An automatic pipeline energy dispersive X-ray fluorescence spectral array scanning analysis method

Abstract

The application discloses an automatic pipeline energy dispersion X fluorescence spectrum array scanning analysis method, which comprises the following steps: a left automatic sampling connection device / right automatic sampling connection device sends array samples into a sample conveying positioning detection mechanism in an X fluorescence spectrum array scanning analysis device through corresponding first conveying mechanisms and second conveying mechanisms; and a Z-axis energy dispersion X fluorescence spectrometer high-efficiency double optical path system above the array sample positioning detection mechanism performs array detection analysis on the array sample; products are conveyed to the middle X fluorescence spectrum array scanning analysis device through the left and right automatic sampling connection devices, and array detection is performed, so that a high-efficiency high-performance optical path system is realized, different product test requirements are met, and the accuracy and efficiency of the test process can be met simultaneously.

Description

Technical Field

[0001] This invention belongs to the field of energy dispersive X-ray fluorescence spectroscopy detection, and specifically relates to an automated production line X-ray fluorescence spectroscopy array scanning device. Background Technology

[0002] In the field of modern market industry automatic spectral detection, with the increasing demands of customers, including new requirements such as improving efficiency and reducing costs, the requirements for integrating automatic spectral detection equipment into automated production are also increasing. In the current field of automatic spectral detection, independent X-ray fluorescence spectrometers are mainly used, and there is a lack of automated production line mechanisms or devices, especially for the planar or flat structure production line transportation mechanisms or devices in some 3C products. Therefore, it is necessary to find some mechanisms or devices that can improve production efficiency. Summary of the Invention

[0003] In view of this, to overcome at least one of the aforementioned defects in the prior art, the present invention provides an automated pipeline energy-dispersive X-ray fluorescence spectroscopy array scanning analysis method, which can effectively solve the related problems, comprising: The left automatic sample feeding device / right automatic sample feeding device sends the array sample into the sample transfer positioning and detection mechanism in the X-ray fluorescence spectroscopy array scanning analysis device through the corresponding first and second transfer mechanisms. The high-efficiency dual-optical-path system of the Z-axis energy dispersive X-ray fluorescence spectrometer above detects and analyzes the array sample. The sample transfer and positioning detection mechanism performs XY axis movement through an automatic XY axis adjustment device and coordinates with the Z axis movement mechanism of the dual optical path system to position the array sample. Meanwhile, the host lifting mechanism clamps or fixes the array sample and forms side positioning on both sides through the cooperation of the fixed transfer mechanism and the moving transfer mechanism on the transfer and positioning detection mechanism. After side positioning is completed, the array sample is placed on the lower side of the dual-optical-path system. The first optical path module of the dual-optical-path system is fixed. By moving the second optical path module, the third optical path module and so on until the nth optical path module is moved, the first optical path module corresponds to the starting sample, the second optical path module corresponds to the mth sample, the third optical path module corresponds to 2*(m-1) samples, and so on, with the nth optical path module corresponding to (n-1)*(m-1) samples. When all optical path modules correspond to the corresponding samples, the detection and analysis function of the dual-optical-path system is activated to perform detection and analysis.

[0004] The method involves equipment including: a left automatic sample inlet connector and a right automatic sample inlet connector on both sides, an X-ray fluorescence spectrometer array scanning analysis device located between the left and right automatic sample inlet connectors, the X-ray fluorescence spectrometer array scanning analysis device including an XY-axis automatic adjustment device and a Z-axis energy dispersive X-ray fluorescence spectrometer high-efficiency dual-optical-path system located above the XY-axis automatic adjustment device, and an energy dispersive X-ray fluorescence spectrometer water-cooling pipeline with multiple safety protections connected to the X-ray source in the high-efficiency dual-optical-path system for cooling; The XY axis automatic adjustment device includes an X adjustment mechanism for adjustment on the X axis and a Y adjustment mechanism for adjustment on the Y axis. The X adjustment mechanism is disposed on the Y adjustment mechanism. A sample transfer positioning and detection mechanism is installed on the X adjustment mechanism. A protective cover lifting mechanism including a protective cover is also installed on the X adjustment mechanism. The protective cover is a barrel-shaped structure without upper and lower covers. The XY axis automatic adjustment device is disposed inside the barrel-shaped structure. The high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer includes: an optical path base plate; a first optical path module fixedly mounted on the optical path base plate; a second optical path module, a third optical path module, and so on up to an nth optical path module mounted on a sliding component on the optical path base plate and matched with the fixed optical path module; an integrated shutter collimating filter switching module mounted under the first optical path module and the second, third, and so on up to the nth optical path modules; and a movement adjustment module that corresponds one-to-one with the second, third, and so on up to the nth optical path modules and is used to adjust the distance between the second, third, and so on up to the nth optical path modules and the first optical path module.

[0005] As described in the background section of this invention, existing automated spectral detection methods primarily utilize independent X-ray fluorescence spectrometers, lacking automated production line mechanisms or devices, especially for planar or flat-panel transport mechanisms or devices in certain 3C products. The automated production line energy-dispersive X-ray fluorescence spectrometry array scanning analysis method disclosed in this invention uses left and right automatic sample feeding devices (the two devices can be identical, facilitating production process adjustment and reducing overall production costs) to transport products to a central X-ray fluorescence spectrometry array scanning analysis device for array detection. Simultaneously, based on practical product applications, the product's optical path system is optimized, with multiple optical path modules arranged. One path is fixed, while the displacement of other paths can be adjusted via movable modules. The system also optimizes the configuration of integrated shutters, collimators, and filter switching components. The testing unit, based on samples of different sizes, calculates and effectively adjusts the displacement of the movable optical paths according to algorithms, achieving a high-efficiency, high-performance optical path system. This meets the testing needs of different products, simultaneously satisfying the accuracy and efficiency requirements of the testing process. It is applicable to industries related to RoHS directives, the electronics industry, integrated circuits, and other industries with higher requirements for efficiency and accuracy.

[0006] The scanning and detection method, which involves effectively adjusting the displacement of the movable optical path based on an algorithm calculation, can be implemented as follows: A sample array is set on the underside of the optical path base plate. The spacing between the first optical path module and multiple second optical path modules is pre-designed or adjusted according to the sample array, forming a spacing S2 between the first and second optical path modules, a spacing S3 between the second and third optical path modules, and so on, up to a spacing Sn between the (n-1)th and nth optical path modules. The first optical path module corresponds to the initial sample in the sample array, and the second optical path module corresponds to the m-th sample determined by the spacing S2, until the nth optical path module corresponds to a combination of (n-1)*(m-1) samples determined by the spacing Sn. Then, the optical path base plate is driven by a driving unit to perform array scanning and detection. The number of movable optical path modules used can be determined based on the width of the sample array. When the sample array width is small, only two sets of optical path modules can be used, such as the first optical path module and the second optical path module, to improve efficiency. To improve efficiency, the distance between the first and second optical path modules can be adjusted to half the width of the sample array (i*j). At the start of detection, the detection point of the first optical path module is at the first starting point (1,1) of the sample array, and the detection starting point of the second optical path module is at (i / 2,j) of the sample. If i is odd, the detection starting point of the second optical path module is at ((i+1) / 2,j), which can double the efficiency. When the sample array width is large, n>2 moving optical path modules can be used, as in the method when n=2, which can improve efficiency by n times. If the sample array is even larger, the optical path modules on the optical path base plate can be made into an array-type optical path, which can further improve efficiency. At the same time, due to the use of dual-path detection components, the detection accuracy can be greatly improved. In the detection method, the sample can be fixed and the optical path can move along the XY axis, or even the Z axis. Alternatively, the optical path can only be responsible for the Z-axis movement, and the sample can move along the XY axis, thus forming a three-dimensional movement between the optical path and the sample, thereby further improving the overall efficiency.

