Vacuum chuck type crystal bar non-dropping gripping device and use method

Abstract

The application discloses a vacuum-sucker type crystal bar non-dropping gripper device, which comprises a main body, a cover, a vacuum adsorption module and a vacuum breaking module, the main body comprises a first support frame and a second support frame, the cover comprises a first cover and a second cover, the first support frame is provided with the first cover, the second support frame is provided with the second cover, and the lower portion of the first support frame is connected with the second support frame. The vacuum generator is adopted to generate negative pressure to the suction cup to adsorb and grab the crystal bar, the robot drives the gripper to the upper portion of the crystal bar to carry, the one-way valve and the logic valve are used to stably maintain the negative pressure of the suction cup during the carrying process, so that the crystal bar is not dropped after the air is broken, and the normally open electromagnetic valve is used to achieve the non-dropping of the crystal bar after the power is broken.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor technology, specifically relating to a vacuum suction cup type non-dropping crystal rod gripper device and its usage method. Background Technology

[0002] Crystal rod transportation generally uses mechanical grippers or vacuum chuck grippers. Mechanical grippers are prone to damaging the surface of crystal rods during use, while existing vacuum chuck grippers can cause crystal rods to fall during operation due to misoperation or power and gas interruption in emergency situations, resulting in personal injury and property damage. The stability of vacuum chuck grippers cannot be guaranteed. Summary of the Invention

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a vacuum suction cup type non-drop crystal rod gripper device and its usage method. This invention uses a vacuum generator to generate negative pressure to the suction cup to adsorb and grip the crystal rod. A robot drives the gripper above the crystal rod for transport. During the transport process, a one-way valve and a logic valve stabilize the negative pressure of the suction cup to prevent the crystal rod from falling when the air is cut off. A normally open solenoid valve ensures that the crystal rod does not fall off when the power is cut off.

[0004] To achieve the above-mentioned objectives, the technical solution provided by this invention patent is as follows:

[0005] A vacuum suction cup type non-drop crystal rod gripper device, the device includes a main body, a cover, a vacuum adsorption module and a vacuum breaking module. The main body includes a first support frame and a second support frame. The cover includes a first cover and a second cover. The first cover is provided on the first support frame and the second cover is provided on the second support frame. The lower part of the first support frame is connected to the second support frame.

[0006] The vacuum adsorption module includes a normally open solenoid valve, a vacuum generator, a valve seat, valve groups, and suction cup assemblies. Vacuum generators are respectively arranged on both sides of the upper end of the first support frame. A normally open solenoid valve is arranged on the first support frame inside each vacuum generator. The normally open solenoid valve controls the opening and closing of the air passage of the vacuum generator. The vacuum generator is connected to the valve seat through an air passage pipe. The valve seat is arranged on the upper part of the second support frame. Multiple valve groups are arranged at the lower end of the valve seat. Multiple suction cup assemblies are arranged at the bottom of the second support frame. The valve groups on the valve seat are respectively connected to the suction cup assemblies.

[0007] The vacuum breaking module includes a vacuum solenoid valve and a one-way valve. The vacuum solenoid valve is located on the upper end of the first support frame. The vacuum solenoid valve is connected to the one-way valve through a gas pipeline. The one-way valve is connected to the suction cup assembly.

[0008] Furthermore, a mounting plate is provided in the middle of the end face of the first support frame, and the mounting plate is connected to the robot gripper. Buffer connectors are provided at both ends of the first support frame, and the buffer connectors are located on one side of the vacuum generator. The buffer connectors connect the first support frame and the second support frame. The buffer connector is a telescopic shaft, with one end of the telescopic shaft connected and fixed to the first support frame, and the other end of the telescopic shaft connected and fixed to the second support frame. A buffer spring is also provided on the telescopic shaft. Fixing holes for fixed connection with the robot gripper are provided on the end face of the mounting plate.

[0009] Furthermore, the second support frame is a square frame structure. The upper panel of the second support frame is connected to the first support frame through a telescopic shaft. Two valve seats are arranged parallel to each other on the lower end face of the upper panel of the second support frame. Each valve seat is equipped with multiple valve groups. The valve groups include normally open solenoid valves and check valves. The normally open solenoid valves are connected to the check valves. Each valve group is connected to each suction cup assembly.

[0010] Furthermore, the suction cup assembly includes a logic valve and a suction cup. The suction cup is disposed at the bottom of the second support frame. Two rows of suction cups are arranged in parallel at the bottom of the second support frame. Each valve seat controls one row of suction cups. Each suction cup is provided with a logic valve. Each suction cup is connected to the valve group on the corresponding valve seat through an air passage pipe via the logic valve.

