Finishing head

Abstract

The invention discloses a finishing head which comprises a finishing assembly and a base assembly used for bearing the finishing assembly, and the finishing assembly can rotate relative to the base assembly and vertically move to finish a polishing pad. A sensor is arranged in the finishing head to monitor the vertical position of the finishing assembly relative to the base assembly. The trimming head is used for trimming and activating the polishing pad in the chemical mechanical polishing equipment and is reasonable in structure, the sensor is arranged in the trimming head to monitor the vertical position of the trimming assembly relative to the base assembly in real time, the distance between the bottom face of the trimming assembly and the polishing pad is obtained in real time, and therefore the good trimming effect is guaranteed.

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