Cleaning head position correction device

Abstract

The application relates to the technical field of semiconductors, and provides a cleaning head position correction device, which comprises a correction unit and a positioning unit; the positioning unit is arranged on the correction unit and is used for positioning the correction unit relative to a reference object; a correction cavity is arranged on the correction unit, the shape of the correction cavity is matched with at least one part of the outer contour of a cleaning head; and the correction cavity is used for accommodating the cleaning head when the correction unit is positioned relative to the reference object, so that at least one part of the outer contour of the cleaning head is matched with the inner wall of the correction cavity, and the position of the cleaning head is corrected. The correction device is installed on the reference object, and the correction cavity structure is arranged for adjusting the position of the cleaning head, the correction mode is simple, and the correction precision is high.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a cleaning head position correction device. Background Technology

[0002] Wafer surface cleanliness is crucial to the semiconductor manufacturing process. The cleanliness of the wafer surface directly affects the smooth progress of subsequent semiconductor processes and the yield rate of the products.

[0003] During semiconductor processing, due to the process itself or the transfer of wafers between adjacent processes, fine particulate contaminants often adhere to the wafer surface, such as metal particles, organic particles, and dust particles.

[0004] Therefore, the surface of a wafer typically needs to be cleaned according to actual requirements, such as through immersion cleaning, spray cleaning, wet etching cleaning, or brush cleaning. For spray or brush cleaning methods, a cleaning head is usually required.

[0005] Due to the requirements of the cleaning process, some cleaning heads require high positional accuracy. During operation, the cleaning head first moves from its original position to above the wafer, cleans the wafer surface, and then returns to its original position. However, during prolonged operation, factors such as vibration may cause positional deviations in the cleaning head, resulting in a positional offset when returning to its original position.

[0006] Existing correction methods typically involve visually observing the relative position of the actual cleaning head to a reference object, and then manually judging the position of the cleaning head for correction. This method has high uncertainty and poor accuracy in cleaning head position detection and adjustment.

[0007] Therefore, based on the above-mentioned technical problems, a cleaning head position correction device is needed to correct the position of the cleaning head. Summary of the Invention

[0008] The purpose of this invention is to provide a cleaning head position correction device. The correction device is installed on a reference object and is provided with a correction cavity for correcting the position of the cleaning head. The correction method is simple and the correction accuracy is high.

[0009] This invention provides a cleaning head position correction device, comprising: a correction unit and a positioning unit;

[0010] The positioning unit is disposed on the correction unit, and the positioning unit is used to position the correction unit relative to the reference object;

[0011] The correction unit is provided with a correction cavity, the shape of which is adapted to at least a portion of the outer contour of the cleaning head;

[0012] The correction cavity is used to accommodate the cleaning head when the correction unit is positioned relative to the reference object, so that at least a portion of the outer contour of the cleaning head conforms to the inner wall of the correction cavity to correct the position of the cleaning head.

[0013] Optionally, the positioning unit includes a first positioning member and a second positioning member disposed on the correction unit, wherein a slot is formed between the first positioning member and the second positioning member for insertion and mating with the reference object.

[0014] Optionally, the first positioning member has a first positioning surface with an arcuate shape, and the second positioning member has a second positioning surface with an arcuate shape. The first positioning surface and the second positioning surface are opposite to each other and coaxially arranged, and the slot is formed between the first positioning surface and the second positioning surface.

[0015] Optionally, the inner circumferential surface of the correction cavity is an arc surface, and the central axes of the first positioning surface and the second positioning surface are collinear with the central axis of the inner circumferential surface of the correction cavity.

[0016] Optionally, the correction unit further includes a guide portion connected to the correction cavity for guiding the cleaning head into the correction cavity.

[0017] Optionally, the correction cavity extends at least through one end of the correction unit along its axial direction, and the correction unit has a notch;

[0018] Along the axial direction perpendicular to the correction cavity, one end of the notch is connected to the correction cavity, and the other end extends to the outer peripheral wall of the correction unit.

[0019] Optionally, when the correction unit includes a guide portion, the guide portion is disposed on both sides of the notch along the circumferential direction of the correction cavity.

[0020] Optionally, the guide portion includes a guide wall and a rotating member. The guide wall is connected to the edge of the correction cavity, and the rotating member is rotatably mounted on the guide wall. The rotation axis of the rotating member is parallel to the axial direction of the correction cavity.

[0021] Optionally, the positioning unit further includes a limiting structure;

[0022] When the positioning unit includes a first positioning element and a second positioning element, the limiting structure is disposed on the first positioning element and / or the second positioning element;

[0023] The limiting structure is used to limit the orientation of the notch relative to the reference object after the reference object is inserted into the slot.

