Inductor component

Abstract

Provided is an inductor component capable of improving inductance acquisition efficiency. The inductor component includes: a green body including a first main surface and a second main surface facing each other; a coil which is provided on the body and is wound in a spiral shape along an axis; and a first external electrode and a second external electrode provided on the body and electrically connected to the coil, the coil having an axis arranged parallel to the first main surface, the coil including: a plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis; and a plurality of second through wirings extending from the first coil wiring toward the second coil wiring, provided on the opposite side to the first through wiring with respect to the axis, arranged along the axis, and constituting at least a portion of a spiral shape by sequentially connecting the first coil wiring, the first through wiring, the second coil wiring, and the second through wiring. At least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a first portion and a second portion, the angles of which with respect to the axis being different from each other, when viewed from a direction orthogonal to the first main surface.

Description

Technical Field

[0001] The present disclosure relates to an inductor component. Background Art

[0002] Conventionally, as an inductor component, there is a component described in Japanese Patent No. 6652280 (Patent Document 1). The inductor component has a green body, a coil wound along an axial direction within the green body, and a first external electrode and a second external electrode provided on the green body and electrically connected to the coil.

[0003] The coil has a plurality of coil patterns laminated along the axis. The coil patterns adjacent to each other in the axial direction are connected via conductive vias. The coil pattern has a wiring portion extending in a direction orthogonal to the axis, and a pad portion provided at an end of the wiring portion and connected to the conductive via. In order to improve the connectivity between the pad portion and the conductive via, the width of the pad portion is wider than the width of the wiring portion.

[0004] Patent Document 1: Japanese Patent No. 6652280

[0005] However, in the inductor component as described above, since the width of the pad portion is wider than the width of the wiring portion, a part of the pad portion is located on the inner side in the radial direction of the coil compared with the wiring portion. Therefore, the inner diameter of the coil becomes smaller, and the acquisition efficiency of the inductance is not necessarily high. Summary of the Invention

[0006] Accordingly, an object of the present disclosure is to provide an inductor component capable of improving the acquisition efficiency of inductance.

[0007] To solve the above problems, an inductor component according to one aspect of the present disclosure includes:

[0008] A green body including a first main surface and a second main surface opposed to each other;

[0009] A coil provided on the green body and wound in a spiral shape along an axis; and

[0010] A first external electrode and a second external electrode provided on the green body and electrically connected to the coil,

[0011] The axis of the coil is arranged parallel to the first main surface,

[0012] The coil includes:

[0013] A plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis in a plane parallel to the first main surface;

[0014] A plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis in a plane parallel to the second main surface;

[0015] A plurality of first through wirings extending from the above-mentioned first coil wiring toward the above-mentioned second coil wiring and arranged along the above-mentioned axis; and

[0016] A plurality of second through wirings extending from the above-mentioned first coil wiring toward the above-mentioned second coil wiring, provided on the side opposite to the above-mentioned first through wiring with respect to the above-mentioned axis, and arranged along the above-mentioned axis,

[0017] By sequentially connecting the above-mentioned first coil wiring, the above-mentioned first through wiring, the above-mentioned second coil wiring, and the above-mentioned second through wiring, at least a part of the above-mentioned spiral shape is formed,

[0018] When viewed from a direction orthogonal to the above-mentioned first main surface, at least one of the above-mentioned plurality of first coil wirings and the above-mentioned plurality of second coil wirings is a bent wiring having a first part and a second part with mutually different angles with respect to the above-mentioned axis.

[0019] Here, the angle of the first part with respect to the axis means the angle formed by the center line (or the extension line of the center line) of the first part and the axis. For example, when the center line intersects the axis, the angle formed by the center line and the axis means the smaller one of the intersection angles between the center line and the axis. When the center line is parallel to the axis, the angle formed by the center line and the axis is 0°. The same applies to the second part.

[0020] "The external electrode is provided on the green body" specifically means that the external electrode is provided on the outer surface side of the green body. For example, it includes the case where the external electrode is provided directly above the outer surface of the green body, the case where the external electrode is provided outside the green body via other components on the green body, and the case where the external electrode is provided on the outer surface with a part of the external electrode buried in the green body.

[0021] According to the above method, the coil includes a first coil wiring, a first through wiring, a second coil wiring, and a second through wiring. By sequentially connecting the first coil wiring, the first through wiring, the second coil wiring, and the second through wiring, at least a part of the spiral shape is formed. Therefore, the inner diameter of the coil can be increased, and the acquisition efficiency of the inductance can be improved. In addition, by improving the inductance acquisition efficiency, the Q value can be increased.

[0022] Moreover, since at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a first part and a second part with mutually different angles with respect to the axis, the length of the coil wiring can be changed without changing the size of the inductor component, and the inductance can be easily adjusted.

[0023] Preferably, in one embodiment of the inductor component, when viewed from a direction orthogonal to the first main surface, the first portion is a portion orthogonal to the axis or a portion parallel to the axis, and the second portion is a portion that intersects the axis at an acute angle.

[0024] According to the above embodiment, it is possible to easily extend the length of the bent wiring.

[0025] Preferably, in one embodiment of the inductor component, the green body contains SiO 2 .

[0026] According to the above embodiment, it is possible to impart insulation and rigidity to the green body.

[0027] Preferably, in one embodiment of the inductor component, in two adjacent bent wirings in the axial direction, when viewed from a direction orthogonal to the first main surface, the distance between the second portions of one bent wiring and the distance between the first portions of the other bent wiring are smaller than the distance between the first portions of one bent wiring and the other bent wiring.

[0028] Here, the distance between the two second portions refers to the shortest distance between the two second portions when viewed from a direction orthogonal to the first main surface. The same applies to the first portion.

[0029] According to the above embodiment, since the distance between two adjacent second portions in the axial direction is short, leakage magnetic flux can be suppressed.

[0030] Preferably, in one embodiment of the inductor component,

[0031] The bent wiring is provided at least on the first coil wiring,

[0032] When viewed from a direction orthogonal to the first main surface, at least one of the plurality of second coil wirings extends in a direction connecting the centers of the first through-wiring and the second through-wiring connected to the same second coil wiring.

[0033] According to the above embodiment, it is possible to easily shorten the length of the second coil wiring.

[0034] Preferably, in one embodiment of the inductor component,

[0035] The bent wiring is provided at least on the first coil wiring,

[0036] One of the plurality of first coil wirings has a first end connected to the first external electrode and a second end connected to the first through-wiring.

[0037] When viewed from a direction orthogonal to the first major surface, the one first coil wiring extends in a direction connecting the first end portion and the second end portion linearly.

[0038] According to the above-described embodiment, it is possible to shorten the length of the first coil wiring forming the outermost turn in the axial direction, reduce the DC resistance of the coil, and achieve miniaturization of the coil.

[0039] Preferably, in an embodiment of the inductor component,

[0040] When viewed from a direction orthogonal to the first major surface, the first portion is a portion orthogonal to the axis.

[0041] When viewed from a direction orthogonal to the first major surface, the length of the first portion is smaller than half of the width of the green body in the direction orthogonal to the axis.

[0042] According to the above-described embodiment, it is possible to reduce the possibility of contact between two bent wirings adjacent in the axial direction.

[0043] Preferably, in an embodiment of the inductor component,

[0044] When viewed from a direction orthogonal to the first major surface, the first portion is a portion orthogonal to the axis, and the second portion is a portion intersecting the axis at an acute angle.

[0045] When viewed from a direction orthogonal to the first major surface, the width of the second portion is 0.5 times or more and 0.95 times or less the width of the first portion.

[0046] According to the above-described embodiment, since the width of the second portion is 0.95 times or less the width of the first portion, it is possible to narrow the width of the second portion. Thus, it is possible to increase the length of the second portion and improve the inductance. In addition, since the width of the second portion is 0.5 times or more the width of the first portion, it is possible to prevent the second portion from being cut off.

[0047] Preferably, in an embodiment of the inductor component, when viewed from a direction orthogonal to the first major surface, the shape of the coil is rotationally symmetric by 180° about the midpoint of the axial direction of the coil.

[0048] According to the above-described embodiment, it is possible to eliminate the directivity of the inductor component.

[0049] Preferably, in one embodiment of the inductor component, when viewed from a direction orthogonal to the first main surface, the length of the bent wiring between the centers of the first through-wiring and the second through-wiring connected to the bent wiring is more than 4% greater than the length of a straight line connecting the centers of the first through-wiring and the second through-wiring connected to the same bent wiring.

[0050] According to the above embodiment, the length of the bent wiring can be increased, so the inductance can be increased.

[0051] Preferably, in one embodiment of the inductor component,

[0052] When viewed from a direction orthogonal to the first main surface, the first portion is a portion orthogonal to the axis, and the second portion is a portion that intersects the axis at an acute angle.

[0053] When viewed from a direction orthogonal to the first main surface, when the angle of the second portion with respect to the axis is set as the first angle θ1 and the angle of the straight line connecting the centers of the first through-wiring and the second through-wiring with respect to the axis is set as the second angle θ2, the second angle θ2 is greater than the first angle θ1, the first angle θ1 is greater than 45° and less than 80°, the difference between the second angle θ2 and the first angle θ1 is greater than 1° and less than 45°, and the first through-wiring and the second through-wiring are through-wirings connected to the bent wiring having the same second portion.

[0054] According to the above embodiment, since the first angle θ1 is greater than 45°, the width of the second portion can be ensured, and the acquisition efficiency of the inductance can be ensured. Since the first angle θ1 is less than 80°, the length of the second portion can be extended, and the inductance can be increased.

[0055] Since the difference between the second angle θ2 and the first angle θ1 is greater than 1°, the length of the second portion can be extended, and the inductance can be increased. Since the difference between the second angle θ2 and the first angle θ1 is less than 45°, the width of the second portion can be ensured.

[0056] Preferably, in one embodiment of the inductor component,

[0057] The bent wiring is provided at least on the first coil wiring.

[0058] The outermost first coil wiring among the plurality of first coil wirings located at the outermost side in the axial direction is not the bent wiring.

[0059] When viewed from a direction orthogonal to the first major surface, the maximum axial length of the outermost first coil wiring is greater than the maximum axial length of the first coil wiring adjacent to the outermost first coil wiring in the axial direction.

[0060] According to the above-described embodiment, by increasing the width of the outermost first coil wiring, the DC resistance of the coil can be reduced. In addition, the dead zone in the outermost region in the axial direction of the coil in the green body can be effectively utilized, and the width of the outermost first coil wiring can be increased.

[0061] Preferably, in one embodiment of the inductor component, it includes:

[0062] A green body including a first major surface and a second major surface facing each other;

[0063] A coil disposed in the green body and wound in a spiral shape along an axis; and

[0064] A first external electrode and a second external electrode disposed in the green body and electrically connected to the coil,

[0065] The axis of the coil is arranged parallel to the first major surface,

[0066] The coil includes:

[0067] A plurality of first coil wirings disposed on the first major surface side with respect to the axis and arranged along the axis in a plane parallel to the first major surface;

[0068] A plurality of second coil wirings disposed on the second major surface side with respect to the axis and arranged along the axis in a plane parallel to the second major surface;

[0069] A plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis; and

[0070] A plurality of second through wirings extending from the first coil wiring toward the second coil wiring, disposed on the side opposite to the first through wiring with respect to the axis, and arranged along the axis,

[0071] By sequentially connecting the first coil wiring, the first through wiring, the second coil wiring, and the second through wiring, at least a part of the spiral shape is formed.

[0072] When viewed from a direction orthogonal to the first major surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a curved portion.

[0073] According to the above-described embodiment, the coil includes a first coil wiring, a first through wiring, a second coil wiring, and a second through wiring. By sequentially connecting the first coil wiring, the first through wiring, the second coil wiring, and the second through wiring, at least a part of a spiral shape is formed, so that the inner diameter of the coil can be increased, and the acquisition efficiency of the inductance can be improved. In addition, by improving the inductance acquisition efficiency, the Q value can be increased.

[0074] Moreover, since at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a curved portion, the length of the coil wiring can be changed without changing the size of the inductor component, and the inductance can be easily adjusted.

[0075] Preferably, in one embodiment of the inductor component,

[0076] there are a plurality of the above-described bent wirings,

[0077] When viewed from a direction orthogonal to the above-described first main surface, all of the above-described curved portions are bent so as to protrude toward one side in the above-described axial direction.

[0078] According to the above-described embodiment, since all of the curved portions are bent so as to protrude toward one side in the axial direction, a magnetic field in the reverse direction is not generated in all of the curved portions, and the acquisition efficiency of the inductor can be improved.

[0079] Preferably, in one embodiment of the inductor component, when viewed from a direction orthogonal to the above-described first main surface, the side surface of the above-described curved portion has a concave portion.

