A light emitting stage optical module for a carrier board yield detection

Abstract

The application discloses a light-emitting carrier optical module for carrier plate yield detection, which comprises a base, a light-emitting carrier, a driving mechanism, a backlight source assembly, two side light sources and a suction assembly, the light-emitting carrier is configured to carry and suck a fixed carrier plate, and a plurality of suction holes are arranged on the carrying surface of the light-emitting carrier; a detection station is arranged on the base, the driving mechanism drives the light-emitting carrier to move to or away from the detection station; the backlight source assembly is arranged at the detection station and is configured to light upward to the light-emitting carrier; the two side light sources are arranged on the two sides of the detection station respectively and are configured to light to the light-emitting carrier on the two sides of the detection station to implement light enhancement on the plurality of suction holes; the light-emitting carrier optical module is additionally provided with the side light sources on the two sides of the detection station, the light-emitting carrier is lighted on the two sides by the two side light sources, the brightness of the plurality of suction holes is increased, the shadow of the holes is reduced, and the detection precision of the carrier plate is improved.

Description

Technical Field

[0001] This application belongs to the field of visual inspection technology, and in particular relates to an optical module for a light-emitting stage used for substrate yield inspection. Background Technology

[0002] In modern electronics manufacturing, substrates serve as crucial support and connection carriers for various electronic components, and their quality and yield directly determine the performance and reliability of electronic products. As electronic products evolve towards miniaturization and high performance, stringent requirements are placed on the manufacturing precision and quality control of substrates. During substrate manufacturing, minor defects, short circuits, open circuits, and other flaws can easily affect substrate performance.

[0003] With the development of machine vision inspection technology, some machine vision-based inspection systems have been applied to carrier plate inspection. Due to the thinness of the carrier plate, a backlit light source inspection scheme has been developed based on the traditional machine vision inspection system, namely a light-emitting stage (with a light source placed under the glass stage). However, the backlit inspection scheme has suction holes on the bearing surface of the stage. When the backlight shines upwards, the light passes through the suction holes and forms shadows, affecting the inspection accuracy of the carrier plate and failing to meet the high-precision requirements of carrier plate yield inspection. Summary of the Invention

[0004] The purpose of this application is to provide an optical module for a light-emitting stage for substrate yield testing, so as to solve the problem that existing optical modules for substrate yield testing cannot meet the requirements of high-precision testing.

[0005] To achieve this objective, the following technical solution is adopted in this application: This application proposes an optical module for a light-emitting stage used for substrate yield testing, comprising a base, a light-emitting stage, a driving mechanism, a backlight assembly, two side light sources, and an adsorption assembly, wherein: The light-emitting stage is configured to support and adsorb the carrier plate to be detected. An air extraction chamber is provided on the light-emitting stage. Multiple adsorption holes are opened on the bearing surface of the light-emitting stage. The adsorption component is configured to extract air from the air extraction chamber to adsorb and fix the carrier plate on the bearing surface of the light-emitting stage through the multiple adsorption holes. The base is provided with a detection station, the light-emitting stage is slidably mounted on the base along a first horizontal direction, the driving mechanism is mounted on the base, the driving end of the driving mechanism is connected to the light-emitting stage, and the driving mechanism is configured to drive the light-emitting stage to slide along the first horizontal direction so that the light-emitting stage moves to or away from the detection station. The backlight assembly is disposed at the detection station and is configured to illuminate the light-emitting stage located at the detection station from the upward direction. The two side light sources are respectively disposed on both sides of the detection station along the first horizontal direction. The two side light sources are configured to illuminate the light-emitting stage located at the detection station from both sides of the detection station, so as to enhance the brightness of the plurality of adsorption holes.

[0006] Optionally, the adsorption component is disposed on at least one side of the light-emitting stage along the first horizontal direction, and the adsorption component includes at least one gas guiding channel and a gas guiding component, wherein: The gas guiding channel is disposed on the light-emitting platform, and the first end of the gas guiding channel is connected to the air extraction chamber; The air guiding assembly includes an air guiding block and an air extraction pipe. The air guiding block is installed on one side of the light-emitting stage along the first horizontal direction and is located below the side light source on that side in the height direction. The air inlet end of the air guiding block is connected to the second end of the air guiding channel. The first end of the air extraction pipe is connected to the air outlet end of the air guiding block, and the second end of the air extraction pipe is connected to an air extraction device.

