A real-time high-resolution ultrathin spectrometer

Abstract

The application discloses a kind of real-time high-resolution ultrathin spectrometer, belong to spectral measurement technical field, comprising: microlens, diaphragm, plane transmission grating and detector, wherein, microlens and diaphragm are collimated into parallel light beam by incident light beam, plane transmission grating carries out first order diffraction to parallel light beam, and first order diffraction light beam is irradiated to at least one target preset area, since detector includes multiple same size preset areas sequentially arranged and not overlapped in first direction, and multiple preset areas correspond to different wavelengths that spectrometer can measure respectively, thus by calculating the sum of all pixel records in each target preset area Light intensity, the spectral intensity value of wavelength corresponding to each target preset area is obtained.The above-mentioned spectrometer requires few components, and data processing method is simple, which is beneficial to meet the real-time requirement;Instrument thickness can be less than 0.5 millimeter, meet ultrathin requirement.

Description

Technical Field

[0001] This invention belongs to the field of spectral measurement technology, specifically relating to a real-time high-resolution ultrathin spectrometer. Background Technology

[0002] A spectrometer is an instrument that measures the absorption or emission spectra of objects. It plays an increasingly important role in various fields such as chemical analysis, environmental monitoring, food testing, medical diagnosis, and space exploration, as well as in scientific research and industrial applications. The main performance parameters of a spectrometer include spectral resolution, spectral range, measurement time, physical size, weight, stability, and power consumption. High-resolution spectrometers with spectral resolution on the order of 1 nanometer can be divided into two main categories: scanning type and snapshot type.

[0003] Currently, high-resolution scanning spectrometers with spectral resolution on the order of 1 nanometer can be achieved in five ways: (1) using only one scanning Michelson interferometer; (2) a combination of a scanning Michelson interferometer and a fixed dispersive prism; (3) a combination of a scanning Fabry-Perot interferometer and a fixed narrowband filter (or a fixed prism, a fixed grating, and a fixed Fabry-Perot interferometer); (4) a combination of a scanning Fabry-Perot interferometer and a scanning Michelson interferometer; and (5) a combination of a scanning Fabry-Perot interferometer and a static step mirror interferometer (or a static grating interferometer).

[0004] The aforementioned scanning high-resolution spectrometer has a complex structure and requires a large number of components. Due to the presence of moving elements and their driving systems, the spectrometer has low stability and is greatly limited in miniaturization, with the instrument thickness being much greater than 1 millimeter. In addition, at least one scanning cycle is required to obtain complete spectral information, and Fourier transform is required to reconstruct the spectrum during data processing, which cannot meet the requirements of real-time measurement.

[0005] On the other hand, snapshot-type high-resolution spectrometers with spectral resolution on the order of 1 nanometer can be achieved in two ways: (1) a combination of a virtual imaging phase array and a planar grating; (2) using a static grating interferometer. Regarding these two methods, the first method has a wavelength range of only 100 nanometers when the spectral resolution is on the order of nanometers, or only 15 nanometers when the spectral resolution is on the order of picometers. The wavelength range is not wide enough to achieve a wide wavelength range of 200 nanometers or more. The second method, however, can achieve a wavelength range of 0.1 cm⁻¹ in the visible or near-infrared spectral region. -1 Or higher spectral resolution, but the spectral range for achieving ultra-high spectral resolution is narrower.

[0006] Therefore, in the ultraviolet-visible band, under the premise of achieving a wide wavelength range (wavelength range of 200 nanometers and above) and spectral resolution on the order of 1 nanometer, how to meet the requirements of ultra-thin (instrument thickness less than 0.5 mm), real-time measurement, simplification of system, miniaturization of instrument, and simpler and faster data processing, is a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0007] To address the aforementioned problems in the prior art, this invention provides a real-time high-resolution ultrathin spectrometer. The technical problem to be solved by this invention is achieved through the following technical solution:

[0008] This invention provides a real-time high-resolution ultrathin spectrometer, comprising: a microlens, an aperture, a planar transmission grating, and a detector;

[0009] The microlens shares an optical axis with the aperture and is used to receive the incident light beam and transmit it to the aperture; the optical axis is perpendicular to the extension direction of the grating groove in the planar transmission grating;

[0010] The aperture stop is used to limit the output beam of the microlens, allowing only a portion of the output beam with the optical axis of the microlens as the central axis and an aperture size equal to the light-transmitting aperture size of the microlens to pass through, forming a parallel beam centered on the optical axis of the microlens;

[0011] The plane of the planar transmission grating is parallel to the plane of the detector. The planar transmission grating is used to diffract the parallel beam to form a first-order diffracted beam.

