An etching liquid recovery and treatment tail gas treatment device

Abstract

The present invention relates to the technical field of tail gas treatment, and in particular to a tail gas treatment device for recycling etching liquid. The device comprises a mounting seat, a sealed L-shaped pipe is fixedly connected to the top of the mounting seat, a connecting L-shaped pipe is provided on one side of the sealed L-shaped pipe, and two ends of the connecting L-shaped pipe are respectively fixedly connected to the horizontal section and the vertical section of the sealed L-shaped pipe. The present invention enables different types of adsorbents to continuously adsorb and treat circulating recycled tail gas through the synchronous rotation of a first slip ring and a second slip ring and the sliding connection of a fan-shaped housing to the first slip ring, thereby improving the automation level of adsorbent replacement, and during the adsorbent replacement process, no shutdown operation is required and the sealing of the recycled tail gas can be guaranteed, thereby effectively improving the treatment efficiency of the etching liquid recycled tail gas and facilitating the continuous treatment of the recycled tail gas.

Description

Technical Field

[0001] The present invention relates to the technical field of tail gas treatment, in particular to a tail gas treatment device for recycling and treating etching liquid. Background Art

[0002] Etching fluids are commonly used in semiconductor and electronics manufacturing to corrode metal or material surfaces. They may contain acidic or alkaline components, such as hydrochloric acid, nitric acid, and hydrofluoric acid. During the recycling process, these chemicals may evaporate or decompose, producing harmful gases. Traditional exhaust gas treatment methods include adsorption, absorption, combustion, and catalytic oxidation.

[0003] Patent document with publication number CN214437907U discloses an etching liquid recovery and treatment tail gas treatment device, including a base, a treatment tank filled with treatment liquid and a water pump. The treatment tank and water pump are installed on the top of the base, an exhaust pipe is installed at the top opening of the treatment tank, and an inlet pipe and a discharge pipe are installed on the side of the treatment tank away from the water pump. The inlet pipe is located above the discharge pipe, and the other end of the inlet pipe extends to the bottom of the inner cavity of the treatment tank.

[0004] In the prior art, when treating the recovered tail gas of the etching solution, activated carbon is usually used to adsorb harmful substances in the tail gas. During the adsorption treatment, due to the diverse harmful gas components in the tail gas, it is necessary to use a variety of adsorbents such as activated carbon, molecular sieves and silica gel for corresponding purification. The traditional adsorption treatment process usually requires manual replacement after the adsorbent is saturated with adsorption, and the machine needs to be shut down during the replacement process, which reduces the treatment efficiency of the recovered tail gas of the etching solution and affects the continuous treatment of the recovered tail gas. Summary of the Invention

[0005] The purpose of the present invention is to solve the shortcomings of the prior art and to propose an etching liquid recovery and treatment tail gas treatment device.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: an etching liquid recovery and treatment tail gas treatment device, comprising a mounting base, a sealed L-shaped pipe fixedly connected to the top of the mounting base, a connecting L-shaped pipe provided on one side of the sealed L-shaped pipe, the two ends of the connecting L-shaped pipe being fixedly connected to the horizontal section and the vertical section of the sealed L-shaped pipe, respectively, and an air intake circulation mechanism connected between the sealed L-shaped pipe and the connecting L-shaped pipe;

[0007] The vertical section of the sealed L-shaped pipe is fixedly connected to a fan-shaped housing, the interior of the fan-shaped housing is slidably connected to a first slip ring, a fixed plate is fixedly connected to the fan-shaped housing, the fixed plate is located at the bottom of the first slip ring, a plurality of first circular grooves are circumferentially provided on the first slip ring, a second slip ring is provided on one side of the top of the first slip ring, a plurality of second circular grooves are circumferentially provided on the second slip ring, a material baffle is provided at the bottom of the second slip ring, the tops of the second circular grooves are fixedly connected to a hopper, and a synchronous rotation mechanism is connected between the first slip ring and the second slip ring;

[0008] A plurality of sliding grooves are provided at the bottom of the first slip ring along the circumferential direction, and the sliding grooves are communicated with the corresponding first circular grooves. Two support plates are slidably connected to the interior of the sliding grooves, and a plurality of air holes are provided on the support plates. The bottoms of the support plates are fixedly connected with first circular pins, and the fan-shaped shell and the fixed plate are jointly fixedly connected with two first guide grooves, and the first guide grooves include arc segments and expansion segments, and the first circular pins are located inside the corresponding first guide grooves.

