A method for designing a multi-point milling path of a full-surface feature structure of a thin-walled spherical shell type microstructure

Abstract

A multi-point milling path design method for the full surface feature structure of thin-walled spherical shell micro-components is disclosed, relating to the field of micro-component processing technology. This invention can meet the requirements of high-precision, stable, and controllable removal of full surface feature structures of thin-walled spherical shell micro-components under micro-scale constraints. Key technical points: The method includes spatially uniform distribution of feature structures, micro-structure processing sequence planning, and multi-point milling path generation. The thin-walled spherical shell micro-component to be processed is observed offline using an optical microscope to obtain the coordinates of feature points on the contour edge of the micro-component, and the diameter of the micro-component is obtained by fitting. Based on the secondary development platform of UG software, a micro-structure processing sequence planning method driven by the shortest processing path is established to complete the above-mentioned full surface micro-structure processing sequence planning of the micro-component. Based on the point set coordinates optimized by the spherical point set uniform distribution iterative algorithm and the processing sequence driven by the "shortest processing path," combined with the configuration characteristics of ultra-precision shape control machining equipment and the micro-structure processing requirements, the coordinates of several uniformly distributed point sets with the center of the micro-component as the origin are transformed into a machining coordinate system with the tool setting point as the origin, obtaining the original coordinates of the micro-structure point sets and the corresponding feature angles. This invention is used for full-surface milling of thin-walled spherical shell micro-components.

Description

Technical Field

[0001] This invention relates to the field of micro-component processing technology, specifically to a method for designing multi-point milling paths for the full-surface feature structures of thin-walled spherical shell micro-components. Background Technology

[0002] Scientific and technological cooperation among countries worldwide in fields such as aerospace, biomedicine, and mechatronics is becoming increasingly frequent, leading to the widespread application of various precision, integrated, and complex micro-components. For example, polymer micro-components with diameters ranging from 1mm to 5mm and wall thicknesses from 20μm to 200μm are in increasing demand in the field of new energy exploration due to their superior properties such as low density and atomic number, high deposition rate, and good thermal stability. These micro-components have dozens to hundreds of micrometer-scale characteristic microstructures distributed across their entire surface, requiring micrometer-level shape accuracy, nanometer-level surface roughness, and micrometer-level pit spacing error. This presents significant challenges to ultra-precision manufacturing processes constrained by microscale dimensions, as well as methods for generating multi-point milling paths and generative strategies for complex microstructures.

[0003] Currently, the relatively mature five-axis precision manufacturing technology and ultra-precision manufacturing technology, mainly based on two-axis and three-axis, cannot meet the actual engineering requirements for high-precision creation of micro-components due to insufficient manufacturing process capabilities and inadequate coupling between manufacturing processes and equipment. For this high-precision machining requirement under such confined space constraints, it is necessary to design a full-surface microstructure machining process for micro-components based on the configuration characteristics of dedicated multi-axis linkage ultra-precision shape control machining equipment, and optimize the design of key machining point coordinates, machining paths, and executable program file generation methods to form a high-precision creation strategy. Since the diameter of the thin-walled spherical shell micro-components is small (1mm~5mm), and the diameter difference between thin-walled spherical shells in the same batch is significant, high accuracy is required for the calculation of multi-point machining coordinates. How to obtain optimized spatial coordinates of uniformly distributed microstructures across the entire surface based on the micro-component's marked diameter, the number of microstructures, the milling depth, and the safety distance range; complete the full-surface machining sequence planning; realize the multi-point milling coordinate transformation and milling path generation of microstructures; and thus obtain an executable CNC program file is crucial to ensuring the machining quality of the full-surface microstructures of the thin-walled spherical shell micro-components. In existing technologies, multi-axis linkage ultra-precision milling processes are mainly used for removing materials with regular basic contours such as planes and cylinders, as well as single / array structural features such as microgrooves and micropits. These processes have relatively low requirements for the uniformity of microstructure distribution, the accuracy of point coordinate calculations, and the machining sequence. In contrast, stable and controllable removal equipment and generative processes for materials with complex basic contours and spatially uniformly distributed structural features are still in the technological gap stage.

[0004] Therefore, there is an urgent need to propose a multi-point milling path design method (generative strategy) for the full surface feature structure of micro-components to meet the engineering requirements of high-precision machining of thin-walled spherical shell micro-components under the constraint of narrow space. This method aims to generate complex multi-point milling paths with uniform spatial distribution and achieve stable and controllable material removal, thus filling a gap in domestic technology. Summary of the Invention

[0005] The technical problem this invention aims to solve is that current advanced five-axis precision manufacturing technology and ultra-precision manufacturing technology, mainly based on two-axis and three-axis, cannot meet the high-precision, stable, and controllable removal process requirements for the full surface feature structure of thin-walled spherical shell micro-components under micro-scale constraints due to insufficient manufacturing process capabilities and inadequate coupling between manufacturing processes and equipment. This invention provides a multi-point milling path design method for the full surface feature structure of thin-walled spherical shell micro-components.

[0006] The technical solution adopted by the present invention to solve the above-mentioned technical problems is as follows:

[0007] A method for designing multi-point milling paths for full-surface feature structures of thin-walled spherical shell micro-components, the method being based on ultra-precision shape control machining equipment for thin-walled spherical shell micro-components, and the implementation process of the method including:

[0008] Uniform spatial distribution of feature structures, planning of microstructure machining sequence, and generation of multi-point milling paths;

[0009] Uniform spatial distribution of characteristic structures: First, the thin-walled spherical shell micro-components were observed offline using an optical microscope to obtain the coordinates O of the characteristic points on the contour edge of the micro-components. s1 (x1,y1),O s2 (x2,y2),O s3 (x3, y3), fit to obtain the diameter D1 of the micro-component; establish the workpiece coordinate system O with the center of the micro-component sphere as the origin. w -X w Y w Z w Based on the Fibonacci sequence principle, and considering the process requirements of N microstructures distributed on the surface of a micro-component, the spatial coordinates N of the original points P2 of the N uniformly distributed microstructures on the entire surface of the micro-component are obtained. wi-P2 (x w-i ,y w-i ,z w-i The uniformity of the microstructure is optimized using a uniformity optimization method.

[0010] Microstructure machining sequence planning: Based on the secondary development platform of UG software, establish the "shortest machining path d" p "A microstructure processing sequence planning method driven by the engine is used to complete the microstructure processing sequence calibration;

[0011] Multi-point milling path generation: Based on the optimized point set coordinates using a spherical point set uniform distribution iterative algorithm and the machining sequence driven by the "shortest machining path," combined with the configuration characteristics of ultra-precision shape control machining equipment and the microstructure machining process requirements, the coordinates of several uniformly distributed point sets with the micro-component's sphere center as the origin are transformed to a machining coordinate system with the tool setting point as the origin, obtaining the original coordinates of the microstructure point set and the corresponding feature angles; based on the microstructure milling depth and safety distance, through coordinate transformation and milling path planning methods, the coordinates of the points to be machined and the safety points in the machining coordinate system are obtained, completing the multi-point milling coordinate transformation and milling path generation; based on the multi-point milling path design method, the coordinates of the points with the micro-component's sphere center O are transformed to the machining coordinate system with the tool setting point as the origin, obtaining the original coordinates of the microstructure point set and the corresponding feature angles; w The coordinates Nwi-P2(xw-i, yw-i, zw-i) of the N uniformly distributed microstructure points with the origin as the origin are transformed to the tool-setting point O. m Machining coordinate system O with origin m -X m Y m Z m In the process, obtain the original point position P2 coordinates N of the microstructure point set in the machining coordinate system. cotm-P2 (x i ,y i ,z i ) and the corresponding characteristic angle α wi ; by the microstructure milling depth a p and safe distance d s The machining coordinate system O is obtained through coordinate transformation. m -X m Y m Z m The coordinates of point P3 to be processed are N mi-P3 (x mi-P3 ,y mi-P3 ,z mi-P3 ) and the coordinates N of the safety point P1 mi-P1 (x mi-P1 ,y mi-P1 ,z mi-P1 ).

