Display device, display panel and manufacturing method of display device
Patent Information
- Application Number
- CN202380009231.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-05-26
- Publication Date
- 2025-05-06
AI Technical Summary
Existing display devices cannot meet the high demands of users for display effects, especially in terms of trade-offs between light output uniformity and brightness.
By introducing a multi-layer color film structure into the color film layer of the display device, wherein the surface roughness of at least one color film is greater than that of the other color films, combined with the design of the lens and the flat layer, a color film layer with higher roughness is formed to improve Light emanation uniformity, and the calf horn breaking difference is reduced through the re-engraving process, simplifying the process structure.
The light uniformity and brightness of the display effect are improved, the color offset problem is reduced, the manufacturing process is simplified, the flatness of the color film layer is enhanced, and the high color gamut and transmittance are ensured.
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Figure CN119949069A_ABST
Abstract
Description
Display device, display panel, and method for manufacturing display device Technical Field
[0001] The present disclosure relates to the field of display technology, and in particular to a display device, a display panel, and a method for manufacturing the display device. Background Art
[0002] With the development of display technology, the requirements for display devices are getting higher and higher. The display effect of a display device is largely related to the structure of the display device, but most display devices currently cannot meet the users' growing demand for display effects.
[0003] Summary of the Invention
[0004] Embodiments of the present disclosure provide a display device, a display panel, and a method for manufacturing the display device.
[0005] According to one aspect of the present disclosure, there is provided a display device, comprising:
[0006] substrate;
[0007] a plurality of light-emitting units located on the base substrate, each light-emitting unit comprising a first electrode, a second electrode, and a light-emitting layer located between the first electrode and the second electrode, wherein the first electrode is located between the light-emitting layer and the base substrate;
[0008] an encapsulation layer, covering the plurality of light-emitting units;
[0009] The color filter layer is located on a side of the encapsulation layer away from the base substrate. The color filter layer includes a first surface and a second surface opposite to each other in a direction perpendicular to the base substrate. The roughness of the first surface is greater than that of the second surface.
[0010] For example, the first surface is farther from the base substrate than the second surface.
[0011] For example, the color filter layer includes multiple color filters corresponding one-to-one to the multiple light-emitting units, wherein the roughness of at least part of the surface of at least one color filter away from the base substrate is greater than the surface roughness of other color filters away from the base substrate.
[0012] For example, the multiple color filters include a first color filter, a second color filter and a third color filter, wherein the roughness of at least part of the surface of the first color filter on the side away from the base substrate is greater than the surface roughness of the second color filter and the third color filter on the side away from the base substrate.
[0013] For example, the surface of the first color film on the side away from the base substrate includes a first central area and a first edge area surrounding the first central area, wherein the roughness of the first edge area is greater than the surface roughness of the second color film and the third color film on the side away from the base substrate.
[0014] For example, the roughness of the surface of the first color filter on the side away from the base substrate decreases from the edge to the center, so that the average roughness of the first edge area of the first color filter is greater than the average roughness of the first center area.
[0015] For example, the roughness of the first central region is in the range of 50 nm to 150 nm, and the roughness of the first edge region is in the range of 150 nm to 200 nm.
[0016] For example, the surface of the second color filter on the side away from the base substrate includes a second central area and a second edge area surrounding the second central area, wherein the roughness of the second edge area is smaller than that of the second central area.
[0017] For example, the roughness of the first edge region of the first color filter is greater than the roughness of the second center region of the second color filter.
[0018] For example, the surface of the third color film at the side away from the base substrate has substantially uniform roughness.
[0019] For example, the roughness of the second central area of the second color filter is greater than the roughness of the third color filter.
[0020] For example, the first color film, the second color film and the third color film are arranged in a direction parallel to the base substrate and overlap with each other, wherein the thickness difference between the first color film, the second color film and the third color film is smaller than the width of the overlapping part between the first color film, the second color film and the third color film, and the width of the overlapping part is the size of the overlapping part in the direction parallel to the base substrate.
[0021] For example, the first color film is located between the second color film and the third color film, and partially covers the second color film and the third color film, so that the part of the first color film covering the second color film forms a first bulge, and the part of the first color film covering the third color film forms a second bulge.
[0022] For example, each of the first protrusion and the second protrusion has a lower surface facing the base substrate and an upper surface facing away from the base substrate, wherein the roughness of the lower surface is smaller than that of the upper surface.
[0023] For example, the display device further includes: a plurality of lenses, which are located on a side of the color filter layer away from the base substrate and correspond one-to-one to the plurality of light-emitting units.
[0024] For example, the display device further includes: a first flat layer, the first flat layer being located on a side of the color filter layer away from the base substrate, wherein the color filter layer includes a plurality of color filters corresponding one-to-one to the plurality of light-emitting units, the plurality of color filters being arranged in a direction parallel to the base substrate and overlapping with each other, wherein a ratio of a thickness of the first flat layer to a width of overlapping portions between the plurality of color filters is in a range of 1 to 1.8.
[0025] For example, a plurality of lenses corresponding one-to-one to the plurality of color filters are arranged on a side of the first flat layer away from the base substrate.
[0026] For example, the display device further includes: a second flat layer, which is located between the color filter layer and the encapsulation layer, wherein the thickness of the second flat layer is less than the thickness of the first flat layer, and the thickness difference between the multiple color filters is less than the thickness of the second flat layer.
[0027] For example, the average thickness of the color filter layer is less than 1.3 μm, and the thickness difference between the plurality of color filters is less than 100 nm.
[0028] For example, the first color filter is a green color filter, the second color filter is a red color filter, and the third color filter is a blue color filter.
[0029] According to another aspect of the present disclosure, there is further provided a display device, comprising:
[0030] substrate;
[0031] a plurality of light-emitting units located on the base substrate, each light-emitting unit comprising a first electrode, a second electrode, and a light-emitting layer located between the first electrode and the second electrode, wherein the first electrode is located between the light-emitting layer and the base substrate;
[0032] an encapsulation layer, covering the plurality of light-emitting units;
[0033] A color filter layer is located on a side of the encapsulation layer away from the base substrate, the color filter layer including a first surface and a second surface opposite to each other in a direction perpendicular to the base substrate, the first surface and the second surface both having micro-protrusions, wherein the size of the micro-protrusions on the first surface is larger than the size of the micro-protrusions on the second surface, wherein the micro-protrusion size is the size of the micro-protrusions in a direction perpendicular to the base substrate.
[0034] For example, the first surface is farther from the base substrate than the second surface.
[0035] For example, the size of the micro protrusions of the first surface is in the range of 5 nm to 20 nm.
[0036] For example, the color filter layer includes a first color filter, a second color filter and a third color filter, wherein the micro-protrusion size of at least part of the surface of the first color filter on the side away from the base substrate is larger than the micro-protrusion size of the second color filter and the third color filter on the side away from the base substrate.
[0037] For example, the first color film includes a first central area and a first edge area surrounding the first central area on the surface away from the base substrate, wherein the micro-protrusion size of the first edge area is larger than the micro-protrusion size of the second color film and the third color film on the surface away from the base substrate.