[0012] The detector includes multiple preset regions of the same size arranged sequentially along a first direction and not overlapping each other. The multiple preset regions correspond to different wavelengths that the spectrometer can measure. The detector is used to receive the first-order diffraction beam and determine at least one target preset region illuminated by the first-order diffraction beam. By calculating the sum of the light intensities recorded by all pixels in each target preset region, the spectral intensity value of the wavelength corresponding to each target preset region is obtained. The first direction is perpendicular to the extension direction of the grating groove in the planar transmission grating.

[0013] In one embodiment of the present invention, the aperture of the microlens, the aperture of the aperture stop, and the aperture size of the parallel beam are all D.

[0014] In one embodiment of the present invention, D = d0 cosα, where α represents the angle between the optical axis and the normal to the plane containing the planar transmission grating, and d0 represents the preset length of each preset region in the first direction.

[0015] In one embodiment of the present invention, the width of each of the preset regions is d0 cosα in the second direction, and the second direction is the extension direction of the grating groove in the planar transmission grating.

[0016] In one embodiment of the present invention, M preset regions arranged from bottom to top in the first direction respectively correspond to M wavelengths λ1, λ2, ..., λ3 that the spectrometer can measure. i ,…,λ M , where λ1,λ2,…,λ i ,…,λ M Gradually increase.

[0017] In one embodiment of the present invention, the spectrometer is capable of measuring the i-th wavelength λ. i for:

[0018]

[0019] In the formula, g represents the grating constant, α represents the angle between the optical axis and the normal to the plane containing the planar transmission grating, and λ represents the angle between the optical axis and the normal to the plane containing the planar transmission grating. min λ represents the smallest wavelength that the spectrometer can measure. min =λ1, where λ1 represents the first wavelength that the spectrometer can measure, d0 represents the preset length of each preset region in the first direction, and S0 represents the distance between the plane where the planar transmission grating is located and the plane where the detector is located.

[0020] In one embodiment of the present invention,

[0021]

[0022] In the formula, g represents the grating constant of the planar transmission grating, and Δλ represents the minimum wavelength λ that the spectrometer can measure. min Spectral resolution at that location.

[0023] In one embodiment of the invention, the spectrometer is capable of measuring the smallest wavelength λ. min The vertical distance from the lower edge of the corresponding preset area to the first plane is h0. The first plane is the plane where the lower edge of the intersection of the parallel beam and the planar transmission grating is located. The first plane is perpendicular to the plane where the planar transmission grating is located and parallel to the extension direction of the grating groove in the planar transmission grating.

[0024] in,

[0025]

[0026] In one embodiment of the present invention, the spectrometer is capable of measuring the i-th wavelength λ. iThe spectral resolution at that location is:

[0027]

[0028] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0029] This invention provides a real-time high-resolution ultrathin spectrometer, comprising: a microlens, an aperture, a planar transmission grating, and a detector. The microlens and aperture collimate the incident light beam into a parallel beam. The planar transmission grating performs first-order diffraction on the parallel beam, and the resulting first-order diffracted beam illuminates at least one target preset region. Since the detector comprises multiple preset regions of the same size arranged sequentially along a first direction and not overlapping, and these preset regions correspond to different wavelengths that the spectrometer can measure, the spectral intensity value of each target preset region at its corresponding wavelength is obtained by calculating the sum of the light intensities recorded by all pixels within each target preset region. Therefore, the data processing of the above spectrometer does not require complex calculations such as Fourier transforms to reconstruct the spectrum; the data processing is simple and fast, meeting the real-time requirements.

[0030] Furthermore, the aforementioned spectrometer consists of a microlens, an aperture, a planar transmission grating, and a detector. It has a simple structure and requires fewer components. The aperture size of the microlens and aperture, the size of the planar transmission grating along the direction parallel to the grating groove, and the size of the detector along the direction parallel to the grating groove can all be less than 0.5 mm, ensuring that the real-time high-resolution ultrathin spectrometer provided by this invention is ultrathin (instrument thickness less than 0.5 mm).

