A reactor and a coating apparatus

Abstract

The application provides a reactor and a coating equipment, and belongs to the technical field of coating. The reactor has a first direction, and comprises a first container, a second container, a stirring assembly, a driving device and an electrode rod. The first container has a first accommodating cavity. The second container is accommodated in the first accommodating cavity and rotationally connected with the first container, and has a second accommodating cavity in communication with the first accommodating cavity. The stirring assembly is accommodated in the second accommodating cavity and is configured to stir materials in the second accommodating cavity. The driving device is connected with the first container and is configured to drive the second container to rotate. The electrode rod is connected with the first container and at least partially accommodated in the second accommodating cavity, and is configured to discharge electricity into the second accommodating cavity. The reactor provided by the application can stir materials in the second accommodating cavity through the stirring assembly arranged in the second accommodating cavity, so that high-precision and high-quality film deposition is realized on the surface of a substrate.

Description

Technical Field

[0001] This invention relates to the field of coating technology, and more particularly to a reactor and coating equipment. Background Technology

[0002] Existing coating equipment uses a static coating method for coating materials (such as powders, granules, sheets, PCB boards, or wafers). This means that the material remains static throughout the coating or modification process. This not only affects the uniformity and stability of the coating or modification on the material surface, but also limits the coating depth when coating materials with certain depths, grooves, or through holes, resulting in an uneven solid film surface formed on the material. Summary of the Invention

[0003] In view of this, the purpose of the present invention is to overcome the shortcomings of the prior art and provide a reactor and coating equipment.

[0004] This invention provides the following technical solution: a reactor having a first orientation, comprising:

[0005] The first container has a first receiving cavity;

[0006] A second container is housed in the first receiving cavity and is rotatably connected to the first container, the second container having a second receiving cavity communicating with the first receiving cavity;

[0007] A stirring assembly is housed in the second receiving cavity, the stirring assembly being configured to stir the material in the second receiving cavity;

[0008] A drive unit connected to the first container, the drive unit being configured to drive the second container to rotate;

[0009] An electrode rod is connected to the first container, the electrode rod is at least partially housed in the second receiving cavity, and the electrode rod is configured to discharge into the second receiving cavity.

[0010] In some embodiments, the drive device includes a drive motor, a coupling, and a first transmission structure;

[0011] The output end of the drive motor is connected to one end of the coupling, and the second container is connected to the other end of the coupling through the first transmission structure.

[0012] In some embodiments, the first transmission structure includes a gear and a plurality of transmission rods;

[0013] The gear is housed in the first receiving cavity and connected to the coupling;

[0014] The transmission rod is disposed on the side of the second container facing the gear, and a plurality of transmission rods are arranged at equal intervals on the edge of the second container, and the transmission rods are connected to the gear in a transmission manner.

[0015] In some embodiments, the gear includes a hub and a plurality of teeth, the plurality of teeth being arranged at equal intervals along the circumference of the hub;

[0016] The hub has multiple spaced arc-shaped grooves on its periphery. The arc-shaped grooves and the wheel teeth are arranged alternately along the periphery of the hub, and the groove walls of the arc-shaped grooves are in contact with the transmission rod.

[0017] In some embodiments, along the first direction, the first container includes a first body, a first end cap, and a second end cap;

[0018] Along the first direction, a first opening is provided on one side of the first body, and a second opening is provided on the other side of the first body. The first end cap is connected to the first body and covers the first opening, and the second end cap is connected to the first body and covers the second opening.

[0019] The first body has at least one first annular groove on the side facing the first end cover, and a first sealing ring is provided in the first annular groove. The first sealing ring abuts against the first end cover on the side facing the first end cover.

[0020] The first body has at least one second annular groove on the side facing the second end cover, and a second sealing ring is provided in the second annular groove. The side of the second sealing ring facing the second end cover abuts against the second end cover.

[0021] In some embodiments, the second container includes a first connecting ring, a second body, and a second connecting ring;

[0022] The first connecting ring and the second connecting ring are respectively disposed at both ends of the second body along the first direction;

[0023] The inner diameter of the first connecting ring gradually decreases from the center of the second body to the first opening, and the inner diameter of the second connecting ring gradually decreases from the center of the second body to the second opening.

[0024] In some embodiments, the stirring assembly includes a plurality of spaced-apart spiral blades connected to the inner wall of the second body, wherein the spiral direction of the spiral blades is a first clockwise direction.

[0025] In some embodiments, a heating structure is provided on the periphery of the first body. The heating structure includes a heat insulation layer and a plurality of heating elements. The heat insulation layer is sleeved on the first body. The side of the heat insulation layer facing the first body and the outer wall of the first body define a first cavity. The heating elements are housed in the first cavity. The plurality of heating elements are arranged at intervals along the periphery of the first container.

[0026] In some embodiments, the first connecting ring is provided with a discharge port along one side perpendicular to the first direction;

[0027] The first connecting ring has a sealing plate on the side opposite to the electrode rod, and the sealing plate is slidably connected to the first connecting ring;

[0028] The sealing plate has a first position and a second position relative to the first connecting ring;

[0029] When the second container rotates in the first clockwise direction, the sealing plate is in the first position and the sealing plate covers the discharge port;

[0030] When the second container rotates in a second clockwise direction, and the sealing plate switches from the first position to the second position, the discharge port opens at least partially;

[0031] The reactor has a second direction intersecting the first direction, and the first body is provided with a discharge end on one side along the second direction, the discharge end facing the first connecting ring;

[0032] In the second position, the discharge end is directly opposite the discharge port along the second direction.

[0033] In some embodiments, the first connecting ring is provided with an elastic guiding component on the side opposite to the electrode rod, the elastic guiding component including at least one first connecting member, at least one first guiding member and at least one first elastic member;

[0034] The first connector is disposed on the side of the sealing plate opposite to the first connecting ring, one end of the first guide is connected to the first connecting ring, and the other end of the first guide passes through the first connector;

[0035] The first elastic element is sleeved on the first guide element, one end of the first elastic element is connected to the first connecting element, and the other end of the first elastic element is connected to the edge of the first connecting ring.

[0036] In some embodiments, the first receiving cavity is provided with at least two spaced-apart support members, one end of the support member is connected to the first end cap, and the other end of the support member is connected to the second end cap;

[0037] The support member is disposed on the side of the second container facing the discharge end and is rotatably connected to the second container.

[0038] In some embodiments, the support member includes a support rod, a first rotating shaft, and a second rotating shaft;

[0039] The first and second rotating shafts are respectively sleeved on the support rod, and the side of the first and second rotating shafts away from the support rod abuts against the second container;

[0040] The second container has a first convex ring and a second convex ring spaced apart on its periphery. The first convex ring is adjacent to the first connecting ring, and the second convex ring is adjacent to the second connecting ring.

[0041] Along the first direction, the side of the first rotating shaft opposite to the second rotating shaft abuts against the first convex ring, and the side of the second rotating shaft opposite to the first rotating shaft abuts against the second convex ring.