[0011] Furthermore, the one-way valve in the vacuum breaking module is mounted on the suction cup assembly.

[0012] Furthermore, each suction cup assembly is equipped with a pressure gauge. The pressure gauge detects the pressure change when the suction cup is adsorbed and transmits the detected pressure signal to the network control module. The network control module is located on the side of the first support frame. The network control module controls the opening and closing of the normally open solenoid valve of each valve group on the valve seat according to the pressure signal received from each suction cup assembly.

[0013] Furthermore, a hub is provided on one side of the second support frame, and the hub and the network control module are located on the same side.

[0014] A method for using a vacuum suction cup-type non-dropping crystal rod gripper device, the method specifically includes the following steps:

[0015] S1. Prepare a vacuum suction cup type non-drop crystal rod gripper device. The device includes a main body, a cover, a vacuum adsorption module and a vacuum breaking module. The main body includes a first support frame and a second support frame. The cover includes a first cover and a second cover. The first cover is provided on the first support frame and the second cover is provided on the second support frame. The lower part of the first support frame is connected to the second support frame.

[0016] The vacuum adsorption module includes a normally open solenoid valve, a vacuum generator, a valve seat, valve groups, and suction cup assemblies. Vacuum generators are respectively arranged on both sides of the upper end of the first support frame. A normally open solenoid valve is arranged on the first support frame inside each vacuum generator. The normally open solenoid valve controls the opening and closing of the air passage of the vacuum generator. The vacuum generator is connected to the valve seat through an air passage pipe. The valve seat is arranged on the upper part of the second support frame. Multiple valve groups are arranged at the lower end of the valve seat. Multiple suction cup assemblies are arranged at the bottom of the second support frame. The valve groups on the valve seat are respectively connected to the suction cup assemblies.

[0017] The vacuum breaking module includes a vacuum solenoid valve and a one-way valve. The vacuum solenoid valve is located on the upper end of the first support frame. The vacuum solenoid valve is connected to the one-way valve through a gas pipeline. The one-way valve is connected to the suction cup assembly.

[0018] S2, the robot gripper is fixedly connected to the mounting plate, the robot gripper moves the gripper device above the crystal rod to be adsorbed and moved, and the gripper device falls to connect the bottom suction cup with the top of the crystal rod;

[0019] S3, the two vacuum generators on the first support frame are started. The vacuum generators generate negative pressure to the valve seat. The valve seat divides the negative pressure air path to the normally open solenoid valve on each valve group, and then through the one-way valve to the suction cup assembly. The suction cup in the suction cup assembly generates adsorption force to adsorb the crystal rod.

[0020] S4, the pressure gauge on the suction cup assembly transmits the monitored pressure signal to the network control module. The network control module closes the normally open solenoid valve on the valve group corresponding to the suction cup assembly whose pressure has not reached the threshold, based on the received pressure signal.

[0021] S5, the robot gripper picks up the crystal rod and moves it to the required position. The vacuum solenoid valve is activated, and the vacuum solenoid valve controls the opening of the air path of the one-way valve in the vacuum breaking module of the suction cup assembly, so that the suction cup breaks the vacuum and eliminates the suction cup adsorption force. The gripper device separates from the crystal rod, completing the adsorption and transportation of the crystal rod.

[0022] Furthermore, the pressure generated by the vacuum generator is 0.2 MPa to 0.6 MPa.

[0023] Based on the above technical solution, the vacuum suction cup type non-dropping crystal rod gripper device and its usage method of this invention have achieved the following technical advantages through practical application:

[0024] 1. The present invention discloses a vacuum suction cup type non-drop crystal rod gripper device. The device uses a vacuum generator to generate negative pressure to the suction cup to adsorb and grip the crystal rod. A robot drives the gripper above the crystal rod for transport. During the transport process, a one-way valve and a logic valve stabilize the negative pressure of the suction cup to prevent the crystal rod from falling when the air is cut off. A normally open solenoid valve prevents the crystal rod from falling when the power is cut off. Attached Figure Description

[0025] Figure 1 This is a front sectional view of the gripper device in a vacuum suction cup type non-dropping crystal rod gripper device of the present invention.

[0026] Figure 2 This is a perspective view of the gripper device in a vacuum suction cup type non-falling crystal rod gripper device of the present invention. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this invention clearer, the invention is described below with reference to specific examples shown in the accompanying drawings. However, it should be understood that these descriptions are merely exemplary and not intended to limit the scope of the invention. Furthermore, descriptions of well-known structures and techniques are omitted in the following description to avoid unnecessarily obscuring the concept of the invention.

