A synchronous polishing device for inner and outer walls of a furnace body in a single crystal furnace

Abstract

The application relates to the technical field of single crystal furnace maintenance, in particular to a synchronous polishing device for the inner and outer walls of a single crystal furnace body, which comprises an electric workbench, a driving motor and a polisher body, the driving motor is fixedly connected to the upper surface of the electric workbench, the lower end of a fixed plate on the electric workbench is rotationally connected with a rotating plate, a guiding mechanism is installed at the lower end of the rotating plate, a limiting control mechanism is fixedly connected to the lower surface of the rotating plate, an inner wall polishing mechanism is arranged between the guiding mechanism and the limiting control mechanism, and an outer wall polishing mechanism is arranged between the guiding mechanism and the limiting control mechanism. In the application, the two polisher bodies simultaneously adhere to the inner and outer walls of the single crystal furnace, so that the inner and outer walls can be simultaneously polished, the time loss of step-by-step operation is reduced, the polishing efficiency is improved, the polishing precision and roughness of the inner and outer walls are kept consistent, and the process difference caused by step-by-step operation is avoided.

Description

Technical Field

[0001] This invention relates to the field of single crystal furnace maintenance technology, specifically to a device for synchronously polishing the inner and outer walls of a single crystal furnace. Background Technology

[0002] The inner wall of a single-crystal furnace is in direct contact with the molten silicon and gaseous reactants. A rough surface can negatively impact crystal growth in several ways. Firstly, a rough surface interferes with melt flow, making it unstable and affecting the uniform deposition of silicon atoms. Secondly, it hinders gas diffusion, leading to uneven distribution of reactant gases within the furnace, severely impacting the quality of the single-crystal silicon. Polishing, on the other hand, ensures the inner wall surface roughness meets requirements, providing a favorable environment for crystal growth.

[0003] However, grinding the inner and outer walls separately during the grinding process is not only inefficient, but also makes it difficult to maintain consistent grinding precision and roughness between the inner and outer walls. It may also lead to differences in the process due to the step-by-step operation. Furthermore, grinding the inner and outer walls separately makes it difficult to use the grinding components to act on them simultaneously, and the step-by-step operation increases the consumption of time and manpower. Summary of the Invention

[0004] The purpose of this invention is to provide a device for simultaneous grinding of the inner and outer walls of a single crystal furnace, thereby solving the problems mentioned in the background art. To achieve the above objective, this invention provides the following technical solution: A device for simultaneous grinding of the inner and outer walls of a single crystal furnace, comprising an electric worktable, a drive motor, and a grinding machine body. The drive motor is fixedly connected to the upper surface of the electric worktable. A rotating plate is rotatably connected to the lower end of a fixed plate on the electric worktable. A guiding mechanism is installed at the lower end of the rotating plate. A limit control mechanism is fixedly connected to the lower surface of the rotating plate. An inner wall grinding mechanism is provided between the guiding mechanism and the limit control mechanism. An outer wall grinding mechanism is provided between the guiding mechanism and the limit control mechanism. A control locking mechanism is fixedly connected between the inner wall grinding mechanism and the outer wall grinding mechanism.

[0005] Preferably, the guiding mechanism includes a rotating roller, which is fixedly connected to the output shaft of the drive motor through a rotating plate. A rotating ring is rotatably connected to the surface of the rotating roller, and an L-shaped support rod is hinged to the side of the rotating ring. A hollow roller is sleeved on the surface of the rotating roller, and a support rod is rotatably hinged to the side of the rotating roller. A connecting rod is hinged to one side of the support rod. An inclined groove is formed on the surface of the rotating roller, and the hollow roller is slidably connected inside the inclined groove. A connecting rod is hinged to the surface of the L-shaped support rod, and a grinding machine body is fixedly connected to the end of the L-shaped support rod and the support rod.

[0006] Preferably, the inner wall grinding mechanism includes a limiting ring, which is sleeved on the surface of the hollow roller. A connecting rod is hinged to one side of the limiting ring. A damping block is fixedly connected to the inner wall of the limiting ring. A threaded rod is rotatably connected to the side of the limiting ring. A compression ball is fixedly connected to one end of the threaded rod, and a Z-shaped rod is fixedly connected to the other end of the threaded rod. The two ends of the Z-shaped rod are respectively hinged to the two sides of the opening on one side of the limiting ring. A slanted groove is fixedly connected to the surface of the Z-shaped rod. A sliding rod is fixedly connected to the surface of the hollow roller. The sliding rod is slidably connected inside the slanted groove. A sleeve is provided on the surface of the threaded rod. A slanted groove is opened inside the sleeve. A spring is installed inside the sleeve. A resistance ball is slidably connected between the sleeve and one end of the spring. The resistance ball slides in the slanted groove.

