A high-power radio frequency power supply system and a fast automatic frequency modulation method

Abstract

This invention relates to the field of radio frequency (RF) power supply technology, specifically to a high-power RF power supply system and a fast automatic frequency tuning method. The RF power supply system includes a power supply module, an RF signal driving module, an RF power amplification and synthesis module, a load signal V / I detection module, and a processor module. This invention provides a fast automatic frequency tuning method for RF power supplies, which rapidly and automatically adjusts the output frequency of the RF power supply to the optimal state by real-time detection of the reflection coefficient of a second modulation signal at a specific frequency, thereby ensuring the efficient and stable operation of the RF power supply system.

Description

Technical Field

[0001] This invention relates to the field of radio frequency power supply technology, specifically to a high-power radio frequency power supply system and a fast automatic frequency modulation method. Background Technology

[0002] Radio frequency (RF) power supplies are widely used in various electronic devices, such as communications, medical devices, semiconductor manufacturing, plasma etching, and scientific experiments. In these applications, RF power supplies need to output stable power according to load changes, and rapid automatic frequency modulation (AFM) is the core of this stable power output. Traditional frequency modulation determines the frequency through frequency sweeping. However, during frequency sweeping, the continuous changes in frequency cause fluctuations in the RF power supply's output power. These fluctuations can prevent the system from maintaining a stable power output, leading to a degradation in equipment performance. Especially in high-power power supply systems, during frequency sweeping, when the frequency is not optimal, the load characteristics change, and the power supply system generates significant power reflections, potentially damaging circuitry.

[0003] Patent CN113065237A relates to a method for automatically setting frequency modulation boundaries and an RF power supply. Its core principle is to change the frequency through frequency hopping, then detect voltage and current to determine the optimal frequency for load characteristics—an optimized adjustment method compared to ordinary frequency sweeping. However, during frequency hopping, the frequency changes rapidly and over a wide range within a short period, resulting in significant fluctuations in power output, affecting equipment performance, and even interfering with other devices, especially high-power RF power supplies. Furthermore, extensive calculations are still required after frequency hopping, inevitably introducing delays. For RF power supplies requiring rapid automatic frequency modulation, these delays can have a series of negative impacts. Therefore, this paper proposes a novel automatic frequency modulation method for high-power RF power supplies to improve system performance and stability. Summary of the Invention

[0004] The purpose of this invention is to provide a high-power radio frequency power supply system and a fast automatic frequency modulation method to solve the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution:

[0006] A high-power radio frequency power supply system includes: a power supply module, a signal driving module, a radio frequency power amplification and power combining module, a feedback signal V / I detection module, an AD sampling module, and a processor module;

[0007] In this system, the power supply can quickly and automatically adjust the output frequency of the main drive signal of the RF power supply to the optimal state by detecting the reflection coefficient of the second RF drive signal at a specific frequency in real time.

[0008] Preferably, the signal driving module includes a first radio frequency driving signal and a second radio frequency driving signal;

[0009] The radio frequency power amplification module includes a first power amplification module and a second power amplification module;

[0010] The first radio frequency drive signal is connected to the first power amplifier module; the second radio frequency drive signal is connected to the second power amplifier module.

[0011] The power combining module is connected to the first power amplification module and the second power amplification module; the power combining module is used to combine the output signals from different power amplification modules to generate the required output power.

[0012] The fast automatic frequency modulation method is characterized by employing two radio frequency driving signals (a first radio frequency signal as the main signal and a second radio frequency signal as the auxiliary signal) in a high-power radio frequency power supply system. The system frequency modulation process uses the reflection coefficient of the second radio frequency signal at a specific frequency in real time to select the optimal frequency and adjust the frequency of the first radio frequency signal, thereby enabling the system to output power stably and quickly.

[0013] A method for fast automatic frequency modulation of a high-power radio frequency power supply system, the method comprising:

[0014] S1. Connect the impedance matching device and load, connect the safety lock, power on the system, and the operation indicator light will illuminate.

[0015] S2. After the power is turned on, it enters the self-test state, checks the power supply status, cooling fan status, water valve status, and observes the power indicator light. If the power system status is abnormal, the indicator light will light up.

