A magnetic field control method and apparatus for chip manufacturing

Abstract

This invention relates to the technical field of magnetic field control in chip manufacturing, and discloses a magnetic field control method, system, and device for chip manufacturing. The magnetic field control method is applied to a magnetic field control device and specifically includes the following steps: S101: Receiving a user's control command, the control command carrying execution instructions for a first output unit and a second output unit, coil parameter information, and the corresponding magnetic field strength information under the coil parameter information; S102: Obtaining the execution command and sending it to the first and second output units to complete execution, and respectively obtaining the status information of the first and second output units. This invention allows the rated current output range of the first output unit to differ from that of the second output unit, satisfying the current value requirements. Furthermore, by setting multiple output units, users can conveniently test the changes in the magnetic field information generated by the coil under different current input values.

Description

Technical Field

[0001] This invention relates to the technical field of magnetic field control in chip manufacturing, and more specifically, to a magnetic field control method and apparatus for chip manufacturing. Background Technology

[0002] A magnetic field control device, also known as a constant current source, is used to provide a stable current to a coil or semiconductor device, enabling the coil to generate a stable magnetic field or providing a stable current to the semiconductor device to meet the needs of chip manufacturing. With the development of technology, in the process of wafer chip manufacturing, it is necessary to test or debug different parameter information of semiconductor equipment in the same processing technology to obtain the optimal way of wafer chip manufacturing. In the process of debugging the parameter information of semiconductor equipment, it is necessary to adjust the input parameter information. For example, when inputting current to a coil to form a magnetic field, it is necessary to determine the strength of the magnetic field under different current intensities and select the optimal input current value according to the process requirements of semiconductor processing. As the process develops, the strength of the current value also changes.

[0003] Existing magnetic field control devices can only connect to a single coil to provide a stable current for a single coil or a single semiconductor device, and the adjustable range of the current is narrow, which cannot meet the requirements for improvement of existing semiconductor manufacturing processes. Summary of the Invention

[0004] The purpose of this invention is to provide a magnetic field control method and apparatus for chip manufacturing, applied to a magnetic field control system. By setting different circuit structures for the first output unit and the second output unit of the magnetic field control device, the rated current output range of the first output unit is different from that of the second output unit. This allows users to conveniently test the changes in the magnetic field information generated by the coil when different current values ​​are input. This invention aims to solve the problem in the prior art that magnetic field control devices can only connect to a single coil and provide a stable current for a single coil or a single semiconductor device.

[0005] This invention is implemented as follows: a magnetic field control method for chip manufacturing, applied to a magnetic field control system, specifically includes the following steps: S101: Receive the user's control command, the control command carrying the execution command of the first output unit and the second output unit, the parameter information of the coil, and the magnetic field strength information corresponding to the parameter information of the coil; S102: Obtain the execution instruction and send it to the first output unit and the second output unit to complete the execution, and obtain the status information of the first output unit and the second output unit respectively; S103: Obtain the status information of the first output unit and the second output unit, and place the status information in the parameter comparison model generated by the magnetic field strength information corresponding to the parameter information of the coil and the parameter information of the wafer manufacturing, and determine whether the first output unit and the second output unit meet the working requirements. S104: Obtain the parameter characteristics of the first output unit and the second output unit compared with the parameter comparison model, and then feed back the status information of the first output unit and the second output unit to the host computer. Based on the parameter characteristics, determine the execution unit that matches the coil.

[0006] Furthermore, in S101, the user's control commands are received, including: The system receives connection requests sent by user terminals through a preset communication network. These connection requests are used to request the establishment of a connection with the magnetic field control device. Detect whether the current account on the user terminal is the target account; If the current account of the user terminal is the target account, a connection is established with the user terminal according to the connection request, and after the connection is established, the user's control instructions are received.

[0007] Furthermore, the preset communication network includes one or a combination of data transmission lines, 3G networks, 4G networks, 5G networks, and WIFI networks.