[0007] In addition, the automated pipeline energy-dispersive X-ray fluorescence spectroscopy array scanning analysis method disclosed in this invention also has the following additional technical features: Further, the left automatic sample inlet connector and the right automatic sample inlet connector include a base plate, a first conveying mechanism and a second conveying mechanism, the first conveying mechanism and the second conveying mechanism corresponding to each other, the first conveying mechanism being fixedly mounted on the base plate, the second conveying mechanism being mounted on the base plate via a sliding mechanism, and a lifting mechanism for lifting samples; the first conveying mechanism includes a support component mounted on the base plate for overall support, a conveying wheel and an adjusting wheel mounted on the support component, a conveyor belt mounted on the conveying wheel and the adjusting wheel, a drive component mounted on the support component, and a drive wheel mounted on the drive shaft of the drive component; the second conveying mechanism includes a component mounted on the sliding mechanism. The system includes a support component that provides overall support, a conveyor wheel and an adjusting wheel mounted on the support component, a conveyor belt mounted on the conveyor wheel and the adjusting wheel, a drive component mounted on the support component, and a drive wheel mounted on the drive shaft of the drive component. The lifting mechanism includes a front-end gripper for holding the sample and a rear-end lifting component for driving the gripper upward. It also includes left and right automatic sample feeding and docking devices. These automatic sample feeding and docking devices, located on the left and right sides of the main testing unit, enable rapid, streamlined transport of planar products. Simultaneously, the lifting mechanism ensures that even when the equipment is stopped during sample feeding and the power transmission mechanism is continuously operating, the planar product can be lifted off the conveyor belt or stopped at a fixed position, guaranteeing product safety.

[0008] Specific process: When the external assembly line transports samples to the automatic sample feeding and docking device, the drive wheel and drive belt extend beyond the boundary of the horizontal plate. At the same time, the outer diameter of the drive wheel is lower than the outer surface of the conveyor belt, allowing the sample to transition smoothly. Adjusting the positions of the second and first conveyor mechanisms enables the conveying of products of different widths. The tension of the conveyor belt is adjusted using the up-down and left-right adjustment structures, which can also address issues caused by excessively long conveyor belts. Simultaneously, a lifting mechanism is used to ensure that planar products can be lifted off the conveyor belt or stopped at a fixed position when the equipment is stopped during sample feeding and the transmission mechanism is continuously working, ensuring product safety. The grippers and sides are equipped with anti-static and wear-resistant soft materials to prevent scratches on the product surface.

[0009] Furthermore, the lifting component is a cylinder, and the gripper is installed at the end of the cylinder. There can be two cylinders, distributed on the left and right sides, which are driven simultaneously to ensure the stability of the product's posture. Alternatively, there can be one cylinder, which is located on the side where the sample enters the detection host. When the sample inside the monitoring host is being detected, the conveyor belt is still rotating. At this time, the lifting component rises, and the front gripper extends to block the sample. The lifting component can either lift the sample away from the conveyor belt or not lift the sample away from the conveyor belt, but only block the sample from moving forward.

[0010] Furthermore, the lifting component is a rotary motor, and the gripper is mounted on a screw structure connected to the motor; or the lifting component is a linear motor, and the gripper is mounted on the linear motion structure of the linear motor. Using a motor can make the lifting action more stable.

[0011] Furthermore, the sliding mechanism includes a slide rail disposed on the base plate and a slider mounted on the slide rail, and the support component of the second conveying mechanism is mounted on the slider. Thus, the distance between the first conveying mechanism and the second conveying mechanism can be adjusted automatically or manually to accommodate product conveying processes of different widths.

[0012] Furthermore, the supporting component includes a vertical plate and a horizontal plate mounted on the vertical plate. The conveying wheels are located on both sides of the horizontal plate and inside the conveyor belt. The adjusting wheel is located on the horizontal plate below the conveying wheels and outside the conveyor belt. The driving component is a motor, which is mounted on the horizontal plate via a motor fixing plate. The driving wheel is located on the motor drive shaft and inside the conveyor belt. The supporting components of the two conveying mechanisms can be the same or different. The vertical plate can be designed as needed, depending on whether it is mounted on the sliding mechanism or on the base plate. Similarly, the supporting component can also be an integrally formed structure, and the horizontal plate can be designed in the same way.

[0013] Furthermore, the horizontal plate is provided with a vertical adjustment structure for adjusting the up and down movement of the motor. The vertical adjustment structure is an adjustment groove or an adjustment hole. By moving and locking the fasteners on the motor fixing plate up and down in the adjustment groove or adjustment hole, the vertical position of the motor and drive wheel can be adjusted, and the tension of the conveyor belt can be adjusted. The adjustment groove can be continuously adjusted, and the adjustment hole can be discretely adjusted.

[0014] Furthermore, the horizontal plate is provided with a left-right adjustment structure for adjusting the left and right movement of the adjustment wheel. The left-right adjustment structure is an adjustment groove or adjustment hole. By locking the lateral position of the adjustment wheel on the adjustment groove or adjustment hole, the tension of the conveyor belt can be adjusted, and problems caused by the excessive length of the conveyor belt can also be addressed.

[0015] The horizontal panel can have both left-right and up-down adjustment mechanisms, or they can be set separately.

[0016] Furthermore, the conveyor wheel protrudes from the left and right sides of the horizontal plate. Since the entire device also needs to connect to the external production line, the conveyor wheel, carrying the conveyor belt, extends out from the left and right sides of the horizontal plate, which can better compensate for any gaps that may exist between itself and the external production line, making the conveying more stable.

[0017] Furthermore, the edge of the conveyor wheel is lower than the outer surface of the conveyor belt, so that the product can fully contact the outer surface of the conveyor belt, ensuring smooth product transportation.

[0018] The device also includes an external support and an upper plate and other panels mounted on the external support. The upper plate has holes for protruding grippers. The conveyor belt and the cross plate both protrude from the upper plate, and the drive wheel protrudes from the outer boundary of the cross plate and also from the outer boundary of the external support. The outer boundary of the cross plate can be the same as the front and rear boundaries of the external support, or it can protrude from the boundary of the external support.

[0019] Furthermore, a side panel is installed on the horizontal plate to restrict the left and right movement of the sample. The conveyor belt carries the sample back and forth, and the side panel ensures that the sample does not change position in the left and right directions. At the same time, the side panel is made of a soft material to avoid damage to the sample surface. Preferably, it is a soft organic material structure.

[0020] Furthermore, the sample transfer and positioning detection mechanism includes an X-adjustment sliding base plate mounted on the X-adjustment mechanism, a fixed transfer mechanism, and a moving transfer mechanism, the fixed transfer mechanism and the moving transfer mechanism corresponding to each other. The fixed transfer mechanism is fixedly mounted on the X-adjustment sliding base plate, and the moving transfer mechanism is mounted on the X-adjustment sliding base plate via a main unit sliding mechanism, as well as a main unit lifting mechanism for lifting the sample or blocking sample movement. The fixed transfer mechanism includes a main unit support component mounted on the X-adjustment sliding base plate for overall support, a main unit transfer wheel and a main unit adjustment wheel mounted on the main unit support component, and the main unit transfer wheel and the main unit adjustment wheel. The system includes a conveyor belt, a main drive component mounted on the main support component, and a main drive wheel mounted on the drive shaft of the main drive component; the moving conveyor mechanism includes a main support component mounted on the main sliding mechanism for overall support, a main conveyor wheel and a main adjustment wheel mounted on the main support component, a conveyor belt that mates with the main conveyor wheel and the main adjustment wheel, a main drive component mounted on the main support component, and a main drive wheel mounted on the drive shaft of the main drive component; the main lifting mechanism includes a main gripper at the front end for holding the sample, and a main lifting component at the rear end for driving the main gripper upward; the... The main support component includes a vertical main support plate and a horizontal main support plate mounted on the vertical support plate. The main support conveyor wheels are located on both sides of the horizontal main support plate and inside the main support conveyor belt. The main support adjusting wheels are located on the horizontal main support plate below the main support conveyor wheels and outside the main support conveyor belt. The main support drive component is a motor, which is mounted on the horizontal main support plate via a main support motor mounting plate. The main support drive wheels are located on the main support motor drive shaft and inside the main support conveyor belt. The XY axis automatic adjustment device, located inside the detection main unit, enables rapid XY axis positioning of the planar structure product. The system adjusts and utilizes the main lifting mechanism to ensure that planar products can be lifted off the conveyor belt or stopped at a fixed position while the equipment is in continuous operation of the conveyor mechanism, thus ensuring product safety. At the same time, the sample clamping component moves laterally (in the direction perpendicular to the direction of movement) towards the side of the fixed or moving conveyor mechanism, thereby fixing the sample laterally and ensuring accurate sample positioning. Furthermore, the protective cover lifting mechanism raises the protective cover when the X-ray device is operating, preventing leakage. The lifting component of the protective cover lifting mechanism is normally open, meaning that in the event of a machine malfunction, the protective cover is raised to prevent X-ray leakage.

