An ultra-precision double-drive high-acceleration hydrostatic guideway device

Abstract

The present application relates to the field of ultra-precision machine tool, and provides an ultra-precision double-drive high-acceleration hydrostatic guideway device.The ultra-precision double-drive high-acceleration hydrostatic guideway device comprises a guideway base, a guideway assembly and a guideway movement assembly, the guideway assembly comprises at least two guideways and at least one side guideway, the at least two guideways are arranged on the upper part of the guideway base along the width direction of the guideway base, and one side guideway is arranged between the adjacent two guideways.The hydrostatic guideway device provided by the present application realizes the position lifting of the supporting oil cavity surface by arranging the supporting oil cavity on the bottom of the slide plate and arranging the auxiliary oil cavity on the top of the hydrostatic slide block near the side of the guideway.The overall gravity center of the guideway movement assembly is lowered and is coplanar with the supporting oil cavity surface due to the fact that the hydrostatic slide block and the slide block heightening column are located below the supporting oil cavity surface, thereby reducing the influence of the overturning moment on the supporting oil film thickness and improving the precision of the hydrostatic guideway device.

Description

Technical Field

[0001] This invention relates to the field of ultra-precision machine tools, and more particularly to an ultra-precision dual-drive high-acceleration hydrostatic guide rail device. Background Technology

[0002] Hydrostatic guideways are crucial functional components of ultra-precision machine tools. They rely on an oil film formed between the moving parts and the guideway for support, offering advantages such as high motion accuracy, low creep, high load capacity, good damping characteristics, and excellent vibration isolation. Traditional ultra-precision machining requires closed-loop hydrostatic guideways with low acceleration, maintaining high precision during machine tool acceleration and deceleration. However, when machining small and complex parts, especially those with sharp corners or significant curvature variations, high acceleration is needed to ensure good dynamic performance. Under these conditions, the center of gravity of the moving parts is positioned higher and at a greater distance from the supporting oil cavity surface, resulting in a large overturning moment. This causes fluctuations in the thickness of the supporting oil film on the hydrostatic guideway, directly affecting its motion accuracy and making it difficult to meet machining requirements. While existing three-sided guide hydrostatic guideways have a low center of gravity for their moving parts, they consist of a guide core with a linear guide structure set within the space enclosed by the upper, side, and lower slides, forming a three-sided enclosed hydrostatic guideway. However, three-sided guide hydrostatic guideways have four drawbacks that make them difficult to apply in engineering practice: First, the three oil chamber surfaces (support oil chamber, auxiliary oil chamber, and side oil chamber) are located on three different workpieces, making assembly complex and difficult to guarantee dimensional and positional tolerances; second, the torque direction of the hydraulic oil on the auxiliary and side oil chamber surfaces is the same, and the superimposed deformation after oil flow makes it difficult to guarantee high precision; third, the linear guide core is relatively wide, and all four sides are guide surfaces, requiring high positional accuracy and making machining difficult; fourth, the position feedback device is located on the side of the upper slide, and the spatial position difference between the position feedback device and the guideway's motion axis is large, leading to a large Abbe error in the guideway unit and reducing the guideway's motion accuracy. Summary of the Invention

[0003] This invention provides an ultra-precision dual-drive high-acceleration hydrostatic guide rail device to solve the problems of high center of gravity of the moving parts of the guide rail, large deformation after oil flow and large Abbe error of the system in the prior art.

[0004] This invention provides an ultra-precision dual-drive high-acceleration hydrostatic guide rail device, comprising: Guide rail base; A guide rail assembly, the guide rail assembly including at least two guide rails and at least one side guide rail, the at least two guide rails being spaced apart on the upper part of the guide rail base along the width direction of the guide rail base, and a side guide rail being disposed between two adjacent guide rails; A guide rail motion assembly includes a slide plate and multiple slider components. The slide plate is disposed above the guide rail, and a supporting oil cavity is provided at the bottom of the slide plate. The supporting oil cavity is slidably engaged with the top of the corresponding guide rail. Each slider component is disposed between the corresponding guide rail and a side guide rail. The slider component includes a hydrostatic slider and a slider raising post. The slider raising post is disposed on the top side of the hydrostatic slider away from the guide rail and is connected to the bottom of the slide plate. An auxiliary oil cavity is provided on the top side of the hydrostatic slider near the guide rail. The auxiliary oil cavity is slidably engaged with the guide rail, and the height of the auxiliary oil cavity is less than the height of the supporting oil cavity. A side oil cavity is provided on the side of the hydrostatic slider facing the side guide rail. The side oil cavity surface is perpendicular to the auxiliary oil cavity surface, and the side oil cavity is slidably engaged with the side guide rail. A position measuring component is disposed on the center line of the two guide rails, and the position measuring component is connected to the side guide rail and the slide plate. The position measuring component is used to detect the position of the slide plate.

