An online measurement method for microstructure feature parts

Abstract

The application relates to the technical field of online measurement, in particular to an online measurement method for microstructure feature parts, which comprises the following steps: installing a microscope lens on a machine tool tooling table, controlling the movement of X and Z axes of the machine tool, observing and positioning the microstructure features of the parts, and recording the initial values of the X and Z axis coordinates of the machine tool; dismounting the microscope lens and then installing a spectral confocal probe, determining the adjustment values of the X and Z axis coordinates of the machine tool according to the initial values of the X and Z axis coordinates of the machine tool and a pre-determined offset value; inputting the adjustment values of the X and Z axis coordinates of the machine tool into a numerical control system of the machine tool, and positioning the spectral confocal probe at the microstructure features of the parts. The application can realize online measurement of microstructure features of the microstructure feature parts after super-precision single-point diamond lathe machining, improve the practicability of the machine tool, and save the measurement investment cost.

Description

Technical Field

[0001] This application relates to the field of online measurement technology, and in particular to an online measurement method for microstructure feature parts. Background Technology

[0002] Ultra-precision single-point diamond lathes can be used to machine parts with microstructural features, such as microgrooves, diffraction steps, and Fresnel steps. The height of these steps is often on the order of micrometers, and the height data of these steps needs to be measured after machining to determine the machining quality. Traditionally, this requires additional offline measurement equipment, where the part is removed from the machine tool and measured offline. Equipping ultra-precision single-point diamond lathes with probes enables online measurement of parts. Contact-type LVDT probes are widely used on ultra-precision single-point diamond lathes for online measurement of part surface accuracy. Non-contact measurement, due to its non-contact nature and the reduced risk of scratching the part surface, has been adopted by scholars and research institutions both domestically and internationally for online measurement of parts on ultra-precision single-point diamond lathes. Among non-contact measurements, point scanning measurement offers higher measurement accuracy compared to line scanning and surface scanning. However, because the step features of parts are on the order of several micrometers, their specific locations are difficult to observe on the machine tool, making online measurement of microstructural features on ultra-precision single-point diamond lathes still challenging. Summary of the Invention

[0003] To address the above problems, this application provides an online measurement method for microstructure feature parts, including:

[0004] A microscope head is installed on the machine tool fixture table, and the X-axis and Z-axis of the machine tool are controlled to observe and locate the microscopic features of the parts, and the initial values ​​of the X-axis and Z-axis coordinates of the machine tool are recorded.

[0005] Disassemble the microscope head and reinstall the spectral confocal probe. Based on the initial values ​​of the X-axis and Z-axis coordinates of the machine tool and the predetermined offset values, determine the adjustment values ​​of the X-axis and Z-axis coordinates of the machine tool.

[0006] Input the adjustment values ​​of the X-axis and Z-axis coordinates of the machine tool into the CNC system of the machine tool, and position the spectral confocal probe on the microscopic features of the part.

[0007] Furthermore, before mounting the microscope head on the machine tool fixture, controlling the movement of the machine tool's X and Z axes, observing and locating the microscopic features of the part, and recording the initial values ​​of the machine tool's X and Z axis coordinates, the process also includes:

[0008] The microscope head and the spectral confocal probe were calibrated using calibration components to determine the offset value of the spectral confocal probe relative to the microscope head in the machine tool coordinate system.

[0009] Furthermore, the calibration of the microscope head and the spectral confocal probe using calibration components to determine the offset value of the spectral confocal probe relative to the microscope head in the machine tool coordinate system includes:

[0010] Install the microscope head on the machine tool fixture, adjust the up-and-down movement of the microscope head, control the X and Z axis movements of the machine tool, calibrate the microscope head using calibration components, and record the X-axis coordinates of the machine tool. M and Z-axis coordinates Z M ;

[0011] Disassemble the microscope head and reinstall the spectral confocal probe. Adjust the vertical movement of the spectral confocal probe and control the X and Z axes of the machine tool. Use calibration components to calibrate the spectral confocal probe and record the X-axis coordinates of the machine tool. P and Z-axis coordinates Z P ;

[0012] Determine the offset value X of the spectral confocal probe relative to the microscope head in the machine tool coordinate system. offset =X P -X M Z offset =Z P -Z M .

