A recycling device for facilitating the recovery of polishing liquid

Abstract

The application relates to the technical field of polishing liquid purification, and provides a circulating treatment device convenient for recycling polishing liquid, which comprises a circulating treatment shell, a separation mechanism, an extension piece, a biological purification system and a driving module, a metal particle flow cavity in the circulating treatment shell is located between a liquid guide pipe and a sediment collecting cavity, the sediment collecting cavity is located below a sediment cavity, a first filter cover and a sealing sleeve are fixedly connected to the inner side of the sediment cavity, the separation mechanism comprises a piston shell, a second filter cover, a first central pipe and a piston plate, the piston shell and the piston plate are fixedly connected with the first central pipe, the second filter cover is embedded on the surface of the piston shell, the surface of the first central pipe is provided with a liquid outlet hole and a polishing particle inlet hole, the first central pipe is connected with the sediment cavity and a neutralizing cavity, the sealing sleeve is movably arranged on the surface of the first central pipe, the piston shell and the piston plate are in sliding contact with the inner wall of the liquid guide pipe and the sediment cavity respectively, and the device has the characteristics of simultaneously purifying metal scraps and ion state heavy metals.

Description

Technical Field

[0001] This invention relates to the field of polishing slurry purification technology, specifically to a recycling device for facilitating the recovery of polishing slurry. Background Technology

[0002] In the field of chemical mechanical polishing (CMP), the formulation and stability of the polishing slurry have a significant impact on the polishing effect. Since various contaminants can appear in the polishing slurry during use, it is necessary to purify the contaminated polishing slurry.

[0003] A search revealed that CN117283461A discloses a magnetorheological polishing slurry separation and purification device and method. The device includes a filtration mechanism for screening large particles in the polishing slurry, a magnetic sieve mechanism for magnetically separating magnetic components in the slurry, a storage mechanism for storing the separated waste liquid, a mixing mechanism for remixing the separated polishing slurry with new abrasive, and a cylinder for mounting each mechanism. The filtration mechanism, magnetic sieve mechanism, storage mechanism, and mixing mechanism are all installed inside the cylinder and are sequentially connected. The cylinder also has an inlet and an outlet; the inlet is connected to the filtration mechanism, and the outlet is connected to the mixing mechanism. This invention can specifically separate the components of used magnetorheological polishing slurry, sequentially separating and discharging the abrasive chips and passivated abrasive, and recovering the reusable magnetic components to mix with new abrasive to form a new magnetorheological polishing slurry for reuse. This achieves purification and sustainable utilization of the magnetorheological polishing slurry, ensuring the stability of its processing performance.

[0004] During the use of polishing slurry, not only particulate contaminants (metal scrap) but also chemical contaminants (including inorganic oxides and organic contaminants) will appear. Inorganic oxides are formed when metals react with oxygen in the air during polishing, forming oxides or ionic metals that affect the composition of the polishing slurry. Organic contaminants are oil, dust, chemical reagents, etc. that are mixed into the polishing slurry during operation. Therefore, simply separating the grinding debris and passivating abrasives separately cannot remove the chemical contaminants in the polishing slurry. Summary of the Invention

[0005] The purpose of this invention is to provide a recycling device for polishing slurry that facilitates recovery, thereby addressing the problems existing in current magnetorheological polishing slurry separation and purification devices.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a recycling device for facilitating the recovery of polishing slurry, comprising:

[0007] A circulation treatment housing includes a liquid guide tube, a sedimentation chamber, a metal particle flow chamber, a neutralization chamber, and a sediment collection chamber. The metal particle flow chamber is located between the liquid guide tube and the sediment collection chamber. The sedimentation chamber is distributed inside the metal particle flow chamber. The sediment collection chamber is located below the sedimentation chamber. A first filter cover and a sealing sleeve are fixedly connected to the inner side of the sedimentation chamber.

[0008] The separation mechanism includes a piston shell, a second filter cover, a first central tube, and a piston plate. The piston shell and piston plate are both fixedly connected to the first central tube. The second filter cover is embedded in the surface of the piston shell. The surface of the first central tube is provided with a liquid outlet hole and a polishing particle inlet hole. The first central tube connects a sedimentation chamber and a neutralization chamber. The sealing sleeve is movably sleeved on the surface of the first central tube. The piston shell and piston plate slide in contact with the liquid guide tube and the inner wall of the sedimentation chamber, respectively.