[0005] According to the present invention, an ultra-precision dual-drive high-acceleration hydrostatic guide rail device is provided, wherein the guide rail assembly includes two guide rails, and the two guide rails are parallel to each other.

[0006] According to the present invention, an ultra-precision dual-drive high-acceleration hydrostatic guide rail device is provided, wherein the guide rail comprises: Bottom guide rail, the bottom guide rail being disposed on the guide rail base; A top guide rail is provided above the bottom guide rail. The width of the top guide rail is greater than the width of the bottom guide rail. The top of the top guide rail slides in conjunction with the supporting oil cavity, and the bottom of the top guide rail slides in conjunction with the auxiliary oil cavity.

[0007] According to the present invention, an ultra-precision dual-drive high-acceleration hydrostatic guide rail device is provided, wherein the guide rail assembly includes two guide rails arranged in parallel and extending along the length direction of the guide rail base.

[0008] According to the present invention, an ultra-precision dual-drive high-acceleration hydrostatic guide rail device is provided, wherein the guide rail motion assembly includes four slider components, two of which are disposed between one guide rail and the side guide rail, and the remaining two slider components are disposed between another guide rail and the side guide rail. The two slider components on the same side of the side guide rail are arranged at intervals along the length direction of the guide rail.

[0009] According to the present invention, an ultra-precision dual-drive high-acceleration hydrostatic guide rail device is provided, wherein the four slider components are arranged symmetrically in pairs about the side guide rail.

[0010] According to the present invention, an ultra-precision dual-drive high-acceleration hydrostatic guide rail device is provided, wherein the position measurement component includes: A grating ruler mounting block is disposed on the upper part of the side guide rail; A grating ruler, wherein the grating ruler is disposed on one side of the grating ruler mounting block; A reading head is connected to the slide and is located on the side of the grating ruler away from the grating ruler mounting block. The reading head is used to read the scale on the grating ruler to determine the position of the slide.

[0011] The ultra-precision dual-drive high-acceleration hydrostatic guide rail device provided by the present invention further includes: A drive assembly is connected to the guide rail base and the slide, and the drive assembly is used to drive the slide to move along the length direction of the guide rail.

[0012] According to the present invention, an ultra-precision dual-drive high-acceleration hydrostatic guide rail device is provided, wherein the drive assembly includes: Two linear motors are symmetrically arranged on both sides of the guide rail base. The stators of the linear motors are connected to the guide rail base, and the movers of the linear motors are connected to the slide.

[0013] According to the present invention, an ultra-precision dual-drive high-acceleration hydrostatic guide rail device is provided, wherein the slide plate is provided with a flow channel, and the flow channel is connected to the auxiliary oil chamber, the support oil chamber and the side oil chamber.

[0014] The ultra-precision dual-drive high-acceleration hydrostatic guide rail device provided by this invention achieves the upward lifting of the support oil chamber surface by setting the support oil chamber at the bottom of the slide and setting the auxiliary oil chamber at the top of the hydrostatic slider near the guide rail. Since the hydrostatic slider and the slider raising column are located below the support oil chamber surface, the overall center of gravity of the guide rail motion assembly shifts downward and becomes coplanar with the support oil chamber surface, thereby reducing the influence of the overturning moment on the support oil film thickness and improving the precision of the hydrostatic guide rail device. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1This is a schematic diagram of the structure of the ultra-precision dual-drive high-acceleration hydrostatic guide rail device provided by the present invention.

[0017] Figure 2 This is a schematic diagram of the structure of the ultra-precision dual-drive high-acceleration hydrostatic guide rail device provided by the present invention after removing the top guide rail.