[0012] The present invention has the following beneficial technical effects:

[0013] This invention focuses on explaining the multi-point milling path generation, path design method, and executable file generation method for multi-point milling of the full surface feature structure of thin-walled spherical shell micro-components, including the original point, the point to be processed, and the safety point. It also provides a complete introduction to the microstructure creation / processing strategy.

[0014] This method and strategy are based on ultra-precision micro-component shaping equipment. The diameter of the thin-walled spherical shell micro-component to be processed is observed and marked offline using an optical microscope. A workpiece coordinate system is established with the center of the micro-component as the origin. The spatial coordinates of the uniformly distributed feature structures across the entire surface of the micro-component are obtained using the Fibonacci algorithm and uniformity optimization method (this method forms the basis for subsequent multi-point milling path optimization, as explained in ZL202111063284.5). The processing sequence planning of the uniformly distributed feature structures is completed using the UG software secondary development platform. Further, using a multi-point milling path design method, the original points, processing points, and safety points on the micro-component surface are used to complete the multi-point milling coordinate transformation and milling path generation. Combining the configuration and process characteristics of the ultra-precision shaping equipment, the machining program is written. The executable file type of the CNC system is matched to generate the machining CNC program file. Based on the FTP protocol, the program file is downloaded and executed, achieving efficient, stable, and controllable removal of the feature structures across the entire surface of the thin-walled spherical shell micro-component. This invention provides a method for generating and designing multi-point milling paths, including original points, points to be processed, and safety points, as well as a method for generating executable program files.

[0015] The specific advantages of this invention are as follows:

[0016] 1. This method addresses the problem that current five-axis precision manufacturing technology, which has relatively high technical maturity, and ultra-precision manufacturing technology, which is mainly based on two-axis and three-axis, cannot meet the requirements for multi-point milling of full-surface feature structures of micro-components under micro-scale constraints due to insufficient manufacturing process capabilities and inadequate coupling between manufacturing processes and equipment. The method proposes to obtain multi-point milling paths and executable program files through steps such as uniform spatial distribution of feature structures, microstructure processing sequence planning, multi-point milling path generation, and executable file writing, so as to achieve stable and controllable removal of feature structures.

[0017] 2. This method divides the milling path of the full surface feature structure of micro-components into the original point and the point to be processed, and feeds through a hybrid linear interpolation method, which greatly improves the efficiency of machining program writing; and by setting the machining safety distance ds=0.5mm through the safety point, the tool-workpiece interference problem caused by B-axis rotation during the machining of adjacent feature structures can be effectively avoided, ensuring the safety of operation.

[0018] 3. This method systematically sorts out the key processes and important operation methods in the full-surface microstructure processing of micro-components. Through the multi-point milling path creation strategy, it can achieve efficient creation of microstructures with a surface roughness better than 26nm for thin-walled spherical shell micro-components with a diameter of 1mm~5mm, which has broad application prospects in practical engineering.

[0019] 4. This method has a certain degree of universality. It is not only applicable to the generation of milling paths and executable program files for the full surface feature structure of thin-walled spherical shell micro-components, but can also be further extended to the specific practice of precision multi-axis linkage machine tools for machining complex configuration parts such as micro-steps, micro-arrays, and free-form surfaces.

[0020] This invention is used for full-surface milling of thin-walled spherical shell micro-components. Attached Figure Description

[0021] Figure 1 This diagram illustrates an ultra-precision shape control machining equipment for thin-walled spherical shell micro-components, designed to realize a multi-point milling path design method for the full surface feature structure of these micro-components. In the diagram: 1. Thin-walled spherical shell micro-component; 2. Workpiece shaft; 3. Fixture; 4. Vertical industrial camera; 5. Horizontal industrial camera; 6. High-speed milling die; 7. Hydraulic shaft; 8. Special cutting tool; P1. Safety point; P2. Initial point; P3. Point to be machined.

[0022] Figure 2 Flowchart of a multi-point milling path design method (generative strategy) for full-surface feature structures of micro-components;

[0023] Figure 3 A flowchart of the processing path planning method;

[0024] Figure 4 A schematic diagram showing the processing coordinates and feature angles corresponding to the original locations of the microstructure;

[0025] Figure 5 This is a schematic diagram of multi-point milling of microstructures. In the diagram: (a) tool setting point; (b) safety point; (c) original point; (d) point to be machined;

[0026] Figure 6 The figure shows a schematic diagram of multi-point milling of microstructures, including: (a) a schematic diagram of multi-point milling depth and safety distance of microstructures; and (b) a schematic diagram of multi-point milling in the XwOwZw plane.

[0027] Figure 7 The diagram shows the microstructure of a local microstructure after multi-point milling. In the diagram, the left figure (a) shows the microstructure of the local microstructure, and the right figure (b) shows the surface morphology of the microstructure. Detailed Implementation

[0028] like Figure 1-7 As shown, the multi-point milling path design method for the full surface feature structure of thin-walled spherical shell micro-components described in this invention is explained as follows:

[0029] like Figure 1As shown, the multi-point milling path design method (generative strategy) for the full surface feature structure of thin-walled spherical shell micro-components is based on ultra-precision shape control machining equipment for thin-walled spherical shell micro-components. It generates a uniformly distributed point set on the full surface of the thin-walled spherical shell micro-component, plans the machining sequence, designs multi-point milling paths, and generates a system-readable program file. This invention is a high-precision generative strategy for microstructures.

[0030] This method and strategy are based on ultra-precision micro-component shaping equipment, such as... Figure 1 As shown, the equipment mainly consists of three linear motion modules (X / Y / Z axes), a hydraulic axis rotary motion unit 7, a workpiece axis rotary motion unit 2, and a high-speed milling module 6. The X / Z linear motion modules are located in a horizontal plane, arranged perpendicularly to each other, and driven by linear motors. The Y-axis linear motion module is vertically arranged on top of the X-axis motion module and driven by dual linear motors equipped with balancing cylinders. The X-axis motion module is positive in the direction away from the operating table, the Y-axis motion module is positive in the upward direction, and the Z-axis motion module is positive in the direction closer to the workpiece. The hydraulic axis rotary motion unit 7 is supported by hydrostatic bearings and is arranged on the Z-axis motion module. The workpiece axis rotary motion unit 2 is supported by gas hydrostatic bearings and is arranged on the slide of the Y-axis motion module, allowing it to move with the Y-axis. All rotary motion units are driven by frameless torque motors, with real-time position feedback from circular gratings. The high-speed milling module 6 is offset and placed on the hydraulic axis rotary motion unit 7 by a dedicated bushing. A special-purpose cutting tool 8 is connected to the end of the high-speed milling module 6 via a pneumatic clamping module, maintaining good coaxiality with its rotation center. A thin-walled spherical shell-like micro-component 1 is connected to the end of the workpiece axis rotary motion unit 2 via a vacuum adsorption fixture 3. Vacuum negative pressure is transmitted to the end of the fixture through the internal air passage of the workpiece axis rotary motion unit 2, achieving stable adsorption of the micro-component 1. A 26-megapixel high-resolution industrial camera 4 is connected to the slide of the Y-axis motion module via a micro-displacement platform and a transition plate. A 26-megapixel high-resolution industrial camera 5 is fixed to the worktable of the hydraulic axis rotary motion unit 7 via a micro-displacement platform. Both industrial cameras can be positionally adjusted via the micro-displacement platform, enabling comprehensive monitoring of the tool-workpiece contact during tool setting and machining from both vertical and horizontal directions. The equipment is equipped with a high-precision quick-change clamping module with a repeatability accuracy better than ±0.5μm, used for high-precision turning and clamping of thin-walled spherical shell-like micro-components.

