Optical fiber communication device for magnetron sputtering on-line adjustable magnetic bar

Abstract

The invention belongs to the technical field of magnetron sputtering equipment, and discloses an optical fiber communication device for a magnetron sputtering on-line adjustable magnetic bar, which comprises an external optical fiber communication assembly and an internal optical fiber communication assembly, the external optical fiber communication assembly comprises an optical fiber transmitting terminal, the optical fiber transmitting terminal is arranged in a light transmitting terminal channel on a base assembly, and the optical fiber transmitting terminal is connected with the optical fiber transmitting terminal; the light-emitting surface of the optical fiber transmitting terminal faces the magnet yoke assembly; the internal optical fiber communication assembly comprises a receiving terminal which is installed in a receiving terminal channel on the magnet yoke assembly, and the light inlet face of the receiving terminal is right opposite to the optical fiber transmitting terminal. A sealing assembly is arranged in the optical fiber transmitting terminal channel and located on the side where the light-emitting face of the light transmitting terminal is located, the sealing assembly seals the side of the optical fiber transmitting terminal channel, and an optical signal emitted by the optical fiber transmitting terminal can penetrate through the sealing assembly and is received by the receiving terminal, so that the magnetic yoke assembly can swing relative to the base assembly, and meanwhile the magnetic yoke assembly can swing relative to the base assembly. And signal transmission and communication can be realized.

Description

Technical Field

[0001] The present invention belongs to the technical field of magnetron sputtering equipment, and particularly relates to an optical fiber communication device for an on-line adjustable magnetic rod in magnetron sputtering. Background Art

[0002] Physical vapor deposition using sputtering has become a standard technique for customizing the properties of, for example, glass plates or other rigid or flexible materials. "Sputtering" refers to the ballistic ejection of coating material atoms from a sputtering target by positively charged ions, which are accelerated by an electric field directed at the negatively charged sputtering target. The positively charged ions (usually argon ions) are formed by collision ionization in a low-pressure gas phase. The ejected atoms impinge on the substrate to be coated, where a dense and well-adhering coating is formed. The disadvantage is that the magnetron must be opened, so the vacuum must be removed to allow adjustment, and the vacuum must be reapplied after the adjustment is completed. This is very time-consuming. One of the process problems faced is that a magnetic field generator must be included in the sputtering target. The magnetic field generator oriented towards the substrate to be coated is usually kept stationary while the cylindrical sputtering target rotates in front of it. High-performance permanent magnets based on neodymium iron boron (Fe-Nd-B) alloys or cobalt samarium (Co-Sm) alloys are used to generate the magnetic field. Since the magnetic field component parallel to the surface of the sputtering target determines the range of electrons in the plasma, it is important to control this component along the length of the tube. Unfortunately, the magnetic induction intensity (in tesla) of this component usually decreases at least with the square of the distance from the magnetic field generator, and is therefore very sensitive to the position of the magnetic field generator relative to the surface of the sputtering target. The distance between the surface of the sputtering target and the magnetic field generator must therefore be well controlled, otherwise the plasma will exhibit local intensity variations, which can correspondingly lead to non-uniform coating profiles on the substrate.

[0003] In the field of magnetron sputtering industry, the most widely used is the cylindrical target, whose inner diameter of the target cylinder is 125 mm. In order to enable magnetron sputtering products to obtain the best uniformity. Especially in the LowE market, the on-line adjustable magnetic rod has become an indispensable choice for producing high-end LowE products.

[0004] During the operation of the on-line adjustable magnetic rod, adjustment cannot be separated from real-time signal interaction with the outside, and data feedback, correction and control are carried out on its adjustment. However, due to the fact that during magnetron sputtering, the entire magnetic rod is in the cooling water environment inside the target material and needs to swing by a certain amplitude, then based on the above conditions, how to achieve on-line information interaction of the magnetic rod is a problem to be solved. Summary of the Invention

[0005] The object of the present invention is to provide an optical fiber communication device for an on-line adjustable magnetic rod in magnetron sputtering, which aims to solve the technical problems existing in the background art.