[0007] Preferably, the limiting control mechanism includes a limiting slide groove, the upper end of which is fixedly connected to the lower surface of the rotating plate, a slot is provided inside the limiting slide groove, a progressive slot is fixedly connected to the surface of the limiting slide groove, a hollow roller is slidably connected to the side of the limiting slide groove, one end of the rotating ring is fixedly connected to the surface of the limiting slide groove, and the sleeve slides linearly inside the limiting slide groove.

[0008] Preferably, the outer wall grinding mechanism includes a second limiting ring, which is sleeved on the surface of the hollow roller. One end of the second connecting rod is hinged to the second limiting ring. A fixing block is fixedly connected to one side of the second limiting ring. A slanted slider is vertically slidably connected inside the fixing block. A spline rod is horizontally slidably connected inside the fixing block. A conical block is fixedly connected to one end of the spline rod. A telescopic spring is provided between the surface of the spline rod and the interior of the fixing block. A round rod is fixedly connected to the side of the spline rod.

[0009] Preferably, the control locking mechanism includes a rectangular limiting slide sleeve, the bottom end of which is fixedly connected to the surface of a first limiting ring. A limiting slide rod is slidably connected inside the rectangular limiting slide sleeve, the upper end of which is fixedly connected to the lower surface of a second limiting ring. A transverse slide rod is fixedly connected inside the limiting slide rod, and a pressure plate is slidably connected inside the limiting slide rod. A pressing rod is fixedly connected to the lower end of the pressure plate. A return spring is provided between the pressure plate and the inside of the limiting slide rod. A slide rod is slidably connected to the surface of the transverse slide rod. A slot is formed on the surface of the rectangular limiting slide sleeve. An inclined block is fixedly connected to the upper end of the slide rod, and a triangular block is fixedly connected to the lower end of the slide rod.

[0010] In this invention, two grinding machine bodies are simultaneously attached to the inner and outer walls of the single crystal furnace, which allows for synchronous grinding. This reduces the time loss of separate operations, improves grinding efficiency, and ensures that the grinding precision and roughness of the inner and outer walls are consistent, avoiding process differences caused by separate operations.

[0011] In this invention, the sliding rod 1 drives the triangular block to slide outward and get stuck inside the slot 1. This allows the limiting ring 1 and the limiting ring 2 to be locked at the same time, thus ensuring the stability of the two grinding machine bodies and further improving grinding efficiency.

[0012] In this invention, the automation of the device can replace manual labor to enter the narrow interior of the furnace, avoiding uneven grinding or missed grinding caused by manual operation. At the same time, manual grinding poses risks such as mechanical injury. The automated device can significantly reduce the incidence of safety accidents through remote control or robotic arm operation. Attached Figure Description

[0013] Figure 1 This is a three-dimensional appearance diagram of the present invention;

[0014] Figure 2 This is a schematic diagram of the electric worktable structure from below.

[0015] Figure 3 This is a schematic diagram of the internal structure of the electric worktable of the present invention;

[0016] Figure 4 This is a schematic diagram of the guidance mechanism structure of the present invention;

[0017] Figure 5 This is a schematic diagram of the other side of the guidance mechanism of the present invention;

[0018] Figure 6 This is an enlarged structural schematic diagram of the limiting ring of the present invention;

[0019] Figure 7 This is an enlarged schematic diagram of the threaded rod structure of the present invention;

[0020] Figure 8 This is a schematic diagram of the side cross-sectional structure of the sleeve rod of the present invention;

[0021] Figure 9 This is a schematic diagram of the structure of limiting ring one and limiting ring two of the present invention;

[0022] Figure 10 This is a side cross-sectional view of the limiting control mechanism of the present invention;

[0023] Figure 11 This is a schematic diagram of the outer wall grinding mechanism of the present invention;

[0024] Figure 12 This is an enlarged schematic diagram of the spline bar structure of the present invention;

[0025] Figure 13 This is a schematic diagram of the control and locking mechanism structure of the present invention;

[0026] Figure 14This is a schematic diagram of the side cross-sectional structure of the rectangular limiting slide sleeve of the present invention;

[0027] Figure 15 This is an enlarged schematic diagram of the rectangular limiting sliding sleeve structure of the present invention;

[0028] Figure 16 This is an enlarged structural schematic diagram of the slide bar of the present invention.