[0031] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of a real-time high-resolution ultrathin spectrometer provided in an embodiment of the present invention;

[0033] Figure 2 This is a schematic diagram of the arrangement of multiple preset regions in the detector provided in the embodiment of the present invention;

[0034] Figure 3 This is a geometric schematic diagram of the real-time high-resolution ultrathin spectrometer provided in an embodiment of the present invention;

[0035] Figure 4 This is a schematic diagram of the measurement wavelength of the real-time high-resolution ultrathin spectrometer provided in an embodiment of the present invention;

[0036] Figure 5 This is a graph showing the variation of spectral resolution with wavelength for the real-time high-resolution ultrathin spectrometer provided in this embodiment of the invention. Detailed Implementation

[0037] The present invention will be further described in detail below with reference to specific embodiments, but the implementation of the present invention is not limited thereto.

[0038] Figure 1 This is a schematic diagram of a real-time high-resolution ultrathin spectrometer provided in an embodiment of the present invention. Figure 2 This is a schematic diagram showing the arrangement of multiple preset regions in the detector provided in an embodiment of the present invention. Please refer to... Figures 1-2 This invention provides a real-time high-resolution ultrathin spectrometer, comprising: a microlens 10, an aperture 20, a planar transmission grating 30, and a detector 40;

[0039] The microlens 10 and the aperture 20 are coaxial, and are used to receive the incident light beam and transmit it to the aperture 20; the optical axis is perpendicular to the extension direction of the grating groove in the planar transmission grating 30.

[0040] Aperture 20 is used to limit the output beam of microlens 10, allowing only a portion of the output beam with the optical axis of microlens 10 as the central axis and an aperture size equal to the light-transmitting aperture size of microlens 10 to pass through, forming a parallel beam centered on the optical axis of microlens 10.

[0041] The plane of the planar transmission grating 30 is parallel to the plane of the detector 40. The planar transmission grating 30 is used to diffract the parallel beam to form a first-order diffracted beam.

[0042] The detector 40 includes multiple preset regions 301 of the same size arranged sequentially along a first direction and not overlapping each other. The multiple preset regions 301 correspond to different wavelengths that the spectrometer can measure. The detector 40 is used to receive a first-order diffraction beam and determine at least one target preset region 301 illuminated by the first-order diffraction beam. By calculating the sum of the light intensities recorded by all pixels in each target preset region 301, the spectral intensity value of the wavelength corresponding to each target preset region 301 is obtained. The first direction is perpendicular to the extension direction of the grating groove in the planar transmission grating 30.

[0043] Specifically, the spectrometer provided in this embodiment of the invention includes only a microlens 10, an aperture 20, a planar transmission grating 30, and a detector 40, with no moving parts. During measurement, the incident light beam enters the microlens 10 via an optical fiber and is transmitted to the aperture 20. The optical axis of the aperture 20 coincides with the optical axis of the microlens 10. The aperture 20 is used to limit the output light beam of the microlens 10. It can block a portion of the output light beam that is not parallel to the optical axis of the microlens 10 and exceeds the aperture size of the microlens 10, allowing only a parallel beam with the optical axis of the microlens 10 as its central axis and an aperture size equal to the aperture size of the microlens 10 to pass through. In other words, this embodiment uses the combination of the microlens 10 and the aperture 20 to collimate the incident light output from the optical fiber into a parallel beam with the optical axis of the microlens 10 as its central axis. The aperture size of this parallel beam is equal to the aperture size of the microlens 10 and is perpendicular to the grating groove.

[0044] Furthermore, the planar transmission grating 30 performs first-order diffraction on the parallel beam, thus enabling the spectrometer to simultaneously achieve high spectral resolution (spectral resolution on the order of 1 nanometer), wide spectral range (wavelength range of 200 nanometers and above) and real-time measurement in the ultraviolet-visible band.

