Optical measuring devices, optical measuring systems and optical measuring methods

Abstract

This invention provides an optical measurement device, optical measurement system, and optical measurement method, comprising: a first optical path control module, a second optical path control module, an optical path transmission module, an optical measurement module, and an optical imaging module. First, the optical imaging module reaches the measurement point via the second optical path control module. The imaging light signal reflected from the measurement point passes through the second and first optical path control modules, and then through the optical path transmission module to reach the imaging unit, thereby observing the measurement point on the surface of the object under test. Second, the optical measurement module reaches the measurement point via the first optical path control module. The light signal to be measured reflected from the measurement point passes through the first optical path control module, and then through the optical path transmission module to reach the measurement unit, where the light signal to be measured is measured and analyzed. Therefore, the optical measurement module does not require any additional beam splitters, which not only improves the integration of the optical system but also ensures the accuracy of the measurement.

Description

Technical Field

[0001] This invention relates to the field of optical measurement, and in particular to an optical measurement device, an optical measurement system, and an optical measurement method. Background Technology

[0002] With the development of semiconductor integrated circuits, there is an urgent need for optical measurement devices to ensure the stability of manufacturing processes and guarantee product quality. Existing semiconductor optical measurement equipment suffers from drawbacks such as narrow wavelength range and frequent switching of optical components during measurement. For highly integrated semiconductor optical measurement equipment, issues arise such as low energy and continuous decay of ultraviolet energy over time. These problems not only reduce measurement efficiency but also significantly impact measurement accuracy, and some devices cannot provide real-time monitoring of the measurement process.

[0003] In the field of semiconductor metrology, especially semiconductor film thickness measurement, the system's wavelength range and energy level are particularly important. The width of the wavelength range limits the range of semiconductor film thickness that the equipment can accurately measure. Measuring film thicknesses from sub-nanometer to micrometer scale requires the use of light in the ultraviolet to near-infrared bands, and there are certain requirements for the energy level of the required wavelength range during measurement. Therefore, ensuring high overall energy without rapid attenuation is of paramount importance.

[0004] There is an urgent need for a system capable of simultaneous real-time monitoring and optical measurement to measure wafer thin film thickness and other optical parameters. Currently, this technology is largely controlled by a very small number of foreign equipment manufacturers. Research into this semiconductor measurement system will help break the foreign monopoly and is of great significance to the development of my country's semiconductor industry.

[0005] Therefore, how to design an optical measurement device, optical measurement system, and optical measurement method with high measurement accuracy, high efficiency, and strong stability has become one of the technical problems that urgently need to be solved by those skilled in the art.

[0006] It should be noted that the above description of the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of the present invention and facilitating understanding by those skilled in the art. It should not be assumed that the above technical solutions are known to those skilled in the art simply because they have been described in the background section of this invention. Summary of the Invention

[0007] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide an optical measurement device, an optical measurement system, and an optical measurement method to solve the problems of low measurement accuracy and poor stability in the existing film thickness measurement system.

[0008] To achieve the above and other related objectives, the present invention provides an optical measurement device, comprising at least: a first optical path control module, a second optical path control module, an optical path transmission module, an optical measurement module, and an optical imaging module; the optical measurement module includes a first light source and a measurement unit; a first light signal emitted by the first light source is transmitted through the first optical path control module and then perpendicularly incident on a measurement point within the measurement area on the surface of the object to be measured, generating a measurement light signal; the measurement light signal is transmitted through the first optical path control module and then split by the optical path transmission module to obtain a first beam splitter, which enters the measurement unit; the optical imaging module includes a second light source, a collimating lens, and an imaging unit; a second light signal emitted by the second light source is collimated by the collimating lens and transmitted through the second optical path control module, then perpendicularly incident on the measurement point to generate an imaging light signal; the imaging light signal is transmitted through the second optical path control module and then sequentially transmitted to the first optical path control module and the optical path transmission module to obtain a second beam splitter, which enters the imaging unit.

[0009] Optionally, the first optical path control module includes a first beam splitter and a first objective lens; the first optical signal is reflected by the first beam splitter and focused by the first objective lens onto the measurement point; the optical signal to be measured is transmitted through the first objective lens and then transmitted through the first beam splitter into the optical path transmission module; the imaging optical signal is transmitted through the second optical path control module and then reflected by the first beam splitter into the optical path transmission module.

[0010] Optionally, the second optical path control module includes a second beam splitter and a second objective lens; the second optical signal is transmitted through the second beam splitter and focused onto the measurement point by the second objective lens; the imaging optical signal is transmitted through the second objective lens, reflected by the second beam splitter, and then transmitted to the optical path transmission module and the imaging unit by the first optical path control module.