[0021] Specific process: The X-axis adjustment mechanism and the Y-axis adjustment mechanism move together or separately, causing the main conveyor belt (mainly the main conveyor wheel carrying the outer edge of the main conveyor belt) to extend out of the detection host and cooperate with the external automatic sample feeding and docking device. The automatic docking device has a similar structure of conveyor belt and conveyor wheel. The sample is conveyed into the detection host through the main conveyor belt. The X-axis adjustment mechanism and the Y-axis adjustment mechanism move together to move the sample to the predetermined position. At the same time, the main host lifting mechanism lifts the sample away from the main conveyor belt or raises it to prevent the sample from moving. Meanwhile, the clamping jaws and the side cooperate to clamp the sample between the clamping jaws and the side to form a fixed position. The X-ray detection equipment located above the automatic XY axis adjustment device inside the detection host adjusts its vertical position and cooperates with the X-axis adjustment mechanism and the Y-axis adjustment mechanism to realize the detection of the sample.

[0022] Furthermore, the XY-axis automated adjustment device also includes a sample clamping component mounted on the fixed conveyor / moving conveyor. The sample clamping component includes a clamping cylinder and clamping jaws. The clamping jaws are positioned above the main conveyor belt of the fixed conveyor / moving conveyor. The clamping jaws cooperate with the side of the moving conveyor / fixed conveyor for restricting the sample's vertical movement. After the sample is transported to a predetermined position via the conveyor belt, before the main unit performs testing, the clamping jaws move inward to cooperate with the side, fixing the sample's lateral position and ensuring accurate positioning during main unit testing. The clamping jaws are equipped with anti-static soft contact pads.

[0023] Furthermore, the host lifting component is a cylinder, and the gripper is installed at the end of the host lifting component. There can be two cylinders, distributed on the left and right sides, driven simultaneously to ensure product stability. Alternatively, there can be one cylinder, positioned on the side where the sample enters the host machine. When the sample inside the host machine is being tested while the conveyor belt is still rotating, the lifting component rises, and the front gripper extends to block the sample. The lifting component can either lift the sample off the conveyor belt or simply prevent it from moving forward. or The main lifting component is a rotary motor, and the gripper is mounted on a screw structure connected to the main lifting component. Alternatively, the main lifting component is a linear motor, and the gripper is mounted on the linear motion structure of the linear motor. Using a motor can make the lifting action more stable.

[0024] Furthermore, the main sliding mechanism includes a slide rail disposed on the base plate and a slider mounted on the slide rail. The support component of the moving conveyor mechanism is mounted on the slider. Thus, the distance between the fixed conveyor mechanism and the moving conveyor mechanism can be adjusted automatically or manually to adapt to product conveying processes of different widths.

[0025] Furthermore, the host support component includes a vertical host vertical plate and a host horizontal plate mounted on the vertical plate. The host conveyor wheels are located on both sides of the host horizontal plate and inside the host conveyor belt. The host adjustment wheels are located on the host horizontal plate at a position lower than the host conveyor wheels and outside the host conveyor belt. The host drive component is a motor, which is mounted on the host horizontal plate via a host motor fixing plate. The host drive wheels are located on the host motor drive shaft and inside the host conveyor belt. The support components of the two conveying mechanisms can be the same or different. The vertical plate can be designed as needed, depending on whether it is set on the sliding mechanism of the sample conveying and positioning mechanism or on the base plate. Similarly, the support component can also be an integrally formed structure, and the horizontal plate can be designed in the same way.

[0026] Furthermore, the main machine horizontal plate is provided with a main machine up-down adjustment structure for adjusting the up-down movement of the main machine drive component. The main machine up-down adjustment structure is an adjustment groove or an adjustment hole. By moving and locking the fasteners on the motor fixing plate up and down in the adjustment groove or adjustment hole, the up-down position of the motor and drive wheel can be adjusted, and the tension of the conveyor belt can be adjusted. The adjustment groove can be continuously adjusted, and the adjustment hole can be discretely adjusted.

[0027] Furthermore, the main unit's horizontal plate is provided with a main unit left-right adjustment structure for adjusting the left and right movement of the main unit's adjusting wheel. The main unit's left-right adjustment structure is an adjustment groove or adjustment hole. By locking the lateral position of the sample conveying positioning mechanism's adjusting wheel on the adjustment groove or adjustment hole, the tension of the conveyor belt can be adjusted, and problems caused by the excessive length of the conveyor belt can also be addressed.

[0028] The main unit's horizontal panel can have both left-right adjustment and up-down adjustment mechanisms, or they can be set separately.

[0029] Furthermore, the main unit conveyor wheel protrudes from the left and right sides of the main unit horizontal plate. Since the detection main unit also needs to connect to the external production line, the main unit conveyor wheel, carrying the main unit conveyor belt, extends out from the left and right sides of the main unit horizontal plate, which can better compensate for any gaps that may exist between itself and the external production line, making the conveying more stable.

[0030] Furthermore, the edge of the main conveyor wheel is lower than the outer surface of the main conveyor belt, so that the product can fully contact the outer surface of the main conveyor belt, ensuring smooth product transportation.

[0031] Furthermore, the lifting component is a cylinder, and the protective cover lifting mechanism also includes a limiting component for adjusting the up and down position of the lifting component.

[0032] Furthermore, the host gripper is provided with an anti-static soft contact plate.

[0033] Further, the first optical path module includes a single-channel X-ray source assembly for providing an X-ray source to excite a sample, a dual-channel detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and the dual-channel detector assembly. The optical path cavity has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting the dual-channel detector assembly. The vertical interface and the inclined interface connect to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample. The second, third, up to the nth optical path module, includes a single-channel X-ray source assembly for providing an X-ray source to excite a sample, a dual-channel detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and the dual-channel detector assembly. The detector assembly has an optical path cavity, which has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting dual detector assemblies. The vertical interface and the inclined interface are connected to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample. The movement adjustment module corresponds one-to-one with the second optical path module, the third optical path module, and so on up to the nth optical path module. The movement adjustment module is connected to the second optical path module, the third optical path module, and so on up to the nth optical path module through a connecting component, and drives the second optical path module, the third optical path module, and so on up to the nth optical path module to move back and forth to adjust the distance between the first optical path module or the second optical path module, the third optical path module, and so on up to the nth optical path module.

[0034] Furthermore, the detector assembly and the tilting interface are symmetrically distributed around the single-channel X-ray source assembly and the vertical interface, and the uniform distribution design enables the overall detection effect to be more accurate and achieve higher efficiency.

[0035] Furthermore, the angle of the tilting interface is 20-70 degrees. This angle design not only facilitates installation and maintenance but also improves the collection of excitation light.

[0036] Furthermore, the angle of the tilting interface is 30, 45, 50, 60, or 70 degrees.

[0037] Furthermore, the detector assembly is mounted on the inclined interface via a detector insulating block, and the X-ray source assembly is mounted on the vertical interface via a light tube fixing ring.

[0038] Furthermore, a collimator is provided between the sample and the X-ray source assembly to provide collimation. The collimator is a circular channel used to shield X-rays from unnecessary / off-center areas.

