Manufacturing method of reprinting type roller female die

CN119980156APending Publication Date: 2025-05-13K LASER TECH
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Patent Information

Application Number
CN202311502443.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-11-10
Publication Date
2025-05-13

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Abstract

The invention discloses a method for manufacturing a reprinting type roller female die, which comprises the following steps of: providing a roller sub-die which is cylindrical and is provided with a reprinting outer surface; releasing oxygen plasma towards the roller sub-mold in a plasma sputtering manner so as to form a plasma type outer oxide layer on the reprinting outer surface; wherein the plasma type outer oxide layer covers the reprinting outer surface to form a circular tube shape; a nickel transfer printing layer is formed on the plasma type outer oxide layer in an electroplating mode, and the plasma type outer oxide layer is fully distributed with the nickel transfer printing layer in a gapless mode; wherein the nickel transfer printing layer is defined as a reprinting type roller female die; and separating the reprinting type roller female die from the roller sub-die and the plasma type outer oxide layer on the roller sub-die. Therefore, according to the manufacturing method of the reprinting type roller female die, the plasma type outer oxide layer is used for replacing a strong oxidant containing existing potassium dichromate, and therefore the safety of operators is effectively improved.
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Description

Technical Field

[0001] The invention relates to a mold manufacturing method, in particular to a method for manufacturing a reprint type roller master mold. Background Art

[0002] The existing roller type mold manufacturing method often uses a strong oxidant containing potassium dichromate (K2Cr2O7) in the mold forming process, but the potassium dichromate is actually a highly carcinogenic substance, which is not conducive to the safety of the operators. Therefore, the inventors believe that the above defects can be improved, and have devoted themselves to research and combined with the application of scientific principles, and finally proposed a reasonable design and effective improvement of the present invention. Summary of the invention

[0003] The embodiment of the present invention provides a method for manufacturing a reprinting type roller master mold, which can effectively improve the defects that may occur in the existing roller mold manufacturing method.

[0004] The embodiment of the present invention discloses a method for manufacturing a reprinting roller master mold, which includes: a preparation step: providing a roller sub-mold, which is cylindrical and has a reprinted outer surface; a radial sputtering step: releasing oxygen plasma toward the roller sub-mold in a plasma sputtering manner to form a plasma-type outer oxide layer on the reprinted outer surface; wherein the plasma-type outer oxide layer covers the reprinted outer surface and is in a cylindrical shape; a master mold forming step: electroplating the plasma-type outer oxide layer located on the roller sub-mold to form a nickel transfer layer, which is completely covered with the plasma-type outer oxide layer; wherein the nickel transfer layer is defined as a reprinting roller master mold; and a separation step: separating the reprinting roller master mold from the roller sub-mold and the plasma-type outer oxide layer thereon.

[0005] Preferably, in the radial sputtering step, the roller mold rotates at a constant speed around a rotation axis, so that the plasma-type outer oxide layer formed by the oxygen plasma has a thickness of 0.1 micrometers to 9 micrometers.

[0006] Preferably, in the preparation step, the production process of the roller sub-mold includes: providing a roller mother mold, which is in a cylindrical shape and has a reprinted inner surface; wherein the reprinted inner surface of the roller mother mold surrounds a long sputtering space; introducing oxygen plasma into the long sputtering space of the roller mother mold by plasma sputtering to form a plasma-type inner oxide layer on the reprinted inner surface; wherein the plasma-type inner oxide layer covers the reprinted inner surface and is in a cylindrical shape to surround a reprinting space; placing a metal roller in the reprinting space, and electroplating the outer surface of the metal roller to form a nickel electroplating layer, which is seamlessly covered with the plasma-type inner oxide layer; wherein the metal roller and the nickel electroplating layer together constitute a roller sub-mold; and separating the roller sub-mold from the roller mother mold and the plasma-type inner oxide layer thereon.

[0007] Preferably, in the production process of the roller mold in the preparation step, the roller mother mold rotates at a constant speed so that the plasma-type inner oxide layer has a thickness of 0.1 micrometers to 9 micrometers.