[0009] Preferably, the air intake circulation mechanism includes an intake pipe and an exhaust pipe, the intake pipe is fixedly connected to one end of the horizontal section of the sealed L-shaped pipe, and the exhaust pipe is fixedly connected to the vertical section of the connecting L-shaped pipe. The intake pipe and the exhaust pipe are both fixedly installed with electric control valves, and the sealed L-shaped pipe and the connecting L-shaped pipe are both fixedly installed with one-way valves, and the two one-way valves are respectively located on one side of the intake pipe and below the exhaust pipe, and the sealed L-shaped pipe and the connecting L-shaped pipe are both fixedly connected with guide fans.

[0010] Preferably, a plurality of gas monitors are fixedly mounted on the vertical section of the communicating L-shaped pipe, and the gas monitors are all located at the top of the exhaust pipe.

[0011] Preferably, the synchronous rotation mechanism includes a sliding bracket, the sliding bracket is fixedly connected to the top of the mounting seat, the second slip ring is slidably connected to the sliding bracket, the baffle plate is fixedly connected to the sliding bracket, the sides of the first slip ring and the second slip ring are both provided with arc grooves, the insides of the arc grooves are fixedly connected to the outer gear rings, the top of the mounting seat is rotatably connected to the first rotating shaft, two first gears are fixedly connected to the first rotating shaft, and the two first gears are respectively engaged with the corresponding outer gear rings, and the bottom of the mounting seat is fixedly installed with a first motor, and the output shaft of the first motor passes through the mounting seat and is fixedly connected to the bottom of the first rotating shaft.

[0012] Preferably, the interior of the first circular groove is rotatably connected to a connecting shaft, and a plurality of stripper plates are fixedly connected to the surface of the connecting shaft. One end of the connecting shaft passes through the first slip ring and extends to the interior of the first slip ring and is fixedly connected to a circular disk. The top of the fixed plate is fixedly connected to a limiting ring, and an arc-shaped notch is provided on the side of the limiting ring close to the fan-shaped shell, and a rotating bar is provided inside the arc-shaped notch. A second motor is fixedly installed on the fixed plate, and the output shaft of the second motor is fixedly connected to the rotating bar. A strip groove is provided on the inner side of the fan-shaped shell, and one of the circular disks is slidably connected to the rotating bar, and the remaining circular disks are slidably connected to the limiting ring.

[0013] Preferably, a circular filter plate is fixedly connected to a fixed connection point above the sector-shaped housing and the sealed L-shaped pipe, and the circular filter plate is located on the top of the first slip ring.

[0014] Preferably, a plurality of filling plates are circumferentially arranged inside the first slip ring, one end of each filling plate passes through the first slip ring and extends to the corresponding first circular groove, one end of each filling plate is flush with the inner wall of the first circular groove, and the filling plate is located on the top of the corresponding support plate. The end of each filling plate located inside the first slip ring is fixedly connected to a second circular pin, the top of the fixed plate is fixedly connected to a second guide groove rail, the bottom end of each second circular pin is located inside the second guide groove rail, and the second guide groove rail includes a flush section and an extension section, and the extension section is close to the second slip ring.

[0015] Preferably, the top of the mounting seat is rotatably connected to a collecting cylinder, a plurality of fan-shaped baskets are slidably inserted into the interior of the collecting cylinder, the collecting cylinder is located below one side of the expanded section of the first guide groove rail, and a matching rotating mechanism is connected to the collecting cylinder.

[0016] Preferably, the mating rotation mechanism includes a second rotating shaft, which is rotatably connected to the top of the mounting seat, and two second gears are fixedly connected to the second rotating shaft. A mating gear ring is fixedly connected to the side of the collecting barrel, and the mating gear ring and the outer gear ring on the side of the first slip ring are respectively engaged with the two second gears.

[0017] Preferably, an observation groove is provided on the surface of the hopper, and transparent glass is fixedly connected to the interior of the observation groove.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. Through the synchronous rotation of the first slip ring and the second slip ring and the sliding connection of the fan-shaped housing to the first slip ring, different types of adsorbents can continuously adsorb the circulating recovered tail gas, thereby improving the degree of automation of adsorbent replacement. In addition, during the adsorbent replacement process, there is no need to stop the machine and the sealing of the recovered tail gas can be ensured, which effectively improves the processing efficiency of the etching liquid recovered tail gas and is conducive to the continuous processing of the recovered tail gas.

[0020] 2. The output shaft of the second motor drives the rotating bar to rotate inside the arc-shaped notch, so that the circular disk drives the connecting shaft to rotate, and the material-dipping plate on the connecting shaft rotates and digs the adsorbent inside the first circular groove, thereby improving the contact efficiency between the adsorbent and the recovered exhaust gas. Before the first slip ring continues to rotate, the output shaft of the second motor drives the rotating bar to return to its initial position, so that the circular disk moves from the rotating bar to the limit ring.

