor measures in real time until the measured roundness meets the set requirements, then turn off the positive lens rotation mechanism;

[0033] S04. Then, according to the obtained initial astigmatism, start the prism rotation mechanism and adjust the astigmatism by adjusting the tilt of the prism, while the CCD sensor measures in real time until the measured astigmatism meets the set requirements, then turn off the prism rotation mechanism;

[0034] S05. Continue to block the second test optical path with the light blocker, define a coordinate axis on the plane where the beam used for detection by the CCD sensor irradiates, the X-axis and Y-axis respectively represent the horizontal direction and the vertical direction, and then measure the position of the first optical path focusing spot formed by the laser beam reflected by the first folding mirror through the CCD sensor. At the same time, adjust the first adjustment mirror according to the position of the center point of the first optical path focusing spot and the center point of the coordinate axis until the center point of the first optical path focusing spot coincides with the center point of the coordinate axis;

[0035] S06. Adjust the position of the light blocker to block the first test optical path, and then measure the position of the second optical path focusing spot formed by the laser beam reflected by the second folding mirror through the CCD sensor. At the same time, adjust the second adjustment mirror according to the position of the center point of the second optical path focusing spot and the center point of the coordinate axis until the center point of the second optical path focusing spot coincides with the center point of the coordinate axis;

[0036] S07. After the center points of both the first optical path focusing spot and the second optical path focusing spot coincide with the center point of the coordinate axis, the first test optical path and the second test optical path are output in a coaxial manner.

[0037] Regarding the above content, the explanations are as follows:

[0038] In the above solution, the first test optical path and the second test optical path are output in a coaxial manner, which means that the laser beams transmitted along the first test optical path and the second test optical path are output in a coaxial manner.

[0039] In the above solution, the first optical path focusing spot and the second optical path focusing spot refer to the spot shapes and sizes formed by the laser beams transmitted along the first test optical path and the second test optical path on the measurement plane of the CCD sensor.

[0040] Further technical solution, step S02 includes:

[0041] S021. Guide the positions of both the first parallel flat plate and the second parallel flat plate to avoid the first test optical path, and the CCD sensor directly detects the incident first test optical path to measure a first set of data, namely the spot roundness and astigmatism value after the laser beam waist;

[0042] In step S021, the two parallel flat plates avoid the optical path (i.e., neither is in the optical path), and the CCD sensor directly receives the laser beam and records the initial state of the laser beam (i.e., the spot characteristics after the laser beam waist). This set of data will be used as a reference for subsequent comparison; the measured spot roundness and astigmatism values will reflect the quality of the laser beam when it has not passed through any optical elements.

[0043] S022. Guide one of the first parallel flat plate and the second parallel flat plate into the first test optical path, so that the laser beam passes through the first parallel flat plate or the second parallel flat plate and then reaches the CCD sensor to measure a second set of data, namely the spot roundness and astigmatism value of the laser beam waist;

[0044] In this step S022, one of the parallel flat plates is placed in the optical path. When the laser beam passes through this flat plate and reaches the CCD sensor, the characteristics of the spot are recorded. This will provide the values of the roundness and astigmatism of the laser beam after passing through one parallel flat plate.

[0045] S023. Guide both the first parallel flat plate and the second parallel flat plate to be in the first test optical path, so that the laser beam passes through the first parallel flat plate and the second parallel flat plate and then reaches the CCD sensor to measure a third set of data, namely the spot roundness and astigmatism value before the laser beam waist;

[0046] In this step S023, both parallel flat plates are in the optical path. When the laser beam passes through these two flat plates and reaches the CCD sensor, the recorded spot characteristics will reflect the state of the beam after passing through the two parallel flat plates.

[0047] S024. Utilize the obtained three sets of data and apply the theory of Gaussian optics to obtain a detailed description of the laser beam, including the beam waist radius, roundness, and astigmatism.

[0048] This step S024 is the stage of data analysis and result extraction. By summarizing the previous three sets of data and applying the Gaussian optics theory (which is applicable to describing the propagation characteristics of laser beams), the detailed parameters of the laser beam can be analyzed:

[0049] Beam waist radius: The width of the beam at its minimum diameter.

[0050] Roundness: The shape symmetry of the beam spot, usually expressed by the aspect ratio of the spot.

[0051] Astigmatism: The difference in the focusing ability of the beam in different directions, reflecting the beam quality.

[0052] For a further technical solution, in step S03, according to the obtained initial roundness, start the positive lens rotation mechanism, and adjust the roundness by adjusting the tilt angle of the positive lens. At the same time, the CCD sensor measures in real time until the measured roundness meets the set requirements, and then the specific operation steps to turn off the positive lens rotation mechanism are as follows:

[0053] S031. Establish a functional relationship between the incident angle of the positive lens when the laser beam passes through and the roundness of the laser spot;

[0054] The purpose of this step is to determine the influence of the incident angle of the positive lens on the roundness of the laser spot. This is achieved by establishing a mathematical model or an experimental data relationship.

[0055] Method: The roundness data of the spot at different incident angles can be obtained through experiments. By gradually changing the tilt angle of the lens and using the CCD sensor to record the roundness of the spot at each angle. Then, use these data to plot a graph or perform curve fitting to find the clear relationship between the incident angle and the roundness of the spot.

[0056] Importance: This functional relationship is the basis for subsequent adjustments, helping to determine how to adjust the lens to achieve the required spot roundness at a specific incident angle.

[0057] S032. Taking the roundness of the laser beam before incidence as a reference, and combining the functional relationship between the incident angle of the positive lens and the roundness of the laser spot, adjust the tilt angle of the positive lens until the CCD sensor detects that the roundness of the laser spot meets the requirements and then stop the adjustment.

[0058] Reference setting: First, record the roundness of the laser beam before incidence as a reference standard. This standard is the reference point in the optimization process.

[0059] Combining the functional relationship: According to the functional relationship between the incident angle and the roundness of the spot established in step S031, start to adjust the tilt angle of the positive lens. This process may be iterative: after each adjustment of the tilt angle, the roundness of the spot is measured in real time by the CCD sensor.

[0060] Real-time feedback: Using the real-time measurement of the CCD sensor, observe whether the roundness of the spot is close to the set target value. This real-time feedback mechanism makes the adjustment process dynamic and efficient.