[0008] Preferably, in the production process of the roller sub-mold in the preparation step, the center line of the metal roller and the center line of the reprinting space overlap each other, so that the metal roller and the plasma-type inner oxide layer are arranged at intervals.

[0009] Preferably, the method for manufacturing a replica roller master mold further includes a pre-step before the preparation step: providing a sub-mold sputtering device, which includes: a vacuum sputtering chamber; a rotating mechanism installed in the vacuum sputtering chamber and defining a rotation axis; wherein the rotating mechanism is provided for the roller sub-mold to be set in the preparation step, and the roller sub-mold is rotated around the rotation axis in the radial sputtering step; and a radial plasma sputtering mechanism is arranged on one side of the roller sub-mold; wherein the radial plasma sputtering mechanism releases oxygen plasma along the radial direction of the roller sub-mold and toward the replica outer surface of the roller sub-mold in the radial sputtering step to form a plasma-type outer oxide layer.

[0010] Preferably, the preceding step further provides an electroplating device located downstream of the radial plasma sputtering mechanism; wherein, during the mother mold forming step, the electroplating device electroplates the plasma-type outer oxide layer to form a nickel transfer layer.

[0011] Preferably, the preceding step further provides a plate disassembly device located downstream of the electroplating device; wherein the plate disassembly device separates the reprinting roller mother mold from the roller daughter mold and the plasma-type outer oxide layer thereon during the separation step.

[0012] Preferably, in the preceding step, the radial plasma sputtering mechanism comprises a plurality of sputtering zones arranged in a row along a direction parallel to the rotation axis, each sputtering zone is limited to a sputtering range, and the sputtering ranges of any two adjacent sputtering zones partially overlap.

[0013] Preferably, in the preceding step, each sputtering zone has an emission angle corresponding to the sputtering range, and the difference between the emission angles of any two adjacent sputtering zones is no more than 10 degrees, and the emission angle of each sputtering zone is 60 degrees to 150 degrees.

[0014] In summary, the method for manufacturing a replica roller master mold disclosed in the embodiment of the present invention uses the plasma type outer oxide layer formed by the radial sputtering step to replace the strong oxidant containing potassium dichromate, thereby effectively improving the safety of the operator. Furthermore, the plasma type outer oxide layer has better uniformity due to the radial sputtering step, so it can more accurately form an appearance corresponding to the replica outer surface.

[0015] To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, these descriptions and drawings are only used to illustrate the present invention and are not intended to limit the protection scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of a reprinting roller master mold production device according to Embodiment 1 of the present invention.

[0017] Figure 2 Schematic diagram of the preparatory steps of the method for manufacturing the reprinting roller master mold according to the first embodiment of the present invention.

[0018] Figure 3 Schematic diagram of the preparation steps of the method for manufacturing the replica roller master mold according to the first embodiment of the present invention.

[0019] Figure 4 Schematic diagram of radial sputtering steps of the method for manufacturing a replica roller master mold according to the first embodiment of the present invention.

[0020] Figure 5 Schematic diagram of the master mold forming steps of the method for manufacturing the master mold of the reprinting roller according to the first embodiment of the present invention.

[0021] Figure 6 Schematic diagram of the separation steps of the method for manufacturing the replica roller master mold according to the first embodiment of the present invention.

[0022] Figures 7 to 10 It is a schematic diagram of the production process of a roller sub-mold in the preparation step of the method for manufacturing a reprinting roller master mold according to the second embodiment of the present invention. DETAILED DESCRIPTION

[0023] The following is an explanation of the implementation method of the "replica roller master mold manufacturing method" disclosed in the present invention through specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, it should be noted in advance that the drawings of the present invention are only simple schematic illustrations and are not depicted according to actual dimensions. The following embodiments will further explain the relevant technical contents of the present invention in detail, but the disclosed contents are not intended to limit the scope of protection of the present invention.

[0024] It should be understood that, although the terms "first", "second", "third", etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component or one signal from another signal. In addition, the term "or" used herein may include any one or more combinations of the associated listed items depending on the actual situation.