[0006] In order to solve the above-mentioned technical problems, the purpose of the present invention is achieved as follows: A fiber optic communication device for an online adjustable magnetic rod for magnetron sputtering, comprising a base assembly and a drive assembly, wherein a target material is sleeved on the outside of a magnetic yoke assembly, and the two ends of the target material and the magnetic yoke assembly are movably connected to the base assembly and the drive assembly respectively; comprising an external fiber optic communication assembly and an internal fiber optic communication assembly, wherein the external fiber optic communication assembly is arranged on the base assembly, and the internal fiber optic communication assembly is installed on the magnetic yoke assembly; the external fiber optic communication assembly comprises an external fiber optic transceiver terminal, and a fiber optic transmitting terminal channel is provided on the base assembly, wherein the external fiber optic transceiver terminal is passed through the external fiber optic transceiver terminal channel, and the light emitting terminal of the external fiber optic transceiver terminal is facing the magnetic yoke assembly; the internal optical fiber communication assembly includes an internal optical fiber transceiver terminal; an internal optical fiber transceiver terminal channel is provided on the magnetic yoke assembly at the connection end with the base assembly, the internal optical fiber transceiver terminal is arranged in the internal optical fiber transceiver terminal channel, and the light input surface of the internal optical fiber transceiver terminal faces the external optical fiber transceiver terminal; a sealing assembly is provided in the external optical fiber transceiver terminal channel on the side where the light output surface of the optical fiber transmitting terminal is located, the sealing assembly seals this side of the external optical fiber transceiver terminal channel, and the optical signal emitted by the external optical fiber transceiver terminal can penetrate the sealing assembly and be received by the internal optical fiber transceiver terminal.

[0007] On the basis of the above solution and as a preferred solution of the above solution: the sealing component includes a light-transmitting baffle, which is embedded in the fiber optic transmitting terminal channel and adjacent to the side where the light-emitting surface of the internal fiber optic transceiver terminal is located.

[0008] On the basis of the above solution and as a preferred solution of the above solution: a sealing ring is provided between the light-transmitting baffle and the optical fiber transmitting terminal channel.

[0009] On the basis of the above solution and as a preferred solution of the above solution: it also includes a limiting component, which limits the light-transmitting baffle to the position within the fiber optic transmitting terminal channel; the limiting component is located on the side of the light-transmitting baffle away from the sealing ring.

[0010] On the basis of the above solution and as a preferred solution of the above solution: the limiting assembly includes a pressure ring arranged on the side of the light-transmitting baffle away from the sealing ring, and an elastic retaining spring is clamped on the outer side of the pressure ring.

[0011] Based on the above solution and as a preferred solution of the above solution: The external optical fiber communication component further includes an external optical fiber mounting base and an external optical fiber limiting member. The front end of the external optical fiber mounting base penetrates into the optical fiber transmitting terminal channel, and the rear end is pressed by a screw at the entrance end of the optical fiber transmitting terminal channel. The external optical fiber mounting base has an external optical fiber transceiver terminal accommodating cavity and a transmitting and introducing optical fiber passing hole. The external optical fiber transceiver terminal is received in the external optical fiber transceiver terminal accommodating cavity and is limited by the external optical fiber limiting member. The optical fiber introducing section passes outwards through the transmitting and introducing optical fiber passing hole.

[0012] Based on the above solution and as a preferred solution of the above solution: The internal optical fiber communication component further includes an internal optical fiber transceiver terminal mounting member and an internal optical fiber transceiver terminal limiting member. A through internal optical fiber transceiver terminal accommodating hole and an internal optical fiber transceiver terminal optical fiber leading-out hole are provided in the middle of the internal optical fiber transceiver terminal mounting member. The internal optical fiber transceiver terminal mounting member is connected to the side surface of the yoke assembly facing the external optical fiber communication component. The internal optical fiber transceiver terminal is received in the internal optical fiber transceiver terminal accommodating hole. The optical fiber section of the internal optical fiber transceiver terminal is led out through the optical fiber leading-out hole. The internal optical fiber transceiver terminal limiting member is threadedly connected to the opening of the internal optical fiber transceiver terminal accommodating hole to limit the internal optical fiber transceiver terminal in the internal optical fiber transceiver terminal accommodating hole. The receiving end of the internal optical fiber transceiver terminal is exposed outwards through the terminal leading-out hole of the internal optical fiber transceiver terminal limiting member, and the receiving end of the internal optical fiber transceiver terminal is flush with the outer end surface of the terminal leading-out hole.

[0013] Based on the above solution and as a preferred solution of the above solution: On the outer shell of the yoke assembly, near the location where the optical fiber leading-out hole is located, a wire passing groove is obliquely provided from the middle outwards. The optical fiber section passes out from the end of the wire passing groove, and the end of the wire passing groove is near the position of the main control board. On the outer shell, a wire passing hole is provided near the end of the wire passing groove. An optical fiber connector assembly is installed on the wire passing hole to connect the optical fiber section to the optical fiber connector assembly, and the optical fiber section inside the optical fiber connector assembly is conducted with the main control board.