[0080] According to the above-described embodiment, since the side surface of the curved portion has a concave portion, the width of the curved portion can be made narrower, and the possibility of contact between two adjacent bent wirings in the axial direction can be reduced.

[0081] Preferably, in one embodiment of the inductor component, the above-described bent wiring is composed only of the above-described curved portion.

[0082] According to the above-described embodiment, since the bent wiring does not include a straight portion, the length of the coil can be further increased.

[0083] According to the inductor component as one aspect of the present disclosure, the acquisition efficiency of the inductance can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0084] Figure 1 is a schematic bottom view of the inductor component according to the first embodiment as viewed from the bottom side.

[0085] Figure 2 is Figure 1 a cross-sectional view taken along line II-II.

[0086] Figure 3Yes Figure 1 is a sectional view taken along line III-III.

[0087] Figure 4A is a schematic bottom view showing the bottom wiring as viewed from the bottom side.

[0088] Figure 4B is a schematic bottom view showing the top wiring as viewed from the bottom side.

[0089] Figure 5A is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0090] Figure 5B is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0091] Figure 5C is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0092] Figure 5D is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0093] Figure 5E is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0094] Figure 5F is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0095] Figure 5G is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0096] Figure 5H is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0097] Figure 5I is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0098] Figure 5J is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0099] Figure 5K is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0100] Figure 5L is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0101] Figure 5M is a schematic sectional view illustrating a method of manufacturing an inductor component.

[0102] Figure 6A is a sectional view showing a first modified example of an inductor component.

[0103] Figure 6B It is a cross-sectional view showing a second modified example of an inductor component.

[0104] Figure 6C It is a cross-sectional view showing a third modified example of an inductor component.

[0105] Figure 6D It is a cross-sectional view showing a fourth modified example of an inductor component.

[0106] Figure 7A It is a schematic bottom view showing the bottom surface wiring of a fifth modified example of an inductor component as viewed from the bottom surface side.

[0107] Figure 7B It is a schematic bottom view showing the top surface wiring of a fifth modified example of an inductor component as viewed from the bottom surface side.

[0108] Figure 8 It is a schematic bottom view showing the inductor component of the second embodiment as viewed from the bottom surface side.

[0109] Figure 9 It is Figure 8 the IX - IX cross-sectional view.

[0110] Figure 10 It is a schematic bottom view showing the top surface wiring as viewed from the bottom surface side.

[0111] Figure 11A It is a schematic cross-sectional view illustrating a manufacturing method of an inductor component.

[0112] Figure 11B It is a schematic cross-sectional view illustrating a manufacturing method of an inductor component.

[0113] Figure 11C It is a schematic cross-sectional view illustrating a manufacturing method of an inductor component.

[0114] Figure 11D It is a schematic cross-sectional view illustrating a manufacturing method of an inductor component.

[0115] Figure 11E It is a schematic cross-sectional view illustrating a manufacturing method of an inductor component.

[0116] Figure 11F It is a schematic cross-sectional view illustrating a manufacturing method of an inductor component.

[0117] Figure 11G It is a schematic cross-sectional view illustrating a manufacturing method of an inductor component.

[0118] Figure 11H It is a schematic cross-sectional view illustrating a manufacturing method of an inductor component.

[0119] Figure 12AThis is a cross-sectional view showing a first modified example of an inductor component.

[0120] Figure 12B This is a cross-sectional view showing a second modified example of an inductor component.

[0121] Figure 12C This is a cross-sectional view showing a third modified example of an inductor component.

[0122] Figure 13 This is a schematic bottom view of the inductor component as viewed from the bottom side, showing a third embodiment.

[0123] Figure 14 This is a schematic bottom view of the top surface wiring of the inductor component as viewed from the bottom side, showing a fourth embodiment. Detailed Embodiments

[0124] Hereinafter, the inductor component as one aspect of the present disclosure will be described in detail with reference to the illustrated embodiments. It should be noted that the drawings include some schematic drawings, and there are cases where the actual dimensions and ratios are not reflected.

[0125] <First Embodiment>

[0126] Hereinafter, the inductor component 1 of the first embodiment will be described. Figure 1 This is a schematic bottom view of the inductor component 1 as viewed from the bottom side. Figure 2 This is Figure 1 a cross-sectional view taken along line II-II. Figure 3 This is Figure 1 a cross-sectional view taken along line III-III. In addition, in Figure 1 , for convenience, the external electrodes are depicted by a double-dashed line. Also, in Figure 1 , the green body 10 is depicted transparently in order to easily understand the structure, but it may also be semi-transparent or opaque.

[0127] 1. General Structure

[0128] The general structure of the inductor component 1 will be described. The inductor component 1 is, for example, a surface-mounted inductor component for a high-frequency signal transmission circuit. As shown in Figure 1 , Figure 2 and Figure 3 , the inductor component 1 includes a green body 10, a coil 110 wound in a spiral shape along the axis AX and provided on the green body 10, and a first external electrode 121 and a second external electrode 122 provided on the green body 10 and electrically connected to the coil 110.

[0129] The green body 10 has a length, a width, and a height. The green body 10 has a first end face 100e1 and a second end face 100e2 on both end sides in the length direction, a first side face 100s1 and a second side face 100s2 on both end sides in the width direction, and a bottom face 100b and a top face 100t on both end sides in the height direction. In other words, the outer surface 100 of the green body 10 includes the first end face 100e1 and the second end face 100e2, the first side face 100s1 and the second side face 100s2, the bottom face 100b and the top face 100t. The bottom face 100b is an example of the "first main face" described in the claims, and the top face 100t is an example of the "second main face" described in the claims.

[0130] In addition, as shown in the drawings, hereinafter, for convenience of explanation, the length direction (long side direction) of the green body 10, which is the direction from the first end face 100e1 toward the second end face 100e2, is defined as the X direction. Further, the width direction of the green body 10, which is the direction from the first side face 100s1 toward the second side face 100s2, is defined as the Y direction. Further, the height direction of the green body 10, which is the direction from the bottom face 100b toward the top face 100t, is defined as the Z direction. The X direction, the Y direction, and the Z direction are mutually orthogonal directions, and when arranged in the order of X, Y, and Z, they form a right-handed system.

[0131] In this specification, the "outer surface 100 of the green body" including the first end face 100e1, the second end face 100e2, the first side face 100s1, the second side face 100s2, the bottom face 100b, and the top face 100t of the green body 10 does not merely mean the face facing the outer peripheral side of the green body 10, but is the face that forms the boundary between the outside and the inside of the green body 10. Further, the "above the outer surface 100 of the green body 10" does not mean an absolute direction such as vertically above defined in the gravitational direction, but means the direction toward the outside between the outside and the inside with the outer surface 100 as the reference. Therefore, the "above the outer surface 100" is a relative direction determined according to the orientation of the outer surface 100. Further, for a certain element, "above" includes not only the above separated from the element, that is, the upper position of another object on the element, the upper position separated by a distance, but also the directly above position (on) in contact with the element.

[0132] The axis AX of the coil 110 is arranged to be parallel to the bottom surface 100b. The coil 110 includes a plurality of bottom wirings 11b disposed on the bottom surface 100b side with respect to the axis AX and arranged along the axis AX in a plane parallel to the bottom surface 100b, a plurality of top wirings 11t disposed on the top surface 100t side with respect to the axis AX and arranged along the axis AX in a plane parallel to the top surface 100t, a plurality of first through wirings 13 extending from the bottom wirings 11b toward the top wirings 11t and arranged along the axis AX, and a plurality of second through wirings 14 extending from the bottom wirings 11b toward the top wirings 11t, disposed on the side opposite to the first through wirings 13 with respect to the axis AX, and arranged along the axis AX. By sequentially connecting the bottom wirings 11b, the first through wirings 13, the top wirings 11t, and the second through wirings 14, at least a part of a spiral shape is formed.

[0133] The bottom wiring 11b is an example of the "first coil wiring" described in the claims, and the top wiring 11t is an example of the "second coil wiring" described in the claims. The axis AX refers to the intersection line of a first plane passing through the center between the bottom wiring 11b and the top wiring 11t and a second plane passing through the center between the first through wiring 13 and the second through wiring 14. In other words, the axis AX is a straight line passing through the center of the inner diameter portion of the coil 110. The axis AX of the coil 110 does not have a dimension in a direction orthogonal to the axis AX.

[0134] According to the above structure, the coil 110 includes the bottom wiring 11b, the first through wiring 13, the top wiring 11t, and the second through wiring 14. By sequentially connecting the bottom wiring 11b, the first through wiring 13, the top wiring 11t, and the second through wiring 14, at least a part of a spiral shape is formed. Therefore, the inner diameter of the coil 110 can be increased, and the acquisition efficiency of inductance can be improved. In addition, by improving the inductance acquisition efficiency, the Q value can be increased.

[0135] Specifically, the pad portion of the conventional inductor component, the bottom wiring 11b and the top wiring 11t of the present embodiment are the "bearing portions" of the wirings (the conductive through holes of the conventional inductor component or the first through wiring 13 and the second through wiring 14 of the present embodiment) penetrating the green body, so they have a shape that expands perpendicular to the direction of the green body. Here, in the structure of the conventional inductor component, since the conductive through holes extend in a direction parallel to the axis of the coil, the pad portion expands in a direction perpendicular to the axis of the coil, and it is likely to form a structure that blocks the magnetic flux generated in the axial direction of the coil.

[0136] In contrast, in the present embodiment, since the first through-wiring 13 and the second through-wiring 14 extend in a direction perpendicular to the axis AX of the coil 110, the bottom surface wiring 11b and the top surface wiring 11t extend in a direction parallel to the axis AX of the coil 110. As a result, the bottom surface wiring 11b and the top surface wiring 11t are not easily configured to block the magnetic flux generated in the direction of the axis AX. That is, in the present embodiment, a configuration that does not easily block the magnetic flux can be achieved, and the inductance acquisition efficiency and Q value can be improved.

[0137] Figure 4A FIG. 4 is a schematic bottom view of the bottom surface wiring 11b viewed from the bottom surface side. In Figure 4A FIG. 4, for convenience, the first through-wiring 13 and the second through-wiring 14 are depicted by a two-dot chain line, and in addition, the conduction part 121v of the first external electrode 121 connected to the bottom surface wiring 11b and the conduction part 122v of the second external electrode 122 connected to the bottom surface wiring 11b are depicted by a two-dot chain line. In addition, the green body 10 is depicted transparently.

[0138] As Figure 4A shown, when viewed from a direction (Z direction) orthogonal to the bottom surface 100b, at least one of the plurality of bottom surface wirings 11b is a bent wiring 11b1 having a first part 111 and a second part 112 with mutually different angles with respect to the axis AX. The angle of the first part 111 with respect to the axis AX means the angle α formed by the extension line of the first center line C1 in the width direction of the first part 111 and the axis AX when viewed from a direction orthogonal to the bottom surface 100b. The angle of the second part 112 with respect to the axis AX means the angle β formed by the second center line C2 in the width direction of the second part 112 and the axis AX when viewed from a direction orthogonal to the bottom surface 100b. The first center line C1 coincides with the extending direction of the first part 111, and the second center line C2 coincides with the extending direction of the second part 112. The first center line C1 and the second center line C2 are shown by a thick dotted line.

[0139] According to the above structure, since at least one of the plurality of bottom surface wirings 11b is a bent wiring 11b1 having a first part 111 and a second part 112 with mutually different angles with respect to the axis AX, the length of the wiring of the coil 110 can be changed without changing the size of the inductor component 1, and the inductance can be easily adjusted.

[0140] Specifically, the length of the bent wiring 11b1 can be made longer than the straight wiring that connects the first through-wiring 13 and the second through-wiring 14 at the shortest distance. In this way, by adjusting the length of the wiring of the coil 110 without changing the size of the inductor component 1, the inductance can be adjusted without changing the number of turns and the pitch of the through-wirings. For example, an inductor required for impedance matching can be easily obtained. The length of the bottom surface wiring 11b (including the bent wiring 11b1) is the dimension in the extending direction of the bottom surface wiring 11b when observed from a direction orthogonal to the bottom surface 100b, and refers to the length of the center line of the bottom surface wiring 11b.

[0141] In addition, at least one of the plurality of top surface wirings 11t may be a bent wiring having a first portion and a second portion with different angles with respect to the axis AX, so that the length of the wiring of the coil 110 can be changed without changing the size of the inductor component 1, and the inductance can be easily adjusted. In short, it is sufficient that at least one of the plurality of bottom surface wirings 11b and the plurality of top surface wirings 11t is a bent wiring.