[0031] The present invention provides a multi-point milling path design method and generation strategy for the full-surface feature structure of thin-walled spherical shell micro-components, comprising four parts: spatial uniform distribution of feature structures, microstructure machining sequence planning, multi-point milling path generation, and executable program file writing. Firstly, the thin-walled spherical shell micro-component is observed offline using an optical microscope to obtain the coordinates O of the feature points on the contour edge of the micro-component. s1 (x1,y1),O s2 (x2,y2),Os3 (x3, y3), fit to obtain the diameter D1 of the micro-component; establish the workpiece coordinate system O with the center of the micro-component sphere as the origin. w -X w Y w Z w Based on the Fibonacci sequence principle, and considering the process requirements of N microstructures distributed on the surface of a micro-component, the spatial coordinates N of the original points P2 of the N uniformly distributed microstructures on the entire surface of the micro-component are obtained. wi-P2 (x w-i ,y w-i ,z w-i The uniformity of the microstructure is further optimized using a uniformity optimization method. Based on the secondary development platform of UG software, a "shortest machining path d" is established. p A microstructure machining sequence planning method driven by [the system] is used to complete the microstructure machining sequence calibration. Further, based on a multi-point milling path design method, the machining sequence is determined with the micro-component's sphere center O [as the starting point]. w The coordinates Nwi-P2(xw-i, yw-i, zw-i) of the N uniformly distributed microstructure points with the origin as the origin are transformed to the tool-setting point O. m Machining coordinate system O with origin m -X m Y m Z m In the process, obtain the original point position P2 coordinates N of the microstructure point set in the machining coordinate system. cotm-P2 (x i ,y i ,z i ) and the corresponding characteristic angle α wi ; by the microstructure milling depth a p and safe distance d s The machining coordinate system O is obtained through coordinate transformation. m -X m Y m Z m The coordinates of point P3 to be processed are N mi-P3 (x mi-P3 ,y mi-P3 ,z mi-P3 ) and the coordinates N of the safety point P1 mi-P1 (x mi-P1 ,y mi-P1 ,z mi-P1 Combining the configuration and processing characteristics of ultra-precision shaping equipment, a linear interpolation method was used to complete the multi-point machining program for N evenly distributed microstructures P3, P1, and P2 on the entire surface of a micro-component with a diameter of D1. Further matching the executable file type of the CNC system generated the machining CNC program file. The self-developed CNC system, based on the FTP protocol, downloaded and executed the program file, achieving efficient, stable, and controllable removal of feature structures across the entire surface of the thin-walled spherical shell micro-component.

[0032] The working principle and operation method of the multi-point milling path design method and generation strategy for the full surface feature structure of thin-walled spherical shell micro-components are as follows:

[0033] The aforementioned method and generative strategy for designing multi-point milling paths for the full surface feature structures of thin-walled spherical shell micro-components are based on ultra-precision shape control machining equipment for thin-walled spherical shell micro-components. Addressing the urgent challenge that current, technologically advanced five-axis precision manufacturing technologies and ultra-precision manufacturing technologies, primarily two-axis and three-axis, cannot meet the high-precision, stable, and controllable removal process requirements for the full surface feature structures of thin-walled spherical shell micro-components under micro-scale constraints due to insufficient manufacturing process capabilities and inadequate coupling between manufacturing processes and equipment, this paper proposes a method and generative strategy for designing multi-point milling paths for the full surface feature structures of thin-walled spherical shell micro-components. This strategy comprises four parts: spatial uniformity of feature structures, microstructure machining sequence planning, multi-point milling path generation, and executable program file writing. Figure 2 As shown. Based on the FTP protocol, program files are loaded and executed to achieve efficient, stable, and controllable removal of full-surface feature structures of micro-components. Specific operation methods are as follows: Figure 2 As shown:

[0034] (I) Spatial Uniform Distribution of Feature Structures: The thin-walled spherical shell micro-component to be processed was observed offline using an optical microscope to obtain the coordinates of feature points on the contour edge of the micro-component, and the diameter of the micro-component was obtained by fitting the coordinates. A workpiece coordinate system was established with the center of the micro-component as the origin. Several microstructures were distributed around the surface of the micro-component to meet process requirements. Based on the Fibonacci sequence principle, the original spatial coordinates of the microstructures on the entire surface of the micro-component were obtained. Further optimization of the uniformity of the microstructure distribution was performed using a uniformity optimization method. The specific operational steps are as follows:

[0035] Step 1: Transfer the thin-walled spherical micro-component using a silicone rod to the electrostatic patch and place it in the observation area of ​​the optical microscope for offline observation. Adjust the Z-axis height of the optical microscope for manual optical focusing to ensure a clear image of the maximum outer contour of the microsphere target in the field of view; using the intersection of the auxiliary lines of the optical microscope objective as a reference, move the horizontal micro-displacement platform to mark the feature points O on the edge of the micro-component contour. s1 O s2 O s3 The diameter D1 of the micro-component is further obtained by numerical fitting method;

[0036] Furthermore, in step one, the magnification of the optical microscope used for offline detection is: objective lens × eyepiece = 2 × 100, and the image resolution is 0.1 μm;

[0037] Furthermore, in step one, the vertical movement direction of the optical microscope is defined as the Z-axis, and its adjustable range is -30mm to 30mm; its horizontal movement is driven by a manual micro-displacement platform with a resolution of 1μm.

[0038] Furthermore, in step one, the coordinates of the three feature points on the edge of the identified micro-component are O... s1 (x1,y1), O s2 (x2,y2) and O s3 (x3, y3), the corresponding micro-component diameter D1 is:

[0039] (1)

[0040] in:

[0041] (1-1)

[0042] (1-2)

[0043] (1-3)

[0044] Step 2: The micro-component is connected to the end of the workpiece shaft rotary motion unit 2 via a vacuum adsorption fixture, with the micro-component's sphere center O... w Establish the workpiece coordinate system O with the origin as the coordinate origin. w -X w Y w Z w ;

[0045] Furthermore, in step two, the workpiece coordinate system O w -X w Y w Z w Conforms to the principles of the Cartesian coordinate system;

[0046] Furthermore, in step two, the positive direction of the X-axis of the workpiece coordinate system is consistent with the positive direction of the X-axis motion module of the ultra-precision shape control machining equipment, the positive direction of the Y-axis is consistent with the positive direction of the Y-axis motion module, and the positive direction of the Z-axis is consistent with the negative direction of the Z-axis motion module.

[0047] Step 3: Distribute N microstructure requirements around the surface of the micro-component, and based on the Fibonacci sequence principle, along O w -Z w The thin-walled spherical shell of the micro-component is uniformly divided into N layers, and the coordinates of the midpoint of the thickness direction of the i-th layer are:

[0048] (2)

[0049] Furthermore, in step three, each layer or side surface of the equally thickened sections is equivalent to a torus, and its area is πD1. 2 / N, to ensure the microstructure point set Z w The uniformity of the coordinate distribution on a macroscopic scale;

[0050] Step 4: Based on the Fibonacci principle, from X... w Xiang and Y w The coordinates follow an arithmetic sequence distribution, yielding the micro-component X. w Towards Y w To coordinates:

[0051] (3)

[0052] (4)

[0053] Furthermore, in step four, x w-i and y w-i The distribution follows an arithmetic sequence to ensure that the microstructure point set X w and Y w The uniformity of the coordinate distribution on a macroscopic scale;

[0054] Furthermore, in step four, Represents the golden ratio. ;

[0055] Step 5: Based on Step 3 and Step 4, obtain the spatial coordinates N of the original points P2 of the N uniformly distributed microstructures on the entire surface of the micro-component. wi-P2 (x w-i ,y w-i ,z w-i The uniformity of the microstructure distribution is further optimized using a uniformity optimization method.