[0045] Figure 3 This is a geometric schematic diagram of the real-time high-resolution ultrathin spectrometer provided in an embodiment of the present invention. Please refer to... Figures 1-3 α represents the angle between the optical axis of the microlens 10 and the normal to the plane containing the planar transmission grating 30. Therefore, the incident angle of the parallel beam output by the aperture 20 on the plane containing the planar transmission grating 30 is α. S0 represents the distance between the plane containing the planar transmission grating 30 and the plane containing the detector 40. In this embodiment, the detector 40 includes a plurality of preset regions 301 arranged sequentially along the first direction. These preset regions 301 are of the same size, do not overlap, and correspond one-to-one with the multiple wavelengths that the spectrometer can measure. For example, as shown... Figures 2-3 As shown, d0 represents the preset length of each preset region 301 in the detector 40 in the first direction, and λ i This indicates the i-th wavelength that the real-time high-resolution ultrathin spectrometer can measure, where i = 1, 2, ..., M, and M represents the number of wavelengths that the spectrometer can measure. After passing through the microlens 10, aperture 20, and planar transmission grating 30, the incident beams of different wavelengths will form first-order diffracted beams that fall into different preset regions 301. For example... Figure 3 The two blue lines between the mid-plane transmission grating 30 and the detector 40 represent wavelengths λ. minThe incident beam, after passing through microlens 10, aperture 20, and planar transmission grating 30 in sequence, forms the uppermost and lowermost rays of the first-order diffracted beam. The two black lines between the planar transmission grating 30 and the detector 40 represent the uppermost and lowermost rays of the first-order diffracted beam formed by the incident beam with wavelength λ2 after passing through microlens 10, aperture 20, and planar transmission grating 30 in sequence. The two red lines between the planar transmission grating 30 and the detector 40 represent the uppermost and lowermost rays of the first-order diffracted beam formed by the incident beam with wavelength λ3 after passing through microlens 10, aperture 20, and planar transmission grating 30 in sequence. Figure 3 middle The wavelength λ represents the wavelength of the incident parallel beam after diffraction by the grating. min The first-order diffraction angle, The first-order diffraction angle represents the wavelength λ2 of the incident parallel beam after diffraction by the grating. This represents the first-order diffraction angle of the incident parallel beam after diffraction by the grating, with wavelength λ3.

[0046] Optionally, the spectrometer can measure wavelengths λ1, λ2, ..., λ i ,…,λ M Gradually increasing, while λ1, λ2, ..., λ i ,…,λ M The corresponding preset regions 301 are arranged from bottom to top in the first direction. That is, the M preset regions 301 arranged from bottom to top in the first direction correspond to the M gradually increasing wavelengths λ1, λ2, ..., λ that the spectrometer can measure. i ,…,λ M The smallest wavelength λ that the spectrometer can measure min =λ1.

[0047] For a specific wavelength that the spectrometer can measure, the incident light beam of that wavelength passes sequentially through the microlens 10, the aperture 20, and the planar transmission grating 30, and then illuminates a target preset region 301 in the detector 40. By calculating the sum of the light intensities recorded by all pixels within this target preset region 301, the spectral intensity value of that wavelength can be obtained. Furthermore, if the incident light beam contains multiple wavelengths, then after passing sequentially through the microlens 10, the aperture 20, and the planar transmission grating 30, it will correspondingly illuminate multiple target preset regions 301 in the detector 40. By calculating the sum of the light intensities recorded by all pixels within each target preset region 301, the spectral intensity value of the wavelength corresponding to each target preset region 301 can be obtained.

[0048] It can be seen that the above-mentioned real-time high-resolution ultrathin spectrometer is simple and fast in processing data, without the need for complex calculations such as Fourier transform, thus meeting the real-time requirements. At the same time, the spectrometer only includes a microlens 10, an aperture 20, a planar transmission grating 30 and a detector 40, using very few components and reducing the thickness of the spectrometer.

[0049] Optionally, please continue to see Figure 3 When the parallel beam is incident on the planar transmission grating 30, it is perpendicular to the extension direction of the grating groove. The plane of the planar transmission grating 30 is parallel to the plane of the detector 40. Therefore, the length of the area irradiated by the incident parallel beam on the planar transmission grating 30 (the direction perpendicular to the extension direction of the grating groove in the plane of the planar transmission grating 30) is equal to the length d0 of the preset area 301 on the plane of the detector 40 along the first direction. The aperture of the microlens 10, the aperture of the aperture 20, and the aperture of the parallel beam are all D, where D = d0 cosα, α represents the angle between the optical axis and the normal of the plane of the planar transmission grating 30, d0 represents the preset length of each preset area 301 in the first direction, and the width of each preset area 301 in the second direction is d0 cosα, where the second direction is the extension direction of the grating groove in the planar transmission grating 30.

[0050] Furthermore, since the detector 40 includes multiple pixels, each preset region 301 is essentially a pixel array. Let the size of each pixel be denoted as b. Then each preset region 301 contains... 1 pixel.

