A three-axis integrated microgyroscope spherical shell resonant structure of spherical standing wave three-dimensional precession effect

Abstract

This invention discloses a spherical resonant structure for a three-axis integrated micro gyroscope with a three-dimensional precession effect of spherical standing waves. The structure includes a spherical resonator, several electrodes, and a shell. The angular velocity of the three-axis rotation is measured by measuring the mode shape of the spherical resonator using the electrodes. A support column is centrally located on the spherical resonator. The outer layer of the spherical resonator is an inner spherical shell. The support column includes several U-shaped support beams, an anchor sphere, and a base. The inner spherical shell has a non-uniform thickness distribution and an opening at its lower end for the support column to pass through. The lower boundary of the opening coincides with the upper boundary of the base. The electrodes are located on the outside of the spherical resonator. A capacitor gap exists between the outer wall of the spherical resonator and the inner wall of the electrode. The electrodes are placed every 45 degrees along the equator of the spherical resonator and every 90 degrees at 45 degrees in both the upper and lower hemispheres. The electrodes are embedded in the shell. Its significant advantages are: simple structure, breaking through the spatial limitation of two-dimensional precession of traditional hemispherical resonant gyroscopes, and utilizing the spatial precession characteristics of spherical harmonic standing waves under the action of multi-degree-of-freedom inertial forces to achieve three-axis angular velocity measurement under a single structure.

Description

Technical Field

[0001] This invention relates to a spherical resonant structure for a three-axis integrated miniature gyroscope exhibiting three-dimensional precession effect of spherical standing waves, belonging to...

[0002] The field of microelectromechanical gyroscope technology. Background Technology

[0003] Inertial navigation technology, as a core enabling technology in the field of autonomous perception, strategically allows us to reduce our over-reliance on external information. Whether in environments with signal interference or in particularly complex electromagnetic conditions, it can provide highly accurate spatial position information. Applications such as high-precision missile guidance, outer space exploration, and autonomous decision-making by unmanned equipment all rely on it.

[0004] As the core component of inertial navigation systems, the performance of gyroscopes directly determines the system's accuracy and reliability, making them a key focus of inertial technology research. Among these, hemispherical resonator gyroscopes based on the precession principle have attracted considerable attention due to their advantages such as all-solid-state architecture, resistance to extreme environments, wide dynamic response, and direct angular rate integral output. However, existing hemispherical resonator gyroscopes are limited by the physical constraints of their single-axis sensing architecture. Multi-axis sensing requires mechanical orthogonal stacking, leading to a significant increase in system size and difficulty in suppressing inter-axis coupling errors, severely restricting their further miniaturization prospects. Therefore, researching a gyroscope structure capable of measuring three-axis angular velocities has become an important direction in current gyroscope research. Summary of the Invention

[0005] The purpose of this invention is to provide a spherical resonant structure for a three-axis integrated micro gyroscope with a three-dimensional precession effect of spherical standing waves. This structure can break through the spatial limitation of two-dimensional precession in traditional hemispherical resonant gyroscopes and utilize the spatial precession characteristics of spherical standing waves under the action of multi-degree-of-freedom inertial forces to achieve three-axis angular velocity measurement in a single structure.

[0006] A three-axis integrated micro gyroscope spherical shell resonant structure with three-dimensional precession effect of spherical standing wave includes a spherical resonator, several electrodes and a shell, wherein the center of the spherical resonator is configured as a support column and the outer layer of the spherical resonator is an inner spherical shell;

[0007] Furthermore, the support column includes: several U-shaped support beams, an anchor sphere, a base, and a base support; one end of each U-shaped support beam is connected to the anchor sphere, and the other end is in direct contact with the inner spherical shell, and the endpoints of the U-shaped support beams are connected in the form of a regular tetrahedron; one end of the base support is connected to the anchor sphere, and the other end is connected to the base, and the support column has a symmetrical structure; the U-shaped support beams, the anchor sphere, the base, and the base support are a whole, requiring integral manufacturing during processing.

[0008] Thus, the U-shaped support beam 10 adopts a tetrahedral layout structure, which can effectively improve the anti-interference performance; at the same time, the support column 6 adopts an integrated processing technology, which significantly simplifies the processing process and improves processing convenience due to the integral structural design.

