Dry ultrasonic dust removal self-cleaning machine

Abstract

The application provides a dry ultrasonic dust removal self-cleaning machine, and belongs to the field of screen glass panel cleaning. The machine comprises a clean room and a frame inside the clean room. An equipment fan filter unit is arranged on the top of the clean room. Rails are arranged on the top of the frame on both sides. A cleaning unit that can move horizontally is arranged on the top of the rails. In the application, a cleaning head and an ultrasonic wave source are arranged. The cleaning head is connected with an external pressure air source. High-speed airflow is used to impact the surface of a product to achieve a cleaning effect. Meanwhile, the ultrasonic wave source outputs ultrasonic waves to the product. When the air near the product cannot resist the force of the ultrasonic waves, cavitation or cavities are generated. When the bubbles break, vibration is generated to further clean the particles, thereby strengthening the cleaning effect. The working platform can also be cleaned in the same way, achieving a self-cleaning effect, reducing maintenance costs, and improving production efficiency.

Description

Technical Field

[0001] This application relates to the field of screen glass panel cleaning technology, and in particular to a dry ultrasonic dust removal self-cleaning machine. Background Technology

[0002] During the manufacturing process of LCD panels, even the smallest dust particles adhering to the panel can easily cause bright spots or dark spots. Therefore, in order to avoid product defects, the production environment usually needs to be maintained at cleanroom standards, such as ISO5 and ISO6. The air filtration system of the cleanroom needs to be maintained regularly to ensure that the dust concentration is controlled at an extremely low level. As the size of LCD panels becomes larger and larger, dust is more likely to fall on the glass substrate of the LCD panel, making it increasingly difficult to maintain and ensure the required cleanliness of the glass substrate. Existing solutions often use dry ultrasonic cleaners to clean glass substrates. However, traditional cleaning equipment cannot automatically clean itself. During long-term operation, dust accumulates on the equipment, affecting product qualification rate. As the product passes through multiple process devices, it is easy to carry particles into each process device, causing secondary pollution to the glass substrate. Therefore, we propose a dry ultrasonic dust removal self-cleaning machine. Summary of the Invention

[0003] In view of this, the purpose of this application is to provide a dry ultrasonic dust removal self-cleaning machine to achieve the purpose of equipment self-cleaning, reduce cleaning costs, and improve cleaning efficiency.

[0004] To solve the above-mentioned technical problems, this application provides the following technical solution: A dry ultrasonic dust removal self-cleaning machine includes a clean room and its internal frame. The top of the clean room is equipped with an equipment fan and filter unit. Tracks are provided on both sides of the top of the frame. A horizontally movable cleaning unit is provided on the top of the track. The cleaning unit includes: a frame, an electric push rod, and a cleaning head. The electric push rod is located in the middle of the frame, and the cleaning head is located at the bottom of the electric push rod. The cleaning head has two spaced vertical partitions inside, forming a positive pressure chamber between the vertical partitions and the inner wall of the cleaning head, and a negative pressure chamber between the two vertical partitions and the inner wall of the cleaning head. Air inlet pipes connected to the positive pressure chambers are located on the lower sides of both sides of the cleaning head, and vortex tubes are connected to the ends of the air inlet pipes. Cleaning holes connected to the positive pressure chambers are located on both sides of the bottom of the cleaning head. An ultrasonic wave generator is located at the bottom of the positive pressure chamber of the cleaning head, and a suction pipe connected to the negative pressure chamber is located on the upper side wall of the cleaning head. The frame has an internal support, and an electric push rod is mounted on top of the support. A working platform is mounted on top of the electric push rod.

[0005] Preferably, the bottom cleaning hole of the positive pressure chamber of the cleaning head is elongated, and the air outlet direction of the bottom cleaning hole of the positive pressure chamber of the cleaning head is obliquely arranged towards the center line of the cleaning head; The bottom center of the negative pressure chamber of the cleaning head has a through hole of the same length as the blowing hole.

[0006] Preferably, the side wall of the vertical partition is provided with a horizontal partition that divides the positive pressure chamber into two, the interior of the horizontal partition is provided with a strip-shaped hole, and a baffle is attached to the bottom of the strip-shaped hole of the horizontal partition; Both ends of the bottom of the partition plate are connected to a servo motor, and the output end of the servo motor is connected to a lead screw, which passes through the baffle plate.

[0007] Preferably, the air intake pipe is connected to the cold source output port of the vortex tube, a connecting pipe is connected to the middle of the air intake pipe, the other end of the connecting pipe is connected to the upper part of the positive pressure chamber of the cleaning head, and a valve is provided on the connecting pipe.

[0008] Preferably, the working platform has a square hole in the middle, a suction groove is provided in the square hole, a support rod is provided at the bottom of the suction groove, and the other end of the support rod is fixed to the top of the bracket; The top of the suction groove is provided with crisscrossing grooves, and the bottom of the suction groove is provided with a through hole that communicates with the grooves.