[0142] 2. Structure of each part

[0143] (Inductor component 1)

[0144] The volume of the inductor component 1 is 0.08 mm 3 or less, and the size of the long side of the inductor component 1 is 0.65 mm or less. The size of the long side of the inductor component 1 refers to the maximum value among the length, width, and height of the inductor component 1, and in this embodiment, it refers to the length in the X direction. According to the above structure, since the volume of the inductor component 1 is small and the long side of the inductor component 1 is also short, the weight of the inductor component 1 is light. Therefore, even if the external electrodes 121 and 122 are small, the required mounting strength can be obtained. In addition, it is preferable that the thickness of the inductor component 1 is 200 μm or less. Accordingly, the inductor component 1 can be made thin.

[0145] Specifically, the dimensions (length (X direction) × width (Y direction) × height (Z direction)) of the inductor component 1 are 0.6 mm × 0.3 mm × 0.3 mm, 0.4 mm × 0.2 mm × 0.2 mm, 0.25 mm × 0.125 mm × 0.120 mm, etc. In addition, the width and height may not be equal, and for example, it may also be 0.4 mm × 0.2 mm × 0.3 mm, etc.

[0146] (Green body 10)

[0147] The green body 10 contains SiO 2 . Accordingly, insulation and rigidity can be imparted to the green body 10. The green body 10 is formed of, for example, a glass sintered body. The glass sintered body may also contain alumina, which can further improve the strength of the green body.

[0148] For example, an insulating layer including a plurality of glasses is stacked to form a glass sintered body. The stacking direction of the plurality of insulating layers is the Z direction. That is, the insulating layer is a layered body having a main surface extending in the XY plane. In addition, in the green body 10, due to firing or the like, the interfaces between the plurality of insulating layers may become unclear.

[0149] In addition, for example, the green body 10 may be composed of a glass substrate. The glass substrate may be a single-layer glass substrate. Since most of the green body is glass, losses such as eddy current loss at high frequencies can be suppressed.

[0150] (Coil 110)

[0151] The coil 110 includes a plurality of bottom surface wirings 11b, a plurality of top surface wirings 11t, a plurality of first through wirings 13, and a plurality of second through wirings 14. The bottom surface wiring 11b, the first through wiring 13, the top surface wiring 11t, and the second through wiring 14 are connected in sequence to form at least a part of the coil 110 wound in the axial direction of the axis AX.

[0152] According to the above structure, since the coil 110 is a so-called spiral-shaped coil 110, in a cross-section orthogonal to the axis AX, the regions where the bottom surface wiring 11b, the top surface wiring 11t, the first through wiring 13, and the second through wiring 14 are parallel along the winding direction of the coil 110 can be reduced, and the stray capacitance in the coil 110 can be reduced.

[0153] Here, the spiral shape means that the number of turns of the entire coil is greater than one turn, and the number of turns of the coil in a cross-section orthogonal to the axis is less than one turn. More than one turn means that in a cross-section orthogonal to the axis, the wiring of the coil has a state where the parts are adjacent in the radial direction and parallel in the winding direction when viewed from the axial direction, and less than one turn means that in a cross-section orthogonal to the axis, the wiring of the coil does not have a state where the parts are adjacent in the radial direction and parallel in the winding direction when viewed from the axial direction.

[0154] As Figure 4A shown, a plurality of bottom surface wirings 11b are arranged along the X direction. The plurality of bottom surface wirings 11b include bent wirings 11b1 and straight wirings 11b2. The straight wirings 11b2 are respectively arranged at both ends in the axial direction of the axis AX. The bent wirings 11b1 are arranged between the straight wirings 11b2 at both ends.

[0155] One of the linear wirings 11b2 at both ends has a first end connected to the conduction part 121v of the first external electrode 121 and a second end connected to the first through-wiring 13. When viewed from the direction orthogonal to the bottom surface 100b, one of the linear wirings 11b2 extends in the direction connecting the first end and the second end in a straight line. Accordingly, the length of the bottom surface wiring 11b (linear wiring 11b2) that forms the outermost turn in the axial direction can be shortened, the DC resistance of the coil 110 can be reduced, and miniaturization of the coil 110 can be achieved.

[0156] Similarly, the other linear wiring 11b2 at both ends has a first end connected to the conduction part 122v of the second external electrode 122 and a second end connected to the second through-wiring 14. When viewed from the direction orthogonal to the bottom surface 100b, the other linear wiring 11b2 extends in the direction connecting the first end and the second end in a straight line.

[0157] The bent wiring 11b1 has a first part 111, a second part 112, and a third part 113. The first part 111, the second part 112, and the third part 113 are connected in series in sequence. In Figure 4A For convenience, in one bent wiring 11b1, the boundary line between the first part 111 and the second part 112 and the boundary line between the second part 112 and the third part 113 are shown by dotted lines.

[0158] When viewed from the direction orthogonal to the bottom surface 100b, as described above, the angle α of the first part 111 with respect to the axis AX is different from the angle β of the second part 112 with respect to the axis AX. When viewed from the direction orthogonal to the bottom surface 100b, the angle γ of the third part 113 with respect to the axis AX is different from the angle β of the second part 112 with respect to the axis AX. The angle γ of the third part 113 with respect to the axis AX refers to the angle formed by the extension line of the third center line C3 in the width direction of the third part 113 and the axis AX. The third center line C3 is in the same direction as the extension direction of the third part 113. The third center line C3 is shown by a thick dotted line.

[0159] The first part 111 is the part orthogonal to the axis AX. In other words, the angle α is 90°. The second part 112 is the part that intersects the axis AX at an acute angle. In other words, the angle β is an acute angle. The third part 113 is the part orthogonal to the axis AX. In other words, the angle γ is 90°. With the above structure, the length of the bent wiring 11b1 can be easily increased. In addition, as long as the angle α is different from the angle, the first part 111 can also be the part parallel to the axis AX, or it can also be the part that intersects the axis AX at an acute angle. In addition, the third part 113 can also be the part parallel to the axis AX, or it can also be the part that intersects the axis AX at an acute angle, or it can be not provided. In addition, the bent wiring 11b1 can also have other parts in addition to the first part 111 to the third part 113.

[0160] Preferably, in two adjacent bent wirings 11b1 in the direction of the axis AX, when viewed from the direction orthogonal to the bottom surface 100b, the second distance d2 between the second parts 112 of one bent wiring 11b1 and the second parts 112 of the other bent wiring 11b1 is smaller than the first distance d1 between the first parts 111 of one bent wiring 11b1 and the first parts 111 of the other bent wiring 11b1. The second distance d2 refers to the shortest distance between the two second parts 112 when viewed from the direction orthogonal to the bottom surface 100b. The first distance d1 refers to the shortest distance between the two first parts 111 when viewed from the direction orthogonal to the bottom surface 100b. With the above structure, since the second distance d2 is short, leakage magnetic flux can be suppressed. Similarly, it is preferable that the second distance d2 is smaller than the third distance d3 between the third parts 113 of one bent wiring 11b1 and the third parts 113 of the other bent wiring 11b1.

[0161] Preferably, when viewed from the direction orthogonal to the bottom surface 100b, the length of the first part 111 is smaller than half of the width of the green body 10 in the direction (Y direction) orthogonal to the axis AX. The length of the first part 111 is the length of the first center line C1 of the first part 111. With the above structure, the possibility of contact between two adjacent bent wirings 11b1 in the direction of the axis AX can be reduced. Similarly, it is preferable that the length of the third part 113 is smaller than half of the width of the green body 10 in the direction orthogonal to the axis AX.

[0162] Preferably, when viewed from a direction orthogonal to the bottom surface 100b, the width of the second portion 112 in a direction orthogonal to the second center line C2 is not less than 0.5 times and not more than 0.95 times the width of the first portion 111 in a direction orthogonal to the first center line C1. According to the above structure, since the width of the second portion 112 is not more than 0.95 times the width of the first portion 111, the width of the second portion 112 can be reduced, and thus, the length of the second portion 112 can be increased and the inductance can be improved. In addition, since the width of the second portion 112 is not less than 0.5 times the width of the first portion 111, the second portion 112 can be prevented from being cut off. Similarly, preferably, when viewed from a direction orthogonal to the bottom surface 100b, the width of the second portion 112 in a direction orthogonal to the second center line C2 is not less than 0.5 times and not more than 0.95 times the width of the third portion 113 in a direction orthogonal to the third center line C3.

[0163] Preferably, when viewed from a direction orthogonal to the bottom surface 100b, the first length L1 is 4% or more greater than the second length L2, where the first length is the length of the bent wiring 11b1 between the centers of the first through-wiring 13 and the second through-wiring 14 that are connected to the bent wiring 11b1, and the second length is the length of the straight line connecting the centers of the first through-wiring 13 and the second through-wiring 14 that are connected to the same bent wiring 11b1. In Figure 4A FIG., the first length L1 is shown by a dotted line, and the second length L2 is shown by a chain double-dotted line. The first length L1 is the length between the centers of the first through-wiring 13 and the second through-wiring 14 among the lengths of the center lines (the first center line C1, the second center line C2, and the third center line C3) of the bent wiring 11b1. According to the above structure, the length of the bent wiring 11b1 can be increased, so the inductance can be increased.

[0164] Preferably, when viewed from a direction orthogonal to the bottom surface 100b, the angle β of the second portion 112 (the second center line C2) with respect to the axis AX is set as the first angle θ1, and the angle of the straight line N connecting the centers of the first through-wiring 13 and the second through-wiring 14 that are connected to the bent wiring 11b1 having the same second portion 112 with respect to the axis AX is set as the second angle θ2. At this time, the second angle θ2 is greater than the first angle θ1. The first angle θ1 is greater than 45° and less than 80°. The difference between the second angle θ2 and the first angle θ1, that is, the third angle θ3, is greater than 1° and less than 45°.

[0165] According to the above structure, since the first angle θ1 is greater than 45°, the width of the second portion 112 can be ensured, and in addition, the acquisition efficiency of the inductance can be ensured. On the other hand, since the first angle θ1 is less than 80°, the length of the second portion 112 can be increased and the inductance can be improved.

[0166] On the contrary, when the first angle θ1 is smaller than 45°, the areas of the first part 111 and the third part 113 in the bent wiring 11b1 increase, the width of the second part 112 connecting the first part 111 and the third part 113 becomes extremely narrow, and the risk of disconnection of the second part 112 increases. In addition, the distance between the first through wirings 13 adjacent in the axis AX direction and the distance between the second through wirings 14 adjacent in the axis AX direction become larger, the coil length becomes longer and the acquisition efficiency of inductance becomes worse. In addition, the distance between the first through wiring 13 and the second through wiring 14 becomes shorter, the coil diameter becomes smaller and the acquisition efficiency of inductance becomes worse. On the other hand, when the first angle θ1 is larger than 80°, the first through wiring 13 and the second through wiring 14 are connected at a distance close to the shortest distance, and the length of the bottom surface wiring 11b cannot be increased.

[0167] According to the above structure, since the third angle θ3 is larger than 1°, the length of the second part 112 can be increased and the inductance can be improved. On the other hand, since the third angle θ3 is smaller than 45°, the width of the second part 112 can be ensured.

[0168] On the contrary, when the third angle θ3 is 0°, that is, the first through wiring 13 and the second through wiring 14 can only be connected at the shortest distance, and it becomes a straight wiring 11b2 instead of the bent wiring 11b1, and the length of the bottom surface wiring 11b cannot be increased. On the other hand, when the third angle θ3 is larger than 45°, it means that the second part 112 is close to being parallel to the axis AX. The same as the case where the first angle θ1 is smaller than 45°, the line width of the second part 112 becomes narrow and the risk of disconnection increases.

[0169] Figure 4B It is a schematic bottom view of observing the top surface wiring 11t from the bottom surface side. In Figure 4B For convenience, the first through wiring 13 and the second through wiring 14 are depicted by double-dashed lines, and in addition, the green body 10 is depicted transparently.

[0170] As Figure 4B shown, the top surface wiring 11t extends only in one direction. Specifically, the top surface wiring 11t extends in the direction of connecting the centers of the first through wiring 13 and the second through wiring 14 connected to the same top surface wiring 11t by a straight line. In other words, the top surface wiring 11t is in a shape extending in the Y direction. No bent wiring is provided in the top surface wiring 11t. Therefore, the length of the top surface wiring 11t can be easily shortened.

[0171] All the top surface wirings 11t are arranged in parallel along the X direction. According to the above structure, since the top surface wirings 11t only extend in one direction and all the top surface wirings 11t are arranged in parallel, by using, for example, deformed illumination in the photolithography process, minute top surface wirings 11t can be formed, and the inductor component 1 can be miniaturized. In addition, at least one of all the top surface wirings 11t may be in a shape extending in the Y direction.