[0008] Furthermore, the preset communication network is provided in the magnetic field control device with a first communication interface and a second communication interface. The first communication interface is used to connect to the host computer, and the second communication interface enables data information exchange between different magnetic field control devices.

[0009] Further, in S103, the state information of the first output unit and the second output unit is obtained, and the state information is sequentially placed into a parameter comparison model generated based on the parameter information of the coil and the intensity information of the magnetic field corresponding to the parameter information of the coil. The parameter comparison model generation step includes: Obtain the parameter information of the coil and the intensity information of the magnetic field corresponding to the parameter information of the coil, and complete the mapping association between the parameter information of the coil and the intensity information of the corresponding magnetic field to obtain the mapping association set of the coil; Obtain multiple sub-parameter comparison models and sort them. Obtain the mapping association set of the coil, input the mapping association set into the first-ranked sub-parameter comparison model, and generate the parameter comparison model after the sub-parameter comparison model completes the identification of the mapping association set.

[0010] Further, determining whether the first output unit and the second output unit meet the operational requirements includes: The acquired state information of the first and second output units is identified to obtain the current and magnetic field data of the first and second output units. Obtain the generated parameter comparison model, place the current and magnetic field data of the current first output unit and the second output unit into the parameter comparison model, and obtain the data of the first output unit and the second output unit.

[0011] Furthermore, the parameter features of the first output unit and the second output unit compared with the parameter comparison model are obtained respectively, and the status information of the first output unit and the second output unit is fed back to the host computer, including: The host computer receives data from the first output unit and the second output unit transmitted by the magnetic field control device, and obtains the threshold range of the coil parameter information; Compare whether the data of the first output unit and the second output unit are within the threshold range of the coil's parameter information. If one of them is within the threshold range, the output unit that is selected is executed. If neither is within the threshold range, the data is fed back to the magnetic field control device for re-execution. If both are within the threshold range, the output unit with the smaller threshold error is selected for execution.

[0012] Compared with the prior art, the magnetic field control method, system, and apparatus for chip manufacturing provided by the present invention have the following advantages: 1. By setting different circuit structures for the first output unit and the second output unit, the rated current output range of the first output unit is different from that of the second output unit. The rated current output range of the first output unit is 0-10A, and the rated current output range of the second output unit is 0-20A. By setting different rated current output ranges, the current value requirements of different processing technologies of semiconductor equipment during chip production can be met. At the same time, by setting multiple output units, users can conveniently test the changes in the magnetic field information generated by the coil when different current values ​​are input. 2. The rated current ranges of the first output unit and the second output unit can be different or the same, which can meet different process testing requirements. Furthermore, by setting the first output unit and the second output power supply, the same magnetic field control device can simultaneously output different rated currents. It can also achieve the switching between the two output units of the same device, which is convenient for users to operate.

[0013] A magnetic field control system for chip manufacturing, executing the above-described magnetic field control method for chip manufacturing, the control system comprising: The communication module is used to receive user control commands and connect to the host computer. The processing module is used to acquire the execution instruction and send it to the first output unit and the second output unit to complete the execution, and to acquire the status information of the first output unit and the second output unit respectively; The judgment module is used to obtain the status information of the first output unit and the second output unit, and put the status information into the parameter comparison model in sequence to determine whether the first output unit and the second output unit meet the working requirements. The current output module includes a first output unit and a second output unit, which are respectively connected to different coils. The first output unit and the second output unit respectively output current intensity to the corresponding coil to meet its requirements.

[0014] Specifically, the communication module includes: The first communication interface is used to connect to the host computer. The second communication interface enables data information exchange between different magnetic field control devices through a preset communication network.