[0038] For example, the sizes of the multiple micro-protrusions on the surface of the first color film on the side away from the base substrate decrease from the edge to the center of the first color film, so that the average size of the multiple micro-protrusions in the first edge area of the first color film is greater than the average size of the multiple micro-protrusions in the first center area.
[0039] For example, the second color film includes a second central area and a second edge area surrounding the second central area on the surface away from the base substrate, wherein the micro-protrusion size of the second edge area is smaller than the micro-protrusion size of the second central area, and the micro-protrusion size of the first edge area of the first color film is larger than the micro-protrusion size of the second central area of the second color film.
[0040] For example, the sizes of the micro-protrusions on the surface of the third color filter away from the base substrate are substantially the same, and the size of the micro-protrusions in the second central region of the second color filter is larger than the size of the micro-protrusions of the third color filter.
[0041] For example, the first color film, the second color film and the third color film are arranged in a direction parallel to the base substrate and overlap with each other, wherein the thickness difference between the first color film, the second color film and the third color film is smaller than the width of the overlapping part between the first color film, the second color film and the third color film, and the width of the overlapping part is the size of the overlapping part in the direction parallel to the base substrate.
[0042] For example, the display device further includes:
[0043] a first flat layer, the first flat layer being located on a side of the color filter layer away from the base substrate, wherein the color filter layer comprises a plurality of color filters corresponding one-to-one to the plurality of light-emitting units, the plurality of color filters being arranged in a direction parallel to the base substrate and overlapping with each other, wherein a ratio of a thickness of the first flat layer to a width of overlapping portions of the plurality of color filters is in a range of 1 to 1.8; and
[0044] A second flat layer is located between the color filter layer and the encapsulation layer, wherein the thickness of the second flat layer is less than that of the first flat layer, and the difference in thickness between the plurality of color filters is less than the thickness of the second flat layer.
[0045] According to another aspect of the present disclosure, a display panel is provided, comprising a plurality of the display devices described above.
[0046] For example, the display panel includes a display area and a peripheral area located on at least one side of the display area, the display device is located in the display area, and a light-shielding layer is provided in the peripheral area, wherein the light-shielding layer includes multiple sublayers stacked in a direction perpendicular to the base substrate, each sublayer and one of the multiple color films in the color film layer are made of the same material, wherein the surface roughness of the top sublayer on the side away from the base substrate is greater than the surface roughness of other sublayers, and the top sublayer is the sublayer farthest from the base substrate among the multiple sublayers.
[0047] For example, the top sublayer has a fourth central region and a fourth edge region surrounding the fourth central region on a surface away from the substrate, and the roughness of the fourth central region is greater than that of the fourth edge region.
[0048] For example, the peripheral area surrounds the display area, and the light shielding layer extends along the peripheral area, so that the projection of the light shielding layer on the base substrate has a ring-shaped strip.
[0049] According to another aspect of the present disclosure, there is also provided a method for manufacturing the display device as described above, comprising:
[0050] forming a plurality of light-emitting units on a base substrate;
[0051] forming an encapsulation layer covering the at least one light-emitting unit;
[0052] forming a color filter material layer on a side of the encapsulation layer away from the base substrate;
[0053] coating a photosensitive material on the color filter material layer so that the color filter material layer is completely covered by the photosensitive material;
[0054] The photosensitive material and a portion of the color filter material layer are removed by an etch-back process to obtain a color filter layer, wherein the color filter layer includes a first surface and a second surface opposite to each other in a direction perpendicular to the base substrate, and the roughness of the first surface is greater than the roughness of the second surface.
[0055] For example, the method further includes: forming a plurality of lenses corresponding one-to-one to the plurality of light-emitting units on a side of the color filter layer away from the base substrate.
[0056] For example, the photosensitive material is photoresist, and the etching selection ratio of the photoresist to the material in the color filter material layer is substantially 1:1.
[0057] For example, removing the photosensitive material and a portion of the color filter material layer by an etching back process includes:
[0058] performing etching on the color filter material layer coated with the photosensitive material until the color filter material layer is thinned to a first thickness;
[0059] The color filter material layer of the first thickness is over-etched until the color filter material layer is further thinned to a second thickness.
[0060] For example, the method further includes: before forming the plurality of lenses, forming a first flat layer on the color filter layer. BRIEF DESCRIPTION OF THE DRAWINGS
[0061] FIG1 shows a schematic structural diagram of a display device according to an embodiment of the present disclosure.
[0062] FIG2A is a schematic diagram showing a cross section of a color film according to an embodiment of the present disclosure.
[0063] FIG. 2B shows a top view of a color film according to an embodiment of the present disclosure.
[0064] FIG. 3A shows a partially enlarged view of a display device according to an embodiment of the present disclosure.
[0065] FIG. 3B shows a partially enlarged view of a display device according to another embodiment of the present disclosure.
[0066] FIG4 shows a flow chart of a method for manufacturing a display device according to an embodiment of the present disclosure.
[0067] 5A to 5F illustrate a manufacturing process of a display device according to an embodiment of the present disclosure.
[0068] FIG6A shows a measurement result of the H-direction color shift viewing angle of the display device according to an embodiment of the present disclosure with a lens.
[0069] FIG6B shows a measurement result of the color shift viewing angle in the V direction of the display device according to an embodiment of the present disclosure with a lens.
[0070] FIG. 7A shows a measurement result of the H-direction color shift viewing angle of the display device according to an embodiment of the present disclosure without a lens.
[0071] FIG7B shows a measurement result of the color shift viewing angle in the V direction of the display device according to an embodiment of the present disclosure without a lens.
[0072] FIG8 shows a schematic cross-sectional view of a display panel according to an embodiment of the present disclosure.
[0073] FIG9 shows a schematic plan view of a display panel according to an embodiment of the present disclosure. DETAILED DESCRIPTION
[0074] While the present disclosure will be fully described with reference to the accompanying drawings that contain preferred embodiments of the present disclosure, it should be understood before this description that one of ordinary skill in the art may modify the disclosure described herein while still achieving the technical benefits of the present disclosure. Therefore, it should be understood that the above description is intended to be a broad disclosure for one of ordinary skill in the art and is not intended to limit the exemplary embodiments described herein.
[0075] In addition, in the following detailed description, for ease of explanation, numerous specific details are set forth to provide a comprehensive understanding of the disclosed embodiments. However, it is apparent that one or more embodiments can be practiced without these specific details. In other cases, well-known structures and devices are shown in diagrammatic form to simplify the accompanying drawings.
[0076] FIG1 is a schematic structural diagram of a display device according to an embodiment of the present disclosure. As shown in FIG1 , the display device includes a base substrate 110 , a plurality of light-emitting units Px1 to Px3 , an encapsulation layer 120 , and a color filter layer 130 .
[0077] Multiple light-emitting cells Px1 to Px3 are located on a base substrate 110. FIG1 illustrates three light-emitting cells Px1, Px2, and Px3 for illustrative purposes. However, the present disclosure is not limited thereto, and the display device may include any number of light-emitting cells as needed. Each light-emitting cell Px1, Px2, and Px3 includes a first electrode E1, a second electrode E2, and a light-emitting layer EM located between the first electrode E1 and the second electrode E2. The first electrode E1 is located between the light-emitting layer EM and the base substrate 110.