[0011] Optionally, the optical path transmission module includes a third beam splitter and a first telescope; the light signal to be measured is transmitted through the first telescope and transmitted through the third beam splitter to obtain the first beam splitter, and the imaging light signal is transmitted through the first telescope and reflected through the third beam splitter to obtain the second beam splitter; or, the light signal to be measured is transmitted through the first telescope and reflected through the third beam splitter to obtain the first beam splitter, and the imaging light signal is transmitted through the first telescope and transmitted through the third beam splitter to obtain the second beam splitter.

[0012] Alternatively, when the first beam is obtained by transmission through the third beam splitter, the transmittance of the third beam splitter is 60%-80%; when the first beam is obtained by reflection through the third beam splitter, the reflectance of the third beam splitter is 60%-80%.

[0013] Optionally, the optical measurement module further includes a first parabolic mirror, a second parabolic mirror, and a third parabolic mirror; the first optical signal is reflected sequentially by the first parabolic mirror, the second parabolic mirror, and the third parabolic mirror into the first optical path control module.

[0014] Optionally, the optical measuring device further includes an autofocus module and a second beam splitting module; the autofocus module includes a first reflecting mirror, a second reflecting mirror, and a focusing unit, and the second beam splitting module includes a fourth beam splitter; the first optical signal is transmitted to the second optical path control module via the first optical path control module, and then transmitted again via the second optical path control module before being perpendicularly incident on the measurement point to generate a focusing optical signal; the focusing optical signal is transmitted via the second optical path control module, passes through the fourth beam splitter, and then is reflected by the first reflecting mirror and the second reflecting mirror before entering the focusing unit.

[0015] Optionally, the first optical signal is transmitted to the measurement point via the first optical path control module, and the second optical signal is transmitted to the measurement point via the second optical path control module, wherein the optical paths of the first optical signal and the second optical signal are independent of each other.

[0016] To achieve the above and other related objectives, the present invention also provides an optical measurement system, which includes at least: a test object carrier and the optical measurement device; the test object carrier is used to move the test object so that the optical measurement device can measure the test object.

[0017] To achieve the above and other related objectives, the present invention also provides an optical measurement method based on the aforementioned optical measurement device. The optical measurement method includes at least the following steps: S1: Turning on a second light source, a second optical signal is transmitted via a second optical path control module and then incident perpendicularly onto a measurement point within the measurement area on the surface of the object to be measured to obtain an imaging optical signal; the imaging optical signal is transmitted sequentially via the second optical path control module and the first optical path control module, and then reaches an imaging unit via an optical path transmission module, the imaging unit being used to display image data of the measurement point; S2: Turning on a first light source, moving the object to be measured, a first optical signal is transmitted via the first optical path control module and then incident perpendicularly onto the measurement point to obtain a measurement optical signal; the measurement optical signal is transmitted via the first optical path control module and then reaches a measurement unit via the optical path transmission module, the measurement unit being used to measure and analyze the physical characteristics of the measurement point.

[0018] Optionally, before step S2, step S2' is further included: the first optical signal is transmitted sequentially through the first optical path control module and the second optical path control module and then vertically incident on the measurement point to obtain a focusing optical signal; the focusing optical signal is collected and analyzed so that the first optical signal and the second optical signal focus on the measurement point respectively.

[0019] As described above, the optical measurement device, optical measurement system, and optical measurement method of the present invention have the following beneficial effects:

[0020] 1. This invention achieves this by using a first optical path control module to deliver the first optical signal from the optical measurement module to the measurement point, and a second optical signal from the optical imaging module to the measurement point using a second optical path control module, ensuring that the optical paths of the first and second optical signals are completely non-overlapping. Furthermore, by using the first optical path control module and the optical path transmission module to deliver the optical signal to be measured to the measurement unit, and using the first beam splitter and the optical path transmission module of the first optical path control module to deliver the imaging signal to the imaging unit, the optical signal to be measured and the imaging signal overlap only between the first optical path control module and the optical path transmission module. Therefore, this invention does not add unnecessary beam splitters to the optical measurement module, increases the optical path energy in the optical measurement module, improves the system integration of the optical measurement device, and simultaneously realizes both the measurement and imaging functions of the optical measurement device.

[0021] 3. The autofocus module of the present invention generates a focusing light signal by means of a first light source, a first beam splitter of a first optical path control module, and a second optical path control module. The focusing light signal enters the focusing unit by means of a second optical path control module and a second beam splitter. Therefore, the addition of the autofocus module does not increase the beam splitter in the optical measurement module. Instead, the autofocus function is achieved by beam splitting the optical imaging module, which is not sensitive to light energy. At the same time, the system integration of the optical measurement device is further improved. Attached Figure Description

[0022] Figure 1 The diagram shown is a structural schematic of the optical measuring device of the present invention.