[0024] Optionally, the sidewalls of the slot and / or the bottom of the slot are provided with an anti-slip layer;

[0025] And / or, the first positioning member and / or the second positioning member are provided in multiples, forming multiple slots;

[0026] And / or, the first positioning member and / or the second positioning member are provided with a hollow area;

[0027] And / or, the first positioning element and / or the second positioning element are both fan-shaped.

[0028] In summary, the cleaning head position correction device includes: a correction unit and a positioning unit; the positioning unit is disposed on the correction unit and is used to position the correction unit relative to a reference object; the correction unit is provided with a correction cavity, the shape of which is adapted to at least a portion of the outer contour of the cleaning head; the correction cavity is used to accommodate the cleaning head when the correction unit is positioned relative to the reference object, so that at least a portion of the outer contour of the cleaning head conforms to the inner wall of the correction cavity to correct the position of the cleaning head.

[0029] With this configuration, the aforementioned cleaning head position correction device uses a reference object as a guide. The positioning unit positions the correction unit relative to the reference object, ensuring the correction cavity calibrates the standard position of the cleaning head. The cleaning head is then placed within the correction cavity, ensuring a conformal fit between the cleaning head and the cavity, thus achieving position correction of the cleaning head. This device has a simple structure, is easy to use, facilitates the standardization of cleaning head position correction, and helps improve the accuracy and efficiency of position correction.

[0030] The aforementioned cleaning head position correction device calibrates the standard position of the cleaning head through the correction cavity and achieves the position correction of the cleaning head by cooperating with the cleaning head through the correction cavity. This correction structure does not rely on complex testing tools, which simplifies the structure of the entire correction device, simplifies the correction process, effectively improves the correction efficiency, and has a low cost. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of a cleaning head position correction device according to an embodiment of the present invention. Figure 1 ;

[0032] Figure 2 This is a schematic diagram of the structure of a cleaning head position correction device according to an embodiment of the present invention. Figure 2 ;

[0033] Figure 3 This is a schematic diagram of the structure of a cleaning head position correction device according to an embodiment of the present invention. Figure 3 ;

[0034] Figure 4This is a schematic diagram of the structure of a cleaning head position correction device according to an embodiment of the present invention after being fitted with a reference object;

[0035] Figure 5 This is a schematic diagram of the cleaning head position correction device according to an embodiment of the present invention. Figure 1 ;

[0036] Figure 6 This is a schematic diagram of the cleaning head position correction device according to an embodiment of the present invention. Figure 2 ;

[0037] Figure 7 for Figure 6 A partially enlarged structural diagram.

[0038] In the attached diagram:

[0039] 10-Correction Unit;

[0040] 11-Corrective cavity;

[0041] 12-Guide section; 121-Guide wall; 122-Rotating component;

[0042] 13-Gap;

[0043] 20-Positioning unit; 21-First positioning element; 211-First positioning surface; 212-Thick-walled portion; 213-Thin-walled portion; 22-Second positioning element; 221-Second positioning surface; 23-Slot; 24-Limiting structure; 25-Opening; 26-Groove;

[0044] 30 - Reference point; 31 - Fixture;

[0045] 40 - Cleaning head. Detailed Implementation

[0046] The cleaning head position correction device proposed in this invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this invention will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this invention.

[0047] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the terms “at least two” or “more than” are generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Additionally, as used in this invention, “installed,” “connected,” “linked,” and “set” on one element from another should be interpreted broadly, generally indicating only a connection, coupling, mating, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. This connection, coupling, mating, or transmission should not be construed as indicating or implying a spatial positional relationship between the two elements, i.e., one element can be located arbitrarily inside, outside, above, below, or to one side of another element, unless otherwise explicitly stated. For those skilled in the art, the specific meaning of the above terms in this invention can be understood according to the specific circumstances. Furthermore, directional terms such as above, below, up, down, upward, downward, left, right, etc., are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0048] In this embodiment, the use of the correction device is illustrated by taking the brush of the brushing machine as the cleaning head.

[0049] This cleaning head can be used to clean the surface, back, and edge of wafers. The main body of the cleaning head is cylindrical, with bristles made of a special material at the end of the main body, and a high-pressure spray structure integrated on the main body to wipe and clean the wafer.