[0029] In the diagram: 1. Electric worktable; 2. Drive motor; 3. Rotary plate; 4. Guiding mechanism; 5. Grinding machine body; 6. Inner wall grinding mechanism; 7. Limit control mechanism; 8. Outer wall grinding mechanism; 9. Control locking mechanism; 41. Rotary roller; 42. Rotary ring; 43. L-shaped support rod; 44. Hollow roller; 45. Support rod; 46. Connecting rod one; 47. Inclined groove; 48. Connecting rod two; 61. Limiting ring one; 62. Damping block; 63. Threaded rod; 64. Extrusion ball; 65. Z-shaped rod; 66. Inclined groove opening; 67. Slide rod; 68. Sleeve rod; 69. Inclined slide groove; 610. Spring; 611. Resistance ball; 71. Limiting slide groove; 72. Slot; 73. Progressive slot; 81. Limiting ring two; 82. Fixing block; 83. Inclined slide block; 84. Spline rod; 85. Conical block; 86. Telescopic spring; 87. Round rod; 91. Rectangular limiting sleeve; 92. Limiting slide rod; 93. Transverse slide rod; 94. Pressure plate; 95. Extrusion rod; 96. Return spring; 97. Slide rod one; 98. Slot one; 99. Inclined block; 910. Triangular block. Detailed Implementation

[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] Please see Figures 1 to 16 The present invention provides a technical solution: a synchronous grinding device for the inner and outer walls of a single crystal furnace, comprising an electric worktable 1, a drive motor 2, and a grinding machine body 5. The drive motor 2 is fixedly connected to the upper surface of the electric worktable 1. A rotating plate 3 is rotatably connected to the lower end of a fixed plate on the electric worktable 1. A guiding mechanism 4 is installed at the lower end of the rotating plate 3. A limit control mechanism 7 is fixedly connected to the lower surface of the rotating plate 3. An inner wall grinding mechanism 6 is provided between the guiding mechanism 4 and the limit control mechanism 7. An outer wall grinding mechanism 8 is provided between the guiding mechanism 4 and the limit control mechanism 7. A control locking mechanism 9 is fixedly connected between the inner wall grinding mechanism 6 and the outer wall grinding mechanism 8.

[0032] The guiding mechanism 4 includes a rotating roller 41, which passes through the rotating plate 3 and is fixedly connected to the output shaft of the drive motor 2. A rotating ring 42 is rotatably connected to the surface of the rotating roller 41. An L-shaped support rod 43 is hinged to the side of the rotating ring 42. A hollow roller 44 is sleeved on the surface of the rotating roller 41. A support rod 45 is hinged to the side of the rotating roller 41. A connecting rod 46 is hinged to one side of the support rod 45. When the rotating roller 41 rotates, it drives the inclined groove 47 to rotate simultaneously, causing the hollow roller 44, which is limited by the limiting groove 71, to slide down the surface of the rotating roller 41. When the hollow roller 44 slides downward, it drives the limiting ring 61 and the limiting ring 81 to slide downward simultaneously. When the limiting ring 61 slides downward, it pushes the support rod 45 through the connecting rod 46. The support rod 45 drives the grinding machine body 5 to expand outward until it fits into the interior of the single crystal furnace. The surface of the rotating roller 41 is provided with a groove 47. The hollow roller 44 slides inside the groove 47. The surface of the L-shaped support rod 43 is hinged with the connecting rod 48. The ends of the L-shaped support rod 43 and the support rod 45 are fixedly connected to the grinding machine body 5.