[0039] Furthermore, the first optical path module, the second optical path module, and up to the nth optical path module also include an optical shutter assembly. The optical shutter assembly includes an optical shutter plate, on which an optical shutter baffle that shields X-ray leakage and provides a filter for filtering stray light is installed when the X-ray source is working normally and is located at the X-ray exit.

[0040] Furthermore, the shutter assembly also includes a motor, which drives the shutter plate via a crank plate with an elongated slot. A rotating component is mounted on the shutter plate and inserted into the elongated slot of the crank plate. A slide rail assembly for driving the shutter plate is provided below the shutter plate.

[0041] Furthermore, the shutter baffle adopts a labyrinth structure, and the shutter has multiple annular vertical groove structures.

[0042] Furthermore, the dual-optical-path system also includes a high-voltage unit for improving the high excitation efficiency of the X-ray source, and the high-voltage unit is connected to the first optical path module, the second optical path module, the third optical path module, and up to the nth optical path module.

[0043] Furthermore, the detector assembly is mounted on the inclined interface via a detector insulating block, and the X-ray source assembly is mounted on the vertical interface via a light tube fixing ring.

[0044] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0045] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, wherein: Figure 1 This is a schematic diagram of the overall system of the present invention; Figure 2 This is a three-dimensional schematic diagram of the XY-axis automatic adjustment device of the present invention; Figure 3 This is a three-dimensional schematic diagram of the XY axis automated adjustment device of the present invention, which eliminates the X adjustment mechanism and the Y adjustment mechanism; Figure 4 This is a front view schematic diagram of the XY axis automatic adjustment device transmission mechanism (including the main body of the fixed transmission mechanism and the moving transmission mechanism) of the present invention; Figure 5 This is a schematic diagram of the main motor fixing block of the XY axis automatic adjustment device of the present invention; Figure 6 This is a top view schematic diagram of the high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer of the present invention (it only includes two optical path modules, but there can be multiple parallel or parallel optical path modules). Figure 7 This is a side view schematic diagram of the high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer of the present invention; Figure 8 This is a three-dimensional schematic diagram of the high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer of the present invention; Figure 9 This is a schematic diagram of the sample array of the high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer of the present invention (the markings in the sample circle represent parallel detection using two optical-path modules); Figure 10 This is a three-dimensional schematic diagram of the optical path module of the high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer of the present invention; Figure 11 This is a front view schematic diagram of the optical path module of the high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer of the present invention; Figure 12 This is a side view schematic diagram of the optical path module of the high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer of the present invention; Figure 13 This is a top view schematic diagram of the shutter assembly of the high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer in this invention; Figure 14 This is a schematic diagram of the shutter assembly of the high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer in this invention; Figure 15 This is a schematic diagram of the optical shutter labyrinth structure of the high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer in this invention; Figure 16 This is a side view of the left automatic sample inlet connector and the right automatic sample inlet connector (both are the same) in this invention; Figure 17 This is a three-dimensional schematic diagram of the left automatic sample inlet connector and the right automatic sample inlet connector in this invention; Figure 18 This is a front view schematic diagram of the left automatic sample inlet connector and the right automatic sample inlet connector in this invention; Figure 19 This is a side view of the left automatic sample inlet connector and the right automatic sample inlet connector in this invention; in, Figure 1 In the middle, there is an AX fluorescence spectroscopy array scanning analysis device, an AAXY axis automatic adjustment device, an ABZ axis energy dispersive X-ray fluorescence spectrometer high-efficiency dual-optical-path system (covered by a protective cover, etc.), a B left automatic sample introduction device, and a C right automatic sample introduction device (B and C have the same structure). Figure 2-5 In the middle, AB automatic sample feeding and docking device, ABXY axis automatic adjustment device, AB0 main unit base plate, AB1X adjustment mechanism, AB2Y adjustment mechanism, AB30 protective cover, AB31 protective cover horizontal plate, AB32 limiting component clamping part, AB33 limiting component, AB34 lifting component, AB35 lifting component support, AB41 main unit gripper, AB42 main unit lifting component, AB43 main unit lifting component, AB50 main unit conveyor belt, AB51 main unit conveyor wheel, AB52 main unit adjusting wheel, AB53 main unit drive component, AB54 main unit drive wheel, AB55 main unit motor fixing block, AB56 main unit up and down adjustment structure, AB57 main unit left and right adjustment structure, AB60 side, AB61 main unit vertical plate, AB62 main unit slider, AB63 main unit slide rail, AB64 main unit horizontal plate, AB71 clamping gripper, AB72 clamping cylinder; Figure 6-15 In the diagram, AA1. Optical path cavity, AA2. Detector insulating block, AA3. One set of detector components, AA4. X-ray source component, AA5. Binding post, AA6. Two sets of detector components, AA7. Optical tube fixing ring, AA8. Collimator, AA9. Optical shutter baffle, AA10. Filter, AA11. Optical shutter plate, AAA optical shutter component, AAA4. Optical shutter fixing plate, AAA5. Motor, AAA6. Slide rail, AAA7. Bearing, AAA8. Crank plate, AAA9. Optical shutter trigger plate, AAA10. Photoelectric switch, AAB optical path base plate, AAC first optical path module, AAD high voltage unit, AAE adjustment module, AAF connecting plate, AAG second optical path module; Figure 16-19 In the middle, B10 is the base plate, B11 is the support component, B12 is the horizontal plate, B121 is the left and right adjustable countersunk groove, B122 is the up and down adjustment structure, B123 is the adjustment hole, B124 is the side (used to maintain the position of the product width on both sides), B21 is the cylinder, B22 is the gripper, B31 is the drive component, B32 is the drive wheel, B33 is the adjusting wheel, B34 is the conveyor belt, B35 is the conveyor wheel, B36 is the motor fixing plate, B41 is the slide rail, and B42 is the slider. Detailed Implementation

[0046] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0047] In the description of this invention, it should be understood that the terms "upper", "lower", "bottom", "top", "front", "back", "inner", "outer", "horizontal", "vertical", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0048] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connection," "connection," "linking," "fitting," and "cooperation" should be interpreted broadly. For example, they can refer to a fixed connection, an integral connection, or a detachable connection; they can refer to the internal connection of two components; they can refer to a direct connection or an indirect connection through an intermediate medium; "fitting" can refer to the fit between surfaces, the fit between a point and a surface or a line and a surface, and also includes the fit between a hole and a shaft. For those skilled in the art, the specific meaning of the above terms in this invention can be understood according to the specific circumstances.

[0049] The automated energy-dispersive X-ray fluorescence spectrometer array scanning analyzer of the present invention will now be described with reference to the accompanying drawings. Figure 1 This is a schematic diagram of the overall system of the present invention; Figure 2-5 These are related illustrations of the XY-axis automatic adjustment device of the present invention; Figure 6-15 This is a schematic diagram of the high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer of the present invention; Figure 16-19 These are schematic diagrams related to the left automatic sample feeding device and the right automatic sample feeding device in this invention.

[0050] According to embodiments of the present invention, such as Figure 1-19 An automated, automated energy-dispersive X-ray fluorescence spectroscopy array scanning analysis method, comprising: The left automatic sample feeding device / right automatic sample feeding device sends the array sample into the sample transfer positioning and detection mechanism in the X-ray fluorescence spectroscopy array scanning analysis device through the corresponding first and second transfer mechanisms. The high-efficiency dual-optical-path system of the Z-axis energy dispersive X-ray fluorescence spectrometer above detects and analyzes the array sample. The sample transfer and positioning detection mechanism performs XY axis movement through an automatic XY axis adjustment device and coordinates with the Z axis movement mechanism of the dual optical path system to position the array sample. Meanwhile, the host lifting mechanism clamps or fixes the array sample and forms side positioning on both sides through the cooperation of the fixed transfer mechanism and the moving transfer mechanism on the transfer and positioning detection mechanism. After side positioning is completed, the array sample is placed on the lower side of the dual-optical-path system. The first optical path module of the dual-optical-path system is fixed. By moving the second optical path module, the third optical path module and so on until the nth optical path module is moved, the first optical path module corresponds to the starting sample, the second optical path module corresponds to the mth sample, the third optical path module corresponds to 2*(m-1) samples, and so on, with the nth optical path module corresponding to (n-1)*(m-1) samples. When all optical path modules correspond to the corresponding samples, the detection and analysis function of the dual-optical-path system is activated to perform detection and analysis.

