一种晶硅片背接触电池刻槽添加剂及其制备方法与使用方法

By using a compounded additive for grooving the back contact cells of crystalline silicon wafers, the problems of long grooving time and poor cleaning effect are solved, achieving a fast and efficient grooving process and excellent cleaning effect. The tower base is reduced, the adhesion of the oxide layer is enhanced, and the battery efficiency is improved.

CN120018620BActive Publication Date: 2026-07-17SHAOXING TUOBANG ELECTRONIC & TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHAOXING TUOBANG ELECTRONIC & TECH CO LTD
Filing Date
2025-02-26
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing additives for back contact cell grooving of crystalline silicon wafers have problems such as excessive grooving time, limited cleaning effect, and large and flat tower base, which lead to reduced cell efficiency.

Method used

A compound additive for etching the back contact cells of crystalline silicon wafers is used, including surfactants, chelating agents containing carboxyl groups, strong base-weak acid salts, and corrosion promoters containing hydroxyl groups, to form a protective film and promote anisotropic corrosion, thereby improving etching efficiency and cleaning effect.

Benefits of technology

It achieves rapid grooving (completed within 5 minutes), no molten oxide film residue, no black cores or dirt, and reduces the tower base from 20 μm to 3~5 μm, which enhances the adhesion of the subsequent deposited oxide layer and improves the production efficiency of solar cells.

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Abstract

本发明涉及晶硅片刻槽技术领域,具体涉及一种晶硅片背接触电池刻槽添加剂及其制备方法与使用方法。本发明提供了一种晶硅片背接触电池刻槽添加剂,以重量份计,包括1~2份表面活性剂,0.5~1份螯合剂,3~5份清洗剂,5~10份腐蚀促进剂,80~100份去离子水;所述螯合剂为含有羧基的螯合剂,所述清洗剂为强碱弱酸盐,所述腐蚀促进剂为含有羟基的腐蚀促进剂。本发明复配得到的晶硅片背接触电池刻槽添加剂能在保护晶硅片背接触电池非激光处的氧化膜的同时,快速腐蚀激光处熔融氧化膜及被熔融氧化膜保护的里层——隧穿氧化层和poly硅,具有提高电池片生产效率的优点。
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