[0025] [Example 1]

[0026] See also Figures 1 to 6 , which is the first embodiment of the present invention. This embodiment discloses a method for manufacturing a replica roller master mold, which sequentially includes (or implements) a pre-step S110, a preparation step S120, a radial sputtering step S130, a master mold forming step S140, and a separation step S150. The specific implementation of the above-mentioned multiple steps S110 to S150 will be described in sequence below, but they can also be adjusted and changed according to design requirements, and are not limited to this embodiment.

[0027] The preceding step S110: Figures 1 to 4 As shown, a reprinting type roller master mold production device 100 is provided, which includes a sub-mold sputtering device 1, an electroplating device 2 arranged downstream of the sub-mold sputtering device 1, and a plate disassembling device 3 arranged downstream of the electroplating device 2. The processing objects between the sub-mold sputtering device 1, the electroplating device 2 and the plate disassembling device 3 can be carried out by various suitable transfer methods and mechanisms, which are not limited here.

[0028] The sub-mold sputtering device 1 comprises a vacuum sputtering chamber 11, a rotating mechanism 12 installed in the vacuum sputtering chamber 11, and a radial plasma sputtering mechanism 13 adjacent to the rotating mechanism 12. Specifically, the vacuum sputtering chamber 11 is elongated and preferably arranged in a transverse direction, and the rotating mechanism 12 is located in the vacuum sputtering chamber 11 and defines a rotation axis R. In this embodiment, the rotating mechanism 12 can be located at opposite ends of the vacuum sputtering chamber 11 to carry a roller sub-mold 200 disposed in the vacuum sputtering chamber 11. Furthermore, the rotating mechanism 12 can be used to make the roller sub-mold 200 rotate (at a constant speed) with the rotation axis R as the center, and the specific structure of the rotating mechanism 12 can be adjusted and changed according to design requirements, and is not limited to this embodiment and the drawings.

[0029] In this embodiment, the radial plasma sputtering mechanism 13 is located in the lower area of ​​the vacuum sputtering chamber 11, and the radial plasma sputtering mechanism 13 includes a plurality of sputtering zones 131, which are preferably arranged in a row along a direction parallel to the rotation axis R, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the plurality of sputtering zones 131 may also be arranged in the lower area of ​​the vacuum sputtering chamber 11 according to design requirements instead of being arranged; or, the plurality of sputtering zones 131 may also be arranged in a staggered manner.

[0030] In this embodiment, each of the sputtering zones 131 is defined by a sputtering range 132, and the sputtering ranges 132 of any two adjacent sputtering zones 131 preferably partially overlap. Each of the sputtering zones 131 has an emission angle σ132 corresponding to the sputtering range 132, which is preferably 60 degrees to 150 degrees, and the difference between the emission angles σ132 of any two adjacent sputtering zones 131 is not greater than 10 degrees, but is not limited thereto.

[0031] It should be noted that the roller mold 200 is cylindrical in this embodiment and has a reprinted outer surface 203, and the radial plasma sputtering mechanism 13 is disposed on one side of the roller mold 200, and is used to release oxygen plasma P along the radial direction of the roller mold 200 and toward the reprinted outer surface 203 of the roller mold 200. The radial direction of the roller mold 200 is described as being perpendicular to the rotation axis R in this embodiment. In other words, any sputtering mechanism that does not use a plasma sputtering mechanism or is not disposed along the radial direction is different from the radial plasma sputtering mechanism 13 indicated in this embodiment.

[0032] The sub-mold sputtering device 1, the electroplating device 2 and the plate disassembling device 3 belong to the same production line of the reprinting roller master mold production equipment 100; that is, the sub-mold sputtering device 1, the electroplating device 2 and the plate disassembling device 3 are arranged in sequence, and their functions are operated in succession to realize the reprinting roller master mold manufacturing method. Among them, the electroplating device 2 is located downstream of the radial plasma sputtering mechanism 13, and the structures of the electroplating device 2 and the plate disassembling device 3 can be adjusted and changed according to design requirements, and the present invention is not limited here.

[0033] The above is an explanation of the pre-step S110 or the reprinting type roller master mold production equipment 100 in this embodiment, and the reprinting type roller master mold production equipment 100 is introduced by the sub-mold sputtering device 1 being matched with the electroplating device 2 and the plate disassembly device 3, but the reprinting type roller master mold production equipment 100 or the sub-mold sputtering device 1 can also be used separately (such as: sold) or matched with other devices according to design requirements, which is not limited here.