[0023] Figure 2 The diagram shows a transmission route for the first optical signal of the present invention.

[0024] Figure 3 The diagram shown illustrates a transmission path for the optical signal to be tested according to the present invention.

[0025] Figure 4 The diagram shows a transmission route for the second optical signal of the present invention.

[0026] Figure 5 The diagram shows a transmission path of the imaging optical signal according to the present invention.

[0027] Figure 6 The diagram shown illustrates a transmission path for the focusing optical signal according to the present invention.

[0028] Figure 7 The diagram shown is a structural schematic of the optical measurement system of the present invention.

[0029] Figure 8 The diagram shown is a flowchart of the optical measurement method of the present invention.

[0030] Component designation explanation

[0031] 1 Optical Measurement Module

[0032] 1a First Light Source

[0033] 1b Measurement Unit

[0034] 1c First Parabolic Mirror

[0035] 1d Second Parabolic Mirror

[0036] 1e Third Parabolic Mirror

[0037] 2 Optical Imaging Module

[0038] 2a Second light source

[0039] 2b Collimating lens

[0040] 2c imaging unit

[0041] 3 First optical path control module

[0042] 3a First beam splitter

[0043] 3b First Objective

[0044] 4 Second optical path control module

[0045] 4a Second beam splitter

[0046] 4b Second Objective

[0047] 5 Optical transmission module

[0048] 5a Third beam splitter

[0049] 5b First tube scope

[0050] 6. Autofocus module

[0051] 6a focusing unit

[0052] 6b First reflecting mirror

[0053] 6c Second reflecting mirror

[0054] 7 Second Spectrometer

[0055] 7a Fourth beam splitter Detailed Implementation

[0056] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0057] Please see Figures 1-8 It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0058] Most film thickness measurement systems suffer from the following problems: First, the measurement band is mostly limited to the visible light band. To simultaneously cover the ultraviolet, visible, and infrared bands commonly used in industrial production, different light sources and lenses must be used and switched, significantly reducing measurement efficiency. Second, highly integrated systems typically use numerous beam splitters, leading to a decrease in the energy of the measurement optical path, particularly affecting the relatively low-energy ultraviolet band and greatly impacting measurement accuracy. Third, most film thickness measurement systems require two objectives with different magnifications to observe the object under test, necessitating lens switching during the search for the measurement location, further reducing efficiency. Fourth, most film thickness measurement systems suffer from ultraviolet energy decay over time when connected to the light source and optical path via optical fiber, severely affecting measurement stability. Therefore, to address these problems, this invention provides an optical measurement device and method, the specific technical solution of which is as follows:

[0059] Example 1

[0060] like Figure 1 As shown, this embodiment provides an optical measurement device, including: a first optical path control module 3, a second optical path control module 4, an optical path transmission module 5, an optical measurement module 1, and an optical imaging module 2.

[0061] like Figure 1As shown, the optical measurement module 1 includes a first light source 1a and a measurement unit 1b. The first light signal emitted by the first light source 1a is transmitted through the first optical path control module 3 and then incident vertically onto the measurement point in the measurement area on the surface of the object to be measured to generate a light signal to be measured. The light signal to be measured is transmitted through the first optical path control module 3 and then enters the optical path transmission module 5 to split the light to obtain a first beam. The first beam enters the measurement unit 1b.

[0062] Specifically, in this embodiment, the optical measurement module 1 is used to perpendicularly incident a first light signal onto the test area on the surface of the object to be measured. The first light signal is reflected by the measurement point within the test area to obtain the test light signal. After the test light signal enters the measurement unit 1b, the measurement unit 1b can collect and analyze the test light signal, and calculate the physical characteristic parameters of the object to be measured according to the system algorithm, such as film thickness parameters, critical dimension parameters, and layer alignment parameters. Furthermore, the first optical path control module 3 can control the optical path of the light signal to change or maintain the optical path direction, such as... Figure 1 As shown, the first optical path control module 3 includes a first beam splitter 3a and a first objective lens 3b. As an example of optical signal transmission, such as... Figure 2 As shown, the first optical signal is reflected by the first beam splitter 3a and focused by the first objective lens 3b onto the measurement point within the area to be measured, as follows: Figure 3 As shown, the optical signal to be measured is transmitted through the first objective lens 3b and then transmitted through the first beam splitter 3a into the optical path transmission module 5, as follows: Figure 5 As shown, the imaging light signal is transmitted through the second optical path control module, reflected by the first beam splitter, enters the optical path transmission module, and finally reaches the imaging unit. In practical applications, the transmission path of the light signal in the optical measurement device can be set as needed, and is not limited to this embodiment. As an example, the measurement unit 1b can be a spectrometer, the first beam splitter 3a can be a beam splitter that achieves 1:1 beam splitting, and the first light source 1a can be a broadband light source, such as a xenon lamp, LDLS, or LSP light source. The spectral range of the first light source 1a is 230nm to 900nm, and the spectral range of the first objective lens 3b is also 230nm to 900nm, to avoid switching between multiple light sources to adapt to different spectra, thereby improving measurement efficiency. In practical applications, the specific type of optical device in the optical measurement module 1 can be selected as needed, and is not limited to this embodiment.