[0007] Optionally, the light-emitting stage includes a glass stage and two support members, wherein: The glass stage is configured to support and adsorb the plate to be tested, the air extraction chamber is disposed on the glass stage, and the plurality of adsorption holes are formed on the supporting surface of the glass stage. The two support members are spaced apart along the second horizontal direction, and the bottom ends of the two support members are slidably mounted on the base along the first horizontal direction. The driving end of the driving mechanism is connected to at least one of the support members, and the top ends of the two support members are respectively fixed at both ends of the glass stage along the second horizontal direction. The first horizontal direction is perpendicular to the second horizontal direction.

[0008] Optionally, the air guiding channel includes a first channel and a second channel, wherein: The first channel is formed on the glass stage, and the first end of the first channel is connected to the air extraction chamber. The second channel is formed on the support member, and the air guide block is horizontally installed on the outer side of the support member. The first end of the second channel is connected to the second end of the first channel, and the second end of the second channel is connected to the air guide block.

[0009] Optionally, the glass stage is generally square in structure, and includes a frame, an upper glass plate, and a lower glass plate, wherein: The upper glass plate is detachably fixed to the top surface of the frame by a first fixing component, and the lower glass plate is detachably and sealed to the bottom surface of the frame by a second fixing component. The upper glass plate, the frame, and the lower glass plate form the air extraction cavity, and the plurality of adsorption holes are formed on the upper glass plate. The first channel is formed on the frame, the air inlet of the first channel is located on the inner side of the frame, the air outlet of the first channel is located on the bottom surface of the frame, the air inlet of the second channel is located on the top surface of the support member, the air outlet of the first channel is sealed and connected to the air inlet of the second channel, the air outlet of the second channel is located on the outer side of the support member, and the air inlet end of the air guide block covers all the air outlets of the second channel.

[0010] Optionally, the first fixing component includes four clamping members, which are detachably fixed to the four corners of the frame by fixing screws. The bottom surface of each clamping member presses against a corresponding corner of the upper glass plate to fix the upper glass plate to the frame.

[0011] Optionally, a square mounting groove is provided on the bottom surface of the frame, the second fixing component includes several pressure plates, the side of the lower glass plate is fixedly installed in the mounting groove by the several pressure plates, and a sealing ring is provided between the lower glass plate and the mounting groove.

[0012] Optionally, the frame is provided with a plurality of mounting holes, and the top surface of the support member is provided with a plurality of first threaded holes. Each mounting hole corresponds to one first threaded hole. The locking screw passes through the mounting hole and is locked in the corresponding first threaded hole to fix the frame on the top surface of the support member. The frame is also provided with several second threaded holes, and each second threaded hole is equipped with a leveling screw, the bottom end of which abuts against the end face of the support member.

[0013] Optionally, the backlight assembly includes a lifting drive and a backlight source, wherein: The fixed end of the lifting drive component is mounted on the base, and the driving end of the lifting drive component is connected to the backlight source. The lifting drive component is configured to drive the backlight source to rise and fall.

[0014] Optionally, the backlight source is a parallel light source, and the incident angle of the backlight source is -4° to +4°.