[0078] The encapsulation layer 120 covers the plurality of light-emitting units Px1, Px2, and Px3. The encapsulation layer may be a multi-layer structure. In some embodiments, the encapsulation layer may be made of organic and / or inorganic materials, for example, a three-layer structure such as SiN+Al2O3+SiN.
[0079] The color filter layer 130 is located on the side of the encapsulation layer 120 away from the base substrate 110. As shown in FIG1 , the color filter layer 130 includes a first surface and a second surface that are opposite each other in a direction perpendicular to the base substrate 110, wherein the roughness of the first surface is greater than that of the second surface. In other embodiments, both the first and second surfaces (the upper and lower surfaces in FIG1 ) of the color filter layer 130 have micro-protrusions, wherein the micro-protrusions on the first surface are larger than those on the second surface. The micro-protrusion size here refers to the size of the micro-protrusions in a direction perpendicular to the base substrate 110. In some embodiments, the size of the micro-protrusions Bm on the first surface of the color filter layer 130 ranges from 5 nm to 20 nm.
[0080] The first surface of the color filter layer 130 is farther from the base substrate 110 than the second surface. For example, in Figure 1, the first surface is the surface of the color filter layer 130 facing away from the base substrate 110, i.e., the upper surface, while the second surface is the surface of the color filter layer 130 facing closer to the base substrate 110, i.e., the lower surface. During the formation of the color filter layer 130, for example, a dry etching process may be incorporated. During the dry etching process, the upper surface's roughness increases due to the dry etching, while the lower surface's roughness remains unchanged due to the lack of dry etching. This results in the upper surface of the color filter layer 130 having a greater roughness than the lower surface. In some embodiments, the color filter layer 130 may include a plurality of color filters CF1, CF2, and CF3 corresponding to the plurality of light-emitting units Px1, Px2, and Px3. Furthermore, the color filter layer 130 may also include a glass substrate, a black matrix BM, a protective layer OC, an ITO conductive film, columnar spacers, and the like. The composition and structure of the color filter layer may vary slightly depending on the display mode. Color filters CF1, CF2, and CF3 can be arranged in stripes, dots, triangles, mosaics, or other specific patterns (such as portraits or animal images). Stripes and dots are generally used for large, high-definition products. Triangles and mosaics are generally used for small, low-definition products. Chromaticity and transmittance are the two main optical properties of the color filter layer and are primarily determined by the color filter material.
[0081] According to an embodiment of the present disclosure, the roughness of at least a portion of the surface of at least one of the multiple color filters CF1, CF2, and CF3 on the side away from the base substrate 110 is greater than the surface roughness of the other color filters on the side away from the base substrate. For example, the color filter layer 130 may include a first color filter CF1, a second color filter CF2, and a third color filter CF3. The first color filter CF1 may be a green color filter, the second color filter CF2 may be a red color filter, and the third color filter CF3 may be a blue color filter. The surface of the first color filter CF1 on the side away from the base substrate 110 is represented by S1, the surface of the second color filter CF2 on the side away from the base substrate 110 is represented by S2, and the surface of the third color filter CF3 on the side away from the base substrate 110 is represented by S3. In Figure 1, the first surface of the color filter layer 130 may include the surfaces S1, S2, and S3 of the aforementioned color filters. The roughness of the first surface of the color filter layer 130 may be the average of the roughness of the surfaces of the individual color filters. Of course, the embodiments of the present disclosure are not limited to this. The roughness of the first surface of the color filter layer 130 can be calculated in any manner as needed. For example, the maximum roughness at each location on the first surface of the color filter layer 130 can be used as the roughness of the first surface of the color filter layer 130, or the average roughness of the roughest surface among the color filter surfaces S1, S2, and S3 of the color filter layer 130 can be used as the roughness of the first surface of the color filter layer 130, and so on. In some embodiments, the roughness of at least a portion of the surface S1 of the first color filter CF1 is greater than the roughness of the surface S2 of the second color filter CF2 and the surface S3 of the third color filter CF3. For example, the roughness of at least a portion of the surface S1 of the first color filter CF1 is in the range of 150nm to 200nm, while the roughness of the surface S2 of the second color filter CF2 and the surface S3 of the third color filter CF3 is less than 100nm. Currently, the color filters of most display devices have a relatively low roughness after processing, typically less than 100nm. This results in poor light uniformity. The embodiments of the present disclosure implement a display device that improves the display effect by making the roughness of the first surface of the color filter layer 130 greater than the roughness of the second surface, which is beneficial to the uniformity of light emission. For example, in some embodiments, at least a portion of the surface of at least one color filter in the color filter layer 130 reaches a roughness of 150nm to 200nm, which improves the uniformity of light emission to a certain extent while balancing the brightness of the light emission. In some embodiments, the average thickness of the color filter layer 130 is less than 1.3μm, for example, it can be in the range of 1.2μm±0.1μm. The thickness difference between each color filter CF1, CF2 and CF3 in the color filter layer 130 can be less than 100nm, for example, it can be less than 60nm.
[0082] In some embodiments, the display device may further include a plurality of lenses Lens1 to Lens3. The plurality of lenses Lens1 to Lens3 are located on the side of the color filter layer 130 away from the base substrate 110, and correspond one-to-one to the plurality of color filters CF1, CF2, and CF3. The so-called one-to-one correspondence here may mean that each color filter is provided with a corresponding lens on the side away from the substrate. The arrangement of the plurality of lenses Lens1 to Lens3 may be consistent with the color filters CF1 to CF3, such as a strip arrangement, a dot arrangement, a triangle arrangement, or a mosaic arrangement. In this way, each light-emitting unit and the corresponding color filter and lens above it form a light-emitting structure. The light emitted by the light-emitting unit becomes light of the color of the color filter after passing through the color filter, and then is converged by the lens to increase the brightness. For example, after emitting white light, the light-emitting units Px1 to Px3 pass through the color filters CF1 to CF3 of different colors to form different colors of light of the display panel 100.
[0083] In some embodiments, the display device may further include a first planar layer 140. The first planar layer 140 is located on a side of the color filter layer 130 away from the base substrate 110. In some embodiments, when multiple lenses Lens 1 to Lens 3 are present, the first planar layer 140 is located between the color filter layer 130 and the multiple lenses Lens 1 to Lens 3, as shown in FIG1 . The color filter layer 130 may be covered by the first planar layer.
[0084] In some embodiments, the display device may further include a second planar layer 150. The second planar layer is located between the color filter layer 130 and the encapsulation layer 120, wherein the thickness of the second planar layer is less than that of the first planar layer, and the thickness difference between the plurality of color filters is less than that of the second planar layer.
[0085] In some embodiments, a pixel defining layer 160 may be further disposed between the base substrate 110 and the light-emitting layer EM. The pixel defining layer 160 covers the edge of the first electrode (e.g., an anode) E1 of each light-emitting unit Px1 to Px3. The pixel defining layer 160 is used to define the plurality of light-emitting units Px1 to Px3 in the display device.