[0050] A mechanical swing arm is installed in the brushing machine, and the cleaning head is mounted on the swing arm, which is driven by a motor. When the machine is idle, the cleaning head moves to the top of the drain cylinder to drain the dripping liquid into the drain cylinder. The drain cylinder has a fixed position, so the position of the cleaning head during drainage is considered its original position. When the cleaning head shifts due to vibration or other factors, its position relative to the drain cylinder will deviate during drainage. Therefore, in this embodiment, the drain cylinder is used as a reference to correct the position of the cleaning head.

[0051] This embodiment provides a cleaning head position correction device, including: a correction unit 10 and a positioning unit 20.

[0052] The positioning unit 20 is disposed on the correction unit 10, and the positioning unit 20 is used to position the correction unit 10 relative to the reference object 30.

[0053] The correction unit 10 is provided with a correction cavity 11, the shape of which is adapted to at least a portion of the outer contour of the cleaning head 40.

[0054] The correction cavity 11 is used to accommodate the cleaning head 40 when the correction unit 10 is positioned relative to the reference object 30, so that at least a portion of the outer contour of the cleaning head 40 conforms to the inner wall of the correction cavity 11 to correct the position of the cleaning head 40.

[0055] In this embodiment, the reference object 30 is the drainage cylinder described above, which is a thin-walled cylindrical structure (see details of the structure of the reference object 30). Figure 4 (As shown). Therefore, the positioning unit 20 can be adapted to the shape of the reference object 30.

[0056] In other alternative embodiments, appropriate components can be flexibly selected as references based on the actual cleaning system.

[0057] The aforementioned cleaning head position correction device uses reference object 30 as a reference. Positioning unit 20 positions correction unit 10 relative to reference object 30, allowing correction cavity 11 to calibrate the standard position of cleaning head 40. Cleaning head 40 is then placed within correction cavity 11, ensuring a conformal fit between cleaning head 40 and correction cavity 11, thereby achieving position correction of cleaning head 40. This device has a simple structure, is easy to use, facilitates the standardization of cleaning head position correction, helps improve the accuracy of cleaning head position correction, and increases position correction efficiency.

[0058] The aforementioned cleaning head position correction device calibrates the standard position of the cleaning head 40 through the correction cavity 11, and achieves position correction of the cleaning head 40 by cooperating with the correction cavity 11 and the cleaning head 40. This correction structure does not require complex testing tools, which simplifies the structure of the entire correction device, simplifies the correction process, effectively improves the correction efficiency, and has a low cost.

[0059] In this embodiment, the cleaning head 40 is cylindrical. Therefore, the inner circumferential surface of the correction cavity 11 is an arc surface, and the inner diameter of the inner circumferential surface of the correction cavity 11 is the same as the outer diameter of the cleaning head 40. After the correction unit 10 is positioned, the position of the correction cavity 11 is determined. The correction cavity 11 is used to calibrate the standard position of the cleaning head 40, that is, the position of the central axis of the correction cavity 11 is the standard position of the central axis of the cleaning head 40. When the cleaning head 40 is housed in the correction cavity 11, and the outer circumferential surface of the cleaning head 40 conforms to the inner circumferential surface of the correction cavity 11, the central axis of the cleaning head 40 is naturally collinear with the central axis of the correction cavity 11, thus correcting the position of the cleaning head 40. This correction structure is relatively simple, which helps reduce the cost of the correction device and improves correction efficiency.

[0060] In other alternative embodiments, the shape of the correction cavity 11 can be adapted to the outer contour of the cleaning head 40. For example, if the cleaning head 40 is partially cuboid in structure, the correction cavity 11 can be set as a cuboid to conform to the local shape of the cleaning head 40 and achieve the purpose of position correction.

[0061] In other alternative embodiments, the correction unit 10 can also position the cleaning head 40 through a protruding structure thereon. For example, when the cleaning head 40 has a recessed structure, the protruding structure on the correction unit 10 conforms to the recessed structure on the cleaning head 40 to achieve position correction of the cleaning head 40. Of course, the correction unit 10 can also achieve position correction of the cleaning head 40 through other technical means, such as achieving automated position correction through position sensors or other technical means.

[0062] Please continue to refer to this. Figures 1 to 4 As shown, in this embodiment, the correction cavity 11 extends through both ends of the correction unit 10 along its axial direction; the correction unit 10 has a notch 13;

[0063] Along the axial direction perpendicular to the correction cavity 11, one end of the notch 13 communicates with the correction cavity 11, and the other end extends to the outer peripheral wall of the correction unit 10. The notch 13 makes the correction unit 10 have an overall structure that is approximately "V" shaped or approximately "U" shaped.

