Antistatic acrylic diffusion plate capable of preventing blue light from being generated

Abstract

The invention discloses an antistatic acrylic diffusion plate capable of preventing generation of blue light. The antistatic acrylic diffusion plate comprises an acrylic raw material, a diffusant, a dye, a dye dispersant and an antistatic agent. The mass percent of the acrylic raw material is 97%-99%. And the mass percent of the dispersing agent is 0.5%-2%. The mass percent of the dye is 0.4%-0.6%. The mass percent of the dye dispersing agent is 0.05%-0.3%. The mass percent of the antistatic agent is 0.05%-0.3%.

Description

Technical Field

[0001] The present invention relates to an acrylic diffuser plate, in particular to an antistatic acrylic diffuser plate capable of preventing blue light generation. Background Art

[0002] Industries with high-precision manufacturing (such as semiconductor integrated circuit manufacturing, biological laboratories, precision machinery and medical treatment, etc.) need to filter out the spectrum below 500 nm in wavelength. However, in the key step of the yellow light lithography process in semiconductor integrated circuit manufacturing, a silicon dioxide insulating layer and photoresist are coated on the substrate. However, the photoresist can be easily dissolved by a developer after being irradiated with ultraviolet light, and then the circuit pattern will remain on the substrate after etching. The photoresist used in this step is composed of resin, solvent and additives. The photosensitive range of the photoresist is usually located between 200 nm and 500 nm. Therefore, the light within the above range that can trigger the chemical reaction of the photoresist includes ultraviolet light, violet light and blue light within the wavelength range of 200 - 500 nm. Therefore, the above light cannot exist at all in the lithography area. The photoresist is less sensitive to light with a wavelength above 500 nm, so it will not cause unnecessary reactions or changes, and it can prevent premature exposure and misexposure, so as to improve the yield of integrated circuits.

[0003] The embedded direct-downlight panel lamp has the advantages of high light efficiency and large illumination area. However, in the yellow light process, the panel lamp uses a PC diffuser plate or a PS diffuser plate, but the chassis of the panel lamp has a highly reflective white film or white paint. Therefore, when the light is reflected twice on the white surface inside the panel lamp, the color temperature of the light of the panel lamp will shift and the color coordinates (x, y) will also become smaller, which will cause some blue light to overflow and affect the stability of the integrated circuit process. At the same time, the antistatic ability of the PC diffuser plate or the PS diffuser plate is general, which will cause dust adsorption, and it will also affect the stability of the integrated circuit process. Summary of the Invention

[0004] According to an embodiment of the present invention, an antistatic acrylic diffuser plate capable of preventing blue light generation is proposed, which includes acrylic raw materials, a diffusing agent, a dye, a dye dispersant and an antistatic agent. The mass percentage of the acrylic raw materials is 97% - 99%. The mass percentage of the diffusing agent is 0.5% - 2%. The mass percentage of the dye is 0.4% - 0.6%. The mass percentage of the dye dispersant is 0.05% - 0.3%. The mass percentage of the antistatic agent is 0.05% - 0.3%.

[0005] In one embodiment, the mass percentage of the acrylic raw material is 97.6% to 98.5%. The mass percentage of the diffusing agent is 0.7% to 1.5%. The mass percentage of the dye is 0.45% to 0.55%. The mass percentage of the dye dispersant is 0.1% to 0.28%. The mass percentage of the antistatic agent is 0.1% to 0.28%.

[0006] In one embodiment, the mass percentage of the acrylic raw material is 97.8% to 98.4%. The mass percentage of the diffusing agent is 0.76% to 1.4%. The mass percentage of the dye is 0.48% to 0.53%. The mass percentage of the dye dispersant is 0.15% to 0.26%. The mass percentage of the antistatic agent is 0.15% to 0.26%.

[0007] In one embodiment, the acrylic material is polymethyl methacrylate.

[0008] In one embodiment, the acrylic material is a transparent material.

[0009] In one embodiment, the diffusing agent is a polystyrene microsphere diffusing agent.

[0010] In one embodiment, the dye is a quinoline dye.

[0011] In one embodiment, the dye is a red and yellow dye.

[0012] In one embodiment, the dye dispersant is a copolymer dispersant.

[0013] In one embodiment, the antistatic agent is glyceryl monostearate.