[0061] Stop adjustment condition: Once the measured roundness of the light spot meets the preset requirements, the adjustment of the tilt angle of the lens is stopped. At this time, the light spot quality of the laser system has reached the optimized state.

[0062] Through the above steps, the quality of the laser beam can be systematically optimized. Step S031 establishes a theoretical basis, enabling the adjustment process in Step S032 to be based on evidence. The entire process emphasizes the combination of experiment and theory, as well as the importance of real-time feedback in the adjustment of the laser system. Such operating steps help ensure that the laser system can provide high-quality beam output under different working conditions.

[0063] For a further technical solution, the specific process of establishing the functional relationship between the incident angle of the positive lens when the laser beam passes through and the roundness of the laser light spot in Step S031 is as follows:

[0064] S311. Select a positive lens with a fixed design and obtain the radius of curvature of the positive lens;

[0065] S312. Obtain the meridional plane transmission matrix and the sagittal plane transmission matrix in the ray transmission matrix of the positive lens, where the meridional plane transmission matrix is:

[0066] The sagittal plane transmission matrix is:

[0067] S313. Apply the meridional plane transmission matrix and the sagittal plane transmission matrix for calculation to obtain the meridional plane waist size and the sagittal plane waist size of the laser beam after passing through the tilted lens; among them, the meridional plane waist size and the sagittal plane waist size of the transformed laser beam are functions of the incident angle θ1 of the positive lens;

[0068] The transmission matrix in Step S313: In optics, the transmission matrix is used to describe the change of the light beam passing through an optical element (such as a lens). The meridional plane and the sagittal plane refer to two perpendicular planes passing through the optical axis.

[0069] Calculation of the meridional plane and sagittal plane waist sizes: By using the meridional plane and sagittal plane transmission matrices, the waist sizes of the laser beam on these two planes after passing through the positive lens can be calculated. These calculations usually depend on the incident angle θ1 of the positive lens, the radii of curvature R1 and R2 of the positive lens, as well as the wavelength and refractive index n of the light beam.

[0070] S314. According to the measured roundness of the laser light spot before incidence, the tilt angle of the positive lens can be adjusted, that is, the incident angle θ1 of the positive lens is adjusted;

[0071] Influence of roundness: By measuring the roundness of the laser spot before incidence in S031, the quality of the light beam can be judged and how to adjust the incident angle θ1 of the positive lens can be determined. The roundness of the spot is an important parameter affecting the light beam quality. Therefore, it is necessary to ensure that through adjusting the tilt angle, the roundness of the spot after passing through the lens meets the requirements.

[0072] Adjustment mechanism: According to the previous calculation results, adjust the incident angle θ1 of the positive lens to achieve the required light beam characteristics.

[0073] S315. After the laser beam is transformed by the positive lens, when the laser beam waist remains the same in the meridional plane and the sagittal plane, stop adjusting the laser roundness;

[0074] Consistency requirement: In this step, the goal is to ensure that the laser beam waist after passing through the positive lens remains consistent in the meridional plane and the sagittal plane. That is to say, after passing through the lens, the shapes of the laser spots in the two planes should be the same, which usually means that the laser beam has better quality and focusing ability.

[0075] Stop condition: Once it is detected that the beam waist sizes in the meridional plane and the sagittal plane are the same, indicating that the light beam quality has reached the optimized state, the adjustment of the positive lens can be stopped. This is the ultimate goal of the entire adjustment process.

[0076] Among them, θ1 is the incident angle of the positive lens;

[0077] n is the relative refractive index of the laser beam with a known wavelength passing through the current material;

[0078] R1 is the radius of curvature of the first surface of the positive lens, that is, the radius of curvature of the surface where the light enters the positive lens;

[0079] R2 is the radius of curvature of the second surface of the positive lens, that is, the radius of curvature of the surface where the light exits the positive lens.

[0080] In the above scheme, for a positive lens with a fixed design, a thin positive lens should be selected. In this case, approximately h = 0. If it is not a thin positive lens, the thickness of the lens needs to be considered, that is, more external factors need to be considered for the data before tilting.

[0081] In the above scheme, n is the relative refractive index of the laser beam with a known wavelength passing through the current material; here it refers to the relative refractive index of the laser beam with a known wavelength passing through the positive lens.

[0082] For a further technical solution, in step S04, based on the obtained initial astigmatism, start the prism rotation mechanism and adjust the astigmatism by adjusting the tilt of the prism. At the same time, the CCD sensor measures in real time until the measured astigmatism meets the set requirements, and then close the prism rotation mechanism. The specific operation steps are as follows;

[0083] S041. Obtain a prism processed into a wedge shape, and guide a light beam through the prism processed into a wedge shape;

[0084] S042. Obtain the meridional plane transmission matrix and the sagittal plane transmission matrix in the light transmission matrix of the wedge prism. Among them, the meridional plane transmission matrix is:

[0085] The sagittal plane transmission matrix is:

[0086] S043. After guiding the laser light beam through the prism and the positive lens transformation, the equivalent transformation meridional plane transmission matrix is

[0087] The sagittal plane transmission matrix is

[0088] S044. Obtain the astigmatism value compensated by the tilted prism and the tilted positive lens as DS = S3S - S3T;

[0089] S045. According to the laser, Based on the transmission matrix theory BD + ACZ1 = 0, Convert the astigmatism value DS = S3S - S3T into a functional relationship of the astigmatism value DS and the incident angle θ1 of the positive lens and the incident angle θ2 of the prism;

[0090] S046. According to the incident angle θ1 of the positive lens determined in step S314 and the astigmatism to be achieved according to the set requirements, obtain the value of the incident angle θ2 of the prism.

[0091] Among them, sinθ2 = nsinα, sinθ2' = nsinα', β = α + α', d = lsinα + lcosαtanα', θ2 is the incident angle of the wedge prism, θ2' is the exit angle of the wedge prism, β is the wedge angle of the wedge prism, d is the optical path in the prism, I is the distance from the incident point to the vertex of the wedge prism;

[0092] S1 is the distance from the waist position of the incident light beam to the tilted lens, S2 is the distance from the tilted lens to the prism, S3T is the distance from the equivalent beam waist of the transformed meridional plane to the tilted lens, S3S is the distance from the equivalent beam waist of the transformed sagittal plane to the tilted lens;

[0093] Z1 is the confocal parameter of the incident light, Z2 is the confocal parameter of the exit light;

[0094] n is the relative refractive index of the laser beam with a known wavelength passing through the current material;

[0095] α is the refraction angle of the laser beam entering the prism;

[0096] α′ is the incident angle at which the laser beam enters another surface from inside the prism.