[0016] S3. When the power system is in normal condition, the host computer sends out running commands through the communication interfaces of network port, serial port, and ECAT.

[0017] S4. After receiving the start power output command, the communication interface determines whether to start automatic frequency modulation:

[0018] The power supply system has two frequency operating modes: a fixed frequency mode and an automatic frequency adjustment mode. When the communication interface receives a fixed frequency mode command, it enters the fixed frequency mode; otherwise, it enters the automatic frequency adjustment mode.

[0019] S5, Fixed Frequency Working Mode: The power system will directly output a radio frequency signal of the preset frequency through the FPGA processor and high-speed DA digital-to-analog converter chip. The system will calculate the output forward power, reflected power, and reflection coefficient power-related parameters based on the V and I signals of the feedback detection module, thereby adjusting the gain of the power amplifier module to maintain stable power output.

[0020] S6. Output drive signal: In automatic frequency modulation mode, the power system will output two variable frequency RF drive signals through the FPGA processor and DDS direct digital synthesizer, and the high-speed DA digital-to-analog converter chip. One of them is used as the first RF drive signal and the other is used as the second RF drive signal.

[0021] S7. Detect the feedback signals V and I corresponding to the first radio frequency drive signal:

[0022] The processor FPGA detects the feedback V and I signals in real time according to the feedback signal detection module. After digital filtering and fast Fourier transform, the obtained V and I signals are used to calculate the output power value of the RF power supply system based on the amplitude and phase information. The gain of the first power amplifier is adjusted in real time according to the power value to meet the power requirements.

[0023] S8. Detect the feedback signals V and I corresponding to the second radio frequency drive signal:

[0024] The feedback signal detection module will send the collected feedback signals V and I to the processor FPGA after passing through the high-speed AD analog-to-digital converter chip. After the FPGA performs digital filtering and mixing operations, it will send the signals to the DSP chip for FFT operations to obtain the amplitude and phase information of the feedback signal corresponding to the second radio frequency signal. Then, the reflection coefficient corresponding to the second radio frequency drive signal will be calculated based on the amplitude and phase information of the signal.

[0025] S9. Determination of the second radio frequency drive signal reflection coefficient threshold:

[0026] The calculated reflection coefficient is compared with a preset threshold. If the reflection coefficient exceeds the threshold, the frequency of the second radio frequency drive signal is modified.

[0027] S10. Modify the second radio frequency drive signal; The processor FPGA will modify the frequency of the second radio frequency drive signal according to the preset steps. After modification, repeat steps S3 to S9 until the reflection coefficient is less than the threshold.

[0028] S11, S12: Compare the frequencies of the first and second RF drive signals. If they are the same, return to step S3 and repeat steps S3 to S12.

[0029] S13, S14, Calculate the frequency difference: Subtract the frequencies of the two RF drive signals. If the difference is within the threshold range, proceed to the next step to fine-tune the frequency of the first RF drive signal.

[0030] S15. Fine-tune the frequency of the first radio frequency drive signal: The processor determines whether to increase or decrease the frequency of the first radio frequency drive signal based on the frequency difference between the two radio frequency drive signals. The increment or decrement step is set to 1HZ.

[0031] S16, Nonlinear square frequency adjustment: if the frequency difference between the two driving signals is large, taking the frequency of the second radio frequency driving signal as a target value and the frequency of the first radio frequency driving signal as a current value, a dynamic nonlinear square function is used to adjust the frequency of the first radio frequency driving signal, and steps S3 to S16 are repeated.