[0033] The inner wall grinding mechanism 6 includes a limiting ring 61, which is sleeved on the surface of the hollow roller 44. A connecting rod 46 is hinged to one side of the limiting ring 61. When the limiting ring 61 moves downward, it pushes a support rod 45 via the connecting rod 46. The support rod 45 causes the grinding machine body 5 to expand outward until it fits against the interior of the single crystal furnace. A damping block 62 is fixedly connected to the inner wall of the limiting ring 61. A threaded rod 63 is rotatably connected to the side of the limiting ring 61. One end of the threaded rod 63 is fixedly connected to a compression ball 64, and the other end is fixedly connected to a Z-shaped rod 65. Both ends of the Z-shaped rod 65 are hinged to the two sides of the opening on one side of the limiting ring 61. A slanted groove 66 is fixedly connected to the surface of the Z-shaped rod 65. A sliding rod 67 is fixedly connected to the surface of the hollow roller 44. 67 is slidably connected inside the inclined groove 66. The surface of the threaded rod 63 is provided with a sleeve 68. The sleeve 68 has an inclined groove 69 inside. A spring 610 is installed inside the sleeve 68. A resistance ball 611 is slidably connected between the sleeve 68 and one end of the spring 610. The resistance ball 611 slides in the inclined groove 69. When the Z-shaped rod 65 rotates, it drives the threaded rod 63 to rotate at the same time. The threaded rod 63 will rotate inside the sleeve 68 and move a little distance inside the sleeve 68. The threaded rod 63 drives the compression ball 64 to move at the same time. When the compression ball 64 moves, it will compress the resistance ball 611. After being compressed, the resistance ball 611 will slide outward inside the inclined groove 69. The resistance ball 611 slides into the slot 72 and locks the entire limiting ring 61.

[0034] The limit control mechanism 7 includes a limit slide 71, the upper end of which is fixedly connected to the lower surface of the rotating plate 3. A slot 72 is provided inside the limit slide 71, and a progressive slot 73 is fixedly connected to the surface of the limit slide 71. A hollow roller 44 is slidably connected to the side of the limit slide 71. One end of the rotating ring 42 is fixedly connected to the surface of the limit slide 71. The sleeve rod 68 slides linearly inside the limit slide 71. The drive motor 2 can rotate the roller 41, but cannot drive the rotating plate 3 to rotate. The rotating plate 3, which is not started, is in a relatively stationary state, so that the limit slide 71 is also in a relatively stationary state.

[0035] The outer wall polishing mechanism 8 includes a second limiting ring 81, which is sleeved on the surface of the hollow roller 44. One end of the second connecting rod 48 is hinged to the second limiting ring 81. When the hollow roller 44 moves downward, it simultaneously drives the second limiting ring 81 to slide downward. When the second limiting ring 81 slides, it pulls the second connecting rod 48, which in turn pulls the L-shaped support rod 43. The L-shaped support rod 43 pulls the polishing machine body 5 to rotate inward and fit against the outer wall of the single crystal furnace. A fixing block 82 is fixedly connected to one side of the second limiting ring 81. A slanted slider 83 is vertically slidably connected inside the fixing block 82, and a spline rod is horizontally slidably connected inside the fixing block 82. 84. A conical block 85 is fixedly connected to one end of the spline rod 84. A telescopic spring 86 is provided between the surface of the spline rod 84 and the inside of the fixed block 82. A round rod 87 is fixedly connected to the side of the spline rod 84. The protruding part of the upper end of the hollow roller 44 will press against the inclined groove slider 83. When the inclined groove slider 83 is pressed, it will press the round rod 87 through its own groove. When the round rod 87 is pressed, it will drive the spline rod 84 to slide outward inside the fixed block 82. When the spline rod 84 slides, it will drive the conical block 85 to slide outward and get stuck inside the progressive slot 73. The friction of the conical block 85 will lock the entire limiting ring 81.

[0036] The control locking mechanism 9 includes a rectangular limiting slide sleeve 91. The bottom end of the rectangular limiting slide sleeve 91 is fixedly connected to the surface of the limiting ring 61. A limiting slide rod 92 is slidably connected inside the rectangular limiting slide sleeve 91. The upper end of the limiting slide rod 92 is fixedly connected to the lower surface of the limiting ring 81. A transverse slide rod 93 is fixedly connected inside the limiting slide rod 92. A pressure plate 94 is slidably connected inside the limiting slide rod 92. A pressing rod 95 is fixedly connected to the lower end of the pressure plate 94. A return spring 96 is provided between the pressure plate 94 and the inside of the limiting slide rod 92. A slide rod 97 is slidably connected to the surface of the transverse slide rod 93. The rectangular limiting slide sleeve... The surface of 91 has a slot 98. The upper end of the slide rod 97 is fixedly connected to the inclined block 99, and the lower end of the slide rod 97 is fixedly connected to the triangular block 910. When the inclined slide block 83 moves downward, it will press the pressure plate 94. When the pressure plate 94 is pressed, it will drive the pressing rod 95 to slide downward. When the pressing rod 95 slides downward, it will press the inclined block 99. When the inclined block 99 is pressed, it will drive the slide rod 97 to slide on the surface of the horizontal slide rod 93. When the slide rod 97 slides, it will drive the triangular block 910 to slide outward and get stuck inside the slot 98. In this way, the limiting ring 61 and the limiting ring 81 can be locked at the same time.