[0097] In the above solution, n is the relative refractive index of a laser beam with a known wavelength passing through the current material; here it refers to the relative refractive index of a laser beam with a known wavelength passing through the prism.

[0098] The prism refers to a prism processed into a wedge shape.

[0099] Through the above steps, precise compensation for the astigmatism of the laser beam can be achieved. The calculation of the astigmatism value in S044 provides a necessary basis for subsequent analysis, the establishment of the functional relationship in S045 provides theoretical support for angle adjustment, and S046 achieves the target astigmatism through specific numerical calculations. The entire process emphasizes the interaction between different components in the optical system and the importance of optimizing the beam quality by reasonably adjusting the configuration of optical components.

[0100] In a further technical solution, the required astigmatism to be achieved is approximately equal to 0 (i.e., the astigmatism close to 0 described in the background art).

[0101] In a further technical solution, the value of the incident angle θ2 of the prism is the tilt angle of the prism.

[0102] That is, the angle at which the laser beam irradiates is not easy to adjust, so the angle at which the laser beam irradiates is adjusted by adjusting the incident angle of the prism.

[0103] Regarding the use of "first", "second", etc. in this article, it does not particularly refer to the order or sequence, nor is it used to limit this case. It is only used to distinguish components or operations described with the same technical terms.

[0104] Regarding the use of "connection" or "positioning" in this article, it can refer to two or more components or devices making direct physical contact with each other, or making indirect physical contact with each other, and can also refer to two or more components or devices operating or acting on each other.

[0105] Regarding the use of "comprising", "including", "having", etc. in this article, they are all open-ended terms, that is, they mean including but not limited to.

[0106] Regarding the terms used in this article, unless otherwise specified, they generally have their ordinary meanings in this field, in the context of this case, and in the special context. Some terms used to describe this case will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art regarding the description of this case.

[0107] Regarding terms such as "front", "rear", "upper", "lower", "left", and "right" used in this text, they are all directional terms. In this case, they are only used to illustrate the positional relationship between various structures and do not limit the specific direction of the protection scheme and actual implementation of this case.

[0108] The working principle and advantages of the present invention are as follows:

[0109] In the present invention, through the setting of a positive lens and a prism, astigmatism and roundness can be corrected, that is, the roundness is corrected first, and then the astigmatism is corrected, so as to ensure that when the laser is used for a long time, the spot roundness and astigmatism can still be close to the ideal state.

[0110] In the present invention, real-time dynamic optical path correction is performed through the first adjustment mirror and the second adjustment mirror, and the monitoring process does not affect the actual processing process.

[0111] In the present invention, through the cooperation of a light blocker and a CCD sensor, rapid beam quality analysis can be carried out. Brief Description of the Drawings

[0112] Attached Figure 1 is a schematic structural diagram of the detection and adjustment mechanism in an embodiment of the present invention;

[0113] Attached Figure 2 is a three-dimensional view of the detection and adjustment mechanism in an embodiment of the present invention;

[0114] Attached Figure 3 is a schematic structural diagram of the laser beam passing through the positive lens in an embodiment of the present invention;

[0115] Attached Figure 4 is a schematic structural diagram of the laser beam passing through the prism in an embodiment of the present invention;

[0116] Attached Figure 5 is a schematic structural diagram of obtaining data after the laser beam waist, the laser beam waist, and before the laser beam waist in an embodiment of the present invention;

[0117] Attached Figure 6 is a flowchart of the adjustment method in an embodiment of the present invention;

[0118] Attached Figure 7 is a schematic diagram for deriving the formula that the outgoing light ray deviates from the incident light ray towards the opposite side of the acute angle of the prism after the light beam passes through the prism in an embodiment of the present invention.

[0119] In the above drawings: 1. negative lens; 2. positive lens rotation mechanism; 3. prism rotation mechanism; 4. first adjustment mirror; 5. second adjustment mirror; 6. first beam splitter; 7. second beam splitter; 8. second folding mirror; 9. first folding mirror; 10. focusing lens; 11. first parallel plate; 12. second parallel plate; 13. CCD sensor; 14. signal processing box; 15. first test optical path; 16. second test optical path; 17. light blocker. Detailed implementation mode

[0120] The present invention will be further described below in conjunction with the drawings and embodiments:

[0121] Embodiment: The present case will be clearly described below with diagrams and detailed descriptions. After any person skilled in the art understands the embodiments of the present case, they can make changes and modifications based on the technology taught by the present case without departing from the spirit and scope of the present case.

[0122] The terms used in this article are only for describing specific embodiments and are not intended to limit the present case. Singular forms such as "a", "this", "this", "the present", and "the" also include plural forms as used herein.

[0123] See the attached Figure 1 - Figure 2 As shown, a laser spot dynamic detection and rapid adjustment device, the adjustment device includes a substrate and a detection and adjustment mechanism arranged on the surface of the substrate. The detection and adjustment mechanism includes a negative lens 1, a positive lens rotation mechanism 2 installed with a positive lens, a prism rotation mechanism 3 installed with a prism, a first adjustment mirror 4, a second adjustment mirror 5, a first beam splitter 6, a second beam splitter 7, a first folding mirror 9, a second folding mirror 8, a focusing lens 10, a first parallel plate 11, a second parallel plate 12, a CCD sensor 13, a signal processing box 14, and a light blocker 17;

[0124] Along the irradiation direction of the laser beam, the negative lens 1, the positive lens rotation mechanism 2, the prism rotation mechanism 3, the first adjustment mirror 4, the second adjustment mirror 5, the first beam splitter 6, and the second beam splitter 7 are arranged in sequence;

[0125] Wherein, when the laser beam irradiates on the first beam splitter 6, part of the light passes through the first beam splitter 6 to form a first outgoing light, and the other part of the light is reflected on the surface of the first beam splitter 6 to form a first test optical path 15;

[0126] When the first outgoing light passing through the first beam splitter 6 irradiates on the second beam splitter 7, part of the first outgoing light passes through the second beam splitter 7 to form an outgoing optical path, and the other part of the first outgoing light is reflected on the surface of the second beam splitter 7 to form a second test optical path 16;

