Boat foot, carrier and coating equipment

By designing a boat foot including a support component and an insulating member, the discharge and arcing problems caused by the electric potential difference between the graphite boat sheet and the film on the insulating layer are solved, and the stability of the electric field of the coating process and the improvement of the coating quality of the silicon wafer is achieved.

CN119980201APending Publication Date: 2025-05-13JIANGSU MICROVIA NANO EQUIP TECH CO LTD
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Patent Information

Application Number
CN202510361554.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-25
Publication Date
2025-05-13

AI Technical Summary

Technical Problem

In PECVD equipment, the graphite boat sheet forms an electric potential difference between the film on the insulating layer, resulting in discharge and arcing phenomena, affecting the stability of the electric field of the coating process and the coating quality of the silicon wafer.

Method used

A boat foot is designed, including a support assembly and an insulating member. The support assembly connects the conductive boat body with the support electrode rod through a support base, and insulates the arc-blocking area of ​​the conductive boat body from the rod segment of the support electrode rod through an insulating member to block the potential difference.

Benefits of technology

It effectively reduces the discharge, arcing and other phenomena of boat pages and support electrode rods, ensures the stability of the electric field of the coating process, and thus improves the coating quality of the silicon wafer.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to the technical field of solar cell preparation, and discloses a boat foot which comprises a supporting assembly and an insulating part. The supporting assembly comprises a supporting seat, and the supporting seat is used for being arranged between the conductive boat body and the supporting electrode rod so that the supporting electrode rod can support the conductive boat body through the supporting assembly; and the insulating part is arranged on the supporting assembly and is used for insulating and separating the arcing boat page area of the conductive boat body from the rod section of the supporting electrode rod corresponding to the projection of the arcing boat page area. Therefore, potential difference between the graphite boat sheet and a thin film on the insulating layer can be effectively avoided, so that the stability of an electric field of a coating process is ensured, and the coating quality of a silicon wafer is further ensured. The invention further discloses the carrier and coating equipment.
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