[0014] On the basis of the above scheme and as a preferred scheme of the above scheme: the base assembly includes a mounting plate, which separates the vacuum area of the vacuum sputtering equipment from the outside; and also includes an external mounting assembly, which includes an outlet pipe, a first flange, a mounting block and a flange connector. A through hole is opened on the mounting plate, the end of the outlet pipe is inserted into the through hole, and the outer peripheral surface is fully welded to the edge of the through hole. The first flange is located on the end of the outlet pipe away from the mounting plate, and the connection between the two is fully welded. A second flange is provided at the lower end of the mounting block, and the second flange is adapted to the first flange. The flange connector presses the second flange onto the first flange, and a seal is provided between the second flange and the first flange.

[0015] On the basis of the above scheme and as a preferred scheme of the above scheme: the end of the mounting block away from the second flange is the mounting end, and two mounting holes are provided on the upper end surface of the mounting end, and the bottom of each mounting hole has an outlet channel connected to the lower end of the second flange; a clamping piece is connected to the inner thread of the mounting hole, and a channel sealing ring is provided between the clamping piece and the bottom surface of the mounting hole.

[0016] Compared with the prior art, the present invention has the following outstanding and beneficial technical effects: the present application sets an external fiber optic communication component and an internal fiber optic communication component, the external fiber optic communication component is set on the base component, and the internal fiber optic communication component is installed on the magnetic yoke component; the external fiber optic communication component includes an external fiber optic transceiver terminal, and a fiber optic transmitting terminal channel is set on the base component, the external fiber optic transceiver terminal is passed through the external fiber optic transceiver terminal channel, and the light emitting surface of the external fiber optic transceiver terminal faces the magnetic yoke component; the internal fiber optic communication component includes an internal fiber optic transceiver terminal; the internal fiber optic transceiver terminal channel is set on the connection end of the magnetic yoke component with the base component, the internal fiber optic transceiver terminal is passed through the internal fiber optic transceiver terminal channel, and the light inlet surface of the internal fiber optic transceiver terminal faces the external fiber optic transceiver terminal; in the external fiber optic transceiver terminal channel, a A sealing component seals this side of the external optical fiber transceiver terminal channel, and the optical signal emitted by the external optical fiber transceiver terminal can penetrate the sealing component and be received by the internal optical fiber transceiver terminal; thereby, the yoke component can swing relative to the base component while also realizing signal transmission and communication; in addition, since during actual operation, the yoke component is located inside the target material, but the target material is filled with cooling water, this will cause the connection end between the yoke component and the base component to be filled with cooling water, and the outside of the target material is a vacuum area for magnetron sputtering. The target material is connected to the base assembly and is sealed with the base assembly, then the external optical fiber transceiver terminal channel will connect the vacuum area with the cooling water, so that the cooling water will be sprayed into the vacuum area; by setting up the sealing component and the sealing component can penetrate the optical signal; thereby, the cooling water and the vacuum area are isolated while the signal is transmitted. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a three-dimensional schematic diagram of the overall structure of the present invention; Figure 2 is a cross-sectional view of the overall structure of the present invention; Figure 3 is a schematic diagram of the installation position of the fiber optic connector assembly on the outer housing; Figure 4 is a three-dimensional structure schematic diagram of the yoke assembly; Figure 5 is Figure 2 a partial enlarged view at position A in Figure 6 is Figure 2 a partial enlarged view at position B in Figure 7 is the external fiber optic communication component; Figure 8 is the internal fiber optic communication component.

[0018] Base assembly 10, upper mounting plate 11, lower support plate 12, screw 121, mounting seat 13, target support seat 14, sliding bearing 15, first cavity 141, support disk 142, second cavity 143, magnetic rod support seat 18, support hole 181, protective cover 19, yoke assembly 20, outer housing 21, wire trough 211, wire hole 212, fiber optic connector assembly 213, positioning seat 23, external fiber optic communication component 30, external fiber optic transceiver terminal 31, fiber optic introduction section 311, fiber optic extraction section 312, external fiber optic section 313, external fiber optic mounting seat 32, transmitting introduction fiber penetration hole 32a, external fiber optic transceiver terminal accommodation cavity 32b, external fiber optic limiting member 33, light-transmitting baffle 34, retaining ring 35, elastic snap ring 36, sealing ring 37, internal fiber optic communication component 40, internal fiber optic transceiver terminal 41, receiving end 41a, fiber optic section 411, internal fiber optic transceiver terminal mounting member 42, internal fiber optic transceiver terminal fiber extraction hole 42a, internal fiber optic transceiver terminal accommodation hole 42b, internal fiber optic transceiver terminal limiting member 43, terminal extraction hole 431, limiting protrusion 432, external mounting component 50, lead-out pipe 51, first flange 52, mounting block 53, second flange 531, mounting end 532, wire outlet channel 533, flange connecting member 54, pressing member 55, channel sealing ring 56, sealing member 57, target 60, drive assembly 70, target cavity a, cavity b. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] To make the objectives, technical solutions and advantages of the present application clearer, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the given embodiments without creative efforts shall fall within the scope of protection of the present application.