[0056] Step 51: In step 5, the uniformity optimization method assumes that there is an isotropic interaction force between any two of the N microstructure points on the full surface of the micro-component, and the magnitude of the force is proportional to the square of the distance between the two points;

[0057] Furthermore, in step five-one, the force F acting on any point in the set of N microstructure points... i It can be decomposed into a process passing through the origin O. w radial force F ri and tangential force F ti ;

[0058] Furthermore, calculate the radial force F at all uniformly distributed points. ri The vector sum T1 and the tangential force F at all uniformly distributed points. ti The modulus T2 of the vector sum:

[0059] (5)

[0060] (6)

[0061] Step 52: Based on the fact that smaller T1 and T2 in Step 51 indicate better uniformity of microstructure distribution across the entire surface of the micro-component, obtain the spatial coordinates N of the original P2 locations of the N microstructures on the entire surface of the optimized micro-component. wi-P2 (x w-i ,y w-i ,z w-i ).

[0062] (II) Microstructure machining sequence planning: Based on the secondary development platform of UG software, the "shortest machining path d" is established. p The microstructure processing sequence planning method driven by the above-mentioned micro-components completes the full-surface microstructure processing sequence planning. The specific operation steps are as follows:

[0063] Step 1: Utilize the secondary development capabilities of UG software to establish a microstructure machining sequence planning method driven by the "shortest machining path." This mainly includes steps such as constructing microstructure machining processes, setting virtual safety distances, importing optimized point set coordinates, and generating the shortest machining path. Figure 3 As shown.

[0064] Step 11: Construct a solid model of a thin-walled spherical shell with a diameter of D1 based on the UG software secondary development platform;

[0065] Steps 1 and 2: Select drilling technology and R0.236mm cutting tool to establish a machining process for the microstructure of the entire surface of the thin-walled spherical shell;

[0066] Step 13: Based on the drilling process, set a virtual safety distance d v To avoid interference between the tool and the workpiece during the simulated milling process;

[0067] Step 14: Import the optimized original spatial coordinates N of the N microstructure points P2 on the entire surface of the micro-component. wi-P2 (x w-i ,y w-i ,z w-i );

[0068] Step 15: Using the "shortest toolpath" program command, generate the shortest machining path for N original microstructure points on the entire surface of the micro-component;

[0069] Step 2: Based on the shortest processing path generated in Step 5, complete the processing sequence planning for the original N microstructure points on the entire surface of the optimized micro-component.

[0070] (III) Multi-point milling path generation: Based on the optimized point set coordinates using a spherical point set uniform distribution iterative algorithm and the machining sequence driven by the "shortest machining path," combined with the configuration characteristics of ultra-precision shape control machining equipment and the microstructure machining process requirements, the coordinates of several uniformly distributed point sets with the micro-component's sphere center as the origin are transformed into a machining coordinate system with the tool setting point as the origin, obtaining the original coordinates of the microstructure point set and the corresponding feature angles. Using the microstructure milling depth and safety distance, through coordinate transformation and milling path planning methods, the coordinates of the points to be machined and the safety points in the machining coordinate system are obtained, completing the multi-point milling coordinate transformation and milling path generation. The specific operation steps are as follows:

[0071] Step 1: When machining microstructures using ultra-precision shape control equipment, for weak hemispherical crown features that are not clamped, first rotate the C-axis by a certain angle so that any original point P2 in space rotates to the X-axis. w O w Z w For different octagonal microstructures, based on coordinate transformation methods, the octagonal coordinates N corresponding to any original point P2 are obtained. cot-P2 (x w-i ,y w-i ,z w-i, B w-i, C w-i );

[0072] Furthermore, in step one, the original point P2 of the arbitrary microstructure in space is located in the workpiece coordinate system O. w -X w Y w Z w Within the defined quadratic space;

[0073] Furthermore, in step one, based on the coordinate transformation method, the octagonal coordinates N corresponding to different octagonal microstructures are... cot-P2 (x w-i ,y w-i ,z w-i, B w-i, C w-i This can be represented as:

[0074] (7)

[0075] (8)

[0076] (9)

[0077] (10)

[0078] (11)

[0079] The detailed operation method for coordinate transformation is explained in CN117733640A, and the results are given directly here.

[0080] Step 2: Combining the configuration characteristics of the ultra-precision form control machining equipment and the requirements of microstructure machining technology, determine the quaternary coordinates N with the center of the micro-component as the origin. cot-P2 (x w-i ,y w-i ,z w-i, B w-i, C w-i Transform to a machining coordinate system with the tool setting point as the origin, and define it as machining coordinate N. cotm-P2 (x i ,y i ,z i B i C i );

[0081] Furthermore, in step two, the machining coordinate system O m -X m Y m Z m The origin is located at the machining tool setting point. Its positive X-axis direction is consistent with the positive X-axis direction of the workpiece coordinate system, its positive Y-axis direction is consistent with the positive Y-axis direction of the workpiece coordinate system, and its positive Z-axis direction is consistent with the negative Z-axis direction of the workpiece coordinate system.

[0082] Furthermore, in step two, the actual tool setting point is the furthest endpoint in the Z-direction of the micro-component surface in the workpiece coordinate system;

[0083] Furthermore, in step two, the processing coordinates N corresponding to the original spatial microstructure point P2 are... cotm-P2 (x i ,y i ,z i B i C i )for:

[0084] (12)

[0085] (13)

[0086] (14)

[0087] (15)

[0088] (16)

[0089] Furthermore, the processing coordinates N corresponding to the original points of any spatial microstructure are obtained from step two. cotm-P2 and the corresponding characteristic angle αwi =B w-i ;like Figure 4 As shown;

[0090] Step 3: Based on the multi-point milling path design method, obtain the coordinates of the points to be processed and the coordinates of the safety points corresponding to the original points of the microstructure on the surface of the micro-component in the machining coordinate system and the workpiece coordinate system;

[0091] Furthermore, in step three, during the machining of the microstructure on the surface of the micro-component, after the special tool completes the tool setting program, it is linked to the safe point coordinate, and then rotated along the C-axis to rotate the point of the microstructure to be machined to the X-axis. w O w Z w Within the plane, the tool is moved to its original position, then the machining program is executed, and it moves to the point to be machined, such as... Figure 5 As shown;

[0092] Furthermore, in step three, the machining coordinates corresponding to the original microstructure point P2 on the surface of the micro-component are N. cotm-P2 (xi,yi,zi,Bi,Ci) has a corresponding milling depth. p The set safety distance is d s ,like Figure 6 As shown;

[0093] Furthermore, in step three, the safety point P1 corresponding to the original microstructure point P2 is located in the workpiece coordinate system X. w O w Z w coordinates N in wi-P1 It can be represented as:

[0094] (17)

[0095] (18)

[0096] Furthermore, in step three, the safety point P1 corresponding to the original microstructure point P2 is located in the machining coordinate system X. m O m Z m coordinates N in mi-P1 It can be represented as:

[0097] (19)

[0098] (20)

[0099] Furthermore, in step three, the microstructure's original point P2 corresponds to the point P3 to be processed in the workpiece coordinate system X. w O w Z wcoordinates N in wi-P3 It can be represented as:

[0100] (twenty one)

[0101] (twenty two)

[0102] Furthermore, in step three, the processing point P3 corresponding to the original microstructure point P2 is located in the processing coordinate system X. m O m Z m coordinates N in mi-P3 It can be represented as:

[0103] (twenty three)

[0104] (twenty four)

[0105] Furthermore, in step three, the multi-point milling path planning method is based on X w O w Z w For a given microstructure to be processed within a plane, the B-axis and C-axis coordinates of its original point, the point to be processed, and the safety point are equal, i.e.:

[0106] B mi-P1 =B mi-P3 =B i =B w-i (25)

[0107] C mi-P1 =C mi-P3 =C i =C w-i (26)

[0108] Furthermore, in step three, after rotating along the C-axis, the spatial microstructure is rotated to the X-axis. w O w Z w In a plane, for a given microstructure to be processed, the Y-axis coordinates of its original point, the point to be processed, and the safety point are all 0, that is:

[0109] y mi-P1 =y mi-P3 =y i =0 (27)

[0110] Step 4: Based on Step 3, obtain the original point coordinates P2(x) corresponding to the N microstructures on the entire surface of the thin-walled spherical shell micro-component with diameter D1. i ,y i ,z i B i C i), coordinates of the point to be processed P3(x) mi-P3 ,y mi-P3 , zmi-P3 B mi-P3 C mi-P3 ) and the coordinates of the safety point P1(x) mi-P1 ,y mi-P1 ,z mi-P1 B mi-P1 C mi-P1 Complete the design of multi-point milling paths;

[0111] Furthermore, in step four, path planning is performed among the N microstructures to be processed according to the microstructure processing sequence planning method described above;

[0112] Furthermore, in step four, for the processing of the i-th microstructure (i=1,2,3…N) among the N microstructures, the processing sequence is carried out according to the multi-point milling path planning method described above.