[0014] As described above, the antistatic acrylic diffusion plate capable of preventing the generation of blue light according to the embodiments of the present invention may have one or more of the following advantages:

[0015] (1) In one embodiment of the present invention, the acrylic diffusion plate includes an acrylic raw material, a diffusant, a dye, a dye dispersant and an antistatic agent. The mass percentage of the acrylic raw material is 97% to 99%. The mass percentage of the diffusant is 0.5% to 2%. The mass percentage of the dye is 0.4% to 0.6%. The mass percentage of the dye dispersant is 0.05% to 0.3%. The mass percentage of the antistatic agent is 0.05% to 0.3%. The above special formula enables the acrylic diffusion plate to effectively filter out blue light with a wavelength below 500nm. Therefore, the lighting device used in the integrated circuit process is very suitable for using this acrylic diffusion plate to prevent unnecessary reactions or changes, and to prevent premature exposure and misexposure. In this way, the yield of the integrated circuit can be greatly improved.

[0016] (2) In an embodiment of the present invention, the acrylic diffuser plate has a special formulation, enabling it to effectively filter out blue light with a wavelength below 500 nm, and to avoid the shift of the color temperature of the light generated by the lighting device and the decrease of the color coordinates (x, y). In the integrated circuit manufacturing process, the quality and stability of light directly affect the stability of the integrated circuit manufacturing process. Therefore, the lighting device applied to the integrated circuit manufacturing process is very suitable for using this acrylic diffuser plate, which helps to improve the overall reliability of the integrated circuit manufacturing process and ensure that the products meet the requirements of high precision and high quality.

[0017] (3) In an embodiment of the present invention, the acrylic diffuser plate has a special formulation, enabling it to effectively filter out blue light with a wavelength below 500 nm. Therefore, the lighting device applied to the integrated circuit manufacturing process is very suitable for using this acrylic diffuser plate to prevent the glare generated by blue light from irritating the eyes of the technicians in the lithography area, and to avoid the fatigue of the technicians' eyes. In this way, the acrylic diffuser plate can achieve excellent performance.

[0018] (4) In an embodiment of the present invention, the acrylic diffuser plate is designed with a special formulation, so it can achieve excellent antistatic properties, enabling it to effectively reduce the problems brought by static electricity accumulation. In the integrated circuit manufacturing process, if such a diffuser plate is used in the lighting device, it can effectively inhibit dust adsorption and reduce the adverse effects caused by dust adsorption. Since dust may affect the quality and manufacturing precision of integrated circuits, using an antistatic acrylic diffuser plate helps to reduce the adverse effects and ensure the process stability. Therefore, the acrylic diffuser plate can not only improve the yield of integrated circuits, but also improve the production efficiency to meet the actual application requirements.

[0019] (5) In an embodiment of the present invention, the acrylic diffuser plate is designed with a special formulation, which can achieve specific functions and effectively improve the stability and yield of the integrated circuit manufacturing process. The acrylic diffuser plate can achieve excellent optical properties and effects, making it highly practical in integrated circuit manufacturing. In addition, by adjusting the formulation, the acrylic diffuser plate can adapt to different application requirements, ensure that the light meets the requirements, and improve the precision of the integrated circuit manufacturing process. Therefore, the acrylic diffuser plate can not only improve the production quality, but also optimize the efficiency of the integrated circuit manufacturing process to meet the requirements of different applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a flowchart of the manufacturing method of the antistatic acrylic diffuser plate that can prevent the generation of blue light according to the first embodiment of the present invention.

[0021] Figure 2 It is a flowchart of the manufacturing method of the antistatic acrylic diffuser plate that can prevent the generation of blue light according to the second embodiment of the present invention.

[0022] Figure 3 Spectrum diagram of the light strip without the antistatic acrylic diffuser plate according to the third embodiment of the present invention.

[0023] Figure 4 Spectrum diagram of the light strip with the antistatic acrylic diffuser plate according to the third embodiment of the present invention.

[0024] Figure 5 Flow chart of the manufacturing method of the antistatic acrylic diffuser plate capable of preventing blue light generation according to the third embodiment of the present invention.

[0025] Description of reference numerals:

[0026] S11 - S16, S21 - S26, S51 - S56 - process flow steps; AD, BD - spectrum diagrams.