[0018] Figure 3 This is one of the structural schematic diagrams of the ultra-precision dual-drive high-acceleration hydrostatic guide rail device provided by the present invention after removing the top guide rail and side guide rail.

[0019] Figure 4 This is the second schematic diagram of the ultra-precision dual-drive high-acceleration hydrostatic guide rail device provided by the present invention after removing the top guide rail and side guide rail.

[0020] Figure 5 This is a top view of the ultra-precision dual-drive high-acceleration hydrostatic guide rail device provided by the present invention.

[0021] Figure 6 It is along Figure 5 A schematic diagram of the cross-sectional structure created by the mid-section line AA.

[0022] Figure 7 This is a side view of the ultra-precision dual-drive high-acceleration hydrostatic guide rail device provided by the present invention.

[0023] Figure 8 It is along Figure 7 A schematic diagram of the cross-sectional structure created by the middle section line CC.

[0024] Figure 9 This is a three-dimensional structural diagram of the guide rail provided by the present invention.

[0025] Figure 10 This is a top view of the guide rail structure provided by the present invention.

[0026] Figure 11 It is along Figure 10 A schematic diagram of the cross-sectional structure created by the mid-section line BB.

[0027] Figure label: 10. Guide rail base; 20. Guide rail assembly; 21. Guide rail; 22. Side guide rail; 30. Guide rail motion assembly; 31. Slide plate; 32. Slider component; 40. Position measurement assembly; 41. Grating ruler mounting block; 42. Grating ruler; 43. Reading head; 44. Reading head mounting bracket; 50. Drive assembly; 51. Linear motor; 210. Bottom guide rail; 211. Top guide rail; 310. Support oil chamber; 311. First main flow channel; 312. First branch flow channel; 313. First connecting flow channel; 314. First throttle; 315. Oil inlet pipe; 320. Hydrostatic slider; 321. Auxiliary oil chamber; 322. Side oil chamber; 324. Third connecting flow channel; 325. Fourth connecting flow channel; 326. Second throttle; 327. Third throttle; 330. Slider heightening column; 331. Second connecting flow channel. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0029] In the description of the embodiments of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0031] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0032] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0033] like Figures 1 to 3 As shown, the ultra-precision dual-drive high-acceleration hydrostatic guide rail device includes a guide rail base 10, a guide rail assembly 20, and a guide rail motion assembly 30. The guide rail assembly 20 includes at least two guide rails 21 and at least one side guide rail 22. The at least two guide rails 21 are spaced apart on the upper part of the guide rail base 10 along the width direction of the guide rail base 10, and a side guide rail 22 is provided between two adjacent guide rails 21.

[0034] The guide rail motion assembly 30 includes a slide plate 31 and multiple slider components 32. The slide plate 31 is disposed above the guide rail 21, and a support oil cavity 310 is provided at the bottom of the slide plate 31. The support oil cavity 310 is slidably engaged with the top of the corresponding guide rail 21. The slider components 32 are disposed between the corresponding guide rail 21 and the side guide rail 22. The slider components 32 include a hydrostatic slider 320 and a slider raising column 330. The slider raising column 330 is disposed on the top side of the hydrostatic slider 320 away from the guide rail 21 and is connected to the bottom of the slide plate 31. An auxiliary oil cavity 321 is provided on the top side of the hydrostatic slider 320 near the guide rail 21. The auxiliary oil cavity 321 is located on a horizontal plane. The auxiliary oil cavity 321 is slidably engaged with the guide rail 21. The height of the auxiliary oil cavity 321 is less than the height of the support oil cavity 310.

[0035] The ultra-precision dual-drive high-acceleration hydrostatic guide rail device provided by the present invention achieves the upward lifting of the position of the support oil cavity surface by setting the support oil cavity 310 at the bottom of the slide plate 31 and setting the auxiliary oil cavity 321 at the top of the hydrostatic slider 320 near the guide rail 21. Since the hydrostatic slider 320 and the slider raising column 330 are located below the support oil cavity surface, the overall center of gravity of the guide rail motion assembly 30 is lowered and coplanar with the support oil cavity surface, thereby reducing the influence of the overturning moment on the thickness of the support oil film and improving the precision of the hydrostatic guide rail device.