[0113] (iv) Executable program file development: Combining the configuration characteristics of the ultra-precision shaping equipment and the microstructure machining process requirements, linear interpolation is used to complete the development of multi-point machining programs for the microstructures to be machined on the entire surface of the micro-component. This is further matched with the executable file type of the CNC system to generate the machining CNC program file. The self-developed CNC system, based on the FTP protocol, downloads and executes the program file, achieving efficient, stable, and controllable removal of the full surface feature structures of the thin-walled spherical shell micro-component. The specific operation steps are as follows:

[0114] Step 1: Based on the processing sequence of N microstructures and their corresponding original points, points to be processed, and safety point coordinates, write the processing program;

[0115] Step 2: Based on the executable file types of the self-developed CNC system, complete the writing of the machining CNC program file;

[0116] Furthermore, in step two, when writing the program file, it is first necessary to define a coordinate system and associate the motor-axis;

[0117] Furthermore, in step two, the program code is cached in the established program structure;

[0118] Furthermore, in step two, the relevant program setup code is as follows:

[0119] Step 3: Based on the FTP protocol, download and execute the program file to achieve efficient, stable and controllable removal of the full surface feature structure of the thin-walled spherical shell micro-component.

[0120] Implementation Case:

[0121] A multi-point milling path design method and generative strategy for the full surface feature structure of thin-walled spherical shell micro-components is proposed to address the problem that current five-axis precision manufacturing technology and ultra-precision manufacturing technology, mainly based on two-axis and three-axis, cannot meet the requirements for high-precision, stable, and controllable removal of full surface feature structures of thin-walled spherical shell micro-components under micro-scale constraints due to insufficient manufacturing process capabilities and inadequate coupling between manufacturing processes and equipment. A specific implementation case is as follows:

[0122] Step 1: Transfer the micro-component to the optical microscope stage using a silicone rod, and adjust the Z-axis height of the optical microscope to acquire the edge feature points O of the micro-component. s1 (0.4032, 0.2245), O s2 (-0.2165, 0.4076) and O s3 (-0.0197, 0.4611), the diameter of the micro-component D1 is obtained as 0.9230 mm by formula (1);

[0123] Step 2: The micro-component is clamped to the end of the workpiece's rotary motion unit using a vacuum adsorption fixture. A workpiece coordinate system O is established with the center of the micro-component's sphere as the origin. w -X w Y w Z w ;

[0124] Step 3: Based on the Fibonacci sequence principle, and considering the 16 microstructure requirements distributed across the surface of the micro-component, obtain the coordinates of the 16 micro-pit points distributed across the entire surface of the micro-component in the workpiece coordinate system, as shown in Table 1:

[0125] Table 1. Coordinates of the 16-point set on the full surface of the micro-component generated based on the Fibonacci principle.

[0126] Serial Number <![CDATA[x w-i ]]> <![CDATA[y w-i ]]> <![CDATA[z w-i ]]> Serial Number <![CDATA[x w-i ]]> <![CDATA[y w-i ]]> <![CDATA[z w-i ]]> 1 -0.1184 -0.1085 -0.4327 9 -0.3591 0.2081 0.2019 2 -0.1927 -0.2742 0.3173 10 0.3727 0.0819 0.2596 3 0.2039 -0.2660 -0.3173 11 -0.0346 0.2668 0.3750 4 0.1228 -0.1035 0.4327 12 -0.3757 0.0665 -0.2596 5 0.0235 0.2680 -0.3750 13 0.1312 -0.4183 0.1442 6 -0.1138 -0.4234 -0.1442 14 -0.2089 0.4023 -0.0865 7 0.4326 -0.1580 -0.0288 15 -0.4258 -0.1757 0.0288 8 0.1921 0.4106 0.0865 16 0.3501 0.2227 -0.2019

[0127] Step 4: Based on the uniformity optimization method, the spatial distribution uniformity of the microstructure is further optimized to obtain the coordinates of the 16 micro-pit points uniformly distributed across the entire surface of the optimized micro-component, as shown in Table 2:

[0128] Table 2. Coordinates of the 16-point set on the entire surface of the micro-component after optimization using the uniformity optimization method.

[0129] Serial Number <![CDATA[x w-i ]]> <![CDATA[y w-i ]]> <![CDATA[z w-i ]]> Serial Number <![CDATA[x w-i ]]> <![CDATA[y w-i ]]> <![CDATA[z w-i ]]> 1 -0.3761 0.0665 -0.2598 9 -0.0346 0.2670 0.3753 2 0.3505 0.2229 -0.2021 10 0.1229 -0.1036 0.4330 3 0.4330 -0.1581 -0.0289 11 -0.4261 -0.1759 0.0289 4 0.1923 0.4109 0.0866 12 0.2041 -0.2662 -0.3176 5 0.1313 -0.4187 0.1443 13 -0.3594 0.2083 0.2021 6 -0.2091 0.4026 -0.0866 14 0.0235 0.2682 -0.3753 7 0.3730 0.0820 0.2598 15 -0.1929 -0.2744 0.3176 8 -0.1139 -0.4237 -0.1443 16 -0.1185 -0.1086 -0.4330

[0130] Step 5: Based on the secondary development platform of UG software, establish the "shortest machining path d" p The microstructure processing sequence planning method driven by the above-mentioned micro-components was used to complete the processing sequence planning of 16 microstructures on the entire surface of the micro-components.

[0131] Table 3. Processing sequence of 16 microstructures on the entire surface of the micro-component

[0132] Processing sequence <![CDATA[x w-i ]]> <![CDATA[y w-i ]]> <![CDATA[z w-i ]]> Processing sequence <![CDATA[x w-i ]]> <![CDATA[y w-i ]]> <![CDATA[z w-i ]]> 1 0.1229 -0.1036 0.4330 9 0.4330 -0.1581 -0.0289 2 -0.0346 0.2670 0.3753 10 -0.2091 0.4026 -0.0866 3 -0.1929 -0.2744 0.3176 11 -0.1139 -0.4237 -0.1443 4 0.3730 0.0820 0.2598 12 0.3505 0.2229 -0.2021 5 -0.3594 0.2083 0.2021 13 -0.3761 0.0665 -0.2598 6 0.1313 -0.4187 0.1443 14 0.2041 -0.2662 -0.3176 7 0.1923 0.4109 0.0866 15 0.0235 0.2682 -0.3753 8 -0.4261 -0.1759 0.0289 16 -0.1185 -0.1086 -0.4330

[0133] Step Six: For different quaternary microstructures, taking the first 6 microstructures in the processing sequence planning as the research object, based on the coordinate transformation method, the quaternary coordinates corresponding to any original point P2 are obtained, as shown in Table 4:

[0134] Table 4. Trigram coordinates corresponding to any original point (taking the first 6 points in the processing sequence as an example)

[0135] Serial Number <![CDATA[x w-i ]]> <![CDATA[y w-i ]]> <![CDATA[z w-i ]]> <![CDATA[B w-i ]]> <![CDATA[C w-i ]]> Serial Number <![CDATA[x w-i ]]> <![CDATA[y w-i ]]> <![CDATA[z w-i ]]> <![CDATA[B w-i ]]> <![CDATA[C w-i ]]> 1 -0.1188 0 0.4330 14.91 -220.12 4 -0.2901 0 0.2598 38.95 -167.60 2 -0.0345 0 0.3753 4.29 -82.62 5 -0.2835 0 0.2021 37.91 -30.09 3 -0.1780 0 0.3176 22.69 54.89 6 -0.1263 0 0.1443 15.88 -252.59

[0136] Step 7: Determine the quaternary coordinates N with the center of the micro-component sphere as the origin. cot-P2 (x w-i ,y w-i ,z w-i, B w-i, C w-i Transform to a machining coordinate system with the tool setting point as the origin to obtain the machining coordinates and feature angles corresponding to any original point P2:

[0137] Table 5 shows the processing coordinates and feature angles corresponding to any original point P2 (taking the first 6 points in the processing sequence as an example).