[0051] The method involves equipment including: a left automatic sample inlet connector and a right automatic sample inlet connector on both sides; an X-ray fluorescence spectrometer array scanning analysis device located between the left and right automatic sample inlet connectors; the X-ray fluorescence spectrometer array scanning analysis device includes an XY-axis automatic adjustment device and a Z-axis energy dispersive X-ray fluorescence spectrometer high-efficiency dual-optical-path system located above the XY-axis automatic adjustment device; and an energy dispersive X-ray fluorescence spectrometer water-cooling pipeline with multiple safety protections connected to the X-ray source in the high-efficiency dual-optical-path system for cooling. The XY axis automatic adjustment device includes an X adjustment mechanism for adjustment on the X axis and a Y adjustment mechanism for adjustment on the Y axis. The X adjustment mechanism is disposed on the Y adjustment mechanism. A sample transfer positioning and detection mechanism is installed on the X adjustment mechanism. A protective cover lifting mechanism including a protective cover is also installed on the X adjustment mechanism. The protective cover is a barrel-shaped structure without upper and lower covers. The XY axis automatic adjustment device is disposed inside the barrel-shaped structure. The high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer includes: an optical path base plate; a first optical path module fixedly mounted on the optical path base plate; a second optical path module, a third optical path module, and so on up to an nth optical path module mounted on a sliding component on the optical path base plate and matched with the fixed optical path module; an integrated shutter collimating filter switching module mounted under the first optical path module and the second, third, and so on up to the nth optical path modules; and a movement adjustment module that corresponds one-to-one with the second, third, and so on up to the nth optical path modules and is used to adjust the distance between the second, third, and so on up to the nth optical path modules and the first optical path module.

[0052] According to some embodiments of the present invention, the left automatic sample inlet docking device and the right automatic sample inlet docking device include a base plate, a first conveying mechanism and a second conveying mechanism, the first conveying mechanism and the second conveying mechanism corresponding to each other, the first conveying mechanism being fixedly mounted on the base plate, the second conveying mechanism being mounted on the base plate via a sliding mechanism, and a lifting mechanism for lifting samples; the first conveying mechanism includes a support member mounted on the base plate for overall support, a conveying wheel and an adjusting wheel mounted on the support member, and a conveyor belt mounted on the conveying wheel and the adjusting wheel, a drive member mounted on the support member, and a drive wheel mounted on the drive shaft of the drive member; the second conveying mechanism includes a support member mounted on the sliding mechanism for overall support, the first conveying mechanism being fixedly mounted on the base plate, the second ... The mechanism includes a support component that provides overall support, a conveyor wheel and an adjusting wheel mounted on the support component, a conveyor belt mounted on the conveyor wheel and the adjusting wheel, a drive component mounted on the support component, and a drive wheel mounted on the drive shaft of the drive component; the lifting mechanism includes a front-end gripper for holding the sample, a rear-end lifting component for driving the gripper upward, and left and right automatic sample feeding and docking devices. These automatic sample feeding and docking devices, located on the left and right sides of the main testing unit, enable rapid, streamlined transport of planar structure products. Simultaneously, the lifting mechanism ensures that when the equipment is stopped during sample feeding and the power transmission mechanism is continuously operating, the planar structure product can be lifted off the conveyor belt or stopped at a fixed position, guaranteeing product safety.

[0053] According to some embodiments of the present invention, the lifting component is a cylinder, and the gripper is installed at the end of the cylinder. There can be two cylinders, distributed on the left and right sides, which are driven simultaneously to ensure the stability of the product's posture. Alternatively, there can be one cylinder, which is located on the side where the sample enters the detection host. When the sample inside the monitoring host is being detected, the conveyor belt is still rotating. At this time, the lifting component rises, and the front gripper extends to block the sample. The lifting component can either lift the sample away from the conveyor belt or not lift the sample away from the conveyor belt, but only block the sample from moving forward.

[0054] The lifting component is a rotary motor, and the gripper is mounted on a screw structure connected to the motor; or the lifting component is a linear motor, and the gripper is mounted on the linear motion structure of the linear motor. Using a motor can make the lifting action more stable.

[0055] According to some embodiments of the present invention, the sliding mechanism includes a slide rail disposed on the base plate and a slider mounted on the slide rail, and a support component of the second conveying mechanism is mounted on the slider. Thus, the distance between the first conveying mechanism and the second conveying mechanism can be adjusted by automatic or manual control to adapt to product conveying processes of different widths.

[0056] According to some embodiments of the present invention, the supporting component includes a vertical plate and a horizontal plate mounted on the vertical plate. The conveying wheel is disposed on both sides of the horizontal plate and located inside the conveyor belt. The adjusting wheel is disposed on the horizontal plate at a position lower than the conveying wheel and located outside the conveyor belt. The driving component is a motor, which is mounted on the horizontal plate through a motor fixing plate. The driving wheel is disposed on the motor drive shaft and located inside the conveyor belt. The supporting components of the two conveying mechanisms can be the same or different. The vertical plate can be designed as needed, depending on whether it is disposed on the sliding mechanism or on the base plate. Similarly, the supporting component can also be an integrally formed structure, and the horizontal plate can also be designed in the same way.

[0057] According to some embodiments of the present invention, the horizontal plate is provided with a vertical adjustment structure for adjusting the vertical movement of the motor. The vertical adjustment structure is an adjustment groove or an adjustment hole. By moving and locking the fasteners on the motor fixing plate up and down in the adjustment groove or adjustment hole, the vertical position of the motor and the drive wheel can be adjusted, and the tension of the conveyor belt can be adjusted. The adjustment groove can be continuously adjusted, and the adjustment hole can be discretely adjusted.

[0058] According to some embodiments of the present invention, the horizontal plate is provided with a left-right adjustment structure for adjusting the left-right movement of the adjustment wheel. The left-right adjustment structure is an adjustment groove or an adjustment hole. By locking the lateral position of the adjustment wheel on the adjustment groove or adjustment hole, the tension of the conveyor belt can be adjusted, and problems caused by the excessive length of the conveyor belt can also be addressed.

[0059] The horizontal panel can have both left-right and up-down adjustment mechanisms, or they can be set separately.

[0060] According to some embodiments of the present invention, the conveyor wheel protrudes from the left and right sides of the horizontal plate. Since the overall device also needs to connect to the external production line, the conveyor wheel, with the conveyor belt, protrudes from the left and right sides of the horizontal plate, which can better compensate for the gap that may exist between itself and the external production line, making the conveying more stable.

[0061] According to some embodiments of the present invention, the edge of the conveyor wheel is lower than the outer surface of the conveyor belt, so that the product can fully contact the outer surface of the conveyor belt and ensure smooth product transportation.

[0062] The device also includes an external support and an upper plate and other panels mounted on the external support. The upper plate has holes for protruding grippers. The conveyor belt and the cross plate both protrude from the upper plate, and the drive wheel protrudes from the outer boundary of the cross plate and also from the outer boundary of the external support. The outer boundary of the cross plate can be the same as the front and rear boundaries of the external support, or it can protrude from the boundary of the external support.

[0063] According to some embodiments of the present invention, a side is also installed on the horizontal plate to restrict the left and right movement of the sample. The conveyor belt carries the sample back and forth, and the side ensures that the sample does not change position in the left and right directions. At the same time, the side is made of a soft material to avoid damage to the sample surface. Preferably, it is a soft organic material structure.