[0009] Expansion joint connected to the first central tube;

[0010] The biological purification system is connected to the first central pipe;

[0011] The drive module is connected to the first central tube drive.

[0012] As a further embodiment of the present invention, the biological purification system includes a second central tube, a spiral plate, and microbial attachment components. The spiral plate is fixedly connected to the surface of the second central tube, and the microbial attachment components are distributed on the surface of the spiral plate. The first central tube is movably sleeved inside the second central tube. The surface of the first central tube and the inner wall of the second central tube are respectively provided with a second key bar and a second key groove, and the second key bar and the second key groove are slidably connected.

[0013] As a further embodiment of the present invention, the driving module includes a driving component, a transmission tube, and a transmission gear. The transmission gear is fixedly connected to the surface of the transmission tube, and the transmission tube is movably sleeved on the surface of the first central tube. The surface of the first central tube and the inner wall of the transmission tube are respectively provided with a first key bar and a first keyway. The first key bar and the first keyway are slidably connected, and the driving component is drivingly connected to the transmission gear.

[0014] As a further embodiment of the present invention, the inner diameter of the metal particle flow chamber is larger than the inner diameter of the liquid guide tube, and the inner diameter of the precipitate collection chamber is larger than the inner diameter of the precipitate body.

[0015] As a further embodiment of the present invention, the first filter cover, the piston plate, and the second filter cover are all tapered in cross-section. The first filter cover and the piston plate are inclined toward the inner wall of the guide tube and the sedimentation chamber, respectively. The second filter cover is inclined toward the first central tube. The inner cross-section of the piston shell is tapered, and the inside of the piston shell is inclined toward the first central tube.

[0016] As a further embodiment of the present invention, the first filter cover is located below the sealing sleeve. When the telescopic member drives the piston shell and piston plate to move into the metal particle flow chamber and the precipitate collection chamber respectively, the liquid outlet is distributed in the sealing sleeve. The second key bar is disengaged from the second key groove. When the telescopic member drives the piston shell and piston plate to move into the liquid guide tube and the precipitation chamber respectively, the polishing particle inlet is distributed in the sealing sleeve, and the second key bar is located in the second key groove.

[0017] As a further embodiment of the present invention, a connecting pipe assembly is provided between the precipitation chamber and the neutralization chamber, and the precipitation chamber and the neutralization chamber are respectively provided with a heavy metal content monitoring module and a pH value monitoring module, and the neutralization chamber is connected to a delivery pipe assembly and a circulation pipe assembly.

[0018] As a further embodiment of the present invention, the sediment collection chamber is provided with a sewage discharge channel.

[0019] As a further embodiment of the present invention, the separation mechanism further includes a sealing plate, which is fixedly connected inside the first central tube and is distributed between the liquid outlet hole and the polishing grain inlet hole.

[0020] As a further embodiment of the present invention, the circulating treatment housing further includes a central cover located within the sediment collection chamber, and the drive module and the telescopic component are both connected within the central cover.

[0021] The beneficial effects of the present invention are: (1) The present application can not only purify and remove metal debris and ionic heavy metals such as lead ions, copper ions, iron ions, and zinc ions from the polishing liquid, but also can separately transport the polishing particles in the polishing liquid to the neutralization chamber before purifying the ionic heavy metals. This not only prevents the loss of polishing particles during the purification of ionic heavy metals, but also automatically mixes the polishing particles with the purified polishing liquid. It has the characteristics of good polishing particle recovery integrity and automatic mixing of polishing particles with the purified polishing liquid.

[0022] (2) By controlling the lifting and rotation of the separation mechanism, this application can not only filter and transport metal particles, precipitates and polishing particles, but also control the uniform distribution of microorganisms in polishing liquids with different orientations or different heavy metal concentrations. It has the characteristics of good purification effect, convenient polishing liquid recovery and high working efficiency. Attached Figure Description

[0023] Figure 1 This is a perspective view of the present invention.

[0024] Figure 2 This is an exploded view of the present invention.

[0025] Figure 3 This is a planar cross-sectional view of the cyclic processing shell according to an embodiment of the present invention.

[0026] Figure 4 This is a perspective view of the separation mechanism according to an embodiment of the present invention.