[0064] The correction cavity 11 extends through the correction unit 10 at both ends along its axial direction to avoid the cleaning head 40 and other components connected to the cleaning head 40 (such as a mechanical swing arm), thus facilitating the use of the cleaning head 40. This through-hole structure also provides multiple possibilities for the cleaning head 40 to enter and exit the correction cavity 11; for example, the cleaning head 40 can enter the correction cavity 11 axially. Furthermore, the correction cavity 11 has a circumferential notch 13, providing an entrance and exit point for the cleaning head 40. In this case, the cleaning head 40 can enter the correction cavity 11 radially, and the correction cavity 11 forces the cleaning head 40 to conform to its inner wall, achieving natural correction of the cleaning head 40's position.

[0065] The through-structure at both ends of the aforementioned correction cavity 11, combined with the notch 13, allows for multiple paths for the cleaning head 40 to enter and exit the correction cavity 11. For example, it can enter and exit the correction cavity 11 radially, or axially, or enter radially and exit axially. Therefore, the path of the cleaning head 40 entering and exiting the correction cavity 11 can be flexibly arranged according to actual needs, thereby shortening the movement stroke of the cleaning head 40 and improving its position correction efficiency.

[0066] In this embodiment, the notch 13 allows a portion of the outer peripheral wall of the cleaning head 40 to conformally fit the inner wall of the correction cavity 11. In other alternative embodiments, the correction cavity 11 may not have the notch 13, in which case the correction cavity 11 is a complete chamber closed circumferentially, and the entire outer peripheral surface of the cleaning head 40 conformally fits the inner peripheral surface of the correction cavity 11.

[0067] In this embodiment, the correction cavity 11 is disposed through both ends of the correction unit 10 along its axial direction. In other alternative embodiments, the correction cavity 11 is disposed through only one end of the correction unit 10 along its axial direction. The specific connection method of the correction cavity 11 can be adaptively adjusted based on actual usage requirements and interference with other components.

[0068] Please continue to refer to this. Figures 1 to 3 As shown, the correction unit 10 also includes a guide part 12, which is connected to the correction cavity 11 and is used to guide the cleaning head 40 into the correction cavity 11.

[0069] In this embodiment, the guide portion 12 is adapted to the notch 13 of the correction cavity 11 and is disposed on both sides of the notch 13. Specifically, the guide portion 12 is disposed on both sides of the notch 13 along the circumferential direction of the correction cavity 11.

[0070] The function of the guide part 12 is to guide the cleaning head 40 into the correction cavity 11, so as to facilitate the correction of the cleaning head 40 and reduce the friction of the outer peripheral surface of the cleaning head 40, thereby reducing the wear of the outer peripheral surface of the cleaning head 40.

[0071] Please continue to refer to this. Figures 1 to 3 As shown, the guide portion 12 includes a guide wall 121 and a rotating member 122. The guide wall 121 is connected to the edge of the correction cavity 11, and the rotating member 122 is rotatably mounted on the guide wall 121. The rotation axis of the rotating member 122 is parallel to the axial direction of the correction cavity 11.

[0072] In this embodiment, the rotating component 122 is a cylindrical roller structure. The rotating component 122 is mounted on the guide wall 121 and rotates around its own axis. Since the rotation axis of the rotating component 122 is parallel to the axial direction of the correction cavity 11, when the cleaning head 40 enters the correction cavity 11 through the notch 13, if the cleaning head 40 is misaligned, it will adhere to the rotating component 122. As the cleaning head 40 continues to move into the correction cavity 11, the rotating component 122 adaptively rotates, causing rolling friction to form between the outer peripheral surface of the cleaning head 40 and the rotating component 122, thereby reducing the friction force on the outer peripheral surface of the cleaning head 40. This serves to guide the movement direction of the cleaning head 40 and protect the outer peripheral surface of the cleaning head 40.

[0073] Figures 1 to 3 The structure of the rotating component 122 itself is clearly shown, but its mounting structure is not shown. The rotating component 122 can be configured as a hollow structure, with a rotating shaft installed inside. The rotating shaft is rotatably mounted on the guide wall 121 via an external bracket. The rotational mounting structure of the rotating component 122 can adopt existing technology, which will not be described in detail here.

[0074] In other alternative embodiments, the rotating member 122 may also adopt a spherical, needle roller, or spherical roller structure. The specific shape of the rotating member 122 can be flexibly adjusted according to its usage requirements.

[0075] In this embodiment, the guide wall 121 has a planar structure with a groove. The rotating member 122 is rotatably mounted in the groove, with a portion of the rotating member 122 located outside the groove, so that the outer peripheral surface of the rotating member 122 first contacts the cleaning head 40, without contacting the surface of the guide wall 121. In other alternative embodiments, the groove may not be provided, and the rotating member 122 may be directly mounted on the surface of the guide wall 121 via a bracket.