[0013] Furthermore, the step of calibrating the microscope head and the spectral confocal probe using calibration components to determine the offset value of the spectral confocal probe relative to the microscope head in the machine tool coordinate system further includes:

[0014] Fix a calibration piece with a cross mark in the middle on the machine tool spindle, and adjust the calibration piece to be aligned with the machine tool spindle.

[0015] Furthermore, the alignment accuracy between the calibration component and the machine tool spindle is better than 1 micrometer.

[0016] Furthermore, the calibration of the microscope head using a calibration element includes:

[0017] This ensures that the microscope head is aligned with the crosshairs of the calibration piece, and the image center of the microscope head is the crosshairs of the calibration piece.

[0018] Furthermore, the calibration of the spectral confocal probe using a calibration element includes:

[0019] This ensures that the spectral confocal probe is aligned with the center of the crosshairs on the calibration piece, and that the measurement reading of the spectral confocal probe is in the middle of its range.

[0020] Furthermore, the step of inputting the adjustment values ​​of the X-axis and Z-axis coordinates of the machine tool into the CNC system to position the spectral confocal probe after the microscopic features of the part also includes:

[0021] The height data of the micro-features are obtained by measuring the micro-features through a planned measurement procedure and analyzing the measurement data.

[0022] The above-mentioned technical solution of this application has the following advantages:

[0023] The online measurement method for microstructured parts provided in this application involves installing a microscope head on a machine tool fixture, controlling the X-axis and Z-axis movements of the machine tool to observe and locate the microstructured features of the parts, recording the initial values ​​of the X-axis and Z-axis coordinates, disassembling the microscope head and reinstalling a spectral confocal probe, determining the adjustment values ​​of the X-axis and Z-axis coordinates based on the initial values ​​and a predetermined offset value, inputting the adjustment values ​​of the X-axis and Z-axis coordinates into the machine tool's CNC system, and positioning the spectral confocal probe on the microstructured features of the parts. This method enables online measurement of the microstructured features of parts machined on an ultra-precision single-point diamond lathe, improving the practicality of the machine tool and saving measurement investment costs. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0025] Figure 1 A schematic diagram of the calibration component provided in this application;

[0026] Figure 2 A schematic diagram of the microscope head positioning measurement provided in this application;

[0027] Figure 3 A front-view schematic diagram of the spectral confocal probe for precise measurement provided in this application;

[0028] Figure 4 The top view of the machine tool provided in this application;

[0029] Figure 5 This is a schematic diagram showing the microscope head and spectral confocal probe provided in this application fixed on the machine tool housing.

[0030] Reference numerals in the attached figures: 1-calibration component; 2-microstructure feature component; 3-microscope head and tooling; 4-spectral confocal probe and tooling; 5-measuring fixture; 6-machine tool spindle; 7-machine tool table; 8-machine tool housing; 9-microscope head and tooling suspension point; 10-spectral confocal probe and tooling suspension point. Detailed Implementation

[0031] In the following description, specific details such as particular system architectures and techniques are set forth for illustrative purposes and not for limitation, in order to provide a thorough understanding of the embodiments of this application. However, those skilled in the art will understand that this application may also be implemented in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of this application with unnecessary detail.

[0032] It should be understood that, when used in this application specification and the appended claims, the term "comprising" indicates the presence of the described features, integrals, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or a collection thereof.

[0033] Furthermore, in the description of this application and the appended claims, the terms "first," "second," "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0034] References to "one embodiment" or "some embodiments" in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized. "A plurality" means "two or more."

[0035] This application provides an online measurement method for microstructure feature parts, which can realize online measurement of microstructure features after machining microstructure feature parts on an ultra-precision single-point diamond lathe, improve the practicality of the machine tool, and save measurement investment costs.

[0036] The specific embodiments of this application will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this application, but are not intended to limit the scope of this application.