[0172] The bottom surface wiring 11b and the top surface wiring 11t are made of a good conductor material such as copper, silver, gold, or their alloys. The bottom surface wiring 11b and the top surface wiring 11t may be a metal film formed by electroplating, evaporation, sputtering, etc., or a metal sintered body obtained by coating a conductor paste and sintering it. In addition, the bottom surface wiring 11b and the top surface wiring 11t may also be a multilayer structure in which a plurality of metal layers are laminated. Preferably, the thickness of the bottom surface wiring 11b and the top surface wiring 11t is 5 μm or more and 50 μm or less.

[0173] As Figure 1 shown, the first through-wiring 13 is disposed on the first side surface 100s1 side with respect to the axis AX in the through-hole V of the green body 10, and the second through-wiring 14 is disposed on the second side surface 100s2 side with respect to the axis AX in the through-hole V of the green body 10. The first through-wiring 13 and the second through-wiring 14 extend in directions orthogonal to the bottom surface 100b and the top surface 100t, respectively. Accordingly, the lengths of the first through-wiring 13 and the second through-wiring 14 can be shortened, so that the DC resistance (Rdc) can be suppressed. All the first through-wirings 13 and all the second through-wirings 14 are arranged in parallel along the X direction, respectively.

[0174] Preferably, the first through-wiring 13 contains SiO 2 . Accordingly, when the green body 10 contains SiO 2 , the coefficient of linear expansion of the first through-wiring 13 can be made to coincide with the coefficient of linear expansion of the green body 10, and cracks between the first through-wiring 13 and the green body 10 can be suppressed. The first through-wiring 13 uses, for example, a conductive paste. The conductive material is Ag, Cu, etc. Preferably, the second through-wiring 14 also contains SiO 2 .

[0175] Preferably, at least one of the bottom surface wiring 11b, the top surface wiring 11t, the first through-wiring 13, and the second through-wiring 14 includes a void portion or a resin portion. Accordingly, the stress caused by the difference in the linear expansion coefficients of the wiring and the green body 10 can be absorbed by the void portion or the resin portion, and the stress can be alleviated. As a method of forming the void portion, for example, a component that burns out by sintering can be used in the material of the wiring, and the void portion can be formed by sintering the wiring. As a method of forming the resin portion, for example, the resin portion can be formed by using a conductive paste in the material of the wiring.

[0176] Preferably, at least one of the bottom surface wiring 11b and the top surface wiring 11t includes SiO 2 . Accordingly, when the green body 10 contains SiO 2 , the linear expansion coefficient of the wiring can be made to coincide with the linear expansion coefficient of the green body 10, and cracks between the wiring and the green body 10 can be suppressed.

[0177] Preferably, when viewed from a direction orthogonal to the bottom surface 100b, the shape of the coil 110 is rotationally symmetric by 180° about the midpoint in the axial direction AX of the coil 110. According to the above structure, the directivity of the inductor component 1 can be eliminated.

[0178] (The first external electrode 121 and the second external electrode 122)

[0179] As Figure 1 shown, the first external electrode 121 is connected to the first end portion of the coil 110, and the second external electrode 122 is connected to the second end portion of the coil 110. The first external electrode 121 is disposed on the side of the first end surface 100e1 with respect to the center of the green body 10 in the X direction so as to be exposed from the outer surface 100 of the green body 10. The second external electrode 122 is disposed on the side of the second end surface 100e2 with respect to the center of the green body 10 in the X direction so as to be exposed from the outer surface 100 of the green body 10.

[0180] When viewed from a direction orthogonal to the bottom surface 100b, the first external electrode 121 and the second external electrode 122 are located inside compared to the outer surface 100 of the green body 10. In other words, the first external electrode 121 and the second external electrode 122 are located inside compared to the first end surface 100e1, the second end surface 100e2, the first side surface 100s1, and the second side surface 100s2 of the green body 10.

[0181] According to the above structure, since the first external electrode 121 and the second external electrode 122 do not contact the outer surface 100 of the green body 10, when singulating each inductor component, the load applied to the first external electrode 121 and the second external electrode 122 can be reduced, and deformation and peeling of the first external electrode 121 and the second external electrode 122 can be suppressed. Therefore, even if the inductor component is miniaturized, deformation and peeling of the first external electrode 121 and the second external electrode 122 can be prevented.

[0182] In addition, the first external electrode 121 can also be continuously provided on the bottom surface 100b and the first end surface 100e1. Accordingly, since the first external electrode 121 is a so-called L-shaped electrode, when mounting the inductor component 1 on the mounting substrate, a solder leg can be formed on the first external electrode 121. Similarly, the second external electrode 122 can also be continuously provided on the bottom surface 100b and the second end surface 100e2.

[0183] The first external electrode 121 has a bottom surface portion 121b provided on the bottom surface 100b and a conduction portion 121v embedded in the bottom surface 100b. The conduction portion 121v is connected to the bottom surface portion 121b. The conduction portion 121v is connected to the end of the bottom surface wiring 11b on the side of the first end surface 100e1 in the axial direction of the axis AX.

[0184] The second external electrode 122 has a bottom surface portion 122b provided on the bottom surface 100b and a conduction portion 122v embedded in the bottom surface 100b. The conduction portion 122v is connected to the bottom surface portion 122b. The conduction portion 122v is connected to the end of the bottom surface wiring 11b on the side of the second end surface 100e2 in the axial direction of the axis AX.

[0185] As Figure 3 shown, the first external electrode 121 has a base layer 121e1 and a plating layer 121e2 covering the base layer 121e1. The base layer 121e1 contains conductive materials such as Ag and Cu, for example. The plating layer 121e2 contains conductive materials such as Ni and Sn, for example. A part of the bottom surface portion 121b and the conduction portion 121v are constituted by the base layer 121e1. Another part of the bottom surface portion 121b is constituted by the plating layer 121e2. Similarly, the second external electrode 122 has a base layer and a plating layer covering the base layer. In addition, the first external electrode 121 and the second external electrode 122 can also be constituted by a single-layer conductive material.

[0186] (Manufacturing method of the inductor component 1)

[0187] Next, Figures 5A - 5M the manufacturing method of the inductor component 1 will be described. Figures 5A - 5H 、 Figure 5K 、Figure 5L is a diagram corresponding to the II-II cross-section of Figure 1 . Figure 5I , Figure 5J , Figure 5M is a diagram corresponding to the III-III cross-section of Figure 1 .

[0188] As shown in Figure 5A , the first insulating layer 1011 is provided on the base substrate 1000 by printing. The material of the base substrate 1000 is, for example, a glass substrate, a silicon substrate, an alumina substrate, etc., and the material of the first insulating layer 1011 is, for example, a resin such as epoxy resin or polyimide, or an inorganic insulating film such as SiO or SiN.

[0189] As shown in Figure 5B , the second insulating layer 1012 is provided on the first insulating layer 1011 by printing. A groove 1012a is provided in the second insulating layer 1012. At this time, the groove 1012a is formed, for example, by a photolithography process. In addition, the groove may be formed as a printing pattern from the beginning.

[0190] As shown in Figure 5C , the top surface conductor layer 1011t is provided on the groove 1012a by printing. The material of the top surface conductor layer 1011t is, for example, Ag, Cu, Au, Al, an alloy containing at least one of these elements, solder paste, etc. At this time, for example, the top surface conductor layer 1011t is formed to remain only on the groove 1012a as a printing pattern. In addition, after printing the top surface conductor layer 1011t on the second insulating layer 1012, the top surface conductor layer 1011t may be made to remain only on the groove 1012a by a photolithography process.

[0191] As shown in Figure 5D , the third insulating layer 1013 is provided on the second insulating layer 1012 by printing. A first groove 1013a and a second groove 1013b are provided in the third insulating layer 1013. The first groove 1013a and the second groove 1013b are formed by the same method as Figure 5B .

[0192] As shown in Figure 5E , the first through-conductor layer 1131 of the first layer is provided in the first groove 1013a by printing, and the second through-conductor layer 1141 of the first layer is provided in the second groove 1013b by printing. The first through-conductor layer 1131 of the first layer and the second through-conductor layer 1141 of the first layer are formed by the same method as Figure 5C .

[0193] Repeat the above process. As shown in Figure 5FAs shown, a fourth insulating layer 1014 is provided on the third insulating layer 1013, and a first through-conductor layer 1132 of the second layer and a second through-conductor layer 1142 of the second layer are respectively provided on two grooves provided in the fourth insulating layer 1014. Further, a fifth insulating layer 1015 is provided on the fourth insulating layer 1014, and a first through-conductor layer 1133 of the third layer and a second through-conductor layer 1143 of the third layer are respectively provided on two grooves provided in the fifth insulating layer 1015.

[0194] As Figure 5G shown, a sixth insulating layer 1016 is provided on the fifth insulating layer 1015, and a bottom surface conductor layer 1011b is provided in a groove provided in the sixth insulating layer 1016. The material of the bottom surface conductor layer 1011b is the same as that of the top surface conductor layer 1011t. As Figure 5H shown, a seventh insulating layer 1017 is provided on the sixth insulating layer 1016.

[0195] As Figure 5I shown, a groove 1017a is provided in the seventh insulating layer 1017 to expose a part of the bottom surface conductor layer 1011b. As Figure 5J shown, a base conductor layer 1121e1 is provided on the seventh insulating layer 1017 and inside the groove 1017a. The material of the base conductor layer 1121e1 is, for example, a resin paste such as Ag or Cu.

[0196] As Figure 5K shown, the entire laminate is sintered in a furnace at a high temperature (e.g., 500 °C or higher). The first to seventh insulating layers 1011 - 1017 are sintered to form a green body 10, the top surface conductor layer 1011t is sintered to form a top surface wiring 11t, the bottom surface conductor layer 1011b is sintered to form a bottom surface wiring 11b, the first through-conductor layers 1131 - 1133 of the first to third layers are sintered to form a first through-wiring 13, the second through-conductor layers 1141 - 1143 of the first to third layers are sintered to form a second through-wiring 14, and the base conductor layer 1121e1 is sintered to form a base layer 121e1. Thus, the strength can be improved by sintering the insulating layer, and in addition, by sintering the conductor layer, unnecessary resin components contained in the conductor layer can be volatilized, and the conductor materials contained in the conductor layer are melted to achieve a high conductivity. The base substrate 1000 can be peeled off by causing its surface to decompose during sintering, or can be removed by mechanical methods such as grinding before and after sintering, or can be removed by chemical methods such as etching before and after sintering.

[0197] As Figure 5L shown, singulation is performed with a cutting line C. As Figure 5MAs shown, the plating layer 121e2 is formed by barrel plating to cover the base layer 121e1, and the first external electrode 121 is formed. Thus, as Figure 2 shown, the inductor component 1 is manufactured.

[0198] 3. Modified Example

[0199] (First Modified Example)

[0200] Figure 6A is a diagram corresponding to the II-II cross-section of the first modified example of the inductor component and Figure 1 shown. As Figure 6A shown, in the inductor component 1A of the first modified example, when viewed in a direction parallel to the axis AX of the coil 110, the first through-wiring 13 and the second through-wiring 14 are not parallel. Accordingly, the distance between the first through-wiring 13 and the second through-wiring 14 can be increased, the inner diameter of the coil 110 can be increased, and the Q value can be improved.

[0201] Specifically, the first through-wiring 13 and the second through-wiring 14 are bent at the center such that the interval therebetween is wider at the center in the Z direction. In other words, the first through-wiring 13 and the second through-wiring 14 each have a shape that expands more toward the outer side in the radial direction of the coil 110 at the center in the Z direction. Further, the first through-wiring 13 and the second through-wiring 14 each have a stepped shape along the Z direction. According to the above structure, when the first through-wiring 13 and the second through-wiring 14 are respectively formed by laminating a plurality of conductor layers, the first through-wiring 13 and the second through-wiring 14 can be easily formed into a stepped shape by laminating the conductor layers of each layer in a staggered manner.

[0202] (Second Modified Example)

[0203] Figure 6B is a diagram corresponding to the II-II cross-section of the second modified example of the inductor component and Figure 1 shown. As Figure 6B shown, in the inductor component 1B of the second modified example, when viewed in a direction parallel to the axis AX of the coil 110, the first through-wiring 13 and the second through-wiring 14 are not parallel. Accordingly, the distance between the first through-wiring 13 and the second through-wiring 14 can be increased, the inner diameter of the coil 110 can be increased, and the Q value can be improved.

[0204] Specifically, the first through-wiring 13 and the second through-wiring 14 are inclined such that the distance therebetween becomes wider on the side of the top surface wiring 11t in the Z direction. In other words, the first through-wiring 13 and the second through-wiring 14 each have a shape that expands more toward the outer side in the radial direction of the coil 110 as they go further in the Z direction toward the top surface wiring 11t. Thus, when viewed from the direction of the axis AX, the coil 110 has a trapezoidal shape. With the above structure, the first through-wiring 13 and the second through-wiring 14 can be formed in a straight line to shorten them, and the DC resistance of the first through-wiring 13 and the second through-wiring 14 can be reduced.