[0015] The beneficial effects of the adsorption structure of the light-emitting stage proposed in this application are as follows: 1) Add side light sources on both sides of the inspection station. The two side light sources illuminate the light-emitting stage from both sides, thereby increasing the brightness of multiple adsorption holes, reducing the shadows of the holes, and improving the inspection accuracy of the carrier plate. 2) The backlight uses a parallel light source, which makes the backlight illumination more uniform, further reduces the shadow of the hole, helps to illuminate the adsorption hole, and further improves the detection accuracy of the carrier plate. 3) By adjusting the incident angle of the backlight, the field of view of the backlight is increased; 4) The air extraction path has been optimized so that the light-emitting stage will not interfere with the two side light sources when it moves in the first horizontal direction, which can meet the application scenarios where the side light sources are set on the side of the light-emitting stage. 5) The upper glass panel is fixedly pressed and secured at the four corners by four clamping parts, which realizes the fixed installation of the upper glass panel on the frame without the need to open mounting holes in the upper glass panel, avoiding damage to the upper glass panel during assembly. It is not only simple in structure and easy to disassemble and assemble, but also ensures the light transmission performance of the upper glass panel. 6) The upper glass plate and the frame are in hard contact, which avoids the impact of soft contact between the two on the flatness of the upper glass plate, ensuring the flatness of the upper glass plate and improving the detection accuracy of the carrier plate. 7) Leveling screws are installed between the upper glass plate and the support, which allows for adjustment of the flatness of the upper glass plate; 8) The backlight can be raised and lowered to adjust the distance between the backlight and the glass platform, so that the backlight is at a suitable lighting height. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural schematic diagram of the light-emitting stage optical module for carrier yield detection provided in the embodiments of this application; Figure 2 This is a three-dimensional structural schematic diagram of the light-emitting stage of the optical module of the light-emitting stage for carrier board yield detection provided in the embodiments of this application; Figure 3 This is a side view schematic diagram of the light-emitting stage of the optical module of the light-emitting stage for carrier board yield detection provided in the embodiments of this application; Figure 4 yes Figure 3 A cross-sectional schematic diagram of AA in the middle; Figure 5 This is a three-dimensional structural schematic diagram of the frame of the light-emitting stage optical module for carrier yield detection provided in the embodiments of this application; Figure 6 This is a top view schematic diagram of the frame of the light-emitting stage optical module for carrier yield detection provided in the embodiments of this application; Figure 7This is a three-dimensional structural schematic diagram of the support component for the light-emitting stage optical module used for carrier yield detection provided in an embodiment of this application; Figure 8 This is a three-dimensional structural diagram of the upper glass plate of the light-emitting stage optical module for carrier yield detection provided in the embodiments of this application; Figure 9 This is a three-dimensional structural schematic diagram of the clamping component of the light-emitting stage optical module for carrier yield detection provided in the embodiments of this application; Figure 10 This is a bottom view schematic diagram of the light-emitting stage of the optical module of the light-emitting stage for carrier yield detection provided in the embodiments of this application.

[0017] Figures 1 to 10 The following reference numerals are included: Base 10: Inspection Station 11; Light-emitting stage 20: suction chamber 21, adsorption hole 22, glass stage 23, frame 230, upper glass plate 231, lower glass plate 232, notch 233, third threaded hole 234, mounting groove 235, fourth threaded hole 236, second sealing groove 237, mounting hole 238, second threaded hole 239, support member 24, first threaded hole 240; Drive mechanism 30; Backlight assembly 40: lifting drive component 41, backlight source 42; Side light source 50; bracket 51; Adsorption component 60: gas guiding channel 61, first channel 610, second channel 611, first sealing groove 612, gas guiding component 62, gas guiding block 620, gas extraction pipeline 621, pressure detection element 622; Clamping component 70: mounting part 71, clamping part 72, first clamping block 720, second clamping block 721, through hole 73, pressure plate 74. Detailed Implementation

[0018] To make the technical problems solved by this application, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of this application will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0019] This application proposes an optical module for a light-emitting stage used for substrate yield testing. Please refer to [link to relevant documentation]. Figures 1 to 4As shown, the optical module for light-emitting stage for carrier yield testing proposed in this application includes a base 10, a light-emitting stage 20, a driving mechanism 30, a backlight assembly 40, two side light sources 50, and an adsorption assembly 60. The light-emitting stage 20 is configured to support and adsorb the carrier to be tested. An air extraction chamber 21 is provided on the light-emitting stage 20, and multiple adsorption holes 22 are opened on the bearing surface of the light-emitting stage 20. The adsorption assembly 60 is configured to extract air from the air extraction chamber 21 to adsorb and fix the carrier to the bearing surface of the light-emitting stage 20 through the multiple adsorption holes 22. A testing station 11 is provided on the base 10, and the light-emitting stage 20 can move along a first horizontal direction (…). Figure 1 The light source 20 is slidably mounted on the base 10 in the X direction. The drive mechanism 30 is mounted on the base 10. The drive end of the drive mechanism 30 is connected to the light-emitting stage 20. The drive mechanism 30 is configured to drive the light-emitting stage 20 to slide along the first horizontal direction so that the light-emitting stage 20 moves to or away from the detection station 11. The backlight assembly 40 is disposed at the detection station 11 and is configured to illuminate the light-emitting stage 20 at the detection station 11 upwards. Two side light sources 50 are respectively disposed on both sides of the detection station 11 along the first horizontal direction. The two side light sources 50 are configured to illuminate the light-emitting stage 20 at the detection station 11 from both sides of the detection station 11 to enhance the brightness of the multiple adsorption holes 22.