[0037] The online measurement method for microstructured parts provided in this application includes: installing a microscope head on a machine tool fixture, controlling the movement of the machine tool's X and Z axes to observe and locate the microstructures of the parts, and recording the initial values ​​of the machine tool's X and Z axis coordinates; disassembling the microscope head and reinstalling a spectral confocal probe, determining the adjustment values ​​of the machine tool's X and Z axis coordinates based on the initial values ​​and a predetermined offset value; inputting the adjustment values ​​of the machine tool's X and Z axis coordinates into the machine tool's CNC system, and positioning the spectral confocal probe on the microstructures of the parts.

[0038] In some embodiments, before mounting the microscope head on the machine tool fixture, controlling the movement of the machine tool's X and Z axes, observing and locating the microscopic features of the parts, and recording the initial values ​​of the machine tool's X and Z axis coordinates, the method further includes: calibrating the microscope head and the spectral confocal probe respectively using calibration components, and determining the offset value of the spectral confocal probe relative to the microscope head in the machine tool coordinate system.

[0039] In some embodiments, the calibration of the microscope head and the spectral confocal probe using a calibration device to determine the offset value of the spectral confocal probe relative to the microscope head in the machine tool coordinate system includes: mounting the microscope head on the machine tool fixture, adjusting the up-and-down movement of the microscope head, controlling the X-axis and Z-axis movement of the machine tool, calibrating the microscope head using a calibration device, and recording the X-axis coordinate of the machine tool. M and Z-axis coordinates Z M Disassemble the microscope head and reinstall the spectral confocal probe. Adjust the up-and-down movement of the spectral confocal probe to control the X and Z axes of the machine tool. Use calibration components to calibrate the spectral confocal probe and record the X-axis coordinates of the machine tool. P and Z-axis coordinates Z P Determine the offset value X of the spectral confocal probe relative to the microscope head in the machine tool coordinate system. offset =X P -X M Z offset =Z P -Z M .

[0040] In some embodiments, the step of calibrating the microscope head and the spectral confocal probe using a calibration component to determine the offset value of the spectral confocal probe relative to the microscope head in the machine tool coordinate system further includes: fixing a calibration component with a cross mark in the middle on the machine tool spindle and adjusting the calibration component to be aligned with the machine tool spindle.

[0041] In some embodiments, the alignment accuracy between the calibration element and the machine tool spindle is better than 1 micrometer.

[0042] In some embodiments, calibrating the microscope head using a calibration member includes aligning the microscope head with the crosshairs of the calibration member, wherein the image center of the microscope head is the crosshairs of the calibration member.

[0043] In some embodiments, calibrating the spectral confocal probe using a calibration element includes aligning the spectral confocal probe with the center of the crosshairs of the calibration element, and ensuring that the measurement reading of the spectral confocal probe is in the middle of its range.

[0044] In some embodiments, the step of inputting the adjustment values ​​of the X-axis and Z-axis coordinates of the machine tool into the CNC system of the machine tool and positioning the spectral confocal probe after the micro-feature of the part further includes: measuring the micro-feature by planning a measurement program and analyzing and calculating the measurement data to obtain the height data of the micro-feature.

[0045] like Figures 1 to 5 As shown, the online measurement method for microstructured feature parts provided in this application includes:

[0046] Calibration of the relative positions of the microscope head and the spectral confocal probe: Fix calibration component 1 to the machine tool spindle 6 and adjust calibration component 1 to be aligned with the machine tool spindle 6; install microscope head 3 on the machine tool fixture 7, and adjust the up-and-down movement of the microscope head fixture, the X-axis movement of the machine tool, and the Z-axis movement of the machine tool so that microscope head 3 is aligned with the crosshair of calibration component 1, the image of microscope head 3 is clear, and the image center is the crosshair of calibration component 1, and record the X-axis and Z-axis coordinates of the machine tool; install spectral confocal probe 4 at the same position on the machine tool fixture 7, and adjust the up-and-down movement of the spectral confocal probe fixture, the X-axis movement of the machine tool, and the Z-axis movement of the machine tool so that spectral confocal probe 4 is aligned with the center of the crosshair of calibration component 1, the reading of spectral confocal probe 4 is in the middle of the range, and record the X-axis and Z-axis coordinates of the machine tool; determine the offset value of the spectral confocal probe relative to the microscope head in the machine tool coordinate system.