[0021] 3. When the adsorbent is filled into the first circular groove along the second circular groove, one end of the filling plate occupies a certain space inside the first circular groove. When the first circular groove and the corresponding second circular groove are rotated and disengaged, the second circular pin moves from the extension section to the flush section, so that one end of the filling plate withdraws from the first circular groove and releases the space occupied. The movement of the filling plate prevents the adsorbent inside the first circular groove from being over-saturated, ensuring that the rotation of the material-diverting plate can cause the adsorbent to move relatively. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a first structural diagram of the present invention;

[0023] Figure 2 For the present invention Figure 1 A schematic diagram of the structure enlargement at point A;

[0024] Figure 3 For the present invention Figure 1 A magnified schematic diagram of the structure at point B in FIG;

[0025] Figure 4 It is a second structural schematic diagram of the present invention;

[0026] Figure 5 For the present invention Figure 4 A magnified schematic diagram of the structure at position C in FIG;

[0027] Figure 6 For the present invention Figure 4 A magnified schematic diagram of the structure at D in FIG.

[0028] Figure 7 This is a schematic diagram of the matching structure of the second slip ring, the baffle plate and the sliding bracket of the present invention;

[0029] Figure 8This is a schematic diagram of a first matching structure of a sector-shaped housing, a first slip ring, and a fixed plate of the present invention;

[0030] Figure 9 For the present invention Figure 8 A schematic diagram of the structure at E in FIG.

[0031] Figure 10 For the present invention Figure 8 A magnified schematic diagram of the structure at F in FIG.

[0032] Figure 11 This is a schematic diagram of the second matching structure of the fan-shaped housing, the first slip ring and the fixed plate of the present invention;

[0033] Figure 12 For the present invention Figure 11 Schematic diagram of the enlarged structure at G in FIG.

[0034] In the figure: 1, mounting base; 2, sealing L-shaped pipe; 3, connecting L-shaped pipe; 4, fan-shaped shell; 5, first slip ring; 6, fixing plate; 7, first circular groove; 8, second slip ring; 801, material blocking plate; 9, second circular groove; 10, hopper; 11, slide groove; 12, support plate; 13, air hole; 14, first circular pin; 15, first guide groove rail; 1501, arc segment; 1502, expansion segment; 16, intake pipe; 17, exhaust pipe; 18, electric control valve; 19, one-way valve; 20, guide fan; 21, gas monitor; 22, sliding bracket; 23, arc Groove; 24. Outer gear ring; 25. First rotating shaft; 26. First gear; 27. First motor; 28. Connecting shaft; 29. ​​Material stripping plate; 30. Circular disk; 31. Limiting ring; 32. Arc-shaped notch; 33. Rotating bar; 34. Second motor; 35. Strip groove; 36. Circular filter plate; 37. Filling plate; 38. Second circular pin; 39. Second guide groove; 3901. Leveling section; 3902. Extension section; 40. Collecting barrel; 41. Fan-shaped basket; 42. Second rotating shaft; 43. Second gear; 44. Matching gear ring; 45. Observation slot; 46. Transparent glass. DETAILED DESCRIPTION

[0035] The following description is intended to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are merely examples, and those skilled in the art may conceive of other obvious variations.

[0036] like Figures 1 to 12 The device for treating exhaust gas from etching liquid recovery shown in the figure includes a mounting base 1, a sealed L-shaped pipe 2 is fixedly connected to the top of the mounting base 1, a connecting L-shaped pipe 3 is provided on one side of the sealed L-shaped pipe 2, and the two ends of the connecting L-shaped pipe 3 are fixedly connected to the horizontal section and the vertical section of the sealed L-shaped pipe 2, respectively. An air intake circulation mechanism is connected between the sealed L-shaped pipe 2 and the connecting L-shaped pipe 3;

[0037] The vertical section of the sealed L-shaped pipe 2 is fixedly connected to a fan-shaped shell 4, and a first slip ring 5 is slidably connected to the interior of the fan-shaped shell 4. A fixed plate 6 is fixedly connected to the fan-shaped shell 4, and the fixed plate 6 is located at the bottom of the first slip ring 5. A plurality of first circular grooves 7 are opened on the first slip ring 5 along the circumferential direction. A second slip ring 8 is provided on one side of the top of the first slip ring 5. A plurality of second circular grooves 9 are opened on the second slip ring 8 along the circumferential direction. A baffle plate 801 (such as Figure 3 and Figure 7 As shown), the top of the second circular groove 9 is fixedly connected to a hopper 10, and a synchronous rotation mechanism is connected between the first slip ring 5 and the second slip ring 8;