[0032] Preferably, calculating the reflection coefficient corresponding to the second radio frequency driving signal in said S8 comprises:

[0033] S8-1, calculating load impedance: Zload=R+jX;

[0034] wherein, Zload is a complex number representing the load impedance, R is a resistance component, and X is a reactance component;

[0035] Magnitude of load impedance: |Zload|=V / I;

[0036] wherein V is the amplitude of voltage, I is the amplitude of current, and both voltage and current are sinusoidal signals;

[0037] S8-2, obtaining reflection coefficient Γ according to the load impedance and the characteristic impedance: Γ=(Zload-Z0) / (Zload+Z0);

[0038] wherein Z0 represents the characteristic impedance;

[0039] when Z0=50 ohms, the reflection coefficient is: Γ=(R+jX-50) / (R+jX+50);

[0040] S8-3, calculating voltage standing wave ratio according to the reflection coefficient Γ: VSWR=(1+|Γ|) / (1-|Γ|);

[0041] when VSWR=1, it indicates complete impedance matching, and Γ=0 at this time.

[0042] Preferably, the nonlinear square frequency adjustment in step S16 comprises:

[0043] a nonlinear square function is used to adjust the frequency, the frequency of the second radio frequency driving signal is a preset value F2, the frequency of the first radio frequency driving signal is a current value F1, the adjustment amount is ΔP, and the maximum adjustment amount is Amax, then the nonlinear adjustment formula based on the square function is expressed as: ΔP=Amax*sign(F2-F1)*|F2-F1|2 / Smax;

[0044] wherein, sign(F2-F1) is a sign function for determining the adjustment direction;

[0045] it is 1 when F2>F1, indicating that the frequency needs to be increased, and it is -1 when F2<F1, indicating that the frequency needs to be decreased;

[0046] Where: |F2-F1| is the absolute difference between the preset value and the current value;

[0047] Smax is a scaling factor used to map the difference to a suitable range;

[0048] Where |F2-F1|2 is the square of the difference, used to introduce nonlinear adjustment characteristics;

[0049] Amax represents the maximum adjustment amount, used to limit the maximum value of the adjustment amount, and the maximum value of Amax is set to 1MHz.

[0050] Preferably, the radio frequency power supply system is a power supply capable of continuously outputting power of 10,000W or more;

[0051] The frequency modulation of the radio frequency power supply system is achieved by real-time detection of the reflection coefficient of the second radio frequency modulation signal, and selection of the optimal frequency based on the reflection coefficient at each frequency, thereby quickly adjusting the output frequency of the first radio frequency drive signal of the radio frequency power supply to the optimal state, thus ensuring the efficient and stable operation of the radio frequency power supply system.

[0052] During frequency modulation, it is also necessary to monitor the voltage and current of each power supply module, the temperature of the power amplifier tube of the power amplifier module, and the temperature of the cooling water pan in real time to play a role in real-time protection.

[0053] Preferably, after the first RF drive signal and the second RF drive signal are amplified by their respective powers, the gain of the second RF signal is reduced by approximately 54 dB relative to the gain of the first RF signal.

[0054] A computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps in the above-described high-power radio frequency power supply system and fast automatic frequency modulation method.

[0055] A computer device includes a memory, a processor, and a computer program stored in the memory and running on the processor. When the processor executes the program, it implements the steps in the above-described high-power radio frequency power supply system and fast automatic frequency modulation method.

[0056] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0057] This invention employs two radio frequency drive signals (a first radio frequency signal as the main signal and a second radio frequency signal as the auxiliary signal) in a high-power radio frequency power supply system to select the optimal frequency in real time and adjust the frequency of the main signal. This method optimizes the frequency modulation process of the system, improves the real-time performance and stability of the system, and is particularly suitable for high-power radio frequency power supplies. It can significantly reduce interference to other devices.

[0058] The optimized frequency modulation process of this invention avoids the system instability and equipment performance degradation problems that may occur in traditional frequency sweeping methods. Through real-time monitoring and adjustment, it can more accurately match load characteristics, improving the operating efficiency and lifespan of the RF power supply.

[0059] By introducing a second radio frequency (RF) signal for frequency selection and real-time monitoring of load characteristics, the output power fluctuations caused by continuous frequency changes in traditional frequency sweeping methods are avoided. Furthermore, the second RF signal can rapidly change frequency over a wide range, quickly locating the optimal frequency, reducing computational load and latency, and improving system response speed. Because the second RF signal is used for frequency selection, the main signal, i.e., the first RF drive signal, only adjusts the frequency after confirming the optimal frequency. This significantly reduces the risk of load characteristic changes and power reflections caused by improper frequency selection.