[0047] Online measurement of microstructure features: After the machine tool processes the microstructure feature part 2, a microscope head 3 is installed on the machine tool fixture table 7. The machine tool moves along the X-axis and Z-axis to observe and locate the microstructure features of the part, and the initial values ​​of the X-axis and Z-axis coordinates are recorded. The microscope head 3 is removed from the machine tool fixture table 7, and a spectral confocal probe 4 is installed. Based on the initial values ​​and offset values ​​of the X-axis and Z-axis coordinates, the adjustment values ​​of the X-axis and Z-axis coordinates are input to position the spectral confocal probe 4 on the microstructure features of the part. The microstructure features are measured through a planned measurement program, and the height data of the microstructure features is obtained by analyzing and calculating the measurement data.

[0048] The microscope lens has a large field of view, enabling the identification of step features in a two-dimensional plane. Using the microscope lens, a spectral confocal probe can be quickly positioned at the microstructural features of a part. This application calibrates the relative positions of the microscope lens and the spectral confocal probe on a machine tool. During measurement, the microscope lens is first used to observe and locate the microstructural features, and then the spectral confocal probe is used to measure the microstructural features to obtain their height data. By installing a microscope lens, a spectral confocal probe, and tooling and calibration components on an ultra-precision single-point diamond lathe, online measurement of microstructural feature parts can be achieved, saving measurement costs and improving the practicality of the ultra-precision single-point diamond lathe.

[0049] The following is combined Figures 1 to 5 Specific embodiments of this application will be described in further detail.

[0050] Example

[0051] Relative position calibration of the microscope head and the spectral confocal probe: Calibration component 1 is fixed to the machine tool spindle 6. Calibration component 1 has a crosshair in the center. Adjust calibration component 1 to align with the machine tool spindle 6, with an alignment accuracy better than 1 micrometer. Install the microscope head 3 and the fixture on the measuring fixture 5 of the machine tool fixture table 7. Adjust the movement of the fixture of microscope head 3 along the Y-axis, X-axis, and Z-axis of the machine tool until the microscope head 3 is aligned with the crosshair on calibration component 1. Continue until the image from microscope head 3 is clear and the center of the image is at the crosshair on calibration component 1. Record the X-axis coordinate of the machine tool. M Machine tool Z-axis coordinate M Remove the microscope head 3 and fixture from the machine tool fixture table 7 and place them at the machine tool outer cover fixing point. Remove the spectral confocal probe 4 and fixture from the machine tool outer cover fixing point. Install the spectral confocal probe 4 and fixture on the measuring fixing fixture 5 of the machine tool fixture table 7. By adjusting the movement of the fixture of the spectral confocal probe 4 along the Y-axis, X-axis, and Z-axis of the machine tool, align the spectral confocal probe 4 with the crosshair center of the calibration piece 1. When the measurement reading of the spectral confocal probe 4 is in the middle of its range, record the X-axis coordinate of the machine tool. P Machine tool Z-axis coordinate P The offset X of the spectral confocal probe 4 relative to the microscope head 3 in the machine tool coordinate system. offset =X P -X M Z offset =Z P -Z M .

[0052] Online measurement of microstructured parts: After the microstructured part 2 is machined, a microscope head 3 is installed on the machine tool fixture 7. The machine tool moves along the X-axis and Z-axis to observe and locate the microstructured features of the part, recording the X-axis coordinate X1 and Z-axis coordinate Z2. The microscope head 3 and fixture are removed from the machine tool fixture and placed on the machine tool outer cover. A spectral confocal probe 4 and its fixture are then installed on the measuring fixture 5 on the machine tool fixture 7. The calculation is X2 = X1 + X... offset Z2 = Z1 + Z offset， Input the X-axis positioning coordinates X2 and Z-axis positioning coordinates Z2 into the CNC system of the machine tool, position the spectral confocal probe 4 on the micro-feature of the part, measure the micro-feature by planning the measurement program, and analyze and calculate the measurement data to obtain the height data of the micro-feature.

