Exposure pattern compensation method after lens aging

Abstract

The application discloses a lens aging exposure pattern compensation method, step 1: the mask pattern A is exposed to form an exposure pattern, and the exposure pattern is compared with the mask pattern A to form an X compensation table and a Y compensation table; step 2: each edge of the mask pattern to be exposed is traversed, and the coordinates of the end points of each edge are obtained; step 3: the corresponding compensation value is found out in the X compensation table and the Y compensation table according to the coordinates of the end points, and the end point coordinates of the mask pattern are compensated and modified according to the compensation value; when the X coordinate and / or the Y coordinate of the end point is located between the i-th and the i+1-th coordinates recorded in the X and Y compensation tables, the compensation value is calculated to perform compensation modification; step 4: the mask pattern is exposed to obtain an exposure pattern, and the X compensation table and the Y compensation table are used to perform linear interpolation compensation on the mask pattern to be exposed, so that the difference between the exposure pattern and the mask pattern can be well reduced, and high-quality guarantee is provided for effective industrial production.

Description

Technical Field

[0001] This invention relates to a technique for processing distortion in exposure patterns after lens aging, specifically to a method for compensating for exposure patterns after lens aging. Background Technology

[0002] In modern PCB manufacturing, exposure lenses age over time, leading to distortion of the exposed pattern and a significant difference from the mask pattern. For example... Figure 1-3 As shown, Figure 1 This is a comparison image of the mask pattern and the image after exposure. Figure 2 for Figure 1 The distortion diagram in Example 1 of the difference is shown. Figure 3 for Figure 1 The distortion pattern in Example 2 of the diagram shows the differences. Figure 1 The comparison shows that the distortion is more severe in the upper part of the image. In example 1, the distortion difference reaches about 7.78 micrometers, and in example 2, the distortion difference is about 1.51 micrometers. This causes serious exposure problems and severely affects the quality of industrial production. Summary of the Invention

[0003] This invention addresses the problems existing in the prior art by proposing a method for compensating exposure patterns after lens aging. By using X compensation tables and Y compensation tables to perform linear interpolation compensation on the mask pattern to be exposed, the difference between the exposed pattern and the mask pattern can be effectively reduced, providing a high-quality guarantee for efficient industrial production.

[0004] The technical solution adopted in this invention is: a method for compensating exposure patterns after lens aging, comprising:

[0005] Step 1: Expose the mask pattern A to form an exposure pattern. Compare the exposure pattern with the mask pattern A to obtain the image distortion compensation amount under the current aging state of the lens and record it to form the X compensation table and Y compensation table.

[0006] Step 2: Traverse each edge of the mask image to be exposed and obtain the coordinates of the endpoints of each edge;

[0007] Step 3: Find the corresponding compensation value in the X compensation table and Y compensation table according to the coordinates of the endpoint, and modify the endpoint coordinates of the mask pattern according to the compensation value. When the X coordinate and / or Y coordinate of the endpoint are between the i-th and i+1-th coordinates recorded in the X and Y compensation tables, calculate the compensation value by linear interpolation and modify it accordingly.

[0008] Step 4: Expose the mask pattern to obtain the exposed pattern.

[0009] The coordinates of the endpoints of the edge are P1 and P2. The compensation value (Ox1, Oy1) of endpoint P1 is calculated to compensate for the endpoint. The formula is as follows:

[0010]

[0011]

[0012] In the formula, P1.y is the y-coordinate of point P1, Y... i+1 and Y i Yb is the Y-axis value in the Y-compensation table. xi+1 and Yb xi Yb is the x-direction compensation value in the Y-compensation table. yi+1 and Yb yi The compensation value in the y-direction is obtained by looking up the y-compensation table. (YO) x1 XO y1 That is, the point compensation value obtained through the Y compensation table;

[0013] The point compensation value (XO) can be obtained by processing in the same way as in equations (1) and (2). x1 XO y1 If the final compensation value (Ox1, Oy1) of point P1 is obtained through the formula:

[0014]

[0015] After finding the final compensation value (Ox1, Oy1) of P1, find the final compensation value (Ox2, Oy2) of P2 in the same way. Compensating points P1 and P2 respectively means compensating the edges.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] By using X-compensation tables and Y-compensation tables to perform linear interpolation compensation on the mask pattern to be exposed, the difference between the exposed pattern and the mask pattern can be effectively reduced, providing a high-quality guarantee for efficient industrial production. Attached Figure Description

[0018] Figure 1 It is a comparison (overlapping state) between the mask pattern and the exposed pattern;

[0019] Figure 2 yes Figure 1 Enlarged view of example 1 of the differences;

[0020] Figure 3 yes Figure 1 Enlarged view of example 2 of the differences;

[0021] Figure 4 This is a comparison diagram of the compensated exposure pattern and the mask pattern of the present invention;

[0022] Figure 5 yes Figure 4 Enlarged view of the part corresponding to the difference example 1;

[0023] Figure 6 yes Figure 4 Enlarged view of the part corresponding to the difference in example 2;

[0024] Figure 7 This is a flowchart of the present invention;

[0025] Figure 8 This is an example graph of linear interpolation of the Y-compensation table. Detailed Implementation

[0026] The present invention will be further illustrated by the following examples, but the scope of the present invention is not limited thereto.

