Inspection device and inspection method

Abstract

The invention provides an inspection apparatus. An inspection device (1) is provided with: an image acquisition unit (2) that acquires a visible light image of a substrate using visible light and acquires an infrared image of the substrate using infrared light; an inspection unit (41) that detects a defect of the substrate by performing inspection processing on each of the visible light image and the infrared image; and a defect type determination unit (42) that determines the defect type of the defect detected by the inspection unit (41) on the basis of the inspection processing results of the visible light image and the infrared image of the defect, and the region type of the region in which the defect exists. As a result, the defect type of the defect can be determined in detail.

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