[0027] Figure 5 This is an assembly diagram of the separation mechanism, biological purification system, and drive module according to an embodiment of the present invention.

[0028] Figure 6 This is a first planar sectional view of the present invention.

[0029] Figure 7 For the present invention Figure 6 A magnified view of a portion of point a.

[0030] Figure 8 This is a second planar sectional view of the present invention.

[0031] Figure 9 This is a planar sectional view of the present invention assembled with the liquid tank.

[0032] Attached figure label: 1-Liquid tank;

[0033] 2-Circulation treatment shell, 21-Liquid guide tube, 22-Sedimentation chamber, 221-First filter cover, 222-Sealing sleeve, 23-Metal particle flow chamber, 24-Fixing sleeve, 25-Neutralization chamber, 26-Sediment collection chamber, 261-Drainage channel, 27-Central cover; 3-Separation mechanism, 31-Piston shell, 32-Second filter cover, 33-First central tube, 34-Liquid outlet, 35-Polishing particle inlet, 36-Sealing plate, 37-Piston plate, 38-First key bar, 39-Second key bar;

[0034] 4-Biological purification system, 41-Second central tube, 42-Spiral plate, 43-Microbial attachment component;

[0035] 5-Drive module, 51-Drive component, 52-Transmission pipe, 53-Transmission gear;

[0036] 6-Heavy metal content monitoring module; 7-Connecting pipe group;

[0037] 8-Conveying pipe assembly, 9-Circulation pipe assembly, 10-PH value monitoring module, 11-Extension component, 111-Lifting plate. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0039] The specific implementation of the present invention will be described in detail below with reference to specific embodiments.

[0040] Please see Figures 1 to 9 In one embodiment of the present invention, a recycling device for facilitating the recovery of polishing slurry includes:

[0041] The circulation treatment housing 2 includes a liquid guide tube 21, a sedimentation chamber 22, a metal particle flow chamber 23, a neutralization chamber 25, and a sediment collection chamber 26. The metal particle flow chamber 23 is located between the liquid guide tube 21 and the sediment collection chamber 26. The sedimentation chamber 22 is distributed inside the metal particle flow chamber 23. The sediment collection chamber 26 is located below the sedimentation chamber 22. A first filter cover 221 and a sealing sleeve 222 are fixedly connected to the inside of the sedimentation chamber 22.

[0042] The separation mechanism 3 includes a piston shell 31, a second filter cover 32, a first central tube 33, and a piston plate 37. The piston shell 31 and the piston plate 37 are both fixedly connected to the first central tube 33. The second filter cover 32 is embedded in the surface of the piston shell 31. The surface of the first central tube 33 is provided with a liquid outlet hole 34 and a polishing particle inlet hole 35. The first central tube 33 connects the sedimentation chamber 22 and the neutralization chamber 25. The sealing sleeve 222 is movably sleeved on the surface of the first central tube 33. The piston shell 31 and the piston plate 37 slide in contact with the inner wall of the liquid guide tube 21 and the sedimentation chamber 22, respectively. The mesh size of the first filter cover 221 is greater than that of the second filter cover 32.

[0043] Telescopic component 11 connected to the first central tube 33;

[0044] Biological purification system 4 connected to the first central pipe 33;

[0045] The drive module 5 is connected to the first central tube 33.

[0046] Please see Figure 5 and Figure 6 Furthermore, the drive module 5 includes a drive component 51, a transmission tube 52, and a transmission gear 53. The transmission gear 53 is fixedly connected to the surface of the transmission tube 52. The transmission tube 52 is movably sleeved on the surface of the first central tube 33. The surface of the first central tube 33 and the inner wall of the transmission tube 52 are respectively provided with a first key bar 38 and a first keyway. The first key bar 38 is slidably connected to the first keyway. The drive component 51 is drively connected to the transmission gear 53.

[0047] Please see Figure 1 Furthermore, the sediment collection chamber 26 is provided with a sewage discharge channel 261, which allows users to easily collect sediment or heavy metal waste inside the sediment collection chamber 26 through the sewage discharge channel 261.

[0048] Please see Figure 7Furthermore, the separation mechanism 3 also includes a sealing plate 36, which is fixedly connected inside the first central tube 33 and is distributed between the liquid outlet hole 34 and the polishing particle inlet hole 35.