[0009] Preferably, the working platform has grooves on both sides, a slider is slidably connected inside the groove, a clamping block is provided on the top of the slider, the clamping block is "L" shaped, and an electric push rod is provided between the slider and the working platform.

[0010] Preferably, optical sensors are provided at the four corners of the top of the work platform, and ball bearings are arranged in rows on the top of the work platform.

[0011] Preferably, the bottom of the cleaning head is provided with through-beam sensors on both sides.

[0012] Preferably, a lead screw 2 is inserted inside the track, a connecting seat is sleeved on the outside of the lead screw 2, the frame is fixedly installed on the top of the connecting seat, and a servo motor 2 is provided at the end of the track, the servo motor 2 and the lead screw 2 establish a transmission relationship.

[0013] Preferably, the clean room is equipped with an air filtration assembly, which includes: a positive pressure blower, a positive pressure filter box, a negative pressure blower and a negative pressure filter box. The output port of the positive pressure blower is connected to the air inlet of the positive pressure filter box, and the air outlet of the positive pressure filter box is connected to the positive pressure chamber of the cleaning head. The output port of the negative pressure blower is connected to the air outlet of the negative pressure filter box, the first air inlet of the negative pressure filter box is connected to the negative pressure chamber of the cleaning head, and the second air inlet of the negative pressure filter box is connected to the air outlet of the suction tank.

[0014] In this invention, a cleaning head and an ultrasonic generator are connected. The cleaning head is connected to an external pressurized air source. High-speed, high-intensity, uniform laminar airflow impacts the product surface to achieve a cleaning effect. Simultaneously, ultrasonic waves are output to the product through the ultrasonic generator. When the air near the product cannot resist the force of the ultrasonic waves, cavitation bubbles or cavities are generated. When the bubbles burst, vibrations are generated to further clean the particles, thereby enhancing the cleaning effect. The ultrasonic waves shake off the particles on the surface, thus separating the tiny particles wrapped in the adhesion layer. Finally, they are sucked away by vacuum, achieving the purpose of enhanced cleaning. Similarly, the work platform can be cleaned to achieve a self-cleaning effect, reducing maintenance costs and improving production efficiency.

[0015] In this invention, a vortex tube is installed, and the cold source output port of the vortex tube is connected to the air inlet pipe. Compressed air is introduced into the vortex tube, and the high-speed airflow is vortexed by the action of the vortex tube to separate the cold and hot airflows. The air inlet pipe injects the cold airflow into the positive pressure chamber, which freezes and embrittles the contaminants. The contaminants break on the surface of the product being cleaned, changing from a viscoelastic state to a solid state, and their brittleness increases while their viscosity decreases. This drastically reduces the adsorption force on the surface and increases the surface area, thereby peeling off some of the contaminants from the product surface and enhancing the cleaning effect.

[0016] In this invention, by setting up a vertical partition, a horizontal partition, a servo motor, a lead screw, and a baffle, and by placing dry ice in the cavity above the horizontal partition, the temperature of the positive pressure chamber is further reduced by utilizing the characteristic of dry ice sublimation and heat absorption at normal temperature and pressure. This further reduces the temperature of the cleaning airflow, thereby improving the cleaning effect. By releasing the baffle, the dry ice particles can pass through the horizontal partition and fall into the positive pressure chamber. The high-speed airflow impacts the dry ice particles, which are then sprayed onto the surface of the object being cleaned. The momentum change, sublimation, and melting of the high-speed moving solid dry ice particles rapidly freeze the dirt, oil, and residual impurities on the surface of the product being cleaned, causing them to solidify, become brittle, and peel off. Simultaneously, these impurities are removed by the airflow, achieving a better cleaning effect.

[0017] In this invention, by setting up a connecting pipe and an air inlet pipe, the dry ice in the cleaning head generates positive pressure when it sublimates. The pressure is released into the air inlet pipe through the connecting pipe, thereby increasing the air inlet pressure, enhancing the airflow, and improving the cleaning effect of the airflow. Attached Figure Description

[0018] The accompanying drawings, which are incorporated herein and form part of the specification, illustrate embodiments of the present disclosure and, together with the specification, further serve to explain the principles of the present disclosure and enable those skilled in the art to implement and use the present disclosure.

[0019] Figure 1 This is a schematic diagram of the overall structure in this application; Figure 2 This is a schematic diagram of the framework structure in this application; Figure 3 This is a schematic diagram of the cross-sectional structure of the cleaning head in this application; Figure 4 This is a schematic diagram of the rack structure in this application; Figure 5 This is a schematic diagram of the vertical diaphragm structure in this application; Figure 6 This is a schematic diagram of the intake pipe structure in this application; Figure 7 This is a schematic diagram of the baffle structure in this application; Figure 8 This is a schematic diagram of the track structure in this application; Figure 9 This is a schematic diagram of the working platform structure in this application; Figure 10 This is a schematic diagram of the suction groove structure in this application; Figure 11 For this application Figure 8 A magnified structural diagram at point A; Figure 12 This is a schematic diagram of the air filter assembly structure in this application; Figure 13 This is a schematic diagram of the negative pressure filter box structure in this application.