[0053] The online measurement method for microstructural features of parts provided in this application involves installing a measuring fixture, a microscope head and fixture, a spectral confocal probe and fixture, and a calibration component on an ultra-precision single-point diamond lathe. The calibration component is used to calibrate the positions of the microscope head and the spectral confocal probe. During measurement, the microscope head positions the microstructural features of the part, and the spectral confocal probe accurately measures these features. This method enables online measurement of microstructural features of parts on an ultra-precision single-point diamond lathe, improving the applicability of the machine tool and saving measurement investment costs.

[0054] It should be clarified that the various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. This application is not limited to the specific structures described above and shown in the figures. Furthermore, for the sake of brevity, detailed descriptions of known methods and techniques are omitted here.

[0055] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. A method for online measurement of microstructure feature parts, characterized in that, include: The microscope head and the spectral confocal probe were calibrated using calibration components to determine the offset value of the spectral confocal probe relative to the microscope head in the machine tool coordinate system. A microscope head is installed on the machine tool fixture table, and the X-axis and Z-axis of the machine tool are controlled to observe and locate the microscopic features of the parts, and the initial values ​​of the X-axis and Z-axis coordinates of the machine tool are recorded. Disassemble the microscope head and reinstall the spectral confocal probe. Based on the initial values ​​of the X-axis and Z-axis coordinates of the machine tool and the predetermined offset values, determine the adjustment values ​​of the X-axis and Z-axis coordinates of the machine tool. Input the adjustment values ​​of the X-axis and Z-axis coordinates of the machine tool into the CNC system of the machine tool, and position the spectral confocal probe on the micro-features of the part; The step of calibrating the microscope head and the spectral confocal probe using calibration components to determine the offset value of the spectral confocal probe relative to the microscope head in the machine tool coordinate system includes: Install the microscope head on the machine tool fixture, adjust the up-and-down movement of the microscope head, control the X and Z axis movements of the machine tool, calibrate the microscope head using calibration components, and record the X-axis coordinates of the machine tool. M and Z-axis coordinates Z M ; Disassemble the microscope head and reinstall the spectral confocal probe. Adjust the vertical movement of the spectral confocal probe and control the X and Z axes of the machine tool. Use calibration components to calibrate the spectral confocal probe and record the X-axis coordinates of the machine tool. P and Z-axis coordinates Z P ; Determine the offset value X of the spectral confocal probe relative to the microscope head in the machine tool coordinate system. offset =X P -X M Z offset =Z P -Z M .

2. The online measurement method for microstructure feature parts as described in claim 1, characterized in that, The step of calibrating the microscope head and the spectral confocal probe using calibration components to determine the offset value of the spectral confocal probe relative to the microscope head in the machine tool coordinate system also includes: Fix a calibration piece with a cross mark in the middle on the machine tool spindle, and adjust the calibration piece to be aligned with the machine tool spindle.

3. The online measurement method for microstructure feature parts as described in claim 2, characterized in that, The alignment accuracy between the calibration component and the machine tool spindle is better than 1 micrometer.

4. The online measurement method for microstructure feature parts as described in claim 2, characterized in that, The calibration of the microscope head using a calibration device includes: This ensures that the microscope head is aligned with the crosshairs of the calibration piece, and the image center of the microscope head is the crosshairs of the calibration piece.

5. The online measurement method for microstructure feature parts as described in claim 2, characterized in that, The calibration of the spectral confocal probe using a calibration device includes: This ensures that the spectral confocal probe is aligned with the center of the crosshairs on the calibration piece, and that the measurement reading of the spectral confocal probe is in the middle of its range.

6. The online measurement method for microstructure feature parts as described in claim 1, characterized in that, The step of inputting adjustment values ​​for the X-axis and Z-axis coordinates of the machine tool into the CNC system to position the spectral confocal probe after the microscopic features of the part also includes: The height data of the micro-features are obtained by measuring the micro-features through a planned measurement procedure and analyzing the measurement data.

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