[0051] Let R represent the resolution of the planar transmission grating 30, λ represent the resolvable wavelength of the planar transmission grating 30, Δλ represent the spectral resolution of the planar transmission grating 30 at wavelength λ, m represent the diffraction order of the planar transmission grating 30, g represent the grating constant, and Q represent the number of grating grooves on the surface of the planar transmission grating 30 covered by the region illuminated by the parallel beam. Then the resolution of the planar transmission grating 30 is defined as:

[0052]

[0053] The maximum theoretical resolution of the planar transmission grating 30 can be expressed as:

[0054] R max =mQ;

[0055] The spectral resolution of the planar transmission grating 30 should meet the following requirements:

[0056]

[0057] The number of grating grooves Q covered by the parallel beam output from aperture 20 on the planar transmission grating 30 is:

[0058]

[0059] Therefore, the real-time high-resolution ultrathin spectrometer at wavelength λ i Spectral resolution Δλ at the location i It should meet the following requirements:

[0060]

[0061] The grating equation for the planar transmission grating 30 is:

[0062] mλ=g[sinα+sinβ m (λ)];

[0063] In the formula, β m (λ) represents the m-th order diffraction angle of wavelength λ. Since the spectrometer provided in this embodiment only utilizes the first-order diffraction of the planar transmission grating 30, m = 1.

[0064] according to Figure 3 Based on the geometric relationships and grating equations, the following relationship can be obtained:

[0065]

[0066] Similarly, for two adjacent wavelengths λ that can be measured by a real-time high-resolution ultrathin spectrometer... i and λ i+1 =λ i +Δλ i The following relationship can be obtained:

[0067]

[0068]

[0069] When designing a real-time high-resolution ultrathin spectrometer, the spectral range and minimum wavelength λ are important considerations. min The spectral resolution Δλ at a given location is usually given. From the above formula, we can obtain:

[0070]

[0071] In the formula, g represents the grating constant of the planar transmission grating 30, and Δλ represents the minimum wavelength λ that the spectrometer can measure. min Spectral resolution at that location.

[0072] Please continue reading Figure 3 The smallest wavelength λ that the spectrometer can measure minThe vertical distance from the lower edge of the corresponding preset area 301 to the first plane is h0. Here, the first plane is the plane where the lower edge of the intersection between the parallel beam and the planar transmission grating 30 is located. The first plane is perpendicular to the plane where the planar transmission grating 30 is located and parallel to the extension direction of the grating groove in the planar transmission grating 30.

[0073] in,

[0074]

[0075] The real-time high-resolution ultrathin spectrometer can measure the i-th wavelength λ. i Represented as:

[0076]

[0077] In the formula, g represents the grating constant, α represents the angle between the optical axis and the normal to the plane containing the planar transmission grating 30, and λ represents the angle between the optical axis and the normal to the plane containing the planar transmission grating 30. min λ represents the smallest wavelength that the spectrometer can measure. min =λ1, where λ1 represents the first wavelength that the spectrometer can measure, d0 represents the preset length of each preset region 301 in the first direction, and S0 represents the distance between the plane where the planar transmission grating 30 is located and the plane where the detector 40 is located.

[0078] The real-time high-resolution ultrathin spectrometer can measure the i-th wavelength λ. i Spectral resolution Δλ at the location i It can be given by the following formula:

[0079]

[0080] In the formula, i = 1, 2, ..., M.

[0081] The free spectral range of the planar transmission grating 30 is defined as follows:

[0082]

[0083] The planar transmission grating 30 exhibits the largest free spectral range of first-order diffraction, and the real-time high-resolution ultrathin spectrometer utilizes the first-order diffraction of the planar transmission grating 30. Therefore, the real-time high-resolution ultrathin spectrometer possesses a wide spectral range in the ultraviolet-visible band. The real-time high-resolution ultrathin spectrometer has a range from the smallest wavelength λ... min up to the maximum wavelength λ M The free spectral range of the planar transmission grating 30 used in the real-time high-resolution ultrathin spectrometer is equal to λ. min Therefore, the spectral range of a real-time high-resolution ultrathin spectrometer should meet the following requirements:

[0084] λ M <2λmin .

[0085] For example, in the ultraviolet-visible band, the spectral range of a real-time high-resolution ultrathin spectrometer can be 250nm to 450nm, 400nm to 700nm, etc.