[0015] Furthermore, the processing module obtains the parameter information of the coil and the corresponding magnetic field strength information under the parameter information of the coil, and completes the mapping association between the parameter information of the coil and the corresponding magnetic field strength information to obtain the mapping association set of the coil; Obtain multiple sub-parameter comparison models and sort them. Obtain the mapping association set of the coil, input the mapping association set into the first-ranked sub-parameter comparison model, and generate the parameter comparison model after the sub-parameter comparison model completes the identification of the mapping association set.

[0016] A magnetic field control device for chip manufacturing includes a storage device and a processor, the storage device storing a computer program, and the processor running the computer program to cause the magnetic field control device to perform the magnetic field control method for chip manufacturing described above. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the magnetic field control system structure for chip manufacturing proposed in this invention. Figure 2 This is a schematic flowchart of the magnetic field control method for chip manufacturing proposed in this invention. Figure 3 This is a schematic diagram of the magnetic field control device for chip manufacturing proposed in this invention. Figure 4 This is a schematic diagram of another embodiment of the magnetic field control device for chip manufacturing proposed in this invention; Figure 5 This is a schematic diagram of the magnetic field control device for chip manufacturing proposed in this invention. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0019] The implementation of the present invention will be described in detail below with reference to specific embodiments.

[0020] In the accompanying drawings of this embodiment, the same or similar reference numerals correspond to the same or similar components. In the description of this invention, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this invention. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0021] Reference Figure 1 As shown, the magnetic field control system for chip manufacturing includes a host computer, a magnetic field control device, and a coil. The host computer receives user command information and sends the command information to the magnetic field control device. The magnetic field control device provides the corresponding current intensity to the coil, and the coil generates the corresponding magnetic field intensity.

[0022] Reference Figure 2 As shown, the magnetic field control method for chip manufacturing, applied to a magnetic field control system, specifically includes the following steps: S101: Receives the user's control command, which carries the execution command of the first output unit and the second output unit, the parameter information of the coil, and the intensity information of the corresponding magnetic field under the parameter information of the coil. Among them, receiving user control commands includes: The system receives connection requests sent by user terminals through a pre-set communication network. These connection requests are used to request the establishment of a connection with the magnetic field control device. Detect whether the user's current account is the target account; If the user terminal's current account is the target account, then connect to the user terminal according to the connection request, and after the connection is completed, receive the user's control commands; S102: Obtain the execution instruction and send it to the first output unit and the second output unit to complete the execution, and obtain the status information of the first output unit and the second output unit respectively; S103: Obtain the status information of the first output unit and the second output unit, and place the status information into the parameter comparison model generated based on the coil parameter information and the corresponding magnetic field strength information under the coil parameter information, and determine whether the first output unit and the second output unit meet the working requirements. The parameter comparison model generation steps include: Obtain the parameter information of the coil and the intensity information of the corresponding magnetic field, and complete the mapping association between the parameter information of the coil and the intensity information of the corresponding magnetic field, and obtain the mapping association set of the coil. Obtain multiple sub-parameter comparison models and sort them. Obtain the mapping association set of the coil, input the mapping association set into the first-ranked sub-parameter comparison model, and generate the parameter comparison model after the sub-parameter comparison model completes the identification of the mapping association set. S104: Obtain the parameter features of the first output unit and the second output unit compared with the parameter comparison model, and then feed back the status information of the first output unit and the second output unit to the host computer. Based on the parameter features, determine the execution unit that conforms to the coil. This involves acquiring the parameter features of the first and second output units compared to the parameter comparison model, and then feeding back the state information of the first and second output units to the host computer, including: The host computer receives data from the first and second output units transmitted by the magnetic field control device and obtains the threshold range of the coil's parameter information; The system compares the data from the first and second output units to see if they fall within the threshold range of the coil's parameter information. If one of them is within the threshold range, that output unit is selected for execution. If neither is within the threshold range, the data is fed back to the magnetic field control device for re-execution. If both are within the threshold range, the output unit with the smaller threshold error is selected for execution. By setting different circuit structures for the first and second output units, the rated current output ranges of the first and second output units are different. The rated current output range of the first output unit is 0–10A, and the rated current output range of the second output unit is 0–20A. By setting different rated current output ranges, the current value requirements of different semiconductor processing techniques during chip manufacturing can be met. At the same time, by setting multiple output units, users can conveniently test the changes in the magnetic field information generated by the coil when different current values ​​are input.