[0060] Addressing the specific needs of high-power RF power supplies, this method offers a more reliable and efficient frequency modulation scheme, reducing the risk of circuit equipment damage due to improper frequency modulation and improving system safety and reliability. Because the frequency modulation process is faster and more accurate, interference to other devices caused by frequency fluctuations is reduced. This is particularly important for RF power supply systems that need to work in conjunction with other electronic devices.

[0061] In summary, the automatic frequency modulation method using two RF drive signals has significant advantages and practicality in high-power RF power supply systems. It can significantly improve system performance and stability, reduce interference to other devices, and reduce the risks caused by improper frequency modulation. Attached Figure Description

[0062] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:

[0063] Figure 1 This is a schematic diagram of the principle framework of a high-power radio frequency power supply system according to the present invention;

[0064] Figure 2 This is a flowchart of a fast automatic frequency modulation method for a high-power radio frequency power supply system according to the present invention. Detailed Implementation

[0065] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0066] Please see Figures 1-2 The present invention provides the following technical solution:

[0067] Example 1:

[0068] The purpose of this invention is to overcome the shortcomings of existing automatic frequency modulation methods for high-power radio frequency power supplies and to provide a fast automatic frequency modulation method. This invention employs two radio frequency drive signals (a first radio frequency signal as the main signal and a second radio frequency signal as the auxiliary signal) in a high-power radio frequency power supply system to select the optimal frequency in real time and adjust the frequency of the first radio frequency signal. This optimizes the system frequency modulation process and improves the real-time performance and stability of the system.

[0069] An RF power supply is a power system that supplies RF signals. This RF power supply system mainly consists of a power supply module, an RF signal drive module, an RF power amplification and power combining module, a load signal VI voltage and current detection module, an AD analog-to-digital conversion module, and a processor module.

[0070] Power Supply Module: The power supply module is the power source for the RF power supply, responsible for converting AC power to DC power. It typically includes circuits such as rectifiers, filters, and voltage regulators to provide a stable DC voltage output.

[0071] RF signal driver module: The signal driver module is the core component for generating RF signals. It generates and drives RF signals, ensuring that the RF power supply can output high-quality RF signals.

[0072] RF power and power combining module: This module amplifies the RF signal generated by the signal drive module and combines the amplified signals to provide sufficient RF power output. Its power amplification capability depends on the application requirements; single-stage or multi-stage amplifiers can be used to achieve different power levels.

[0073] The load signal VI voltage and current detection module is responsible for detecting the output voltage and current of the RF power supply to monitor its operating status. It typically uses transformers, current transformers, and other technical principles to measure voltage and current. The measured voltage and current signals are fed back to the processor to enable real-time adjustment and protection of the RF power supply's output power, thereby ensuring the quality and stability of the RF signal.

[0074] Processor: The FPGA, as the main control chip of the entire system, is responsible for data acquisition and control. The DSP is mainly responsible for algorithm calculation. The FPGA is used to quickly acquire feedback signals and dynamically adjust the frequency, while monitoring system current, voltage, temperature, etc. The two work together to control and monitor the operating status of the power supply and take appropriate measures to protect the power system from faults or damage.

[0075] In RF power supply applications, a separate matching circuit is typically used. A matching circuit is a device used to match the impedance between the RF power supply and the load. Its main function is to ensure that the RF power supply can efficiently transfer energy to the load, providing maximum power delivery and system efficiency.

[0076] As a further explanation of the high-power RF power supply system and the fast automatic frequency modulation method, module 2 in the system block diagram adopts a high-performance floating-point DSP chip and a high-performance FPGA.

[0077] As a further explanation of the high-power RF power supply system and the fast automatic frequency modulation method, module 3 in the system block diagram, namely the RF drive signal, is generated by the DDS direct digital synthesizer inside the FPGA and output through a high-speed, high-precision DA digital-to-analog converter chip.

[0078] As a further explanation of the high-power RF power supply system and the fast automatic frequency modulation method, a high-precision detection sensor is used in module 5 (voltage and current VI) of the system block diagram.

