Application of metal organic framework material in fluorine-containing electronic special gas storage

Abstract

The invention discloses application of a metal organic framework material in fluorine-containing electronic special gas storage, and belongs to the technical field of chemical adsorption, and the metal organic framework material is constructed by coordination of divalent metal ions, dicarboxylic acid organic ligands and amino-functionalized nitrogen-containing heterocyclic ligands. The metal organic framework material is used as an adsorption medium to be applied to storage and release of fluorine-containing electronic special gas, the affinity between the material and various fluorine-containing electronic special gas such as SF6, NF3, C3F6, CF4, BF3, C2F6, C3F8, CHF3, CF3I, C2F5I, GeF4, WF6 and AsF3 can be regulated and controlled by adjusting the types of ligands, and high-capacity storage and efficient release are achieved.

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