用于任意波段的反射式全介质偏振合束光栅

By designing a trapezoidal groove profile grating etching layer and a multilayer dielectric film structure, a reflective all-dielectric polarization beam combiner grating is developed, which solves the problems of limited wavelength and low diffraction efficiency in the existing technology. This achieves a high-efficiency and damage-resistant laser beam combining effect, suitable for high-power laser systems.

CN120447118BActive Publication Date: 2026-07-17SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
Filing Date
2025-04-01
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing reflective polarization beam combiners suffer from problems such as limited wavelength range, low diffraction efficiency, insufficient resistance to laser damage, and complex fabrication, making it difficult to meet the needs of high-power laser systems.

Method used

A reflective all-dielectric polarization beam combiner is adopted, which consists of a trapezoidal groove profile grating etching layer, a matching layer and a periodic film system. By superimposing high refractive index and low refractive index material layers, the grating parameters are optimized to achieve high reflectivity, wide bandwidth and low temperature rise distortion, and it is suitable for efficient beam combining in any band.

Benefits of technology

It achieves efficient beam combining of TE and TM polarized light in arbitrary wavelengths, with an average diffraction efficiency exceeding 90%, improved resistance to laser damage, applicability to high-power laser systems, and ease of fabrication, thus promoting the development of high-power laser beam combining technology.

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Abstract

一种适用于任何波段的反射式全介质偏振合束光栅,由上而下依次是光栅刻蚀层、位相匹配层、周期膜系和光栅基底构成。本发明具有易于制备、宽带、高衍射效率的特点,能够有效解决当前偏振合束技术中PBS抗激光损伤阈值和合成效率低的问题,为未来更大阵列规模、更高功率激光合成技术的实现提供了坚实的元器件支撑。
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