[0042] In some embodiments, a guide structure is provided between the two support members. The guide structure includes a fixing member and an elastic limiting member. The fixing member is disposed between the two support members, and the elastic limiting member is elastically connected to the fixing member.

[0043] In the first position, the elastic limiting member and the sealing plate are spaced apart or slidably connected;

[0044] In the second position, the end of the elastic limiting member that is away from the fixing member is connected to the sealing plate.

[0045] In some embodiments, the sealing plate has a guide groove on the side opposite to the first connecting ring;

[0046] In the second position, the elastic limiting member is at least partially received in the guide groove.

[0047] Some embodiments of this application provide a coating apparatus, including the aforementioned reactor.

[0048] The embodiments of the present invention have the following advantages: The stirring assembly disposed in the second containment cavity can stir the materials in the second containment cavity, preventing the local accumulation of reactive gases or precursors in the reaction zone, ensuring uniform plasma discharge, and preventing substrate sedimentation in the second containment cavity, ensuring sufficient contact between the substrate and the plasma, thereby achieving high-precision, high-quality thin film deposition on the substrate surface. By at least partially disposing of electrode rods in the second containment cavity, the volume of the electrode rods in the second containment cavity is increased, thereby improving the plasma generation efficiency and the uniformity of plasma distribution in the second containment cavity, thus achieving nanoscale thin film deposition.

[0049] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0050] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0051] Figure 1 A schematic diagram of the structure of a reactor provided by some embodiments of the present invention is shown from one perspective;

[0052] Figure 2 It shows Figure 1 Sectional view of section AA;

[0053] Figure 3 It shows Figure 1 Sectional view of the middle BB section;

[0054] Figure 4 This diagram illustrates a structural schematic of the interior of a reactor according to some embodiments of the present invention.

[0055] Figure 5 This diagram illustrates a structural schematic of the interior of a reactor, provided by some embodiments of the present invention, from another perspective.

[0056] Figure 6 It shows Figure 5 Enlarged view of section D in the middle;

[0057] Figure 7 It shows Figure 5 Enlarged view of section E in the middle;

[0058] Figure 8 This diagram illustrates a structural schematic of a gear in a reactor according to some embodiments of the present invention;

[0059] Figure 9 This diagram illustrates a structural schematic of a reactor provided by some embodiments of the present invention from another perspective;

[0060] Figure 10 It shows Figure 9 A cross-sectional view of the central CC section.

[0061] Explanation of key component symbols:

[0062] 100-First container; 110-First receiving cavity; 200-Second container; 210-Second receiving cavity; 300-Stirring assembly; 400-Drive device; 500-Electrode rod; 410-Drive motor; 420-Coupling; 430-First transmission structure; 431-Gear; 432-Transmission rod; 4311-Hub; 4312-Gear tooth; 4313-Arc groove; 120-First body; 130-First end cap; 14 0-Second end cap; 121-First annular groove; 600-First sealing ring; 122-Second annular groove; 700-Second sealing ring; 800-Infeed pipe; 220-First connecting ring; 230-Second body; 240-Second connecting ring; 310-Helical blade; 311-First helical segment; 312-Second helical segment; 900-Heating structure; 910-Insulation layer; 920-Heating element; 930-First cavity; 150-First 911 - Exhaust port; 160 - Discharge end; 221 - Discharge port; 1000 - Sealing plate; 1100 - Elastic guide assembly; 1110 - First connector; 1120 - First guide; 1130 - First elastic element; 1200 - Support element; 1210 - Support rod; 1220 - First rotating shaft; 1230 - Second rotating shaft; 250 - First convex ring; 260 - Second convex ring; 1300 - Guide structure; 1310 - Fixing component; 1320 - Elastic limiting component; 1311 - First connecting rod; 1312 - Second connecting rod; 1321 - Limiting rod; 1322 - Second elastic component; 1323 - Slider; 1324 - First limiting protrusion; 1325 - Second limiting protrusion; 1010 - Guide groove; 1011 - First guide groove; 1012 - Second guide groove; 1013 - Third guide groove; 1014 - First arc-shaped groove; 1015 - Second arc-shaped groove. Detailed Implementation

[0063] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0064] It should be noted that when an element is said to be "fixed" to another element, it can be directly on the other element or there may be an intervening element. When an element is said to be "connected" to another element, it can be directly connected to the other element or there may be an intervening element. Conversely, when an element is said to be "directly" on another element, there is no intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0065] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0066] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0067] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the template description is for the purpose of describing particular embodiments only and is not intended to limit the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0068] like Figures 1 to 5 As shown, some embodiments of this application provide a reactor having a first orientation, primarily used to improve coating precision and coating quality.

[0069] It is worth noting that the coating produced by the reactor operation provided in this application can be applied to at least the modification and coating of powders, the modification and coating of granules, the modification and coating of tablets, and the coating of PCBs (Printed Circuit Boards) or wafers.

[0070] In this embodiment, the following detailed description is given using a reactor applied to the modification and coating of powder.

[0071] It should be noted that Chemical Vapor Deposition (CVD) is a thin film deposition technique that generates solid thin films by chemically reacting gaseous reactants on the surface of a substrate.

[0072] In this embodiment, the reactor includes a first container 100, a second container 200, a stirring assembly 300, a driving device 400, and an electrode rod 500.

[0073] The first container 100 has a first receiving cavity 110, which is a vacuum cavity.

[0074] The second container 200 is housed in the first receiving cavity 110 and is rotatably connected to the first container 100. It should be noted that there is a gap between the outer wall of the second container 200 and the inner wall of the first container 100 to prevent friction from occurring during the rotation of the second container 200 relative to the first container 100, so as to ensure the stability and smoothness of the rotation of the second container 200 relative to the first container 100.

[0075] In some embodiments, the axis of the first container 100 coincides with the axis of the second container 200; in other embodiments, the axis of the first container 100 is parallel to the axis of the second container 200.

[0076] In this application, the axis of the first container 100 coincides with the axis of the second container 200, that is, the second container 200 can rotate coaxially with respect to the first container 100.

[0077] The second container 200 has a second receiving cavity 210 that communicates with the first receiving cavity 110. It should be noted that the axis of the first container 100 and the axis of the second container 200 are parallel to a first direction. Along the first direction, the second container 200 has openings on two opposite sides, thereby connecting the first receiving cavity 110 and the second receiving cavity 210 through the openings, and the second receiving cavity 210 is a vacuum cavity.

[0078] The stirring assembly 300 is housed in the second receiving cavity 210. The connection between the stirring assembly 300 and the second container 200 can be any one of sliding connection, rotational connection, or fixed connection, and can be specifically set according to the actual situation.

[0079] In this embodiment, the stirring assembly 300 is configured to stir the material in the second containment cavity 210. That is, during the rotation of the second container 200 relative to the first container 100, the stirring assembly 300 in the second containment cavity 210 can stir the material in the second containment cavity 210, avoid the local accumulation of reactive gas or precursor in the reaction zone, ensure uniform plasma discharge, prevent the substrate in the second containment cavity 210 from settling, and ensure that the substrate in the second containment cavity 210 is in full contact with the plasma, so as to achieve high-precision and high-quality thin film deposition on the surface of the substrate.