[0027] The following describes in detail the features and advantages of the present invention in the embodiments, the content of which is sufficient for any person skilled in the relevant art to understand the technical content of the present invention and implement it accordingly. And according to the content, claims and drawings disclosed in this specification, any person skilled in the relevant art can easily understand the relevant objectives and advantages of this creation. Detailed embodiments

[0028] The following will refer to the relevant drawings to illustrate the embodiments of the antistatic acrylic diffuser plate capable of preventing blue light generation according to the present invention. For the sake of clarity and convenience of illustration, the components in the drawings may be presented exaggerated or reduced in size and proportion. In the following description and / or claims, when referring to a component "connected" or "coupled" to another component, it may be directly connected or coupled to the other component or there may be intervening components; while when referring to a component "directly connected" or "directly coupled" to another component, there are no intervening components, and other words used to describe the relationship between components or layers should be interpreted in the same way. For ease of understanding, the same components in the following embodiments are denoted by the same reference numerals.

[0029] Please refer to Figure 1 , which is a flow chart of the manufacturing method of the antistatic acrylic diffuser plate capable of preventing blue light generation according to the first embodiment of the present invention. The acrylic diffuser plate includes acrylic raw materials, a diffusing agent, a dye, a dye dispersant, and an antistatic agent.

[0030] The mass percentage of the acrylic raw material is 97% - 99%. In this embodiment, the acrylic raw material is transparent; the acrylic raw material can be polymethyl methacrylate (PMMA).

[0031] The mass percentage of the dispersant is 0.5% - 2%. In this embodiment, the dispersant can be a highly crosslinked microsphere dispersant, such as a polystyrene (PS) microsphere dispersant. In another embodiment, the dispersant can be various existing optical dispersants.

[0032] The mass percentage of the dye is 0.4% - 0.6%. In this embodiment, the dye can be a red-yellow mixed dye, such as a quinoline-based color dye (such as C18H11NO3). The quinoline-based color dye has good miscibility with the acrylic raw material. In another embodiment, the dye can also be various existing dyes.

[0033] The mass percentage of the dye dispersant is 0.05% - 0.3%. In this embodiment, the dye dispersant can be a copolymeric dispersant. The dye dispersant can ensure that the dye is uniformly dispersed and stable in the coating, and can adjust the size and distribution of the dye particles to ensure that the coating has uniform color, gloss, transparency, texture and optical rotation properties. In another embodiment, the dye dispersant can also be various existing dispersants.

[0034] The mass percentage of the antistatic agent is 0.05% - 0.3%. In this embodiment, the antistatic agent can be glycerol monostearate (GMS). In another embodiment, the antistatic agent can also be various existing antistatic agents.

[0035] The above special formula enables the acrylic diffuser plate to effectively filter out blue light with a wavelength below 500nm. Therefore, the lighting device applied to the integrated circuit manufacturing process is very suitable to use this acrylic diffuser plate to prevent unnecessary reactions or changes, and can prevent premature exposure and misexposure. In this way, the yield of the integrated circuit can be greatly improved.

[0036] In addition, the above special formula enables the acrylic diffuser plate to effectively filter out blue light with a wavelength below 500nm. Therefore, the lighting device applied to the integrated circuit manufacturing process is very suitable to use this acrylic diffuser plate to prevent the glare caused by blue light from stimulating the eyes of the technicians in the lithography area, and can avoid the technicians' eyes from getting tired. In this way, the acrylic diffuser plate can achieve excellent performance.

[0037] In addition, due to the special formula design of the acrylic diffuser plate, it can achieve excellent antistatic characteristics, enabling it to effectively reduce the problems brought by static electricity accumulation. In the integrated circuit manufacturing process, if such a diffuser plate is used in the lighting device, it can effectively inhibit dust adsorption and reduce the adverse effects caused by dust adsorption. Since dust may affect the quality and manufacturing accuracy of the integrated circuit, using an antistatic acrylic diffuser plate helps to reduce the adverse effects and ensure the process stability. Therefore, the acrylic diffuser plate can not only improve the yield of the integrated circuit, but also improve the production efficiency to meet the requirements of practical applications.

[0038] Therefore, through special formula design, the acrylic diffuser plate can achieve specific functions and effectively improve the stability and yield of the integrated circuit manufacturing process. The acrylic diffuser plate can achieve excellent optical characteristics and effects, making it highly practical in integrated circuit manufacturing. In addition, by adjusting the formula, the acrylic diffuser plate can adapt to different application requirements, ensure that the light meets the requirements, and improve the precision of the integrated circuit manufacturing process. Therefore, the acrylic diffuser plate can not only improve the production quality but also optimize the efficiency of the integrated circuit manufacturing process to meet the requirements of different applications.