[0037] The method of use and advantages of this invention: The synchronous grinding device for the inner and outer walls of the single crystal furnace operates as follows:

[0038] In use, the single crystal furnace to be polished is vertically fixed on the special fixture of the electric worktable 1, ensuring that its axis is aligned with the center of the rotating plate 3 to avoid displacement during the polishing process. The drive motor 2 is started, which drives the rotating roller 41 to rotate, but cannot drive the rotating plate 3 to rotate. The rotating plate 3, which is not started, is in a relatively stationary state, so the limiting groove 71 is also in a relatively stationary state. When the rotating roller 41 rotates, it drives the inclined groove 47 to rotate at the same time, causing the hollow roller 44, which is limited by the limiting groove 71, to slide downward on the surface of the rotating roller 41. When the hollow roller 44 slides downward, it drives the limiting ring 1 61 and the limiting ring 2 81 to slide downward at the same time. When 61 moves downward, it pushes the support rod 45 through the connecting rod 46. The support rod 45 drives the grinding machine body 5 to expand outward until it fits against the inside of the single crystal furnace. After the grinding machine body 5 fits against the inner wall, it will provide a supporting force to the support rod 45, making the support rod 45 unable to expand further. At this time, the sliding force of the hollow roller 44 is greater than the resistance of the limiting ring 61, and the hollow roller 44 will continue to move downward. When the hollow roller 44 moves downward, it drives the sliding rod 67 to move downward at the same time. When the sliding rod 67 moves downward, it will squeeze the inclined groove 66. When the inclined groove 66 is squeezed, it will drive the Z-shaped rod 65 to rotate. When the Z-shaped rod 65 rotates, it will open the limiting ring 61 and temporarily separate it from the hollow roller 44.

[0039] When the Z-shaped rod 65 rotates, it drives the threaded rod 63 to rotate simultaneously. The threaded rod 63 rotates inside the sleeve rod 68 and moves a short distance inside the sleeve rod 68. The threaded rod 63 drives the extrusion ball 64 to move simultaneously. When the extrusion ball 64 moves, it will extrude the resistance ball 611. After being extruded, the resistance ball 611 will slide outward inside the inclined slide groove 69. The resistance ball 611 slides into the slot 72 and locks the entire limiting ring 61. The grinding machine body 5 under the support rod 45 will always be in contact with the inner wall of the single crystal furnace.

[0040] Simultaneously, as the hollow roller 44 moves downward, it also drives the second limiting ring 81 to slide downward. When the second limiting ring 81 slides, it pulls the second connecting rod 48, which in turn pulls the L-shaped support rod 43. The L-shaped support rod 43 pulls the grinding machine body 5 to rotate inward and fit against the outer wall of the single crystal furnace. After the grinding machine body 5 fits against the outer wall, it provides a supporting force to the L-shaped support rod 43, preventing it from rotating further. At this time, the second limiting ring 81 also moves, and the hollow roller 44 slides downward again for a short distance. The protruding part at the upper end of the hollow roller 44 then presses against the inclined groove slider 83. When the inclined groove slider 83 is pressed, it presses against the round rod 8 through its groove. 7. When the round rod 87 is squeezed, it drives the spline rod 84 to slide outward inside the fixed block 82. When the spline rod 84 slides, it drives the conical block 85 to slide outward and get stuck inside the progressive slot 73. The friction of the conical block 85 locks the entire limiting ring 81. The grinding machine body 5 under the L-shaped support rod 43 will always be in contact with the outer wall of the single crystal furnace. At this time, the two grinding machine bodies 5 are in contact with the inner and outer walls of the single crystal furnace at the same time. This allows for synchronous grinding, which acts on the inner and outer walls at the same time, reducing the time loss of step-by-step operation, improving grinding efficiency, and ensuring that the grinding accuracy and roughness of the inner and outer walls are consistent, avoiding process differences caused by step-by-step operation.