[0020] [Figure Labels] 1. Cleanroom; 101. Track; 102. Lead screw two; 103. Connecting seat; 104. Servo motor two; 105. Sliding door; 106. Control panel; 2. Frame; 201. Bracket; 202. Electric push rod two; 3. Equipment fan and filter unit; 4. Frame; 401. Electric push rod one; 5. Cleaning head; 501. Vertical partition; 5011. Horizontal partition; 5012. Baffle; 5013. Servo motor one; 5014. Lead screw one; 502. 5021, Inlet pipe; 503, Connecting pipe; 504, Vortex tube; 505, Ultrasonic generator; 506, Suction pipe; 507, Through-beam sensor; 6, Working platform; 601, Slider; 602, Clamping block; 603, Electric push rod three; 604, Optical sensor; 605, Ball bearing; 7, Suction groove; 701, Support rod; 8, Air filter assembly; 801, Positive pressure blower; 802, Positive pressure filter box; 803, Negative pressure blower; 804, Negative pressure filter box.

[0021] As shown in the figure, specific structures and devices are marked in the figure to clearly illustrate the structure of the embodiments of the present invention. However, this is only for illustrative purposes and is not intended to limit the present invention to this specific structure, device and environment. Those skilled in the art can adjust or modify these devices and environments according to specific needs. Detailed Implementation

[0022] The dry ultrasonic dust removal self-cleaning machine provided by the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. It should also be noted that, to make the embodiments more detailed, the following embodiments are the best and preferred embodiments, and those skilled in the art can use other alternative methods to implement some known technologies; moreover, the accompanying drawings are only for more specific description of the embodiments and are not intended to specifically limit the present invention.

[0023] It should be noted that embodiments referred to in the specification as "an embodiment," "an embodiment," "an exemplary embodiment," "some embodiments," etc., may include specific features, structures, or characteristics, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, when describing a specific feature, structure, or characteristic in conjunction with embodiments, the implementation of such feature, structure, or characteristic in conjunction with other embodiments, whether or not explicitly described, should be within the knowledge of those skilled in the art.

[0024] Generally, terms can be understood at least partly from their use in context. For example, depending at least partly on the context, the term "one or more" as used herein can be used to describe any feature, structure, or characteristic in a singular sense, or a combination of features, structures, or characteristics in a plural sense. Additionally, the term "based on" can be understood not necessarily to convey an exclusive set of factors, but rather, alternatively, depending at least partly on the context, to allow for the presence of other factors that are not necessarily explicitly described.

[0025] It is understood that the meanings of “on”, “above” and “above” in this disclosure should be interpreted in the broadest sense, such that “on” means not only “directly on” something, but also includes something with an intermediary feature or layer, and that “above” or “above” means not only “on” something, but also includes something “above” or “above” without an intermediary feature or layer.

[0026] Furthermore, spatially related terms such as “below,” “under,” “lower,” “above,” and “upper” are used herein for convenience to describe the relationship of one element or feature to one or more other elements or features, as illustrated in the accompanying drawings. Spatially related terms are intended to cover different orientations in the use or operation of the device other than those depicted in the accompanying drawings. The device may be oriented in other ways, and the spatially related descriptive terms used herein can be interpreted similarly.