[0063] Specifically, in this embodiment, such as Figure 1As shown, the optical measurement module 1 also includes a first parabolic mirror 1c, a second parabolic mirror 1d, and a third parabolic mirror 1e. The first optical signal is reflected sequentially through the first parabolic mirror 1c, the second parabolic mirror 1d, and the third parabolic mirror 1e before entering the first optical path control module 3. The purpose of setting the first parabolic mirror 1c, the second parabolic mirror 1d, and the third parabolic mirror 1e is to collimate the first optical signal and reduce its spot size. As an example, the first parabolic mirror 1c and the second parabolic mirror 1d are broadband parabolic mirrors. By selecting different combinations of the focal lengths of the first parabolic mirror 1c and the second parabolic mirror 1d, the spot size when the first optical signal is focused on the measurement point can be adjusted to meet the measurement requirements of different measurement areas. Furthermore, by connecting the first light source 1a and the first parabolic mirror 1c with a high-temperature resistant and ultraviolet radiation resistant optical fiber, the attenuation of the optical signal in the ultraviolet band can be reduced, thereby improving the stability of the measurement results. Additionally, a window is installed at the optical fiber interface of the first light source 1a to prevent contamination of the optical fiber splice. In practical applications, the optical devices in the optical measurement module 1 may be configured as needed, and are not limited to this embodiment.

[0064] like Figure 1 As shown, the optical imaging module 2 includes a second light source 2a, a collimating lens 2b, and an imaging unit 2c. The second light signal emitted by the second light source 2a is collimated by the collimating lens 2b and transmitted through the second optical path control module 4 before being vertically incident on the measurement point in the area to be measured to generate an imaging light signal. The imaging light signal is transmitted through the second optical path control module 4 and then sequentially transmitted to the first optical path control module 3 and the optical path transmission module 5 to obtain a second beam splitter, which enters the imaging unit 2c.

[0065] Specifically, in this embodiment, the optical imaging module 2 collects and analyzes the second beam to observe the measurement point on the surface of the object under test. It should be understood that the light signals from both the optical imaging module 2 and the optical measurement module 1 are transmitted to the same measurement point within the measurement area on the surface of the object under test, thus achieving the measurement and observation of the same measurement point on the surface of the object under test in the measurement task. Further, the second optical path control module 4 controls the optical path of the light signal to change or maintain the direction of the optical path, such as... Figure 1 As shown, the second optical path control module 4 includes a second beam splitter 4a and a second objective lens 4b. As an example of optical signal transmission, such as... Figure 4 As shown, the second optical signal is transmitted through the second beam splitter 4a and focused by the second objective lens 4b onto the measurement point within the area to be measured, as follows. Figure 5As shown, the imaging light signal is transmitted through the second objective lens 4b, reflected by the second beam splitter 4a, and then transmitted through the first optical path control module 3 to the optical path transmission module 5, finally reaching the imaging unit. The second objective lens 4b is a high-magnification, large-field-of-view objective lens; for example, it could be a 20x magnification objective lens with a 1.2mm field of view, supporting various observation needs. Compared to the traditional method of combining low- and high-magnification dual objectives to observe measurement points, the second objective lens 4b avoids switching between different magnification objectives during imaging, meaning that objective lens switching is unnecessary during imaging at the current measurement point, thus improving measurement efficiency. In practical applications, the transmission path of the light signal in the optical measurement device can be set as needed, and is not limited to this embodiment. As an example of a specific optical device, the second light source 2a transmits the second optical signal to the collimating lens 2b through an optical fiber. The numerical aperture of the collimating lens 2b needs to be larger than the numerical aperture of the optical fiber to ensure the transmission of the second optical signal. When the spectral range of the first light source 1a is 230nm to 900nm, the spectral range of the second light source 2a can be selected from 450nm to 850nm to meet the requirements of optical imaging. The second beam splitter 4a is a beam splitter that achieves 1:1 beam splitting. The imaging unit 2c is a camera. In practical applications, the specific type of optical device in the optical imaging module 2 can be selected as needed, and is not limited to this embodiment.