[0041] As the inclined slide block 83 moves downward, it presses the pressure plate 94. When the pressure plate 94 is pressed, it drives the pressing rod 95 to slide downward. When the pressing rod 95 slides downward, it presses the inclined block 99. When the inclined block 99 is pressed, it drives the slide rod 97 to slide on the surface of the transverse slide rod 93. When the slide rod 97 slides, it drives the triangular block 910 to slide outward and get stuck inside the slot 98. In this way, the limiting ring 61 and the limiting ring 81 can be locked at the same time, which can ensure the stability of the two grinding machine bodies and further improve the grinding efficiency. Then the drive motor 2 stops operating. Finally, the electric worktable 1 drives the rotating plate 3 to rotate, which mobilizes the entire device to rotate, so that the two grinding machines can grind the inner and outer walls of the single crystal furnace at the same time.

[0042] Finally, after grinding is completed, drive motor 2 is started to rotate in reverse to reset the entire device, thus achieving automated grinding. Automation can replace manual labor to work inside the narrow furnace, avoiding uneven grinding or missed grinding caused by manual operation. At the same time, manual grinding poses risks such as mechanical injury. Automated devices, through remote control or robotic arm operation, can significantly reduce the accident rate.

[0043] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A synchronous grinding device for the inner and outer walls of a single crystal furnace, comprising an electric worktable (1), a drive motor (2), and a grinding machine body (5), characterized in that: The drive motor (2) is fixedly connected to the upper surface of the electric workbench (1). The lower end of the fixed plate on the electric workbench (1) is rotatably connected to the rotating plate (3). The lower end of the rotating plate (3) is equipped with a guiding mechanism (4). The lower surface of the rotating plate (3) is fixedly connected to a limit control mechanism (7). The guidance mechanism (4) includes a rotating roller (41) connected to the output shaft of the drive motor (2), a hollow roller (44) sleeved on the rotating roller (41), an L-shaped support rod (43) hinged to the side of the rotating ring (42), and a support rod (45) hinged to the side of the rotating roller (41). The support rod (45) is hinged to one end of the connecting rod (46). The support rod (45) and the grinding machine body (5) are respectively installed at the ends of the L-shaped support rod (43) and the support rod (45). The inner wall grinding mechanism (6) includes a limiting ring (61) sleeved on the surface of the hollow roller (44), a threaded rod (63) hinged to the side of the limiting ring (61) at the other end of the connecting rod (46), a Z-shaped rod (65) connected to the end of the threaded rod (63), a groove (66) fixed on the surface of the Z-shaped rod (65), a slide rod (67) fixed on the surface of the hollow roller (44), and a sleeve rod (68) sleeved on the surface of the threaded rod (63). The slide rod (67) is slidably connected in the groove (66), and the sleeve rod (68) is provided with a radially movable resistance ball (611). The outer wall grinding mechanism (8) includes a limiting ring two (81) sleeved on the surface of the hollow roller (44), the side of the limiting ring two (81) is hinged to one end of the connecting rod two (48), a fixing block (82) fixed to one side of the limiting ring two (81), a slanted slider (83) vertically slidably connected in the fixing block (82), a spline rod (84) horizontally slidably connected in the fixing block (82), and a conical block (85) fixed to the end of the spline rod (84). The other end of the connecting rod two (48) is hinged to the L-shaped support rod (43), and the spline rod (84) and the slanted slider (83) are in transmission cooperation. A control locking mechanism (9) is fixedly connected between the inner wall grinding mechanism (6) and the outer wall grinding mechanism (8). When the drive motor (2) drives the rotating roller (41) to rotate, the hollow roller (44) slides downward through the inclined groove (47), and drives the inner wall grinding mechanism (6) and the outer wall grinding mechanism (8) to unfold synchronously through the connecting rod one (46) and the connecting rod two (48), so that the two grinding machine bodies (5) respectively fit into the inner and outer walls of the single crystal furnace, and lock them by controlling the locking mechanism (9); The control locking mechanism (9) includes a rectangular limiting sleeve (91), the bottom end of which is fixedly connected to the surface of the first limiting ring (61). A limiting slide rod (92) is slidably connected inside the rectangular limiting sleeve (91). The upper end of the limiting slide rod (92) is fixedly connected to the lower surface of the second limiting ring (81). A transverse slide rod (93) is fixedly connected inside the limiting slide rod (92). A pressure plate is slidably connected inside the limiting slide rod (92). 94), the lower end of the pressure plate (94) is fixedly connected to the pressing rod (95), a return spring (96) is provided between the pressure plate (94) and the limiting slide rod (92), the surface of the transverse slide rod (93) is slidably connected to the slide rod (97), the surface of the rectangular limiting slide sleeve (91) is provided with the slot (98), the upper end of the slide rod (97) is fixedly connected to the inclined block (99), and the lower end of the slide rod (97) is fixedly connected to the triangular block (910). When the inclined slide block (83) moves down, it presses down the pressure plate (94), causing the extrusion rod (95) to push the inclined block (99), which in turn causes the slide rod (97) to slide so that the triangular block (910) is inserted into the slot (98), thus achieving synchronous locking of the limiting ring (61) and the limiting ring (81).