[0034] Furthermore, if Figures 1 to 6 As shown, in the following description, the replica roller master mold manufacturing method will be implemented in conjunction with the replica roller master mold production equipment 100 to implement other steps. However, in other embodiments not shown in the present invention, the preparation step S120, the radial sputtering step S130, the master mold forming step S140 and the separation step S150 can also be implemented by a device different from the replica roller master mold production equipment 100.

[0035] The preparation step S120: Figure 3 As shown, the roller mold 200 is provided. The specific production process or structure of the roller mold 200 can be adjusted and changed according to design requirements, and will not be repeated here. In other words, the rotating mechanism 12 is provided for the roller mold 200 in the preparation step S120 of this embodiment.

[0036] The radial sputtering step S130: Figure 3 and Figure 4 As shown, the oxygen plasma P is released toward the roller mold 200 by plasma sputtering to form a plasma-type outer oxide layer 300 on the reprinted outer surface 203. The rotating mechanism 12 rotates the roller mold 200 around the rotation axis R in the radial sputtering step S130 of the present embodiment. Furthermore, the radial plasma sputtering mechanism 13 releases the oxygen plasma P along the radial direction of the roller mold 200 and toward the reprinted outer surface 203 of the roller mold 200 in the radial sputtering step S130 of the present embodiment to form the plasma-type outer oxide layer 300.

[0037] In more detail, the radial plasma sputtering mechanism 13 in this embodiment can be configured with a plurality of the sputtering zones 131, thereby facilitating the oxygen plasma P to be evenly distributed on the reprinted outer surface 203. Furthermore, in the radial sputtering step S130 of this embodiment, the roller mold 200 preferably rotates at a constant speed (through the rotating mechanism 12) with the rotation axis R as the center, so that the plasma-type outer oxide layer 300 formed by the oxygen plasma P has a better uniformity and a thickness of 0.1 micrometers (μm) to 9 micrometers.

[0038] In addition, the plasma type outer oxide layer 300 covers the reprinted outer surface 203 and is in a cylindrical shape; that is, the plasma type outer oxide layer 300 can be evenly distributed over the reprinted outer surface 203. Furthermore, the plasma type outer oxide layer 300 is, for example, a nickel oxide layer, but the present invention is not limited thereto.

[0039] As described above, the plasma type outer oxide layer 300 has better uniformity due to the radial sputtering step S130, so that the outer surface of the plasma type outer oxide layer 300 can more accurately form an appearance corresponding to the reprinted outer surface 203. Furthermore, the reprinted roller master mold manufacturing method uses the plasma type outer oxide layer 300 formed by the radial sputtering step S130 to replace the existing strong oxidant containing potassium dichromate, thereby effectively improving the safety of the operator.

[0040] The mother mold forming step S140: Figure 5 As shown, a nickel transfer layer 4 is formed by electroplating on the plasma type outer oxide layer 300 located on the roller sub-mold 200, and the nickel transfer layer 4 is completely covered with the plasma type outer oxide layer 300. In this embodiment, when the roller sub-mold 200 is formed with the plasma type outer oxide layer 300, the electroplating device 2 can (in the master mold forming step S140) electroplating the nickel transfer layer 4 on the plasma type outer oxide layer 300. The nickel transfer layer 4 completely covers the plasma type outer oxide layer 300, thereby forming an appearance corresponding to (e.g., complementary to) the reprinted outer surface 203. In addition, the nickel transfer layer 4 constitutes (or is limited to) a reprinted roller master mold 4 (also referred to as a next-generation roller master mold 4), and the length of the nickel transfer layer 4 can be 0.8 meters (m) to 1.6 meters, but the present invention is not limited thereto.

[0041] The separation step S150: Figure 6 As shown, the reprinting roller master mold 4 is separated from the roller sub-mold 200 and the plasma type outer oxide layer 300 thereon. Further, the demoulding device 3 separates the reprinting roller master mold 4 from the roller sub-mold 200 and the plasma type outer oxide layer 300 thereon in the separation step S150 of this embodiment.