[0038] The bottom of the first slip ring 5 is provided with a plurality of slide grooves 11 along the circumferential direction. The slide grooves 11 are connected to the corresponding first circular grooves 7. The interior of the slide grooves 11 is slidably connected to two support plates 12. The support plates 12 are provided with a plurality of air holes 13. The bottoms of the support plates 12 are fixedly connected to first circular pins 14. The sector housing 4 and the fixed plate 6 are fixedly connected to two first guide rails 15 (such as Figure 11 and Figure 12As shown), the first guide groove 15 includes an arc segment 1501 and an expanded segment 1502, and the first circular pin 14 is located inside the corresponding first guide groove 15; during operation, the prior art usually uses activated carbon to adsorb harmful substances in the tail gas when treating the recovered tail gas of the etching solution. During the adsorption treatment, due to the diverse harmful gas components in the tail gas, it is necessary to use a variety of adsorbents such as activated carbon, molecular sieves and silica gel for corresponding purification. The traditional adsorption treatment process is usually to manually replace the adsorbent after it is saturated with adsorption, and the machine needs to be shut down during the replacement process, thereby reducing the treatment efficiency of the tail gas recovered from the etching solution and affecting the continuous treatment of the recovered tail gas; the present technical solution can solve the above problems and has The working mode of the body is as follows: the recovered tail gas of the etching liquid is introduced into the interior of the sealed L-shaped pipe 2 through the action of the air intake circulation mechanism, and continuously circulates along the interior of the sealed L-shaped pipe 2 and the connecting L-shaped pipe 3, and the bottom of the first circular groove 7 is supported by two adjacent support plates 12, and the interior of the first circular groove 7 is filled with the corresponding adsorbent. During the flow, the recovered tail gas moves along the sliding connection between the fan-shaped shell 4 and the first slip ring 5 to the corresponding first circular groove 7, and then enters the interior of the first circular groove 7 along the air holes 13 on the support plate 12, and contacts with the filled adsorbent, thereby adsorbing the corresponding harmful substances in the recovered tail gas, and then the first slip ring 5 and The second slip ring 8 rotates synchronously, so that the next first circular groove 7 rotates into the interior of the fan-shaped shell 4, and continues to adsorb the recovered tail gas through another adsorbent in the next first circular groove 7. At the same time, the discarded adsorbent rotates to the outside along the fan-shaped shell 4, and the corresponding support plate 12 moves to the expansion section 1502 along the arc section 1501 of the first guide groove rail 15 during the rotation, so that the two support plates 12 slide along the slide groove 11 and release the support for the bottom of the first circular groove 7, so that the discarded adsorbent falls from the bottom of the first circular groove 7, completing the automatic loading of the discarded adsorbent, and through the synchronous rotation of the first slip ring 5 and the second slip ring 8, the first circular groove 7 and the second circular groove 9 are connected in sequence. The machine is opened and stopped intermittently, so that the adsorbent in the hopper 10 is automatically filled into the first circular groove 7 along the second circular groove 9 under the action of gravity, completing the automatic loading of the adsorbent, and the bottom of the second circular groove 9 is blocked by the baffle plate 801, and the baffle plate 801 and the side of the first slip ring 5 are slid and fitted. Through the synchronous rotation of the first slip ring 5 and the second slip ring 8 and the sliding connection of the fan-shaped shell 4 to the first slip ring 5, different types of adsorbents can continuously adsorb the circulating recovered exhaust gas, thereby improving the degree of automation of adsorbent replacement, and during the adsorbent replacement process, there is no need to stop the machine and the sealing of the recovered exhaust gas can be guaranteed, which effectively improves the processing efficiency of the etching liquid recovered exhaust gas and is conducive to the continuous processing of the recovered exhaust gas.