[0205] (Third Modified Example)

[0206] Figure 6C is a diagram corresponding to the II-II cross-section of the third modified example of the inductor component and Figure 1 as shown. As Figure 6C shown, in the inductor component 1C of the third modified example, compared with the inductor component 1A of the first modified example shown Figure 6A in the figure, it includes a first coil 110A and a second coil 110B.

[0207] In the first coil 110A, when viewed from a direction parallel to the axis AX, the first through-wiring 13 and the second through-wiring 14 are not parallel. Accordingly, the distance between the first through-wiring 13 and the second through-wiring 14 can be widened, the inner diameter of the coil 110A can be increased, and the Q value can be improved.

[0208] Specifically, the first through-wiring 13 has the same structure as the first through-wiring 13 of the inductor component 1A of the first modified example. On the other hand, the second through-wiring 14 has a straight shape parallel to the Z direction. In other words, the first through-wiring 13 is bent at the center such that the distance between the first through-wiring 13 and the second through-wiring 14 becomes wider at the center in the Z direction. The first through-wiring 13 has a stepped shape along the Z direction. With the above structure, when the first through-wiring 13 is formed by laminating a plurality of conductor layers, the first through-wiring 13 can be easily formed into a stepped shape by staggering the conductor layers of each layer.

[0209] In the second coil 110B, when viewed from a direction parallel to the axis AX, the first through-wiring 13 and the second through-wiring 14 are not parallel. Accordingly, the distance between the first through-wiring 13 and the second through-wiring 14 can be widened, the inner diameter of the coil 110B can be increased, and the Q value can be improved.

[0210] Specifically, the second through-wiring 14 has the same structure as the second through-wiring 14 of the inductor component 1A of the first modified example. On the other hand, the first through-wiring 13 has a linear shape parallel to the Z direction. In other words, the second through-wiring 14 is bent at the center such that the interval between the first through-wiring 13 and the second through-wiring 14 becomes wider toward the center in the Z direction. The second through-wiring 14 has a stepped shape along the Z direction. With the above structure, when forming the second through-wiring 14 by laminating a plurality of conductor layers, the second through-wiring 14 can be easily formed into a stepped shape by staggering the conductor layers of each layer during lamination.

[0211] (Fourth Modified Example)

[0212] Figure 6D is a diagram corresponding to the II-II cross-section of a fourth modified example of an inductor component Figure 1 As shown in Figure 6D In the inductor component 1D of the fourth modified example, compared with the inductor component 1B of the second modified example shown in Figure 6B it includes a first coil 110A and a second coil 110B.

[0213] In the first coil 110A, when viewed from a direction parallel to the axis AX, the first through-wiring 13 and the second through-wiring 14 are not parallel. Accordingly, the distance between the first through-wiring 13 and the second through-wiring 14 can be increased, the inner diameter of the coil 110A can be enlarged, and the Q value can be improved.

[0214] Specifically, the first through-wiring 13 has the same structure as the first through-wiring 13 of the inductor component 1B of the second modified example. On the other hand, the second through-wiring 14 has a linear shape parallel to the Z direction. In other words, the first through-wiring 13 is inclined such that the interval between the first through-wiring 13 and the second through-wiring 14 becomes wider toward the top surface wiring 11t side in the Z direction. With the above structure, the first through-wiring 13 and the second through-wiring 14 can be formed into straight lines to shorten them, and the DC resistance of the first through-wiring 13 and the second through-wiring 14 can be reduced.

[0215] In the second coil 110B, when viewed from a direction parallel to the axis AX, the first through-wiring 13 and the second through-wiring 14 are not parallel. Accordingly, the distance between the first through-wiring 13 and the second through-wiring 14 can be increased, the inner diameter of the coil 110B can be enlarged, and the Q value can be improved.

[0216] Specifically, the second through-wiring 14 has the same structure as the second through-wiring 14 of the inductor component 1B of the second modification. On the other hand, the first through-wiring 13 has a linear shape parallel to the Z direction. In other words, the second through-wiring 14 is inclined such that the interval between the first through-wiring 13 and the second through-wiring 14 becomes wider on the top surface wiring 11t side in the Z direction. According to the above structure, the first through-wiring 13 and the second through-wiring 14 can be formed in a linear shape, and the resistance of the first through-wiring 13 and the second through-wiring 14 can be reduced.

[0217] (Fifth modification)

[0218] Figure 7A FIG. is a schematic bottom view showing the bottom surface wiring 11b of the inductor component of the fifth modification as viewed from the bottom surface side. In Figure 7A FIG., for convenience, the first through-wiring 13 and the second through-wiring 14 are depicted by a two-dot chain line. In addition, the conduction portion 121v of the first external electrode 121 connected to the bottom surface wiring 11b and the conduction portion 122v of the second external electrode 122 connected to the bottom surface wiring 11b are depicted by a two-dot chain line. In addition, the green body 10 is depicted transparently.

[0219] As Figure 7A shown, in the inductor component 1E of the fifth modification, the outermost bottom surface wiring 11b located at the outermost end in the axis AX direction among the plurality of bottom surface wirings 11b is not a bent wiring but a wide-width wiring 11b3. The bottom surface wirings 11b between the wide-width wirings 11b3 at both ends are bent wirings 11b1.

[0220] When viewed from a direction orthogonal to the bottom surface 100b, the maximum length M1 in the axis AX direction of the wide-width wiring 11b3 is larger than the maximum length M2 in the axis AX direction of the bottom surface wiring 11b (bent wiring 11b1) adjacent to the wide-width wiring 11b3 in the axis AX direction.

[0221] According to the above structure, the width of the outermost bottom surface wiring 11b can be increased, and the DC resistance of the coil can be reduced. In addition, the dead zone in the outermost region in the axis AX direction of the coil in the green body can be effectively utilized, and the width of the outermost bottom surface wiring 11b can be increased.

[0222] Figure 7B FIG. is a schematic bottom view showing the top surface wiring 11t of the inductor component of the fifth modification as viewed from the bottom surface side. In Figure 7B FIG., for convenience, the first through-wiring 13 and the second through-wiring 14 are depicted by a two-dot chain line. In addition, the green body 10 is depicted transparently.

[0223] As Figure 7BAs shown, among the plurality of top surface wirings 11t, the outermost top surface wiring 11t at the outermost end in the direction of the axis AX is the wide-width wiring 11t3. The top surface wirings 11t between the wide-width wirings 11t3 at both ends are the straight wirings 11t2.

[0224] When viewed from a direction orthogonal to the bottom surface 100b, the maximum length M3 of the wide-width wiring 11t3 in the direction of the axis AX is larger than the maximum length M4 of the top surface wiring 11t (straight wiring 11t2) adjacent to the wide-width wiring 11t3 in the direction of the axis AX.

[0225] According to the above structure, it is possible to increase the width of the outermost top surface wiring 11t and reduce the DC resistance of the coil. In addition, it is possible to effectively utilize the dead zone in the outermost region of the coil in the direction of the axis AX of the green body and increase the width of the outermost top surface wiring 11t.

[0226] In addition, the bent wiring may be provided at least on the bottom surface wiring 11b, or may be provided on both the bottom surface wiring 11b and the top surface wiring 11t.

[0227] <Second Embodiment>

[0228] Figure 8 It is a schematic bottom view observed from the bottom surface side showing a second embodiment of the inductor component. Figure 9 It is Figure 8 the IX - IX cross-sectional view. In Figure 8 , for convenience, the insulating layer is omitted from the drawing, and the external electrodes are drawn by double-dot dash lines. In addition, in Figure 8 , in order to easily understand the structure, the green body 10 is drawn transparently. The second embodiment is mainly different from the first embodiment in the shape of the coil, the position of the axis of the coil, the material of the green body, and the setting of the insulating layer. The following mainly describes these different structures. Other structures are the same as those of the first embodiment, and their descriptions are omitted.

[0229] 1. Structure of Each Part

[0230] (Inductor Component 1F)

[0231] As Figure 8 shown, in the inductor component 1F, the axis AX of the coil 110 is perpendicular to the X direction. Specifically, the axis AX is parallel to the Y direction and passes through the center of the green body 10 in the X direction. Accordingly, it is possible to reduce the interference of the first external electrode 121 and the second external electrode 122 with the magnetic flux of the coil 110 and improve the acquisition efficiency of the inductance.

[0232] The length of the coil 110 in the direction of the axis AX is shorter than the inner diameter of the coil 110. The length of the coil 110 in the direction of the axis AX is also referred to as the coil length. Accordingly, the coil is short and the inner diameter of the coil is large, so the Q value can be improved. The inner diameter of the coil refers to the circular equivalent diameter based on the minimum area of the region surrounded by the coil 110 when viewed through in the direction of the axis AX.

[0233] (Green body 10)

[0234] The green body 10 is an inorganic insulator. Preferably, the material of the green body 10 is glass. Accordingly, due to the high insulation of glass, eddy currents can be suppressed and the Q value can be improved. Preferably, the green body 10 contains Si element. Accordingly, the thermal stability of the green body 10 is improved. Therefore, variations in the size of the green body 10 caused by heat and the like can be suppressed, and electrical characteristic deviations can be reduced.

[0235] Preferably, the green body 10 is a single-layer glass plate. Accordingly, the strength of the green body 10 can be ensured. In addition, in the case of a single-layer glass plate, the Q value at high frequencies can be improved because the dielectric loss is small. In addition, since there is no sintering process like that of a sintered body, deformation of the green body 10 during sintering can be suppressed, so pattern shift can be suppressed, and an inductor component with a small inductance tolerance can be provided.

[0236] As the material of the single-layer glass plate, from the viewpoint of the manufacturing method, a photosensitive glass plate typified by Foturan II (registered trademark of Schott AG) is preferred. In particular, it is preferred that the single-layer glass plate contains cerium oxide (cerium oxide: CeO 2 ). In this case, the cerium oxide becomes a sensitizer, and processing based on photolithography becomes easier.

[0237] However, since the single-layer glass plate can be processed by mechanical processing such as drilling and sandblasting, dry / wet etching processing using a photoresist / metal mask, laser processing, etc., it can also be a non-photosensitive glass plate. In addition, the single-layer glass plate can be a glass plate obtained by sintering glass paste or can be formed by a known method such as the float method.

[0238] (Insulator 22)

[0239] As Figure 9 shown, the inductor component 1F has an insulator 22. The insulator 22 covers the bottom surface 100b and the top surface 100t of the green body 10, respectively. In addition, the insulator 22 can also be provided only on the bottom surface 100b among the bottom surface 100b and the top surface 1100t.

[0240] The insulator 22 is a component that covers the wirings (the bottom wiring 11b and the top wiring 11t), having the functions of protecting the wirings from external forces to prevent damage to the wirings and improving the insulation of the wirings. The insulator 22 is preferably an organic insulator. For example, the insulator 22 can be a resin film such as epoxy resin or polyimide that is easy to form. In particular, it is preferable that the insulator 22 is made of a material with a low dielectric constant. Thus, when the insulator 22 exists between the coil 110 and the external electrodes 121 and 122, the stray capacitance formed between the coil 110 and the external electrodes 121 and 122 can be reduced. For example, the insulator 22 can be formed by laminating a resin film such as ABF GX-92 (manufactured by Ajinomoto Fine-Techno Co., Ltd.) or coating a paste-like resin and then performing thermal curing. In addition, the insulator 22 can also be an inorganic film such as an oxide, nitride, or oxynitride of silicon, hafnium, etc., which has excellent insulation and thin-film properties.

[0241] It is preferable that the green body 10 is an inorganic insulator. When the insulator 22 is an organic insulator, when viewed from a direction orthogonal to the bottom surface 100b, the outer surface of the organic insulator is located inside compared to the outer surface 100 of the inorganic insulator. Accordingly, due to the presence of the organic insulator, the organic insulator is easy to impart fluidity. When covering the wirings (the bottom wiring 11b and the top wiring 11t) with the organic insulator, the organic insulator can be easily filled between adjacent wirings, and the insulation can be improved. In addition, since the organic insulator does not contact the outer surface of the inorganic insulator, when singulating each inductor component, the load applied to the organic insulator can be reduced, and deformation and peeling of the organic insulator can be suppressed.