[0064] According to some embodiments of the present invention, the sample transfer positioning and detection mechanism includes an X-adjustment sliding base plate mounted on the X-adjustment mechanism, a fixed transfer mechanism and a movable transfer mechanism, the fixed transfer mechanism and the movable transfer mechanism corresponding to each other, the fixed transfer mechanism being fixedly mounted on the X-adjustment sliding base plate, the movable transfer mechanism being mounted on the X-adjustment sliding base plate via a host sliding mechanism, and a host lifting mechanism for lifting the sample or blocking sample movement; the fixed transfer mechanism includes a host support component mounted on the X-adjustment sliding base plate for overall support, a host transfer wheel and a host adjustment wheel mounted on the host support component, and the host transfer wheel and the... The system includes a conveyor belt fitted with a host adjustment wheel, a host drive component mounted on the host support component, and a host drive wheel mounted on the drive shaft of the host drive component. The moving conveyor mechanism includes a host support component mounted on the host sliding mechanism for overall support, a host conveyor wheel and a host adjustment wheel mounted on the host support component, a conveyor belt fitted with the host conveyor wheel and the host adjustment wheel, a host drive component mounted on the host support component, and a host drive wheel mounted on the drive shaft of the host drive component. The host lifting mechanism includes a host gripper at the front end for holding the sample, and a host lifting component at the rear end for driving the host gripper upwards. The main support component includes a vertical main support plate and a horizontal main support plate mounted on the vertical support plate. The main support conveyor wheels are located on both sides of the horizontal main support plate and inside the main support conveyor belt. The main support adjusting wheels are located on the horizontal main support plate below the main support conveyor wheels and outside the main support conveyor belt. The main support drive component is a motor, mounted on the horizontal main support plate via a main support motor mounting plate. The main support drive wheels are located on the main support motor drive shaft and inside the main support conveyor belt. The XY axis automatic adjustment device, installed inside the detection main unit, enables rapid XY axis positioning of the planar structure product. The device is equipped with a system that adjusts the position and utilizes the main lifting mechanism to ensure that planar products can be lifted off the conveyor belt or stopped at a fixed position while the equipment is in continuous operation of the conveyor mechanism, thus ensuring product safety. At the same time, the sample clamping component moves laterally (in the direction perpendicular to the direction of movement) towards the side of the fixed or moving conveyor mechanism, thereby fixing the sample laterally and ensuring accurate sample positioning. Furthermore, the protective cover lifting mechanism raises the protective cover when the X-ray device is in operation, preventing leakage. The lifting component of the protective cover lifting mechanism is normally open, meaning that in the event of a machine malfunction, the protective cover is raised to prevent X-ray leakage.

[0065] According to some embodiments of the present invention, the XY-axis automated adjustment device further includes a sample clamping component disposed on a fixed conveying mechanism / moving conveying mechanism. The sample clamping component includes a clamping cylinder and a clamping jaw. The clamping jaw is disposed above the main conveyor belt of the fixed conveying mechanism / moving conveying mechanism. The clamping jaw cooperates with the side of the moving conveying mechanism / fixed conveying mechanism for restricting the sample in the vertical direction of movement. After the sample is transported to a predetermined position by the conveyor belt, before the main machine performs detection, the clamping jaw moves inward to cooperate with the side and fix the sample in a lateral position to ensure accurate positioning during main machine detection. The clamping jaw is provided with an anti-static soft contact piece.

[0066] According to some embodiments of the present invention, the XY-axis automated adjustment device further includes a sample clamping component disposed on a fixed conveying mechanism / moving conveying mechanism. The sample clamping component includes a clamping cylinder and a clamping jaw. The clamping jaw is disposed above the main conveyor belt of the fixed conveying mechanism / moving conveying mechanism. The clamping jaw cooperates with the side of the moving conveying mechanism / fixed conveying mechanism for restricting the sample in the vertical direction of movement. After the sample is transported to a predetermined position by the conveyor belt, before the main machine performs detection, the clamping jaw moves inward to cooperate with the side and fix the sample in a lateral position to ensure accurate positioning during main machine detection. The clamping jaw is provided with an anti-static soft contact piece.

[0067] According to some embodiments of the present invention, the host lifting component is a cylinder, and the gripper is installed at the end of the host lifting component; there can be two cylinders, distributed on the left and right sides, which are driven simultaneously to ensure the stability of the product's posture, or there can be one cylinder, which is located on the side where the sample enters the host detection unit. When the sample inside the host detection unit is being tested, the conveyor belt is still rotating. At this time, the lifting component rises, and the front gripper extends to block the sample. The lifting component can either lift the sample away from the conveyor belt, or it can simply block the sample from moving forward without lifting it away from the conveyor belt. or The main lifting component is a rotary motor, and the gripper is mounted on a screw structure connected to the main lifting component. Alternatively, the main lifting component is a linear motor, and the gripper is mounted on the linear motion structure of the linear motor. Using a motor can make the lifting action more stable.

[0068] According to some embodiments of the present invention, the main sliding mechanism includes a slide rail disposed on the base plate and a slider mounted on the slide rail, and the support component of the moving conveying mechanism is mounted on the slider. Thus, the distance between the fixed conveying mechanism and the moving conveying mechanism can be adjusted by automatic or manual control to adapt to product conveying processes of different widths.

[0069] According to some embodiments of the present invention, the host support component includes a vertical host vertical plate and a host horizontal plate mounted on the vertical plate. The host conveying wheels are disposed on both sides of the host horizontal plate and located inside the host conveyor belt. The host adjusting wheels are disposed on the host horizontal plate at a position lower than the host conveying wheels and located outside the host conveyor belt. The host driving component is a motor, which is mounted on the host horizontal plate via a host motor fixing plate. The host driving wheels are disposed on the host motor drive shaft and located inside the host conveyor belt. The support components of the two conveying mechanisms can be the same or different. The vertical plate can be designed as needed, depending on whether it is disposed on the sliding mechanism of the sample conveying and positioning mechanism or on the base plate. Similarly, the support component can also be an integrally formed structure, and the horizontal plate can be designed in the same way.

[0070] According to some embodiments of the present invention, the host horizontal plate is provided with a host up-down adjustment structure for adjusting the up-down movement of the host drive component. The host up-down adjustment structure is an adjustment groove or an adjustment hole. By moving and locking the fasteners on the motor fixing plate up and down in the adjustment groove or adjustment hole, the up-down position of the motor and drive wheel can be adjusted, and the tension of the conveyor belt can be adjusted. The adjustment groove can be continuously adjusted, and the adjustment hole can be discretely adjusted.

[0071] According to some embodiments of the present invention, the main machine horizontal plate is provided with a main machine left and right adjustment structure for adjusting the left and right movement of the main machine adjustment wheel. The main machine left and right adjustment structure is an adjustment groove or adjustment hole. By locking the lateral position of the adjustment wheel of the sample conveying positioning mechanism on the adjustment groove or adjustment hole, the tension of the conveyor belt can be adjusted, and problems caused by excessive length of the conveyor belt can also be addressed.

[0072] The main unit's horizontal panel can have both left-right adjustment and up-down adjustment mechanisms, or they can be set separately.

[0073] According to some embodiments of the present invention, the main unit conveyor wheel protrudes from the left and right sides of the main unit horizontal plate. Since the detection main unit also needs to connect to the external production line, the main unit conveyor wheel, carrying the main unit conveyor belt, extends out from the left and right sides of the main unit horizontal plate, which can better compensate for the possible gaps between itself and the external production line, making the conveying more stable.

[0074] According to some embodiments of the present invention, the edge of the main conveyor wheel is lower than the outer surface of the main conveyor belt, so that the product can fully contact the outer surface of the main conveyor belt and ensure the smooth transport of the product.

[0075] According to some embodiments of the present invention, the lifting component is a cylinder, and the protective cover lifting mechanism further includes a limiting component for adjusting the up and down position of the lifting component.

[0076] According to some embodiments of the present invention, the host gripper is provided with an anti-static soft contact piece.