[0036] In one embodiment of the present invention, such as Figure 1 and Figure 2 As shown, the guide rail base 10 has a rectangular plate structure and is used to provide a mounting base for the guide rail assembly 20. The guide rail assembly 20 includes two guide rails 21, which are located between two linear motors 51. The two guide rails 21 are arranged in parallel and extend along the length of the guide rail base 10. The guide rails 21 are connected to the guide rail base 10 by bolts.

[0037] It should be noted here that the length direction of the guide rail base 10 is... Figure 1 The direction indicated by the middle arrow X is the width direction of the guide rail base 10. Figure 1 The direction indicated by the middle arrow Y.

[0038] In one embodiment of the present invention, a side oil cavity 322 is provided on the side of the hydrostatic slider 320 facing the side guide rail 22. The side oil cavity surface where the side oil cavity 322 is located is perpendicular to the auxiliary oil cavity surface where the auxiliary oil cavity 321 is located, and the side oil cavity 322 slides in fit with the side guide rail 22. The side oil cavity surface where the side oil cavity 322 is located is a vertical plane, and the side oil cavity surface is perpendicular to the supporting oil film surface where the supporting oil film thickness is located. By arranging the auxiliary oil cavity surface and the side oil cavity surface in opposite directions to the direction of the lubricating oil pressure torque, the torques received after the lubricating oil is introduced cancel each other out, reducing the amount of deformation. At the same time, this arrangement also shortens the width of the side guide rail 22, reducing the processing difficulty.

[0039] In one embodiment of the present invention, such as Figure 2 As shown, the lower surface of the slide plate 31 is provided with two sets of supporting oil chambers 310. Each set has two supporting oil chambers 310. One set of supporting oil chambers 310 is located above the left guide rail 22, and the other set of supporting oil chambers 310 is located above the right guide rail 22. The supporting oil chambers 310 in the same set are arranged at intervals along the length of the guide rail 21, and the size of each supporting oil chamber 310 is equal.

[0040] In one embodiment of the present invention, such as Figure 1As shown, the guide rail 21 includes a bottom guide rail 210 and a top guide rail 211. The bottom guide rail 210 is disposed on the guide rail base 10, and the top guide rail 211 is disposed on the upper part of the bottom guide rail 210. The bottom guide rail 210 and the top guide rail 211 are connected by bolts. This split design effectively reduces the processing difficulty of the guide rail 21. Of course, the connection method of the bottom guide rail 210 and the top guide rail 211 is not limited to this; they can also be integrally formed or other connection methods. The position of the top guide rail 211 corresponds to the position of the supporting oil cavity 310, and the top of the top guide rail 211 slides in conjunction with the supporting oil cavity 310. The width of the top guide rail 211 is greater than the width of the bottom guide rail 210, so that the bottom of the top guide rail 211 protrudes relative to the bottom guide rail 210. A contact surface is formed at the bottom of the top guide rail 211 that slides with the auxiliary oil cavity 321. The width of the contact surface is greater than the width of the auxiliary oil cavity 321. The contact surface slides with the auxiliary oil cavity 321, thereby achieving the sliding engagement between the bottom of the top guide rail 211 and the auxiliary oil cavity 321.

[0041] In one embodiment of the present invention, such as Figure 4 As shown, the guide rail motion assembly 30 includes four slider components 32, which are arranged symmetrically in pairs about the side guide rail 22. Two slider components 32 are positioned between one guide rail 21 and the side guide rail 22, and are on the same straight line. The remaining two slider components 32 are positioned between another guide rail 21 and the side guide rail 22. The two slider components 32 on the same side of the side guide rail 22 are spaced apart along the length of the guide rail 21. Each hydrostatic slider 320 has an auxiliary oil chamber 321 on the top side near the guide rail 21, and a side oil chamber 322 on the side of each hydrostatic slider 320 facing the side guide rail 22.

[0042] In one embodiment of the present invention, the ultra-precision dual-drive high-acceleration hydrostatic guide rail device further includes a position measuring component 40. The position measuring component 40 is disposed between the two guide rails 21 and connected to the side guide rail 22 and the slide 31. The position measuring component 40 is used to detect the position of the slide 31. By detecting the position of the slide 31 through the position measuring component 40, the position information of the slide 31 on the guide rail 21 can be obtained in real time and accurately, providing reliable position feedback for high-precision machining of the machine tool, thereby realizing precise control of the machining process and further improving machining accuracy.