[0039] As a further embodiment of the present invention, the intake circulation mechanism includes an intake pipe 16 and an exhaust pipe 17. The intake pipe 16 is fixedly connected to one end of the horizontal section of the sealed L-shaped pipe 2, and the exhaust pipe 17 is fixedly connected to the vertical section of the connected L-shaped pipe 3. The intake pipe 16 and the exhaust pipe 17 are both fixedly installed with an electric control valve 18, and the sealed L-shaped pipe 2 and the connected L-shaped pipe 3 are both fixedly installed with a one-way valve 19. The two one-way valves 19 are respectively located on one side of the intake pipe 16 and below the exhaust pipe 17. The sealed L-shaped pipe 2 and the connected L-shaped pipe 3 are both fixedly connected with a guide fan 20. When working, the recovered exhaust gas is pumped into the interior of the sealed L-shaped pipe 2 along the intake pipe 16, and through the guiding effect of the two guide fans 20, the recovered exhaust gas moves along the horizontal section of the sealed L-shaped pipe 2 to the vertical section of the sealed L-shaped pipe 2, and along the vertical section of the sealed L-shaped pipe 2 to the connected L The horizontal section of the L-shaped pipe 3 moves, and then moves along the horizontal section connected to the L-shaped pipe 3 to the vertical section connected to the L-shaped pipe 3, so that the recovered exhaust gas is circulated in a one-way manner, and the recovered exhaust gas is prevented from flowing toward the intake pipe 16 by sealing the one-way valve 19 on the L-shaped pipe 2. After the treatment of the recovered exhaust gas is completed, the electric control valve 18 on the intake pipe 16 and the exhaust pipe 17 are opened synchronously and the recovered exhaust gas is continued to be pumped into the intake pipe 16. The recovered exhaust gas entering the intake pipe 16 discharges the treated recovered exhaust gas along the exhaust pipe 17, and the one-way valve 19 connected to the L-shaped pipe 3 prevents the newly entered recovered exhaust gas from moving directly to the vertical section on the sealed L-shaped pipe 2. When the treated recovered exhaust gas is completely discharged from the exhaust pipe 17, the electric control valve 18 on the intake pipe 16 and the exhaust pipe 17 are closed synchronously, and a new round of one-way circulation is carried out through the diversion effect of the guide fan 20.

[0040] As a further embodiment of the present invention, a plurality of gas monitors 21 are fixedly installed on the vertical section connected to the L-shaped pipe 3, and the gas monitors 21 are all located at the top of the exhaust pipe 17; during operation, the corresponding harmful substance content in the recovered exhaust gas is monitored by the plurality of gas monitors 21. When the gas monitor 21 monitors that the corresponding harmful substance content is lower than the standard value, the first slip ring 5 rotates to replace the adsorbent. When the values ​​of some gas monitors 21 are lower than the standard value, the controller connected to the gas monitor 21 controls the electric control valves 18 on the intake pipe 16 and the exhaust pipe 17 to open synchronously to replace the recovered gas, and when the newly entered recovered exhaust gas passes through the gas monitor 21, all gas monitors 21 monitor an increase in value, and the controller connected to the gas monitor 21 controls the electric control valves 18 on the intake pipe 16 and the exhaust pipe 17 to close synchronously, thereby completing the gas replacement and carrying out the next round of adsorption treatment of the recovered exhaust gas.

[0041] As a further embodiment of the present invention, the synchronous rotation mechanism includes a sliding bracket 22, the sliding bracket 22 is fixedly connected to the top of the mounting base 1, the second slip ring 8 is slidably connected to the sliding bracket 22, the baffle plate 801 is fixedly connected to the sliding bracket 22, the first slip ring 5 and the second slip ring 8 are both provided with an arc groove 23 on the side, the inner part of the arc groove 23 is fixedly connected to the outer gear ring 24, the top of the mounting base 1 is rotatably connected to the first rotating shaft 25, and the first rotating shaft 25 is fixedly connected to two first gears 26, and the two first gears 26 are respectively engaged with the corresponding outer gear ring 24, and the mounting base is installed. A first motor 27 is fixedly installed at the bottom of the base 1, and the output shaft of the first motor 27 passes through the mounting base 1 and is fixedly connected to the bottom of the first rotating shaft 25; when working, the two first gears 26 have the same specifications and the two outer gear rings 24 have the same specifications. The output shaft of the first motor 27 rotates to drive the first rotating shaft 25 to rotate, so that the two first gears 26 on the first rotating shaft 25 rotate synchronously, and through the engagement of the first gear 26 and the corresponding outer gear ring 24, the first slip ring 5 and the second slip ring 8 rotate in the same direction along the sliding connection between the fan-shaped shell 4 and the sliding bracket 22.