[0020] Specifically, each of the two sides of the testing station 11 is vertically equipped with a bracket 51 in the first horizontal direction. Each bracket 51 corresponds to a side light source 50. The side light source 50 is installed on the top of the bracket 51. The installation height and / or installation angle of the side light source 50 relative to the bracket 51 is adjustable.

[0021] Specifically, the drive mechanism 30 can be a ball screw type linear module or a synchronous belt type linear module.

[0022] The optical module of the light-emitting stage for carrier yield detection proposed in this application adds two side light sources 50 to both sides of the detection station 11. When the light-emitting stage 20 moves to the detection station 11 to detect the carrier on it, the two side light sources 50 illuminate the light-emitting stage 20 from both sides of the detection station 11, thereby increasing the brightness of multiple adsorption holes 22, reducing the shadow of the holes, improving the detection accuracy of the carrier, and meeting the high-precision detection requirements of the carrier.

[0023] In one embodiment, the adsorption component 60 is disposed on at least one side of the light-emitting stage 20 along the first horizontal direction. The adsorption component 60 includes at least one air guiding channel 61 and an air guiding component 62. The air guiding channel 61 is disposed on the light-emitting stage 20, and the first end of the air guiding channel 61 is connected to the air extraction chamber 21. The air guiding component 62 includes an air guiding block 620 and an air extraction pipe 621. The air guiding block 620 is installed on one side of the light-emitting stage 20 along the first horizontal direction and is located below the side light source 50 on that side in the height direction. The air inlet end of the air guiding block 620 is connected to the second end of the air guiding channel 61. The first end of the air extraction pipe 621 is connected to the air outlet end of the air guiding block 620, and the second end of the air extraction pipe 621 is connected to an air extraction device.

[0024] As can be seen, the air extraction device extracts air from the air extraction chamber 21 through the air extraction pipe 621, the air guide block 620, and the air guide channel 61, thereby achieving the adsorption and fixation of the carrier plate on the bearing surface of the light-emitting stage 20. By installing the air guide block 620 on the side of the light-emitting stage 20 and setting the air guide block 620 to be located below the side light source 50 in the height direction, it can avoid the light-emitting stage 20 when it moves in the first horizontal direction, which can meet the application scenario where the side of the light-emitting stage 20 is equipped with a side light source.

[0025] In one embodiment, the light-emitting stage 20 includes a glass stage 23 and two support members 24. The glass stage 23 is configured to support and adsorb the plate to be detected. A suction chamber 21 is disposed on the glass stage 23, and multiple adsorption holes 22 are formed on the supporting surface of the glass stage 23. The two support members 24 are arranged along a second horizontal direction ( Figure 1 The two support members 24 are spaced apart in the Y direction. The bottom ends of the two support members 24 are slidably mounted on the base 10 in the first horizontal direction. The driving end of the driving mechanism 30 is connected to at least one support member 24. The top ends of the two support members 24 are respectively fixed to the two ends of the glass stage 23 in the second horizontal direction. The first horizontal direction is perpendicular to the second horizontal direction.

[0026] Specifically, a support guide pair consisting of a linear guide rail or a slider is provided between the bottom end of each of the two support members 24 and the base 10. The linear guide rail is laid on the base 10 along the first horizontal direction, and the slider is installed at the bottom end of the support member 24 and sleeved on the linear guide rail, thereby improving the stability of the light-emitting stage 20 sliding along the first horizontal direction of the base 10.