[0127] The light blocker 17 is arranged on the first test optical path 15 and the second test optical path 16 for blocking the first test optical path 15 or the second test optical path 16;

[0128] The focusing lens 10, the first parallel flat plate 11, the second parallel flat plate 12 and the CCD sensor 13 are arranged in sequence along a straight line direction to form the rear section of the test optical path; the first parallel flat plate 11 and the second parallel flat plate 12 are movably arranged relative to the substrate respectively, and the first parallel flat plate 11 and the second parallel flat plate 12 can enter the rear section of the test optical path or avoid it respectively;

[0129] The first folding mirror 9 is arranged corresponding to the first beam splitter 6 to reflect the first test optical path 15 towards the focusing lens 10; the second folding mirror 8 is arranged corresponding to the second beam splitter 7 to reflect the second test optical path 16 towards the focusing lens 10, that is, the rear section of the test optical path;

[0130] The CCD sensor 13 is used to measure the roundness and astigmatism of the laser beam;

[0131] The signal processing box 14 is used to transmit the data measured by the CCD sensor 13 to the computer and receive the instructions transmitted by the computer.

[0132] In this embodiment, the substrate is mainly used to fix or place the detection and adjustment mechanism, and is not limited to a plate.

[0133] In this embodiment, the "optical path" is an optical term, which refers to the path that light travels from the light source through an optical system (such as a lens, a mirror, etc.) to reach a specific point.

[0134] Among them, when the laser beam passes through the first beam splitter 6 and the second beam splitter 7, it will be divided into four beams, which are hereinafter referred to as the first beam, the second beam, the third beam and the outgoing beam for description:

[0135] After passing through the positive lens rotation mechanism 2, the prism rotation mechanism 3, the first adjustment mirror 4 and the second adjustment mirror 5, the laser beam will irradiate on the first beam splitter 6. At this time, it will be divided into two beams from one beam.

[0136] That is, the first beam and the second beam are generated. The first beam is reflected by the first beam splitter 6, transmitted to the first folding mirror 9, and then transmitted to the CCD sensor 13 through the focusing lens 10, the first parallel flat plate 11 and the second parallel flat plate 12, thus forming the first test optical path 15.

[0137] The second beam will pass through the first beam splitter 6 and irradiate on the second beam splitter 7. At this time, one beam in the second beam will be divided into two beams, that is, the third beam and the outgoing beam.

[0138] At this time, the outgoing beam passes through the second beam splitter 7 to form the outgoing optical path;

[0139] The third beam is transmitted to the second folding mirror 8 through the reflection of the second beam splitter 7, and then passes through the first folding mirror 9, the focusing mirror 10, the first parallel flat plate 11, and the second parallel flat plate 12 and is transmitted to the CCD sensor 13 to form the second test optical path 16.

[0140] Testing the first test optical path 15 and the second test optical path 16 means that the CCD sensor 13 detects the laser beams transmitted along the first test optical path and the second test optical path.

[0141] In some specific embodiments, both the first beam splitter 6 and the second beam splitter 7 are coated with an antireflection film with the required wavelength, and the transmittance is 99.5%;

[0142] Both the first folding mirror 9 and the second folding mirror 8 are coated with a reflection film with the required wavelength, and the reflectivity is greater than 99.9%.

[0143] In the above solution, the antireflection film with the required wavelength refers to the antireflection film selected according to the wavelength of the laser beam to increase the transmittance; the reflection film with the required wavelength refers to the reflection film selected according to the wavelength of the laser beam; to increase the reflectivity.

[0144] See the appendix Figure 3 - Figure 7 As shown, an adjustment method for a rapid adjustment device based on dynamic detection of laser spots includes the following steps:

[0145] S01. Generate the first test optical path 15 and the second test optical path 16 of the incident laser beam, and block the second test optical path 16 through the light blocker 17 so that the CCD sensor 13 can only measure the laser beam irradiated along the first test optical path 15;

[0146] S02. Switch the positions of the first parallel flat plate 11 and the second parallel flat plate 12 to obtain three groups of measurement data without passing through both, passing through one of them, and passing through both, and based on the three groups of measurement data, obtain the initial roundness and initial astigmatism of the laser beam reflected onto the CCD sensor 13;

[0147] S03. Start the positive lens rotation mechanism 2 according to the obtained initial roundness, and adjust the roundness by adjusting the tilt of the positive lens. At the same time, the CCD sensor 13 measures in real time until the measured roundness meets the set requirements, and then turn off the positive lens rotation mechanism 2; S04. Then, start the prism rotation mechanism 3 according to the obtained initial astigmatism, and adjust the astigmatism by adjusting the tilt of the prism. At the same time, the CCD sensor 13 measures in real time until the measured astigmatism meets the set requirements, and then turn off the prism rotation mechanism 3; S05. Continue to block the second test optical path 16 with the light blocker 17, and define a coordinate axis on the plane where the beam used for detection by the CCD sensor 13 is irradiated. The X-axis and Y-axis represent the horizontal direction and the vertical direction respectively. Then, measure the position of the first optical path focusing spot formed by the laser beam reflected by the first folding mirror 9 through the CCD sensor 13. At the same time, adjust the first adjustment mirror 4 according to the positions of the center point of the first optical path focusing spot and the center point of the coordinate axis until the center point of the first optical path focusing spot coincides with the center point of the coordinate axis;

[0148] S06. Adjust the position of the light blocker 17 to block the first test optical path 15, and then measure the position of the second optical path focusing spot formed by the laser beam reflected by the second folding mirror 8 through the CCD sensor 13. At the same time, adjust the second adjustment mirror 5 according to the positions of the center point of the second optical path focusing spot and the center point of the coordinate axis until the center point of the second optical path focusing spot coincides with the center point of the coordinate axis;

[0149] S07. After the center points of the first optical path focusing spot and the second optical path focusing spot both coincide with the center point of the coordinate axis, the first test optical path 15 and the second test optical path 16 are output in a coaxial manner.

[0150] In this embodiment, the first test optical path 15 and the second test optical path 16 are output in a coaxial manner, which means that the laser beams transmitted along the first test optical path 15 and the second test optical path 16 are output in a coaxial manner.

[0151] In this embodiment, the first optical path focusing spot and the second optical path focusing spot refer to the spot shapes and sizes formed by the laser beams transmitted along the first test optical path 15 and the second test optical path 16 on the measurement plane of the CCD sensor (i.e., the above-defined irradiated plane of the coordinate axis).