[0049] Please see Figure 6 Furthermore, the circulating processing housing 2 also includes a central cover 27 located within the sediment collection chamber 26, and the drive module 5 and the telescopic component 11 are both connected within the central cover 27.

[0050] In this embodiment of the invention, the liquid guide tube 21 is fixedly connected to the drain port at the bottom of the liquid tank 1. A control switch is provided at the drain port. When the polishing liquid inside the liquid tank 1 needs to be purified, the control switch is turned on. The inner diameter of the metal particle flow chamber 23 is larger than the inner diameter of the liquid guide tube 21, and the inner diameter of the sediment collection chamber 26 is larger than the inner diameter of the sedimentation chamber 22. The first filter cover 221, the piston plate 37, and the second filter cover 32 all have conical cross-sections. The first filter cover 221 and the piston plate 37 are inclined toward the inner walls of the liquid guide tube 21 and the sedimentation chamber 22, respectively, while the second filter cover 32 is inclined toward the first central tube 33. The piston shell 31 has a conical internal cross-section and is inclined towards the first central tube 33. The first filter cover 221 is located below the sealing sleeve 222. When the telescopic member 11 drives the piston shell 31 and piston plate 37 to move into the metal particle flow chamber 23 and the sediment collection chamber 26 respectively, the liquid outlet 34 is distributed in the sealing sleeve 222, and the second key bar 39 is disengaged from the second key groove. When the telescopic member 11 drives the piston shell 31 and piston plate 37 to move into the liquid guide tube 21 and the sedimentation chamber 22 respectively, the polishing particle inlet 35 is distributed in the sealing sleeve 222, and the second key bar 39 is located in the second key groove.

[0051] Please see Figure 5 and Figure 6 In one embodiment of the present invention, the biological purification system 4 includes a second central tube 41, a spiral plate 42, and a microbial attachment member 43. The spiral plate 42 is fixedly connected to the surface of the second central tube 41, and the microbial attachment member 43 is distributed on the surface of the spiral plate 42. The first central tube 33 is movably sleeved inside the second central tube 41. The surface of the first central tube 33 and the inner wall of the second central tube 41 are respectively provided with a second key bar 39 and a second key groove. The second key bar 39 and the second key groove are slidably connected.

[0052] Please see Figure 6 and Figure 7 Furthermore, a connecting pipe group 7 is provided between the precipitation chamber 22 and the neutralization chamber 25. The precipitation chamber 22 and the neutralization chamber 25 are respectively provided with a heavy metal content monitoring module 6 and a pH value monitoring module 10. The neutralization chamber 25 is connected to a delivery pipe group 8 and a circulation pipe group 9.

[0053] In this embodiment of the invention, the bottom of the first filter cover 221 and the inner wall of the sedimentation chamber 22 are both fixedly connected to a fixing sleeve 24, and the second central tube 41 is connected inside the fixing sleeve 24. The shape and structure of the microbial attachment 43 are not limited and will not be described in detail. The heavy metal content monitoring module 6 is a portable heavy metal detector. This heavy metal detector is usually miniaturized and suitable for on-site use. It can quickly detect the concentration of heavy metals in liquids. The pH value monitoring module 10 is a pH sensor.

[0054] Working principle: First, open the switch at the drain port at the bottom of the liquid tank 1. The polishing liquid enters the second filter cover 32 through the liquid guide pipe 21. The second filter cover 32 is used to filter large metal debris in the polishing liquid. The filtered polishing liquid flows through the piston shell 31, the first central tube 33, and the liquid outlet 34 to the first filter cover 221. The second filter cover 32 is used to filter polishing particles in the polishing liquid. The polishing liquid after secondary filtration enters the sedimentation chamber 22. Microorganisms attached to the surface of the microbial attachment component 43 remove heavy metals such as lead ions, copper ions, iron ions, and zinc ions from the polishing liquid through adsorption, sedimentation, or biotransformation. Oil stains and other organic pollutants are used to convert the toxic form of heavy metals into a low-toxicity or non-toxic form, and to reduce the concentration of heavy metals in the environment. Then, the drive component 51 and the transmission gear 53 control the transmission pipe 52, the first central pipe 33, the second central pipe 41 and the spiral plate 42 to rotate at a certain frequency at a low speed to ensure that the microorganisms are in uniform contact with the heavy metals in the polishing liquid. This achieves the purpose of uniform distribution of microorganisms in polishing liquids with different orientations or different heavy metal concentrations, thereby improving the activity of microorganisms and the efficiency of heavy metal purification. The precipitates produced by purification adhere to the surface of the piston plate 37.

