Clamping device and cleaning apparatus

By designing a clamping device with support and positioning components forming a predetermined angle, fused silica elements are suspended and clamped, solving the problems of complex structure and limited applicability in existing technologies, and realizing comprehensive cleaning and efficient production of multi-specification fused silica elements.

CN119926936BActive Publication Date: 2026-07-24BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
Filing Date
2025-01-24
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

Existing fused silica element clamping facilities are complex in structure, inconvenient to operate, have a limited range of applications, and are difficult to be compatible with fused silica elements of various sizes, resulting in poor cleaning effect.

Method used

A clamping device is designed that utilizes a support member and a positioning member to form a predetermined angle, and clamps the fused silica element by its own weight. The support member and the positioning member support the side of the fused silica element in a line contact manner, which can be adapted to elements of different sizes, and the stability is improved by adjustable rod members and connecting parts.

Benefits of technology

It enables comprehensive cleaning of fused silica elements, improves cleaning efficiency and the applicability of the equipment, reduces operational difficulty, and enhances equipment compatibility and production efficiency.

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Abstract

The application relates to the technical field of fused quartz equipment, in particular to a clamping device and a cleaning equipment. According to the clamping device, the fused quartz element can be clamped in a manner of being suspended and not contacting a supporting member by utilizing the self weight of the fused quartz element, cooperating with a first supporting part and a second supporting part and a first positioning member and a second positioning member, so that when the fused quartz element is cleaned, the outer surface of the fused quartz element is more exposed due to the fact that the fused quartz element does not contact the supporting member, and the fused quartz element can be more comprehensively cleaned.
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