[0080] The driving device 400 is connected to the first container 100. The connection method between the driving device 400 and the first container 100 includes any one of the following: rotational connection, snap-fit ​​connection, threaded connection, or bolted connection, which can be specifically set according to the actual situation. The driving device 400 is disposed on the outer wall of the first container 100 and is drively connected to the second container 200. The driving device 400 is configured to drive the second container 200 to rotate, that is, the driving device 400 can drive the second container 200 to rotate relative to the first container 100. It can be understood that by driving the second container 200 to rotate, the material in the second receiving cavity 210 is stirred by the stirring assembly 300 during the rotation of the second container 200.

[0081] In this embodiment, the rotation direction of the second container 200 includes a first clockwise direction and a second clockwise direction, wherein the first clockwise direction is clockwise and the second clockwise direction is counterclockwise.

[0082] The electrode rod 500 is connected to the first container 100. The connection method between the electrode rod 500 and the first container 100 includes any one of sliding connection, rotational connection, threaded connection, snap-fit ​​or bolt connection, which can be specifically set according to the actual situation.

[0083] In this embodiment, the electrode rod 500 is disposed in the first receiving cavity 110, and the electrode rod 500 is at least partially housed in the second receiving cavity 210. It is understood that in some embodiments, a portion of the electrode rod 500 is disposed in the second receiving cavity 210; in other embodiments, the entire electrode rod 500 is disposed in the second receiving cavity 210. It is understood that by increasing the volume of the electrode rod 500 in the second receiving cavity 210, the plasma generation efficiency and the uniformity of plasma distribution in the second receiving cavity 210 are improved.

[0084] It is understood that the electrode rod 500 is configured to discharge into the second containment cavity 210, and to generate and maintain plasma through gas ionization by discharging into the vacuum second containment cavity 210, thereby achieving physical or chemical modification of the material surface and thus realizing nanoscale thin film deposition.

[0085] like Figure 1 , Figure 3 and Figure 4 As shown, in some embodiments of this application, the drive device 400 includes a drive motor 410, a coupling 420, and a first transmission structure 430.

[0086] The output end of the drive motor 410 is connected to one end of the coupling 420 so that the output end of the drive motor 410 can drive the coupling 420 to rotate synchronously during the rotation process.

[0087] In this embodiment, a drive wheel, a conveyor belt, and a driven wheel are provided between the drive motor 410 and the coupling 420. The drive wheel and the output end of the drive motor 410 are coaxially connected, and the driven wheel and the coupling 420 are coaxially connected. The driven wheel is connected to the drive wheel via the conveyor belt, so that the output end of the drive motor 410 can drive the drive wheel to rotate synchronously during rotation, and the drive wheel drives the driven wheel to rotate synchronously via the conveyor belt, thereby driving the coupling 420 to rotate synchronously via the driven wheel.

[0088] It should be noted that one end of the coupling 420 passes through the first container 100 along the first direction, and the outer wall of the coupling 420 and the first container 100 are sealed together to prevent external air from entering the first receiving cavity 110 through the gap between the coupling 420 and the first container 100, so as to ensure the stability of the air pressure in the first receiving cavity 110, thereby ensuring the stability and quality of the thin film deposited on the surface of the material in the second receiving cavity 210.

[0089] Furthermore, the second container 200 is connected to the other end of the coupling 420 via the first transmission structure 430. It is understood that one end of the coupling 420 is located outside the first receiving cavity 110, and the other end is located inside the first receiving cavity 110. The second container 200 is connected to the first transmission structure 430 via the coupling 420 located inside the first receiving cavity 110; that is, the first transmission structure 430 is located within the first receiving cavity 110.

[0090] It is understandable that during the rotation of the coupling 420, the second container 200 can be driven to rotate synchronously through the first transmission structure 430, and the rotation direction of the output end can be controlled by the drive motor 410, thereby controlling the rotation direction of the second container 200.

[0091] For example, if the rotation direction of the output end of the drive motor 410 is the first clockwise direction, then the rotation direction of the second container 200 is the first clockwise direction; if the rotation direction of the output end of the drive motor 410 is the second clockwise direction, then the rotation direction of the second container 200 is the second clockwise direction.

[0092] Because the existing transmission structure transmits power through the meshing of gears 431 and 431, the contact of the protrusions when gears 431 and 431 mesh causes a small amount of metal to peel off, resulting in metal scraps falling into the vacuum chamber, which seriously affects the coating quality.

[0093] Based on this, such as Figure 4 As shown, in some embodiments of this application, the first transmission structure 430 includes a gear 431 and a plurality of transmission rods 432.

[0094] The number of transmission rods 432 can be specifically set according to the actual situation. In this embodiment, multiple transmission rods 432 are arranged on the side of the second container 200 close to the drive motor 410 along the first direction, and the multiple transmission rods 432 are arranged at equal intervals along the edge of the second container 200, and the distance between the axis of each transmission rod 432 and the axis of the second container 200 is equal.

[0095] In addition, the gear 431 is housed in the first receiving cavity 110 and is connected to the coupling 420 so that the coupling 420 can drive the gear 431 to rotate synchronously during rotation.

[0096] In this embodiment, the transmission rod 432 is disposed on the side of the second container 200 facing the gear 431. The transmission rod 432 is connected to the gear 431 in a transmission manner. That is, when the gear 431 rotates, it can drive the transmission rod 432 to rotate around the axis of the second container 200, thereby driving the second container 200 to rotate.

[0097] It should be noted that the gear 431 includes a hub 4311 and a plurality of teeth 4312, and the plurality of teeth 4312 are arranged at equal intervals along the periphery of the hub 4311.

[0098] The hub 4311 has multiple spaced arc-shaped grooves 4313 on its circumference. The arc-shaped grooves 4313 and the gear teeth 4312 are arranged alternately along the circumference of the hub 4311. During the rotation of the gear 431, the groove wall of one of the arc-shaped grooves 4313 is in contact with one of the transmission rods 432. The groove wall of the arc-shaped groove 4313 provides thrust to the transmission rod 432 in the tangential direction of the rotation of the transmission rod 432. This not only ensures the uniformity of the rotation of the transmission rod 432, but also reduces the friction between the transmission rod 432 and the gear 431 by forming a surface contact between a part of the circumferential surface of the transmission rod 432 and the groove wall of the arc-shaped groove 4313. This avoids the generation of metal powder by friction between the transmission rod 432 and the gear 431, and prevents the material from being contaminated by metal. This ensures the stability and quality of the coating of the material in the second receiving cavity 210.

[0099] like Figure 8As shown, in some embodiments of this application, the cross-sectional area of ​​the gear tooth 4312 gradually decreases from the side near the hub 4311 to the side away from the hub 4311. This allows the transmission rod 432 to be spaced apart from the side of the gear tooth 4312 away from the hub 4311 during the process of the transmission rod 432 moving out of the arc groove 4313. This avoids friction between the transmission rod 432 and the side of the gear tooth 4312 away from the hub 4311, thereby ensuring the stability and smoothness of the transmission rod 432 during rotation, and thus ensuring the smoothness and stability of the second container 200 during rotation.