[0020] In the description of the present application, it should be understood that the orientation or positional relationship indicated by terms such as "upper", "lower", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0021] In the description of the present application, terms such as "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features.

[0022] In combination with Figure 1-8As shown in the figure, the present application discloses an optical fiber communication device for an online adjustable magnetic rod in magnetron sputtering. Specifically, the equipment involved in magnetron sputtering includes a base assembly 10, a magnetic yoke assembly 20, a target 60, a driving assembly 70, etc. Among them, the base assembly 10 includes an upper mounting plate 11, a lower support plate 12, a mounting seat 13, and a target support seat 14. The mounting plate 11 is fixedly installed on the mounting port of the magnetron sputtering equipment, separating the vacuum working area of the magnetron sputtering equipment from the outside. The lower support plate 12 is fixedly installed on the mounting plate 11 and is located on one side of the vacuum working area of the magnetron sputtering equipment. Of course, the driving assembly 70 is also installed on this surface of the mounting plate 11. The driving assembly 70 provides a driving force for the rotation of the target. The structure of the driving assembly 70 is the same as that of the prior art and will not be elaborated here. The mounting seat 13 is fixedly installed on the lower support plate 12 and faces the end surface where the driving assembly 70 is located. The target support seat 14 includes a support disk 142 and a columnar connecting end. A through mounting hole is provided in the middle of the mounting seat 13, and the connecting end is inserted into the mounting hole. A sliding bearing 15 is provided between the connecting end and the inner wall of the mounting hole, so that the target support seat 14 can rotate flexibly relative to the mounting seat 13. The target 60 is of a cylindrical structure, and one end of it is nested on the positioning boss of the support disk 142. Thus, through the corresponding support structures of the target support seat 14 and the driving assembly 70, the target 60 is supported and positioned. Of course, it should be noted that a sealing member is provided between the positioning boss of the support disk 142 and the contact surface of the target 60, and a sealing member is provided between the contact surface of the driving assembly 70 and the target 60. Thus, a sealed space is formed inside the target 60. During the actual working process, the ionized electrons / ions will violently impact the outer surface of the target 60. Therefore, a large amount of heat will be generated on the target 60, and circulating cooling water needs to be introduced into its inner cavity to cool down the target. In order to enable the target 60 to be consumed evenly, it rotates continuously or intermittently under the drive of the driving assembly 70 according to the set rotation amplitude. Of course, the target 60 is sleeved outside the magnetic yoke 20. In order to support the magnetic yoke 20, in addition to providing a corresponding support structure on the side of the driving assembly 70 to support one end of the magnetic yoke 20; it also includes the magnetic rod support seat 18 provided in the present application. Among them, a second cavity 143 is provided in the middle of the support disk 142. Both the second cavity 143 and the magnetic rod support seat 18 are of circular structures, and the magnetic rod support seat 18 is embedded in the second cavity 143. A through support hole 181 is provided in the middle of the magnetic rod support seat 18. A through first cavity 141 for accommodating the external optical fiber communication component 30 is provided at the connecting end of the target support seat 14. The first cavity 141 communicates with the second cavity 143. The external optical fiber communication component 30 penetrates into the first cavity 141 from the side where the lower support plate 12 is located, and its optical fiber emission end faces the side where the magnetic yoke 20 is located. Specifically, see Figure 7As shown, the external optical fiber communication component 30 includes an external optical fiber transceiver terminal 31, an external optical fiber mounting base 32, and an external optical fiber limiting member 33. The front end of the external optical fiber mounting base 32 penetrates into the first cavity 141 through the through hole in the lower support plate 12, and there is a gap between the external optical fiber mounting base 32 and the inner wall of the first cavity 141. The rear end is pressed by a screw 121 in the embedding groove opened at the end of the through hole. The external optical fiber mounting base 32 has an external optical fiber transceiver terminal accommodating cavity 32b and a transmitting introduction optical fiber passing hole 32a. The external optical fiber transceiver terminal 31 is received in the external optical fiber transceiver terminal accommodating cavity 32b, and the optical fiber introduction section 311 passes outwards from the transmitting introduction optical fiber passing hole 32a. Specifically, the optical fiber introduction section 311 passes outwards through the mounting base 13, the lower support plate 12, and the mounting plate 11 in sequence, and is connected to the optical transmitter of the controller through an external communication optical fiber. Of course, in order to protect the optical fiber introduction section 311, a sheath is provided outside the optical fiber introduction section 311. Of course, after it passes out of the lower support plate 12 and enters the mounting plate 11, in order to prevent electrons or ions from damaging the sheath or accelerating its aging, it is preferably provided with a protective cover 19 outside this section. The protective cover 19 is fixedly installed on the lower support plate 12, and the sheath is shielded by the protective cover 19. Preferably, the protective cover 19 is a sandblasted shielding cover.