[0086] FIG2A shows a schematic diagram of a cross section of a color film according to an embodiment of the present disclosure; FIG2B shows a top view of the color film according to an embodiment of the present disclosure.
[0087] As shown in Figures 2A and 2B, the surface of the first color filter CF1 on the side away from the base substrate 110 includes a first central region S11 and a first edge region S12 surrounding the first central region S11. The roughness of the first edge region S12 is greater than the roughness of the surface S2 of the second color filter CF2 and the surface S3 of the third color filter CF3.
[0088] In some embodiments, the roughness of the first edge region S12 of the first color film CF1 is greater than the roughness of the first center region S11. For example, the roughness of the first edge region S12 is in the range of 150 nm to 200 nm, while the roughness of the first center region S11 is in the range of 50 nm to 150 nm. The roughness of a surface region herein can refer to an average roughness value, or it can refer to the roughness at a specific location, such as the roughness at any location within the region or at the geometric center. This is not limited in the present disclosure. In some embodiments, as shown in Figures 2A and 2B, the roughness of the surface S1 of the first color film CF1 on the side away from the substrate 110 decreases from the edge to the center, such that the average roughness of the first edge region S12 of the first color film CF1 is greater than the average roughness of the first center region S11. The surface S2 of the second color film CF2 on the side away from the substrate 110 may include a second center region S21 and a second edge region S22 surrounding the second center region S21. In some embodiments, as shown in Figures 2A and 2B, the roughness of the second edge region S22 is less than that of the second center region S21. In some embodiments, as shown in Figures 2A and 2B , the roughness of the first edge region S11 of the first color film CF1 is greater than the roughness of the second center region S21 of the second color film CF2. A surface S3 of the third color film CF3, located away from the base substrate 110, has substantially uniform roughness. In some embodiments, the roughness of the second center region S21 of the second color film CF2 is greater than the roughness of the third color film CF3, as shown in Figures 2A and 2B .
[0089] In other embodiments, each color filter CF1 to CF3 has a micro-bump Bm on the surface facing away from the base substrate, as shown in Figures 2A and 2B . For ease of description, only one micro-bump Bm is labeled in the figures. In some embodiments, the size of the micro-bump Bm on the surface facing away from the base substrate 110 of each color filter CF1 to CF3 ranges from 5 nm to 20 nm. As shown in Figure 2A , the size of the micro-bump Bm on at least a portion of the surface of the first color filter CF1 is larger than the size of the micro-bump Bm on the surfaces of the second and third color filters CF2 and CF3. The micro-bump size herein refers to the size of the micro-bump Bm in a direction perpendicular to the base substrate 110. For example, as shown in Figure 2A , the distance H between the highest and lowest points on the surface of a micro-bump Bm can be used as the micro-bump size. The highest point can be the point on the surface of the micro-bump Bm that is farthest from the base substrate 110 (also called the vertex), and the lowest point can be the lowest point of the concave structure formed between the micro-bump Bm and the adjacent micro-bump. As shown in Figure 2A, the size of the micro-protrusions Bm in the first edge region S12 of the first color film CF1 can be larger than the size of the micro-protrusions Bm in the first center region S11. The so-called micro-protrusion size within the region can be characterized by the average size of the multiple micro-protrusions in the region; it can also be characterized by the size of the micro-protrusions at a certain position in the region, for example, by the size of a micro-protrusion at any position in the region or at the geometric center of the region, or the average size of certain micro-protrusions. The presently disclosed embodiments are not limited to this. In some embodiments, as shown in Figures 2A and 2B, the size H of the multiple micro-protrusions Bm on the surface S1 of the first color film CF1 on the side away from the substrate 110 decreases from the edge to the center, so that the average size of the micro-protrusions Bm in the first edge region S12 is larger than the average size of the micro-protrusions Bm in the first center region S11. The micro-protrusions Bm in the second edge region S22 of the second color film CF2 are smaller than those in the second central region S21. The micro-protrusions Bm in the first edge region S12 of the first color film CF1 are larger than those in the second central region S21 of the second color film CF2. The micro-protrusions Bm on the surface S1 of the third color film CF3 are substantially the same in size, but may be smaller than those in the second central region S21 of the second color film CF2.
[0090] FIG2B shows the top view pattern of the color films CF1 to CF3 using a hexagon as an example. However, the embodiments of the present disclosure are not limited thereto. The top view pattern of the color films CF1 to CF3 can be set as needed, for example, a rectangle, a diamond or other shapes.
[0091] The color filter layer of the embodiment of the present disclosure undergoes a back-etching process during its formation. Due to the characteristics of the dry etching process, the surface of the color filter becomes rough, especially in the gaps between the color filters, where floccules are present, as shown in Figure 2B. During the etching of each color filter, the edges of the first color filter are etched more heavily, resulting in greater surface roughness. The middle area of the first color filter and the second and third color filters are etched less heavily, resulting in a relatively smooth surface. Compared to traditional display devices, the surface roughness of the color filter of the embodiment of the present disclosure is significantly greater.
[0092] Figure 3A shows a partially enlarged view of a display device according to an embodiment of the present disclosure. Figure 3A illustrates multiple display devices, with the color filters within each display device arranged in the order of CF1, CF2, and CF3, adjacent to each other, forming a color filter layout within the display panel. However, the embodiments of the present disclosure are not limited thereto. The color filter arrangement within each display device can be configured as needed, for example, with the second color filter CF2 positioned between the first color filter CF1 and the third color filter CF3, or with the first color filter CF1 positioned between the second color filter CF2 and the third color filter CF3, and so on. As shown in Figure 3A , the first, second, and third color filters CF1, CF2, and CF3 within the display device are arranged parallel to the substrate 110 and overlap with each other. The overlapping portions of the first, second, and third color filters CF1, CF2, and CF3 (as indicated by the dashed box in Figure 3A ) have a certain width. The width here refers to the dimension parallel to the substrate 110, or in Figure 3A , the dimension in the horizontal direction. Along the direction parallel to the substrate, curved interfaces are formed between adjacent color filters. In a direction perpendicular to the base substrate, the first, second, and third color films CF1, CF2, and CF3 have a small thickness difference. For example, this thickness difference can be less than the width of the overlapping portion of the first, second, and third color films CF1, CF2, and CF3. In other words, the ratio of the thickness difference to the overlapping width of the first, second, and third color films CF1, CF2, and CF3 is less than 1, for example, less than or equal to 0.8, or even less than or equal to 0.5. In some embodiments, the top surfaces (i.e., the surfaces facing away from the base substrate) of the first, second, and third color films CF1, CF3 can be substantially flush. For example, the height difference between the top surfaces of the color films can be controlled to be approximately 100 nm. For example, the first, second, and third color films CF1, CF2, and CF3 can have thicknesses D1, D2, and D3, respectively, with the difference between the thicknesses D1, D2, and D3 being less than 100 nm. For example, D1, D2, and D3 can be in the range of 1.1 μm to 1.3 μm. In some embodiments, D1 < D2 < D3. In some embodiments, the difference between D1 and D2 is in a range of 10 nm to 30 nm, and the difference between D2 and D3 is in a range of 20 nm to 50 nm. The color film thickness herein may refer to the average thickness of the color film, the thickness at a specific location, such as the thickness at the geometric center of the color film, or the maximum or minimum thickness of the color film. In some embodiments, the ratio of the thickness of the first planar layer 140 to the width of the overlapping portions of the plurality of color films CF1 to CF3 is in a range of 1 to 1.8. In other words, the thickness of the first planar layer 140 is greater than the overlapping width of the color films CF1 to CF3, but less than 1.8 times the overlapping width.