[0076] In this embodiment, two guide walls 121 are provided, and they are smoothly connected to the notches 13 on both sides of the circumferential direction of the correction cavity 11. Each guide wall 121 has seven rotating members 122 arranged along the direction close to the correction cavity 11 and away from the correction cavity 11. The seven rotating members 122 together form a guide path for guiding the cleaning head 40 into the correction cavity 11. In other alternative embodiments, the number of rotating members 122 on each guide wall 121 can be flexibly adjusted based on its guiding requirements and the density of its arrangement. For example, the number of rotating members 122 can be less than seven (e.g., three, four, five, six), or more than seven (e.g., eight, nine, ten).

[0077] In this embodiment, it is preferable that the guide path formed by each rotating member 122 on each guide wall 121 is tangent to the inner circumferential surface of the correction cavity 11, so as to ensure that the rotating member 122 smoothly guides the cleaning head 40 into the correction cavity 11.

[0078] In this embodiment, the guide wall 121 is configured as a planar structure. In other alternative embodiments, the guide wall 121 may be configured as a curved structure.

[0079] In this embodiment, the guide portion 12 is a structure in which the guide wall 121 cooperates with the rotating member 122. In other alternative embodiments, the guide portion 12 may only include the guide wall 121 (without the rotating member 122), the guide wall 121 is smoothly connected to the inner circumferential surface of the correction cavity 11, and the guide wall 121 guides the cleaning head 40 through its smooth surface.

[0080] In this embodiment, the guide portion 12 is only provided on both sides of the notch 13 along the circumferential direction of the correction cavity 11. In other alternative embodiments, guide portions 12 can also be added at both ends of the correction cavity 11 in the axial direction. The newly added guide portions 12 can be used to guide the cleaning head 40 into the correction cavity 11 in the axial direction, so that the cleaning head 40 can have multiple paths to enter the correction cavity 11.

[0081] Furthermore, in other alternative embodiments, the location of the guide portion 12 can be adjusted based on the actual structure of the correction cavity 11. For example, when the correction cavity 11 does not have a notch 13, the correction cavity 11 is a circular structure that is closed circumferentially. In this case, the axial opening of the correction cavity 11 is the channel for the cleaning head 40 to enter and exit. Therefore, the guide portion 12 can be located at the axial opening of the correction cavity 11. The guide portion 12 is also configured as an outwardly expanding conical opening structure. In addition, the guide portion 12 can also include multiple rotating members mounted on the surface of the conical opening.

[0082] The following is combined with Figures 1 to 7 The structure of positioning unit 20 is described.

[0083] like Figures 1 to 3 As shown, the positioning unit 20 includes a first positioning member 21 and a second positioning member 22 disposed on the correction unit 10, and a slot 23 is formed between the first positioning member 21 and the second positioning member 22 for insertion and engagement with the reference object 30.

[0084] Combination Figure 4 As shown, in this embodiment, the slot 23 is adapted to be used with a thin-walled cylindrical reference object 30. When the position correction device is installed on the reference object 30, the upper end of the reference object 30 is inserted into the slot 23 axially, so that a portion of the outer wall of the reference object 30 is located inside the slot 23. Therefore, in this embodiment, the slot 23 is adapted to be an arc-shaped groove structure that fits the side wall of the reference object 30.

[0085] The positioning unit 20 is equipped with a slot 23, which allows the entire position correction device to be inserted into the reference object 30. The process is simple, easy to install and remove, and can be used immediately. Moreover, this method of insertion does not require any changes to the structure of the reference object 30 and does not affect the normal cleaning process.

[0086] Combination Figure 3 As shown, the first positioning member 21 has a first positioning surface 211 with an arc surface, and the second positioning member 22 has a second positioning surface 221 with an arc surface. The first positioning surface 211 and the second positioning surface 221 are opposite to each other and coaxially arranged, and the slot 23 is formed between the first positioning surface 211 and the second positioning surface 221.

[0087] The diameter of the first positioning surface 211 is larger than the diameter of the second positioning surface 221. The diameter of the first positioning surface 211 matches the outer diameter of the reference object 30, and the diameter of the second positioning surface 221 matches the inner diameter of the reference object 30. Therefore, the slot 23 between the first positioning surface 211 and the second positioning surface 221 has a fan-shaped ring structure. This slot 23 matches the inner and outer diameters of the reference object 30, and also matches the wall thickness of the reference object 30. When the positioning unit 20 mates with the reference object 30, a portion of the reference object 30 is located within the slot 23, and the outer circumferential surface of the reference object 30 conformally fits the first positioning surface 211, while the inner circumferential surface of the reference object 30 conformally fits the second positioning surface 221. The axial end of the reference object 30 abuts against the bottom of the slot 23. At this time, the positioning unit 20 achieves axial and radial positioning relative to the reference object 30, that is, the correction cavity 11 is positioned relative to the reference object 30, thereby enabling the correction cavity 11 to calibrate the standard position of the cleaning head 40.