[0042] As a further embodiment of the present invention, the interior of the first circular groove 7 is rotatably connected with a connecting shaft 28, and a plurality of stripping plates 29 are fixedly connected to the surface of the connecting shaft 28. One end of the connecting shaft 28 passes through the first slip ring 5 and extends to the interior of the first slip ring 5 and is fixedly connected to a circular disk 30. The top of the fixed plate 6 is fixedly connected to a limiting ring 31, and an arc-shaped notch 32 is provided on the side of the limiting ring 31 close to the fan-shaped shell 4. A rotating bar 33 is provided inside the arc-shaped notch 32. A second motor 34 is fixedly installed on the fixed plate 6, and the output shaft of the second motor 34 is fixedly connected to the rotating bar 33. A strip groove 35 is provided on the inner side of the fan-shaped shell 4, and one of the circular disks 30 is slidably connected to the rotating bar 33, and the remaining circular disks 30 are slidably connected to the limiting ring 31; when working, the circular disk 30 is slidably limited by the limiting ring 31. When a slip ring 5 rotates, multiple connecting shafts 28 rotate synchronously, and the circular disk 30 moves along the sliding connection of the limit ring 31, and moves the connecting shaft 28 to make way through the strip groove 35. When the corresponding first circular groove 7 and the connecting shaft 28 enter the interior of the fan-shaped shell 4, the corresponding circular disk 30 moves from the limit ring 31 to the rotating bar 33, and the output shaft of the second motor 34 drives the rotating bar 33 to rotate inside the arc-shaped notch 32, so that the circular disk 30 drives the connecting shaft 28 to rotate, so that the material plate 29 on the connecting shaft 28 rotates and shifts the adsorbent inside the first circular groove 7, thereby improving the contact efficiency between the adsorbent and the recovered exhaust gas, and before the first slip ring 5 continues to rotate, the output shaft of the second motor 34 drives the rotating bar 33 to return to the initial position, so that the circular disk 30 moves from the rotating bar 33 to the limit ring 31.

[0043] As a further embodiment of the present invention, a circular filter plate 36 is fixedly connected to the fixed connection between the fan-shaped shell 4 and the sealed L-shaped pipe 2, and the circular filter plate 36 is located on the top of the first slip ring 5; when working, the circular filter plate 36 is set at the fixed connection between the fan-shaped shell 4 and the sealed L-shaped pipe 2 to block the adsorbent and prevent the adsorbent from entering the interior of the sealed L-shaped pipe 2 under the action of the diversion and the movement of the material plate 29.

[0044] As a further embodiment of the present invention, a plurality of filling plates 37 are arranged circumferentially inside the first slip ring 5, one end of the filling plate 37 passes through the first slip ring 5 and extends to the inside of the corresponding first circular groove 7, one end of the filling plate 37 is flush with the inner wall of the first circular groove 7, the filling plate 37 is located on the top of the corresponding support plate 12, and the end of the filling plate 37 located inside the first slip ring 5 is fixedly connected to the second circular pin 38, and the top of the fixed plate 6 is fixedly connected to the second guide groove rail 39 (such as Figure 10 As shown in FIG, the bottom ends of the second circular pins 38 are all located inside the second guide groove 39. The second guide groove 39 includes a flush section 3901 and an extension section 3902. The extension section 3902 is close to the second slip ring 8. During operation, when the second circular pin 38 moves along the flush section 3901 of the second guide groove 39, one end of the filling plate 37 is flush with the inner wall of the corresponding first circular groove 7. When the first circular groove 7 and the corresponding second circular groove 9 are rotated and connected, the second circular pin 38 moves from the flush section 3901 to the extension section 3902, and causes one end of the filling plate 37 to move toward the first circular groove. 7 moves inside, so that when the adsorbent is filled into the first circular groove 7 along the second circular groove 9, one end of the filling plate 37 occupies a certain space inside the first circular groove 7. When the first circular groove 7 and the corresponding second circular groove 9 are rotated and disengaged, the second circular pin 38 moves from the extension section 3902 to the flush section 3901, so that one end of the filling plate 37 is withdrawn from the first circular groove 7 and the occupation of the space is released. The movement of the filling plate 37 prevents the adsorbent inside the first circular groove 7 from being over-saturated, and ensures that the rotation of the material-selecting plate 29 can cause the adsorbent to move relatively.

[0045] As a further implementation scheme of the present invention, the top of the mounting base 1 is rotatably connected to a collecting cylinder 40, and a plurality of fan-shaped baskets 41 are slidably inserted inside the collecting cylinder 40. The collecting cylinder 40 is located below one side of the expanded section 1502 of the first guide groove 15, and a cooperating rotating mechanism is connected to the collecting cylinder 40. During operation, the used adsorbent is collected by the plurality of fan-shaped baskets 41 inside the collecting cylinder 40. When the two support plates 12 slide along the slide groove 11 and release the support for the bottom of the first circular groove 7, the adsorbent inside the first circular groove 7 falls into the corresponding fan-shaped basket 41, and through the cooperative rotation of the collecting cylinder 40, the plurality of fan-shaped baskets 41 are respectively classified and collected for different types of adsorbents, thereby improving the convenience of adsorbent processing.