[0027] By setting two support members 24, stable and reliable support is achieved for both ends of the glass stage 23 along the second horizontal direction, ensuring the smoothness of the glass stage 23 moving along the first horizontal direction.

[0028] In one embodiment, the air guiding channel 61 includes a first channel 610 and a second channel 611. The first channel 610 is formed on the glass stage 23, and the first end of the first channel 610 is connected to the air extraction chamber 21. The second channel 611 is formed on the support member 24, and the air guiding block 620 is horizontally installed on the outer side of the support member 24. The first end of the second channel 611 is connected to the second end of the first channel 610, and the second end of the second channel 611 is connected to the air guiding block 620.

[0029] Specifically, the air guide block 21 is a hollow square structure.

[0030] By configuring the gas guiding channel 61 to include a first channel 610 and a second channel 611, with the first channel 610 located on the glass stage 23 and the second channel 611 located on the support member 24, the gas guiding channel 61 is integrated into the glass stage 23 and the support member 24. This does not occupy the external space of the light-emitting stage 20, resulting in a compact structure, small footprint, and reasonable layout. Furthermore, it is easy to process, has good sealing properties, and is beneficial for improving the adsorption effect of the light-emitting stage 20.

[0031] Please see Figure 2 , Figures 4 to 7 as well as Figure 10 As shown, in one embodiment, the glass stage 23 has a square structure and includes a frame 230, an upper glass plate 231, and a lower glass plate 232. The upper glass plate 231 is detachably fixed to the top surface of the frame 230 by a first fixing component, and the lower glass plate 232 is detachably and sealed to the bottom surface of the frame 230 by a second fixing component. The upper glass plate 231, the frame 230, and the lower glass plate 232 form an air extraction chamber 21, and multiple adsorption holes 22 are formed on the upper glass plate. 231; The first channel 610 is opened on the frame 230. The air inlet of the first channel 610 is located on the inner side of the frame 230, and the air outlet of the first channel 610 is located on the bottom surface of the frame 230. The air inlet of the second channel 611 is located on the top surface of the support member 24. The air outlet of the first channel 610 and the air inlet of the second channel 611 are sealed and connected. The air outlet of the second channel 611 is located on the outer side of the support member 24. The air inlet end of the air guide block 21 covers all the air outlets of the second channel 611.

[0032] Specifically, both the first channel 610 and the second channel 611 extend along the first horizontal direction. The cross-sections of the first channel 610 and the second channel 611 in the vertical direction are both "L" shaped to form an air extraction path with a "Z" shaped cross-section, thereby reducing the processing difficulty of the first channel 610 and the second channel 611.

[0033] Specifically, a first sealing groove 612 is provided at the air inlet of the second channel 611, and a first sealing ring is provided in the first sealing groove 612. The air outlet of the first channel 610 is sealed and connected to the air inlet of the second channel 611 through the first sealing ring, so as to ensure the sealing of the connection between the first channel 610 and the second channel 611.

[0034] By placing the air inlet of the first channel 610 on the inner side of the frame 230 and the air outlet of the first channel 610 on the bottom surface of the frame 230, the processing difficulty of the first channel 610 is reduced, making the processing of the first channel 610 easier. By placing the air inlet of the second channel 611 on the top surface of the support member 24 and the air outlet of the second channel 611 on the outer surface of the support member 24, the processing difficulty of the second channel 611 is reduced, making the processing of the second channel 611 easier.

[0035] Please see Figure 2 , Figures 5 to 9 As shown, in one embodiment, the first fixing component includes four clamping members 70. The four clamping members 70 are detachably fixed to the four corners of the frame 230 by fixing screws. The bottom surface of each clamping member 70 presses against a corresponding corner of the upper glass plate 231 to fix the upper glass plate 231 to the frame 230.