[0242] (coil 110)

[0243] As Figure 8 shown, all the bottom wirings 11b are arranged in parallel along the Y direction. The bottom wiring 11b extends only in one direction. In other words, the bottom wiring 11b is in a shape extending in the X direction. Specifically, one of the bottom wirings 11b at both ends in the direction of the axis AX has a first end connected to the conduction part 121v of the first external electrode 121 and a second end connected to the second through-wiring 14. When viewed from a direction orthogonal to the bottom surface 100b, one of the bottom wirings 11b extends in the direction of connecting the first end and the second end with a straight line.

[0244] The other bottom surface wiring 11b at both ends in the direction of the axis AX has a first end connected to the conduction part 122v of the second external electrode 122 and a second end connected to the first through-wiring 13. When the other bottom surface wiring 11b is viewed from a direction orthogonal to the bottom surface 100b, it extends in a direction connecting the first end and the second end with a straight line.

[0245] The other bottom surface wiring 11b has a first end connected to the first through-wiring 13 and a second end connected to the second through-wiring 14. When the other bottom surface wiring 11b is viewed from a direction orthogonal to the bottom surface 100b, it extends in a direction connecting the first end and the second end with a straight line.

[0246] In this way, the bottom surface wiring 11b is not a bent wiring but a straight wiring. Therefore, the length of the bottom surface wiring 11b can be easily shortened.

[0247] The first through-wiring 13 is disposed on the first end face 100e1 side with respect to the axis AX in the through-hole V of the green body 10, and the second through-wiring 14 is disposed on the second end face 100e2 side with respect to the axis AX in the through-hole V of the green body 10. The first through-wiring 13 and the second through-wiring 14 respectively extend in a direction orthogonal to the bottom surface 100b and the top surface 100t. A plurality of first through-wirings 13 and a plurality of second through-wirings 14 are respectively arranged in parallel along the Y direction.

[0248] Figure 10 It is a schematic bottom view of observing the top surface wiring 11t from the bottom surface side. In Figure 10 For convenience, the first through-wiring 13 and the second through-wiring 14 are depicted by double-dashed lines, and in addition, the green body 10 is depicted transparently.

[0249] As Figure 10 shown, a plurality of top surface wirings 11t are arranged along the Y direction. The top surface wiring 11t is a bent wiring 11t1. The bent wiring 11t1 has a first part 111, a second part 112, and a third part 113. The first part 111, the second part 112, and the third part 113 are connected in series in sequence.

[0250] The bent wiring 11t1 (the first part 111, the second part 112, and the third part 113) of the top surface wiring 11t has the same structure as the bent wiring 11b1 (the first part 111, the second part 112, and the third part 113) of the bottom surface wiring 11b described in the first embodiment and has the same effect. Hereinafter, the bent wiring 11t1 of the top surface wiring 11t will be described, but regarding its detailed structure (definitions, etc.), since it is the same as the bent wiring 11b1 of the bottom surface wiring 11b described in the first embodiment, the description thereof will be omitted.

[0251] When viewed from a direction orthogonal to the bottom surface 100b, the angle of the first portion 111 with respect to the axis AX is different from the angle β of the second portion 112 with respect to the axis AX. When viewed from a direction orthogonal to the bottom surface 100b, the angle γ of the third portion 113 with respect to the axis AX is different from the angle β of the second portion 112 with respect to the axis AX. With the above structure, the length of the bent wiring 11t1 can be easily increased.

[0252] Preferably, in two adjacent bent wirings 11t1 in the direction of the axis AX, when viewed from a direction orthogonal to the bottom surface 100b, the second distance d2 between the second portions 112 of one bent wiring 11t1 and the second portions 112 of the other bent wiring 11t1 is smaller than the first distance d1 between the first portions 111 of one bent wiring 11t1 and the first portions 111 of the other bent wiring 11t1. With the above structure, since the second distance d2 is short, leakage magnetic flux can be suppressed. Similarly, it is preferable that the second distance d2 is smaller than the third distance d3 between the third portions 113 of one bent wiring 11t1 and the third portions 113 of the other bent wiring 11t1.

[0253] Preferably, when viewed from a direction orthogonal to the bottom surface 100b, the length of the first portion 111 is smaller than half of the width of the green body 10 in the direction (X direction) orthogonal to the axis AX. The length of the first portion 111 is the length of the first center line C1 of the first portion 111. With the above structure, the possibility of contact between two adjacent bent wirings 11t1 in the direction of the axis AX can be reduced. Similarly, it is preferable that the length of the third portion 113 is smaller than half of the width of the green body 10 in the direction orthogonal to the axis AX.

[0254] Preferably, when viewed from a direction orthogonal to the bottom surface 100b, the width of the second portion 112 in the direction orthogonal to the second center line C2 is 0.5 times or more and 0.95 times or less the width of the first portion 111 in the direction orthogonal to the first center line C1. With the above structure, since the width of the second portion 112 is 0.95 times or less the width of the first portion 111, the width of the second portion 112 can be reduced, and thus, the length of the second portion 112 can be increased, and the inductance can be improved. On the other hand, since the width of the second portion 112 is 0.5 times or more the width of the first portion 111, cutting of the second portion 112 can be prevented. Similarly, it is preferable that when viewed from a direction orthogonal to the bottom surface 100b, the width of the second portion 112 in the direction orthogonal to the second center line C2 is 0.5 times or more and 0.95 times or less the width of the third portion 113 in the direction orthogonal to the third center line C3.

[0255] Preferably, when viewed from a direction orthogonal to the bottom surface 100b, the first length is more than 4% greater than the second length, where the first length is the length of the bent wiring 11t1 between the centers of the first through-wiring 13 and the second through-wiring 14, respectively, each connected to the bent wiring 11t1, and the second length is the length of the straight line connecting the centers of the first through-wiring 13 and the second through-wiring 14, respectively, each connected to the same bent wiring 11t1. The first length is the length between the centers of the first through-wiring 13 and the second through-wiring 14 among the lengths of the center lines (the first center line C1, the second center line C2, and the third center line C3) of the bent wiring 11t1. According to the above structure, since the length of the bent wiring 11t1 can be increased, the inductance can be increased.

[0256] Preferably, when viewed from a direction orthogonal to the bottom surface 100b, the angle of the second portion 112 (the second center line C2) with respect to the axis AX is set as the first angle, and the angle of the straight line connecting the centers of the first through-wiring 13 and the second through-wiring 14, respectively, each connected to the bent wiring 11t1 having the same second portion 112, with respect to the axis AX is set as the second angle. At this time, the second angle is larger than the first angle. The first angle is larger than 45° and smaller than 80°. The difference between the second angle and the first angle, that is, the third angle, is larger than 1° and smaller than 45°.

[0257] According to the above structure, since the first angle is larger than 45°, the width of the second portion 112 can be ensured, and the acquisition efficiency of the inductance can be ensured. Since the first angle is smaller than 80°, the length of the second portion 112 can be increased, and the inductance can be improved. Since the third angle is larger than 1°, the length of the second portion 112 can be increased, and the inductance can be improved. Since the third angle is smaller than 45°, the width of the second portion 112 can be ensured.

[0258] (The first external electrode 121 and the second external electrode 122)

[0259] As Figure 9 shown, the outer surface of the first external electrode 121 has a recessed portion 121a. The recessed portion 121a is provided at a position overlapping the conduction portion 121v on the upper surface of the first external electrode 121 when viewed from a direction orthogonal to the bottom surface 100b. Accordingly, when the inductor component 1F is mounted on the substrate, solder enters the recessed portion 121a of the first external electrode 121, and the connection strength between the first external electrode 121 and the solder is improved.

[0260] Similarly, the outer surface of the second external electrode 122 may also have a recess. Accordingly, when the inductor component 1F is mounted on a substrate, solder enters the recess of the second external electrode 122, and the connection strength between the second external electrode 122 and the solder is improved. In addition, the upper surfaces of the first external electrode 121 and the second external electrode 122 may be formed flat.

[0261] (Method for manufacturing the inductor component 1F)

[0262] Next, Figures 11A - 11H the method for manufacturing the inductor component 1F will be described. Figures 11A - 11H is a diagram corresponding to the IX - IX cross - section of Figure 8 .

[0263] As Figure 11A shown, a copper foil 2001 is provided on a base substrate 2000 by printing. The material of the base substrate 2000 is the same as that of the base substrate 1000 in the first embodiment.

[0264] As Figure 11B shown, a glass substrate 2010 that becomes a green body 10 is provided on the base substrate 2000. For example, jigs such as conductive tapes, pins, and frames are used to closely attach the base substrate 2000 and the glass substrate 2010. The glass substrate 2010 has a through - hole V. The glass substrate 2010 is, for example, a TGV (Through Glass Via) substrate. A TGV substrate is a substrate on which through - holes have been formed in advance by laser, photolithography, etc. The glass substrate 2010 may also be, for example, a TSV (Through Silicon Via) substrate, or it may be otherwise. Additionally, Ti / Cu or other necessary conductive materials may be vapor - deposited on the surface of the glass substrate 2010 in advance by sputtering or the like as seeds.

[0265] As Figure 11C shown, a first through - conductor layer 2013 that becomes the first through - wiring 13 is formed in the through - hole V of the glass substrate 2010. Although not shown, a second through - conductor layer that becomes the second through - wiring 14 is similarly formed in the through - hole V. Specifically, by supplying power from the copper foil 2001 on the base substrate 2000, the first through - conductor layer 2013 is formed by electrolytic electroplating in the through - hole V of the glass substrate 2010. In addition to this, a seed layer may be formed on the surface of the glass substrate 2010 and the inner surface of the through - hole V by sputtering or the like, and a through - conductor layer may be formed using known methods such as fill - in electroplating, conformal electroplating, and printing and filling methods of conductive pastes. When an unnecessary coating grows on the surface of the glass substrate 2010, the unnecessary portion is removed by grinding, CMP, wet etching (etching), or dry etching.

[0266] As shown Figure 11D in FIG. 1, the base substrate 2000 is peeled off from the glass substrate 2010. At this time, the base substrate 2000 can be removed by a mechanical method such as grinding, or can be removed by a chemical method such as etching.

[0267] As shown Figure 11E in FIG. 2, a bottom conductor layer 2011b that becomes the bottom surface wiring 11b and a top conductor layer 2011t that becomes the top surface wiring 11t are formed on the glass substrate 2010. Specifically, a seed layer (not shown) is provided on the entire surface of the glass substrate 2010, and a patterned photoresist is formed on the seed layer. A copper layer is formed on the seed layer in the opening of the photoresist by electrolytic plating. The photoresist and the seed layer are removed by wet etching or dry etching. Thus, the bottom conductor layer 2011b and the top conductor layer 2011t patterned into an arbitrary shape are formed. At this time, the bottom conductor layer 2011b and the top conductor layer 2011t can be formed one by one, or both can be formed simultaneously.

[0268] As shown Figure 11F in FIG. 3, insulating layers 2022 that become the insulators 22 are provided on the top and bottom surfaces of the glass substrate 2010 to cover the conductor layers. At this time, the bottom-side insulating layer 2022 and the top-side insulating layer 2022 can be formed one by one, or both can be formed simultaneously. Thereafter, holes 2022a are provided in the bottom conductor layer 2011b of the bottom-side insulating layer 2022 using photolithography or laser processing.

[0269] As shown Figure 11G in FIG. 4, a first external electrode conductor layer 2121 that becomes the first external electrode 121 is provided on the bottom-side insulating layer 2022. At this time, the first external electrode conductor layer 2121 is connected to the bottom conductor layer 2011b via the hole 2022a. Specifically, a Pd catalyst (not shown) is provided on the bottom-side insulating layer 2022, and Ni and Au coatings are formed by electroless plating. A patterned photoresist is formed on the coating. The coating in the opening of the photoresist is removed by wet etching or dry etching. Thus, the first external electrode conductor layer 2121 patterned into an arbitrary shape is formed. Alternatively, a seed layer (not shown) is provided on the bottom-side insulating layer 2022, and a patterned photoresist is formed on the seed layer. Next, the seed layer in the opening of the photoresist is removed by wet etching or dry etching. Ni and Au coatings can also be formed by electroless plating on the remaining seed layer. Although not shown, a second external electrode conductor layer that becomes the second external electrode 122 is similarly provided on the bottom-side insulating layer 2022.

[0270] Here, since the first external electrode conductor layer 2121 is formed following the shape of the upper surface of the insulating layer 2022 on the bottom surface side, the upper surface of the first external electrode conductor layer 2121 has a recessed portion in the region overlapping with the hole 2022a.

[0271] As Figure 11H shown, singulation is performed along the cutting line C. Thus, as Figure 9 shown, the inductor component 1F is manufactured.