[0046] As a further embodiment of the present invention, the cooperating rotation mechanism includes a second rotating shaft 42, which is rotatably connected to the top of the mounting base 1, and two second gears 43 are fixedly connected to the second rotating shaft 42. A cooperating gear ring 44 is fixedly connected to the side of the collecting barrel 40, and the cooperating gear ring 44 and the outer gear ring 24 on the side of the first slip ring 5 are respectively engaged with the two second gears 43; when working, the two second gears 43 have the same specifications, and the cooperating gear ring 44 and the outer gear ring 24 have the same specifications. The rotation of the outer gear ring 24 drives the corresponding second gear 43 to rotate, thereby rotating the second rotating shaft 42, and the other second gear 43 on the second rotating shaft 42 drives the cooperating gear ring 44 to rotate through the meshing action, so that the collecting barrel 40 and the first slip ring 5 rotate synchronously.

[0047] As a further embodiment of the present invention, an observation groove 45 is provided on the surface of the hopper 10, and a transparent glass 46 is fixedly connected to the interior of the observation groove 45; by installing the transparent glass 46 on the hopper 10, it is convenient for the staff to observe the remaining adsorbent inside the hopper 10, so as to add the adsorbent in time.

[0048] Working principle of the present invention:

[0049] The recovered tail gas of the etching liquid is introduced into the interior of the sealed L-shaped pipe 2 through the action of the air intake circulation mechanism, and continuously circulates along the interior of the sealed L-shaped pipe 2 and the connecting L-shaped pipe 3. The bottom of the first circular groove 7 is supported by two adjacent support plates 12, and the corresponding adsorbent is filled in the interior of the first circular groove 7. During the flow, the recovered tail gas moves along the sliding connection between the fan-shaped shell 4 and the first slip ring 5 to the interior of the corresponding first circular groove 7, thereby entering the interior of the first circular groove 7 along the air holes 13 on the support plate 12, and through contact with the filled adsorbent, the corresponding harmful substances in the recovered tail gas are adsorbed. Then, the first slip ring 5 and the second slip ring 8 are rotated synchronously through the action of the synchronous rotation mechanism, so that the next first circular groove 7 rotates into the interior of the fan-shaped shell 4, and the recovered tail gas is continued to be adsorbed by another adsorbent in the next first circular groove 7. At the same time, the discarded adsorbent rotates to the outside along the fan-shaped shell 4. During the rotation process, the corresponding support plate 12 moves along the arc segment 1501 of the first guide groove rail 15 The first circular groove 7 is moved to the expansion section 1502, so that the two support plates 12 slide along the slide groove 11 and release the support for the bottom of the first circular groove 7, so that the waste adsorbent falls from the bottom of the first circular groove 7, completing the automatic loading of the waste adsorbent, and through the synchronous rotation of the first slip ring 5 and the second slip ring 8, the first circular groove 7 and the second circular groove 9 are connected in sequence and intermittently stopped, so that the adsorbent in the hopper 10 is automatically filled into the first circular groove 7 along the second circular groove 9 under the action of gravity, completing the automatic loading of the adsorbent, and the bottom of the second circular groove 9 is blocked by the baffle plate 801, and the baffle plate 801 and the side of the first slip ring 5 are slidably fitted. Through the synchronous rotation of the first slip ring 5 and the second slip ring 8 and the sliding connection of the fan-shaped shell 4 to the first slip ring 5, different types of adsorbents continuously adsorb the circulating recycled exhaust gas, thereby improving the degree of automation of adsorbent replacement. In addition, there is no need to stop the machine during the adsorbent replacement process and the sealing of the recycled exhaust gas can be ensured, effectively improving the processing efficiency of the etching liquid recycled exhaust gas, and facilitating the continuous processing of the recycled exhaust gas.