[0036] Specifically, the clamping component 70 includes a mounting part 71 and a clamping part 72. Notches 233 for avoiding and limiting the mounting part 71 are provided at the four corners of the upper glass plate 231. The mounting part 71 has a through hole 73, and the frame 230 has a third threaded hole 234. The through hole 73 and the third threaded hole 234 are correspondingly arranged. The fixing screw passes through the through hole 73 and is locked in the corresponding third threaded hole 234 to fix the mounting part 71 on the frame 230. The clamping part 72 is located at the top of the mounting part 71 and close to the upper glass plate 231. The clamping part 72 includes a vertically arranged first pressing block 720 and a second pressing block 721. The first pressing block 720 and the second pressing block 721 respectively clamp the two sides of a corresponding corner of the upper glass plate 231, thereby providing stability and reliability of the clamping component 70.

[0037] The upper glass plate 231 is pressed and fixed to the frame 230 by four clamping parts 70, which realizes the fixed installation of the upper glass plate 231 on the frame 230. The structure is simple and easy to operate. Compared with the conventional method of opening multiple through holes on the edge of the upper glass plate 231 and fixing it with screws, there is no need to open holes in the upper glass plate 231. This reduces the unnecessary processing of the upper glass plate 231 before opening the adsorption hole 22, and effectively avoids the damage to the upper glass plate 231 caused by the force applied when the screws of the upper glass plate 231 are downward or rotated. Moreover, the upper glass plate 231 and the frame 230 have a hard contact, which avoids the influence of the soft contact between the two on the flatness of the upper glass plate 231, ensuring the flatness of the upper glass plate 231 and helping to improve the detection accuracy of the carrier plate.

[0038] Please see Figure 6 and Figure 10 As shown, in one embodiment, a square mounting groove 235 is provided on the bottom surface of the frame 230. The second fixing component includes several pressure plates 74. The side of the lower glass plate 232 is fixedly installed in the mounting groove 235 by several pressure plates 74. A sealing ring is provided between the lower glass plate 232 and the mounting groove 235.

[0039] Specifically, the four sides of the lower glass plate 232 are fixedly installed in the mounting groove 235 by four pressure plates 74. Each pressure plate 74 presses against one side of the lower glass plate 232. Several mounting holes are opened through the pressure plate 74. A fourth threaded hole 236 is opened in the mounting groove 235. The fixing screw passes through the mounting hole and is locked in the corresponding fourth threaded hole 236 to press the pressure plate 74 against the corresponding side of the lower glass plate 232, thereby fixing the lower glass plate 232 in the mounting groove 235.

[0040] Specifically, a square second sealing groove 237 is provided on the mounting groove 235, and a second sealing ring is installed in the second sealing groove 237 to achieve a sealed connection between the lower glass plate 232 and the frame 230.

[0041] By setting several pressure plates 235, a second fixing component with stable and reliable installation and uniform pressure distribution is provided. The structure is simple and easy to disassemble and assemble. At the same time, a sealing ring is set between the lower glass plate 232 and the mounting groove 235 to ensure the sealing of the connection between the lower glass plate 232 and the frame 230, which is conducive to the suction chamber 21 reaching the required negative pressure more quickly.

[0042] In one implementation, the frame 230 has a plurality of mounting holes 238, and the top surface of the support member 24 has a plurality of first threaded holes 240. Each mounting hole 238 corresponds to one first threaded hole 240. The locking screw passes through the mounting hole 238 and is locked in the corresponding first threaded hole 240 to fix the frame 230 on the top surface of the support member 24. The frame 230 also has a plurality of second threaded holes 239, and each second threaded hole 239 is fitted with a leveling screw. The bottom end of the leveling screw abuts against the end face of the support member 24.

[0043] The frame 230 is detachably fixed to the support 24 by locking screws. By setting leveling screws, the frame 230 is leveled by loosening the locking screws and rotating the leveling screws during adjustment, thereby adjusting the level of the upper glass plate 231, ensuring the flatness of the upper glass plate 231, and improving the detection accuracy of the carrier plate.

[0044] Please see Figure 1 and Figure 2 As shown, in one embodiment, the backlight assembly 40 includes a lifting drive 41 and a backlight source 42, wherein: the fixed end of the lifting drive 41 is mounted on the base 10, the driving end of the lifting drive 41 is connected to the backlight source 42, and the lifting drive 41 is configured to drive the backlight source 42 to move up and down.