[0152] In this embodiment, the optical paths traveled by the first folding mirror 9 and the second folding mirror 8 are different, and the final optical path collimation can be determined through the two optical paths. Specifically, the first folding mirror 9 can be selected as a semi-transmissive and semi-reflective mirror, and the second folding mirror 8 can be selected as a conventional folding mirror.

[0153] The focusing lens 10 is used to accurately fit the laser beam quality, including astigmatism and roundness. At least three points need to be taken. Adding a focusing lens can increase the number of focal points. Selecting the light spots before, after, and above the focal point is more conducive to fitting the laser beam distribution.

[0154] The refractive indices of the two parallel plates are generally 1.5. By adding the parallel plates, the optical path from the focusing lens to the CCD sensor 13 is equivalently changed without moving the CCD sensor 13.

[0155] Generally speaking, two test optical paths are set because the principle is similar to that two points determine a straight line. The two optical paths respectively correspond to the points where the first beam splitter 6 and the second beam splitter 7 irradiate the CCD sensor 13. Once the light spots at these two points are consistent, the beam collimation is completed.

[0156] The settings of the first beam splitter 6 and the second beam splitter 7 only split out about 0.25% of the laser beam for measurement, and the beam that is not split out is the outgoing beam.

[0157] Because the beam needs to pass through the first adjustment mirror 4 and then the second adjustment mirror 5 first;

[0158] After adjusting the first adjustment mirror 4 so that the center point of the focused light spot of the first optical path coincides with the center point of the coordinate axis;

[0159] If the second adjustment mirror 5 is further adjusted, the position of the focused light spot of the first optical path should change along with the second adjustment mirror 5. Therefore, multiple adjustments are required to center the points of the two optical paths. Centering the points of the two optical paths is to adjust the beam collimation so that the beam always exits in a fixed spatial direction. In this way, the divergence angle of the collimated beam can be small, the energy can be concentrated, and the directivity can be good, which is beneficial to improving the performance of the optical system. At the same time, the fixed spatial direction of exit ensures the stability of the beam path and direction, reduces environmental interference, and improves the system reliability.

[0160] The plane irradiated by the beam is generally perpendicular to the incident laser beam.

[0161] In some specific embodiments, step S02 includes:

[0162] S021. Guide the positions of the first parallel plate 11 and the second parallel plate 12 to avoid the first test optical path 15. The CCD sensor 13 directly detects the incident first test optical path 15 to measure the first set of data, that is, the spot roundness and astigmatism values after the laser beam waist.

[0163] S022. Guide one of the first parallel plate 11 and the second parallel plate 12 into the third test optical path 15, so that the laser beam reaches the CCD sensor 13 after passing through the first parallel plate 11 or the second parallel plate 12, and the second set of data can be measured, that is, the spot roundness and astigmatism value of the laser beam waist;

[0164] S023. Guide both the first parallel plate 11 and the second parallel plate 12 into the first test optical path 15, so that the laser beam reaches the CCD sensor 13 after passing through the first parallel plate 11 and the second parallel plate 12, and the third set of data can be measured, that is, the spot roundness and astigmatism value before the laser beam waist;

[0165] S024. Use the obtained three sets of data and apply the theory of Gaussian optics to obtain a detailed description of the laser beam, including the beam waist radius, roundness and astigmatism.

[0166] In step S021, neither of the two parallel plates is in the optical path. The CCD sensor directly receives the laser beam and records the initial state of the laser beam (i.e., the spot characteristics after the laser beam waist). This set of data will be used as a benchmark for subsequent comparison. The measured spot roundness and astigmatism values will reflect the quality of the laser beam without passing through any optical elements.

[0167] In this step S022, one of the parallel plates is in the optical path. When the laser beam reaches the CCD sensor after passing through this plate, record the characteristics of the spot. This will provide the values of the roundness and astigmatism of the laser beam after passing through one parallel plate.

[0168] In this step S023, both parallel plates are in the optical path. The laser beam reaches the CCD sensor after passing through these two plates, and the recorded spot characteristics will reflect the state of the beam after passing through the two parallel plates.

[0169] Step S024 is the stage of data analysis and result extraction. By summarizing the previous three sets of data and applying the Gaussian optics theory (which is applicable to describing the propagation characteristics of the laser beam), the detailed parameters of the laser beam can be analyzed:

[0170] Beam waist radius: The width of the beam at its minimum diameter.

[0171] Roundness: The shape symmetry of the beam spot, usually expressed by the aspect ratio of the spot.

[0172] Astigmatism: The difference in the focusing ability of the beam in different directions, reflecting the beam quality.

[0173] Reference Figure 3, for a compact structural design, the positive lens has a relatively thin thickness, so the positive lens can be treated as a thin positive lens.

[0174] The thickness of the thin positive lens can be equivalent to h = 0. The incident angle of the positive lens is equal to the tilt angle θ1.

[0175] In some specific embodiments, step S03 includes:

[0176] S031. Establish a functional relationship between the incident angle of the positive lens when the laser beam passes through and the roundness of the laser spot.

[0177] The purpose of this step is to determine the influence of the incident angle θ1 of the positive lens on the roundness of the laser spot. This is achieved by establishing a mathematical model or an experimental data relationship.

[0178] Method: The roundness data of the spot at different incident angles can be obtained through experiments. By gradually changing the tilt angle of the lens and using a CCD sensor to record the roundness of the spot at each angle. Then, use this data to draw a graph or perform curve fitting to find the clear relationship between the incident angle and the roundness of the spot.

[0179] Importance: This functional relationship is the basis for subsequent adjustments, helping to determine how to adjust the lens to achieve the desired spot roundness at a specific incident angle.

[0180] S032. Based on the roundness of the laser beam before incidence and in combination with the functional relationship between the incident angle of the positive lens and the roundness of the laser spot, adjust the tilt angle of the positive lens until the roundness of the laser spot detected by the CCD sensor 13 meets the requirements and then stop the adjustment.

[0181] Benchmark setting: First, record the roundness of the laser beam before incidence as a reference standard. This standard is the benchmark point in the optimization process.

[0182] Combined with the functional relationship: According to the functional relationship between the incident angle and the roundness of the spot established in step S031, start to adjust the tilt angle of the positive lens. This process may be iterative: after each adjustment of the tilt angle, the roundness of the spot is measured in real time by the CCD sensor.