[0100] like Figure 1 and Figure 3 As shown, in some embodiments of this application, along the first direction, the first container 100 includes a first body 120, a first end cap 130, and a second end cap 140.

[0101] Along the first direction, a first opening is provided on one side of the first body 120, and a second opening is provided on the other side of the first body 120. The first receiving cavity 110 and the second receiving cavity 210 can be connected through the first opening and the second opening.

[0102] The first end cap 130 is connected to the first body 120 and seals the first opening with the first end cap 130. The second end cap 140 is connected to the first body 120 and seals the second opening with the second end cap 140, so that the first end cap 130, the first body 120 and the second end cap 140 together form a sealed first receiving cavity 110.

[0103] The connection methods between the first end cap 130 and the second end cap 140 and the first body 120 include at least one or a combination of two or more of the following: threaded connection, bolt connection, snap-fit, adhesive connection, magnetic connection, interference fit or welding. The specific settings can be determined according to the actual situation to ensure the sealing quality of the first container 100 while improving the stability of the connection between the first end cap 130 and the second end cap 140 and the first body 120.

[0104] In addition, such as Figure 9 and Figure 10 As shown, the first body 120 has at least one first annular groove 121 on the side facing the first end cap 130. A first sealing ring 600 is provided in the first annular groove 121. The first sealing ring 600 abuts against the first end cap 130 on the side facing the first end cap 130 to form a sealed connection structure between the first end cap 130 and the first body 120, so as to ensure the sealing quality between the first end cap 130 and the first body 120.

[0105] It is understood that the number of first annular grooves 121 can be one, two, or more, and can be specifically set according to the actual situation. The number of first annular grooves 121 is equal to the number of first sealing rings 600, and one first sealing ring 600 is correspondingly disposed in one first annular groove 121.

[0106] For example, in some embodiments, there is one first annular groove 121 and one first sealing ring 600; in other embodiments, there are multiple first annular grooves 121, which are coaxially arranged, and the inner diameter of the multiple first annular grooves 121 gradually increases from the side closer to the axis of the first body 120 to the side farther from the axis of the first body 120, and there is a gap between two adjacent first annular grooves 121. It can be understood that by increasing the number of first annular grooves 121, the number of first sealing rings 600 is increased, so as to form a multi-stage sealing structure between the first end cap 130 and the first body 120, further improving the sealing quality between the first end cap 130 and the first body 120, and preventing external gas from entering the first receiving cavity 110.

[0107] The first body 120 is provided with at least one second annular groove 122 on the side facing the second end cap 140. A second sealing ring 700 is provided in the second annular groove 122. The side of the second sealing ring 700 facing the second end cap 140 abuts against the second end cap 140 to form a sealed connection structure between the second end cap 140 and the first body 120, so as to ensure the sealing quality between the second end cap 140 and the first body 120.

[0108] It is understood that the number of second annular grooves 122 can be one, two, or more, and can be specifically set according to the actual situation. Specifically, the number of second annular grooves 122 is equal to the number of second sealing rings 700, and one second sealing ring 700 is correspondingly disposed in one second annular groove 122.

[0109] For example, in some embodiments, there is one second annular groove 122 and one second sealing ring 700; in other embodiments, there are multiple second annular grooves 122, which are coaxially arranged, and the inner diameter of the multiple second annular grooves 122 gradually increases from the side closer to the axis of the first body 120 to the side farther from the axis of the first body 120, and there is a gap between two adjacent second annular grooves 122. It is understood that by increasing the number of second annular grooves 122, the number of second sealing rings 700 is increased, so as to form a multi-stage sealing structure between the second end cap 140 and the first body 120, further improving the sealing quality between the second end cap 140 and the first body 120, and preventing external gas from entering the first receiving cavity 110.

[0110] like Figure 1 As shown, in some embodiments of this application, the reactor includes a feed pipe 800, one end of which passes through the second end cap 140. The feed pipe 800 is at least partially housed in the second receiving cavity 210, so that external materials can enter the second receiving cavity 210 through the second feed pipe 800. A control valve (not shown in the figure) is provided at the end of the feed pipe 800 facing away from the second container 200, so as to control the opening or closing of the feed pipe 800.

[0111] For example, when it is necessary to add material to the second receiving cavity 210, the control valve is opened to allow external material to enter the second receiving cavity 210 through the feed pipe 800; after the feeding is completed, the control valve is closed to seal the feed pipe 800 to prevent external gas from entering the second receiving cavity 210 through the feed pipe 800.

[0112] It should be noted that the angle between the axis of the feed pipe 800 and the axis of the second container 200 is an acute angle, and the end of the feed pipe 800 away from the second container 200 is offset vertically upward, so that the material entering the feed pipe 800 can slide into the second receiving cavity 210 under the action of gravity, ensuring the smoothness of the feeding process.

[0113] In this embodiment, the second end cap 140 is provided with a feed inlet through the first direction, one end of the feed pipe 800 is inserted through the feed inlet, and the outer wall of the feed pipe 800 and the inner wall of the feed inlet are sealed together to prevent gas outside the first container 100 from entering the first receiving cavity 110 through the feed inlet.

[0114] like Figures 3 to 5 As shown, in some embodiments of this application, the second container 200 includes a first connecting ring 220, a second body 230, and a second connecting ring 240.

[0115] The first connecting ring 220 and the second connecting ring 240 are respectively disposed at both ends of the second body 230 along the first direction. That is, along the first direction, the first connecting ring 220 is disposed at one end of the second body 230 and the second connecting ring 240 is disposed at the other end of the second body 230.

[0116] In addition, the connection methods between the first connecting ring 220 and the second connecting ring 240 and the second body 230 include at least one or a combination of two or more of the following: threaded connection, bolted connection, snap-fit, adhesive connection, magnetic connection, interference fit or welding, which can be specifically set according to the actual situation.

[0117] In this embodiment, the inner diameter of the first connecting ring 220 gradually decreases from the center of the second body 230 to the first opening, and the inner diameter of the second connecting ring 240 gradually decreases from the center of the second body 230 to the second opening, so as to form inclined frustum-shaped surfaces at both ends of the second body 230. The first connecting ring 220 and the second connecting ring 240 limit the material in the second body 230, so as to prevent the material in the second receiving cavity 210 from being discharged from the second receiving cavity 210 during the stirring process of the stirring assembly 300 stirring the material in the second receiving cavity 210 when the second container 200 rotates relative to the first container 100, thereby ensuring the stability of the material in the second receiving cavity 210.

[0118] like Figure 3 As shown, in some embodiments of this application, the stirring assembly 300 includes a plurality of spaced-apart spiral blades 310, wherein the number of spiral blades 310 can be specifically set according to actual conditions.

[0119] Furthermore, the distance between two adjacent spiral blades 310 can be specifically set according to the actual situation. It is understood that by increasing the number of spiral blades 310, the uniformity of the stirring of the material in the second receiving cavity 210 by the spiral blades 310 can be improved.