[0042] Furthermore, the specific separation mechanism adopted by the plate disassembling device 3 can be adjusted and changed according to design requirements, and the following examples are given, but not limited to them. The plate disassembling device 3 can firstly use a suction cup to create a small gap between the reprinting roller master mold 4 and the plasma type outer oxide layer 300, and then input a strong airflow toward the gap to separate the reprinting roller master mold 4 and the plasma type outer oxide layer 300 along the interface between them.

[0043] [Example 2]

[0044] See also Figures 7 to 10 As shown, this is the second embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities between the two embodiments will not be described in detail, and the differences between this embodiment and the above-mentioned first embodiment are roughly described as follows:

[0045] In the preparation step S120 of the present embodiment, the production process of the roller sub-mold 200 is as follows: a roller master mold 400 (e.g., a primary roller master mold produced by reprinting a photoresist layer) is provided, which is in a cylindrical shape and has a reprinted inner surface 401, which surrounds and forms a long sputtering space 402; oxygen plasma is introduced into the long sputtering space 402 of the roller master mold 400 by plasma sputtering to form a plasma-type inner oxide layer 500 on the reprinted inner surface 401, It is in the shape of a circular tube to surround and form a reprinting space S500; a metal roller 201 is placed in the reprinting space S500, and a nickel electroplating layer 202 is electroplated on the outer surface of the metal roller 201, which covers the plasma-type inner oxide layer 500 without gaps; wherein the metal roller 201 and the nickel electroplating layer 202 together constitute the roller sub-mold 200; and the roller sub-mold 200 is separated from the roller mother mold 400 and the plasma-type inner oxide layer 500 thereon.

[0046] It should be supplemented that in the production process of the roller sub-mold 200 in the preparation step S120, the roller mother mold 400 rotates at a constant speed so that the plasma-type inner oxide layer 500 has a thickness of 0.1 microns to 9 microns; furthermore, the center line of the metal roller 201 and the center line of the reprinting space S500 overlap each other, so that the metal roller 201 and the plasma-type inner oxide layer 500 are arranged at intervals. It should be additionally explained that the related components, devices, or equipment used in the production process of the roller sub-mold 200 can be changed according to design requirements, and will not be repeated here.

[0047] As described above, since the reprint type roller master mold 4 is formed by reprinting the roller sub-mold 200 rather than the original roller master mold, there are concerns about the accuracy of the reprint type roller master mold 4. In this embodiment, the reprint type roller master mold manufacturing method further defines the production process of the roller sub-mold 200 in the preparation step S120, thereby manufacturing the roller sub-mold 200 with higher accuracy, thereby effectively maintaining the accuracy of the reprint type roller master mold 4.

[0048] [Technical Effects of Embodiments of the Invention]

[0049] In summary, the method for manufacturing a replica roller master mold disclosed in the embodiment of the present invention uses the plasma type outer oxide layer formed by the radial sputtering step to replace the strong oxidant containing potassium dichromate, thereby effectively improving the safety of the operator. Furthermore, the plasma type outer oxide layer has better uniformity due to the radial sputtering step, so it can more accurately form an appearance corresponding to the replica outer surface.

[0050] Furthermore, the reprinting type roller master mold production equipment and sub-mold sputtering device disclosed in the embodiments of the present invention adopt the radial plasma sputtering mechanism to facilitate the application of oxygen plasma to the roller sub-mold, thereby providing a roller-type mold production mechanism that is different from the previous one, thereby expanding the development direction of the roller-type mold.

[0051] The contents disclosed above are only preferred feasible embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention description and drawings are included in the patent scope of the present invention.

Claims

1. A method for manufacturing a reprinting roller master mold, characterized in that: The method for manufacturing the reprinting roller master mold comprises: A preparation step: providing a roller mold, wherein the roller mold is cylindrical and has a reprinted outer surface; a radial sputtering step: releasing oxygen plasma toward the roller mold by plasma sputtering to form a plasma-type outer oxide layer on the outer surface of the reprint; wherein the plasma-type outer oxide layer covers the outer surface of the reprint and is in a circular tube shape; a master mold forming step: forming a nickel transfer layer by electroplating on the plasma type outer oxide layer of the roller sub-mold, wherein the nickel transfer layer covers the plasma type outer oxide layer without gaps; wherein the nickel transfer layer is defined as a replica roller master mold; and A separation step is to separate the reprinted roller master mold from the roller sub-mold and the plasma-type outer oxide layer on the roller sub-mold.