[0066] Specifically, in this embodiment, the optical path transmission module 5 includes a third beam splitter 5a and a first tube mirror 5b. The optical path transmission module 5 transmits the light signal to be measured to the measurement unit 1b and transmits the imaging light signal to the imaging unit 2c. Figure 1As shown, the light signal to be measured is transmitted by the first optical path control module 3, then transmitted by the first tube lens 5b and transmitted by the third beam splitter 5a to obtain the first beam splitter. The imaging light signal is transmitted sequentially by the second optical path control module 4 and the first optical path control module 3, then transmitted by the first tube lens 5b and reflected by the third beam splitter 5a to obtain the second beam splitter. Alternatively, the light signal to be measured is transmitted by the first optical path control module 3, then transmitted by the first tube lens 5b and reflected by the third beam splitter 5a to obtain the first beam splitter. The imaging light signal is transmitted sequentially by the second optical path control module 4 and the first optical path control module 3, then transmitted by the first tube lens 5b and transmitted by the third beam splitter 5a to obtain the second beam splitter. The third beam splitter 5a is positioned in front of the focal point of the first tube lens 5b, which avoids the problems of adding a relay lens and space limitations. Furthermore, when the first beam reaching the measurement unit is obtained by transmission through the third beam splitter 5a, the transmittance of the third beam splitter 5a is 60%-80%, including but not limited to 65%, 70%, and 75%, to improve the measurement unit's energy utilization efficiency; when the first beam reaching the measurement unit is obtained by reflection through the third beam splitter 5a, the reflectance of the third beam splitter 5a is 60%-80%, including but not limited to 65%, 70%, and 75%, also to improve the measurement unit's energy utilization efficiency.

[0067] Furthermore, the first tube lens 5b needs to be a low-magnification lens to meet the requirements of the optical imaging module 2. The first beam splitter is transmitted to the measurement unit 1b via optical fiber, and the first beam splitter is obtained by the light signal to be measured passing through the beam splitter only once after being transmitted through the first optical path control module 3. That is, the light signal to be measured transmitted through the first optical path control module 3 can reach the measurement unit 1b after being transmitted or reflected only by the third beam splitter 5a. The attenuation of the first beam splitter is reduced, thereby improving the stability of the measurement results. As an example, when the spectral range of the first light source 1a is 230nm to 900nm, the spectral range of the first tube lens 5b is also 230nm to 900nm to meet the requirements of multispectral imaging. In practical applications, the optical devices set in the optical path transmission module 5 can be selected as needed, and are not limited to this embodiment.

[0068] like Figure 1As shown, the optical measurement device also includes an autofocus module 6 and a second beam splitting module 7. The autofocus module 6 includes a first reflecting mirror 6b, a second reflecting mirror 6c, and a focusing unit 6a. The second beam splitting module includes a fourth beam splitter 7a. The first optical signal is transmitted from the first optical path control module 3 to the second optical path control module 4, and then transmitted through the second optical path control module 4 before being vertically incident on the measurement point in the area to be measured to generate a focusing optical signal. The focusing optical signal is transmitted from the second optical path control module 4, passes through the fourth beam splitter 7a, and then is reflected by the first reflecting mirror 6b and the second reflecting mirror 6c before entering the focusing unit 6a. The focusing unit 6a can be used to collect and analyze the focusing optical signal. As an example, the focusing unit 6a can be a multi-quadrant detector.

[0069] Specifically, in this embodiment, the function of the autofocus module 6 is to focus on the measurement points on the surface of the object to be measured; wherein, the autofocus module 6 and the optical measurement module 1 share the first light source 1a, because the energy of the first light source 1a is higher than that of the second light source 2a, which can meet the focusing requirements. Furthermore, when the first optical path control module 3 includes a first beam splitter 3a and a first objective lens 3b, and the second optical path control module 4 includes a second beam splitter 4a and a second objective lens 4b, the focusing unit 6a can adjust the distance between the object under test and the first objective lens 3b and the second objective lens 4b by analyzing the focusing light signal, so that the measurement point can be located at the focal plane of the first objective lens 3a, and the focal plane of the first objective lens 3a is at the same position as the focal plane of the second objective lens 4b, so as to achieve fast focusing; since the first objective lens 3b and the second objective lens 4b share a common focal plane, in the direction perpendicular to the focal plane of the two objective lenses, by carrying and moving the object under test through the object under test carrying device, the first light signal can be focused on the surface of the object under test through the first objective lens, and the second light signal can also be focused on the surface of the object under test through the second objective lens. Furthermore, the purpose of using the first reflecting mirror 6b and the second reflecting mirror 6c is to converge the focusing light signal into a light spot on the focusing unit after passing through the first reflecting mirror 6b and the second reflecting mirror 6c; as an example, the second reflecting mirror 6c can be a cylindrical reflecting mirror. Furthermore, the second beam splitting module 7 includes a fourth beam splitter 7a: as shown... Figure 1 As shown, the second light signal is transmitted through the fourth beam splitter 7a, and then transmitted through the second optical path control module 4 to generate a focusing light signal. After being transmitted by the second optical path control module 4, the focusing light signal is reflected by the fourth beam splitter 7a and enters the focusing unit 6a; or, the second light signal is reflected by the fourth beam splitter 7a, and then transmitted through the second optical path control module 4 to generate a focusing light signal. After being transmitted by the second optical path control module 4, the focusing light signal is transmitted through the fourth beam splitter 7a and enters the focusing unit 6a.