[0027] like Figure 1 -- Figure 5 The dry ultrasonic dust removal self-cleaning machine shown in the embodiment of this application includes a clean room 1 and its internal frame 2. The top of the clean room 1 is provided with an equipment fan filter unit 3. The top two sides of the frame 2 are provided with rails 101. The top of the rails 101 is provided with a horizontally movable cleaning unit. The cleaning unit includes: a frame 4, an electric push rod 401 and a cleaning head 5. The electric push rod 401 is located in the middle of the frame 4, and the cleaning head 5 is located at the bottom of the electric push rod 401. The cleaning head 5 has two spaced vertical partitions 501 inside. A positive pressure chamber is formed between the vertical partitions 501 and the inner wall of the cleaning head 5, and a negative pressure chamber is formed between the two vertical partitions 501 and the inner wall of the cleaning head 5. An air inlet pipe 502 connected to the positive pressure chamber is provided on both sides of the cleaning head 5 at the lower position. A vortex pipe 503 is connected to the end of the air inlet pipe 502. A cleaning hole connected to the positive pressure chamber is provided on both sides of the bottom of the cleaning head 5. An ultrasonic generator 504 is provided at the bottom of the positive pressure chamber of the cleaning head 5. A suction pipe 505 connected to the negative pressure chamber is provided on the upper side wall of the cleaning head 5. The frame 2 is equipped with a support 201 inside, and an electric push rod 202 is installed on the top of the support 201. A working platform 6 is installed on the top of the electric push rod 202. In actual use, the upstream equipment places the product to be cleaned on the work platform 6 through the clean room 1. The height of the work platform 6 is adjusted by the electric push rod 202 so that the product is below the cleaning head 5. Compressed air is sent into the positive pressure chamber of the cleaning head 5 through an external pressure air source. The compressed air is released through the cleaning hole at the bottom of the cleaning head 5. The high-speed airflow impacts the particles on the surface of the product, thereby achieving the cleaning effect. Meanwhile, since there are two high-speed airflows, a low-pressure zone is formed between the two high-speed airflows, which attracts the particles that peel off from the product surface, thus achieving the effect of collecting the particles. Meanwhile, for the particles still attached to the product surface, ultrasonic waves are output to the product through ultrasonic generator 504. The ultrasonic waves propagate in the high-speed airflow ejected from cleaning head 5. When the air near the product cannot resist the force of the ultrasonic waves, it generates bubbles or cavities. When these bubbles come into contact with the product surface, they will quickly break and release huge energy and generate vibrations. Therefore, it can effectively destroy the air adhesion layer generated by the high-speed airflow on the product surface, and shake off the particles on the surface, thereby separating the tiny particles wrapped in the adhesion layer and finally being sucked away by the low-pressure area to achieve the purpose of enhanced cleaning. By connecting the suction pipe 505 to the external negative pressure dust removal unit, the suction pipe 505 can discharge the particles collected in the negative pressure chamber to the external negative pressure dust removal unit, thus completing the transfer of particles. For stubborn contaminants, compressed air can be introduced into the vortex tube 503. With the help of the vortex tube 503, the high-speed airflow is made to generate a vortex and separate into cold and hot airflows. The air inlet pipe 502 can use the cold airflow generated by the vortex tube 503 to inject the cold airflow into the positive pressure chamber. First, the contaminants are frozen and embrittled. The contaminants break on the surface of the product being cleaned, change from a viscoelastic state to a solid state, and become more brittle and less sticky. This greatly reduces the adsorption force on the surface and increases the surface area, thereby peeling off some of the contaminants from the product surface and enhancing the cleaning effect. The low-temperature, high-speed airflow ejected from the positive pressure chamber generates shear force on the embrittled contaminants, causing mechanical fracture. Due to the large difference in low-temperature shrinkage ratio between the contaminants and the surface of the cleaned object, stress concentration occurs at the contact surface between the contaminants and the cleaned product, and the contaminants can be peeled off under shear force. Furthermore, when a high-speed, cooler airflow, combined with ultrasonic waves, strikes the surface of a contaminant, the kinetic energy of the airflow and sound waves is transferred to the contaminant, overcoming the reduced adhesion force. The resulting mechanical force causes the contaminant to be carried away by the airflow, thus achieving the purpose of enhanced contaminant removal. Meanwhile, the airflow after cooling has a low moisture content, which can achieve a drying effect, so as to facilitate further processing of the product.

[0028] The main body of cleanroom 1 is a profile frame, which is covered with antistatic PVC board and aluminum composite panel. The surface resistance of the antistatic PVC board is 106 to 109 Ω, which has excellent antistatic performance. It also has the excellent transparency of acrylic resin, especially excellent light transmittance. It has excellent durability and can maintain antistatic performance for a long time. It is suitable for semiconductor equipment covers, equipment windows, and cleanroom partitions.

[0029] Among them, the equipment fan filter unit 3 is a self-powered air purification device with filtration function, mainly used for managing and controlling airflow and air quality within the facility. This device is used for internal air filtration, with a filtration efficiency of up to 99.9999%, a particle diameter of less than or equal to 0.12um, and a product coverage rate of ≥100% and an overall machine coverage rate of ≥70%. As a self-powered air supply device, the equipment fan filter unit 3 can precisely adjust the airflow and speed according to the specific needs of the equipment, saving energy while meeting usage requirements.

[0030] Among them, the equipment has a self-cleaning function. When the equipment's working platform is running for a long time, the particles carried by the product itself will accumulate on the surface, affecting the product cleaning rate. The equipment itself can clean the working platform regularly. The cleaning frequency can be set according to the equipment's usage. The equipment will then clean the working platform 6 without carrying the product.