[0120] In this embodiment, the spiral blade 310 is connected to the inner wall of the second body 230. The spiral direction of the spiral blade 310 is the first clockwise direction. It can be understood that when the second container 200 rotates in the first clockwise direction, it drives the spiral blade 310 to rotate synchronously in the first clockwise direction. During the rotation, the spiral blade 310 tends to stir and push the material in the second receiving cavity 210 in the first direction toward the second connecting ring 240. At this time, the material in the second receiving cavity 210 is close to the second connecting ring 240.

[0121] It should be noted that when the second container 200 rotates in the second clockwise direction, it drives the spiral blade 310 to rotate synchronously in the second clockwise direction. During the rotation, the spiral blade 310 tends to stir and push the material in the second receiving cavity 210 in the first direction toward the first connecting ring 220. At this time, the material in the second receiving cavity 210 is close to the first connecting ring 220.

[0122] like Figure 3 As shown, in some embodiments of this application, the helical blade 310 includes a first helical segment 311 and a second helical segment 312. The first helical segment 311 is inclined along the first direction towards the side closer to the first connecting ring 220, and the second helical segment 312 is inclined along the first direction towards the side closer to the second connecting ring 240. This allows the second container 200 and the helical blade 310 to provide a thrust along the first direction towards the side closer to the second connecting ring 240 to the material in the second receiving cavity 210 during rotation in a first clockwise direction, thereby enabling the material in the second receiving cavity 210 to move towards the side closer to the second connecting ring 240 during stirring. Additionally, when the second container 200 and the helical blade 310 rotate in a second clockwise direction, the first helical segment 311 provides a thrust along the first direction towards the side closer to the first connecting ring 220 to the material in the second receiving cavity 210 during rotation, thereby enabling the material in the second receiving cavity 210 to move towards the side closer to the first connecting ring 220 during stirring.

[0123] It is understood that in this embodiment, by adjusting the rotation direction of the second container 200, the movement direction of the material in the second receiving cavity 210 during the stirring process is adjusted. The spiral blades 310 can not only uniformly stir the material in the second receiving cavity 210, but also adjust the position of the material in the second receiving cavity 210 in order to prepare for discharge.

[0124] like Figures 1 to 4 As shown, in some embodiments of this application, a heating structure 900 is provided on the periphery of the first body 120 to heat the first container 100.

[0125] The heating structure 900 includes an insulation layer 910 and multiple heating elements 920, the number of which can be specifically set according to actual conditions. It is understood that increasing the number of heating elements 920 can effectively improve heating efficiency. Furthermore, arranging the multiple heating elements 920 at equal intervals along the periphery of the first container 100 improves the uniformity of heating the first container 100 by the heating elements 920.

[0126] Furthermore, the insulation layer 910 is sleeved on the first body 120, and the side of the insulation layer 910 facing the first body 120 defines a first cavity 930 with the outer wall of the first body 120. The heating element 920 is housed in the first cavity 930. It can be understood that there is a gap between the heating element 920 and the insulation layer 910, and there is a gap between the heating element 920 and the outer wall of the first body 120. That is to say, after the air in the first cavity 930 is heated by the heating element 920, heat conduction occurs between the heated air and the first container 100, thereby increasing the temperature of the first container 100.

[0127] It should be noted that heating the air in the first cavity 930 by the heating element 920 can ensure the uniformity of the air temperature in the first cavity 930, and the heat conduction between the air in the first cavity 930 and the first container 100 can improve the uniformity of heating the first container 100, thus avoiding the occurrence of local temperature unevenness in the first container 100.

[0128] In this embodiment, the insulation layer 910 provides insulation for the first body 120 to prevent heat loss from the first body 120, thereby ensuring the temperature stability of the first body 120 and thus ensuring the temperature stability within the first receiving cavity 110.

[0129] It should be noted that the heating structure 900 also includes a temperature sensor to monitor the temperature of the insulation layer 910 in real time, so as to ensure the stability and accuracy of the temperature of the insulation layer 910, thereby ensuring the stability of the temperature in the first receiving cavity 110 and the second receiving cavity 210.

[0130] The heating element 920 can be at least one of a heating rod, a heating wire, a heating plate, and a heating ring, and can be specifically set according to the situation.

[0131] like Figure 4 and Figure 10 As shown, in some embodiments of this application, the first body 120 is provided with a first exhaust hole 150 through one side perpendicular to the first direction, so that the gas in the first receiving cavity 110 can be discharged through the first exhaust hole 150.

[0132] The insulation layer 910 has a through-hole 911, which communicates with the first exhaust port 150. It can be understood that the through-hole 911 communicates with the first exhaust port 150 via the first cavity 930.

[0133] It should be noted that the axis of the connecting hole 911 coincides with the axis of the first exhaust hole 150, and the diameter of the connecting hole 911 is equal to or greater than the diameter of the first exhaust hole 150.

[0134] In this embodiment, the first exhaust port 150 can be connected to a vacuum pump, and the vacuum pump evacuates the air in the first receiving cavity 110 through the first exhaust port 150, thereby forming a vacuum first receiving cavity 110 and a vacuum second receiving cavity 210.

[0135] like Figure 2 As shown, in some embodiments of this application, the first connecting ring 220 is provided with a discharge port 221 through one side perpendicular to the first direction, so that the surface of the material in the second receiving cavity 210 can be discharged from the discharge port 221 after deposition.

[0136] The first connecting ring 220 has a sealing plate 1000 on the side opposite to the electrode rod 500. The sealing plate 1000 is slidably connected to the first connecting ring 220 and can cover the discharge port 221.

[0137] In this embodiment, the sealing plate 1000 has a first position and a second position relative to the first connecting ring 220. When the sealing plate 1000 is in the first position, it covers the discharge port 221 to prevent the material in the second receiving cavity 210 from being discharged from the discharge port 221. When the sealing plate 1000 is in the second position, the discharge port 221 is at least partially open so that the material in the second receiving cavity 210 can be discharged from the discharge port 221.

[0138] It is understandable that when the sealing plate 1000 is in the second position, the sealing plate 1000 covers part of the discharge port 221, that is, at least part of the discharge port 221 is not covered by the sealing plate 1000. At this time, the material in the second receiving cavity 210 can be discharged from the part of the discharge port 221 that is not covered by the sealing plate 1000. In addition, when the sealing plate 1000 is in the second position, the sealing plate 1000 is misaligned with the discharge port 221, and the discharge port 221 is fully open, that is, the material in the second receiving cavity 210 can be discharged from the discharge port 221.

[0139] It should be noted that, in this embodiment, the first position of the sealing plate 1000 relative to the first connecting ring 220 refers to the position of the sealing plate 1000 on the first connecting ring 220 when the sealing plate 1000 is completely covering the discharge port 221. The second position of the sealing plate 1000 relative to the first connecting ring 220 refers to the position of the sealing plate 1000 on the first connecting ring 220 when the sealing plate 1000 is partially covering the discharge port 221 or when the discharge port 221 is fully open.

[0140] When the second container 200 rotates in the first clockwise direction, the sealing plate 1000 is in the first position, and the sealing plate 1000 covers the discharge port 221 to prevent the material in the second receiving cavity 210 from being discharged from the discharge port 221.