[0070] It should be noted that, through the optical system design of this invention, on the one hand, the first optical signal of the optical measurement module 1 is transmitted to the measurement point by the first optical path control module 3, and the second optical signal of the optical imaging module 2 is transmitted to the measurement point by the second optical path control module 4. That is, the incident optical paths of the first and second optical signals to the object under test are independent, do not overlap, and do not interfere with each other, and do not share optical components. On the other hand, the optical signal to be measured enters the measurement unit through the first optical path control module and the optical path transmission module, and the imaging optical signal enters the imaging unit through the first beam splitter of the first optical path control module 3 and the optical path transmission module 4. Therefore, the optical measurement device utilizes the completely non-overlapping first and second optical signals, reducing the use of beam splitters, and improves the integration of the optical system by allowing the optical signal to be measured and the imaging optical signal to share the first beam splitter, the first tube mirror, and the third reflecting mirror, while ensuring the realization of the measurement and imaging functions of the optical measurement device. Furthermore, when the first optical path control module 3 includes a first beam splitter 3a and a first objective lens 3b, and the second optical path control module 4 includes a second beam splitter 4a and a second objective lens 4b, the first objective lens 3b satisfies the requirements of the optical measurement module 1, and the second objective lens 4b only needs to satisfy the requirements of the optical imaging module 2. In particular, the first objective lens 3a does not need to reduce the measurement quality (e.g., the numerical aperture requirement of the measurement log) to meet imaging requirements (e.g., the field of view requirement of imaging). Furthermore, the autofocus module 6 generates a focusing light signal by means of the first light source 1a, the first beam splitter of the first optical path control module 3, and the second optical path control module. On the other hand, the autofocus module shares the second optical path control module 4 and the second beam splitter 7 with the optical imaging module. Therefore, the addition of the autofocus module 6 does not increase the number of beam splitters in the optical measurement device, but rather achieves the autofocus function by means of the optical imaging module, which is not sensitive to light signal energy, while further improving the system integration of the optical measurement device.

[0071] Example 2

[0072] like Figure 7 As shown, this embodiment provides an optical measurement system, including: a test object carrier and an optical measurement device. The test object carrier can move the test object so that the optical measurement device can measure the test object.

[0073] Specifically, in this embodiment, the object-under-test (AUT) carrier is used to move the AUT in a direction parallel to the focal plane of the objective lens. This ensures that when the first optical signal from the optical measurement module 1 and the second optical signal from the optical imaging module 2 are incident on the same measurement point on the AUT surface, it should be understood that when the optical measurement module 1 and the optical imaging module 2 are measuring and imaging the measurement point on the AUT surface, the AUT carrier does not move in a direction perpendicular to the focal plane of the objective lens, thus improving measurement stability. Furthermore, the AUT carrier can also adjust the height of the AUT in a direction perpendicular to the focal planes of the first / second objective lenses. That is, based on the results obtained after analyzing the focusing signals collected by the focusing unit, the relative distance between the AUT and the two objective lenses is adjusted so that the AUT can be focused on both objective lens focal planes. In practical applications, the specific type of AUT carrier can be selected as needed, and no specific restrictions are imposed here.

[0074] Example 3

[0075] like Figure 8 As shown, this embodiment provides an optical measurement method, the steps of which include:

[0076] like Figure 8 As shown, in step S1, the second light source 2a is turned on, so that the second light signal is transmitted by the second light path control module 4 and then transmitted to the measurement point in the measurement area on the surface of the object to be measured to obtain the imaging light signal; the imaging light signal is transmitted sequentially by the second light path control module 4 and the first light path control module 3, and then passes through the light path transmission module 5 and reaches the imaging unit 2c. The imaging unit 2c is used to display the image data of the measurement point.

[0077] Specifically, in this embodiment, the second optical signal is transmitted to the measurement point in the measurement area on the surface of the object to be measured via the second optical path control module 4. The measurement point reflects the second optical signal to generate an imaging optical signal. The imaging optical signal is transmitted sequentially via the second optical path control module 4 and the first optical path control module 3, and then via the optical path transmission module 5 to the imaging unit 2c. The imaging unit 2c completes the imaging of the imaging optical signal, so that the operator can observe the measurement point.