[0272] 2. Modified Example

[0273] (First Modified Example)

[0274] Figure 12A is a diagram corresponding to the IX - IX cross - section of the first modified example of the inductor component. As Figure 8 shown, in the inductor component 1G of the first modified example, the first through - wiring 13 extends in a direction orthogonal to the bottom - surface wiring 11b, and the cross - sectional area of each of the end portions 13e in the extending direction of the first through - wiring 13 is larger than the cross - sectional area of the central portion 13m in the extending direction of the first through - wiring 13. In other words, on the cross - section of the first through - wiring 13 along the extending direction, the width of the first through - wiring 13 in the direction orthogonal to the extending direction continuously increases from the central portion 13m toward the end portions 13e. Figure 12A

[0275] Accordingly, the cross - sectional area of the end portion 13e of the first through - wiring 13 can be increased, and the connectivity between the first through - wiring 13 and at least one of the bottom - surface wiring 11b and the top - surface wiring 11t can be improved. In addition, when forming the through - hole V as a hole portion in the green body 10 and filling the through - hole V with a conductive material such as by electroplating to form the first through - wiring 13, it is easy to fill the conductive material on the opening side of the through - hole V. Moreover, since the cross - sectional area of the end portion 13e of the first through - wiring 13 is large and the cross - sectional area of the central portion 13m of the first through - wiring 13 is small, it is easy to form the first through - wiring 13.

[0276] In addition, it is sufficient that the cross - sectional area of one end portion 13e of the first through - wiring 13 is larger than the cross - sectional area of the central portion 13m of the first through - wiring 13. Similarly, the cross - sectional area of at least one end portion of the second through - wiring 14 can also be larger than the cross - sectional area of the central portion 13m of the first through - wiring 13.

[0277] (Second Modified Example)

[0278] Figure 12B Figure 8 is a diagram corresponding to the IX - IX cross - section of the second modified example of the inductor component. As Figure 12B ​​As shown in FIG. 1 , in the inductor component 1H of the second modified example, the first through wiring 13 has a conductive layer 13s located on the outer peripheral side and a non-conductive layer 13u located on the inner side of the conductive layer 13s when viewed from the direction in which the first through wiring 13 extends. Accordingly, when used in a high frequency band, the current mainly flows on the surface of the first through wiring 13 due to the skin effect, so that the Q value is not reduced by providing the conductive layer 13s on the outer peripheral side. In addition, by providing the non-conductive layer 13u on the inner side, stress can be relieved, and the manufacturing cost can be reduced by not using a conductor.

[0279] An example of a method for forming a conductive layer 13s and a non-conductive layer 13u is described. A seed layer is provided on the inner surface of the through hole V of the blank 10 by sputtering or electroless plating. Then, a plating layer is formed on the seed layer by electrolytic plating. In this way, a plurality of conductive layers 13s such as Ti / Cu / electrolytic Cu or Pd / electroless Cu / electrolytic Cu can be formed on the outer peripheral side of the first through wiring 13. Thereafter, the inner side of the conductive layer 13s is sealed with a resin by printing or hot pressing, etc., to form a non-conductive layer 13u made of resin. In this way, current can flow on the surface (conductive layer 13s) of the first through wiring 13, and stress can be relieved by the non-conductive layer 13u inside the first through wiring 13.

[0280] Similarly, the second through wiring 14 may include a conductive layer located on the outer peripheral side and a non-conductive layer located on the inner side of the conductive layer when viewed from the direction in which the second through wiring 14 extends. In addition, although the cross-sectional area of ​​each of the two end portions in the extending direction of the first through wiring 13 is larger than the cross-sectional area of ​​the central portion in the extending direction of the first through wiring 13, the cross-sectional area of ​​each of the two end portions in the extending direction of the first through wiring 13 may be the same as the cross-sectional area of ​​the central portion in the extending direction of the first through wiring 13.

[0281] (Third Modification)

[0282] Figure 12C is a diagram showing a third modified example of the inductor component Figure 8 The corresponding figure is the IX-IX section of Figure 12C As shown in the figure, in the inductor component 1I of the third modified example, the first external electrode 121 is not connected to the bottom surface wiring 11b, but is connected to the first through wiring 13 on the rightmost side in the figure. In other words, the first end of the first through wiring 13 is connected to the first external electrode 121, and the second end of the first through wiring 13 is connected to the top surface wiring 11t on the rightmost side in the figure. Thus, even if the number of turns of the coil 110 is changed, the coil 110 can be easily connected to the first external electrode 121.

[0283] Similarly, although not shown, the second external electrode 122 is not connected to the bottom surface wiring 11b, but is connected to the second through-wiring 14 on the leftmost side in the figure. In other words, the first end portion of the second through-wiring 14 is connected to the second external electrode 122, and the second end portion of the second through-wiring 14 is connected to the top surface wiring 11t on the leftmost side in the figure.

[0284] The number of the bottom surface wirings 11b is less than the number of the top surface wirings 11t. There are two bottom surface wirings 11b and three top surface wirings 11t. The bottom surface wirings 11b are bent wirings, and the top surface wirings 11t are straight wirings.

[0285] <Third Embodiment>

[0286] Figure 13 is a schematic bottom view observed from the bottom surface side showing the third embodiment of the inductor component. In Figure 13 for convenience, the external electrodes are depicted by double-dashed lines. Additionally, in Figure 13 in order to easily understand the structure, the green body 10 is depicted transparently. The shapes of the bottom surface wiring and the top surface wiring in the third embodiment are different from those in the first embodiment, and the following describes these different structures. Other structures are the same as those in the first embodiment, and their descriptions are omitted.

[0287] As Figure 13 shown, in the inductor component 1J of the third embodiment, when observed from the direction (Z direction) orthogonal to the bottom surface 100b, all the bottom surface wirings 11b and all the top surface wirings 11t are bent wirings having a curved portion 115. Specifically, the bent wiring includes a curved portion 115 and a straight portion. The straight portions are respectively located at both ends of the bent wiring, and the curved portion 115 is located between the straight portions at both ends. The angles of the straight portions at both ends with respect to the axis AX are different from each other.

[0288] According to the above structure, since the bottom surface wirings 11b and the top surface wirings 11t are bent wirings, the length of the wiring of the coil 110 can be changed without changing the size of the inductor component 1J, and the inductance can be easily adjusted. In addition, at least one of the plurality of bottom surface wirings 11b and the plurality of top surface wirings 11t may be a bent wiring having a curved portion 115.

[0289] It is preferable that there are a plurality of bent wirings. When observed from the direction orthogonal to the bottom surface 100b, the curved portions 115 of all the bent wirings are bent to protrude toward one side in the axial direction. According to the above structure, a magnetic field in the reverse direction is not generated in all the curved portions 115, and the acquisition efficiency of the inductor can be improved.

[0290] Preferably, when viewed from a direction orthogonal to the bottom surface 100b, the side surface of the curved portion 115 of the bottom surface wiring 11b has a concave portion 115a. The concave portion 115a is provided on the side surface of the curved portion 115 on the protruding side. The concave portion 115a is provided at a position facing the first through-wiring 13 connected to the bottom surface wiring 11b adjacent in the axial direction AX. According to the above structure, since the side surface of the curved portion 115 has the concave portion 115a, the width of the curved portion 115 can be narrowed, and the possibility of contact between two bent wirings adjacent in the axial direction can be reduced. In addition, the side surface of the curved portion 115 of the top surface wiring 11t may also have a concave portion 115a.

[0291] Preferably, the bent wiring is composed only of the curved portion 115. According to the above structure, since the bent wiring does not include a straight portion, the length of the coil 110 can be further increased. In addition, at least one of the plurality of bent wirings may also be composed only of the curved portion 115.

[0292] In addition, the radius of curvature of all the curved portions 115 may be the same, or the radius of curvature of at least two curved portions 115 may be different from each other. Alternatively, one curved portion 115 may have a plurality of different radii of curvature. In this case, the radius of curvature may change continuously or may change stepwise.

[0293] <Fourth Embodiment>

[0294] Figure 14 is a schematic bottom view observed from the bottom side showing the fourth embodiment of the inductor component. In Figure 14 , a view of the top surface wiring 11t observed from the bottom side is shown. For convenience, the first through-wiring 13 and the second through-wiring 14 are depicted by a double-dot chain line, and the green body 10 is depicted transparently. The shape of the top surface wiring of the fourth embodiment is different from that of the second embodiment Figure 10 , and the following describes these different structures. Other structures are the same as those of the second embodiment, and their descriptions are omitted.

[0295] As Figure 14 shown, in the inductor component 1K of the fourth embodiment, when viewed from a direction orthogonal to the bottom surface 100b (Z direction), all the top surface wirings 11t are bent wirings having a curved portion 115.

[0296] Specifically, the top surface wiring 11t on one side (the upper side in the figure) in the axial direction AX includes a curved portion 115 and a straight portion. The straight portion is located at the end of the top surface wiring 11t on the side of the first through-wiring 13. The curved portion 115 is located at the end of the top surface wiring 11t on the side of the second through-wiring 14. The curved portion 115 is bent to protrude upward in the figure.

[0297] The top surface wiring 11t on the other side (the lower side in the figure) in the AX-axis direction includes a curved portion 115 and a straight portion. The straight portion is located at the end on the side of the first through-wiring 13 of the top surface wiring 11t and the end on the side of the second through-wiring 14 of the top surface wiring 11t. The curved portion 115 is located between the straight portions at both ends. The curved portion 115 is bent in a meandering shape.

[0298] According to the above structure, since the top surface wiring 11t is a bent wiring, the length of the wiring of the coil 110 can be changed without changing the size of the inductor component 1K, and the inductance can be easily adjusted. In addition, at least one of the plurality of bottom surface wirings 11b and the plurality of top surface wirings 11t may be a bent wiring having a curved portion 115.

[0299] Preferably, the same as the third embodiment, there are a plurality of bent wirings, and when viewed from a direction orthogonal to the bottom surface 100b, the curved portions 115 of all the bent wirings are bent to protrude toward one side in the axial direction. According to the above structure, a magnetic field in the reverse direction is not generated in all the curved portions 115, and the acquisition efficiency of the inductor can be improved.

[0300] Preferably, the same as the third embodiment, when viewed from a direction orthogonal to the bottom surface 100b, the side surface of the curved portion 115 has a concave portion. According to the above structure, since the side surface of the curved portion 115 has a concave portion, the width of the curved portion 115 can be made narrower, and the possibility of contact between two adjacent bent wirings in the axial direction can be reduced.

[0301] Preferably, the same as the third embodiment, the bent wiring is composed only of the curved portion 115. According to the above structure, since the bent wiring does not include a straight portion, the length of the coil 110 can be further increased. In addition, at least one of the plurality of bent wirings may be composed only of the curved portion 115.

[0302] In addition, the present disclosure is not limited to the above embodiments, and design changes can be made without departing from the gist of the present disclosure. For example, various combinations of the characteristic points of the first to fourth embodiments can be made. For example, two or more of the bent wirings of the first to fourth embodiments can be mixed.

[0303] The present disclosure includes the following aspects.

[0304] <1> An inductor component, comprising:

[0305] A green body including a first main surface and a second main surface facing each other;

[0306] A coil provided on the green body and wound in a spiral shape along an axis; and

[0307] A first external electrode and a second external electrode are provided on the green body and are electrically connected to the coil.

[0308] The axis of the coil is arranged parallel to the first main surface.

[0309] The coil includes:

[0310] A plurality of first coil wirings are provided on the first main surface side with respect to the axis and are arranged along the axis in a plane parallel to the first main surface;

[0311] A plurality of second coil wirings are provided on the second main surface side with respect to the axis and are arranged along the axis in a plane parallel to the second main surface;

[0312] A plurality of first through wirings extend from the first coil wiring toward the second coil wiring and are arranged along the axis; and

[0313] A plurality of second through wirings extend from the first coil wiring toward the second coil wiring, are provided on the opposite side of the axis from the first through wiring, and are arranged along the axis.

[0314] By sequentially connecting the first coil wiring, the first through wiring, the second coil wiring, and the second through wiring, at least a part of the spiral shape is formed.

[0315] When viewed from a direction orthogonal to the first main surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring, and the bent wiring has a first part and a second part with different angles with respect to the axis.

[0316] <2> The inductor component according to <1>.

[0317] When viewed from a direction orthogonal to the first main surface, the first part is a part orthogonal to the axis or a part parallel to the axis, and the second part is a part that intersects the axis at an acute angle.

[0318] <3> The inductor component according to <1> or <2>.

[0319] The green body contains SiO 2 .

[0320] <4> The inductor component according to any one of <1> to <3>.

[0321] When viewed from a direction orthogonal to the first major surface, among two adjacent bent wirings in the axial direction, the distance between the second part of one bent wiring and the second part of the other bent wiring is smaller than the distance between the first part of one bent wiring and the first part of the other bent wiring.