[0009] Further, the U-shaped support beam includes: a first support cantilever beam, a first U-shaped support cantilever beam, a second U-shaped support cantilever beam, a third U-shaped support cantilever beam, and a second support cantilever beam. The first support cantilever beam is connected to the anchor sphere, and its other end is connected to one end of the first, second, and third U-shaped support cantilever beams. The first, second, and third U-shaped support cantilever beams are spaced 120 degrees apart. The other end of the first, second, and third U-shaped support cantilever beams is connected to the second support cantilever beam, and the other end of the second support cantilever beam contacts the inner spherical shell.

[0010] Furthermore, the inner spherical shell has a non-uniform thickness distribution and an opening at its lower end for the support column to pass through, wherein the lower boundary of the opening coincides with the upper boundary of the base. The non-uniform thickness distribution can be achieved by adjusting the inner wall thickness of the inner spherical shell.

[0011] In this way, by adjusting the thickness distribution of the inner spherical shell, specific vibration modes can be effectively optimized, thereby achieving more accurate measurement of the axial rotation angle. For example, the structural features at the opening at the lower end of the inner spherical shell have a significant impact on the vibration modes of the spherical resonator. Therefore, increasing the local thickness at the opening at the lower end of the inner spherical shell can effectively improve the vibration mode characteristics of the spherical resonator.

[0012] Furthermore, the outer shell includes a left outer shell and a right outer shell, which together can completely enclose the spherical harmonic oscillator and have a cuboid shape.

[0013] Furthermore, the plurality of electrodes 2 are disposed on the outer side of the spherical resonator 1 in the shape of arc tiles and are divided into three groups. The first group is the equatorial electrode 17, which has eight electrodes distributed on the equator of the spherical resonator 1, with each electrode spaced at an angle of 45 degrees. The second group is the upper hemisphere electrode 18, which has four electrodes distributed on the upper hemisphere at an angle of 45 degrees, with each electrode spaced at an angle of 90 degrees. The third group is the lower hemisphere electrode 19, which has four electrodes distributed on the lower hemisphere at an angle of 45 degrees, with each electrode spaced at an angle of 90 degrees.

[0014] In this way, the distribution of the electrodes can measure the mode shape changes of the spherical harmonic oscillator from multiple angles, thereby enabling the measurement of three axial angles.

[0015] Further, the inner spherical shell has a radius of 1~50mm; the radius of the anchor area sphere is 1 / 4 of the radius of the inner spherical shell; the base has the same radius as the anchor area sphere and a thickness of 1 / 2 the radius of the base; the ratio of the length of the first support beam, the U-shaped radius of the U-shaped support beam, and the length of the second support beam in the U-shaped support beam is 4:3:4, wherein the length of the first support beam is 1 / 5 of the radius of the inner spherical shell, and the coarse and fine radii of the U-shaped support beam are 0.025~1.2mm, which is smaller than the average radius of the inner spherical shell.

[0016] Furthermore, the electrodes are arranged in arc-shaped tiles with the center of the spherical resonator as the reference, with a central angle of 20-25 degrees and a thickness of 0.20-0.25 mm. The thickness of the capacitor gap is 0.15-0.20 mm. The rectangular prism formed by the outer shell has the same length and width of 5-240 mm and a height of 2.5-130 mm. The length, width, and height of the outer shell must all be greater than the diameter of the inner spherical shell.

[0017] Compared with the prior art, the advantages and beneficial effects of the present invention are as follows:

[0018] (1) Traditional hemispherical resonator gyroscopes can only measure angles along a single axis, which has significant limitations in measurement dimensions. This invention, through structural innovation, can achieve simultaneous measurement of angles along multiple axes, expanding the range and practicality of angle detection and meeting the multidimensional measurement needs in complex scenarios.

[0019] (2) Existing single-structure MEMS three-axis gyroscopes cannot achieve direct angular rate integral output based on the precession principle. However, this invention breaks through this technical limitation by utilizing the precession principle, and achieves direct integral output of angular rate, thereby improving the efficiency of data processing.