[0078] like Figure 8 As shown, in step S2, the first light source 1a is turned on, and the object to be tested is moved so that the first optical signal is transmitted by the first optical path control module 3 to the measurement point to obtain the optical signal to be tested. After being transmitted by the first optical path control module 3, the optical signal to be tested passes through the optical path transmission module 5 and reaches the measurement unit 1b. The measurement unit 1b is used to measure and analyze the physical characteristics of the measurement point. Based on the aforementioned embodiment, the energy ratio of the optical signal to be tested reaching the measurement unit 1b after passing through the first beam splitter 5a in the optical path transmission module 5 is higher than the energy ratio of the imaging optical signal entering the imaging unit 2c.

[0079] Specifically, in this embodiment, after the object under test is moved in a direction parallel to the focal plane of the objective lens, the first optical signal is transmitted through the first optical path control module 3 to the measurement point in the measurement area on the surface of the object under test, and then reflected to generate the measured optical signal. The measured optical signal is transmitted through the first optical path control module 3, and then through the optical path transmission module 5 to the measurement unit 1b. The measurement unit 1b is used to measure and analyze the physical properties of the object under test. Furthermore, by moving the object under test in a direction parallel to the focal plane of the objective lens, the first optical signal in step S2 can be transmitted through the first optical path control module 3 and the second optical signal in step S1 can be transmitted through the second optical path control module 4 to the same measurement point on the surface of the object under test, ensuring that the measured optical signal and the imaging optical signal collect information from the same point on the surface of the object under test, thus guaranteeing the accuracy of the measurement.

[0080] Specifically, in this embodiment, before step S2, step S2' is included. The first signal light is transmitted via the first optical path control module 3 to the second optical path control module 4, and then to the measurement point to obtain a focusing light signal. The focusing light signal is collected and analyzed, and the relative position between the object under test and the objective lens in the direction perpendicular to the objective lens focal plane is adjusted so that the object under test is positioned on the objective lens focal plane, thus completing the focusing. This allows both the imaging module and the measurement module to complete their tasks while the objective lens is focused, ensuring the accuracy of the measurement results. It is understood that when the first optical path control module 3 includes a first beam splitter 3a and a first objective lens 3b, and the second optical path control module 4 includes a second beam splitter 4a and a second objective lens 4b, the object under test can be moved via the object-bearing device so that the object is positioned on the confocal plane of the first objective lens 3b and the second objective lens 4b, ensuring the accuracy of the measurement results.

[0081] It should be noted that the optical measurement method of this embodiment can be implemented based on the optical measurement device of Embodiment 1 or the optical measurement system of Embodiment 2, or it can be implemented based on other optical measurement devices or other optical measurement systems, and no specific limitations are made here.

[0082] In summary, the optical measurement device, optical measurement system, and optical measurement method of the present invention include: a first optical path control module, a second optical path control module, an optical path transmission module, an optical measurement module, and an optical imaging module. First, the optical imaging module reaches the measurement point via the optical path transmission of the second optical path control module. The imaging light signal reflected from the measurement point is transmitted sequentially through the second and first optical path control modules, and then reaches the imaging unit via the optical path transmission module to observe the measurement point on the surface of the object under test. Second, the optical measurement module reaches the measurement point via the first optical path control module. The light signal to be measured reflected from the measurement point is transmitted by the first optical path control module, and then reaches the measurement unit via the optical path transmission module to measure and analyze the light signal to be measured. Therefore, the second light signal does not need to be split and transmitted using the optical path of the first light signal, and the optical paths of the light signal to be measured and the imaging light signal only overlap between the first optical path control module and the optical path transmission module. The optical measurement module does not need to add any unnecessary beam splitting devices, which not only improves the integration of the optical system but also reduces the number of beam splitting devices used in the optical measurement device, ensuring measurement accuracy. Therefore, this invention effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0083] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. An optical measuring device, characterized in that, The optical measurement device includes at least: a first optical path control module, a second optical path control module, an optical path transmission module, an optical measurement module, and an optical imaging module; The optical measurement module includes a first light source and a measurement unit; the first light signal emitted by the first light source is transmitted through the first optical path control module and then incident perpendicularly on the measurement point in the measurement area on the surface of the object to be measured to generate a light signal to be measured; the light signal to be measured is transmitted through the first optical path control module and then split into a first beam by the optical path transmission module to obtain a first beam, and the first beam enters the measurement unit. The optical imaging module includes a second light source, a collimating lens, and an imaging unit; the second light signal emitted by the second light source is collimated by the collimating lens and transmitted through the second optical path control module before being perpendicularly incident on the measurement point to generate an imaging light signal; the imaging light signal is transmitted through the second optical path control module and then sequentially transmitted to the first optical path control module and the optical path transmission module to obtain a second beam splitter, and the second beam splitter enters the imaging unit. Wherein, the optical paths of the first optical signal and the second optical signal do not overlap at all; the optical paths of the optical signal to be tested and the imaging optical signal overlap between the first optical path control module and the optical path transmission module.