[0023] In this embodiment, the preset communication network includes one or a combination of data transmission lines, 3G networks, 4G networks, 5G networks, Bluetooth, and WIFI networks. The preset communication network is located in the magnetic field control device and is provided with a first communication interface and a second communication interface. The first communication interface is used to connect to the host computer, and the second communication interface enables data information exchange between different magnetic field control devices.

[0024] In this embodiment, determining whether the first output unit and the second output unit meet the operational requirements includes: The acquired state information of the first and second output units is identified to obtain the current and magnetic field data of the first and second output units. Obtain the generated parameter comparison model, place the current and magnetic field data of the current first output unit and the second output unit into the parameter comparison model, and obtain the data of the first output unit and the second output unit.

[0025] This technical solution sets different circuit structures for the first output unit and the second output unit, so that the rated current output range of the first output unit is different from that of the second output unit. The rated current output range of the first output unit is 0 to 10A, and the rated current output range of the second output unit is 0 to 20A. By setting different rated current output ranges, the current value requirements of different processing technologies of semiconductor equipment during chip production can be met. At the same time, by setting multiple output units, users can conveniently test the changes in the magnetic field information generated by the coil when different current values ​​are input.

[0026] Reference Figure 3 As shown, a magnetic field control device for chip manufacturing is applied to a magnetic field control system. The magnetic field control device includes: a communication module for receiving user control commands and connecting to a host computer; a processing module for acquiring execution commands and sending them to a first output unit and a second output unit for execution, and acquiring the status information of the first output unit and the second output unit respectively; and a judgment module for acquiring the status information of the first output unit and the second output unit, placing the status information sequentially in a parameter comparison model, and judging whether the first output unit and the second output unit meet the working requirements. The rated current ranges of the first output unit and the second output unit in this technical solution can be different or the same, which can meet different process testing requirements. Furthermore, by setting the first output unit and the second output power supply, the same magnetic field control device can simultaneously output different rated currents, and the dual output units of the same device can be switched, which is convenient for user operation. The current output module includes a first output unit and a second output unit, which are respectively connected to different coils. The first output unit and the second output unit output current to their respective coils to meet their required current intensities. In this embodiment, the communication module includes: a first communication interface for connecting to a host computer; and a second communication interface for enabling data exchange between different magnetic field control devices through a preset communication network. Furthermore, in this embodiment, if a magnetic field control device detects a new magnetic field control device connected to the second communication interface, it automatically assigns a corresponding network address to the newly connected magnetic field control device and sends the newly generated network address information to the host computer through the first communication interface. If a magnetic field control device sequentially connects to multiple new magnetic field control devices through the second communication interface, the magnetic field control device connected to the host computer sequentially assigns corresponding network addresses to the subsequently connected magnetic field control devices.

[0027] The processing module receives user control commands. Upon receiving the user's control commands, the processing module sends the corresponding control commands to the judgment module. The judgment module obtains the status information of the first output unit and the second output unit respectively, and outputs the corresponding status information, such as determining whether the first output unit and the second output unit can work. If there is a problem with the first output unit, the user is prompted to switch to control the second output unit. That is, after the device is started, the judgment unit determines and confirms the status information of the first output unit and the second output unit according to the user's command information.

[0028] By judging the status information of the two output units, the corresponding working status is confirmed and fed back to the host computer. The host computer can select the corresponding output unit to output current according to the corresponding working status. The processing module receives the current output control command from the host computer and sends the corresponding current output command to different output units respectively.