[0093] Figure 3B shows a partially enlarged view of a display device according to another embodiment of the present disclosure. As shown in Figure 3B , the first, second, and third color films CF1, CF2, and CF3 in the display device are also arranged parallel to the base substrate 110, with the first color film CF1 located between the second and third color films CF2 and CF3. Unlike Figure 3A , the first color film CF1 in Figure 3B partially covers the second and third color films CF2 and CF3, such that the portion of the first color film CF1 covering the second color film CF2 forms a first protrusion B12, and the portion of the first color film CF1 covering the third color film CF3 forms a second protrusion B21. In some embodiments, the first and second protrusions b1 and b2 each have a lower surface b2 facing the base substrate and an upper surface b1 facing away from the base substrate. The roughness of the lower surface b2 is less than that of the upper surface b1. This is because the color film layer undergoes an etch-back process during its formation, resulting in a higher roughness on the etched upper surface b1 than on the unetched lower surface b2. In some embodiments, the second color film CF2 also covers the edge of the third color film CF3 in another adjacent display device. The covering relationship between the first, second, and third color films depends on the order in which they are formed. For example, during the manufacturing process of each display device, the third color film is formed first, followed by the second color film, and finally the first color film. The second color film, which is formed later, covers the edge of the third color film, which is formed earlier. The first color film, which is formed last, fills the gap between the second and third color films and covers the edges of the adjacent second and third color films.
[0094] In other embodiments of the present disclosure, a display panel including the display device described above is also provided. A display panel is a panel capable of displaying information such as text, images, or videos. Examples of display panels include liquid crystal display panels (LCDs), organic light-emitting diode (OLED) display panels, organic light-emitting diode on silicon (OLEDoS) display panels, plasma display panels, and the like.
[0095] An embodiment of the present disclosure further provides a method for manufacturing a display device, which is applicable to manufacturing the display device of any of the above embodiments.
[0096] FIG. 4 shows a flow chart of a method for manufacturing a display device according to an embodiment of the present disclosure.
[0097] In step S110 , a plurality of light emitting units are formed on a base substrate.
[0098] In step S120 , an encapsulation layer covering the at least one light emitting unit is formed.
[0099] In step S130 , a color filter material layer is formed on a side of the encapsulation layer away from the base substrate, wherein the color filter material layer includes a plurality of color filter units corresponding one-to-one to the plurality of light-emitting units.
[0100] In step S140, a photosensitive material is coated on the color filter material layer so that the color filter material layer is completely covered by the photosensitive material. In some embodiments, the photosensitive material can be photoresist, and the etching selectivity ratio of the photoresist to the material in the color filter material layer can be substantially 1:1.
[0101] In step S150, the photosensitive material and a portion of the color filter material layer are removed by an etching back process to obtain a color filter layer, wherein the color filter layer includes a plurality of color filters corresponding one-to-one to the plurality of light-emitting units. The etching back can be performed using a dry etching method. In some embodiments, the color filter material layer coated with the photosensitive material can be etched until the color filter material layer is thinned to a first thickness; then, the color filter material layer of the first thickness is overetched until the color filter material layer is further thinned to a second thickness.
[0102] In some embodiments, after executing step S150, step S160 may be further executed to form a plurality of lenses corresponding to the plurality of color filters on a side of the color filter layer away from the base substrate.
[0103] In some embodiments, after step S150 is performed, a first flat layer may be formed on the color filter layer obtained in step S150, and then step S160 is performed to position the first flat layer between the color filter layer and the plurality of lenses.
[0104] In some embodiments, before performing step S130 , a second planar layer may be formed on the encapsulation layer. Then, step S130 is performed to form a color filter material layer on the second planar layer.
[0105] A method for manufacturing a display device according to an embodiment of the present disclosure will be described below with reference to FIG. 5A to FIG. 5F .
[0106] As shown in FIG. 5A , a plurality of light emitting units Px1 to Px3 , an encapsulation layer 120 and a second planarization layer 150 are sequentially formed on a base substrate 110 .
[0107] Then, a color filter material layer 130_1 is formed on the structure shown in Figure 5A, resulting in the structure shown in Figure 5B. As shown in Figure 5B, the color filter material layer 130_1 may include a plurality of color filter units CF1_1, CF1_2, and CF1_3 corresponding one-to-one to the plurality of light-emitting units Px1 to Px3. For example, the plurality of color filter units CF1_1, CF1_2, and CF1_3 may be made of green, red, and blue color filter materials, respectively. The green color filter unit CF1_1 covers a portion of the red and blue color filter units CF1_2 and CF1_3 on either side of it, thereby forming a double-sided raised structure.
[0108] Next, as shown in Figure 5C, a photosensitive material 170 is applied to the color filter material layer 130_1, completely covering the color filter material layer 130_1. This process can be achieved by executing step S140 described above. The thickness of the photosensitive material 170 is greater than the height of the protruding structures on both sides of the color filter cell CF1_1 in the color filter material layer 130, allowing the photosensitive material 170 to completely cover the color filter material layer 130_1, facilitating subsequent etching. The etching selectivity ratio between the photosensitive material 170 and the material in the color filter material layer 130_1 is substantially 1:1, ensuring that the etching rate of each color filter cell in the color filter material layer is substantially consistent with that of the photosensitive material during subsequent etching. In actual operation, due to differences in the materials of each color filter cell, there may be slight differences in the etching rate between the color filter cells, but this does not significantly affect the desired flatness of the entire color filter material layer.
[0109] 5D , the photosensitive material 170 and the color filter material layer 130_1 covered by it are etched until the color filter material layer 130_1 is thinned to a first thickness, thereby obtaining a color filter material layer 130_2 of a first thickness. The first thickness may be within the range of 1.4 μm ± 0.1 μm.
[0110] Next, as shown in FIG5E , the color filter material layer 130_2 of the first thickness is overetched until the color filter material layer 130_2 is further thinned to a second thickness, thereby obtaining a color filter layer 130 of the second thickness. The color filter layer 130 has a structure as described in any of the above embodiments. In some embodiments, the second thickness can be within the range of 1.2 μm ± 0.1 μm. By performing overetching, residual photoresist can be removed and the flatness of the color filter layer can be further improved. The etching depth can be set as needed to obtain the desired color filter layer surface structure. For example, the protrusions on both sides of the color filter unit CF1_1 in the color filter material layer (i.e., the so-called bull horn structure) can be completely removed, thereby obtaining a color filter layer surface with a high flatness as shown in FIG3A . As another example, the protrusions on both sides of the color filter unit CF_1 in the color filter material layer (i.e., the so-called bull horn structure) can be partially removed, thereby obtaining a color filter layer surface with a relatively low flatness as shown in FIG3B . 5C to 5E , the exposed upper surface of the color filter material layer undergoes dry etching, while the lower surface does not undergo dry etching. Therefore, the upper surface of the color filter layer 130 is rougher than the lower surface.