2. The optical measuring device according to claim 1, characterized in that: The first optical path control module includes a first beam splitter and a first objective lens; The first optical signal is reflected by the first beam splitter and focused onto the measurement point by the first objective lens; The optical signal to be measured is transmitted through the first objective lens and then transmitted through the first beam splitter into the optical path transmission module. The imaging light signal is transmitted through the second optical path control module and then reflected by the first beam splitter into the optical path transmission module.

3. The optical measuring device according to claim 1, characterized in that: The second optical path control module includes a second beam splitter and a second objective lens; The second optical signal is transmitted through the second beam splitter and focused onto the measurement point by the second objective lens; The imaging light signal is transmitted through the second objective lens, reflected by the second beam splitter, and then transmitted through the first optical path control module to the optical path transmission module and the imaging unit.

4. The optical measuring device according to claim 1, characterized in that: The optical path transmission module includes a third beam splitter and a first tube mirror; The light signal to be measured is transmitted through the first tube lens and transmitted through the third beam splitter to obtain the first beam splitter; the imaging light signal is transmitted through the first tube lens and reflected through the third beam splitter to obtain the second beam splitter. Alternatively, the light signal to be measured is transmitted through the first tube lens and reflected by the third beam splitter to obtain the first beam splitter, and the imaging light signal is transmitted through the first tube lens and transmitted through the third beam splitter to obtain the second beam splitter.

5. The optical measuring device according to claim 4, characterized in that: When the first beam is obtained by transmission through the third beam splitter, the transmittance of the third beam splitter is 60%-80%; when the first beam is obtained by reflection through the third beam splitter, the reflectance of the third beam splitter is 60%-80%.

6. The optical measuring device according to claim 1, characterized in that: The optical measurement module further includes a first parabolic mirror, a second parabolic mirror, and a third parabolic mirror; the first optical signal is reflected sequentially by the first parabolic mirror, the second parabolic mirror, and the third parabolic mirror into the first optical path control module.

7. The optical measuring device according to claim 1, characterized in that: The optical measuring device further includes an autofocus module and a second beam splitting module; the autofocus module includes a first mirror, a second mirror and a focusing unit, and the second beam splitting module includes a fourth beam splitting mirror; The first optical signal is transmitted to the second optical path control module via the first optical path control module, and then transmitted again via the second optical path control module before being vertically incident on the measurement point to generate a focusing optical signal; The focusing light signal is transmitted through the second optical path control module, and after passing through the fourth beam splitter, it is reflected by the first and second reflectors before entering the focusing unit.

8. The optical measuring device according to claim 1, characterized in that, The first optical signal is transmitted to the measurement point via the first optical path control module, and the second optical signal is transmitted to the measurement point via the second optical path control module. The optical paths of the first optical signal and the second optical signal are independent of each other.

9. An optical measurement system, characterized in that, The optical measurement system includes at least: a test object carrier and an optical measurement device as described in any one of claims 1-8; the test object carrier is used to move the test object so that the optical measurement device can measure the test object.

10. An optical measurement method, characterized in that, The optical measurement method is implemented based on the optical measurement device according to any one of claims 1-8, and the steps of the optical measurement method include at least: S1: Turn on the second light source. After the second light signal is transmitted through the second optical path control module, it is vertically incident on the measurement point in the measurement area of ​​the object to be measured to obtain the imaging light signal. The imaging light signal is transmitted sequentially through the second optical path control module and the first optical path control module, and then through the optical path transmission module to reach the imaging unit. The imaging unit is used to display the image data of the measurement point. S2: Turn on the first light source, move the object to be tested, and the first light signal is transmitted through the first optical path control module and then incident vertically on the measurement point to obtain the light signal to be tested; the light signal to be tested is transmitted through the first optical path control module and then through the optical path transmission module to reach the measurement unit, which is used to measure and analyze the physical characteristics of the measurement point.

11. The optical measurement method according to claim 10, characterized in that, Before step S2, there is also step S2': the first optical signal is transmitted sequentially through the first optical path control module and the second optical path control module and then vertically incident on the measurement point to obtain a focusing optical signal. The focusing optical signal is collected and analyzed so that the first optical signal and the second optical signal focus on the measurement point respectively.

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