[0043] Furthermore, the position measuring component 40 is equidistant from the middle of the two guide rails 21, that is, the position measuring component 40 is located on the center line of the two guide rails 21 and on the motion axis of the guide rail 21. This can reduce the Abbe error of the guide rail 21 components.

[0044] In one embodiment of the present invention, such as Figure 3As shown, the position measurement component 40 includes a grating ruler mounting block 41, a grating ruler 42, and a reading head 43. The grating ruler mounting block 41 is disposed on the upper part of the side guide rail 22 and extends along the length direction of the guide rail 21. The grating ruler mounting block 41 and the side guide rail 22 are connected by bolts. Of course, the connection method between the grating ruler mounting block 41 and the side guide rail 22 is not limited to this; the grating ruler mounting block 41 and the side guide rail 22 can also be integrally formed or connected in other ways. The grating ruler 42 is disposed on one side of the grating ruler mounting block 41 and is fixed to the grating ruler mounting block 41 by screws. The grating ruler 42 extends along the length direction of the guide rail 21. The reading head 43 is connected to the slide 31 and is located on the side of the grating ruler 42 opposite to the grating ruler mounting block 41. The reading head 43 is used to read the scale on the grating ruler 42 to determine the position of the slide 31. Furthermore, for ease of installation, the reading head 43 is connected to the end of the slide 31 via the reading head mounting bracket 44.

[0045] When the drive assembly 50 drives the slide 31 to move along the length of the guide rail 21, the slide 31 drives the reading head 43 to move. The reading head 43 determines the position of the slide 31 by reading the scale on the grating ruler 42. The grating ruler 42, as a high-precision measuring element, provides extremely high measurement resolution, thus ensuring accurate measurement of the slide 31's position. The connection between the reading head 43 and the slide 31 ensures that the reading head 43 moves synchronously with the slide 31, thereby reading the scale on the grating ruler 42 in real time, further improving the accuracy and reliability of position measurement. This precise position measurement effectively reduces positional errors during processing, improves processing accuracy and quality, and meets the requirements of ultra-precision machining.

[0046] In one embodiment of the present invention, such as Figure 1 As shown, the ultra-precision dual-drive high-acceleration hydrostatic guide rail device also includes a drive assembly 50, which is connected to the guide rail base 10 and the slide 31. The drive assembly 50 is used to drive the slide 31 to move along the length direction of the guide rail 21.

[0047] In one embodiment of the present invention, such as Figure 1 As shown, the drive assembly 50 includes two linear motors 51, which are symmetrically arranged on both sides of the guide rail base 10. The two linear motors 51 are of the same model. The stators of the linear motors 51 are connected to the guide rail base 10 by screws, and the movers of the linear motors 51 are connected to the slide plate 31 by screws. The symmetrical arrangement of the two linear motors 51 provides a stable driving force, ensuring the smooth movement of the slide plate 31 on the guide rail 21, thereby improving the stability and reliability of the machining process.

[0048] Preferably, the connection between the two linear motors 51 passes through the center of gravity of the guide rail motion assembly 30. This arrangement conforms to the principle of center-of-gravity drive, achieving better dynamic performance and ensuring the stability of the hydrostatic guide rail 21's accuracy under high acceleration conditions. This layout ensures that the driving force acts directly on the center of gravity of the guide rail motion assembly 30, thereby reducing vibration and swaying caused by torque imbalance and improving the system's response speed and control accuracy. During high-acceleration motion, this design effectively reduces errors caused by inertial forces, ensuring the precise movement of the guide rail motion assembly 30, and thus improving machining accuracy and efficiency. Furthermore, center-of-gravity drive reduces energy loss, improves system energy efficiency, and enables excellent performance during long-term operation, meeting the requirements of ultra-precision machine tools for high-efficiency and high-precision machining.

[0049] In one embodiment of the present invention, the slide 31 has a flow channel inside, which communicates with the auxiliary oil chamber 321, the support oil chamber 310, and the side oil chamber 322. The flow channel is used to deliver lubricating oil to the auxiliary oil chamber 321, the support oil chamber 310, and the side oil chamber 322.