[0045] Specifically, the lifting drive unit 41 adopts a manual or automatic linear lifting module.

[0046] The lifting drive component 41 drives the backlight source 42 to rise and fall, thereby adjusting the distance between the backlight source 42 and the glass stage 23, so that the backlight source 42 is at a suitable lighting height.

[0047] In one implementation, the backlight source 42 is a parallel light source, and the incident angle of the backlight source 42 is -4° to +4°, preferably -4°, -3°, -2°, -1°, +1°, +2°, +3° or +4°.

[0048] By setting the backlight source 42 as a parallel light source, the backlight illumination becomes more uniform, further reducing the shadows on the holes and facilitating the illumination of the adsorption holes, thereby further improving the detection accuracy of the carrier plate. At the same time, the setting of the incident angle of the backlight source 42 increases the field of view of the backlight source 42.

[0049] In one implementation, a pressure detection element 622 is installed on the air guide block 620. The detection end of the pressure detection element 622 is located inside the air guide block 620, and the pressure detection element 622 is configured to detect the air pressure inside the air guide block 620. Through the pressure detection element 622, the air pressure inside the air guide block 620 is detected, thereby controlling the operation of the air extraction device and ensuring that the adsorption force of the light-emitting stage 20 is always within a suitable range.

[0050] In one implementation, the outlet of the air guide block 620 is located on the bottom surface of the air guide block 620, and the suction pipe 621 extends from below the air guide block 620. This makes the inlet of the suction pipe 621 hidden below the air guide block 620, resulting in a neat appearance and reasonable layout.

[0051] The general working principle of the light-emitting stage optical module for carrier yield detection proposed in this application embodiment is as follows: S1, the drive mechanism 30 first drives the light-emitting stage 20 to move to the material picking station to receive the carrier plate to be tested, and the adsorption component 60 adsorbs and fixes the carrier plate on the light-emitting stage 20. S2, the drive mechanism 30 moves the light-emitting stage 20 and the carrier plate to the detection station 11, and the backlight assembly 40 and two side light sources 50 at the detection station 11 illuminate the light-emitting stage 20. S3, the camera above the inspection station 11 takes a picture of the carrier plate on the light-emitting stage 20, and then performs visual inspection on the carrier plate.

[0052] The above embodiments merely illustrate the basic principles and characteristics of this application. This application is not limited to the above examples. Various changes and modifications can be made to this application without departing from the spirit and scope thereof, and all such changes and modifications fall within the scope of this application as claimed. The scope of protection of this application is defined by the appended claims and their equivalents.

Claims

1. An optical module for a light-emitting stage used for substrate yield detection, characterized in that, The optical module for the light-emitting stage used for carrier yield detection includes a base, a light-emitting stage, a driving mechanism, a backlight assembly, two side light sources, and an adsorption assembly, wherein: The light-emitting stage is configured to support and adsorb the carrier plate to be detected. An air extraction chamber is provided on the light-emitting stage. Multiple adsorption holes are opened on the bearing surface of the light-emitting stage. The adsorption component is configured to extract air from the air extraction chamber to adsorb and fix the carrier plate on the bearing surface of the light-emitting stage through the multiple adsorption holes. The base is provided with a detection station, the light-emitting stage is slidably mounted on the base along a first horizontal direction, the driving mechanism is mounted on the base, the driving end of the driving mechanism is connected to the light-emitting stage, and the driving mechanism is configured to drive the light-emitting stage to slide along the first horizontal direction so that the light-emitting stage moves to or away from the detection station. The backlight assembly is disposed at the detection station and is configured to illuminate the light-emitting stage located at the detection station from the upward direction. The two side light sources are respectively disposed on both sides of the detection station along the first horizontal direction. The two side light sources are configured to illuminate the light-emitting stage located at the detection station from both sides of the detection station to enhance the brightness of the plurality of adsorption holes. The adsorption component is disposed on at least one side of the light-emitting stage along the first horizontal direction, and the adsorption component includes at least one gas guiding channel and a gas guiding component, wherein: The gas guiding channel is disposed on the light-emitting platform, and the first end of the gas guiding channel is connected to the air extraction chamber; The air guiding assembly includes an air guiding block and an air extraction pipe. The air guiding block is installed on one side of the light-emitting stage along the first horizontal direction and is located below the side light source on that side in the height direction. The air inlet end of the air guiding block is connected to the second end of the air guiding channel. The first end of the air extraction pipe is connected to the air outlet end of the air guiding block, and the second end of the air extraction pipe is connected to an air extraction device.