[0183] Real-time feedback: Using the real-time measurement of the CCD sensor, observe whether the roundness of the spot is close to the set target value. This real-time feedback mechanism makes the adjustment process dynamic and efficient.

[0184] Stop adjustment condition: Once the measured roundness of the spot meets the preset requirements, stop adjusting the tilt angle of the lens. At this time, the spot quality of the laser system has reached the optimized state.

[0185] Through the above steps, the quality of the laser beam can be systematically optimized. Step S031 establishes the theoretical basis, enabling the adjustment process in step S032 to be based on evidence. The entire process emphasizes the combination of experiment and theory, as well as the importance of real-time feedback in the adjustment of the laser system. Such operating steps help ensure that the laser system can provide high-quality beam output under different working conditions.

[0186] In some specific embodiments, the specific process of establishing the functional relationship between the incident angle of the positive lens when the laser beam passes through and the roundness of the laser spot in step S031 is as follows:

[0187] S311. Select a positive lens with a fixed design and obtain the radius of curvature of the positive lens;

[0188] S312. Obtain the meridional plane transmission matrix and the sagittal plane transmission matrix in the ray transfer matrix of the positive lens, where the meridional plane transmission matrix is:

[0189] The sagittal plane transmission matrix is:

[0190] S313. Apply the meridional plane transmission matrix and the sagittal plane transmission matrix for calculation to obtain the meridional plane beam waist size and the sagittal plane beam waist size of the laser beam after transformation by the tilted lens; among them, the meridional plane beam waist size and the sagittal plane beam waist size of the transformed laser beam are functions of the incident angle θ1 of the positive lens;

[0191] S314. According to the measured roundness of the laser spot before incidence, the tilt angle of the positive lens can be adjusted, that is, the incident angle θ1 of the positive lens is adjusted;

[0192] S315. After the laser beam is transformed by the positive lens, when the laser beam waist is consistent in the meridional plane and the sagittal plane, the adjustment of the laser roundness is stopped;

[0193] Among them, θ1 is the incident angle of the positive lens;

[0194] n is the relative refractive index of the laser beam with a known wavelength passing through the current material;

[0195] R1 is the radius of curvature of the first surface of the positive lens, that is, the radius of curvature of the surface entering the positive lens;

[0196] R2 is the radius of curvature of the second surface of the positive lens, that is, the radius of curvature of the surface exiting the positive lens.

[0197] The transmission matrix in step S313: In optics, the transmission matrix is used to describe the change of the light beam passing through an optical element (such as a lens). The meridional plane and the sagittal plane refer to two perpendicular planes passing through the optical axis.

[0198] Calculate the waist sizes in the meridional plane and the sagittal plane: By using the transfer matrices of the meridional plane and the sagittal plane, the waist sizes of the laser beam on these two planes after passing through a positive lens can be calculated.

[0199] Functional relationship: There is a certain functional relationship between the calculated waist sizes in the meridional plane and the sagittal plane and the incident angle θ1. That is, the waist size of the transformed laser beam in the meridional plane and the waist size in the sagittal plane are functions of the incident angle θ1 of the positive lens.

[0200] Effect of roundness in step S314: By measuring the roundness of the laser spot before incidence in S031, the quality of the beam can be judged and it can be decided how to adjust the incident angle θ1 of the positive lens. The roundness of the spot is an important parameter affecting the beam quality. Therefore, it is necessary to ensure that by adjusting the tilt angle, the roundness of the spot after passing through the positive lens meets the requirements.

[0201] Adjustment mechanism: According to the previous calculation results, adjust the incident angle θ1 to achieve the desired beam characteristics.

[0202] In step S315, consistency requirement: In this step, the goal is to ensure the consistency of the laser beam waist in the meridional plane and the sagittal plane after passing through the positive lens. That is to say, after passing through the lens, the shapes of the laser spots on the two planes should be the same, which usually means that the laser beam has better quality and focusing ability.

[0203] Stop condition: Once it is detected that the waist sizes in the meridional plane and the sagittal plane are consistent, indicating that the beam quality has reached the optimized state, the adjustment of the positive lens can be stopped. This is the ultimate goal of the entire adjustment process.

[0204] It should be noted that in the above solution, when choosing a positive lens with a fixed design, a thin positive lens should be selected. In this case, approximately h = 0. If it is not a thin positive lens, the thickness of the lens needs to be considered, that is, more external factors need to be considered for the data before tilting.

[0205] In the above solution, n is the relative refractive index of a laser beam with a known wavelength passing through the current material; here it refers to the relative refractive index of a laser beam with a known wavelength passing through the positive lens.

[0206] In some specific embodiments, for step S04, then according to the obtained initial astigmatism, start the prism rotation mechanism 3, and adjust the astigmatism by adjusting the tilt of the prism. At the same time, the CCD sensor 13 measures in real time until the measured astigmatism meets the set requirements, and then turn off the prism rotation mechanism 3. The specific operation steps are as follows;

[0207] S041. Obtain a prism processed into a wedge shape and guide the beam through the prism processed into a wedge shape;

[0208] S042. Obtain the meridional plane transmission matrix and the sagittal plane transmission matrix in the light transmission matrix of the wedge prism. Among them, the meridional plane transmission matrix is:

[0209] The sagittal plane transmission matrix is:

[0210] S043. After guiding the laser light speed through the prism and the positive lens transformation, the equivalent transformation meridional plane transmission matrix is

[0211] The sagittal plane transmission matrix is

[0212] S044. Obtain the astigmatism value compensated by the tilted prism and the tilted positive lens as DS = S3S - S3T;

[0213] S045. According to the laser transmission matrix theory BD + ACZ1 = 0, Convert the astigmatism value DS = S3S - S3T into a functional relationship between the astigmatism value DS and the incident angle θ1 of the positive lens and the incident angle θ2 of the prism;

[0214] S046. According to the incident angle θ1 of the positive lens determined in step S314 and the astigmatism to be achieved as required, obtain the value of the incident angle θ2 of the prism.