[0028] like Figure 1 and Figure 2 The present invention relates to a vacuum suction cup type non-drop crystal rod gripper device. The device includes a main body, a cover, a vacuum adsorption module and a vacuum breaking module. The main body includes a first support frame 41 and a second support frame 42. The cover includes a first cover 91 and a second cover 92. The first cover 91 is provided on the first support frame 41 and the second cover 92 is provided on the second support frame 42. The lower part of the first support frame 41 is connected to the second support frame 42.

[0029] The vacuum adsorption module includes a normally open solenoid valve 1, a vacuum generator 2, a valve seat 3, valve groups, and suction cup assemblies. Vacuum generators 2 are respectively arranged on both sides of the upper end of the first support frame 41. A normally open solenoid valve 1 is arranged on the first support frame 41 inside each vacuum generator 2. The normally open solenoid valve 1 controls the opening and closing of the air passage of the vacuum generator 2. The vacuum generator 2 is connected to the valve seat 3 through an air passage pipe. The valve seat 3 is arranged on the upper part of the second support frame 42. Multiple valve groups are arranged at the lower end of the valve seat 3. Multiple suction cup assemblies are arranged at the bottom of the second support frame 42. The valve groups on the valve seat 3 are respectively connected to the suction cup assemblies.

[0030] The vacuum breaking module includes a vacuum solenoid valve 10 and a one-way valve 5. The vacuum solenoid valve 10 is located on the upper end of the first support frame 41. The vacuum solenoid valve 10 is connected to the one-way valve 5 through a gas pipeline. The one-way valve 5 is connected to the suction cup assembly.

[0031] A mounting plate is provided at the middle of the end face of the first support frame 41. The mounting plate is connected to the robot gripper. Buffer connectors are provided at both ends of the first support frame. The buffer connectors are located on one side of the vacuum generator 2 and connect the first support frame and the second support frame. The buffer connector is a telescopic shaft. One end of the telescopic shaft is connected and fixed to the first support frame 41, and the other end of the telescopic shaft is connected and fixed to the second support frame 42. A buffer spring is also provided on the telescopic shaft. Fixing holes for fixed connection with the robot gripper are provided on the end face of the mounting plate.

[0032] The second support frame 42 is a square frame structure. The upper panel of the second support frame 42 is connected to the first support frame 41 through a telescopic shaft. Two valve seats 3 are arranged parallel to each other on the lower end face of the upper panel of the second support frame 42. Each valve seat 3 is equipped with multiple valve groups. The valve group includes a normally open solenoid valve 1 and a one-way valve 5. The normally open solenoid valve 1 is connected to the one-way valve 5. Each valve group is connected to each suction cup assembly.

[0033] The suction cup assembly includes a logic valve 6 and a suction cup 7. The suction cup 7 is located at the bottom of the second support frame 42. Two rows of suction cups 7 are arranged in parallel at the bottom of the second support frame 42. Each valve seat 3 controls one row of suction cups 7. Each suction cup 7 is provided with a logic valve 6. Each suction cup 7 is connected to the valve group on the corresponding valve seat 3 through the logic valve 6 via an air passage pipe.

[0034] The one-way valve 5 in the vacuum breaking module is installed on the suction cup assembly.

[0035] Pressure gauges 8 are respectively installed on the suction cup assembly. The pressure gauges 8 detect the pressure change when the suction cup 7 is adsorbed and transmit the detected pressure signal to the network control module 12. The network control module 12 is located on the side of the first support frame 41. The network control module 12 controls the opening and closing of the normally open solenoid valve 1 of each valve group on the valve seat 3 according to the pressure signal received from each suction cup assembly.

[0036] A hub 11 is provided on one side of the second support frame 42, and the hub 11 and the network control module 12 are located on the same side.

[0037] A method for using a vacuum suction cup-type non-dropping crystal rod gripper device, the method specifically includes the following steps:

[0038] S1, Prepare a vacuum suction cup type non-drop crystal rod gripper device. The device includes a main body, a cover, a vacuum adsorption module and a vacuum breaking module. The main body includes a first support frame 41 and a second support frame 42. The cover includes a first cover 91 and a second cover 92. The first cover 91 is provided on the first support frame 41, and the second cover 92 is provided on the second support frame 42. The lower part of the first support frame 41 is connected to the second support frame 42.