[0055] When the heavy metal content monitoring module 6 detects that the heavy metal content in the precipitation chamber 22 meets the set threshold, the connecting pipe group 7 is first used to transport the precipitated polishing liquid to the neutralization chamber 25. Then, the telescopic component 11 is used to control the lifting plate 111 and the first central tube 33 to descend, thereby moving the piston shell 31 and the piston plate 37 into the metal particle flow chamber 23 and the precipitate collection chamber 26, respectively. Since the liquid outlet 34 is distributed in the sealing sleeve 222, the polishing particle inlet 35 extends out of the fixing sleeve 24, and the second key bar 39 disengages from the second keyway, the drive module 5 can independently control the first central tube 33, the piston shell 31, and the piston plate 37 to rotate at high speed. Since the inner diameter of the metal particle flow chamber 23 is larger than the inner diameter of the liquid guide pipe 21, and the inner diameter of the precipitate collection chamber 26 is larger than the inner diameter of the precipitation chamber 22, the centrifugal force generated by the rotation of the piston shell 31 is used to move the second filter cover 32. Metal debris from the surface is thrown into the metal particle flow chamber 23 and then into the sediment collection chamber 26. The centrifugal force generated by the rotation of the piston plate 37 is used to throw the sediment into the sediment collection chamber 26. The polishing particles on the surface of the first filter cover 221 automatically enter the neutralization chamber 25 through the polishing particle inlet 35 and the first central tube 33 under the action of gravity. Under the premise of determining the pH value parameter monitored by the pH value monitoring module 10, the neutralizing agent is then delivered into the neutralization chamber 25 through the delivery pipe group 8. When the pH value of the purified polishing liquid meets the preset threshold, the concentration of polishing particles in the neutralization chamber 25 can also be measured by the turbidimeter. When the concentration of polishing particles is lower than the threshold, polishing particles are added to the neutralization chamber 25. Finally, the circulation pipe group 9 is used to circulate the polishing liquid to the spray pipe group, thereby realizing the function of recycling the polishing liquid.

[0056] In summary, this application can not only purify and remove metal debris and ionic heavy metals such as lead ions, copper ions, iron ions, and zinc ions from the polishing slurry, but also separately transport the polishing particles in the polishing slurry to the neutralization chamber 25 before purifying the ionic heavy metals. This not only prevents the loss of polishing particles during the purification of ionic heavy metals, but also automatically mixes the polishing particles with the purified polishing slurry. It has the characteristics of good polishing particle recovery integrity and automatic mixing of polishing particles with the purified polishing slurry.

[0057] This application, by controlling the lifting and rotation of the separation mechanism 3, can not only filter and transport metal particles, precipitates and polishing particles, but also control the uniform distribution of microorganisms in polishing liquids of different orientations or different heavy metal concentrations. It has the characteristics of good purification effect, convenient polishing liquid recovery and high working efficiency.

[0058] While several embodiments and examples of the present invention have been described for those skilled in the art, these embodiments and examples are provided as examples and are not intended to limit the scope of the invention. These new embodiments can be implemented in various other ways, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention.

[0059] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A recycling device for easy recovery of polishing slurry, characterized in that, include: The circulating treatment housing (2) includes a liquid guide tube (21), a sedimentation chamber (22), a metal particle flow chamber (23), a neutralization chamber (25), and a sediment collection chamber (26). The metal particle flow chamber (23) is located between the liquid guide tube (21) and the sediment collection chamber (26). The sedimentation chamber (22) is distributed inside the metal particle flow chamber (23). The sediment collection chamber (26) is located below the sedimentation chamber (22). A first filter cover (221) and a sealing sleeve (222) are fixedly connected inside the sedimentation chamber (22). The separation mechanism (3) includes a piston shell (31), a second filter cover (32), a first central tube (33), and a piston plate (37). The piston shell (31) and the piston plate (37) are fixedly connected to the first central tube (33). The second filter cover (32) is embedded in the surface of the piston shell (31). The surface of the first central tube (33) is provided with a liquid outlet hole (34) and a polishing particle inlet hole (35). The first central tube (33) connects the sedimentation chamber (22) and the neutralization chamber (25). The sealing sleeve (222) is movably sleeved on the surface of the first central tube (33). The piston shell (31) and the piston plate (37) slide in contact with the inner wall of the liquid guide tube (21) and the sedimentation chamber (22), respectively. Telescopic component (11) connected to the first central tube (33); A biological purification system (4) connected to the first central tube (33); The drive module (5) is connected to the first central tube (33) for transmission.