[0079] As a further explanation of RF power modulation, module 8 in the system block diagram uses a high-speed, high-precision 14ADC sampling chip.

[0080] As a further explanation of the high-power RF power supply system and the fast automatic frequency modulation method, depending on the application scenario of the RF power supply, the downstream stage of the RF power supply system also needs to be connected to the impedance matching module 6 and the load module 7.

[0081] The high-power radio frequency power supply system and fast automatic frequency modulation method of the present invention include the following steps in sequence:

[0082] S1. Operation: Connect the impedance matching device and load, connect the safety lock, power on the system, and the operation indicator light will illuminate.

[0083] S2. Power System Status Detection: After the power is turned on, it will enter a self-test state to detect the power supply status, cooling fan status, water valve status, etc. Observe the power indicator light. If there is an abnormality, the indicator light will light up.

[0084] S3. Power Output Judgment: After the power system is in normal condition, the host computer will issue a running command through communication interfaces such as Ethernet, serial port, and ECAT. Upon receiving the power output start command, the communication interface will proceed to the next step.

[0085] S4. Determine whether to start automatic frequency adjustment: The power system has two frequency operating modes: fixed frequency mode and automatic frequency adjustment mode. After receiving the fixed frequency mode command, the communication interface will enter the fixed frequency operating mode; otherwise, it will enter the automatic frequency adjustment operating mode.

[0086] S5, Fixed Frequency Working Mode: The power supply system will directly output a radio frequency signal of the preset frequency through the FPGA processor and high-speed DA digital-to-analog converter chip. The system will calculate the output forward power, reflected power, reflection coefficient power-related parameters based on the V and I signals of the feedback detection module, thereby adjusting the gain of the power amplifier module to maintain stable power output.

[0087] S6. Output drive signal: In automatic frequency modulation mode, the power system will output two variable frequency radio frequency drive signals through the FPGA processor and DDS direct digital synthesizer, and the high-speed DA digital-to-analog converter chip. One of them is used as the first radio frequency drive signal and the other is used as the second radio frequency drive signal.

[0088] S7. Detect the feedback signals V and I corresponding to the first RF drive signal: The processor FPGA detects the feedback V and I signals in real time according to the feedback signal detection module. After the obtained V and I signals are digitally filtered and processed by Fast Fourier Transform (FFT), the output power value of the RF power supply system is calculated based on the amplitude and phase information. The gain of the first power amplifier is adjusted in real time according to the power value to meet the power requirements.

[0089] S8. Detect the feedback signals V and I corresponding to the second radio frequency drive signal: The feedback signal detection module will send the collected feedback signals V and I to the processor FPGA after passing through the high-speed AD analog-to-digital converter chip. After the FPGA performs digital filtering and mixing operations, it will send them to the DSP chip for FFT operations to obtain the amplitude and phase information of the feedback signal corresponding to the second radio frequency signal. Then, the reflection coefficient corresponding to the second radio frequency drive signal will be calculated based on the amplitude and phase information of the signal.

[0090] S9. Second radio frequency drive signal reflection coefficient threshold judgment: Compare the calculated reflection coefficient with the preset threshold. If it exceeds the threshold, proceed to the next step and modify the frequency of the second radio frequency drive signal.

[0091] S10. Modify the second radio frequency drive signal; The processor FPGA will modify the frequency of the second radio frequency drive signal according to the preset steps. After modification, repeat steps S3 to S9 until the reflection coefficient is less than the threshold.

[0092] S11, S12: Compare the frequencies of the first and second RF drive signals. If they are the same, return to step S3 and repeat steps S3 to S12.

[0093] S13, S14, Calculate the frequency difference: Subtract the frequencies of the two RF drive signals. If the difference is within the threshold range, proceed to the next step to fine-tune the frequency of the first RF drive signal.

[0094] S15, Fine-tune the frequency of the first radio frequency drive signal: the processor determines whether to increment or decrement the frequency of the first radio frequency drive signal according to the frequency difference between the two radio frequency drive signals, and the increment or decrement step is set to 1HZ;

[0095] S16, Nonlinear square frequency adjustment: if the frequency difference between the two drive signals is large, taking the frequency of the second radio frequency drive signal as the target value and the frequency of the first radio frequency drive signal as the current value, a dynamic nonlinear square function is used to adjust the frequency of the first radio frequency drive signal, and repeat S3 to S16.