2. The synchronous grinding device for the inner and outer walls of a single crystal furnace according to claim 1, characterized in that: In the guidance mechanism (4), the rotating roller (41) passes through the rotating plate (3) and is fixedly connected to the output shaft of the drive motor (2). The rotating roller (41) is rotatably connected to the surface of the rotating roller (41). The rotating roller (41) has a groove (47) on its surface. The hollow roller (44) is slidably connected inside the groove (47).

3. The synchronous grinding device for the inner and outer walls of a single crystal furnace according to claim 2, characterized in that: The inner wall grinding mechanism (6) also includes a damping block (62), which is fixedly connected to the inner wall of the limiting ring (61). One end of the threaded rod (63) is fixedly connected to a compression ball (64). The two ends of the Z-shaped rod (65) are respectively hinged to the two sides of the opening on one side of the limiting ring (61). The sleeve rod (68) has an inclined slide groove (69) inside. A spring (610) is installed inside the sleeve rod (68). The resistance ball (611) is slidably connected between the inside of the sleeve rod (68) and one end of the spring (610). The resistance ball (611) slides in the inclined slide groove (69) at the same time. As the hollow roller (44) continues to move downward, the slide bar (67) drives the Z-shaped bar (65) to rotate, which in turn drives the threaded bar (63) to rotate and causes the extrusion ball (64) to extrude the resistance ball (611), causing it to be locked into the slot (72) of the limit control mechanism (7).

4. The synchronous grinding device for the inner and outer walls of a single crystal furnace according to claim 3, characterized in that: A telescopic spring (86) is provided between the surface of the spline rod (84) and the interior of the fixed block (82). A round rod (87) is fixedly connected to the side of the spline rod (84), and the round rod (87) is engaged with the groove of the inclined slide block (83). As the hollow roller (44) continues to move downward, the upper end of the hollow roller (44) presses against the inclined groove slider (83), driving the spline rod (84) to slide outward, so that the conical block (85) is engaged in the progressive slot (73) of the limit control mechanism (7).

5. The synchronous grinding device for the inner and outer walls of a single crystal furnace according to claim 4, characterized in that: The limiting control mechanism (7) includes a limiting slide groove (71), a slot (72), and a progressive slot (73); the upper end of the limiting slide groove (71) is fixedly connected to the lower surface of the rotating plate (3), the slot (72) is provided inside the limiting slide groove (71), and the progressive slot (73) is fixedly connected to the surface of the limiting slide groove (71); the hollow roller (44) is slidably connected to the side of the limiting slide groove (71), one end of the rotating ring (42) is fixedly connected to the surface of the limiting slide groove (71), and the sleeve rod (68) slides linearly inside the limiting slide groove (71).

6. The synchronous grinding device for the inner and outer walls of a single crystal furnace according to claim 5, characterized in that: When the grinding machine body (5) contacts the furnace wall, the conical block (85) and the triangular block (910) lock in sequence to achieve triple positioning.

7. The synchronous grinding device for the inner and outer walls of a single crystal furnace according to claim 6, characterized in that: The electric worktable (1) can drive the rotating plate (3) to rotate, thereby driving the two grinding machine bodies (5) to simultaneously grind the inner and outer walls of the single crystal furnace in a circumferential manner.

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