[0111] Next, as shown in FIG5F , a first flat layer 140 is formed on the color filter layer 130. Then, a plurality of lenses, Lens1, Lens2, and Lens3, corresponding one-to-one to the plurality of color filters CF1, CF2, and Cf3, are formed on the first flat layer 140. In some embodiments, if the flatness of the color filter layer 130 meets the required requirements, the first flat layer may not be formed, and the plurality of lenses, Lens1, Lens2, and Lens3, may be formed on the color filter layer 130.
[0112] In display technology, color shift is an important indicator for evaluating the performance of display devices. If the color shift viewing angle of a display device is small, color shift phenomena such as redness and greenness are more likely to occur as the viewing angle increases, affecting the visual effect. In display devices, especially high-PPI display devices such as silicon-based organic light-emitting diodes (OLEDoS, OLED on silicon), there is inevitably a surface height difference between the color filters corresponding to different pixels, which makes the color filter have a shape similar to a bull's horn in cross-section (concave in the middle and raised at the edges). This height difference is also called the bull's horn height or step difference. This step difference is usually in the range of 300nm to 630nm, resulting in different light emission effects of color filters of different colors at side viewing angles. The color shift value Δu′v′<0.025 corresponds to a viewing angle of less than about 17°. In addition, the color filter is usually formed in multiple times. When the later formed color filter fills the gap between the previously formed color filters, it will form a concave lens morphology, resulting in large viewing angle color shift. Under the premise of ensuring transmittance and brightness, in order to ensure the color gamut DCI-P3 ≥ 80%, the thickness of the weak cavity process color film is usually around 1.3±0.1μm.
[0113] The embodiments of the present disclosure can reduce or even remove the above-mentioned ox-horn discontinuity by adopting a back-etching process after forming the color filter material layer, thereby improving the flatness of the color filter layer surface and alleviating the color deviation problem. After experimental verification, the height of the discontinuity between different color filters can be controlled within 100nm. In addition, in traditional display devices, due to the poor flatness of the color filter surface, especially the large height of the ox-horn discontinuity, it is necessary to perform multiple flat layer formation processes to fill the discontinuity. The display device of the embodiment of the present disclosure improves the flatness of the color filter layer surface, thereby reducing the number of times the flat layer is formed, and even the flat layer on the surface of the color filter layer can be omitted, simplifying the device structure. At the same time, the back-etching process improves the roughness of the color filter layer surface, and strikes a balance between the brightness and uniformity of the light output, thereby improving the display effect.
[0114] FIG6A shows a diagram showing the measurement results of the color deviation viewing angle in the H direction of the display device of the embodiment of the present disclosure when it has a lens; FIG6B shows a diagram showing the measurement results of the color deviation viewing angle in the V direction of the display device of the embodiment of the present disclosure when it has a lens. As shown in FIG6A and FIG6B, when the thickness of the color filter layer of the display device of the embodiment of the present disclosure is 1.2±0.1um, the color deviation viewing angle corresponding to Δu′v′<0.025 in the H direction reaches about ±40°, which is significantly improved compared to the traditional structure. When the thickness of the color filter layer of the display device of the embodiment of the present disclosure is above 1.2um, the color gamut is greater than 80%. The display device of the embodiment of the present disclosure can still ensure the brightness and color point specifications under the premise of comprehensively considering the color point and transmittance. It has been verified that the full set of basic optical data of the display device of the embodiment of the present disclosure and the color deviation viewing angle sampling data of different positions of the wafer are better than the baseline conditions (the color deviation viewing angle corresponding to the baseline condition Δu′v′<0.025 is ±20 degrees).
[0115] Figure 7A shows the measured results of the color shift viewing angle in the H direction for a display device according to an embodiment of the present disclosure without a lens; Figure 7B shows the measured results of the color shift viewing angle in the V direction for a display device according to an embodiment of the present disclosure without a lens. As can be seen from Figures 7A and 7B, compared to the color shift viewing angles shown in Figures 6A and 6B for a display device with a lens, the color shift viewing angle for a display device without a lens is significantly greater, reaching approximately 70 degrees. This shows that removing the lens further improves color shift.
[0116] FIG8 is a schematic cross-sectional view of a display panel according to an embodiment of the present disclosure, and FIG9 is a schematic plan view of a display panel according to an embodiment of the present disclosure.
[0117] The display panel of the disclosed embodiments may include multiple display devices, each of which can be implemented by a display device from any of the above-described embodiments. For ease of description, FIG8 shows only one display device, which includes multiple sub-pixels SP1, SP2, and SP3. As shown in FIG8 , each sub-pixel SP1, SP2, and SP3 includes a corresponding light-emitting unit 810. Each light-emitting unit includes a first electrode E1, a second electrode E2, and a light-emitting layer EM positioned between the first and second electrodes E1 and E2. An encapsulation layer 120, a second planarization layer 150, a color filter layer 130, and a first planarization layer 140 are stacked sequentially on the light-emitting unit 810. Light generated by the light-emitting unit 810 has corresponding colors after passing through the color filters CF1, CF2, and CF3. For example, light passing through the color filter CF1 is green, light passing through the color filter CF2 is red, and light passing through the color filter CF3 is blue. A lens layer 820 may also be disposed above the first planarization layer 140. This lens layer 820 may include multiple lenses as described above, which will not be further described here.
[0118] As shown in FIG8 , the display panel includes a display area AA and a peripheral area EA located on at least one side of the display area AA. Display devices are located in the display area AA. For example, display devices including sub-pixels SP1, SP2, and SP3 are located in the display area AA. In some embodiments, each sub-pixel SP1, SP2, and SP3 may include a transistor T in addition to a light-emitting unit 810. The transistor T has a gate G, a source S, and a drain D. At least one of the source S and the drain D is connected to the first electrode E1 of the light-emitting unit 810 (in this embodiment, the first electrode E1 may be an anode) via a conductive layer 830. In some embodiments, the conductive layer 830 may include a first sub-layer 8301 and a second sub-layer 8302, which will not be described in detail here. The conductive layer 830 may also reflect light. Light generated by the light-emitting layer EM in the light-emitting unit 810 is reflected by the conductive layer 830 and then passes through the color-transmitting filter layer 130 and is emitted. In some embodiments, a dielectric layer 840 may be provided between the conductive layer 830 and the light-emitting unit 810.