[0023] See Figure 5 As shown, the yoke assembly 20 includes a housing 21, a connecting seat 22, and a positioning seat 23. The connecting seat 22 is fixedly installed on the housing 21, the positioning seat 23 is connected to the connecting seat 22, and the positioning seat 23 is hollow. See Figure 8As shown, the internal optical fiber communication component 40 includes an internal optical fiber transceiver terminal 41, an internal optical fiber transceiver terminal mounting member 42, and an internal optical fiber transceiver terminal limiting member 43. Among them, a through internal optical fiber transceiver terminal accommodating hole 42b and an internal optical fiber transceiver terminal optical fiber leading-out hole 42a are provided in the middle of the internal optical fiber transceiver terminal mounting member 42. The internal optical fiber transceiver terminal mounting member 42 is threadedly connected to the connection seat 22 and is located on the side facing the external optical fiber communication component 30. The internal optical fiber transceiver terminal 41 is received in the internal optical fiber transceiver terminal accommodating hole 42b, and the optical fiber section 411 of the internal optical fiber transceiver terminal 41 is led out from the optical fiber leading-out hole 42a. The internal optical fiber transceiver terminal limiting member 43 is threadedly connected to the opening of the internal optical fiber transceiver terminal accommodating hole 42b to limit the internal optical fiber transceiver terminal 41 in the internal optical fiber transceiver terminal accommodating hole 42b. The receiving end 41a of the internal optical fiber transceiver terminal 41 is exposed outward through the terminal leading-out hole 431 of the internal optical fiber transceiver terminal limiting member 43, and the receiving end 41a of the internal optical fiber transceiver terminal 41 is flush with the outer end surface of the terminal leading-out hole 431. Preferably, the internal optical fiber transceiver terminal 41 is fixed in the internal optical fiber transceiver terminal leading-out hole 431 through a transparent resin or other adhesive material, and the receiving end 41a of the internal optical fiber transceiver terminal 41 and the outer end surface of the terminal leading-out hole 431 are processed by grinding so that the two planes are flush. Of course, in order to avoid the problem that the internal optical fiber transceiver terminal limiting member 43 is screwed into the internal optical fiber transceiver terminal accommodating hole 42b excessively, which may damage the internal optical fiber transceiver terminal 41, in this embodiment, it is preferred that a limiting protrusion 432 is provided on the outer peripheral surface of the internal optical fiber transceiver terminal limiting member 43. When the internal optical fiber transceiver terminal limiting member 43 is screwed in, when the limiting protrusion 432 contacts the outer end surface of the internal optical fiber transceiver terminal accommodating hole 42b, it cannot be screwed in further, effectively protecting the internal optical fiber transceiver terminal. The internal optical fiber communication component 40 is located in the hollow of the positioning seat 23. The positioning seat 23 is aligned with the support hole 181 of the magnetic rod support seat 18 and inserted into the support hole 181. After the magnetic yoke 20 is installed in place, the internal optical fiber communication component 40 is coaxial with the external optical fiber communication component 30, so that the optical fiber emitting end of the external optical fiber communication component 30 is aligned with the receiving end 41a of the internal optical fiber transceiver terminal 41 of the internal optical fiber communication component 40. Then, the optical fiber emitted by the external optical fiber communication component 30 can be received by the internal optical fiber transceiver terminal 41 of the internal optical fiber communication component 40. Conversely, the internal optical fiber transceiver terminal 41 of the internal optical fiber communication component 40 can also emit an optical signal, which is received by the external optical fiber transceiver terminal 31 of the external optical fiber communication component 30, realizing the conduction of external optical signals to the inside of the magnetron sputtering device. At the same time, the feedback signal lamp inside the magnetron sputtering device can also be conducted to the external control device to realize two-way communication transmission.Since the target material 60 needs to be cooled by passing cooling water into the target cavity a during operation, after the yoke assembly 20 is installed in place, a cavity b will be formed between the target support seat 14 and the positioning seat 23, and the cavity b will be filled with cooling water. Since the target support seat 14 seals this end of the target material 60, the cavity b can only be connected to the vacuum environment through the first cavity 141 opened on the target support seat 14, but once connected, the cooling water will flow out or seep from the first cavity 141 into the magnetron sputtering equipment; at the same time, it cannot affect the optical signal transmitted from the external optical fiber communication component 30 to the internal optical fiber communication component 40; for this reason, this embodiment preferably seals the first cavity 141 on this side with a light-transmitting material to prevent the cooling water in the target material 60 from entering the first cavity 141, and the light signal can pass through the light-transmitting material. Specifically, in this embodiment, a stepped hole is provided at one end of the first cavity 141 adjacent to cavity b. A light-transmitting baffle 34 is embedded in the stepped hole. A sealing ring 37 is provided between the light-transmitting baffle 34 and the stepped surface of the stepped hole. A pressure ring 35 is provided on the side of the light-transmitting baffle 34 facing away from the sealing ring 37. An elastic retaining spring 36 is secured to the outer side of the pressure ring 35. The elastic retaining spring 36 compresses the pressure ring 35, thereby pushing the light-transmitting baffle 34 to squeeze the sealing ring 37, thereby sealing the first cavity 141 and preventing the leakage of cooling water. At the same time, the optical signal emitted by the external optical fiber communication component 30 also passes through the light-transmitting baffle 34 and the cooling water in cavity b before being received by the internal optical fiber transceiver terminal 41 of the internal optical fiber communication component 40. Preferably, the light-transmitting baffle 34 in this embodiment may be made of glass, but other light-transmitting materials, such as polymer materials, may also be selected. The material that best transmits the corresponding optical fiber can be selected based on the different optical fibers being transmitted.