[0031] In this embodiment, as Figures 2-13 As shown, the bottom cleaning hole of the positive pressure chamber of the cleaning head 5 is elongated, and the air outlet direction of the bottom cleaning hole of the positive pressure chamber of the cleaning head 5 is set obliquely towards the center line of the cleaning head 5. A through hole of the same length as the cleaning hole is provided at the bottom center of the negative pressure chamber of the cleaning head 5; The cleaning head 5 is long and narrow, and the cleaning hole is also long and narrow. The airflow blown out of the cleaning hole consists of high-intensity, uniform laminar airflow. The width of the airflow is preferably to cover the entire cross-section of the product to be cleaned. The size of the hole is determined by the cleaning requirements. The cleaning head 5, which can move horizontally along the track 101, works with the strip-shaped cleaning hole at its bottom to allow the high-speed airflow to cover the work platform 6 and the product surface, achieving a large-area cleaning effect. By setting the cleaning hole at an angle, the two high-speed airflows can intersect, and the high-speed airflow can guide the particles to the low-pressure area, which enhances the cleaning effect of the high-speed airflow on the particles. In addition, this design further increases the vacuum degree of the low-pressure area and improves the collection effect of particles. The distance between the cleaning head 5 and the product should be controlled within 5mm, with 1.5-3mm being optimal. The high-pressure air knife in the center releases a high-speed airflow that collides with particles on the product. Two airflows converge from both sides towards the center, guiding the particles to the center of the cleaning head 5. Due to the pressure difference, the dust particles are adsorbed into the vacuum chamber in the center. During the cleaning process, the high-speed airflow creates an air adhesion layer on the product surface due to the friction between the high-pressure air knife and the product surface, causing a small number of particles to adhere to the surface. The ultrasonic generator 504 produces sound waves of 40kHz~70kHz. Ultrasonic waves are mechanical waves with extremely short wavelengths. Sound waves with wavelengths generally shorter than 2cm in the air generate tiny bubbles when they propagate through the air. When these bubbles encounter the surface of an object, they burst rapidly, releasing enormous energy and generating vibrations. This effectively destroys the air adhesion layer on the product surface generated by the high-speed airflow, and shakes off the surface particles, thus separating the tiny particles encased in the adhesion layer. Finally, these particles are sucked away by the vacuum, achieving the purpose of enhanced cleaning. In addition, based on the different sizes and viscosities of dust particles, the airflow speed and the suction force of the vacuum chamber can be controlled by adjusting the ventilation valve and the frequency converter to adjust the motor speed of the external air source equipment, ensuring that dust particles are sucked into the vacuum chamber to the maximum extent. The through hole at the bottom center of the cleaning head 5 corresponds to the low-pressure zone to facilitate the collection of particles. At the same time, a suction pipe 505 is provided on the side wall of the cleaning head 5. The suction pipe 505 can be connected to an external vacuum device or negative pressure filtration device to enhance the collection effect of particles.

[0032] The side wall of the vertical partition 501 is provided with a horizontal partition 5011 that divides the positive pressure chamber into two. The interior of the horizontal partition 5011 is provided with a strip-shaped hole, and a baffle 5012 is attached to the bottom of the strip-shaped hole of the horizontal partition 5011. Both ends of the bottom of the partition 5011 are connected to a servo motor 5013. The output end of the servo motor 5013 is connected to a lead screw 5014. The lead screw 5014 passes through the baffle 5012. The diaphragm 5011 further reduces the diameter of the positive pressure chamber, thereby reducing airflow fluctuations within the positive pressure chamber and stabilizing the airflow. The upper space of the diaphragm 5011 can hold dry ice. The top of the cleaning head 5 is provided with an inlet for adding dry ice and a matching screw cap. By placing dry ice in the cavity above the diaphragm 5011, the temperature of the positive pressure chamber is further reduced by utilizing the characteristic of dry ice sublimation and heat absorption at room temperature and pressure. This further reduces the temperature of the cleaning airflow and improves the cleaning effect by utilizing the low-temperature airflow. When faced with some difficult-to-remove contaminants, the servo motor 5013 drives the lead screw 5014 to rotate. Under the meshing action of the thread, the baffle 5012 moves horizontally. The baffle 5012 will no longer block the strip hole inside the transverse partition 5011, allowing dry ice particles to pass through the transverse partition 5011 and fall into the positive pressure chamber. The high-speed airflow impacts the dry ice particles, which are sprayed onto the surface of the object being cleaned. The momentum change, sublimation, melting and other energy conversions of the high-speed moving solid dry ice particles cause the dirt, oil, and residual impurities on the surface of the product being cleaned to freeze rapidly, thereby solidifying, embrittled and peeling off, and being removed by the airflow at the same time, achieving a better cleaning effect.