[0215] Among them,

[0216] sinθ2 = nsinα, sinθ2′ = nsinα′, β = α + α′, d = lsinα + lcosαtanα′, θ2 is the incident angle of the wedge prism, θ2' is the exit angle of the wedge prism, β is the wedge angle of the wedge prism, d is the optical path in the prism, I is the distance from the incident point to the vertex of the wedge prism;

[0217] S1 is the distance from the waist position of the incident light beam to the tilted lens, S2 is the distance from the tilted lens to the prism, S3T is the distance from the equivalent beam waist of the transformed meridional plane to the tilted lens, S3S is the distance from the equivalent beam waist of the transformed sagittal plane to the tilted lens;

[0218] Z1 is the confocal parameter of the incident light, Z2 is the confocal parameter of the exit light;

[0219] n is the relative refractive index of the laser beam with a known wavelength passing through the current material;

[0220] α is the refractive angle of the laser beam entering the prism;

[0221] α′ is the incident angle of the laser beam entering another surface from inside the prism.

[0222] In the above solution, since n is the relative refractive index of a laser beam with a known wavelength passing through the current material, it refers to the relative refractive index of a laser beam with a known wavelength passing through the prism at this point.

[0223] The prism refers to a prism processed into a wedge shape.

[0224] Through the above steps, precise compensation for the astigmatism of the laser beam can be achieved. The calculation of the astigmatism value in S044 provides a necessary basis for subsequent analysis, the establishment of the functional relationship in S045 provides theoretical support for angle adjustment, and S046 achieves the target astigmatism through specific numerical calculations. The entire process emphasizes the interaction between different components in the optical system and the importance of optimizing the beam quality by reasonably adjusting the configuration of optical components.

[0225] In some specific embodiments, such as Figure 4 and Figure 7 shown, with reference to step S05 and step S06 simultaneously, when both the astigmatism and roundness are adjusted properly, without the first adjustment mirror 4 and the second adjustment mirror 5, the first test optical path and the second test optical path cannot be output coaxially. When adjusting the first adjustment mirror 4 and the second adjustment mirror 5, it can be quickly adjusted by the angle at which the laser beam irradiates the first adjustment mirror 4 (this angle is the angle deflected by the prism, that is, the angle by which the outgoing ray of the beam after passing through the prism is offset from the incident ray towards the opposite side of the acute angle of the prism). The following explains this angle:

[0226] When there is a fixed wedge angle β and the distance l from the incident point to the vertex of the wedge-shaped prism (that is, obtaining a prism processed into a wedge shape, and all parameters of this prism are known), referring to Figure 4 and Figure 7 , a new auxiliary line N is constructed, which is parallel to the original side M; since the two sides of angle B and angle C are parallel, angle B is equal to angle C, B = 90 - θ2 = C; angle A = β; D = 90 - A = 90 - β; E = C - D = β - θ; so the output deflection angle is equal to θ2′ - β + θ2.

[0227] In some specific embodiments, the required astigmatism to be achieved is approximately equal to 0.

[0228] In some specific embodiments, the value of the incident angle θ2 of the prism is the tilt angle of the prism, that is, the angle at which the laser beam irradiates is not easy to adjust, so the angle at which the laser beam irradiates is adjusted by adjusting the incident angle of the prism.

[0229] The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly. However, the protection scope of the present invention cannot be limited thereby. Any equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. A fast adjustment device for dynamic detection of laser spots, characterized in that: It includes a substrate and a detection and adjustment mechanism disposed on the substrate. The detection and adjustment mechanism includes a negative lens, a positive lens rotation mechanism equipped with a positive lens, a prism rotation mechanism equipped with a prism, a first adjustment mirror, a second adjustment mirror, a first beam splitter, a second beam splitter, a light blocker, a first folding mirror, a second folding mirror, a focusing lens, a first parallel plate, a second parallel plate, a CCD sensor, and a signal processing box; Along the laser beam irradiation direction, the negative lens, the positive lens rotation mechanism, the prism rotation mechanism, the first adjustment mirror, the second adjustment mirror, the first beam splitter, and the second beam splitter are arranged in sequence; When the laser beam irradiates on the first beam splitter, part of the light passes through the first beam splitter to form a first outgoing light, and the other part of the light is reflected on the surface of the first beam splitter to form a first test optical path; when the first outgoing light irradiates on the second beam splitter, part of the first outgoing light passes through the second beam splitter to form an outgoing optical path, and the other part of the first outgoing light is reflected on the surface of the second beam splitter to form a second test optical path; The light blocker is disposed on the first test optical path and the second test optical path for blocking the first test optical path or the second test optical path; The focusing lens, the first parallel plate, the second parallel plate, and the CCD sensor are arranged in sequence along a straight line to form the rear section of the test optical path; the first parallel plate and the second parallel plate are each movably disposed relative to the substrate so that they can enter the rear section of the test optical path or avoid it; The first folding mirror is correspondingly disposed with the first beam splitter to reflect the first test optical path towards the focusing lens; the second folding mirror is correspondingly disposed with the second beam splitter to reflect the second test optical path towards the focusing lens; The CCD sensor is used to measure the roundness and astigmatism of the laser beam; The signal processing box is used to transmit the data measured by the CCD sensor to the computer and receive the instructions transmitted by the computer.

2. The dynamic laser spot detection and rapid adjustment device according to claim 1, wherein: Both the first beam splitter and the second beam splitter are coated with an antireflection film of the required wavelength, and the transmittance is 99.5%; Both the first folding mirror and the second folding mirror are coated with a reflection film of the required wavelength, and the reflectivity is greater than 99.9%.

3. An adjustment method for a laser spot dynamic detection and rapid adjustment device according to any one of claims 1-2, characterized in that: It includes the following steps: S01. Generate a first test optical path and a second test optical path of the incident laser beam, and block the second test optical path through the light blocker so that the CCD sensor can only measure the laser beam irradiating along the first test optical path; S02. Switch the positions of the first parallel plate and the second parallel plate to obtain three groups of measurement data without passing through both, passing through one of them, and passing through both, and based on the three groups of measurement data, obtain the initial roundness and initial astigmatism of the laser beam reflected onto the CCD sensor; S03. According to the obtained initial roundness, start the positive lens rotation mechanism, and adjust the roundness by adjusting the tilt of the positive lens, while the CCD sensor measures in real time until the measured roundness meets the set requirements, and then turn off the positive lens rotation mechanism; S04. Then, according to the obtained initial astigmatism, start the prism rotation mechanism, and adjust the astigmatism by adjusting the tilt of the prism, while the CCD sensor measures in real time until the measured astigmatism meets the set requirements, and then turn off the prism rotation mechanism; S05. Continue to block the second test optical path with the light barrier, define a coordinate axis on the plane where the light beam for detection by the CCD sensor is irradiated, with the X-axis and Y-axis representing the horizontal and vertical directions respectively. Then measure the position of the focused spot of the first optical path formed by the laser beam reflected by the first folding mirror through the CCD sensor. At the same time, adjust the first adjustment mirror according to the positions of the center point of the focused spot of the first optical path and the center point of the coordinate axis until the center point of the focused spot of the first optical path coincides with the center point of the coordinate axis; S06. Adjust the position of the light barrier to block the first test optical path, then measure the position of the focused spot of the second optical path formed by the laser beam reflected by the second folding mirror through the CCD sensor. At the same time, adjust the second adjustment mirror according to the positions of the center point of the focused spot of the second optical path and the center point of the coordinate axis until the center point of the focused spot of the second optical path coincides with the center point of the coordinate axis; S07. After the center points of the focused spots of the first optical path and the second optical path both coincide with the center point of the coordinate axis, the first test optical path and the second test optical path are output in a coaxial manner.