[0024] In addition, see Figure 3 and Figure 4 As shown, since the main control board and control components of the yoke assembly 20 are both disposed within the outer shell 21, and the outer shell 21 is entirely sealed, cooling water is prevented from entering the interior of the outer shell 21, which could damage the main control board, control components, etc.; and the internal optical fiber communication component 40 is coaxial with the axis of the yoke assembly 20. If the optical fiber segment 411 is directly inserted axially from the outer shell 21 into the interior thereof, it would interfere with the adjustment components within the outer shell 21. To this end, in this embodiment, an oblique threading groove 211 is provided at the connection between the connecting seat 22 and the outer shell 21. The optical fiber segment 411 passes through the end of the threading groove 211, which is adjacent to the location of the main control board. A threading hole 212 is provided on the outer shell 21, adjacent to the end of the threading groove 211. An optical fiber connector assembly 213 is installed in the threading hole, and the optical fiber segment 411 is connected to the optical fiber connector assembly 213. The optical fiber segment inside the optical fiber connector assembly 213 is electrically connected to the main control board.

[0025] Of course, since the entire device is located in the vacuum area of the vacuum sputtering equipment, and the optical fiber introduction section 311 of the external optical fiber communication component 30 needs to pass through the mounting plate 11 to the atmosphere side to conduct with the external controller; then there is a leakage problem at the position where the optical fiber introduction section 311 passes through the mounting plate 11, thus destroying the vacuum environment on the vacuum side; see Figure 1 , Figure 2 and Figure 6 As shown, to solve this problem, in this embodiment, an external mounting component 50 is provided on the atmosphere side of the mounting plate 11, which includes an outlet pipe 51, a first flange 52, a mounting block 53, a flange connecting piece 54, a pressing piece 55 and a channel sealing ring 56. A through hole is provided on the mounting plate 11. The end of the outlet pipe 51 is inserted into the through hole, and the outer peripheral surface is fully welded to the edge of the through hole. The first flange 52 is located at the end of the outlet pipe 51 away from the mounting plate 11, and the connection between the two is fully welded. A second flange 531 is provided at the lower end of the mounting block 53, and the second flange 531 is adapted to the first flange 52. The flange connecting piece 54 presses the second flange 531 on the first flange 52. Preferably, a sealing member 57 is provided between the second flange 531 and the first flange 52 to seal between the first flange 52 and the second flange 531. One end of the mounting block 53 away from the second flange 531 is the mounting end 532. Two mounting holes are provided on the upper end surface of the mounting end 532. Each mounting hole bottom has a wire outlet channel 533 communicating with the lower end of the second flange 531. In this way, the optical fiber outlet section 312 can pass through the through hole of the mounting plate 11 and the outlet pipe 51 and penetrate into the wire outlet channel 533, and then pass out through the mounting hole. Of course, considering the sealing at the mounting hole, in this embodiment, a pressing piece 55 is threadedly connected to the mounting hole. A channel sealing ring 56 is provided between the pressing piece 55 and the bottom surface of the mounting hole. A wire passing channel is provided on the pressing piece 55. The optical fiber outlet section 312 finally passes through the wire passing channel and is connected to the external control device through the external optical fiber section 313. By tightening the pressing piece 55, the channel sealing ring 56 is deformed by extrusion. By adjusting the aperture of the bottom of the mounting hole to a suitable size, or setting the bottom of the mounting hole as a conical surface structure, during the process of the pressing piece 55 extruding the channel sealing ring 56 to deform, the space for the channel sealing ring 56 to deform outward is preferred, and it will extend to the outer peripheral surface of the optical fiber outlet section 312 and then tightly wrap around its outer peripheral surface to completely seal it, so that while the optical fiber outlet section 312 extends, its sealing can be ensured and the vacuum of the vacuum sputtering equipment is prevented from being affected.