2. The method for manufacturing a replica roller master mold according to claim 1, characterized in that: In the radial sputtering step, the roller mold rotates at a constant speed around a rotation axis, so that the plasma-type outer oxide layer formed by the oxygen plasma has a thickness of 0.1 micrometers to 9 micrometers.

3. The method for manufacturing a replica roller master mold according to claim 1, characterized in that: In the preparation step, the production process of the roller mold includes: A roller master mold is provided, the roller master mold is in a cylindrical shape and has a reprinted inner surface; wherein the reprinted inner surface of the roller master mold surrounds and forms a long sputtering space; Introducing oxygen plasma into the elongated sputtering space of the roller master mold by plasma sputtering to form a plasma-type inner oxide layer on the inner surface of the reprint; wherein the plasma-type inner oxide layer covers the inner surface of the reprint and is in a circular tube shape to surround and form a reprint space; Placing a metal roller in the reprinting space, and electroplating a nickel electroplating layer on the outer surface of the metal roller, wherein the nickel electroplating layer covers the plasma-type inner oxide layer without gaps; wherein the metal roller and the nickel electroplating layer together constitute a roller sub-mold; and The roller sub-mold is separated from the roller master mold and the plasma type inner oxide layer on the roller master mold.

4. The method for manufacturing a replica roller master mold according to claim 3, characterized in that: In the production process of the roller sub-mold in the preparation step, the roller mother mold rotates at a constant speed so that the plasma-type inner oxide layer has a thickness of 0.1 microns to 9 microns.

5. The method for manufacturing a replica roller master mold according to claim 3, characterized in that: In the production process of the roller sub-mold in the preparation step, the center line of the metal roller and the center line of the reprinting space overlap each other, so that the metal roller and the plasma-type inner oxide layer are arranged at a distance.

6. The method for manufacturing a replica roller master mold according to claim 1, characterized in that: The method for manufacturing the replica roller master mold further comprises a pre-step before the preparation step: providing a sub-mold sputtering device, the sub-mold sputtering device comprising: a vacuum sputtering chamber; a rotating mechanism installed in the vacuum sputtering chamber and defining a rotation axis; wherein the rotating mechanism is used to place the roller mold in the preparation step, and rotates the roller mold around the rotation axis in the radial sputtering step; and A radial plasma sputtering mechanism is disposed on one side of the roller sub-mold; wherein the radial plasma sputtering mechanism releases the oxygen plasma along the radial direction of the roller sub-mold and toward the reprinted outer surface of the roller sub-mold during the radial sputtering step to form the plasma-type outer oxide layer.

7. The method for manufacturing a replica roller master mold according to claim 6, characterized in that: The preceding step also provides an electroplating device, which is located downstream of the radial plasma sputtering mechanism; wherein, during the mother mold forming step, the electroplating device electroplates the plasma-type outer oxide layer to form the nickel transfer layer.

8. The method for manufacturing a replica roller master mold according to claim 7, characterized in that: The preceding step also provides a plate disassembly device, which is located downstream of the electroplating device; wherein the plate disassembly device separates the reprinting roller master mold from the roller sub-mold and the plasma-type outer oxide layer on the roller sub-mold during the separation step.

9. The method for manufacturing a replica roller master mold according to claim 6, characterized in that: In the preceding step, the radial plasma sputtering mechanism includes a plurality of sputtering zones, which are arranged in a row along a direction parallel to the rotation axis, each of which is limited to a sputtering range, and the sputtering ranges of any two adjacent sputtering zones partially overlap.

10. The method for manufacturing a replica roller master mold according to claim 9, characterized in that: In the preceding step, each of the sputtering zones has an emission angle corresponding to the sputtering range, and the difference between the emission angles of any two adjacent sputtering zones is no more than 10 degrees, and the emission angle of each of the sputtering zones is 60 degrees to 150 degrees.