[0033] The intake pipe 502 is connected to the cold source output port of the vortex tube 503. The middle part of the intake pipe 502 is connected to the connecting pipe 5021. The other end of the connecting pipe 5021 is connected to the upper part of the positive pressure chamber of the cleaning head 5. A valve is provided on the connecting pipe 5021. The air intake pipe 502 can work with the vortex pipe 503 to generate a cold airflow, enabling the cleaning head 5 to achieve a better cleaning effect. According to the relationship between air density and temperature, the standard gas law states that for equal masses of gas, under constant pressure, temperature and volume are directly proportional; however, for equal masses of gas, under constant pressure, temperature and density are inversely proportional. Air density refers to the mass of a unit volume of air at a certain temperature and pressure. Therefore, the cleaning airflow ejected from the cleaning head 5, which has a lower temperature, has a higher density and contains more kinetic energy, resulting in a better cleaning effect. Meanwhile, the dry ice particles continuously absorb heat and sublimate inside the cleaning head 5, generating positive pressure. This pressure is then released into the air inlet pipe 502 through the connecting pipe 5021 by the baffle 5012 sealing the internal slot of the transverse partition 5011, thereby increasing the air inlet pressure of the air inlet pipe 502, enhancing the airflow, and improving the cleaning effect of the airflow.

[0034] A square hole is provided in the middle of the working platform 6, and a suction groove 7 is provided in the square hole. A support rod 701 is provided at the bottom of the suction groove 7, and the other end of the support rod 701 is fixed to the top of the bracket 201. The top of the suction groove 7 is provided with crisscrossing grooves, and the bottom of the suction groove 7 is provided with through holes that communicate with the grooves. The working platform 6 matches the suction groove 7 through a square hole to prevent the lifting movement of the working platform 6 from interfering with the suction groove 7. After receiving the product, the working platform 6 lowers its height so that the product can be stably placed on the top of the suction groove 7. The suction groove 7 is connected to an external negative pressure device to fix the product.

[0035] Both sides of the work platform 6 are provided with sliding grooves, and a slider 601 is slidably connected inside the sliding groove. A clamping block 602 is provided on the top of the slider 601. The clamping block 602 is "L" shaped. An electric push rod 603 is provided between the slider 601 and the work platform 6. The top two sides of the work platform 6 are equipped with clamping blocks 602. The position of the clamping blocks 602 can be adjusted by the electric push rod 603, thereby achieving the effect of adjusting the product position and clamping and fixing the product. The L-shaped clamping blocks 602 have a right-angled inner angle that limits the product and prevents the product from being misaligned when external equipment inputs the product into the work platform 6.

[0036] Optical sensors 604 are installed at the four corners of the top of the work platform 6, and ball bearings 605 are arranged in a row on the top of the work platform 6. The product position is detected by optical sensor 604, and the integrity of the four corners of the product is checked at the same time. When the external equipment inputs the product into the work platform 6, the product is supported by the ball bearing 605. The ball bearing 605 and the product have rolling friction, which reduces the occurrence of scratches on the product. At the same time, it is convenient for the clamping block 602 to adjust the position of the product, which has the effect of protecting the product. Meanwhile, the work platform 6 is a Teflon anti-static coated workbench—this material is non-stick, has a low coefficient of friction, is non-wetting, anti-static, high temperature resistant, and chemical resistant. At the same time, the surface of the workbench is coated with a black anti-static coating to prevent static electricity release. The work platform 6 adds suction grooves to reduce the coefficient of friction between the glass and the workbench surface, so that the product is subjected to more uniform force during the adsorption process.

[0037] Both sides of the bottom of the cleaning head 5 are equipped with photoelectric sensors 506; During the descent of the cleaning head 5, the through-beam sensor 506 can detect whether the cleaning head 5 is blocked by an obstacle in its descent path. The through-beam passes through the gap between the product and the cleaning head 5. If there is a foreign object on the surface of the product or the surface of the cleaning head 5, the through-beam sensor 506 will be blocked by the foreign object, and the equipment will immediately alarm and stop operating, waiting for manual inspection. This prevents continuous damage to the product caused by foreign objects or panel fragments adhering to the product surface, and also prevents damage to the surface of the work platform 6, while protecting the cleaning head 5 from damage by foreign objects. Similarly, during the horizontal movement of the cleaning head 5, the through-beam sensor 506 can continuously detect whether the cleaning head 5 is blocked by obstacles in its translation path, thereby protecting the cleaning head 5.

[0038] A lead screw 102 is inserted inside the track 101, and a connecting seat 103 is sleeved on the outside of the lead screw 102. The frame 4 is fixedly installed on the top of the connecting seat 103. A servo motor 104 is installed at the end of the track 101, and the servo motor 104 establishes a transmission relationship with the lead screw 102. The servo motor 104 drives the lead screw 102 to rotate. The lead screw 102 engages with the connecting seat 103 through a thread, causing the connecting seat 103 to drive the frame 4 to move horizontally. A servo motor with a brake can be used as the drive. At the same time, it can be used in conjunction with the mechanism of connecting the cleaning head 5 with a cable chain to achieve motion control. The working path is from one end of the product to the other end. Combined with the lateral cleaning range of the cleaning head 5, every part of the product is thoroughly cleaned.