[0077] According to some embodiments of the present invention, the first optical path module includes a single-channel X-ray source assembly for providing an X-ray source to excite a sample, a dual-channel detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and the dual-channel detector assembly. The optical path cavity has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting the dual-channel detector assembly. The vertical interface and the inclined interface communicate with an internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface axially points towards the sample. The second, third, up to the nth optical path module, includes a single-channel X-ray source assembly for providing an X-ray source to excite a sample, a dual-channel detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source. The optical path cavity of the component and the dual-path detector assembly has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting the dual-path detector assembly. The vertical interface and the inclined interface are connected to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample. The movement adjustment module corresponds one-to-one with the second optical path module, the third optical path module, and so on up to the nth optical path module. The movement adjustment module is connected to the second optical path module, the third optical path module, and so on up to the nth optical path module through a connecting component, driving the second optical path module, the third optical path module, and so on up to the nth optical path module to move back and forth to adjust the distance between the first optical path module or the second optical path module, the third optical path module, and so on up to the nth optical path module.

[0078] According to some embodiments of the present invention, the detector assembly and the tilting interface are symmetrically distributed around the single-channel X-ray source assembly and the vertical interface, and the uniform distribution design enables the overall detection effect to be more accurate and achieve higher efficiency.

[0079] According to some embodiments of the present invention, the angle of the tilting interface is 20-70 degrees. The angle design not only facilitates installation and maintenance, but also improves the collection of excitation light.

[0080] According to some embodiments of the present invention, the angle of the tilting interface is 30, 45, 50, 60, or 70 degrees.

[0081] According to some embodiments of the present invention, the detector assembly is mounted on the inclined interface via a detector insulating block, and the X-ray source assembly is mounted on the vertical interface via a light tube fixing ring.

[0082] According to some embodiments of the present invention, a collimator for providing collimation is further provided between the sample and the X-ray source assembly. The collimator is a circular channel used to shield X-rays from unnecessary / off-center areas.

[0083] According to some embodiments of the present invention, the first optical path module, the second optical path module and up to the nth optical path module further include an optical shutter assembly, the optical shutter assembly including an optical shutter plate, the optical shutter plate being equipped with an optical shutter baffle that shields X-ray leakage when the X-ray source is working normally and is located at the X-ray exit, and a filter that provides filtering of stray light.

[0084] According to some embodiments of the present invention, the shutter assembly further includes a motor, which drives the shutter plate via a crank plate with an elongated groove. A rotating component is mounted on the shutter plate and inserted into the elongated groove of the crank plate. A slide rail assembly for driving the shutter plate is provided below the shutter plate.

[0085] According to some embodiments of the present invention, the light shutter baffle adopts a labyrinth structure, and the light shutter has multiple annular vertical groove structures.

[0086] According to some embodiments of the present invention, the dual-optical-path system further includes a high-voltage unit for improving the high excitation efficiency of the X-ray source, the high-voltage unit being connected to the first optical path module, the second optical path module, the third optical path module, and up to the nth optical path module.

[0087] According to some embodiments of the present invention, the detector assembly is mounted on the inclined interface via a detector insulating block, and the X-ray source assembly is mounted on the vertical interface via a light tube fixing ring.

[0088] According to some embodiments of the present invention, a detection method based on the high-efficiency dual-optical-path system is as follows: a sample array is disposed on the lower side of the optical path substrate. The spacing between the first optical path module and multiple second optical path modules is pre-designed or adjusted and fixed according to the sample array, forming a spacing S2 between the first optical path module and the second optical path module, a spacing S3 between the second optical path module and the third optical path module, up to a spacing Sn between the (n-1)th optical path module and the nth optical path module, such that the first optical path module corresponds to the starting sample in the sample array, the second optical path module corresponds to the mth sample determined according to the spacing S2, up to the nth optical path module corresponding to the (m+n)th sample determined according to the spacing Sn. The samples are then detected by arranging and combining them, and then the optical path substrate is driven by a driving unit to perform array scanning detection. Figure 9 As shown, Figure 9 The detection is performed using two optical path modules.

[0089] According to embodiments of the present invention, the number of moving optical path modules to be used can be determined based on the width of the sample array. When the sample array width is small, only two sets of optical path modules can be used, such as a first optical path module and a second optical path module. To improve efficiency, the distance between the first optical path module and the second optical path module can be adjusted to half the width of the sample array (i*j). At the start of detection, the detection point of the first optical path module is at the first starting point (1,1) of the sample array, and the detection starting point of the second optical path module is at (i / 2,j) of the sample. If i is an odd number, the detection starting point of the second optical path module is at ((i+1) / 2,j). This can double the efficiency. Figure 9 As shown, Figure 9 The detection is performed using two optical path modules.

[0090] According to an embodiment of the present invention, when the sample array width is large, n>2 moving optical path modules can be used, such as the method when n=2, and the efficiency can be improved by n times. If the sample array is even larger, the optical path modules on the optical path base plate can be made into an array-type optical path, which can improve the efficiency even more. At the same time, due to the use of dual-path detection components, the detection accuracy can be greatly improved.

[0091] In the detection method, the sample can be fixed and the optical path can move along the XY axis, or even the Z axis. Alternatively, the optical path can only be responsible for the Z-axis movement, while the sample moves along the XY axis, thereby forming a three-dimensional motion between the optical path and the sample, which further improves the overall efficiency. Any reference to "an embodiment," "embodiment," "illustrative embodiment," etc., means that the specific component, structure, or feature described in connection with that embodiment is included in at least one embodiment of the present invention. Such illustrative expressions throughout this specification do not necessarily refer to the same embodiment. Furthermore, when a specific component, structure, or feature is described in connection with any embodiment, it is claimed that implementing such a component, structure, or feature in connection with other embodiments falls within the scope of those skilled in the art.

[0092] Although specific embodiments of the invention have been described in detail with reference to several illustrative examples, it should be understood that those skilled in the art can devise various other modifications and embodiments that fall within the spirit and scope of the invention. Specifically, reasonable variations and modifications can be made to the arrangement of components and / or dependent combinations within the scope of the foregoing disclosure, drawings, and claims without departing from the spirit of the invention. The scope of these variations and modifications, apart from those concerning components and / or layout, is defined by the appended claims and their equivalents.