[0096] As a further description of step S9: for feedback signal detection, part of the formulas used in the calculation of the reflection coefficient are as follows:

[0097] Reflection coefficient: Γ=(Zload-Z0) / (Zload+Z0); wherein Zload is the load impedance, and Z0 is the characteristic impedance of 50 ohms;

[0098] Voltage standing wave ratio: VSWR=(1+|Γ|) / (1-|Γ|); when VSWR=1, it indicates complete impedance matching, and at this time Γ=0;

[0099] Load impedance: Zload=R+jX; Zload is a complex number, wherein R is the resistance part and X is the reactance part.

[0100] When Z0=50 ohms, the reflection coefficient is: Γ=(R+jX-50) / (R+jX+50);

[0101] Load impedance modulus: |Zload|=V / I; wherein V is the amplitude of voltage, and I is the amplitude of current;

[0102] As a further description of step S16: frequency adjustment uses a nonlinear square function to control the frequency, taking the frequency of the second radio frequency drive signal as the preset value F2, the frequency of the first radio frequency drive signal as the current value F1, the adjustment amount as ΔP, and the maximum adjustment amount as Amax, the nonlinear adjustment formula based on the square function is:

[0103] ΔP=Amax*sign(F2-F1)*|F2-F1|2 / Smax;

[0104] Wherein: sign(F2-F1) is a sign function, used to determine the adjustment direction, it is 1 when F2>F1 (indicating that the frequency needs to be increased), and -1 when F2<F1 (indicating that the frequency needs to be decreased).

[0105] Wherein: |F2-F1| is the absolute difference between the preset value and the current value.

[0106] Wherein: Smax is a scaling factor used to map the difference to a suitable range so that the adjustment amount obtained after squaring is not too large. It is determined according to the specific needs of the system and the maximum allowable adjustment range.

[0107] Where |F2-F1|2 is the square of the difference, used to introduce nonlinear adjustment characteristics. The squaring operation makes the adjustment amount grow faster than a linear relationship when the difference increases.

[0108] Where: Amax is the maximum adjustment amount, used to limit the maximum value of the adjustment amount, ensuring that the adjustment process does not exceed the system's safety range or the equipment's allowable capacity.

[0109] Example 2:

[0110] The computer device of this embodiment includes a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the program, it implements the steps of a high-power radio frequency power supply system and a fast automatic frequency modulation method in Embodiment 1.

[0111] In this embodiment, the processor can be a central processing unit, or other general-purpose processors, digital signal processors, application-specific integrated circuits, off-the-shelf programmable gate arrays or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor can be a microprocessor or any conventional processor, etc. The memory can include read-only memory and random access memory, and provides instructions and data to the processor. A portion of the memory can also include non-volatile random access memory. For example, the memory can also store device type information.

[0112] Those skilled in the art will understand that the content disclosed in the embodiments can be provided as a method, system, or computer program product. Therefore, this solution can take the form of a hardware embodiment, a software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this solution can take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage and optical storage) containing computer-usable program code.

[0113] This solution is described with reference to flowchart illustrations and / or schematic diagrams of methods and computer program products according to embodiments of this solution. It should be understood that each block of the flowchart illustrations and / or schematic diagrams, and combinations of blocks of the flowchart illustrations and / or schematic diagrams, can be implemented by computer program instructions; these computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing device to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing device, generate instructions for implementing the flowchart illustrations and / or block combinations. Figure 1 One or more processes and / or methods are illustrated. Figure 1 A device that provides the functions specified in one or more boxes.

[0114] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or methods are illustrated. Figure 1 The function specified in one or more boxes.

[0115] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or methods are illustrated. Figure 1 The steps of the function specified in one or more boxes.