[0119] As shown in FIG8 , a light shielding layer 850 is provided in the peripheral area EA of the display panel. Light shielding layer 850 may include multiple sublayers, such as sublayers 8501 and 8502, stacked perpendicular to the base substrate 10. The number of sublayers is not limited to two and may include, for example, three, four, or more sublayers. Each sublayer 8501 and 8502 is made of the same material as one of the multiple color filters CF1, CF2, and CF3 in the color filter layer 130. For example, sublayer 8501 may be made of the same material as color filter CF1, such as a green color filter material; and sublayer 8502 may be made of the same material as color filter CF2, such as a red color filter material. The stacking of sublayers 8501 and 8502 of different colors provides a light shielding effect, preventing light from the display area AA from escaping the peripheral area. In some embodiments, to enhance the light shielding effect, light shielding layer 850 may include more sublayers, such as a blue sublayer in addition to the green and red sublayers. In some embodiments, the top sublayer of each sublayer of the light shielding layer 850 has a surface roughness greater than that of the other sublayers on the side away from the base substrate 110. The top sublayer herein refers to the sublayer furthest from the base substrate 110 among the multiple sublayers (sublayer 8501 in FIG8 ). In some embodiments, the surface of the top sublayer 8501 on the side away from the base substrate 110 has a fourth central region and a fourth edge region surrounding the fourth central region, wherein the roughness of the fourth central region is greater than that of the fourth edge region. In some embodiments, a conductor layer 860 may also be provided in the peripheral area EA. The two sublayers 8601 and 8602 of the conductor layer 860 may be provided on the same layer as the two sublayers 8301 and 8302 of the conductor layer 830 in the display area AA. In some embodiments, the display panel may further include a peripheral area BA located on at least one side of the peripheral area, which will not be further described here. In some embodiments, the peripheral area EA surrounds the display area AA, and the light shielding layer 850 extends along the peripheral area EA, such that the projection of the light shielding layer 850 on the base substrate 110 has an annular strip shape, as shown in FIG9 .
[0120] During the process of forming the color filter material layers as shown in FIG5A , a third color filter material layer (e.g., blue) can be formed first in the display area AA and the peripheral area EA, followed by a second color filter material layer (e.g., red), and finally a first color filter material layer (e.g., green). The first color filter material layer will subsequently be used to form sublayer 8502 and color filter CF2, the second color filter material layer will subsequently be used to form sublayer 8501 and color filter CF1, and the third color filter material layer will subsequently be used to form color filter CF3. In the display area AA, the first to third color filter material layers are alternately arranged to subsequently form three color filters. In the peripheral area EA, the first and second color filter material layers are stacked to subsequently form a laminated light-shielding sublayer.
[0121] During the etching back process shown in Figures 5C to 5E , the exposed upper surfaces of the first to third color filter material layers in the display area AA are dry-etched, resulting in a surface structure such as that shown in Figures 2A and 2B . The first color filter material layer, formed last, has the largest exposed portion and is therefore etched to a greater extent, resulting in a relatively greater surface roughness. In the peripheral area EA, since the first and second color filter material layers are stacked, the top surface of the first color filter material layer undergoes dry etching, resulting in a relatively greater upper surface roughness of the first sub-layer 8501. The lower second color filter material layer does not undergo dry etching, resulting in a relatively less rough surface (both upper and lower) of the second sub-layer 8503. In display area AA, as shown in Figures 3A and 3B, the alternating color filters CF1 to CF3 each have a thinner center region than their edge regions. In peripheral area EA, the stacked arrangement of the first sublayer 8501 and the second sublayer 8502 creates a structure where the light shielding layer 850 is thicker at the center and thinner at the edges. This causes the center region of the top surface of the first sublayer 8501 to experience more etching than the edge regions, resulting in a greater surface roughness in the center region than at the edge regions. The above embodiment uses three-color sub-pixels as an example, but the embodiments of the present disclosure are not limited thereto and are applicable to sub-pixels of a wider range of colors.
[0122] Those skilled in the art will appreciate that the embodiments described above are exemplary and can be improved upon by those skilled in the art. The structures described in the various embodiments can be freely combined without causing any conflicts in structure or principle.
[0123] After describing the preferred embodiments of the present disclosure in detail, those skilled in the art will clearly understand that various changes and modifications may be made without departing from the scope and spirit of the appended claims, and that the present disclosure is not limited to the exemplary embodiments described in the specification.
Claims
1. A display device, comprising: substrate substrate; A plurality of light-emitting units are located on the substrate, wherein the light-emitting units have a first electrode, a second electrode, and a light-emitting layer located between the first electrode and the second electrode, wherein the first electrode is located between the light-emitting layer and the substrate; an encapsulation layer, covering the plurality of light-emitting units; The color filter layer is located on a side of the encapsulation layer away from the base substrate. The color filter layer includes a first surface and a second surface opposite to each other in a direction perpendicular to the base substrate. The roughness of the first surface is greater than that of the second surface.
2. The display device according to claim 1, wherein: The first surface is farther from the base substrate than the second surface.
3. The display device according to claim 1 or 2, wherein: The color film layer includes a plurality of color films corresponding to the plurality of light-emitting units, wherein at least a portion of the surface of at least one color film on a side away from the base substrate has a roughness greater than that of other color films on a side away from the base substrate.
4. The display device according to any one of claims 1 to 3, wherein: The plurality of color filters include a first color filter, a second color filter and a third color filter, wherein the roughness of at least a portion of the surface of the first color filter on a side away from the base substrate is greater than the surface roughness of the second color filter and the third color filter on a side away from the base substrate.
5. The display device according to claim 4, wherein: The surface of the first color film on the side away from the base substrate includes a first central area and a first edge area surrounding the first central area, wherein the roughness of the first edge area is greater than the surface roughness of the second color film and the third color film on the side away from the base substrate.
6. The display device according to claim 5, wherein: The roughness of the surface of the first color film on the side away from the base substrate decreases from the edge to the center, so that the average roughness of the first edge area of the first color film is greater than the average roughness of the first center area.
7. The display device according to claim 4, wherein: The roughness of the first central region is in the range of 50 nm to 150 nm, and the roughness of the first edge region is in the range of 150 nm to 200 nm.
8. The display device according to any one of claims 4 to 7, wherein: The surface of the second color film on the side away from the base substrate includes a second central area and a second edge area surrounding the second central area, wherein the roughness of the second edge area is smaller than that of the second central area.
9. The display device according to claim 8, wherein: The roughness of the first edge region of the first color film is greater than the roughness of the second center region of the second color film.
10. The display device according to any one of claims 4 to 9, wherein: The surface of the third color film at a side away from the base substrate has substantially uniform roughness.
11. The display device according to claim 10, wherein: The roughness of the second central area of the second color film is greater than the roughness of the third color film.
12. The display device according to any one of claims 4 to 11, wherein: The first color film, the second color film and the third color film are arranged in a direction parallel to the base substrate and overlap with each other, wherein the thickness difference between the first color film, the second color film and the third color film is smaller than the width of the overlapping part between the first color film, the second color film and the third color film, and the width of the overlapping part is the size of the overlapping part in the direction parallel to the base substrate.
13. The display device according to any one of claims 4 to 11, wherein: The first color film is located between the second color film and the third color film, and partially covers the second color film and the third color film, so that the part of the first color film covering the second color film forms a first bulge, and the part of the first color film covering the third color film forms a second bulge.
14. The display device according to claim 13, wherein: The first protrusion and the second protrusion each have a lower surface facing the base substrate and an upper surface away from the base substrate, wherein the roughness of the lower surface is smaller than that of the upper surface.
15. The display device according to any one of claims 1 to 14, further comprising: A plurality of lenses are located on a side of the color filter layer away from the base substrate and correspond one-to-one to the plurality of light-emitting units.