[0026] The above embodiments are only the preferred embodiments of the present invention, and do not limit the protection scope of the present invention accordingly. Therefore, all equivalent changes made according to the structure, shape and principle of the present invention should be covered within the protection scope of the present invention.

Claims

1. An optical fiber communication device for an on-line adjustable magnetic rod in magnetron sputtering, comprising a base assembly (10) and a driving assembly (70). A target (60) is sleeved outside a magnetic yoke assembly (20), and two ends of the target (60) and the magnetic yoke assembly (20) are respectively movably connected to the base assembly (10) and the driving assembly (70); It is characterized in that: The invention comprises an external optical fiber communication component (30) and an internal optical fiber communication component (40), wherein the external optical fiber communication component (30) is arranged on the base component (10), and the internal optical fiber communication component (40) is installed on the magnetic yoke component (20); the external optical fiber communication component (30) comprises an external optical fiber transceiver terminal (31), and an optical fiber transmitting terminal channel is provided on the base component (10), and the external optical fiber transceiver terminal (31) is passed through the external optical fiber transceiver terminal channel, and the light emitting surface of the external optical fiber transceiver terminal (31) faces the magnetic yoke component (20); the internal optical fiber communication component (40) comprises an internal optical fiber transceiver terminal (41); an internal optical fiber transceiver terminal channel is provided on the yoke assembly (20) at the connection end with the base assembly (10), the internal optical fiber transceiver terminal (41) is inserted into the internal optical fiber transceiver terminal channel, and the light-incoming surface of the internal optical fiber transceiver terminal (41) faces the external optical fiber transceiver terminal (31); a sealing assembly is provided in the external optical fiber transceiver terminal channel on the side where the light-emitting surface of the optical fiber transmitting terminal is located, the sealing assembly seals the side of the external optical fiber transceiver terminal channel, and the optical signal emitted by the external optical fiber transceiver terminal (31) can penetrate the sealing assembly and be received by the internal optical fiber transceiver terminal (41).

2. The fiber optic communication device for an on-line adjustable magnetic rod in magnetron sputtering according to claim 1, wherein: The sealing component comprises a light-transmitting baffle (34), which is embedded in the optical fiber transmitting terminal channel and is adjacent to the side where the light-emitting surface of the internal optical fiber transmitting and receiving terminal (41) is located.

3. The fiber optic communication device for an online adjustable magnetic rod in magnetron sputtering according to claim 2, characterized in that: A sealing ring (37) is provided between the light-transmitting baffle (34) and the optical fiber transmitting terminal channel.

4. The optical fiber communication device for an on-line adjustable magnetic control sputtering magnetic rod according to claim 3, characterized in that: It also includes a limiting component, which limits the light-transmitting baffle (34) to be located within the optical fiber transmitting terminal channel; the limiting component is located on the side of the light-transmitting baffle (34) away from the sealing ring (37).

5. The fiber optic communication device for an online adjustable magnetic rod in magnetron sputtering according to claim 4, wherein: The limiting assembly comprises a pressing ring (35) arranged on a side of the light-transmitting baffle (34) away from the sealing ring (37), and an elastic retaining spring (36) is clamped on the outer side of the pressing ring (35).