[0029] During the operation of the magnetic field control device, if the judgment module detects an abnormality in the status of one of the output units, the magnetic control device will send a status message to remind the user to replace the output unit interface. This can reduce the replacement of the magnetic field control device and improve its efficiency. By setting the first output unit and the second output power supply, the same magnetic field control device can simultaneously output different rated currents. It can also achieve the switching between the two output units of the same device, making it convenient for users to operate.

[0030] Reference Figure 4As shown, this is another embodiment of a magnetic field control device for chip manufacturing disclosed in this invention, including a communication module, a processing module, a judgment module, a current output module, and a monitoring module. The monitoring module is used to monitor the current intensity information of the magnetic field control device and obtain the magnetic field intensity information of the coil. Based on the preset magnetic field intensity information, it automatically adjusts the current output intensity of the magnetic field control device.

[0031] Reference Figure 5 As shown, a magnetic field control device for chip manufacturing includes a storage device and a processor. The storage device stores a computer program, and the processor runs the computer program to cause the magnetic field control device to perform the aforementioned magnetic field control method for chip manufacturing.

[0032] In this embodiment, the entire operation process can be controlled by a computer, along with a PLC, to achieve automated operation control. In each operation stage, sensors can be set up to provide signal feedback and ensure that the steps are performed sequentially. These are all conventional knowledge in current automation control, and will not be elaborated on in this embodiment.

[0033] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A magnetic field control method for chip manufacturing, applied to a magnetic field control system, the magnetic field control system comprising a host computer, a magnetic field control device, and a coil, characterized in that, The magnetic field control device includes a current output module, which includes a first output unit and a second output unit. The first output unit and the second output unit are respectively connected to different coils, and the first output unit and the second output unit respectively output current intensity to the corresponding coil to meet its requirements. The host computer receives user commands and sends them to the magnetic field control device. The magnetic field control device provides a corresponding current intensity to the coil, which then generates a corresponding magnetic field intensity. The method specifically includes the following steps: S101: Receive the user's control command, the control command carrying the execution command of the first output unit and the second output unit, the parameter information of the coil, and the magnetic field strength information corresponding to the parameter information of the coil; S102: Obtain the execution instruction and send it to the first output unit and the second output unit to complete the execution, and obtain the status information of the first output unit and the second output unit respectively. The status information includes current and magnetic field data. S103: Obtain the status information of the first output unit and the second output unit, and place the status information in the parameter comparison model generated based on the parameter information of the coil and the magnetic field strength information corresponding to the parameter information of the coil, and determine whether the first output unit and the second output unit meet the working requirements. S104: The host computer receives the data from the first output unit and the second output unit transmitted by the magnetic field control device, and obtains the threshold range of the coil parameter information; compares whether the data from the first output unit and the second output unit are within the threshold range of the coil parameter information. If one of them is within the threshold range, the output unit is selected for execution. If neither is within the threshold range, the data is fed back to the magnetic field control device for re-execution. If both are within the threshold range, the output unit with the smaller threshold error is selected for execution.

2. The magnetic field control method for chip manufacturing as described in claim 1, characterized in that, In S101, user control commands are received, including: The system receives connection requests sent by user terminals through a preset communication network. These connection requests are used to request the establishment of a connection with the magnetic field control device. Detect whether the current account on the user terminal is the target account; If the current account of the user terminal is the target account, a connection is established with the user terminal according to the connection request, and after the connection is established, the user's control instructions are received.

3. The magnetic field control method for chip manufacturing as described in claim 2, characterized in that, The preset communication network includes one or a combination of data transmission lines, 4G networks, Bluetooth, and WIFI networks.

4. The magnetic field control method for chip manufacturing as described in claim 3, characterized in that, The preset communication network is located in the magnetic field control device and is equipped with a first communication interface and a second communication interface. The first communication interface is used to connect to the host computer, and the second communication interface enables data information exchange between different magnetic field control devices.