[0039] As shown in the figure, the manufacturing method of this embodiment includes the following steps:

[0040] Step S11: Provide acrylic raw materials, and the mass percentage of the acrylic raw materials is 97% - 99%.

[0041] Step S12: Provide a diffusing agent, and the mass percentage of the diffusing agent is 0.5% - 2%.

[0042] Step S13: Provide a dye, and the mass percentage of the dye is 0.4% - 0.6%.

[0043] Step S14: Provide a dye dispersant, and the mass percentage of the dye dispersant is 0.05% - 0.3%.

[0044] Step S15: Provide an antistatic agent, and the mass percentage of the antistatic agent is 0.05% - 0.3%.

[0045] Step S16: Manufacture the acrylic diffuser plate by mixing the acrylic raw materials, the diffusing agent, the dye, the dye dispersant, and the antistatic agent.

[0046] Of course, this embodiment is only used for illustration and does not limit the scope of the present invention. Equivalent modifications or changes made according to the antistatic acrylic diffuser plate capable of preventing blue light generation and its manufacturing method of this embodiment should still be included within the scope of the patent of the present invention.

[0047] Although the steps of the method described in the present invention are shown and described in a specific order, the operation order of each method can be changed, some steps can be executed in the reverse order, or some steps can be executed simultaneously with other steps. In another embodiment, different steps can be implemented in an intermittent and / or alternating manner.

[0048] It is worth mentioning that in the key steps of the yellow light lithography process in semiconductor integrated circuit manufacturing, the substrate is coated with a silicon dioxide insulating layer and photoresist. However, the photoresist can be easily dissolved by a developer after being irradiated with ultraviolet light. After etching, the circuit pattern will remain on the substrate. The photoresist used in this step is composed of resin, solvent, and additives. The photosensitive range of the photoresist is usually between 200nm and 500nm. Therefore, the light within the above range that can trigger the chemical reaction of the photoresist includes ultraviolet light, violet light, and blue light with wavelengths between 200 and 500nm. Therefore, the above-mentioned light must not exist in the lithography area at all. The photoresist is less sensitive to light with wavelengths above 500nm, so it will not cause unnecessary reactions or changes. It can prevent premature exposure and misexposure, thereby improving the yield of integrated circuits. In addition, existing embedded direct-lit panel lights have the advantages of high luminous efficiency and large illumination area. However, in the yellow light process, the panel lights use PC diffuser plates or PS diffuser plates, but the chassis of the panel lights has a highly reflective white film or white paint. Therefore, when the light is reflected twice on the white surface inside the panel light, the color temperature of the light of the panel light will shift and the color coordinates (x, y) will also become smaller, which will cause some blue light to spill out and affect the stability of the integrated circuit process. At the same time, the antistatic ability of the PC diffuser plate or PS diffuser plate is average, which will cause dust adsorption, and it will also affect the stability of the integrated circuit process. In contrast, according to the embodiments of the present invention, the acrylic diffuser plate includes acrylic raw materials, a diffusing agent, a dye, a dye dispersant, and an antistatic agent. The mass percentage of the acrylic raw materials is 97% to 99%. The mass percentage of the diffusing agent is 0.5% to 2%. The mass percentage of the dye is 0.4% to 0.6%. The mass percentage of the dye dispersant is 0.05% to 0.3%. The mass percentage of the antistatic agent is 0.05% to 0.3%. The above special formula enables the acrylic diffuser plate to effectively filter out blue light with wavelengths below 500nm. Therefore, the lighting device applied to the integrated circuit process is very suitable for using this acrylic diffuser plate to prevent unnecessary reactions or changes and prevent premature exposure and misexposure. In this way, the yield of the integrated circuit can be greatly improved.

[0049] Moreover, according to the embodiments of the present invention, the acrylic diffuser plate has a special formula, enabling the acrylic diffuser plate to effectively filter out blue light with wavelengths below 500nm and avoid the shift of the color temperature of the light generated by the lighting device and the decrease of the color coordinates (x, y). In the integrated circuit process, the quality and stability of the light directly affect the stability of the integrated circuit process. Therefore, the lighting device applied to the integrated circuit process is very suitable for using this acrylic diffuser plate, which helps to improve the reliability of the overall integrated circuit process and ensure that the product meets the requirements of high precision and high quality.