[0138] Serial Number <![CDATA[x i ]]> <![CDATA[y i ]]> <![CDATA[z i ]]> <![CDATA[B i ]]> <![CDATA[C i ]]> <![CDATA[α wi ]]> Serial Number <![CDATA[x i ]]> <![CDATA[y i ]]> <![CDATA[z i ]]> <![CDATA[B i ]]> <![CDATA[C i ]]> <![CDATA[α wi ]]> 1 -0.1188 0 0.0285 14.91 -220.12 14.91 4 -0.2901 0 0.2017 38.95 -167.60 -0.2901 2 -0.0345 0 0.0862 4.29 -82.62 4.29 5 -0.2835 0 0.2594 37.91 -30.09 -0.2835 3 -0.1780 0 0.1439 22.69 54.89 22.69 6 -0.1263 0 0.3172 15.88 -252.59 -0.1263

[0139] Step 8: Based on the multi-point milling path design method, select the milling depth a. p =0.02mm, safety distance d s =0.5mm, obtain the coordinates of the point to be processed corresponding to the original point position of the microstructure on the surface of the micro-component in the workpiece coordinate system:

[0140] Table 6 shows the coordinates of the original microstructure points in the workpiece coordinate system corresponding to the points to be processed (taking the first 6 points in the processing sequence as an example).

[0141] Serial Number <![CDATA[x wi-P3 ]]> <![CDATA[y wi-P3 ]]> <![CDATA[z wi-P3 ]]> <![CDATA[B wi-P3 ]]> <![CDATA[C wi-P3 ]]> Serial Number <![CDATA[x wi-P3 ]]> <![CDATA[y wi-P3 ]]> <![CDATA[z wi-P3 ]]> <![CDATA[B wi-P3 ]]> <![CDATA[C wi-P3 ]]> 1 -0.1136 0 0.4266 14.91 -220.12 4 -0.2775 0 0.3434 38.95 -167.60 2 -0.0330 0 0.4403 4.29 -82.62 5 -0.2713 0 0.3483 37.91 -30.09 3 -0.1703 0 0.4073 22.69 54.89 6 -0.1208 0 0.4246 15.88 -252.59

[0142] Step 9: Based on the multi-point milling path design method, obtain the coordinates of the safety points corresponding to the original points of the microstructure on the surface of the micro-component in the workpiece coordinate system:

[0143] Table 7. Coordinates of safe points corresponding to the original microstructure points in the workpiece coordinate system (taking the first 6 points in the machining sequence as an example).

[0144] Serial Number <![CDATA[x wi-P1 ]]> <![CDATA[y wi-P1 ]]> <![CDATA[z wi-P1 ]]> <![CDATA[B wi-P1 ]]> <![CDATA[C wi-P1 ]]> Serial Number <![CDATA[x wi-P1 ]]> <![CDATA[y wi-P1 ]]> <![CDATA[z wi-P1 ]]> <![CDATA[B wi-P1 ]]> <![CDATA[C wi-P1 ]]> 1 -0.2474 0 0.9291 14.91 -220.12 -0.6044 0 0.7478 14.91 -220.12 2 -0.0719 0 0.9588 4.29 -82.62 -0.5907 0 0.7586 4.29 -82.62 3 -0.3708 0 0.8871 22.69 54.89 -0.2631 0 0.9248 22.69 54.89

[0145] Step 10: Based on the multi-point milling path design method, obtain the coordinates of the points to be machined corresponding to the original points of the microstructure on the surface of the micro-component in the machining coordinate system:

[0146] Table 8 shows the coordinates of the original microstructure points and the points to be processed in the machining coordinate system (taking the first 6 points in the machining sequence as an example).

[0147] Serial Number <![CDATA[x mi-P3 ]]> <![CDATA[y mi-P3 ]]> <![CDATA[z mi-P3 ]]> <![CDATA[B mi-P3 ]]> <![CDATA[C mi-P3 ]]> Serial Number <![CDATA[x mi-P3 ]]> <![CDATA[y mi-P3 ]]> <![CDATA[z mi-P3 ]]> <![CDATA[B mi-P3 ]]> <![CDATA[C mi-P3 ]]> 1 -0.1136 0 0.0349 14.91 -220.12 4 -0.2775 0 0.1181 38.95 -167.60 2 -0.0330 0 0.0212 4.29 -82.62 5 -0.2713 0 0.1132 37.91 -30.09 3 -0.1703 0 0.0542 22.69 54.89 6 -0.1208 0 0.0369 15.88 -252.59

[0148] Step 11: Based on the multi-point milling path design method, obtain the coordinates of the safety points corresponding to the original points of the microstructure on the surface of the micro-component in the machining coordinate system:

[0149] Table 9. Coordinates of the original microstructure points and corresponding safety points in the machining coordinate system (taking the first 6 points in the machining sequence as an example).

[0150] Serial Number <![CDATA[x mi-P1 ]]> <![CDATA[y mi-P1 ]]> <![CDATA[z mi-P1 ]]> <![CDATA[B mi-P1 ]]> <![CDATA[C mi-P1 ]]> Serial Number <![CDATA[x mi-P1 ]]> <![CDATA[y mi-P1 ]]> <![CDATA[z mi-P1 ]]> <![CDATA[B mi-P1 ]]> <![CDATA[C mi-P1 ]]> 1 -0.2474 0 -0.4676 14.91 -220.12 -0.6044 0 -0.2863 14.91 -220.12 2 -0.0719 0 -0.4973 4.29 -82.62 -0.5907 0 -0.2971 4.29 -82.62 3 -0.3708 0 -0.4256 22.69 54.89 -0.2631 0 -0.4633 22.69 54.89

[0151] Step 12: Based on the original point coordinates, the point coordinates to be processed, and the safety point coordinates of the 16 microstructures on the entire surface of the 0.9230mm diameter thin-walled spherical shell micro-component, complete the multi-point milling path design in the machining coordinate system.

[0152] Step 13: Based on the executable file types of the self-developed CNC system, complete the writing of the machining CNC program file;

[0153]

[0154] Step Fourteen: Based on the FTP protocol, download and execute the program file to achieve efficient, stable, and controllable removal of the full surface feature structure of the thin-walled spherical shell micro-component. The local microstructure and its micromorphology after processing are shown below. Figure 7 As shown, the surface roughness reaches 26 nm, indicating that the multi-point milling path design method and generation strategy for the full surface feature structure of thin-walled spherical shell micro-components proposed in this invention have excellent performance.

[0155] The method of this invention divides the milling path of the full surface feature structure of micro-components into origin points and points to be processed, and performs feeding through a hybrid linear interpolation method, which greatly improves the efficiency of machining program writing; and sets a machining safety distance d through safety points. s =0.5mm, which can effectively avoid tool-workpiece interference problems caused by B-axis rotation during the machining of adjacent feature structures, and ensure the safety of operation; the present invention can achieve efficient creation of microstructures with surface roughness better than 26nm for thin-walled spherical shell micro-components with diameters of 1mm~5mm through a multi-point milling path creation strategy, and has broad application prospects in practical engineering.