[0020] (3) The thickness of the inner spherical shell is changed by adjusting the thickness of the inner wall of the inner spherical shell, which can effectively improve the vibration mode characteristics of the spherical harmonic oscillator. The precise control of the vibration mode through thickness adjustment provides a more flexible and reliable adjustment path for multi-dimensional dynamic angle detection, and enhances the adaptability and measurement stability of the sensor under complex working conditions. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of a spherical resonant structure for a three-axis integrated micro gyroscope with a three-dimensional precession effect of spherical standing waves.

[0022] Figure 2 This is a schematic diagram of the inner spherical shell in this invention.

[0023] Figure 3 for Figure 2 AA section view

[0024] Figure 4This is a schematic diagram of the support beam in this invention.

[0025] Figure 5 This is a top view of the support beam in this invention.

[0026] Figure 6 This is a schematic diagram of the electrode distribution in this invention.

[0027] Figure 7 This is a schematic diagram of the precession of a spherical harmonic standing wave rotating about the Z-axis.

[0028] Figure 8 This is a schematic diagram of the precession of a spherical harmonic standing wave rotating about the X-axis. Detailed Implementation

[0029] The specific embodiments and working principle of the present invention will be further described in detail below with reference to the accompanying drawings.

[0030] Example: Figures 1-6 As shown, a three-axis integrated micro gyroscope spherical shell resonant structure with three-dimensional precession effect of spherical standing wave includes a spherical resonator 1, several electrodes 2, and an outer shell. The spherical resonator includes a support column 6 and an inner spherical shell 5. The support column 6 includes several U-shaped support beams 10, an anchor sphere 9, a base 7, and a base support 8. One end of the U-shaped support beam 10 is connected to the anchor sphere 9, and the other end is in direct contact with the inner spherical shell 5. The endpoints of the U-shaped support beam 10 are connected to a regular tetrahedron. One end of the base support 8 is connected to the anchor sphere 9, and the other end is connected to the base 7. The support column has a symmetrical structure.

[0031] The U-shaped support beam 10 includes: a first support cantilever beam 16, a first U-shaped support cantilever beam 13, a second U-shaped support cantilever beam 14, a third U-shaped support cantilever beam 15, and a second support cantilever beam 12. The first support cantilever beam 16 is connected to the anchor sphere 9, and its other end is connected to one end of the first U-shaped support cantilever beam 13, the second U-shaped support cantilever beam 14, and the third U-shaped support cantilever beam 15. The first U-shaped support cantilever beam 13, the second U-shaped support cantilever beam 14, and the third U-shaped support cantilever beam 15 are spaced 120 degrees apart. The other end of the first U-shaped support cantilever beam 13, the second U-shaped support cantilever beam 14, and the third U-shaped support cantilever beam 15 is connected to the second support cantilever beam 12. The other end of the second support cantilever beam 12 is in contact with the inner spherical shell 5. The endpoints of the U-shaped support beam 10 are connected in a tetrahedral shape. The U-shaped support beam 10, the anchor sphere 9, the base 7, and the base support 8 are a single unit, requiring integral manufacturing during processing.

[0032] The inner spherical shell 5 has a non-uniform thickness distribution and an opening at its lower end for the support column to pass through. The lower boundary of the opening coincides with the upper boundary of the base. In practice, the non-uniform thickness distribution can be achieved by adjusting the inner wall thickness of the inner spherical shell, such as... Figure 3 As shown, the inner surface of the inner spherical shell is fitted by a multi-order spherical harmonic function.

[0033] Expression of spherical harmonic function:

[0034]

[0035] in, θ is the polar angle. This is the azimuth angle.

[0036] The plurality of electrodes 2 are disposed on the outer side of the spherical resonator 1 in the shape of arc tiles and are divided into three groups. The first group is the equatorial electrode 17, which has eight electrodes distributed on the equator of the spherical resonator 1, with each electrode spaced at an angle of 45 degrees. The second group is the upper hemisphere electrode 18, which has four electrodes distributed on the upper hemisphere at an angle of 45 degrees, with each electrode spaced at an angle of 90 degrees. The third group is the lower hemisphere electrode 19, which has four electrodes distributed on the lower hemisphere at an angle of 45 degrees, with each electrode spaced at an angle of 90 degrees. The outer wall of the spherical resonator 1 and the inner wall of the electrodes are separated by a capacitance gap 11.