[0050] In addition, according to an embodiment of the present invention, the acrylic diffuser plate has a special formulation that enables the acrylic diffuser plate to effectively filter out blue light with a wavelength below 500 nm. Therefore, the lighting device applied to the integrated circuit manufacturing process is very suitable for using this acrylic diffuser plate to prevent the glare generated by blue light from irritating the eyes of the technicians in the lithography area and can avoid the fatigue of the technicians' eyes. In this way, the acrylic diffuser plate can achieve excellent performance.

[0051] In addition, according to an embodiment of the present invention, the acrylic diffuser plate is designed with a special formulation, so it can achieve excellent antistatic properties, enabling it to effectively reduce the problems brought by static electricity accumulation. In the integrated circuit manufacturing process, if such a diffuser plate is used in the lighting device, it can effectively inhibit dust adsorption and reduce the adverse effects caused by dust adsorption. Since dust may affect the quality and manufacturing accuracy of integrated circuits, using an antistatic acrylic diffuser plate helps to reduce the adverse effects and ensure the process stability. Therefore, the acrylic diffuser plate can not only improve the yield of integrated circuits but also increase the production efficiency to meet the requirements of practical applications.

[0052] Furthermore, according to an embodiment of the present invention, the acrylic diffuser plate is designed with a special formulation, which can achieve specific functions and effectively improve the stability and yield of the integrated circuit manufacturing process. The acrylic diffuser plate can achieve excellent optical properties and effects, making it highly practical in integrated circuit manufacturing. In addition, by adjusting the formulation, the acrylic diffuser plate can adapt to different application requirements, ensure that the light meets the requirements, and improve the accuracy of the integrated circuit manufacturing process. Therefore, the acrylic diffuser plate can not only improve the production quality but also optimize the efficiency of the integrated circuit manufacturing process to meet the requirements of different applications. As can be seen from the above, the antistatic acrylic diffuser plate capable of preventing blue light generation according to the embodiment of the present invention can indeed achieve excellent technical effects.

[0053] Please refer to Figure 2 , which is a flowchart of the manufacturing method of the antistatic acrylic diffuser plate capable of preventing blue light generation according to the second embodiment of the present invention. The acrylic diffuser plate includes acrylic raw materials, a diffusing agent, a dye, a dye dispersant, and an antistatic agent.

[0054] Different from the foregoing embodiment, in this embodiment, the mass percentage of the acrylic raw material is 97.6% - 98.5%. The mass percentage of the diffusing agent is 0.7% - 1.5%. The mass percentage of the dye is 0.45% - 0.55%. The mass percentage of the dye dispersant is 0.1% - 0.28%. The mass percentage of the antistatic agent is 0.1% - 0.28%.

[0055] Similarly, the above special formula enables the acrylic diffuser plate to effectively filter out blue light with a wavelength below 500 nm. Therefore, the lighting device applied to the integrated circuit manufacturing process is very suitable for using this acrylic diffuser plate to prevent unnecessary reactions or changes, and can prevent premature exposure and mis-exposure. In this way, the yield of the integrated circuit can be greatly improved. The above special formula can also prevent the glare caused by blue light from stimulating the eyes of the technicians in the lithography area, so as to avoid eye fatigue of the technicians, and can achieve excellent antistatic properties, enabling it to effectively reduce the problems brought by static electricity accumulation.

[0056] As shown in the figure, the manufacturing method of this embodiment includes the following steps:

[0057] Step S21: Provide acrylic raw materials, and the mass percentage of the acrylic raw materials is 97.6% - 98.5%.

[0058] Step S22: Provide a diffusing agent, and the mass percentage of the diffusing agent is 0.7% - 1.5%.

[0059] Step S23: Provide a dye, and the mass percentage of the dye is 0.45% - 0.55%.

[0060] Step S24: Provide a dye dispersant, and the mass percentage of the dye dispersant is 0.1% - 0.28%.

[0061] Step S25: Provide an antistatic agent, and the mass percentage of the antistatic agent is 0.1% - 0.28%.

[0062] Step S26: Manufacture an acrylic diffuser plate by mixing acrylic raw materials, a diffusing agent, a dye, a dye dispersant, and an antistatic agent.