[0088] In other alternative embodiments, the specific shapes of the first positioning surface 211 and the second positioning surface 221 can be adjusted based on the actual structure of the reference object 30 and its mating relationship with the reference object 30.

[0089] Please continue to refer to this. Figure 3As shown, in this embodiment, the projection of the first positioning member 21 and the second positioning member 22 along the axial direction is a fan-shaped ring structure. The axial direction of the first positioning member 21 and the second positioning member 22 is parallel to the axial direction of the correction cavity 11. Therefore, a fan-shaped annular groove structure is formed between the first positioning member 21 and the second positioning member 22. The first positioning member 21 and the second positioning member 22 are set as fan-shaped ring structures to fit the notch 13 structure of the correction cavity 11. The first positioning member 21 and the second positioning member 22 are also hollowed out at the notch 13 of the correction cavity 11. Therefore, the entire position correction device has no solid structure at the position of the notch 13, thereby effectively preventing interference with the cleaning head 40.

[0090] In this embodiment, the central axes of the first positioning surface 211 and the second positioning surface 221 are collinear with the central axis of the inner circumferential surface of the correction cavity 11. For example... Figure 4 As shown, when the upper end of the reference object 30 is conformally inserted into the slot 23, the central axes of the first positioning surface 211 and the second positioning surface 221 are collinear with the central axis of the reference object 30. Furthermore, since the central axes of the first positioning surface 211 and the second positioning surface 221 are coaxially arranged with the inner circumferential surface of the correction cavity 11, the central axis of the inner circumferential surface of the correction cavity 11 is collinear with the central axis of the reference object 30. (Combined with...) Figure 5 and Figure 6 As shown, when the outer peripheral surface of the cleaning head 40 conforms to the inner peripheral surface of the correction cavity 11, the central axis of the cleaning head 40 is collinear with the central axis of the correction cavity 11 and also with the central axis of the reference object 30, thus the position of the cleaning head 40 is corrected.

[0091] Combination Figure 2 and Figure 3 As shown, in this embodiment, the outer peripheral surface of the correction unit 10 is an arc surface, and the outer peripheral surface of the correction unit 10 is coaxially arranged with the inner peripheral surface of the correction cavity 11. Specifically, the second positioning member 22 is connected to one axial end of the correction unit 10, and the wall thickness of the second positioning member 22 is less than the wall thickness of the correction unit 10. The outer peripheral surface of the second positioning member 22 is coplanar with the outer peripheral surface of the correction unit 10. To improve the overall consistency of the entire correction device, it is preferable that the first positioning member 21 and the correction unit 10 are integrally formed.

[0092] Please continue to refer to this. Figures 1 to 3 As shown, slot 23 and correction unit 10 are misaligned in the axial direction. Combined with... Figure 4As shown, when the position correction device is mounted on the reference object 30, the reference object 30 has direct contact with the first positioning member 21 and the second positioning member 22. The correction unit 10 is located above the upper port of the reference object 30, that is, the correction unit 10 is located outside the reference object 30. This engagement method ensures that the shape of the correction unit 10 is not limited by the inner cavity of the reference object 30. Therefore, in other alternative embodiments, the shape of the correction unit 10 can be configured with other structures, such as a polygonal structure, and the shape of the correction unit 10 can be adaptively adjusted based on actual needs.

[0093] Please continue to refer to this. Figures 1 to 3 As shown, in this embodiment, there are two first positioning members 21 and one second positioning member 22. The two first positioning members 21 are disposed around the second positioning member 22. The first positioning members 21 are connected to the outer peripheral surface of the correction unit 10.

[0094] Specifically, in combination Figure 1 As shown, the first positioning member 21 is divided into a thick-walled portion 212 and a thin-walled portion 213 along the axial direction, wherein the wall thickness of the thick-walled portion 212 is greater than the wall thickness of the thin-walled portion 213, and the thick-walled portion 212 is conformally connected to the outer peripheral surface of the correction unit 10. The thick-walled portion 212 and the thin-walled portion 213 are integrally formed, the outer peripheral surface of the thick-walled portion 212 is coplanar with the outer peripheral surface of the thin-walled portion 213, and the inner peripheral surface of the thick-walled portion 212 and the inner peripheral surface of the thin-walled portion 213 have a height difference, which determines the slot width of the slot 23.