[0039] The vacuum adsorption module includes a normally open solenoid valve 1, a vacuum generator 2, a valve seat 3, valve groups, and suction cup assemblies. Vacuum generators 2 are respectively arranged on both sides of the upper end of the first support frame 41. A normally open solenoid valve 1 is arranged on the first support frame 41 inside each vacuum generator 2. The normally open solenoid valve 1 controls the opening and closing of the air passage of the vacuum generator 2. The vacuum generator 2 is connected to the valve seat 3 through an air passage pipe. The valve seat 3 is arranged on the upper part of the second support frame 42. Multiple valve groups are arranged at the lower end of the valve seat 3. Multiple suction cup assemblies are arranged at the bottom of the second support frame 42. The valve groups on the valve seat 3 are respectively connected to the suction cup assemblies.

[0040] The vacuum breaking module includes a vacuum solenoid valve 10 and a one-way valve 5. The vacuum solenoid valve 10 is located on the upper end of the first support frame 41. The vacuum solenoid valve 10 is connected to the one-way valve 5 through a gas pipeline. The one-way valve 5 is connected to the suction cup assembly.

[0041] S2, the robot gripper is fixedly connected to the mounting plate, the robot gripper moves the gripper device above the crystal rod to be adsorbed and moved, and the gripper device falls to connect the bottom suction cup 7 with the top of the crystal rod;

[0042] S3, the two vacuum generators 2 on the first support frame 41 are started. The vacuum generators 2 generate negative pressure to the valve seat 3. The valve seat 3 divides the negative pressure air path to the normally open solenoid valve 1 on each valve group, and then through the one-way valve 5 to the suction cup assembly. The suction cup 7 in the suction cup assembly generates adsorption force to adsorb the crystal rod.

[0043] S4, the pressure gauge 8 on the suction cup assembly transmits the monitored pressure signal to the network control module 12. The network control module 12 closes the normally open solenoid valve 1 on the valve group corresponding to the suction cup assembly whose pressure has not reached the threshold, based on the received pressure signal.

[0044] S5, the robot gripper picks up the crystal rod and moves it to the required position. The vacuum solenoid valve 10 is activated. The vacuum solenoid valve 10 controls the opening of the air path of the one-way valve 5 in the vacuum breaking module of the suction cup assembly, so that the suction cup 7 breaks the vacuum and eliminates the suction force of the suction cup 7. The gripper device separates from the crystal rod, completing the crystal rod adsorption and transportation.

[0045] The vacuum generator 2 produces a pressure of 0.2 MPa to 0.6 MPa.

[0046] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them; although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications can still be made to the specific implementation of the invention or equivalent substitutions can be made to some technical features without departing from the spirit of the technical solutions of the present invention, and all such modifications and substitutions should be covered within the scope of the technical solutions claimed in the present invention.

Claims

1. A vacuum suction cup type non-dropping crystal rod gripper device, characterized in that, The device includes a main body, a cover, a vacuum adsorption module, and a vacuum breaking module. The main body includes a first support frame and a second support frame. The cover includes a first cover and a second cover. The first cover is disposed on the first support frame, and the second cover is disposed on the second support frame. The lower part of the first support frame is connected to the second support frame. The vacuum adsorption module includes a normally open solenoid valve, a vacuum generator, a valve seat, valve groups, and suction cup assemblies. Vacuum generators are respectively arranged on both sides of the upper end of the first support frame. A normally open solenoid valve is arranged on the first support frame inside each vacuum generator. The normally open solenoid valve controls the opening and closing of the air passage of the vacuum generator. The vacuum generator is connected to the valve seat through an air passage pipe. The valve seat is arranged on the upper part of the second support frame. Multiple valve groups are arranged at the lower end of the valve seat. Multiple suction cup assemblies are arranged at the bottom of the second support frame. The valve groups on the valve seat are respectively connected to the suction cup assemblies. The vacuum breaking module includes a vacuum solenoid valve and a one-way valve. The vacuum solenoid valve is located on the upper end of the first support frame. The vacuum solenoid valve is connected to the one-way valve through a gas pipeline. The one-way valve is connected to the suction cup assembly. The suction cup assembly includes a logic valve and a suction cup. The suction cup is located at the bottom of the second support frame. Two rows of suction cups are arranged in parallel at the bottom of the second support frame. Each valve seat controls one row of suction cups. Each suction cup is equipped with a logic valve. Each suction cup is connected to the valve group on the corresponding valve seat through the logic valve via an air passage pipe. The one-way valve in the vacuum breaking module is installed on the suction cup assembly; Each suction cup assembly is equipped with a pressure gauge. The pressure gauge detects the pressure change when the suction cup is adsorbed and transmits the detected pressure signal to the network control module. The network control module is located on the side of the first support frame. The network control module controls the opening and closing of the normally open solenoid valve of each valve group on the valve seat according to the pressure signal received from each suction cup assembly. The valve group includes a normally open solenoid valve and a check valve. The normally open solenoid valve is connected to the check valve, and each valve group is connected to each suction cup assembly. In the power-off state, the air passage is kept open, and the normally open solenoid valve ensures that the crystal rod will not fall off when the power is off; during the handling process, the check valve and logic valve stabilize the suction cup to maintain negative pressure, so that the crystal rod will not fall off when the air is cut off.