16. The display device according to any one of claims 1 to 15, further comprising: A first flat layer, wherein the first flat layer is located on a side of the color film layer away from the base substrate, wherein the color film layer includes a plurality of color films corresponding one to one to the plurality of light-emitting units, the plurality of color films are arranged in a direction parallel to the base substrate and overlap with each other, wherein a ratio of a thickness of the first flat layer to a width of an overlapping portion between the plurality of color films is in a range of 1 to 1.
8.
17. The display device according to claim 16, wherein: A plurality of lenses corresponding to the plurality of color filters are arranged on a side of the first flat layer away from the base substrate.
18. The display device according to claim 16, further comprising: A second flat layer is located between the color filter layer and the encapsulation layer, wherein the thickness of the second flat layer is less than that of the first flat layer, and the thickness difference between the plurality of color filters is less than that of the second flat layer.
19. The display device according to any one of claims 1 to 18, wherein: The average thickness of the color filter layer is less than 1.3 μm, and the thickness difference between the plurality of color filters is less than 100 nm.
20. The display device according to any one of claims 4 to 19, wherein: The first color filter is a green color filter, the second color filter is a red color filter, and the third color filter is a blue color filter.
21. A display device comprising: substrate substrate; A plurality of light-emitting units are located on the substrate, wherein the light-emitting units have a first electrode, a second electrode, and a light-emitting layer located between the first electrode and the second electrode, wherein the first electrode is located between the light-emitting layer and the substrate; an encapsulation layer, covering the plurality of light-emitting units; A color filter layer is located on a side of the encapsulation layer away from the substrate, the color filter layer includes a first surface and a second surface opposite to each other in a direction perpendicular to the substrate, the first surface and the second surface both have micro-protrusions, wherein the size of the micro-protrusions on the first surface is greater than the size of the micro-protrusions on the second surface, wherein the size of the micro-protrusions is the size of the micro-protrusions in a direction perpendicular to the substrate.
22. The display device according to claim 21, wherein: The first surface is farther from the base substrate than the second surface.
23. The display device according to claim 21 or 22, wherein: The size of the micro protrusions on the first surface is in the range of 5 nm to 20 nm.
24. The display device according to any one of claims 21 to 23, wherein: The color film layer includes a first color film, a second color film and a third color film, wherein the micro-protrusion size of at least a portion of the surface of the first color film on the side away from the base substrate is larger than the micro-protrusion size of the second color film and the third color film on the side away from the base substrate.
25. The display device according to claim 24, wherein: The first color film includes a first central area and a first edge area surrounding the first central area on a surface away from the substrate, wherein the size of the micro-protrusions in the first edge area is greater than the size of the micro-protrusions of the second color film and the third color film on the surface away from the substrate.
26. The display device according to claim 25, wherein: The sizes of the multiple micro-protrusions on the surface of the first color film on the side away from the base substrate decrease from the edge to the center of the first color film, so that the average size of the multiple micro-protrusions in the first edge area of the first color film is greater than the average size of the multiple micro-protrusions in the first center area.
27. The display device according to any one of claims 24 to 26, wherein: The second color film includes a second central area and a second edge area surrounding the second central area on a surface away from the base substrate, wherein the size of the micro-protrusions in the second edge area is smaller than the size of the micro-protrusions in the second central area, and the size of the micro-protrusions in the first edge area of the first color film is larger than the size of the micro-protrusions in the second central area of the second color film.
28. The display device according to any one of claims 24 to 27, wherein: The sizes of the micro-protrusions on the surface of the third color film at the side away from the base substrate are substantially the same, and the size of the micro-protrusions in the second central region of the second color film is larger than the size of the micro-protrusions of the third color film.
29. The display device according to any one of claims 24 to 28, wherein: The first color film, the second color film and the third color film are arranged in a direction parallel to the base substrate and overlap with each other, wherein the thickness difference between the first color film, the second color film and the third color film is smaller than the width of the overlapping part between the first color film, the second color film and the third color film, and the width of the overlapping part is the size of the overlapping part in the direction parallel to the base substrate.
30. The display device according to any one of claims 1 to 14, further comprising: a first flat layer, the first flat layer being located on a side of the color filter layer away from the base substrate, wherein the color filter layer comprises a plurality of color filters corresponding to the plurality of light-emitting units one by one, the plurality of color filters being arranged in a direction parallel to the base substrate and overlapping with each other, wherein a ratio of a thickness of the first flat layer to a width of an overlapping portion between the plurality of color filters is in a range of 1 to 1.8; as well as A second flat layer is located between the color filter layer and the encapsulation layer, wherein the thickness of the second flat layer is less than that of the first flat layer, and the thickness difference between the plurality of color filters is less than that of the second flat layer.
31. A display panel comprising a plurality of display devices according to any one of claims 1 to 30.
32. The display device according to claim 31, wherein: The display panel includes a display area and a peripheral area located at least on one side of the display area, the display device is located in the display area, and a light shielding layer is provided in the peripheral area. Among them, the shading layer includes multiple sub-layers stacked in a direction perpendicular to the base substrate, each sub-layer is made of the same material as one of the multiple color films in the color film layer, wherein the surface roughness of the top sub-layer on the side away from the base substrate is greater than the surface roughness of other sub-layers, and the top sub-layer is the sub-layer farthest from the base substrate among the multiple sub-layers.
33. The display device according to claim 32, wherein: The top sublayer has a fourth central region and a fourth edge region surrounding the fourth central region on a surface away from the substrate substrate, and the roughness of the fourth central region is greater than that of the fourth edge region.
34. A display device according to any one of claims 31 to 33, wherein: The peripheral area surrounds the display area, and the light shielding layer extends along the peripheral area, so that the projection of the light shielding layer on the base substrate has a ring-shaped strip.
35. A method for manufacturing a display device according to any one of claims 1 to 30, comprising: forming a plurality of light emitting units on a base substrate; forming an encapsulation layer covering the at least one light-emitting unit; Forming a color filter material layer on a side of the encapsulation layer away from the base substrate; Coating a photosensitive material on the color filter material layer so that the color filter material layer is completely covered by the photosensitive material; The photosensitive material and a portion of the color filter material layer are removed by an etching back process to obtain a color filter layer, wherein the color filter layer includes a first surface and a second surface opposite to each other in a direction perpendicular to the substrate, and the roughness of the first surface is greater than the roughness of the second surface.
36. The method of claim 35, further comprising: A plurality of lenses corresponding to the plurality of light-emitting units are formed on a side of the color filter layer away from the base substrate.
37. The method of claim 35, wherein: The photosensitive material is photoresist, and the etching selection ratio of the photoresist to the material in the color filter material layer is substantially 1:
1.
38. A method according to any one of claims 35 to 37, wherein: The removing of the photosensitive material and a portion of the color filter material layer by the back etching process comprises: Performing etching on the color filter material layer coated with the photosensitive material until the color filter material layer is thinned to a first thickness; The color filter material layer of the first thickness is over-etched until the color filter material layer is further thinned to a second thickness.
39. The method according to any one of claims 35 to 38, further comprising: Before forming the plurality of lenses, a first flat layer is formed on the color filter layer.