[0095] Two first positioning elements 21 cooperate with one second positioning element 22 to form two slots 23. This arrangement can reduce the material used in the positioning unit 20 and lower its material cost. On the other hand, the two slots 23 can also make the entire position correction device form a stable fit with the reference object 30 and also form a high-precision fit.

[0096] In other alternative embodiments, one first positioning element 21 may be provided, and multiple second positioning elements 22 may be provided; or one first positioning element 21 and multiple second positioning elements 22 may be provided. The specific number of first positioning elements 21 and multiple second positioning elements 22 can be flexibly adjusted based on usage requirements.

[0097] Furthermore, the positioning unit 20 also includes a limiting structure 24, which is disposed on the first positioning member 21 and / or the second positioning member 22. The limiting structure 24 is used to limit the orientation of the notch 13 relative to the reference member 30 after the reference object 30 is inserted and engaged with the slot 23.

[0098] Please refer to Figures 1 to 3As shown, there are two limiting structures 24, which are respectively disposed on the two first positioning members 21. The limiting structure 24 is disposed at the end of the first positioning member 21 away from the correction unit 10 along its axial direction, and the two limiting structures 24 are respectively disposed on the sides of the two first positioning members 21 that are circumferentially away from each other. The limiting structure 24 is a right-angled triangular plate structure, with one right-angled side attached to and connected to the axial end of the first positioning member 21, and the other right-angled side extending along the axial direction of the first positioning member 21. This right-angled side serves as a positioning side to cooperate with the structural members on the reference object 30 to achieve the effect of positioning the entire position correction device.

[0099] Combination Figures 4 to 7 As shown, in this embodiment, reference object 30 is a drain cylinder, and two retainers 31 are provided on its outer circumferential surface. The positioning edges of the two limiting structures 24 are respectively abutted against the edges of the two retainers 31. Therefore, the cooperation of the two limiting structures 24 and the two retainers 31 is used to perform circumferential positioning of the position correction device, thereby limiting the orientation of the notch 13. At this time, the direction in which the cleaning head 40 enters the correction cavity 11 in the radial direction is determined. The orientation of the notch 13 can be set to adapt to the movement path of the cleaning head 40, so that the cleaning head 40 will pass through the notch 13 and enter the correction cavity 11 to achieve position correction during its movement along its original movement path. This ensures that the position correction process does not affect the cleaning process, which helps to further optimize the position correction process and improve the position correction efficiency.

[0100] In other alternative embodiments, the limiting structure 24 can be adjusted in shape and position based on the actual structure of the reference object 30. For example, when the inner wall of the reference object 30 has corresponding structural components, the limiting structure 24 can be disposed on the second positioning member 22. Alternatively, the limiting structure 24 can be disposed on both the first positioning member 21 and the second positioning member 22. Alternatively, in other alternative embodiments, the limiting structure 24 can also be disposed on the correction unit 10.

[0101] Combination Figures 4 to 6 As shown, in this embodiment, when the entire position correction device is engaged with the reference object 30, the correction unit 10 is located outside the reference object 30. Therefore, the sidewall of the reference object 30 will not obstruct the notch 13. Thus, in other alternative embodiments, the first positioning member 21 and the second positioning member 22 can also be configured as a nested annular structure, that is, the first positioning member 21 and the second positioning member 22 do not have a hollow structure adapted to the notch 13. In this case, the first positioning member 21 and the second positioning member 22 together form an annular slot 23, which can then form a complete insertion fit with the upper end of the reference object 30.

[0102] Furthermore, the sidewalls and bottom of the slot 23 are provided with anti-slip layers. The anti-slip layer is preferably an elastic pad that adheres to the sidewalls and bottom of the slot 23, and the elastic pad is, for example, an elastic material such as polyurethane rubber or polytetrafluoroethylene. The anti-slip layer prevents relative sliding between the position correction device and the reference object 30 after they are engaged, improving the stability of their engagement. Simultaneously, the use of an elastic material in the anti-slip layer also avoids rigid contact between the correction device and the reference object 30.

[0103] In other alternative embodiments, the anti-slip layer may be provided only on the sidewalls or bottom of the slot 23. Alternatively, the anti-slip layer may be formed on surfaces with a high degree of roughness on the sidewalls and bottom of the slot 23, for example, by machining an uneven or grid-structured surface on the sidewalls and bottom of the slot 23 to form the aforementioned anti-slip layer.