2. The vacuum suction cup type non-falling crystal rod gripper device according to claim 1, characterized in that, A mounting plate is provided in the middle of the end face of the first support frame, and the mounting plate is connected to the robot gripper. Buffer connectors are provided at both ends of the first support frame. The buffer connectors are located on the side of the vacuum generator and connect the first support frame and the second support frame. The buffer connector is a telescopic shaft, with one end of the telescopic shaft connected and fixed to the first support frame and the other end connected and fixed to the second support frame. A buffer spring is also provided on the telescopic shaft. Fixing holes for fixed connection with the robot gripper are provided on the end face of the mounting plate.

3. The vacuum suction cup type non-falling crystal rod gripper device according to claim 2, characterized in that, The second support frame is a square frame structure. The upper panel of the second support frame is connected to the first support frame through a telescopic shaft. Two valve seats are arranged parallel to each other on the lower end face of the upper panel of the second support frame, and multiple valve groups are arranged on each valve seat.

4. The vacuum suction cup type non-falling crystal rod gripper device according to claim 2, characterized in that, A hub is provided on one side of the second support frame, and the hub and the network control module are located on the same side.

5. A method of using a vacuum suction cup type non-dropping crystal rod gripper device, characterized in that, The method specifically includes the following steps: S1. Prepare a vacuum suction cup type non-drop crystal rod gripper device. The device includes a main body, a cover, a vacuum adsorption module and a vacuum breaking module. The main body includes a first support frame and a second support frame. The cover includes a first cover and a second cover. The first cover is provided on the first support frame and the second cover is provided on the second support frame. The lower part of the first support frame is connected to the second support frame. The vacuum adsorption module includes a normally open solenoid valve, a vacuum generator, a valve seat, valve groups, and suction cup assemblies. Vacuum generators are respectively arranged on both sides of the upper end of the first support frame. A normally open solenoid valve is arranged on the first support frame inside each vacuum generator. The normally open solenoid valve controls the opening and closing of the air passage of the vacuum generator. The vacuum generator is connected to the valve seat through an air passage pipe. The valve seat is arranged on the upper part of the second support frame. Multiple valve groups are arranged at the lower end of the valve seat. Multiple suction cup assemblies are arranged at the bottom of the second support frame. The valve groups on the valve seat are respectively connected to the suction cup assemblies. The vacuum breaking module includes a vacuum solenoid valve and a one-way valve. The vacuum solenoid valve is located on the upper end of the first support frame. The vacuum solenoid valve is connected to the one-way valve through a gas pipeline. The one-way valve is connected to the suction cup assembly. S2, the robot gripper is fixedly connected to the mounting plate, the robot gripper moves the gripper device above the crystal rod to be adsorbed and moved, and the gripper device falls to connect the bottom suction cup with the top of the crystal rod; S3, the two vacuum generators on the first support frame are started. The vacuum generators generate negative pressure to the valve seat. The valve seat divides the negative pressure air path to the normally open solenoid valve on each valve group, and then through the one-way valve to the suction cup assembly. The suction cup in the suction cup assembly generates adsorption force to adsorb the crystal rod. S4, the pressure gauge on the suction cup assembly transmits the monitored pressure signal to the network control module. The network control module closes the normally open solenoid valve on the valve group corresponding to the suction cup assembly whose pressure has not reached the threshold, based on the received pressure signal. S5, the robot gripper picks up the crystal rod and moves it to the required position. The vacuum solenoid valve is activated, and the vacuum solenoid valve controls the opening of the air path of the one-way valve in the vacuum breaking module of the suction cup assembly, so that the suction cup breaks the vacuum and eliminates the suction cup adsorption force. The gripper device separates from the crystal rod, completing the adsorption and transportation of the crystal rod.

6. The method of using the vacuum suction cup type non-falling crystal rod gripper device according to claim 5, characterized in that, The vacuum generator produces a pressure of 0.2 MPa to 0.6 MPa.

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