[0322] <5> The inductor component according to any one of <1> to <4>,

[0323] The bent wiring is provided at least on the first coil wiring,

[0324] When viewed from a direction orthogonal to the first major surface, at least one of the plurality of second coil wirings extends in a direction connecting the centers of the first through-wiring and the second through-wiring connected to the same second coil wiring by a straight line.

[0325] <6> The inductor component according to any one of <1> to <5>,

[0326] The bent wiring is provided at least on the first coil wiring,

[0327] One of the plurality of first coil wirings has a first end connected to the first external electrode and a second end connected to the first through-wiring,

[0328] When viewed from a direction orthogonal to the first major surface, the one first coil wiring extends in a direction connecting the first end and the second end by a straight line.

[0329] <7> The inductor component according to any one of <1> to <6>,

[0330] When viewed from a direction orthogonal to the first major surface, the first part is a part orthogonal to the axis,

[0331] When viewed from a direction orthogonal to the first major surface, the length of the first part is smaller than half of the width of the green body in the direction orthogonal to the axis.

[0332] <8> The inductor component according to any one of <1> to <7>,

[0333] When viewed from a direction orthogonal to the first major surface, the first part is a part orthogonal to the axis, and the second part is a part intersecting the axis at an acute angle,

[0334] When viewed from a direction orthogonal to the first major surface, the width of the second part is 0.5 times or more and 0.95 times or less the width of the first part.

[0335] <9> The inductor component according to any one of <1> to <8>

[0336] When viewed from a direction orthogonal to the first main surface, the shape of the coil is rotationally symmetric by 180° about the midpoint of the axial direction of the coil.

[0337] <10> The inductor component according to any one of <1> to <9>

[0338] When viewed from a direction orthogonal to the first main surface, the length of the bent wiring between the centers of the first through-wiring and the second through-wiring connected to the bent wiring is 4% or more greater than the length of a straight line connecting the centers of the first through-wiring and the second through-wiring connected to the same bent wiring.

[0339] <11> The inductor component according to any one of <1> to <10>

[0340] When viewed from a direction orthogonal to the first main surface, the first part is a part orthogonal to the axis, and the second part is a part that intersects the axis at an acute angle.

[0341] When viewed from a direction orthogonal to the first main surface, when the angle of the second part with respect to the axis is set as the first angle θ1 and the angle of the straight line connecting the centers of the first through-wiring and the second through-wiring with respect to the axis is set as the second angle θ2, the second angle θ2 is greater than the first angle θ1, the first angle θ1 is greater than 45° and less than 80°, and the difference between the second angle θ2 and the first angle θ1 is greater than 1° and less than 45°, where the first through-wiring and the second through-wiring are through-wirings connected to the bent wiring having the same second part.

[0342] <12> The inductor component according to any one of <1> to <11>

[0343] The bent wiring is provided at least on the first coil wiring.

[0344] The outermost first coil wiring among the plurality of first coil wirings located at the outermost side in the axial direction is not the bent wiring.

[0345] When viewed from a direction orthogonal to the first main surface, the maximum length in the axial direction of the outermost first coil wiring is greater than the maximum length in the axial direction of the first coil wiring adjacent to the outermost first coil wiring in the axial direction.

[0346] <13>A kind of inductor component, comprising:

[0347] A green body, including a first main surface and a second main surface facing each other;

[0348] A coil, disposed on the above-mentioned green body and wound in a spiral shape along an axis; and

[0349] A first external electrode and a second external electrode, disposed on the above-mentioned green body and electrically connected to the above-mentioned coil,

[0350] The above-mentioned axis of the above-mentioned coil is arranged parallel to the above-mentioned first main surface,

[0351] The above-mentioned coil includes:

[0352] A plurality of first coil wirings, disposed on the first main surface side with respect to the above-mentioned axis and arranged along the above-mentioned axis in a plane parallel to the above-mentioned first main surface;

[0353] A plurality of second coil wirings, disposed on the second main surface side with respect to the above-mentioned axis and arranged along the above-mentioned axis in a plane parallel to the above-mentioned second main surface;

[0354] A plurality of first through wirings, extending from the above-mentioned first coil wiring towards the above-mentioned second coil wiring and arranged along the above-mentioned axis; and

[0355] A plurality of second through wirings, extending from the above-mentioned first coil wiring towards the above-mentioned second coil wiring, disposed on the opposite side of the above-mentioned axis from the above-mentioned first through wiring, and arranged along the above-mentioned axis,

[0356] By sequentially connecting the above-mentioned first coil wiring, the above-mentioned first through wiring, the above-mentioned second coil wiring, and the above-mentioned second through wiring, at least a part of the above-mentioned spiral shape is formed.

[0357] When observed from a direction orthogonal to the above-mentioned first main surface, at least one of the above-mentioned plurality of first coil wirings and the above-mentioned plurality of second coil wirings is a bent wiring having a curved portion.

[0358] <14>The inductor component according to <13>,

[0359] There are a plurality of the above-mentioned bent wirings,

[0360] When observed from a direction orthogonal to the above-mentioned first main surface, all of the above-mentioned curved portions are bent to protrude towards one side of the above-mentioned axis.

[0361] <15>The inductor component according to <13> or <14>,

[0362] When observed from a direction orthogonal to the above-mentioned first main surface, the side surface of the above-mentioned curved portion has a concave portion.

[0363] <16>The inductor component according to any one of <13> to <15>

[0364] The bent wiring is composed only of the curved portion described above.

[0365] Explanation of reference numerals

[0366] 1, 1A - 1K... Inductor components, 10... Green body, 11b... Bottom surface wiring (first coil wiring), 11t... Top surface wiring (second coil wiring), 11b1, 11t1... Bent wiring, 11b2, 11t2... Straight wiring, 11b3, 11t3... Wide wiring, 13... First through-wiring, 13e... End portion, 13m... Central portion, 13s... Conductive layer, 13u... Non-conductive layer, 14... Second through-wiring, 22... Insulator, 100b... Bottom surface (first main surface), 100t... Top surface (second main surface), 110, 110A, 110B... Coils, 111... First part, 112... Second part, 113... Third part, 115... Curved portion, 115a... Concave portion, 121... First external electrode, 121a... Depressed portion, 121b... Bottom surface portion, 121v... Conductive portion, 121e1... Base layer, 121e2... Coating layer, 122... Second external electrode, 122b... Bottom surface portion, 122v... Conductive portion, AX... Axis, α... Angle formed by the first part and the axis, β... Angle formed by the second part and the axis, γ... Angle formed by the third part and the axis, θ1, θ2, θ3... First, second, third angles, C1, C2, C3... First, second, third center lines, d1, d2, d3... First, second, third distances, L1, L2... First, second lengths, M1, M2, M3, M4... Maximum lengths, N... Straight line.

Claims

1. An inductor component, wherein, it includes: a green body including a first main surface and a second main surface facing each other; a coil disposed on the green body and wound in a spiral shape along an axis; and a first external electrode and a second external electrode disposed on the green body and electrically connected to the coil, the axis of the coil is arranged parallel to the first main surface, the coil includes: a plurality of first coil wirings disposed on the first main surface side with respect to the axis and arranged along the axis in a plane parallel to the first main surface; a plurality of second coil wirings disposed on the second main surface side with respect to the axis and arranged along the axis in a plane parallel to the second main surface; a plurality of first through wirings extending from the first coil wirings toward the second coil wirings and arranged along the axis; and a plurality of second through wirings extending from the first coil wirings toward the second coil wirings, disposed on the side opposite to the first through wirings with respect to the axis, and arranged along the axis, by connecting the first coil wirings, the first through wirings, the second coil wirings, and the second through wirings in this order of the first coil wirings, the first through wirings, the second coil wirings, and the second through wirings, at least a part of the spiral shape is formed, when viewed from a direction orthogonal to the first main surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring, and the bent wiring has a first part and a second part with different angles with respect to the axis.

2. The inductor component according to claim 1, wherein, when viewed from a direction orthogonal to the first main surface, the first part is a part orthogonal to the axis or a part parallel to the axis, and the second part is a part intersecting the axis at an acute angle.

3. The inductor component according to claim 1 or 2, wherein, The above-mentioned green body contains SiO 2 .

4. The inductor component according to any one of claims 1 to 3, wherein, in two adjacent bent wirings in the axial direction, when viewed from a direction orthogonal to the first main surface, the distance between the second part of one bent wiring and the second part of the other bent wiring is smaller than the distance between the first part of one bent wiring and the first part of the other bent wiring.

5. The inductor component according to any one of claims 1 to 4, wherein, the bent wiring is provided at least on the first coil wiring, when viewed from a direction orthogonal to the first main surface, at least one second coil wiring among the plurality of second coil wirings extends in a direction connecting the centers of the first through wiring and the second through wiring respectively, and the first through wiring and the second through wiring are through wirings connected to the same second coil wiring.

6. The inductor component according to any one of claims 1 to 5, wherein, the bent wiring is provided at least on the first coil wiring, One of the plurality of first coil wirings described above has a first end and a second end. The first end is connected to the first external electrode, and the second end is connected to the first through-wiring. When viewed from a direction orthogonal to the first main surface, the one first coil wiring extends in a direction connecting the first end and the second end in a straight line.

7. The inductor component according to any one of claims 1 to 6, wherein, When viewed from a direction orthogonal to the first main surface, the first portion is a portion orthogonal to the axis. When viewed from a direction orthogonal to the first main surface, the length of the first portion is smaller than half of the width of the green body in the direction orthogonal to the axis.

8. The inductor component according to any one of claims 1 to 7, wherein, When viewed from a direction orthogonal to the first main surface, the first portion is a portion orthogonal to the axis, and the second portion is a portion that intersects the axis at an acute angle. When viewed from a direction orthogonal to the first main surface, the width of the second portion is 0.5 times or more and 0.95 times or less the width of the first portion.

9. The inductor component according to any one of claims 1 to 8, wherein, When viewed from a direction orthogonal to the first main surface, the shape of the coil is rotationally symmetric by 180° about the midpoint of the axial direction of the coil.

10. The inductor component according to any one of claims 1 to 9, wherein, When viewed from a direction orthogonal to the first main surface, the length of the bent wiring between the centers of the first through-wiring and the second through-wiring connected to the bent wiring is more than 4% greater than the length of the straight line connecting the centers of the first through-wiring and the second through-wiring connected to the same bent wiring.

11. The inductor component according to any one of claims 1 to 10, wherein, When viewed from a direction orthogonal to the first main surface, the first portion is a portion orthogonal to the axis, and the second portion is a portion that intersects the axis at an acute angle. When viewed from a direction orthogonal to the first main surface, when the angle of the second portion with respect to the axis is set as the first angle θ1, and the angle of the straight line connecting the centers of the first through-wiring and the second through-wiring with respect to the axis is set as the second angle θ2, the second angle θ2 is greater than the first angle θ1, the first angle θ1 is greater than 45° and less than 80°, the difference between the second angle θ2 and the first angle θ1 is greater than 1° and less than 45°, and the first through-wiring and the second through-wiring are through-wirings connected to the bent wiring having the same second portion.

12. The inductor component according to any one of claims 1 to 11, wherein, The bent wiring is provided at least on the first coil wiring. The outermost first coil wiring among the plurality of first coil wirings located at the outermost side in the axial direction is not the bent wiring. When viewed from a direction orthogonal to the first major surface, the maximum length in the axial direction of the outermost first coil wiring is greater than the maximum length in the axial direction of the first coil wiring adjacent to the outermost first coil wiring in the axial direction.

13. An inductor component, wherein, it includes: a green body including a first major surface and a second major surface facing each other; a coil provided on the green body and wound in a spiral along an axis; and a first external electrode and a second external electrode provided on the green body and electrically connected to the coil, the axis of the coil is arranged parallel to the first major surface, the coil includes: a plurality of first coil wirings arranged on the first major surface side with respect to the axis and arranged along the axis in a plane parallel to the first major surface; a plurality of second coil wirings arranged on the second major surface side with respect to the axis and arranged along the axis in a plane parallel to the second major surface; a plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis; and a plurality of second through wirings extending from the first coil wiring toward the second coil wiring, arranged on the side opposite to the first through wiring with respect to the axis, and arranged along the axis, by connecting the first coil wiring, the first through wiring, the second coil wiring, and the second through wiring in this order to form at least a part of the spiral shape. When viewed from a direction orthogonal to the first major surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a curved portion.

14. The inductor component according to claim 13, wherein, there are a plurality of the bent wirings, when viewed from a direction orthogonal to the first major surface, all of the curved portions are bent to protrude toward one side in the axial direction.

15. The inductor component according to claim 13 or 14, wherein, when viewed from a direction orthogonal to the first major surface, the side surface of the curved portion has a concave portion.

16. The inductor component according to any one of claims 13 to 15, wherein, the bent wiring is composed only of the curved portion.

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