固晶机

By separating the die picking and die bonding processes and utilizing the compensation mechanism of the transfer platform and visual inspection mechanism, the problem of insufficient accuracy and stability of the die bonder during long-term operation is solved, achieving a high level of accuracy and stability, and making it suitable for various wafer requirements.

CN120376459BActive Publication Date: 2026-07-17NODING INTELLIGENCE

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NODING INTELLIGENCE
Filing Date
2025-04-21
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

The actuators of existing die bonders are difficult to maintain high precision during long-term operation, mainly due to their cumbersome design and complex operating logic, which affects the placement accuracy and stability.

Method used

The crystal picking and bonding processes are divided into two independent steps, which are executed separately by the crystal picking mechanism and the crystal bonding mechanism. The operation logic is simplified and the accuracy and stability are improved by the stability of the transfer platform and the compensation mechanism of the vision inspection mechanism.

Benefits of technology

Despite the limitations of material physical properties, it maintains high-precision operation over long periods, improving placement accuracy and stability, and expanding its application range to meet different wafer requirements.

✦ Generated by Eureka AI based on patent content.

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Abstract

本发明公开了一种固晶机,其设有沿第一水平方向依序排布的固晶工位、中转工位以及取晶工位,并且包括运载机构、中转机构、固晶机构、取晶机构、供晶机构以及视觉检测机构,该些执行机构围绕上述三个工位进行配置。基于上述结构,该固晶机具有第一固晶模式,其将取晶过程和固晶过程分别交由取晶机构和固晶机构来执行。由于中转平台在标定后位置保持稳定,不易使晶片产生新的位移偏差及角度偏差,因此在取晶机构对存在位置偏差的晶片进行补偿后,固晶机构仅主要负责补偿基板的位置偏差以及向基板贴合晶片。这样的设计有效地简化了固晶机构的运行逻辑和动作,使其在材料的物理属性(如强度、刚度等)有限的情况下仍能够长时间的保持高精度运行。
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