[0116] Those skilled in the art will understand that all or part of the processes in the above embodiments can be implemented by a computer program instructing related hardware. The program can be stored in a computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. The storage medium can be a magnetic disk, optical disk, read-only memory (ROM), or random access memory (RAM), etc.

[0117] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A method for rapid automatic frequency modulation in a high-power radio frequency power supply system, characterized in that, The method includes: S1. Connect the impedance matching device and load, connect the safety lock, power on the system, and the operation indicator light will illuminate. S2. After the power is turned on, it enters the self-test state, checks the power supply status, cooling fan status, water valve status, and observes the power indicator light. If the power system status is abnormal, the indicator light will light up. S3. When the power system is in normal condition, the host computer sends out running commands through the communication interfaces of network port, serial port, and ECAT. S4. After receiving the start power output command, the communication interface determines whether to start automatic frequency modulation: The power supply system has two frequency operating modes: a fixed frequency mode and an automatic frequency adjustment mode. When the communication interface receives a fixed frequency mode command, it enters the fixed frequency mode; otherwise, it enters the automatic frequency adjustment mode. S5, Fixed Frequency Working Mode: The power system will directly output a radio frequency signal of the preset frequency through the FPGA processor and high-speed DA digital-to-analog converter chip. The system will calculate the output forward power, reflected power, and reflection coefficient power-related parameters based on the V and I signals of the feedback detection module, thereby adjusting the gain of the power amplifier module to maintain stable power output. S6. Output drive signal: In automatic frequency modulation mode, the power system will output two variable frequency RF drive signals through the FPGA processor and DDS direct digital synthesizer, and the high-speed DA digital-to-analog converter chip. One of them is used as the first RF drive signal and the other is used as the second RF drive signal. S7. Detect the feedback signals V and I corresponding to the first radio frequency drive signal: The processor FPGA detects the feedback V and I signals in real time according to the feedback signal detection module. After digital filtering and fast Fourier transform, the obtained V and I signals are used to calculate the output power value of the RF power supply system based on the amplitude and phase information. The gain of the first power amplifier is adjusted in real time according to the power value to meet the power requirements. S8. Detect the feedback signals V and I corresponding to the second radio frequency drive signal: The feedback signal detection module will send the collected feedback signals V and I to the processor FPGA after passing through the high-speed AD analog-to-digital converter chip. After the FPGA performs digital filtering and mixing operations, it will send the signals to the DSP chip for FFT operations to obtain the amplitude and phase information of the feedback signal corresponding to the second radio frequency signal. Then, the reflection coefficient corresponding to the second radio frequency drive signal will be calculated based on the amplitude and phase information of the signal. S9. Determination of the second radio frequency drive signal reflection coefficient threshold: The calculated reflection coefficient is compared with a preset threshold. If the reflection coefficient exceeds the threshold, the frequency of the second radio frequency drive signal is modified. S10. Modify the second radio frequency drive signal; The processor FPGA will modify the frequency of the second radio frequency drive signal according to the preset steps. After modification, repeat steps S3 to S9 until the reflection coefficient is less than the threshold. S11, S12: Compare the frequencies of the first and second RF drive signals. If they are the same, return to step S3 and repeat steps S3 to S12. S13, S14, Calculate the frequency difference: Subtract the frequencies of the two RF drive signals. If the difference is within the threshold range, proceed to the next step to fine-tune the frequency of the first RF drive signal. S15, Fine-tune the frequency of the first radio frequency driving signal: the processor determines whether to increase or decrease the frequency of the first radio frequency driving signal according to the frequency difference between the two radio frequency driving signals, and the increment or decrement step is set to 1 HZ; S16, Nonlinear square frequency adjustment: if the frequency difference between the two driving signals is large, with the frequency of the second radio frequency driving signal as the target value and the frequency of the first radio frequency driving signal as the current value, a dynamic nonlinear square function is used to adjust the frequency of the first radio frequency driving signal, and repeat steps S3 to S16.