[0027] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0028] like Figure 4-8 As shown, an exposure pattern compensation method for lens aging includes the following steps:

[0029] Step 1: Expose the mask pattern A to form an exposure pattern. Compare the exposure pattern with the mask pattern A to obtain the image distortion compensation amount under the current aging state of the lens and record it to form the X compensation table and Y compensation table.

[0030] In step 1, the mask pattern A is manually compared with its corresponding exposure pattern to ensure that the distortion is within an acceptable range, thereby obtaining the amount of image distortion compensation. After a large number of tests, it was found that the distortion process has a linear pattern, and the distortion becomes more severe as you go up the spectrum.

[0031] The compensation tables are shown in Table 1 and Table 2.

[0032] X-direction compensation table

[0033]

[0034] As can be seen from the table, different compensations can be applied to the graph for different regions (the region between two adjacent values). The compensation value within the region is obtained by linear interpolation based on the compensation value given in the table.

[0035] Step 2: Traverse each edge of the mask image to be exposed and obtain the coordinates of the endpoints of each edge;

[0036] Step 3: Find the corresponding compensation value in the X compensation table and Y compensation table according to the coordinates of the endpoint, and modify the endpoint coordinates of the mask pattern according to the compensation value. When the X coordinate and / or Y coordinate of the endpoint are between the i-th and i+1-th coordinates recorded in the X and Y compensation tables, calculate the compensation value by linear interpolation and modify it accordingly.

[0037] Step 4: Expose the mask pattern to obtain the exposed pattern.

[0038] The coordinates of the endpoints of the edge are P1 and P2. The compensation value (Ox1, Oy1) of endpoint P1 is calculated to compensate for the endpoint. The formula is as follows:

[0039]

[0040]

[0041] In the formula, P1.y is the y-coordinate of point P1, Y... i+1 and Y i Yb is the Y-axis value in the Y-compensation table. xi+1 and Yb xi Yb is the x-direction compensation value in the Y-compensation table. yi+1 and Yb yi The compensation value in the y-direction is obtained by looking up the y-compensation table. (YO) x1 ,YO y1 That is, the point compensation value obtained through the Y compensation table;

[0042] The point compensation value (XO) can be obtained by processing in the same way as in equations (1) and (2). x1 XO y1 If the final compensation value (Ox1, Oy1) of point P1 is obtained through the formula:

[0043]

[0044] After finding the final compensation value (Ox1, Oy1) of P1, find the final compensation value (Ox2, Oy2) of P2 in the same way. Compensating points P1 and P2 respectively means compensating the edges.

[0045] It should be noted that the embodiments described above are only for explaining the present invention and do not constitute any limitation on the present invention. The present invention has been described with reference to typical embodiments, but it should be understood that the words used therein are descriptive and explanatory terms, not limiting terms. Modifications can be made to the present invention within the scope of the claims, and revisions can be made to the present invention without departing from the scope and spirit of the present invention. Although the present invention described herein relates to specific methods, materials, and embodiments, it does not mean that the present invention is limited to the specific examples disclosed herein; on the contrary, the present invention can be extended to all other methods and applications with the same function.

Claims

1. A method for compensating exposure patterns after lens aging, characterized in that: Step 1: Expose the mask pattern A to form an exposure pattern. Compare the exposure pattern with the mask pattern A to obtain the image distortion compensation amount under the current aging state of the lens and record it to form an X compensation table and a Y compensation table. Each X-axis value in the X compensation table corresponds to the X-direction compensation value and the Y-direction compensation value. Each Y-axis value in the Y compensation table corresponds to the X-direction compensation value and the Y-direction compensation value. Step 2: Traverse each edge of the mask image to be exposed and obtain the coordinates of the endpoints of each edge; Step 3: Based on the coordinates of the endpoint, find the corresponding compensation value in the X compensation table and Y compensation table, and add the X-direction compensation values ​​found in the X compensation table and Y compensation table to obtain the final X-direction compensation value. The Y-direction compensation values ​​obtained from the X compensation table and the Y compensation table are superimposed to obtain the final Y-direction compensation value. The endpoint coordinates of the mask pattern are compensated and modified according to the obtained compensation value. When the endpoint X coordinate and / or Y coordinate are between the i-th and i+1-th coordinates recorded in the X and Y compensation tables, the compensation value is calculated by linear interpolation and the compensation is modified accordingly. Step 4: Expose the mask pattern to obtain the exposed pattern.

2. The exposure pattern compensation method after lens aging as described in claim 1, characterized in that, The coordinates of the endpoints of the edge are P1 and P2. The compensation value (Ox1, Oy1) of endpoint P1 is calculated to compensate for the endpoint. The formula is: ； ； In the formula Let y be the coordinates of point P1. and The Y-axis value in the Y-compensation table. and The x-direction compensation value is in the Y-compensation table. and The compensation value in the y-direction is obtained by looking up the y-compensation table. , That is, the point compensation value obtained through the Y compensation table; The point compensation value can be obtained by processing the same methods as in equations (1) and (2). , If the final compensation value (Ox1, Oy1) of point P1 is obtained through the formula: ； After finding the final compensation value (Ox1, Oy1) of P1, find the final compensation value (Ox2, Oy2) of P2 in the same way. Compensating points P1 and P2 respectively means compensating the edges.

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