[0039] The clean room 1 is equipped with an air filtration assembly 8, which includes a positive pressure blower 801, a positive pressure filter box 802, a negative pressure blower 803 and a negative pressure filter box 804. The output port of the positive pressure blower 801 is connected to the air inlet of the positive pressure filter box 802 through a pipe, and the air outlet of the positive pressure filter box 802 is connected to the positive pressure chamber of the cleaning head 5 through a pipe. The output port of the negative pressure blower 803 is connected to the air outlet of the negative pressure filter box 804 through a pipe. The first air inlet of the negative pressure filter box 804 is connected to the negative pressure chamber of the cleaning head 5 through a pipe. The second air inlet of the negative pressure filter box 804 is connected to the air outlet of the suction tank 7 through a pipe. Through the organic cooperation of the positive pressure blower 801 and the positive pressure filter box 802, clean airflow can be delivered into the positive pressure chamber of the cleaning head 5; By combining the negative pressure blower 803 with the negative pressure filter box 804, a negative pressure environment can be created in the negative pressure chamber of the cleaning head 5 and the adsorption part of the suction tank 7. Positive pressure filter box 802 and negative pressure filter box 804 can intercept particles in the airflow, effectively preventing pipeline blockage; In the air filter assembly 8, the positive / negative pressure parameters are precisely managed through a closed-loop control mechanism by a pressure controller, ultimately achieving a stable pressure difference output between the positive pressure blower 801 and the negative pressure blower 803. The technical specifications require the positive pressure operating range to be 10~13kPa and the negative pressure range to be -1~-1.3kPa. The two need to be adjusted proportionally and symmetrically, such as a positive pressure of 12kPa corresponding to a negative pressure of -1.2kPa. Through the coordinated operation of the entire system, the positive pressure airflow in the cleaning head 5 is directed at an angle of 30°~35° relative to the normal direction of the substrate surface, forming an "attached" airflow and reducing airflow rebound interference.

[0040] The side opening of cleanroom 1 is provided with a sliding door 105, and the outer wall of cleanroom 1 is provided with a control panel 106. The sliding door 105 is used to open and close the cleanroom 1 when loading and unloading products, and the control panel 106 is used to realize intelligent control of the electrical components of the whole machine.

[0041] The technical solution provided by this invention involves the upstream equipment placing the product to be cleaned onto the work platform 6 through the cleanroom 1. The electric push rod 603 drives the clamping block 602 to move, clamping the product to achieve the effect of fixing the product. The optical sensor 604 detects the product position and checks the integrity of the four corners of the product. The height of the working platform 6 is adjusted by the electric push rod 202. After the suction groove 7 is attached to the product, the suction groove 7 is connected to the external negative pressure equipment. The product is fixed by the suction groove 7. The servo motor 2104 drives the lead screw 2102 to rotate, so that the connecting seat 103 drives the frame 4 to move horizontally. The through-beam sensor 506 can continuously detect whether the cleaning head 5 is blocked by obstacles in the translation path. Compressed air is supplied to the positive pressure chamber of the cleaning head 5 by an external pressure air source, and the compressed air is released through the cleaning hole at the bottom of the cleaning head 5. The high-speed airflow impacts the particles on the product surface, thereby achieving a cleaning effect. The ultrasonic generator 504 outputs ultrasonic waves to the product. When the air near the product is subjected to the force of the ultrasonic waves, it generates cavitation bubbles. When the bubbles come into contact with the product surface, they burst and release huge energy and generate vibrations, shaking off the surface particles. Two high-speed airflows ejected through the cleaning holes concentrate and guide the particles to the low-pressure zone, enhancing the cleaning effect of the high-speed airflow on the particles. Finally, the particles are sucked away by the low-pressure zone, achieving the effect of particle collection. The cleanliness of the cleanroom 1 can be maintained by the equipment's fan filter unit 3, thus enabling continuous operation.

[0042] This invention encompasses any substitutions, modifications, equivalent methods, and solutions made within the spirit and scope of this invention. To provide the public with a thorough understanding of this invention, specific details are described in detail in the following preferred embodiments; however, those skilled in the art will fully understand the invention even without these details. Furthermore, to avoid unnecessary misunderstanding of the essence of this invention, well-known methods, processes, procedures, components, and circuits are not described in detail.