2. The light-emitting stage optical module for carrier yield detection according to claim 1, characterized in that, The light-emitting stage includes a glass stage and two support members, wherein: The glass stage is configured to support and adsorb the plate to be tested, the air extraction chamber is disposed on the glass stage, and the plurality of adsorption holes are formed on the supporting surface of the glass stage. The two support members are spaced apart along the second horizontal direction, and the bottom ends of the two support members are slidably mounted on the base along the first horizontal direction. The driving end of the driving mechanism is connected to at least one of the support members, and the top ends of the two support members are respectively fixed at both ends of the glass stage along the second horizontal direction. The first horizontal direction is perpendicular to the second horizontal direction.

3. The light-emitting stage optical module for carrier yield detection according to claim 2, characterized in that, The air guiding channel includes a first channel and a second channel, wherein: The first channel is formed on the glass stage, and the first end of the first channel is connected to the air extraction chamber. The second channel is formed on the support member, and the air guide block is horizontally installed on the outer side of the support member. The first end of the second channel is connected to the second end of the first channel, and the second end of the second channel is connected to the air guide block.

4. The light-emitting stage optical module for carrier yield detection according to claim 3, characterized in that, The glass stage is generally square in structure, and includes a frame, an upper glass plate, and a lower glass plate, wherein: The upper glass plate is detachably fixed to the top surface of the frame by a first fixing component, and the lower glass plate is detachably and sealed to the bottom surface of the frame by a second fixing component. The upper glass plate, the frame, and the lower glass plate form the air extraction cavity, and the plurality of adsorption holes are formed on the upper glass plate. The first channel is formed on the frame, the air inlet of the first channel is located on the inner side of the frame, the air outlet of the first channel is located on the bottom surface of the frame, the air inlet of the second channel is located on the top surface of the support member, the air outlet of the first channel is sealed and connected to the air inlet of the second channel, the air outlet of the second channel is located on the outer side of the support member, and the air inlet end of the air guide block covers all the air outlets of the second channel.

5. The light-emitting stage optical module for carrier yield detection according to claim 4, characterized in that, The first fixing component includes four clamping members, which are detachably fixed to the four corners of the frame by fixing screws. The bottom surface of each clamping member presses against a corresponding corner of the upper glass plate to fix the upper glass plate to the frame.

6. The light-emitting stage optical module for carrier yield detection according to claim 4, characterized in that, A square mounting groove is provided on the bottom surface of the frame. The second fixing component includes several pressure plates. The side of the lower glass plate is fixedly installed in the mounting groove by the several pressure plates. A sealing ring is provided between the lower glass plate and the mounting groove.

7. The light-emitting stage optical module for carrier yield detection according to claim 4, characterized in that, The frame has a plurality of mounting holes, and the top surface of the support member has a plurality of first threaded holes. Each mounting hole corresponds to one first threaded hole. The locking screw passes through the mounting hole and is locked in the corresponding first threaded hole to fix the frame on the top surface of the support member. The frame is also provided with several second threaded holes, and each second threaded hole is equipped with a leveling screw, the bottom end of which abuts against the end face of the support member.

8. The light-emitting stage optical module for carrier yield detection according to claim 1, characterized in that, The backlight assembly includes a lifting drive and a backlight source, wherein: The fixed end of the lifting drive component is mounted on the base, and the driving end of the lifting drive component is connected to the backlight source. The lifting drive component is configured to drive the backlight source to rise and fall.

9. The light-emitting stage optical module for carrier yield detection according to claim 8, characterized in that, The backlight source is a parallel light source, and the incident angle of the backlight source is -4° to +4°.

Images