[0063] Of course, this embodiment is only used for illustration and does not limit the scope of the present invention. Equivalent modifications or changes made according to the antistatic acrylic diffuser plate capable of preventing blue light generation and its manufacturing method of this embodiment should still be included within the patent scope of the present invention.

[0064] Although the steps of the method described in the present invention are shown and described in a specific order, the operation order of each method can be changed, certain steps can be executed in the reverse order, or certain steps can also be executed simultaneously with other steps. In another embodiment, different steps can be implemented in an intermittent and / or alternating manner.

[0065] Please refer to Figure 3 、 Figure 4 and Figure 5 . Figure 3 is the spectral diagram of the light bar without the antistatic acrylic diffuser plate in the third embodiment of the present invention. Figure 4Spectrum diagram of the light bar using the antistatic acrylic diffuser plate according to the third embodiment of the present invention. Figure 5 Flowchart of the manufacturing method of the antistatic acrylic diffuser plate capable of preventing blue light generation according to the third embodiment of the present invention.

[0066] The acrylic diffuser plate includes acrylic raw materials, a diffusing agent, a dye, a dye dispersant, and an antistatic agent. Different from the foregoing embodiments, in this embodiment, the mass percentage of the acrylic raw material is 97.8% - 98.4%. The mass percentage of the diffusing agent is 0.76% - 1.4%. The mass percentage of the dye is 0.48% - 0.53%. The mass percentage of the dye dispersant is 0.15% - 0.26%. The mass percentage of the antistatic agent is 0.15% - 0.26%.

[0067] This embodiment takes a light bar to be measured as an example, and its spectrum diagram AD is as Figure 3 shown. After applying the antistatic acrylic diffuser plate to this light bar, the spectrum diagram BD of this light bar is as Figure 4 shown. The formula of the antistatic acrylic diffuser plate is: the mass percentage of the acrylic raw material is 98%; the mass percentage of the diffusing agent is 1%. The mass percentage of the dye is 0.5%. The mass percentage of the dye dispersant is 0.25. The mass percentage of the antistatic agent is 0.25%. It can be Figure 4 seen that the antistatic acrylic diffuser plate can effectively prevent blue light from overflowing (prevent light with a wavelength below 500 nm from overflowing). Therefore, the lighting device applied to the integrated circuit manufacturing process is very suitable for using this acrylic diffuser plate to prevent unnecessary reactions or changes from occurring, and can prevent early exposure and misexposure. In this way, the yield of the integrated circuit can be greatly improved.

[0068] As Figure 5 shown, the manufacturing method of this embodiment includes the following steps:

[0069] Step S51: Provide acrylic raw materials, and the mass percentage of the acrylic raw material is 97.8% - 98.4%.

[0070] Step S52: Provide a diffusing agent, and the mass percentage of the diffusing agent is 0.76% - 1.4%.

[0071] Step S53: Provide a dye, and the mass percentage of the dye is 0.48% - 0.53%.

[0072] Step S54: Provide a dye dispersant, and the mass percentage of the dye dispersant is 0.15% - 0.26%.

[0073] Step S55: Provide an antistatic agent, and the mass percentage of the antistatic agent is 0.15% - 0.26%.

[0074] Step S56: Manufacture an acrylic diffuser plate by mixing acrylic raw materials, a diffusing agent, a dye, a dye dispersant, and an antistatic agent.

[0075] As can be seen from the above, the acrylic diffuser plate is formulated with a special formula and can effectively filter blue light with a wavelength below 500 nm. This characteristic enables the acrylic diffuser plate to exhibit extremely high application value in the integrated circuit manufacturing process. The integrated circuit manufacturing process has extremely strict requirements for the stability of the light source. If the lighting device contains excessive blue light, it may cause unnecessary chemical reactions or changes, thereby affecting the accuracy of the manufacturing process. The presence of blue light may cause early exposure or misexposure, affecting the integrated circuit and reducing the yield of the integrated circuit. By using an acrylic diffuser plate that can effectively filter blue light, these problems can be effectively prevented, ensuring the stability of the light source, improving the accuracy of exposure control, ultimately increasing the yield of the integrated circuit, and making the integrated circuit manufacturing process more reliable.