[0037] The outer shell includes a left outer shell 3 and a right outer shell 4. The left outer shell 3 and the right outer shell 4, when combined, can completely enclose the spherical harmonic oscillator and have a cuboid shape.

[0038] The spherical resonator 1 has five different mode shapes. As the entire structure rotates, the mode shape of the sphere changes accordingly. Utilizing the spatial precession characteristics of spherical standing waves under multi-degree-of-freedom inertial forces, the distance between the spherical resonator 1 and electrode 2 changes. Therefore, the angular rate can be directly integrated and output using the precession principle. Furthermore, because the entire structure can rotate around the X, Y, and Z axes, the angular velocity around these three axes can be measured, overcoming the limitation of the hemispherical resonator, which can only measure the angular velocity of a single axis. Figure 7 as well as Figure 8 As shown, when the overall structure rotates around the Z-axis and X-axis, due to the spatial precession characteristics of the spherical harmonic standing wave under the action of multi-degree-of-freedom inertial forces, the mode shape will produce corresponding precession. From time t0 to time t2, the precession of the mode shape will cause the distance between it and the electrode to change, so the magnitude of the corresponding angular velocity and the direction of motion can be calculated.

[0039] Preferably, the inner spherical shell has a radius of 4 mm; the anchor sphere has a radius of 1 mm; the base has a radius of 1 mm and a thickness of 0.5 mm; the first support cantilever beam in the U-shaped support beam has a length of 0.8 mm, the U-shaped radius of the U-shaped support cantilever beam is 0.6 mm, the second support cantilever beam has a length of 0.8 mm, and the coarse and fine radii of the U-shaped support beam are 0.1 mm.

[0040] Preferably, the plurality of electrodes are arc-shaped tiles with the center of the spherical resonator as the reference, the corresponding central angle is 20 degrees, and the thickness is 0.2 mm. The thickness of the capacitor gap is 0.2 mm. The length, width and height of the cuboid formed by the outer shell are 20 mm * 20 mm * 11 mm.

[0041] It should be noted that the above embodiments are not intended to limit the scope of protection of the present invention. Equivalent transformations or substitutions made based on the above technical solutions all fall within the scope of protection of the claims of the present invention.

Claims

1. A spherical resonant structure for a three-axis integrated micro gyroscope with three-dimensional precession effect of spherical standing waves, characterized in that: The device includes a spherical resonator, several electrodes, and a shell. The center of the spherical resonator is set as a support column, and the outer layer of the spherical resonator is an inner spherical shell. The several electrodes are located on the outside of the spherical resonator. There is a capacitance gap between the outer wall of the spherical resonator and the inner wall of the electrode. The electrodes are placed every 45 degrees around the equator of the resonator and every 90 degrees at 45 degrees in the upper and lower hemispheres. The electrodes are embedded in the shell. The electrodes are arranged on the outside of the spherical resonator in the shape of arc tiles and are divided into three groups. The first group is the equatorial electrode, which has eight electrodes distributed on the equator of the spherical resonator, with each electrode spaced at a 45-degree angle. The second group is the upper hemisphere electrode, which has four electrodes distributed on the upper hemisphere at a 45-degree angle, with each electrode spaced at a 90-degree angle. The third group is the lower hemisphere electrode, which has four electrodes distributed on the lower hemisphere at a 45-degree angle, with each electrode spaced at a 90-degree angle. The spherical harmonic oscillator has five different mode shapes. As the entire structure rotates, the mode shape of the sphere changes accordingly. Utilizing the spatial precession characteristics of spherical harmonic standing waves under the action of multi-degree-of-freedom inertial forces, the distance between the spherical harmonic oscillator and the electrodes will change. Thus, the angular rate can be directly integrated and output through the precession principle. At the same time, the entire structure rotates around the X, Y, and Z axes, and the angular velocity of rotation around the three axes can be measured, which improves the drawback of the hemispherical harmonic oscillator, which can only measure the angular velocity of rotation around a single axis. When the overall structure rotates around the Z and X axes, due to the spatial precession characteristics of spherical harmonic standing waves under the action of multi-degree-of-freedom inertial forces, the mode shape will precess accordingly. From time t0 to time t2, the precession of the mode shape will cause the distance between it and the electrodes to change, thereby determining the magnitude and direction of the corresponding angular velocity.