[0141] Additionally, when the second container 200 rotates in the second clockwise direction, and the sealing plate 1000 switches from the first position to the second position, the discharge port 221 is at least partially opened, so that the material in the second receiving cavity 210 can be discharged from the opened discharge port 221.

[0142] Understandably, as the second container 200 rotates in the first clockwise direction, the stirring blades push the material in the second receiving cavity 210 towards the second connecting ring 240 to stir the material in the second receiving cavity 210, ensuring the stability and uniformity of the stirring in the second receiving cavity 210, improving the uniformity of the precursor's adhesion to the material surface, and improving the uniformity and quality of the coating on the material surface. After the surface coating of the material is completed, the driving device 400 drives the second container 200 to rotate in the second clockwise direction. At this time, the stirring blades push the material in the second receiving cavity 210 towards the first connecting ring 220, so that the coated material can move to the discharge port 221. When the sealing plate 1000 is in the second position relative to the first connecting ring 220, the discharge port 221 is at least partially open, that is, the material in the second receiving cavity 210 can be discharged from the discharge port 221, thereby completing the coating.

[0143] It is understandable that the sealing plate 1000 can switch between the first position and the second position during the sliding process relative to the first connecting ring 220.

[0144] In addition, the reactor has a second direction that intersects the first direction, and the second direction is a vertical direction.

[0145] The first body 120 is provided with a discharge end 160 on one side along the second direction. The discharge end 160 is located at the bottom of the first body 120 along the second direction and faces the first connecting ring 220.

[0146] In the second position, the discharge end 160 is directly opposite the discharge port 221 along the second direction, so that the material discharged from the discharge port 221 can enter the discharge end 160 and be discharged from the first container 100.

[0147] like Figure 5 and Figure 6As shown, in some embodiments of this application, the first connecting ring 220 is provided with an elastic guide component 1100 on the side opposite to the electrode rod 500. The elastic guide component 1100 includes at least one first connector 1110, at least one first guide 1120 and at least one first elastic component 1130.

[0148] It is understood that the number of the first connector 1110, the first guide 1120 and the first elastic member 1130 can be any number of two or more values, and can be specifically set according to the actual situation.

[0149] The first connecting member 1110 is disposed on the side of the sealing plate 1000 away from the first connecting ring 220. One end of the first guide member 1120 is connected to the first connecting ring 220, and the other end of the first guide member 1120 passes through the first connecting member 1110. That is, the first connecting member 1110 can slide along the axis of the first guide member 1120, thereby driving the sealing plate 1000 to slide along the first guide member 1120 through the first connecting member 1110.

[0150] In addition, the first elastic element 1130 is sleeved on the first guide 1120, one end of the first elastic element 1130 is connected to the first connector 1110, and the other end of the first elastic element 1130 is connected to the edge of the first connecting ring 220, so as to provide elastic force to the first connector 1110 through the first elastic element 1130, thereby providing elastic tension to the sealing plate 1000 through the first elastic element 1130.

[0151] In some embodiments, when the sealing plate 1000 is in the first position, the first elastic member 1130 is in its original length state; when the sealing plate 1000 is in the second position, the first elastic member 1130 is in a stretched state. At this time, the first elastic member 1130 has an elastic force on the first connecting member 1110, so that the first connecting member 1110 and the sealing member tend to move from the second position to the first position under the elastic force of the first elastic member 1130. When the external force acting on the first connecting member 1110 and the sealing plate 1000 is removed, the sealing plate 1000 can move from the second position to the first position under the elastic force of the first elastic member 1130.

[0152] In other embodiments, when the sealing plate 1000 is in the first position, the first elastic member 1130 is in a stretched state, and the first elastic member 1130 provides elastic tension to the first connecting member 1110 to prevent the sealing plate 1000 from sliding relative to the first connecting ring 220 under the action of gravity, so as to ensure the stability of the sealing plate 1000 in the first position.

[0153] like Figure 2 and Figure 5 As shown, in some embodiments of this application, the first receiving cavity 110 is provided with at least two spaced-apart support members 1200. It can be understood that the number of support members 1200 can be any number of two or more values, and can be specifically set according to the actual situation.

[0154] One end of the support member 1200 is connected to the first end cap 130, and the other end of the support member 1200 is connected to the second end cap 140. The axis of the support member 1200 is parallel to the first direction.

[0155] In this embodiment, the support member 1200 is disposed on the side of the second container 200 facing the discharge end 160, and the support member 1200 is rotatably connected to the second container 200 to reduce the friction between the second container 200 and the support member 1200 during rotation, thereby ensuring the smoothness of the rotation of the second container 200.

[0156] In addition, the reactor also has a third direction that intersects the first and second directions. In this embodiment, there are two support members 1200. The two support members 1200 are symmetrically arranged on two opposite sides of the second container 200 along the third direction to provide support for the second container 200 and ensure the stability of the second container 200 in the first receiving cavity 110.

[0157] like Figure 2 , Figure 4 and Figure 5 As shown, in some embodiments of this application, the support member 1200 includes a support rod 1210, a first rotating shaft 1220, and a second rotating shaft 1230.

[0158] The first rotating shaft 1220 and the second rotating shaft 1230 are respectively rotatably sleeved on the support rod 1210. The first rotating shaft 1220 and the second rotating shaft 1230 are spaced apart at both ends of the support rod 1210 along a first direction. The side of the first rotating shaft 1220 and the second rotating shaft 1230 away from the support rod 1210 abuts against the second container 200 to ensure the stability and smoothness of the second container 200 during rotation.

[0159] It should be noted that the first rotating shaft 1220 and the second rotating shaft 1230 have coaxially arranged inner rings and outer rings, which are rotatably connected. The inner ring is sleeved on the support rod 1210, and the outer ring abuts against the outer wall of the second container 200. During the rotation of the second container 200, the outer ring can be driven to rotate, so as to reduce the friction between the first rotating shaft 1220 and the second rotating shaft 1230 and the second container 200 respectively.

[0160] In this embodiment, the second container 200 is provided with a first protruding ring 250 and a second protruding ring 260 on its periphery. The first protruding ring 250 is adjacent to the first connecting ring 220, and the second protruding ring 260 is adjacent to the second connecting ring 240. The first protruding ring 250 and the second protruding ring 260 are coaxially arranged.

[0161] Specifically, in some embodiments, the first rotating shaft 1220 is disposed on the side of the first convex ring 250 facing the second convex ring 260, and the second rotating shaft 1230 is disposed on the side of the second convex ring 260 facing the first convex ring 250; in other embodiments, the first rotating shaft 1220 is disposed on the side of the first convex ring 250 away from the second convex ring 260, and the second rotating shaft 1230 is disposed on the side of the second convex ring 260 away from the first convex ring 250.

[0162] Along the first direction, the side of the first rotating shaft 1220 opposite to the second rotating shaft 1230 abuts against the first convex ring 250, and the side of the second rotating shaft 1230 opposite to the first rotating shaft 1220 abuts against the second convex ring 260, so that the first convex ring 250 and the second convex ring 260 respectively provide a limiting effect on the first rotating shaft 1220 and the second rotating shaft 1230, so as to ensure the stability of the position of the second container 200 in the first receiving cavity 110.