[0156] It should be understood that the various processes shown above can be used to rearrange, add, or delete steps. For example, the steps described in this application can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution disclosed in this application can be achieved, they are all within the protection scope of this invention.

Claims

1. A method for designing multi-point milling paths for full-surface feature structures of thin-walled spherical shell micro-components, the method being based on ultra-precision shape control machining equipment for thin-walled spherical shell micro-components, characterized in that... The implementation process of the method includes: Uniform spatial distribution of feature structures, planning of microstructure machining sequence, and generation of multi-point milling paths; Uniform spatial distribution of characteristic structures: First, the thin-walled spherical shell micro-components were observed offline using an optical microscope to obtain the coordinates O of the characteristic points on the contour edge of the micro-components. s1 (x1,y1),O s2 (x2,y2),O s3 (x3, y3), fit to obtain the diameter D1 of the micro-component; establish the workpiece coordinate system O with the center of the micro-component sphere as the origin. w -X w Y w Z w Based on the Fibonacci sequence principle, and considering the process requirements of N microstructures distributed on the surface of a micro-component, the spatial coordinates N of the original points P2 of the N uniformly distributed microstructures on the entire surface of the micro-component are obtained. wi-P2 (x w-i ,y w-i ,z w-i The uniformity of the microstructure is optimized using a uniformity optimization method. Microstructure machining sequence planning: Based on the secondary development platform of UG software, establish the "shortest machining path d" p "A microstructure processing sequence planning method driven by the engine is used to complete the microstructure processing sequence calibration; Multi-point milling path generation: Based on the optimized point set coordinates using a spherical point set uniform distribution iterative algorithm and the machining sequence driven by the "shortest machining path," combined with the configuration characteristics of ultra-precision shape control machining equipment and the microstructure machining process requirements, the coordinates of several uniformly distributed point sets with the micro-component's sphere center as the origin are transformed to a machining coordinate system with the tool setting point as the origin, obtaining the original coordinates of the microstructure point set and the corresponding feature angles; based on the microstructure milling depth and safety distance, through coordinate transformation and milling path planning methods, the coordinates of the points to be machined and the safety points in the machining coordinate system are obtained, completing the multi-point milling coordinate transformation and milling path generation; based on the multi-point milling path design method, the coordinates of the points with the micro-component's sphere center O are transformed to the machining coordinate system with the tool setting point as the origin, obtaining the original coordinates of the microstructure point set and the corresponding feature angles; w The coordinates of the N uniformly distributed microstructure point set with the origin as N wi-P2 (x w-i , y w-i , z w-i Switch to tool setting point O m Machining coordinate system O with origin m -X m Y m Z m In the process, obtain the coordinates N of the original microstructure point P2 in the machining coordinate system. cotm-P2 (x i ,y i ,z i B i C i ) and the corresponding characteristic angle α wi ; by the microstructure milling depth a p and safe distance d s The machining coordinate system O is obtained through coordinate transformation. m -X m Y m Z m The coordinates of point P3 to be processed are N mi-P3 (x mi-P3 ,y mi-P3 ,z mi-P3 B mi-P3 C mi-P3 ) and the coordinates N of the safety point P1 mi-P1 (x mi-P1 ,y mi-P1 ,z mi-P1 B mi-P1 C mi-P1 According to the original point P 2、 Point P to be processed 3、 Design a multi-point milling path for safety point P1.

2. The method for designing multi-point milling paths for full-surface feature structures of thin-walled spherical shell micro-components according to claim 1, characterized in that, The process of achieving a uniform spatial distribution of feature structures is as follows: Step 1: Use a silicone rod to transfer the thin-walled spherical shell micro-component to an electrostatic patch and place it in the observation area of ​​an optical microscope for offline observation; adjust the Z-axis height of the optical microscope for manual optical focusing so that the maximum outer contour of the microsphere target in the field of view can be clearly imaged; Using the intersection of the auxiliary lines of the optical microscope objective as a reference, move the horizontal micro-displacement platform to mark the feature points O on the contour edge of the micro-component. s1 O s2 O s3 The diameter D1 of the micro-component is further obtained by numerical fitting method; The magnification of the optical microscope used for offline observation is: objective lens × eyepiece = 2 × 100, and the image resolution is 0.1 μm; The optical microscope moves vertically in the Z-axis, with an adjustable range of -30mm to 30mm. Its horizontal movement is driven by a manual micro-displacement platform, achieving a resolution of 1μm. The coordinates of the three feature points on the edge of the identified micro-component are O s1 (x1,y1), O s2 (x2,y2) and O s3 (x3, y3), the corresponding micro-component diameter D1 is: in: (1-1) (1-2) (1-3) Step 2: The micro-component is connected to the end of the workpiece shaft rotary motion unit 2 via a vacuum adsorption fixture, with the micro-component's sphere center O... w Establish the workpiece coordinate system O with the origin as the coordinate origin. w -X w Y w Z w ; The workpiece coordinate system O w -X w Y w Z w Conforms to the principles of the Cartesian coordinate system; The positive direction of the X-axis of the workpiece coordinate system is consistent with the positive direction of the X-axis motion module of the ultra-precision shape control machining equipment; the positive direction of the Y-axis is consistent with the positive direction of the Y-axis motion module; and the positive direction of the Z-axis is consistent with the negative direction of the Z-axis motion module. Step 3: Distribute N microstructure requirements around the surface of the micro-component, and based on the Fibonacci sequence principle, along O w -Z w The thin-walled spherical shell of the micro-component is uniformly divided into N layers, and the coordinates of the midpoint of the thickness direction of the i-th layer are: Each side surface of a layer with uniform thickness is equivalent to a torus, and its area is πD1. 2 / N, to ensure the microstructure point set Z w The uniformity of the coordinate distribution on a macroscopic scale; Step 4: Based on the Fibonacci principle, from X... w Xiang and Y w The coordinates follow an arithmetic sequence distribution, yielding the micro-component X. w Towards and Y w To coordinates: x w-i and y w-i The distribution follows an arithmetic sequence to ensure that the microstructure point set X w and Y w The uniformity of the coordinate distribution on a macroscopic scale; Represents the golden ratio. ; Step 5: Based on Step 3 and Step 4, obtain the spatial coordinates N of the original points P2 of the N uniformly distributed microstructures on the entire surface of the micro-component. wi-P2 (x w-i ,y w-i ,z w-i The uniformity of the microstructure distribution is further optimized using a uniformity optimization method. Step 51: The uniformity optimization method assumes that there is an isotropic interaction force between any two points in the N microstructure points on the full surface of the micro-component, and the magnitude of the force is proportional to the square of the distance between the two points; The force F acting on any point i in the set of N microstructure points is... i It can be decomposed into a process passing through the origin O. w radial force F ri and tangential force F ti ; Calculate the radial force F at all uniformly distributed points. ri The vector sum T1 and the tangential force F at all uniformly distributed points. ti The modulus T2 of the vector sum: Step 52: Based on the fact that smaller T1 and T2 in Step 51 indicate better uniformity of microstructure distribution across the entire surface of the micro-component, obtain the spatial coordinates N of the original P2 locations of the N microstructures on the entire surface of the optimized micro-component. wi-P2 (x w-i ,y w-i ,z w-i ).