2. The fast automatic frequency modulation method for a high-power radio frequency power supply system as described in claim 1, characterized in that, Calculating the reflection coefficient corresponding to the second radio frequency driving signal in said S8 comprises: S8-1, Calculate load impedance: Zload=R+jX; wherein Zload is a complex number representing the load impedance, R is the resistance part, and X is the reactance part; The modulus of the load impedance: |Zload|=V / I; wherein V is the amplitude of voltage, I is the amplitude of current, and both voltage and current are sinusoidal signals; S8-2, Obtain the reflection coefficient Γ according to the load impedance and the characteristic impedance: Γ=(Zload-Z0) / (Zload+Z0); wherein Z0 represents the characteristic impedance; when Z0=50 ohms, the reflection coefficient is: Γ=(R+jX-50) / (R+jX+50); S8-3, Calculate the voltage standing wave ratio according to the reflection coefficient Γ: VSWR=(1+|Γ|) / (1-|Γ|); when VSWR=1, it indicates complete impedance matching, and Γ=0 at this time.

3. The fast automatic frequency modulation method for a high-power radio frequency power supply system as described in claim 1, characterized in that, The nonlinear square frequency adjustment in said step S16 comprises: A nonlinear square function is used to adjust the frequency, the frequency of the second radio frequency driving signal is a preset value F2, the frequency of the first radio frequency driving signal is a current value F1, the adjustment amount is ΔP, and the maximum adjustment amount is Amax, then the nonlinear adjustment formula based on the square function is expressed as: ΔP=Amax*sign(F2-F1)*|F2-F1|² / Smax; wherein sign(F2−F1) is a sign function for determining the adjustment direction; it is 1 when F2>F1, indicating that the frequency needs to be increased, and it is -1 when F2<F1, indicating that the frequency needs to be decreased; wherein: |F2-F1∣ is the absolute difference between the preset value and the current value; Smax is a scaling factor for mapping the difference to a suitable range; wherein, |F2-F1|² is the square of the difference, which is used to introduce nonlinear adjustment characteristics; Amax represents the maximum adjustment amount, which is used to limit the maximum value of the adjustment amount, and the maximum value of Amax is set to 1 MHZ at the same time.

4. A high-power radio frequency power supply system for implementing the fast automatic frequency modulation method for a high-power radio frequency power supply system according to any one of claims 1-3, characterized in that: Said system comprises: a power supply module, a signal driving module, a radio frequency power amplification and power combining module, a feedback signal V / I detection module, an AD sampling module and a processor module; Said signal driving module comprises a first radio frequency driving signal and a second radio frequency driving signal; Said radio frequency power amplification module comprises a first power amplification module and a second power amplification module; The first radio frequency driving signal is connected to the first power amplification module; the second radio frequency driving signal is connected to the second power amplification module; The power combining module is connected to the first power amplification module and the second power amplification module; the power combining module is used to combine the output signals from different power amplification modules to generate the required output power.

5. A high-power radio frequency power supply system as described in claim 4, characterized in that: The radio frequency power supply system is a power supply capable of continuously outputting power of 10,000W or more; The frequency modulation of the radio frequency power supply system is achieved by real-time detection of the reflection coefficient of the second radio frequency modulation signal, and selection of the optimal frequency based on the reflection coefficient at each frequency, thereby quickly adjusting the output frequency of the first radio frequency drive signal of the radio frequency power supply to the optimal state, thus ensuring the efficient and stable operation of the radio frequency power supply system. During frequency modulation, it is also necessary to monitor the voltage and current of each power supply module, the temperature of the power amplifier tube of the power amplifier module, and the temperature of the cooling water pan in real time to play a role in real-time protection.

6. A high-power radio frequency power supply system as described in claim 4, characterized in that: After being amplified by their respective powers, the gain of the second RF signal is reduced by approximately 54 dB relative to the gain of the first RF signal.

7. A computer-readable storage medium having a computer program stored thereon, characterized in that: When executed by the processor, the program implements the steps of the fast automatic frequency modulation method for a high-power radio frequency power supply system as described in any one of claims 1-3.

8. A computer device comprising a memory, a processor, and a computer program stored in the memory and running on the processor, characterized in that, When the processor executes the program, it implements the steps in the fast automatic frequency modulation method for a high-power radio frequency power supply system as described in any one of claims 1-3.

Images