Claims

1. An automated, automated energy-dispersive X-ray fluorescence spectrometry array scanning analysis method, characterized in that... ,include: The left automatic sample feeding device / right automatic sample feeding device sends the array sample into the sample transfer positioning and detection mechanism in the X-ray fluorescence spectroscopy array scanning analysis device through the corresponding first and second transfer mechanisms. The high-efficiency dual-optical-path system of the Z-axis energy dispersive X-ray fluorescence spectrometer above detects and analyzes the array sample. The sample transfer and positioning detection mechanism performs XY axis movement through an automatic XY axis adjustment device and coordinates with the Z axis movement mechanism of the dual optical path system to position the array sample. Meanwhile, the host lifting mechanism clamps or fixes the array sample and forms side positioning on both sides through the cooperation of the fixed transfer mechanism and the moving transfer mechanism on the transfer and positioning detection mechanism. After side positioning is completed, the array sample is placed on the lower side of the dual-optical-path system. The first optical path module of the dual-optical-path system is fixed. By moving the second optical path module, the third optical path module and so on until the nth optical path module is moved, the first optical path module corresponds to the starting sample, the second optical path module corresponds to the mth sample, the third optical path module corresponds to 2*(m-1) samples, and so on, with the nth optical path module corresponding to (n-1)*(m-1) samples. When all optical path modules correspond to the corresponding samples, the detection and analysis function of the dual-optical-path system is activated to perform detection and analysis. The XY axis automatic adjustment device includes an X adjustment mechanism for adjustment on the X axis and a Y adjustment mechanism for adjustment on the Y axis. The X adjustment mechanism is disposed on the Y adjustment mechanism. A sample transfer positioning and detection mechanism is installed on the X adjustment mechanism. A protective cover lifting mechanism including a protective cover is also installed on the X adjustment mechanism. The protective cover is a barrel-shaped structure without upper and lower covers. The XY axis automatic adjustment device is disposed inside the barrel-shaped structure. The left and right automatic sample inlet docking devices each include a base plate, a first conveying mechanism and a second conveying mechanism, which correspond to each other. The first conveying mechanism is fixedly mounted on the base plate, and the second conveying mechanism is mounted on the base plate via a sliding mechanism. A lifting mechanism for lifting samples is also included. The first conveying mechanism includes a support component mounted on the base plate for overall support, a conveyor wheel and an adjusting wheel mounted on the support component, a conveyor belt mounted on the conveyor wheel and the adjusting wheel, a drive component mounted on the support component, and a drive wheel mounted on the drive shaft of the drive component. The second conveying mechanism includes a support component mounted on the sliding mechanism for overall support, a conveyor wheel and an adjusting wheel mounted on the support component, a conveyor belt mounted on the conveyor wheel and the adjusting wheel, a drive component mounted on the support component, and a drive wheel mounted on the drive shaft of the drive component. The lifting mechanism includes a front-end gripper for holding the sample and a rear-end lifting component for driving the gripper upwards. The sample transfer and positioning detection mechanism includes an X-adjustment sliding base plate mounted on the X-adjustment mechanism, a fixed transfer mechanism, and a movable transfer mechanism, which correspond to each other. The fixed transfer mechanism is fixedly mounted on the X-adjustment sliding base plate, and the movable transfer mechanism is mounted on the X-adjustment sliding base plate via a main unit sliding mechanism. It also includes a main unit lifting mechanism for lifting or blocking sample movement. The fixed transfer mechanism includes a main unit support component mounted on the X-adjustment sliding base plate for overall support, a main unit transfer wheel and a main unit adjustment wheel mounted on the main unit support component, a conveyor belt that cooperates with the main unit transfer wheel and the main unit adjustment wheel, a main unit drive component mounted on the main unit support component, and a main unit drive wheel mounted on the drive shaft of the main unit drive component. The movable transfer mechanism includes a main unit support component mounted on the main unit sliding mechanism for overall support. The host support component includes a host conveyor wheel and a host adjusting wheel mounted on the host support component, and a conveyor belt that cooperates with the host conveyor wheel and the host adjusting wheel. A host drive component is mounted on the host support component, and a host drive wheel is mounted on the drive shaft of the host drive component. The host lifting mechanism includes a host gripper at the front end for holding the sample, and a host lifting component at the rear end for driving the host gripper upwards. The host support component includes a vertical host plate and a host horizontal plate mounted on the vertical plate. The host conveyor wheel is located on both sides of the host horizontal plate and inside the host conveyor belt. The host adjusting wheel is located on the host horizontal plate at a position lower than the host conveyor wheel and outside the host conveyor belt. The host drive component is a motor, mounted on the host horizontal plate via a host motor fixing plate. The host drive wheel is located on the drive shaft of the host motor and inside the host conveyor belt.

2. The automated automated energy-dispersive X-ray fluorescence spectroscopy array scanning analysis method according to claim 1, characterized in that, The support component includes a vertical plate and a horizontal plate mounted on the vertical plate. The conveying wheels are located on both sides of the horizontal plate and inside the conveyor belt. The adjusting wheel is located on the horizontal plate below the conveying wheels and outside the conveyor belt. The driving component is a motor, which is mounted on the horizontal plate via a motor fixing plate. The driving wheel is located on the motor drive shaft and inside the conveyor belt.

3. The automated automated energy-dispersive X-ray fluorescence spectroscopy array scanning analysis method according to claim 2, characterized in that, The horizontal plate is provided with a vertical adjustment structure for adjusting the up and down movement of the motor. The vertical adjustment structure is an adjustment groove or an adjustment hole. or The horizontal plate is provided with a left-right adjustment structure for adjusting the left and right movement of the adjustment wheel. The left-right adjustment structure is an adjustment groove or an adjustment hole.

4. The automated, automated energy-dispersive X-ray fluorescence spectroscopy array scanning analysis method according to claim 1, characterized in that, The host horizontal plate is provided with a host up-down adjustment structure for adjusting the up-down movement of the host drive component. The host up-down adjustment structure is an adjustment groove or an adjustment hole. or The main unit's horizontal plate is provided with a main unit left-right adjustment structure for adjusting the left and right movement of the main unit's adjustment wheel. The main unit's left-right adjustment structure is an adjustment groove or adjustment hole.

5. The automated, automated energy-dispersive X-ray fluorescence spectroscopy array scanning analysis method according to claim 1, characterized in that, The first optical path module includes a single-channel X-ray source assembly for providing an X-ray source to excite a sample, a dual-channel detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and the dual-channel detector assembly. The optical path cavity has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting the dual-channel detector assembly. The vertical interface and the inclined interface connect to an internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample. The second, third, and up to the nth optical path modules each include a single-channel X-ray source assembly for providing an X-ray source to excite a sample, a dual-channel detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and the dual-channel detector assembly. The detector assembly has an optical path cavity with a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting dual detector assemblies. The vertical interface and the inclined interface are connected to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample. A movement adjustment module corresponds one-to-one with the second optical path module, the third optical path module, and so on up to the nth optical path module. The movement adjustment module is connected to the second optical path module, the third optical path module, and so on up to the nth optical path module through a connecting component, driving the second optical path module, the third optical path module, and so on up to the nth optical path module to move back and forth to adjust the distance between the first optical path module or the second optical path module, the third optical path module, and so on up to the nth optical path module.

6. The automated, automated energy-dispersive X-ray fluorescence spectroscopy array scanning analysis method according to claim 5, characterized in that, The detector assembly is mounted on the inclined interface via a detector insulating block, and the X-ray source assembly is mounted on the vertical interface via a light tube fixing ring. A collimator for providing collimation is also provided between the sample and the X-ray source assembly. The first optical path module, the second optical path module, and up to the nth optical path module also include a shutter assembly. The shutter assembly includes a shutter plate, and the shutter plate is equipped with a shutter baffle that shields X-ray leakage when the X-ray source is working normally and is located at the X-ray exit, and a filter that provides filtering of stray light.

7. The automated, automated energy-dispersive X-ray fluorescence spectroscopy array scanning analysis method according to claim 6, characterized in that, The shutter assembly also includes a motor, which drives the shutter plate via a crank plate with an elongated slot. A rotating component is mounted on the shutter plate and inserted into the elongated slot of the crank plate. A slide rail assembly for driving the shutter plate is provided below the shutter plate.

8. The automated, automated energy-dispersive X-ray fluorescence spectroscopy array scanning analysis method according to claim 1, characterized in that, The sample transfer and positioning detection mechanism includes an X-adjustment sliding base plate mounted on the X-adjustment mechanism, a fixed transfer mechanism, and a movable transfer mechanism, the fixed transfer mechanism and the movable transfer mechanism corresponding to each other. The fixed transfer mechanism is fixedly mounted on the X-adjustment sliding base plate, and the movable transfer mechanism is mounted on the X-adjustment sliding base plate via a main unit sliding mechanism. It also includes a main unit lifting mechanism for lifting or blocking sample movement. The fixed transfer mechanism includes a main unit support component mounted on the X-adjustment sliding base plate for overall support, a main unit transfer wheel and a main unit adjustment wheel mounted on the main unit support component, a conveyor belt that cooperates with the main unit transfer wheel and the main unit adjustment wheel, a main unit drive component mounted on the main unit support component, and a main unit drive component mounted on the main unit drive component. The host drive component has a host drive wheel on its drive shaft; the moving conveying mechanism includes a host support component mounted on the host sliding mechanism for overall support, a host conveying wheel and a host adjusting wheel mounted on the host support component, and a conveyor belt that cooperates with the host conveying wheel and the host adjusting wheel, a host drive component mounted on the host support component, and a host drive wheel mounted on the drive shaft of the host drive component; the host lifting mechanism includes a host gripper at the front end for holding the sample, and a host lifting component at the rear end for driving the host gripper upward; the protective cover lifting mechanism includes a lifting component mounted on the X-adjusting sliding base plate, a protective cover cross plate connected to the lifting component, and a protective cover connected to the protective cover cross plate.

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