[0076] In addition to its impact on exposure accuracy, blue light also has a negative impact on the vision of operating technicians. Prolonged exposure to a lighting environment with high-intensity blue light may cause the eyes of technicians to have a glare effect, affecting visual clarity, and may even cause visual fatigue or discomfort, further reducing the concentration and accuracy of the operation. By applying an acrylic diffuser plate treated with a special formula, blue light can be effectively filtered, reducing the glare generated by the lighting device, making the working environment more comfortable, and reducing the eye burden on technicians. In this way, not only can the work efficiency of technicians be improved, but also the stability of the manufacturing process can be ensured, reducing errors caused by human factors and improving the overall production quality. Therefore, this acrylic diffuser plate not only plays a key role at the technical level but also brings significant benefits to the optimization of the working environment.

[0077] In addition, the acrylic diffuser plate not only has the function of filtering blue light but also has excellent antistatic properties, making it more practical in the integrated circuit manufacturing environment. The accumulation of static electricity may cause many adverse effects, such as attracting dust, affecting the manufacturing accuracy and quality of integrated circuits, and even possibly reducing the yield of integrated circuits. Since the integrated circuit manufacturing process involves electronic components at a very small scale, tiny dust particles may cause manufacturing defects or flaws, affecting the final performance and stability of the product. Therefore, using an acrylic diffuser plate with antistatic function in the lighting device can effectively reduce dust adsorption, reduce the pollution risk in the manufacturing environment, and further improve the stability and reliability of the integrated circuit manufacturing process.

[0078] Therefore, the acrylic diffuser plate is designed with a special formula to achieve specific functions and effectively improve the stability and yield of the integrated circuit manufacturing process. The acrylic diffuser plate can achieve excellent optical characteristics and effects, making it highly practical in integrated circuit manufacturing. In addition, by adjusting the formula, the acrylic diffuser plate can adapt to different application requirements, ensure that the light meets the requirements, and improve the precision of the integrated circuit manufacturing process. Therefore, the acrylic diffuser plate can not only improve the production quality but also optimize the efficiency of the integrated circuit manufacturing process to meet the requirements of different applications.

[0079] Of course, this embodiment is only used for illustration and does not limit the scope of the present invention. Equivalent modifications or changes made according to the antistatic acrylic diffuser plate capable of preventing blue light generation and its manufacturing method of this embodiment should still be included within the patent scope of the present invention.

[0080] Although the steps of the methods described in the present invention are shown and described in a specific order, the operation order of each method can be changed, certain steps can be executed in the reverse order, or certain steps can also be executed simultaneously with other steps. In another embodiment, different steps can be implemented in an intermittent and / or alternating manner.

[0081] In summary, according to the embodiments of the present invention, the acrylic diffuser plate includes acrylic raw materials, a diffusing agent, a dye, a dye dispersant, and an antistatic agent. The mass percentage of the acrylic raw materials is 97% - 99%. The mass percentage of the diffusing agent is 0.5% - 2%. The mass percentage of the dye is 0.4% - 0.6%. The mass percentage of the dye dispersant is 0.05% - 0.3%. The mass percentage of the antistatic agent is 0.05% - 0.3%. The above special formula enables the acrylic diffuser plate to effectively filter blue light with a wavelength of less than 500 nm. Therefore, the lighting device applied to the integrated circuit manufacturing process is very suitable for using this acrylic diffuser plate to prevent unnecessary reactions or changes and can prevent early exposure and misexposure. In this way, the yield of the integrated circuit can be greatly improved.

[0082] Moreover, according to the embodiments of the present invention, the acrylic diffuser plate has a special formula, enabling the acrylic diffuser plate to effectively filter blue light with a wavelength of less than 500 nm and avoid the color temperature of the light generated by the lighting device from shifting and the color coordinates (x, y) from becoming smaller. In the integrated circuit manufacturing process, the quality and stability of the light directly affect the stability of the integrated circuit manufacturing process. Therefore, the lighting device applied to the integrated circuit manufacturing process is very suitable for using this acrylic diffuser plate, which helps to improve the overall reliability of the integrated circuit manufacturing process and ensure that the product meets the requirements of high precision and high quality.

[0083] In addition, according to an embodiment of the present invention, the acrylic diffuser plate has a special formula, enabling the acrylic diffuser plate to effectively filter blue light with a wavelength below 500 nm. Therefore, the lighting device applied to the integrated circuit manufacturing process is very suitable for using this acrylic diffuser plate to prevent the glare generated by blue light from stimulating the eyes of the technicians in the lithography area, and can avoid the fatigue of the technicians' eyes. In this way, the acrylic diffuser plate can achieve excellent performance.