4. The adjustment method of the laser spot dynamic detection and rapid adjustment device according to claim 3, characterized in that: Step S02 includes: S021. Guide the first parallel plate and the second parallel plate to avoid the first test optical path, and the CCD sensor directly detects the incoming first test optical path to obtain a first set of data, namely the spot roundness and astigmatism value after the laser beam waist; S022. Guide one of the first parallel plate and the second parallel plate into the first test optical path, so that the laser beam passes through the first parallel plate or the second parallel plate and then reaches the CCD sensor to obtain a second set of data, namely the spot roundness and astigmatism value of the laser beam waist; S023. Guide the first parallel plate and the second parallel plate into the first test optical path, so that the laser beam passes through the first parallel plate and the second parallel plate and then reaches the CCD sensor to obtain a third set of data, namely the spot roundness and astigmatism value before the laser beam waist; S024. Use the obtained three sets of data and apply the theory of Gaussian optics to obtain a detailed description of the laser beam; The detailed description of the laser beam includes the beam waist radius, roundness and astigmatism.

5. The adjusting method of the laser spot dynamic detection and rapid adjustment device according to claim 3, characterized in that: Step S03 includes: S031. Establish a functional relationship between the incident angle of the positive lens when the laser beam passes through and the spot roundness of the laser; S032. Based on the spot roundness of the laser beam before incidence and in combination with the functional relationship between the incident angle of the positive lens and the spot roundness of the laser, adjust the tilt angle of the positive lens until the spot roundness of the laser detected by the CCD sensor meets the requirements and then stop the adjustment.

6. The adjustment method of the laser spot dynamic detection and rapid adjustment device according to claim 5, characterized in that: Step S031 includes: S311. Select a positive lens with a fixed design and obtain the curvature radius of the positive lens; S312. Obtain the meridional plane transmission matrix and the sagittal plane transmission matrix in the ray transmission matrix of the positive lens, where the meridional plane transmission matrix is: The sagittal plane transmission matrix is: S313. Calculate using the meridional plane transmission matrix and the sagittal plane transmission matrix to obtain the meridional plane waist size and the sagittal plane waist size of the laser beam after transformation by the tilted lens; wherein, the meridional plane waist size and the sagittal plane waist size of the transformed laser beam are functions of the incident angle θ1 of the positive lens. S314. According to the measured roundness of the laser spot before incidence, the tilt angle of the positive lens can be adjusted, that is, the incident angle θ1 of the positive lens is adjusted. S315. After the laser beam is transformed by the positive lens, when the laser beam waist is consistent in the meridional plane and the sagittal plane, stop adjusting the laser roundness. Wherein, θ1 is the incident angle of the positive lens. n is the relative refractive index of the laser beam with a known wavelength passing through the current material. R1 is the curvature radius of the first surface of the positive lens, that is, the curvature radius of the surface entering the positive lens. R2 is the curvature radius of the second surface of the positive lens, that is, the curvature radius of the surface exiting the positive lens.

7. The adjusting method of the laser spot dynamic detection and rapid adjustment device according to claim 3, characterized in that: Step S04 includes: S041. Obtain a prism processed into a wedge shape and guide the beam through the prism processed into a wedge shape. S042. Obtain the meridional plane transmission matrix and the sagittal plane transmission matrix in the ray transmission matrix of the prism processed into a wedge shape, where the meridional plane transmission matrix is: The sagittal plane transmission matrix is: After guiding the laser light speed to pass through the prism and the equivalent transformation of the meridional plane transmission matrix after the transformation by the positive lens is The sagittal plane transmission matrix is S044. Obtain the astigmatism value compensated by the tilted prism and the tilted positive lens as DS = S3S - S3T. S045. According to the laser transmission matrix theory, BD + ACZ1 = 0, convert the astigmatism value DS = S3S - S3T into a functional relationship of the astigmatism value DS and the incident angles θ1 of the positive lens and θ2 of the prism; S046. According to the incident angle θ1 of the positive lens determined in step S314 and the astigmatism to be achieved as required by the setting, obtain the value of the incident angle θ2 of the prism, wherein, sinθ2 = nsinα, sinθ2′ = nsinα′, β = α + α′, d = lsinα + lcosαtanα′; θ2 is the incident angle of the wedge prism, θ2' is the exit angle of the wedge prism, β is the wedge angle of the wedge prism, d is the optical path inside the prism, and I is the distance from the incident point to the vertex of the wedge prism. S1 is the distance from the incident beam waist position to the tilted lens, S2 is the distance from the tilted lens to the prism, S3T is the distance from the equivalent waist of the transformed meridional plane to the tilted lens, and S3S is the distance from the equivalent waist of the transformed sagittal plane to the tilted lens. Z1 is the incident light confocal parameter, and Z2 is the exit light confocal parameter. n is the relative refractive index of the laser beam with a known wavelength passing through the current material. α is the refraction angle of the laser beam entering the prism. α′ is the incident angle of the laser beam entering another surface from inside the prism.

8. The adjustment method of the laser spot dynamic detection and rapid adjustment device according to claim 7, characterized in that: The astigmatism to be achieved as required by the setting is approximately equal to 0.

9. The adjustment method of the laser spot dynamic detection and rapid adjustment device according to claim 7, characterized in that: The value of the incident angle θ2 of the prism is the tilt angle of the prism.

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