[0050] Specifically, such as Figures 5 to 9 As shown, the flow channel includes two first main flow channels 311, four first branch flow channels 312, and four first connecting flow channels 313. The two first main flow channels 311 are arranged at intervals along the width direction of the guide rail base 10 and extend along the length direction of the guide rail base 10. Two first throttles 314 are provided at one end of the slide plate 31 and two first throttles 314 are provided at the other end of the slide plate 31. The outlet of each first throttle 314 is connected to the inlet of the corresponding supporting oil chamber 310. Two oil inlet pipes 315 are provided at the end of the slide plate 31. Two first main channels 311 are connected to the two oil inlet pipes 315 in a one-to-one correspondence. Four first branch channels 312 are arranged inside the slide plate 31 along the width direction of the guide rail base 10. One end of two first branch channels 312 is connected to both ends of one first main channel 311 in a one-to-one correspondence. One end of the remaining two first branch channels 312 is connected to both ends of another first main channel 311 in a one-to-one correspondence. The other end of the four first branch channels 312 is connected to the liquid inlet of four first throttles 314. Four first connecting channels 313 are arranged inside the slide plate 31 along the width direction of the guide rail base 10. One end of two first connecting channels 313 is connected to both ends of a first main channel 311, and one end of the remaining two first connecting channels 313 is connected to both ends of another first main channel 311. The first connecting channels 313 are used to transport the lubricating oil in the first main channel 311 to the corresponding support oil chamber 310 and side oil chamber 322.

[0051] like Figures 10 to 11As shown, each slider heightening column 330 has a second connecting flow channel 331 inside. The second connecting flow channel 331 is vertically arranged, that is, it extends along the height direction of the slider heightening column 330. The upper end of the second connecting flow channel 331 is connected to the other end of the corresponding first connecting flow channel 313. Each hydrostatic slider 320 has a second main flow channel 323, a third connecting flow channel 324, and a fourth connecting flow channel 325 inside. The second main flow channel 323 extends along the length direction of the hydrostatic slider 320. The lower end of the second connecting flow channel 331 is connected to the second main flow channel 323. Each hydrostatic slider 320 has a second throttle 326 at one end. The inlet of the second throttle 326 is connected to one end of the second main flow channel 323, and the outlet of the second throttle 326 is connected to the inlet of the auxiliary oil chamber 321 through the third connecting flow channel 324. Each hydrostatic slider 320 is provided with a third throttle 327 at the other end. The inlet of the third throttle 327 is connected to the other end of the second main channel 323, and the outlet of the third throttle 327 is connected to the inlet of the side oil chamber 322 through the fourth connecting channel 325.

[0052] When the hydrostatic guide rail device is working, the lubricating oil first enters the corresponding first main channel 311 through the oil inlet pipe 315. Part of the lubricating oil enters the corresponding first throttle 314 through the first branch channel 312, and then enters the corresponding support oil chamber 310. Another part of the lubricating oil enters the second connecting channel 331, and then enters the second main channel 323 through the second connecting channel 331. Part of the lubricating oil in the second main channel 323 enters the third connecting channel 324 through the second throttle 326, and then enters the auxiliary oil chamber 321 through the third connecting channel 324. Another part of the lubricating oil in the second main channel 323 enters the fourth connecting channel 325 through the third throttle 327, and then enters the side oil chamber 322 through the fourth connecting channel 325.

[0053] Furthermore, the upper surface of the guide rail base 10 is provided with a guide groove, and the lubricating oil flowing out of the auxiliary oil chamber 321, the support oil chamber 310 and the side oil chamber 322 flows into the guide groove and is discharged through the guide groove.