3. The method for designing multi-point milling paths for full-surface feature structures of thin-walled spherical shell micro-components according to claim 2, characterized in that, The implementation process of microstructure fabrication sequence planning is as follows: Based on the secondary development platform of UG software, a "shortest machining path d" was established. p The microstructure processing sequence planning method driven by the above-mentioned micro-components completes the full-surface microstructure processing sequence planning. The specific operation steps are as follows: Step 1: Utilize the secondary development function of UG software to establish a microstructure machining sequence planning method driven by the "shortest machining path". This mainly includes microstructure machining process construction, virtual safety distance setting, importing optimized point set coordinates, and generating the shortest machining path. Step 11: Construct a solid model of a thin-walled spherical shell with a diameter of D1 based on the UG software secondary development platform; Steps 1 and 2: Select drilling technology and R0.236mm cutting tool to establish a machining process for the microstructure of the entire surface of the thin-walled spherical shell; Step 13: Based on the drilling process, set a virtual safety distance d v To avoid interference between the tool and the workpiece during the simulated milling process; Step 14: Import the optimized original spatial coordinates N of the N microstructure points P2 on the entire surface of the micro-component. wi-P2 (x w-i ,y w-i ,z w-i ); Step 15: Using the "shortest toolpath" program command, generate the shortest machining path for N original microstructure points on the entire surface of the micro-component; Step 2: Based on the shortest processing path generated in Step 5, complete the processing sequence planning for the original N microstructure points on the entire surface of the optimized micro-component.

4. The method for designing multi-point milling paths for full-surface feature structures of thin-walled spherical shell micro-components according to claim 3, characterized in that, The implementation process of multi-point milling path generation is as follows: Step 1: When machining microstructures using ultra-precision shape control equipment, for weak hemispherical crown features that are not clamped, first rotate the C-axis by a certain angle to rotate any original point P2 of the microstructure in space to the X-axis. w O w Z w For different octagonal microstructures, based on coordinate transformation methods, the octagonal coordinates N corresponding to the original point P2 of any microstructure are obtained. cot-P2 (x w-i ,y w-i ,z w-i, B w-i, C w-i ); The original point P2 of the arbitrary microstructure in space is located in the workpiece coordinate system O. w -X w Y w Z w Within the defined quaternary space; Based on coordinate transformation methods, the octagonal coordinates N corresponding to different octagonal microstructures are... cot-P2 (x w-i ,y w-i ,z w-i, B w-i, C w-i ) is represented as: Step 2: Combining the configuration characteristics of the ultra-precision form control machining equipment and the requirements of microstructure machining technology, determine the quaternary coordinates N with the center of the micro-component as the origin. cot-P2 (x w-i ,y w-i ,z w-i, B w-i, C w-i Transform to a machining coordinate system with the tool setting point as the origin, and define it as machining coordinate N. cotm-P2 (x i ,y i ,z i B i C i ); The machining coordinate system O m -X m Y m Z m The origin is located at the machining tool setting point. Its positive X-axis direction is consistent with the positive X-axis direction of the workpiece coordinate system, its positive Y-axis direction is consistent with the positive Y-axis direction of the workpiece coordinate system, and its positive Z-axis direction is consistent with the negative Z-axis direction of the workpiece coordinate system. The actual tool setting point is the farthest endpoint in the Z-direction of the micro-component surface in the workpiece coordinate system; The machining coordinates N corresponding to the original point P2 of any spatial microstructure cotm-P2 (x i ,y i ,z i B i C i )for: The processing coordinates N corresponding to the original point location of any spatial microstructure are obtained from step two. cotm-P2 and the corresponding characteristic angle α wi =B w-i ; Step 3: Based on the multi-point milling path design method, obtain the coordinates of the points to be processed and the coordinates of the safety points corresponding to the original points of the microstructure on the surface of the micro-component in the machining coordinate system and the workpiece coordinate system; During the machining of microstructures on the surface of micro-components, after the special tool completes the tool setting program, it is linked to the safe point coordinate, and then rotated along the C-axis to rotate the point of the microstructure to be machined to the X-axis. w O w Z w Within the plane, the tool moves to the original position, then executes the machining program and moves to the position to be machined; The machining coordinates corresponding to the original point P2 of the microstructure on the surface of the micro-component are N. cotm-P2 (xi,yi,zi,Bi,Ci), with a corresponding milling depth of a. p The set safety distance is d s ; The safety point P1 corresponding to the original microstructure point P2 is in the workpiece coordinate system X. w O w Z w coordinates N in wi-P1 Represented as: The safety point P1 corresponding to the original microstructure point P2 is in the machining coordinate system X. m O m Z m coordinates N in mi-P1 Represented as: The microstructure's original point P2 corresponds to the processing point P3 in the workpiece coordinate system X. w O w Z w coordinates N in wi-P3 Represented as: The original microstructure point P2 corresponds to the processing point P3 in the processing coordinate system X. m O m Z m coordinates N in mi-P3 Represented as: Multi-point milling path planning method is based on X w O w Z w For a given microstructure to be processed within a plane, the B-axis and C-axis coordinates of its original point, the point to be processed, and the safety point are equal, i.e.: B mi-P1 =B mi-P3 =B i =B w-i C mi-P1 =C mi-P3 =C i =C w-i After rotating along the C-axis, the spatial microstructure is rotated to the X-axis. w O w Z w In a plane, for a given microstructure to be processed, the Y-axis coordinates of its original point, the point to be processed, and the safety point are all 0, that is: and mi-P1 =y mi-P3 =y i =0 Step 4: Based on Step 3, obtain the original point coordinates P2 and N corresponding to the N microstructures on the entire surface of the thin-walled spherical shell micro-component with diameter D1. cotm-P2 (x i ,y i ,z i B i C i ), coordinates of the point to be processed P3 and coordinates of N mi-P3 (x mi-P3 ,y mi-P3 ,z mi-P3 B mi-P3 C mi-P3 ) and the coordinates of the safety point P1 and N mi-P1 (x mi-P1 ,y mi-P1 ,z mi-P1 B mi-P1 C mi-P1 Complete the design of multi-point milling paths; Path planning is performed among N microstructures to be processed according to the microstructure processing sequence planning method described above. The processing sequence of the i-th microstructure among the N microstructures to be processed is carried out according to the multi-point milling path planning method described above.

5. The method for designing multi-point milling paths for full-surface feature structures of thin-walled spherical shell micro-components according to claim 1, characterized in that, The implementation process of the method also includes writing an executable program file; Executable program file writing: Combining the configuration characteristics of ultra-precision shaping equipment and the requirements of microstructure processing technology, linear interpolation is used to complete the writing of multi-point machining programs for the microstructure to be machined on the entire surface of the micro-component. The executable file type of the CNC system is matched to generate the machining CNC program file; the program file is downloaded and executed to achieve efficient, stable and controllable removal of the feature structure of the entire surface of the thin-walled spherical shell micro-component.

6. The method for designing multi-point milling paths for full-surface feature structures of thin-walled spherical shell micro-components according to claim 5, characterized in that, The process of writing an executable program file is as follows: Combining the configuration and processing characteristics of ultra-precision shape control equipment, linear interpolation is used to complete the multi-point machining program for N evenly distributed microstructures P3, P1, and P2 on the entire surface of a micro-component with a diameter of D1. The program is then matched with the executable file type of the CNC system to generate the machining CNC program file. Includes the following steps: Step 1: Based on the processing sequence of N microstructures and their corresponding original points, points to be processed, and safety point coordinates, write the processing program; Step 2: Based on the executable file types of the self-developed CNC system, complete the writing of the machining CNC program file; When writing the program file, you first need to define the coordinate system and associate it with the motor axis; the program code is cached in the established program structure. Step 3: Based on the FTP protocol, download and execute the program file to achieve efficient, stable and controllable removal of the full surface feature structure of the thin-walled spherical shell micro-component.

7. A multi-point milling path design system for the full surface feature structure of thin-walled spherical shell-like micro-components, characterized in that: The system has a program module corresponding to the steps of any one of the claims 1-4 above, and executes the steps in the multi-point milling path design method for the full surface feature structure of the thin-walled spherical shell micro-component when it is run.

8. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program configured to, when invoked by a processor, implement the steps of the multi-point milling path design method for the full surface feature structure of thin-walled spherical shell micro-components as described in any one of claims 1-4.

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