[0086] The number of pixels in each column (along the direction perpendicular to the grating grooves) of the detector 40 that records measurement data is:

[0087]

[0088] The number of pixels in each row (along the direction parallel to the grating grooves) of the detector 40 that records measurement data is:

[0089]

[0090] The dimensions of the planar transmission grating 30 in the direction perpendicular to the grating groove should meet the following requirements:

[0091] L gy >d0;

[0092] The dimensions of the planar transmission grating 30 in the direction parallel to the grating groove should meet the following requirements:

[0093] L gx >d0 cosα.

[0094] The following simulation experiment further illustrates the real-time high-resolution ultrathin spectrometer provided by this invention.

[0095] Specifically, the relevant parameters are as follows: the spectral range is 250nm to 450nm, and the smallest measurable wavelength λ of the spectrometer. min The spectral resolution at 250 nm is Δλ = 0.9 nm; the length of the illumination area on the detector plane (along the direction perpendicular to the grating groove in the detector plane) for each wavelength that the real-time high-resolution ultrathin spectrometer can measure is d0 = 0.36 mm; the angle between the optical axis of the microlens and the normal to the grating plane is α = 36°; the aperture size of both the microlens and the aperture is d0cosα = 0.36 mm × cos36° ≈ 0.292 mm; the focal length of the microlens can be f = 10 mm; the dimension of the planar transmission grating along the direction perpendicular to the grating groove should satisfy L gy >0.36mm, the dimension along the direction parallel to the grating groove should meet L gx Since the diameter is >0.292mm, the size of the planar transmission grating can be L. gy =0.6mm and L gx=0.4mm; If a planar transmission grating with 2500 lines / mm is selected, its grating constant is g = 1000μm / 2500 = 0.4μm; the number of grating grooves covered by the parallel beam output from the aperture on the grating plane is Q = 0.36mm / 0.4μm = 900; the distance between the grating plane and the detector plane is S0 = 160mm; the smallest wavelength λ that the spectrometer can measure is... min The vertical distance from the lower edge of the corresponding preset area to the first plane is h0 = 5.96 mm.

[0096] Figure 4 This is a schematic diagram of the measurement wavelength of the real-time high-resolution ultrathin spectrometer provided in an embodiment of the present invention. (See diagram below.) Figure 4 As shown, the incident light has a spectral range of 250 nm to 450 nm, and the real-time high-resolution ultrathin spectrometer can measure wavelengths of λ. i Since i = 1, 2, ..., 267, the number of wavelengths that the real-time high-resolution ultrathin spectrometer can measure is M = 267.

[0097] Figure 5 This is a graph showing the spectral resolution of the real-time high-resolution ultrathin spectrometer provided in this embodiment of the invention as a function of wavelength. Figure 5 As shown, the real-time high-resolution ultrathin spectrometer has a spectral resolution of 0.9 nm at a wavelength of 250 nm, a spectral resolution of approximately 0.54 nm at a wavelength of 450 nm, and a spectral resolution of 0.9 nm to 0.54 nm in the wavelength range of 250 nm to 450 nm.

[0098] The detector of the real-time high-resolution ultrathin spectrometer has a pixel size of b = 0.02 mm, and the number of pixels in each column (along the direction perpendicular to the grating groove) of the data recording detector is M. y =267 × 0.36 mm / 0.02 mm = 4806, the number of pixels in each row (along the direction parallel to the grating grooves) of the detector recording data is

[0099]

[0100] Since the aperture size of both the microlens and the aperture is d0 cosα≈0.292mm, and the dimension of the planar transmission grating along the direction parallel to the grating groove is L... gx =0.4mm, the size of each row of the detector (along the direction parallel to the grating groove) is M x b = 15 × 0.02 mm = 0.3 mm, so the instrument thickness can be less than 0.5 mm. The overall size of the spectrometer (length × width × thickness) is less than 190 mm × 110 mm × 0.5 mm.

[0101] As can be seen from the simulation results above, the real-time high-resolution ultrathin spectrometer provided by the present invention can simultaneously achieve ultrathinness (instrument thickness less than 0.5 mm), real-time measurement, high spectral resolution (spectral resolution of 0.9 nm to 0.54 nm in the wavelength range of 250 nm to 450 nm) and wide wavelength range (250 nm to 450 nm). Moreover, the spectrometer has a very simple structure and requires very few components.