[0054] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A high-precision dual-drive high-acceleration hydrostatic guide rail device, characterized in that, include: Guide rail base (10); The guide rail assembly (20) includes at least two guide rails (21) and at least one side guide rail (22). The at least two guide rails (21) are spaced apart on the upper part of the guide rail base (10) along the width direction of the guide rail base (10), and a side guide rail (22) is provided between two adjacent guide rails (21). The guide rail motion assembly (30) includes a slide plate (31) and multiple slider components (32). The slide plate (31) is disposed above the guide rail (21), and a supporting oil cavity (310) is provided at the bottom of the slide plate (31). The supporting oil cavity (310) slides in cooperation with the top of the corresponding guide rail (21). The slider components (32) are disposed between the corresponding guide rail (21) and the side guide rail (22). The slider component (32) includes a hydrostatic slider (320) and a slider raising column (330). The slider raising column (330) is disposed at the top of the hydrostatic slider (320) away from the guide rail (21). The liquid hydrostatic slider (320) is located on one side and connected to the bottom of the slide plate (31). An auxiliary oil cavity (321) is provided on the top side of the liquid hydrostatic slider (320) near the guide rail (21). The auxiliary oil cavity (321) is slidably engaged with the guide rail (21). The height of the auxiliary oil cavity (321) is less than the height of the support oil cavity (310). A side oil cavity (322) is provided on the side of the liquid hydrostatic slider (320) facing the side guide rail (22). The side oil cavity surface where the side oil cavity (322) is located is perpendicular to the auxiliary oil cavity surface where the auxiliary oil cavity (321) is located. The side oil cavity (322) is slidably engaged with the side guide rail (22). A position measuring component (40) is disposed on the center line of the two guide rails (21). The position measuring component (40) is connected to the side guide rail (22) and the slide (31). The position measuring component (40) is used to detect the position of the slide (31).

2. The ultra-precision dual-drive high-acceleration hydrostatic guide rail device according to claim 1, characterized in that, The guide rail assembly (20) includes two guide rails (21) that are parallel to each other.

3. The ultra-precision dual-drive high-acceleration hydrostatic guide rail device according to claim 2, characterized in that, The guide rail (21) includes: Bottom guide rail (210), the bottom guide rail (210) is disposed on the guide rail base (10); A top guide rail (211) is disposed above the bottom guide rail (210). The width of the top guide rail (211) is greater than the width of the bottom guide rail (210). The top of the top guide rail (211) is slidably engaged with the supporting oil cavity (310), and the bottom of the top guide rail (211) is slidably engaged with the auxiliary oil cavity (321).

4. The ultra-precision dual-drive high-acceleration hydrostatic guide rail device according to any one of claims 1 to 3, characterized in that, The guide rail assembly (20) includes two guide rails (21) arranged in parallel and extending along the length of the guide rail base (10).

5. The ultra-precision dual-drive high-acceleration hydrostatic guide rail device according to claim 4, characterized in that, The guide rail motion assembly (30) includes four slider components (32), two slider components (32) are disposed between one guide rail (21) and the side guide rail (22), and the remaining two slider components (32) are disposed between another guide rail (21) and the side guide rail (22). The two slider components (32) on the same side of the side guide rail (22) are arranged at intervals along the length direction of the guide rail (21).

6. The ultra-precision dual-drive high-acceleration hydrostatic guide rail device according to claim 5, characterized in that, The four slider components (32) are arranged symmetrically in pairs about the side guide rail (22).

7. The ultra-precision dual-drive high-acceleration hydrostatic guide rail device according to claim 6, characterized in that, The position measurement component (40) includes: A grating ruler mounting block (41) is disposed on the upper part of the side guide rail (22); A grating ruler (42) is disposed on one side of the grating ruler mounting block (41); The reading head (43) is connected to the slide (31). The reading head (43) is located on the side of the grating ruler (42) away from the grating ruler mounting block (41). The reading head (43) is used to read the scale on the grating ruler (42) to determine the position of the slide (31).

8. The ultra-precision dual-drive high-acceleration hydrostatic guide rail device according to claim 6, characterized in that, Also includes: A drive assembly (50) is connected to the guide rail base (10) and the slide (31). The drive assembly (50) is used to drive the slide (31) to move along the length direction of the guide rail (21).

9. The ultra-precision dual-drive high-acceleration hydrostatic guide rail device according to claim 8, characterized in that, The drive component (50) includes: Two linear motors (51) are symmetrically arranged on both sides of the guide rail base (10). The stator of the linear motor (51) is connected to the guide rail base (10), and the mover of the linear motor (51) is connected to the slide plate (31).

10. The ultra-precision dual-drive high-acceleration hydrostatic guide rail device according to claim 2 or 3, characterized in that, The slide (31) has a flow channel inside, which is connected to the auxiliary oil chamber (321), the support oil chamber (310) and the side oil chamber (322).

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