[0050] The basic principles, main features and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only illustrate the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements fall within the scope of the present invention as claimed, and the scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. An etching liquid recovery and treatment tail gas treatment device, comprising a mounting seat, characterized in that: A sealed L-shaped pipe is fixedly connected to the top of the mounting base, a connecting L-shaped pipe is provided on one side of the sealed L-shaped pipe, and both ends of the connecting L-shaped pipe are fixedly connected to the horizontal section and the vertical section of the sealed L-shaped pipe respectively, and an air intake circulation mechanism is connected between the sealed L-shaped pipe and the connecting L-shaped pipe; The vertical section of the sealed L-shaped pipe is fixedly connected to a fan-shaped housing, the interior of the fan-shaped housing is slidably connected to a first slip ring, a fixed plate is fixedly connected to the fan-shaped housing, the fixed plate is located at the bottom of the first slip ring, a plurality of first circular grooves are circumferentially provided on the first slip ring, a second slip ring is provided on one side of the top of the first slip ring, a plurality of second circular grooves are circumferentially provided on the second slip ring, a material baffle is provided at the bottom of the second slip ring, the tops of the second circular grooves are fixedly connected to a hopper, and a synchronous rotation mechanism is connected between the first slip ring and the second slip ring; A plurality of sliding grooves are provided at the bottom of the first slip ring along the circumferential direction, and the sliding grooves are connected to the corresponding first circular grooves. Two support plates are slidably connected inside the sliding grooves, and a plurality of air holes are provided on the support plates. The bottoms of the support plates are fixedly connected to first circular pins. Two first guide grooves are fixedly connected to the fan-shaped housing and the fixed plate. The first guide grooves include arc segments and expansion segments, and the first circular pins are located inside the corresponding first guide grooves. The interior of the first circular groove is rotatably connected to a connecting shaft, and a plurality of stripper plates are fixedly connected to the surface of the connecting shaft. One end of the connecting shaft passes through the first slip ring and extends to the interior of the first slip ring and is fixedly connected to a circular disk. The top of the fixed plate is fixedly connected to a limit ring. An arc-shaped notch is provided on the side of the limit ring close to the fan-shaped shell. A rotating bar is provided inside the arc-shaped notch. A second motor is fixedly mounted on the fixed plate, and the output shaft of the second motor is fixedly connected to the rotating bar. A strip groove is provided on the inner side of the fan-shaped shell, and one of the circular disks is slidably connected to the rotating bar, and the remaining circular disks are slidably connected to the limit ring. A plurality of filling plates are circumferentially arranged inside the first slip ring, one end of the filling plate passes through the first slip ring and extends to the corresponding first circular groove, one end of the filling plate is flush with the inner wall of the first circular groove, the filling plate is located on the top of the corresponding support plate, and the end of the filling plate located inside the first slip ring is fixedly connected to the second circular pin, the top of the fixed plate is fixedly connected to the second guide groove rail, the bottom end of the second circular pin is located inside the second guide groove rail, the second guide groove rail includes a flush section and an extension section, and the extension section is close to the second slip ring.

2. The etching liquid recovery and treatment tail gas treatment device according to claim 1, characterized in that: The air intake circulation mechanism includes an intake pipe and an exhaust pipe. The intake pipe is fixedly connected to one end of the horizontal section of the sealed L-shaped pipe, and the exhaust pipe is fixedly connected to the vertical section of the connecting L-shaped pipe. Electric control valves are fixedly installed on both the intake pipe and the exhaust pipe. One-way valves are fixedly installed on both the sealed L-shaped pipe and the connecting L-shaped pipe. The two one-way valves are respectively located on one side of the intake pipe and below the exhaust pipe. Guide fans are fixedly connected to both the sealed L-shaped pipe and the connecting L-shaped pipe.

3. The etching liquid recovery and treatment tail gas treatment device according to claim 2, characterized in that: A plurality of gas monitors are fixedly installed on the vertical section of the connected L-shaped pipeline, and the gas monitors are all located at the top of the exhaust pipe.

4. The etching liquid recovery and treatment tail gas treatment device according to claim 1, characterized in that: The synchronous rotation mechanism includes a sliding bracket, which is fixedly connected to the top of the mounting seat, the second slip ring is slidably connected to the sliding bracket, and the material baffle is fixedly connected to the sliding bracket. The sides of the first slip ring and the second slip ring are both provided with arc grooves, and the insides of the arc grooves are fixedly connected to the outer gear rings. The top of the mounting seat is rotatably connected to the first rotating shaft, and two first gears are fixedly connected to the first rotating shaft. The two first gears are respectively engaged with the corresponding outer gear rings. The bottom of the mounting seat is fixedly installed with a first motor, and the output shaft of the first motor passes through the mounting seat and is fixedly connected to the bottom of the first rotating shaft.

5. The etching liquid recovery and tail gas treatment device according to claim 1, characterized in that: A circular filter plate is fixedly connected to a fixed connection point above the sector-shaped housing and the sealed L-shaped pipe, and the circular filter plate is located on the top of the first slip ring.

6. The etching liquid recovery and tail gas treatment device according to claim 4, characterized in that: The top of the mounting seat is rotatably connected to a collecting cylinder, a plurality of fan-shaped baskets are slidably inserted into the interior of the collecting cylinder, the collecting cylinder is located below one side of the expanded section of the first guide rail, and a matching rotating mechanism is connected to the collecting cylinder.

7. The etching liquid recovery and tail gas treatment device according to claim 6, characterized in that: The mating rotation mechanism includes a second rotating shaft, which is rotatably connected to the top of the mounting base. Two second gears are fixedly connected to the second rotating shaft. A mating gear ring is fixedly connected to the side of the collecting barrel. The mating gear ring and the outer gear ring on the side of the first slip ring are respectively engaged with the two second gears.

8. The etching liquid recovery and tail gas treatment device according to claim 1, characterized in that: An observation slot is provided on the surface of the hopper, and transparent glass is fixedly connected to the inside of the observation slot.

Images