5. The magnetic field control method for chip manufacturing as described in claim 4, characterized in that, In S103, the state information of the first output unit and the second output unit is obtained, and the state information is sequentially placed into a parameter comparison model generated based on the coil parameter information and the corresponding magnetic field strength information under the coil parameter information. The parameter comparison model generation step includes: Obtain the parameter information of the coil and the magnetic field strength information corresponding to the parameter information of the coil, and complete the mapping association between the parameter information of the coil and the corresponding magnetic field strength information to obtain the mapping association set of the coil; Obtain multiple sub-parameter comparison models for processing the mapping association set of the coil, and sort the sub-parameter comparison models; Obtain the mapping association set of the coil, input the mapping association set into the first-ranked sub-parameter comparison model, and generate the parameter comparison model after the sub-parameter comparison model completes the identification of the mapping association set.

6. The magnetic field control method for chip manufacturing as described in claim 5, characterized in that, Determine whether the first output unit and the second output unit meet the working requirements, including: The acquired state information of the first and second output units is identified to obtain the current and magnetic field data of the first and second output units. Obtain the generated parameter comparison model, place the current and magnetic field data of the current first output unit and the second output unit into the parameter comparison model, and obtain the data of the first output unit and the second output unit.

7. The magnetic field control method for chip manufacturing as described in claim 6, characterized in that, In S104, the parameter characteristics of the first output unit and the second output unit compared with the parameter comparison model are obtained respectively, and then the state information of the first output unit and the second output unit is fed back to the host computer, including: The host computer receives data from the first output unit and the second output unit transmitted by the magnetic field control device, and obtains the threshold range of the coil parameter information; Compare whether the data of the first output unit and the second output unit are within the threshold range of the coil's parameter information. If one of them is within the threshold range, the output unit that is selected is executed. If neither is within the threshold range, the data is fed back to the magnetic field control device for re-execution. If both are within the threshold range, the output unit with the smaller threshold error is selected for execution.

8. A magnetic field control device for chip manufacturing, applied to a magnetic field control system, the magnetic field control system comprising a host computer, a magnetic field control device, and a coil, characterized in that, The magnetic field control method for chip manufacturing according to any one of claims 1-7, wherein the magnetic field control device comprises: The communication module is used to receive user control commands and connect to the host computer. The processing module is used to acquire the execution instruction and send it to the first output unit and the second output unit to complete the execution, and to acquire the status information of the first output unit and the second output unit respectively, the status information including current and magnetic field data; The judgment module is used to obtain the status information of the first output unit and the second output unit, and put the status information into the parameter comparison model in sequence to determine whether the first output unit and the second output unit meet the working requirements. The current output module includes a first output unit and a second output unit, the first output unit and the second output unit are respectively connected to different coils, and the first output unit and the second output unit respectively output current intensity to the corresponding coil to meet its requirements. The host computer is used to receive user command information and send the command information to the magnetic field control device. The magnetic field control device provides the corresponding current intensity to the coil, and the coil generates the corresponding magnetic field intensity.

9. The magnetic field control device for chip manufacturing as described in claim 8, characterized in that, The communication module includes: The first communication interface is used to connect to the host computer. The second communication interface enables data information exchange between different magnetic field control devices through a preset communication network.

10. The magnetic field control device for chip manufacturing as described in claim 9, characterized in that, The processing module obtains the parameter information of the coil and the corresponding magnetic field strength information under the parameter information of the coil, and completes the mapping association between the parameter information of the coil and the corresponding magnetic field strength information to obtain the mapping association set of the coil. Obtain multiple sub-parameter comparison models for processing the mapping association set of the coil, and sort the sub-parameter comparison models; Obtain the mapping association set of the coil, input the mapping association set into the first-ranked sub-parameter comparison model, and generate the parameter comparison model after the sub-parameter comparison model completes the identification of the mapping association set.

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