6. The fiber optic communication device for an online adjustable magnetic control sputtering magnetic rod according to claim 5, characterized in that: The external optical fiber communication component (30) further includes an external optical fiber mounting seat (32) and an external optical fiber limiting member (33), wherein the front end of the external optical fiber mounting seat (32) is inserted into the optical fiber transmitting terminal channel, and the rear end is pressed against the entrance end of the optical fiber transmitting terminal channel by a screw (121); the external optical fiber mounting seat (32) has an external optical fiber transceiver terminal accommodating cavity (32b) and an emission introduction optical fiber through-hole (32a), the external optical fiber transceiver terminal (31) is received in the external optical fiber transceiver terminal accommodating cavity (32b) and is limited by the external optical fiber limiting member (33), and the optical fiber introduction section (311) is passed through the emission introduction optical fiber through-hole (32a) to the outside.

7. An optical fiber communication device for an online adjustable magnetic rod in magnetron sputtering according to claim 1, characterized in that: The internal optical fiber communication component (40) further includes an internal optical fiber transceiver terminal mount (42) and an internal optical fiber transceiver terminal limiter (43). A through internal optical fiber transceiver terminal accommodation hole (42b) and an internal optical fiber transceiver terminal optical fiber lead-out hole (42a) are provided in the middle of the internal optical fiber transceiver terminal mount (42). The internal optical fiber transceiver terminal mount (42) is connected to the side surface of the yoke assembly (20) facing the external optical fiber communication component (30). The internal optical fiber transceiver terminal (41) is received in the internal optical fiber transceiver terminal accommodation hole (42b), and the optical fiber section (411) of the internal optical fiber transceiver terminal (41) is led out through the optical fiber lead-out hole (42a). The internal optical fiber transceiver terminal limiter (43) is threadedly connected to the opening of the internal optical fiber transceiver terminal accommodation hole (42b) to limit the internal optical fiber transceiver terminal (41) in the internal optical fiber transceiver terminal accommodation hole (42b). The receiving end (41a) of the internal optical fiber transceiver terminal (41) is exposed outward through the terminal lead-out hole (431) of the internal optical fiber transceiver terminal limiter (43), and the receiving end (41a) of the internal optical fiber transceiver terminal (41) is flush with the outer end surface of the terminal lead-out hole (431).

8. An optical fiber communication device for an on-line adjustable magnetic rod in magnetron sputtering according to claim 7, characterized in that: On the outer shell (21) of the yoke assembly (20), near the location where the optical fiber lead-out hole (42a) is located, a wire trough (211) is obliquely provided from the middle to the outside. The optical fiber section (411) passes out from the end of the wire trough (211), and the end of the wire trough (211) is near the position of the main control board. On the outer shell (21), a wire passing hole is opened near the end of the wire trough (211). An optical fiber connector assembly (213) is installed on the wire passing hole to connect the optical fiber section (411) to the optical fiber connector assembly (213), and the optical fiber section inside the optical fiber connector assembly (213) is conducted with the main control board.

9. The fiber optic communication device for an online adjustable magnetic control sputtering magnetic rod according to claim 1, characterized in that: The base assembly (10) includes a mounting plate (11), and the mounting plate (11) separates the vacuum area of the vacuum sputtering device from the outside. It further includes an external mounting assembly (50), which includes a lead-out pipe (51), a first flange (52), a mounting block (53), and a flange connecting piece (54). A through hole is opened on the mounting plate (11). The end of the lead-out pipe (51) is inserted into the through hole, and the outer peripheral surface is fully welded to the edge of the through hole. The first flange (52) is located at the end of the lead-out pipe (51) far from the mounting plate (11), and the connection between the two is fully welded. A second flange (531) is provided at the lower end of the mounting block (53), and the second flange (531) is adapted to the first flange (52). The flange connecting piece (54) presses the second flange (531) against the first flange (52), and a sealing member (57) is provided between the second flange (531) and the first flange (52).

10. An optical fiber communication device for an on-line adjustable magnetic rod in magnetron sputtering according to claim 9, characterized in that: One end of the mounting block (53) away from the second flange (531) is a mounting end (532). Two mounting holes are formed in the upper end surface of the mounting end (532). A wire outlet channel (533) communicating with the lower end of the second flange (531) is provided at the bottom of each mounting hole. A pressing member (55) is threadedly connected in the mounting hole, and a channel sealing ring (56) is arranged between the pressing member (55) and the bottom surface of the mounting hole.

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