[0084] In addition, according to an embodiment of the present invention, the acrylic diffuser plate is designed with a special formula, so it can achieve excellent antistatic properties, enabling it to effectively reduce the problems caused by static electricity accumulation. In the integrated circuit manufacturing process, if such a diffuser plate is used in the lighting device, it can effectively inhibit dust adsorption and reduce the adverse effects caused by dust adsorption. Since dust may affect the quality and manufacturing accuracy of the integrated circuit, using an antistatic acrylic diffuser plate helps to reduce the adverse effects and ensure the process stability. Therefore, the acrylic diffuser plate can not only improve the yield of the integrated circuit, but also improve the production efficiency to meet the requirements of practical applications.

[0085] Furthermore, according to an embodiment of the present invention, the acrylic diffuser plate is designed with a special formula, which can achieve specific functions and effectively improve the stability and yield of the integrated circuit manufacturing process. The acrylic diffuser plate can achieve excellent optical properties and effects, making it highly practical in the integrated circuit manufacturing. In addition, by adjusting the formula, the acrylic diffuser plate can adapt to different application requirements, ensure that the light meets the requirements, and improve the accuracy of the integrated circuit manufacturing process. Therefore, the acrylic diffuser plate can not only improve the production quality, but also optimize the efficiency of the integrated circuit manufacturing process to meet the requirements of different applications.

[0086] It should be noted that although the above embodiments have been described in this article, the patent protection scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, any changes and modifications made to the embodiments described in this article, or any equivalent structural or equivalent process transformations made using the content of the specification and drawings of the present invention, and directly or indirectly applying the above technical solutions to other related technical fields, are all included in the protection scope of the present invention patent.

Claims

1. An antistatic acrylic diffusion plate capable of preventing the generation of blue light, characterized in that: The invention comprises an acrylic raw material, a diffusant, a dye, a dye dispersant and an antistatic agent, wherein the mass percentage of the acrylic raw material is 97% to 99%, the mass percentage of the diffusant is 0.5% to 2%, the mass percentage of the dye is 0.4% to 0.6%, the mass percentage of the dye dispersant is 0.05% to 0.3%, and the mass percentage of the antistatic agent is 0.05% to 0.3%.

2. The antistatic acrylic diffusion plate capable of preventing the generation of blue light as claimed in claim 1, characterized in that: The mass percentage of the acrylic raw material is 97.6% to 98.5%, the mass percentage of the diffusing agent is 0.7% to 1.5%, the mass percentage of the dye is 0.45% to 0.55%, the mass percentage of the dye dispersant is 0.1% to 0.28%, and the mass percentage of the antistatic agent is 0.1% to 0.28%.

3. The antistatic acrylic diffusion plate capable of preventing the generation of blue light as claimed in claim 1, characterized in that: The mass percentage of the acrylic raw material is 97.8% to 98.4%, the mass percentage of the diffusing agent is 0.76% to 1.4%, the mass percentage of the dye is 0.48% to 0.53%, the mass percentage of the dye dispersant is 0.15% to 0.26%, and the mass percentage of the antistatic agent is 0.15% to 0.26%.

4. The antistatic acrylic diffusion plate capable of preventing the generation of blue light as claimed in claim 1, characterized in that: The acrylic raw material is polymethyl methacrylate.

5. The antistatic acrylic diffusion plate capable of preventing the generation of blue light as claimed in claim 1, characterized in that: The acrylic raw material is a transparent material.

6. The antistatic acrylic diffusion plate capable of preventing the generation of blue light as claimed in claim 1, characterized in that: The diffusing agent is a polystyrene microsphere diffusing agent.

7. The antistatic acrylic diffusion plate capable of preventing the generation of blue light as claimed in claim 1, characterized in that: The dye is a quinoline dye.

8. The antistatic acrylic diffusion plate capable of preventing the generation of blue light as claimed in claim 6, characterized in that: The dye is a red and yellow dye.

9. The antistatic acrylic diffusion plate capable of preventing the generation of blue light according to claim 1, characterized in that: The dye dispersant is a copolymer dispersant.

10. The antistatic acrylic diffusion plate capable of preventing the generation of blue light according to claim 1, characterized in that: The antistatic agent is glyceryl monostearate.

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