2. The recycling device for easy recovery of polishing slurry according to claim 1, characterized in that, The biological purification system (4) includes a second central tube (41), a spiral plate (42), and microbial attachments (43). The spiral plate (42) is fixedly connected to the surface of the second central tube (41), and the microbial attachments (43) are distributed on the surface of the spiral plate (42). The first central tube (33) is movably sleeved inside the second central tube (41). The surface of the first central tube (33) and the inner wall of the second central tube (41) are respectively provided with a second key bar (39) and a second key groove. The second key bar (39) and the second key groove are slidably connected.

3. The recycling device for easy recovery of polishing slurry according to claim 2, characterized in that, The drive module (5) includes a drive component (51), a transmission tube (52), and a transmission gear (53). The transmission gear (53) is fixedly connected to the surface of the transmission tube (52). The transmission tube (52) is movably sleeved on the surface of the first central tube (33). The surface of the first central tube (33) and the inner wall of the transmission tube (52) are respectively provided with a first key bar (38) and a first keyway. The first key bar (38) is slidably connected to the first keyway. The drive component (51) is connected to the transmission gear (53) in a transmission manner.

4. The recycling device for easy recovery of polishing slurry according to claim 1, characterized in that, The inner diameter of the metal particle flow chamber (23) is larger than the inner diameter of the liquid guide tube (21), and the inner diameter of the precipitate collection chamber (26) is larger than the inner diameter of the precipitate body (22).

5. The recycling device for easy recovery of polishing slurry according to claim 1, characterized in that, The first filter cover (221), piston plate (37) and second filter cover (32) are all tapered in cross section. The first filter cover (221) and piston plate (37) are inclined toward the inner wall of the guide tube (21) and sedimentation chamber (22) respectively. The second filter cover (32) is inclined toward the first central tube (33). The piston shell (31) has a tapered internal cross section and is inclined toward the first central tube (33).

6. The recycling device for easy recovery of polishing slurry according to claim 3, characterized in that, When the first filter cover (221) is located below the sealing sleeve (222), and the telescopic member (11) drives the piston shell (31) and piston plate (37) to move into the metal particle flow chamber (23) and the sediment collection chamber (26) respectively, the liquid outlet (34) is distributed in the sealing sleeve (222), and the second key bar (39) is disengaged from the second key groove. When the telescopic member (11) drives the piston shell (31) and piston plate (37) to move into the liquid guide tube (21) and sedimentation chamber (22) respectively, the polishing particle inlet (35) is distributed in the sealing sleeve (222), and the second key bar (39) is located in the second key groove.

7. The recycling device for easy recovery of polishing slurry according to claim 1, characterized in that, A connecting pipe assembly (7) is provided between the precipitation chamber (22) and the neutralization chamber (25). The precipitation chamber (22) and the neutralization chamber (25) are respectively equipped with a heavy metal content monitoring module (6) and a pH value monitoring module (10). The neutralization chamber (25) is connected to a delivery pipe assembly (8) and a circulation pipe assembly (9).

8. A recycling device for easy recovery of polishing slurry according to claim 1, characterized in that, The sediment collection chamber (26) is provided with a sewage discharge channel (261).

9. A recycling device for easy recovery of polishing slurry according to claim 1, characterized in that, The separation mechanism (3) also includes a sealing plate (36), which is fixedly connected inside the first central tube (33) and is distributed between the liquid outlet (34) and the polishing grain inlet (35).

10. A recycling device for easy recovery of polishing slurry according to claim 3, characterized in that, The circulating processing housing (2) also includes a central cover (27) located in the sediment collection chamber (26), and the drive module (5) and the telescopic component (11) are both connected inside the central cover (27).

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