Claims

1. A dry ultrasonic self-cleaning dust removal machine, comprising a cleanroom (1) and its internal frame (2), characterized in that, The clean room (1) is equipped with a fan filter unit (3) at the top. The top two sides of the frame (2) are equipped with rails (101). The top of the rails (101) is equipped with a horizontally movable cleaning unit. The cleaning unit includes: a frame (4), an electric push rod (401) and a cleaning head (5). The electric push rod (401) is located in the middle of the frame (4), and the cleaning head (5) is located at the bottom of the electric push rod (401). The cleaning head (5) is provided with two spaced vertical partitions (501) inside. A positive pressure cavity is formed between the vertical partitions (501) and the inner wall of the cleaning head (5), and a negative pressure cavity is formed between the two vertical partitions (501) and the inner wall of the cleaning head (5). An air inlet pipe (502) connected to the positive pressure cavity is provided on both sides of the cleaning head (5). A vortex pipe (503) is connected to the end of the air inlet pipe (502). A cleaning hole connected to the positive pressure cavity is provided on both sides of the bottom of the cleaning head (5). An ultrasonic generator (504) is provided at the bottom of the positive pressure cavity of the cleaning head (5). A suction pipe (505) connected to the negative pressure cavity is provided on the upper side wall of the cleaning head (5). The frame (2) is provided with a support (201) inside, and an electric push rod (202) is provided on the top of the support (201). A working platform (6) is provided on the top of the electric push rod (202). The side wall of the vertical partition (501) is provided with a horizontal partition (5011) that divides the positive pressure chamber into two. The interior of the horizontal partition (5011) is provided with a strip-shaped hole. A baffle (5012) is attached to the bottom of the strip-shaped hole of the horizontal partition (5011). Dry ice can be placed in the upper space of the horizontal partition (5011). The top of the cleaning head (5) is provided with a feed port for adding dry ice. The bottom ends of the diaphragm (5011) are connected to a servo motor (5013), and the output end of the servo motor (5013) is connected to a lead screw (5014). The lead screw (5014) passes through the baffle (5012). The air inlet pipe (502) is connected to the cold source output port of the vortex pipe (503). A connecting pipe (5021) is connected to the middle of the air inlet pipe (502). The other end of the connecting pipe (5021) is connected to the upper part of the positive pressure chamber of the cleaning head (5). A valve is provided on the connecting pipe (5021).

2. The dry ultrasonic dust removal self-cleaning machine according to claim 1, characterized in that: The bottom cleaning hole of the positive pressure chamber of the cleaning head (5) is elongated, and the air outlet direction of the bottom cleaning hole of the positive pressure chamber of the cleaning head (5) is obliquely set towards the center line of the cleaning head (5). The cleaning head (5) has a through hole of the same length as the cleaning hole at the bottom center of the negative pressure chamber.

3. The dry ultrasonic dust removal self-cleaning machine according to claim 1, characterized in that: The working platform (6) has a square hole in the middle, and a suction groove (7) is provided in the square hole. A support rod (701) is provided at the bottom of the suction groove (7), and the other end of the support rod (701) is fixed to the top of the bracket (201). The top of the suction groove (7) is provided with crisscrossing grooves, and the bottom of the suction groove (7) is provided with a through hole that communicates with the grooves.

4. The dry ultrasonic dust removal self-cleaning machine according to claim 3, characterized in that: The working platform (6) has sliding grooves on both sides, and a slider (601) is slidably connected inside the sliding groove. A clamp (602) is provided on the top of the slider (601). The clamp (602) is "L" shaped. An electric push rod (603) is provided between the slider (601) and the working platform (6).

5. The dry ultrasonic dust removal self-cleaning machine according to claim 4, characterized in that: Optical sensors (604) are provided at the four corners of the top of the working platform (6), and ball bearings (605) are arranged in a row on the top of the working platform (6).

6. The dry ultrasonic dust removal self-cleaning machine according to claim 5, characterized in that: Both sides of the bottom of the cleaning head (5) are provided with through-beam sensors (506).

7. The dry ultrasonic dust removal self-cleaning machine according to claim 6, characterized in that: The track (101) is equipped with a lead screw (102) inside, and a connecting seat (103) is sleeved on the outside of the lead screw (102). The frame (4) is fixedly installed on the top of the connecting seat (103). The end of the track (101) is equipped with a servo motor (104), and the servo motor (104) and the lead screw (102) establish a transmission relationship.

8. The dry ultrasonic dust removal self-cleaning machine according to claim 3, characterized in that: The clean room (1) is equipped with an air filtration assembly (8), which includes a positive pressure blower (801), a positive pressure filter box (802), a negative pressure blower (803) and a negative pressure filter box (804). The output port of the positive pressure blower (801) is connected to the air inlet of the positive pressure filter box (802) through a pipe, and the air outlet of the positive pressure filter box (802) is connected to the positive pressure chamber of the cleaning head (5) through a pipe. The output port of the negative pressure blower (803) is connected to the air outlet of the negative pressure filter box (804) through a pipe. The first air inlet of the negative pressure filter box (804) is connected to the negative pressure chamber of the cleaning head (5) through a pipe. The second air inlet of the negative pressure filter box (804) is connected to the air outlet of the suction tank (7) through a pipe.

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