2. The spherical shell resonant structure of a three-axis integrated micro gyroscope with three-dimensional precession effect of spherical standing waves according to claim 1, characterized in that, The inner spherical shell has a non-uniform thickness distribution and an opening structure at its lower end for the support column to pass through, wherein the lower boundary of the opening coincides with the upper boundary of the base. A non-uniform thickness distribution is achieved by adjusting the inner wall thickness of the inner spherical shell. The inner curved surface of the inner spherical shell is fitted by a multi-order spherical harmonic function. Expression of spherical harmonic function: in, θ is the polar angle. This is the azimuth angle.

3. The spherical shell resonant structure of a three-axis integrated micro gyroscope with three-dimensional precession effect of spherical standing waves according to claim 2, characterized in that: The support column includes: several U-shaped support beams, an anchor sphere, a base, and a base support; one end of the U-shaped support beam is connected to the anchor sphere, and the other end is in direct contact with the inner spherical shell; the endpoints of the U-shaped support beam are connected in the form of a regular tetrahedron; one end of the base support is connected to the anchor sphere, and the other end is connected to the base; the support column has a symmetrical structure.

4. The spherical shell resonant structure of a three-axis integrated micro gyroscope with three-dimensional precession effect of spherical standing waves according to claim 3, characterized in that: The U-shaped support beam includes a first support cantilever beam, a first U-shaped support cantilever beam, a second U-shaped support cantilever beam, a third U-shaped support cantilever beam, and a second support cantilever beam. The first support cantilever beam is connected to the anchor sphere, and its other end is connected to one end of the first U-shaped support cantilever beam, the second U-shaped support cantilever beam, and the third U-shaped support cantilever beam. The first U-shaped support cantilever beam, the second U-shaped support cantilever beam, and the third U-shaped support cantilever beam are spaced 120 degrees apart. The other end of the first U-shaped support cantilever beam, the second U-shaped support cantilever beam, and the third U-shaped support cantilever beam are all connected to the second support cantilever beam. The other end of the second support cantilever beam is in contact with the inner spherical shell.

5. The spherical shell resonant structure of a three-axis integrated micro gyroscope with three-dimensional precession effect of spherical standing waves according to claim 1, characterized in that: The outer shell includes a left outer shell and a right outer shell, which together completely enclose the spherical harmonic oscillator and have a cuboid shape.

6. The spherical shell resonant structure of a three-axis integrated micro gyroscope with three-dimensional precession effect of spherical standing waves according to claim 1, characterized in that: The U-shaped support beam, the anchor sphere, and the base are a single unit, requiring integral manufacturing during processing.

7. The spherical shell resonant structure of a three-axis integrated micro gyroscope with three-dimensional precession effect of spherical standing waves according to claim 3, characterized in that, The inner spherical shell has a radius of 1-50 mm; the radius of the anchor sphere is 1 / 4 of the radius of the inner spherical shell; the base has the same radius as the anchor sphere and a thickness of 1 / 2 the radius of the base; the ratio of the length of the first support beam, the U-shaped radius of the U-shaped support beam, and the length of the second support beam in the U-shaped support beam is 4:3:4, wherein the length of the first support beam is 1 / 5 of the radius of the inner spherical shell, and the radii of the thick and thin U-shaped support beams are 0.025-1.2 mm, which are smaller than the average radius of the inner spherical shell.

8. The spherical shell resonant structure of a three-axis integrated micro gyroscope with three-dimensional precession effect of spherical standing waves according to claim 1, characterized in that, The electrodes are arranged in arc-shaped tiles with the center of the spherical resonator as the reference, with the corresponding central angle being 20~25 degrees and the thickness being 0.20~0.25mm. The thickness of the capacitor gap is 0.15~0.20mm. The length and width of the cuboid formed by the outer shell are the same, and the height is 2.5~130mm. The length, width and height of the outer shell must be greater than the diameter of the inner spherical shell.

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