[0102] As can be seen from the above embodiments, the beneficial effects of the present invention are as follows:

[0103] This invention provides a real-time high-resolution ultrathin spectrometer, comprising: a microlens, an aperture, a planar transmission grating, and a detector. The microlens and aperture collimate the incident light beam into a parallel beam. The planar transmission grating performs first-order diffraction on the parallel beam, and the resulting first-order diffracted beam illuminates at least one target preset region. Since the detector comprises multiple preset regions of the same size arranged sequentially along a first direction and not overlapping, and these preset regions correspond to different wavelengths that the spectrometer can measure, the spectral intensity value of each target preset region at its corresponding wavelength is obtained by calculating the sum of the light intensities recorded by all pixels within each target preset region. Therefore, the data processing of the above spectrometer does not require complex calculations such as Fourier transforms to reconstruct the spectrum; the data processing is simple and fast, meeting the real-time requirements.

[0104] Furthermore, the aforementioned spectrometer consists of only a microlens, an aperture, a planar transmission grating, and a detector. It has a simple structure and requires few components. The aperture size of the microlens and aperture, the size of the planar transmission grating along the direction parallel to the grating groove, and the size of the detector along the direction parallel to the grating groove can all be less than 0.5 mm, ensuring that the real-time high-resolution ultrathin spectrometer provided by this invention is ultrathin (instrument thickness less than 0.5 mm).

[0105] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0106] The use of terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples" indicates that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0107] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. A real-time high-resolution ultrathin spectrometer, characterized in that, It consists of a microlens, an aperture, a planar transmission grating, and a detector; The microlens shares an optical axis with the aperture and is used to receive the incident light beam and transmit it to the aperture; the optical axis is perpendicular to the extension direction of the grating groove in the planar transmission grating; The aperture stop is used to limit the output beam of the microlens, allowing only a portion of the output beam with the optical axis of the microlens as the central axis and an aperture size equal to the light-transmitting aperture size of the microlens to pass through, forming a parallel beam centered on the optical axis of the microlens; the light-transmitting aperture size of the microlens, the light-transmitting aperture size of the aperture stop, and the aperture size of the parallel beam are all... ; The plane of the planar transmission grating is parallel to the plane of the detector. The planar transmission grating is used to diffract the parallel beam to form a first-order diffracted beam. The detector includes multiple preset regions of the same size arranged sequentially along a first direction and not overlapping each other. The multiple preset regions correspond to different wavelengths that the spectrometer can measure. The detector is used to receive the first-order diffraction beam and determine at least one target preset region illuminated by the first-order diffraction beam. By calculating the sum of the light intensities recorded by all pixels in each target preset region, the spectral intensity value of the wavelength corresponding to each target preset region is obtained. The first direction is perpendicular to the extension direction of the grating groove in the planar transmission grating. in, ,in, This represents the angle between the optical axis and the normal to the plane containing the planar transmission grating. This represents the preset length of each of the preset regions in the first direction; The width of each of the preset regions in the second direction is The second direction is the extension direction of the grating groove in the planar transmission grating; Arranged from bottom to top in the first direction Each of the preset regions corresponds to a region that the spectrometer can measure. wavelength ,in, Gradually increase; The aperture size of the microlens, the aperture size of the aperture stop, the size of the planar transmission grating along the direction parallel to the grating groove, and the size of the detector along the direction parallel to the grating groove are all less than 0.5 mm.

2. The real-time high-resolution ultrathin spectrometer according to claim 1, characterized in that, The spectrometer is capable of measuring the first wavelength for: ； In the formula, Represents the grating constant. This represents the angle between the optical axis and the normal to the plane containing the planar transmission grating. This indicates the smallest wavelength that the spectrometer can measure. , This indicates the first wavelength that the spectrometer can measure. This represents the preset length of each of the preset regions in the first direction. This indicates the distance between the plane containing the planar transmission grating and the plane containing the detector.

3. The real-time high-resolution ultrathin spectrometer according to claim 2, characterized in that, In the formula, This represents the grating constant of the planar transmission grating. This indicates the smallest wavelength that the spectrometer can measure. Spectral resolution at that location.

4. The real-time high-resolution ultrathin spectrometer according to claim 3, characterized in that, The smallest wavelength that the spectrometer can measure The vertical distance from the lower edge of the corresponding preset area to the first plane is The first plane is the plane at the lower edge of the intersection of the parallel beam and the planar transmission grating. The first plane is perpendicular to the plane of the planar transmission grating and parallel to the extension direction of the grating groove in the planar transmission grating. in, 5. The real-time high-resolution ultrathin spectrometer according to claim 4, characterized in that, The spectrometer is capable of measuring the first wavelength The spectral resolution at that location is: 。

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