[0104] Furthermore, the second positioning element 22 is provided with a hollow area.

[0105] Please continue to refer to this. Figures 1 to 3 As shown, the hollow area includes three sets of openings 25 on the second positioning member 22 and two grooves 26 on the second positioning member 22. The two grooves 26 extend along the axial direction of the second positioning member 22 to the end of the second positioning member 22 away from the correction unit 10, and the two grooves 26 are respectively radially opposite the two first positioning members 21. Each set of three openings 25 includes two openings 25 arranged axially. The three sets of openings 25 and the two grooves 26 are staggered at equal intervals along the circumferential direction of the second positioning member 22. With this arrangement, on the one hand, the optimized layout of the hollow area ensures that the second positioning member 22 has better overall structural strength and rigidity, and on the other hand, it facilitates the lightweight design of the second positioning member 22, reduces material costs, and also reduces the contact area with the reference object 30, making it easier to assemble and disassemble the position correction fixture.

[0106] In other alternative embodiments, the corresponding hollow area may be provided only on the first positioning member 21, or the corresponding hollow area may be provided on both the first positioning member 21 and the second positioning member 22.

[0107] In other alternative embodiments, the specific shape and location of the cutout area can be flexibly adjusted based on actual usage requirements.

[0108] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0109] The above description is merely a description of preferred embodiments of the present invention and is not intended to limit the scope of the present invention in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A cleaning head position correction device, characterized in that, include: Correction unit and positioning unit; The positioning unit is disposed on the correction unit, and the positioning unit is used to position the correction unit relative to the reference object; The correction unit is provided with a correction cavity, the shape of which is adapted to at least a portion of the outer contour of the cleaning head; The correction cavity is used to accommodate the cleaning head when the correction unit is positioned relative to the reference object, so that at least a portion of the outer contour of the cleaning head conforms to the inner wall of the correction cavity to correct the position of the cleaning head.

2. The cleaning head position correction device as described in claim 1, characterized in that, The positioning unit includes a first positioning member and a second positioning member disposed on the correction unit, and a slot is formed between the first positioning member and the second positioning member for insertion and mating with the reference object.

3. The cleaning head position correction device as described in claim 2, characterized in that, The first positioning member has a first positioning surface with an arc shape, and the second positioning member has a second positioning surface with an arc shape. The first positioning surface and the second positioning surface are opposite to each other and coaxially arranged, and the slot is formed between the first positioning surface and the second positioning surface.

4. The cleaning head position correction device as described in claim 3, characterized in that, The inner circumferential surface of the correction cavity is an arc surface, and the central axes of the first positioning surface and the second positioning surface are collinear with the central axis of the inner circumferential surface of the correction cavity.

5. The cleaning head position correction device as described in claim 1, characterized in that, The correction unit also includes a guide section connected to the correction cavity for guiding the cleaning head into the correction cavity.

6. The cleaning head position correction device as described in claim 5, characterized in that, The correction cavity extends at least through one end of the correction unit along its axial direction, and the correction unit has a notch; Along the axial direction perpendicular to the correction cavity, one end of the notch is connected to the correction cavity, and the other end extends to the outer peripheral wall of the correction unit.

7. The cleaning head position correction device as described in claim 6, characterized in that, The guide portion is disposed on both sides of the notch along the circumferential direction of the correction cavity.

8. The cleaning head position correction device as described in claim 7, characterized in that, The guide portion includes a guide wall and a rotating component. The guide wall is connected to the edge of the correction cavity, and the rotating component is rotatably mounted on the guide wall. The rotation axis of the rotating component is parallel to the axial direction of the correction cavity.

9. The cleaning head position correction device as described in claim 2, characterized in that, The correction cavity extends at least through one end of the correction unit along its axial direction, and the correction unit has a notch; Along the axial direction perpendicular to the correction cavity, one end of the notch is connected to the correction cavity, and the other end extends to the outer peripheral wall of the correction unit.

10. The cleaning head position correction device as described in claim 9, characterized in that, The positioning unit also includes a limiting structure; The limiting structure is disposed on the first positioning member and / or the second positioning member; The limiting structure is used to limit the orientation of the notch relative to the reference object after the reference object is inserted into the slot.

11. The cleaning head position correction device as described in claim 2, characterized in that, The sidewalls of the slot and / or the bottom of the slot are provided with an anti-slip layer; And / or, the first positioning member and / or the second positioning member are provided in multiples, forming multiple slots; And / or, the first positioning member and / or the second positioning member are provided with a hollow area; And / or, the first positioning element and / or the second positioning element are both fan-shaped.

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