[0163] In this embodiment, the first convex ring 250 and the second convex ring 260 abut against the outer ring to avoid friction between the first convex ring 250 and the second convex ring 260 and the inner ring, thereby ensuring the smoothness and stability of the second container 200 during rotation.

[0164] like Figure 5 and Figure 6 As shown, in some embodiments of this application, a guide structure 1300 is provided between the two support members 1200. The guide structure 1300 includes a fixing member 1310 and an elastic limiting member 1320. The fixing member 1310 is disposed between the two support members 1200 and is located at one end of the support member 1200 near the first connecting ring 220. The elastic member is disposed on the side of the fixing member 1310 facing the first connecting ring 220, and the elastic limiting member 1320 is elastically connected to the fixing member 1310.

[0165] In the first position, the elastic limiting member 1320 and the sealing plate 1000 are spaced apart or slidably connected. That is, during the rotation of the second container 200 in the first clockwise direction, there is no tension between the elastic limiting member 1320 and the sealing member, and the sealing plate 1000 is always in the first position.

[0166] In the second position, the end of the elastic limiting member 1320 away from the fixing member 1310 is connected to the sealing plate 1000. At this time, the elastic limiting member 1320 has a pulling force on the sealing plate 1000 along the first direction toward the side of the first end cover 130, thereby opening the discharge port.

[0167] like Figure 5 and Figure 6 As shown, in some embodiments, the sealing plate 1000 is provided with a guide groove 1010 on the side opposite to the first connecting ring 220.

[0168] In the second position, the elastic limiting member 1320 is at least partially received in the guide groove 1010, that is, the elastic limiting member 1320 and the groove wall of the guide groove 1010 are connected to elastically connect the elastic limiting member 1320 and the sealing plate 1000.

[0169] As the second container 200 rotates in the second clockwise direction, when the sealing plate 1000 faces the discharge end 160, the end of the elastic limiting member 1320 facing the sealing plate 1000 is received in the guide groove 1010, and as the sealing plate 1000 rotates, the elastic limiting member 1320 pulls the sealing plate 1000 from the first position to the second position.

[0170] like Figure 5 and Figure 6 As shown, in some embodiments, the fixing member 1310 includes a first connecting rod 1311 and a second connecting rod 1312. The first connecting rod 1311 is disposed between the two supporting members 1200, and one end of the second connecting rod 1312 is connected to the first connecting rod 1311.

[0171] The elastic limiting member 1320 includes a limiting rod 1321, a second elastic member 1322, and a second guide member. One end of the limiting rod 1321 passes through the second connecting rod 1312, and the limiting rod 1321 and the second connecting rod 1312 are slidably connected.

[0172] In this embodiment, the end of the limiting rod 1321 opposite to the first connecting ring 220 is provided with a first limiting protrusion 1324, and the end of the limiting rod 1321 near the first connecting ring 220 is provided with a second limiting protrusion 1325. The second elastic member 1322 is sleeved on the limiting rod 1321, one end of the second elastic member 1322 abuts against the second connecting rod 1312, and the other end of the second elastic member 1322 abuts against the second limiting protrusion 1325, so as to ensure the stability of the second elastic member 1322 on the limiting rod 1321.

[0173] It is understood that the limiting rod 1321 is slidably connected to the second connecting rod 1312, and the second limiting protrusion 1325 is provided with a slider 1323 on the side facing the second connecting ring 240. The slider 1323 can slide along the guide groove 1010.

[0174] It should be noted that during the rotation of the second container 200 in the first clockwise direction, when the sealing plate 1000 is facing the discharge end 160, the side of the sealing plate 1000 away from the first connecting ring 220 abuts against the limiting rod 1321 and provides a pressure on the limiting rod 1321 in the first direction toward the first end cover 130, so that the limiting rod 1321 moves along the axis of the limiting rod 1321 under the pressure of the sealing plate 1000, thereby making the limiting rod 1321 and the sealing plate 1000 slide relative to each other. At this time, the sealing plate 1000 is still in the first position.

[0175] During the rotation of the second container 200 in the second clockwise direction, when the sealing plate 1000 is facing the discharge end 160, the slider 1323 is at least partially housed in the guide groove 1010, and provides a pulling force to the sealing plate 1000 in the direction of the first end cap 130 through the slider 1323, so that the sealing plate 1000 moves from the first position to the second position, thereby opening the discharge port.

[0176] In this embodiment, the slider 1323 is a ball bearing to further improve the smoothness of the slider 1323 during sliding along the guide groove 1010.

[0177] like Figures 5 to 7 As shown, in some embodiments, the guide groove 1010 includes a first guide groove 1011, a second guide groove 1012, and a third guide groove 1013. One end of the first guide groove 1011 is connected to one end of the second guide groove 1012. The end of the first guide groove 1011 away from the second guide groove 1012 passes through the sealing plate 1000. The other end of the second guide groove 1012 is connected to one end of the third guide groove 1013. The end of the third guide groove 1013 away from the second guide groove 1012 passes through the sealing plate 1000.

[0178] The first guide groove 1011 and the second guide groove 1012 are smoothly connected, the second guide groove 1012 and the third guide groove 1013 are smoothly connected, the part connecting the first guide groove 1011 and the second guide groove 1012 is the first arc-shaped groove 1014, and the part connecting the second guide groove 1012 and the third guide groove 1013 is the second arc-shaped groove 1015, so as to ensure the smoothness of the slider 1323 sliding from the first guide groove 1011 to the second guide groove 1012, and the smoothness of the slider sliding from the second guide groove 1012 to the third guide groove 1013.

[0179] In this embodiment, the first guide groove 1011 is a straight groove. Additionally, the second guide groove 1012 can be a straight groove or an arc-shaped groove, which can be specifically set according to the rotational speed of the second container.

[0180] For example, in some embodiments, when the rotational speed of the second container 200 is greater than or equal to a preset rotational speed, the second guide groove 1012 is an arc-shaped groove to extend the movement trajectory of the slider 1323 in the second guide groove 1012, thereby reducing the feeding speed. In other embodiments, when the rotational speed of the second container 200 is less than the preset rotational speed, the second guide groove 1012 is a straight groove to shorten the movement trajectory of the slider 1323 in the second guide groove 1012, thereby accelerating the feeding speed.

[0181] It should be noted that, in this embodiment, along the width direction of the sealing plate 1000, the distance from one end of the first guide groove 1011 away from the second guide groove 1012 to one end of the third guide groove 1013 away from the second guide groove 1012 is greater than the width of the discharge port 221, so as to ensure that the discharge port can be fully opened and to ensure discharge efficiency.

[0182] In this embodiment, the slope of the guide groove 1010 is α, where the value of α ranges from 90°≤α≤135°. It can be understood that the value of α can be any of the following ranges: 90°≤α≤135°, 95°≤α≤135°, 100°≤α≤135°, 105°≤α≤135°, 110°≤α≤135°, 90°≤α≤135°, 115°≤α≤135°, 120°≤α≤135°, 125°≤α≤135°, and 130°≤α≤135°.

[0183] By adjusting the slope of the guide groove 1010, the smoothness and fluidity of the slider 1323 sliding in the guide groove 1010 are improved, thereby improving the smoothness of the opening or closing of the discharge port 221.

[0184] In all examples shown and described herein, any specific values ​​should be interpreted as merely exemplary and not as limitations; therefore, other examples of exemplary embodiments may have different values.

[0185] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0186] The above-described embodiments are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention.

Claims

1. A reactor having a first orientation, characterized in that, include: The first container has a first receiving cavity; The second container is housed in the first receiving cavity and rotatably connected to the first container. The second container has a second receiving cavity that communicates with the first receiving cavity. The second container includes a first connecting ring, a second body, and a second connecting ring. The first connecting ring and the second connecting ring are respectively disposed at both ends of the second body along the first direction. The rotation direction of the second container includes a first clockwise direction and a second clockwise direction. A stirring assembly is housed in a second receiving cavity. The stirring assembly is configured to stir the material in the second receiving cavity. The stirring assembly includes a plurality of spaced-apart spiral blades. The spiral blades are connected to the inner wall of the second body. The spiral direction of the spiral blades is the first clockwise direction. The helical blade includes a first helical segment and a second helical segment. The first helical segment is inclined along the first direction toward the side closer to the first connecting ring, and the second helical segment is inclined along the first direction toward the side closer to the second connecting ring. As the second container rotates in the first clockwise direction, the second spiral segment can provide a thrust to the material in the second receiving cavity in the first direction toward the side closer to the second connecting ring. As the second container rotates in the second clockwise direction, the first spiral segment can provide a thrust to the material in the second receiving cavity in the first direction toward the side closer to the first connecting ring. A drive unit connected to the first container, the drive unit being configured to drive the second container to rotate; An electrode rod is connected to the first container, the electrode rod is at least partially housed in the second receiving cavity, and the electrode rod is configured to discharge into the second receiving cavity.

2. The reactor according to claim 1, characterized in that, The drive device includes a drive motor, a coupling, and a first transmission structure; The output end of the drive motor is connected to one end of the coupling, and the second container is connected to the other end of the coupling through the first transmission structure.

3. The reactor according to claim 2, characterized in that, The first transmission structure includes gears and multiple transmission rods; The gear is housed in the first receiving cavity and connected to the coupling; The transmission rod is disposed on the side of the second container facing the gear, and a plurality of transmission rods are arranged at equal intervals on the edge of the second container, and the transmission rods are connected to the gear in a transmission manner.

4. The reactor according to claim 3, characterized in that, The gear includes a hub and a plurality of teeth, the plurality of teeth being arranged at equal intervals along the circumference of the hub; The hub has multiple spaced arc-shaped grooves on its periphery. The arc-shaped grooves and the wheel teeth are arranged alternately along the periphery of the hub, and the groove walls of the arc-shaped grooves are in contact with the transmission rod.

5. The reactor according to any one of claims 1 to 4, characterized in that, Along the first direction, the first container includes a first body, a first end cap, and a second end cap; Along the first direction, a first opening is provided on one side of the first body, and a second opening is provided on the other side of the first body. The first end cap is connected to the first body and covers the first opening, and the second end cap is connected to the first body and covers the second opening. The first body has at least one first annular groove on the side facing the first end cover, and a first sealing ring is provided in the first annular groove. The first sealing ring abuts against the first end cover on the side facing the first end cover. The first body has at least one second annular groove on the side facing the second end cover, and a second sealing ring is provided in the second annular groove. The side of the second sealing ring facing the second end cover abuts against the second end cover.

6. The reactor according to claim 5, characterized in that, The inner diameter of the first connecting ring gradually decreases from the center of the second body to the first opening, and the inner diameter of the second connecting ring gradually decreases from the center of the second body to the second opening.

7. The reactor according to claim 6, characterized in that, The first body has a heating structure on its periphery. The heating structure includes a heat insulation layer and multiple heating elements. The heat insulation layer is sleeved on the first body. The side of the heat insulation layer facing the first body and the outer wall of the first body define a first cavity. The heating elements are housed in the first cavity. The multiple heating elements are arranged at intervals along the periphery of the first container.

8. The reactor according to claim 6, characterized in that, The first connecting ring has a discharge port extending through it on one side perpendicular to the first direction; The first connecting ring has a sealing plate on the side opposite to the electrode rod, and the sealing plate is slidably connected to the first connecting ring; The sealing plate has a first position and a second position relative to the first connecting ring; When the second container rotates in the first clockwise direction, the sealing plate is in the first position and the sealing plate covers the discharge port; When the second container rotates in a second clockwise direction, and the sealing plate switches from the first position to the second position, the discharge port opens at least partially; The reactor has a second direction intersecting the first direction, and the first body is provided with a discharge end on one side along the second direction, the discharge end facing the first connecting ring; In the second position, the discharge end is directly opposite the discharge port along the second direction.

9. The reactor according to claim 8, characterized in that, The first connecting ring has an elastic guiding component on the side opposite to the electrode rod. The elastic guiding component includes at least one first connecting member, at least one first guiding member, and at least one first elastic member. The first connector is disposed on the side of the sealing plate opposite to the first connecting ring, one end of the first guide is connected to the first connecting ring, and the other end of the first guide passes through the first connector; The first elastic element is sleeved on the first guide element, one end of the first elastic element is connected to the first connecting element, and the other end of the first elastic element is connected to the edge of the first connecting ring.

10. The reactor according to claim 8, characterized in that, The first accommodating cavity is provided with at least two spaced-apart support members, one end of which is connected to the first end cap and the other end of which is connected to the second end cap; The support member is disposed on the side of the second container facing the discharge end and is rotatably connected to the second container.

11. The reactor according to claim 10, characterized in that, The support component includes a support rod, a first rotating shaft, and a second rotating shaft; The first and second rotating shafts are respectively sleeved on the support rod, and the side of the first and second rotating shafts away from the support rod abuts against the second container; The second container has a first convex ring and a second convex ring spaced apart on its periphery. The first convex ring is adjacent to the first connecting ring, and the second convex ring is adjacent to the second connecting ring. Along the first direction, the side of the first rotating shaft opposite to the second rotating shaft abuts against the first convex ring, and the side of the second rotating shaft opposite to the first rotating shaft abuts against the second convex ring.

12. The reactor according to claim 10, characterized in that, A guide structure is provided between the two support members. The guide structure includes a fixing member and an elastic limiting member. The fixing member is disposed between the two support members, and the elastic limiting member is elastically connected to the fixing member. In the first position, the elastic limiting member and the sealing plate are spaced apart or slidably connected; In the second position, the end of the elastic limiting member that is away from the fixing member is connected to the sealing plate.

13. The reactor according to claim 12, characterized in that, The sealing plate has a guide groove on the side opposite to the first connecting ring; In the second position, the elastic limiting member is at least partially received in the guide groove.

14. A coating apparatus, characterized in that, The reactor comprising any one of claims 1 to 13.

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