A clamp is provided on a frame for transporting a carrier plate
By designing a manually operable clamp that combines a slider and an elastic element, the problems of existing clamps being difficult to operate manually and having unadjustable clamping force are solved. This achieves stable fixation of the substrate, reduces scratches, and improves production flexibility and maintenance convenience.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- AALTOSEMI INC
- Filing Date
- 2025-04-30
- Publication Date
- 2026-06-16
AI Technical Summary
Existing fixtures are difficult to operate manually in automated production and cannot change the clamping force, which makes semiconductor substrates prone to deformation or displacement, increasing the risk of scratches.
A clamping device was designed, comprising a first clamping component, a second clamping component, an elastic component, and a locking component. Through the combination of a slider and an elastic component, it can be manually opened and closed, and the clamping force is adjustable. The modular structure facilitates maintenance and parts replacement.
The manually operated fixture avoids substrate contamination, ensures the substrate does not shift, reduces the risk of scratches, and improves production flexibility and maintainability.
Smart Images
Figure CN120453206B_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to a clamp, and more particularly to a clamp for fixing a carrier plate and baking it. Background Technology
[0002] Existing fixtures for securing semiconductor substrates consist of a support and clamps. The fixture is first opened by an automated device, then the semiconductor substrate is placed on a tray, the fixture is closed, and finally, the substrate is placed in the baking process. Because current production largely utilizes automated assembly lines, the design of existing fixtures is heavily biased towards automation and the machine itself. In situations requiring manual intervention, such as equipment malfunctions (e.g., board jamming), manual board loading, or testing and inspection, existing fixtures are difficult to operate manually, neglecting the possibility of human intervention.
[0003] Furthermore, the clamping force of existing fixtures on semiconductor substrates cannot be changed, meaning that the pressure on different substrates is the same, which makes the substrates prone to deformation or unable to be effectively fixed, resulting in displacement and increasing the possibility of scratches on the substrate surface. Summary of the Invention
[0004] The purpose of this disclosure is to provide a clamp on a frame used for transporting a carrier plate to solve at least one of the above-mentioned problems.
[0005] This disclosure provides a clamp disposed on a frame for transporting a carrier plate, comprising: a first clamp fixed to the frame, the first clamp including a clamp slide rail having a first head end and a first tail end opposite to each other; a second clamp connected to the first clamp, the second clamp including a slider slidably disposed in the clamp slide rail, allowing the second clamp to rotate relative to the first clamp and to switch between a closed state and an open state; and two first elastic members disposed on the first clamp and respectively located at the first head end and the first tail end of the clamp slide rail; wherein, in the closed state, the slider is adjacent to the first head end and compresses the first elastic member located at the first head end, at which time the second clamp can clamp the carrier plate, and in the open state, the slider is adjacent to the first tail end and compresses the first elastic member located at the first tail end, at which time the second clamp is away from and does not clamp the carrier plate.
[0006] In one specific embodiment of the clamp disclosed herein, the clamp further includes a locking head member, wherein the first clamp further includes a locking head slide rail for the locking head member to slide on the locking head slide rail, so as to limit the slider by means of the locking head member in the closed state or the open state.
[0007] In one specific embodiment of the clamp disclosed herein, the clamp further includes a second elastic member disposed on the first clamp and corresponding to the lock head slide rail, wherein the lock head slide rail has a second head end and a second tail end opposite to each other, the lock head member is positioned at the second head end to limit the slider and does not compress the second elastic member, and the lock head member is positioned at the second tail end to not limit the slider and compress the second elastic member.
[0008] In a specific embodiment of the clamp disclosed herein, the second elastic member includes a second outer shell, a second spring, and a second support plate. The second spring and the second support plate are disposed inside the second outer shell. The second outer shell is cylindrical and has a second opening. The second support plate abuts against one end of the second spring and is limited by the second outer shell. The locking member passes through the second opening and compresses the second spring via the second support plate.
[0009] In one specific embodiment of the clamp disclosed herein, the end of the locking head has an adapter structure to align with the surface of the slider.
[0010] In one specific embodiment of the clamp disclosed herein, the clamp further includes a cam connected to the second clamp and a third elastic member disposed on the frame, wherein when the slider changes from the closed state to the open state, the cam compresses the third elastic member, and when the slider changes from the open state to the closed state, the cam releases the third elastic member.
[0011] In one specific embodiment of the clamp disclosed herein, the clamp further includes a hinge connecting the second clamp and the frame, wherein the second clamp rotates relative to the first clamp about the hinge, and the cam corresponds to and is coaxial with the hinge.
[0012] In a specific embodiment of the clamp disclosed herein, the third elastic element includes a third housing, a third spring, and a third support plate. The third spring is disposed inside the third housing. The third housing is cylindrical and has a third opening. The third support plate is H-shaped and passes through the third opening. It has a first plate and a second plate opposite to each other. The first plate abuts against one end of the third spring and is limited by the third housing. The second plate protrudes from the third housing and is abutted by the cam.
[0013] In one specific embodiment of the clamp disclosed herein, the cam is integrally formed with the second clamp or is detachably connected to the second clamp.
[0014] In a specific embodiment of the clamp disclosed herein, the first elastic member includes a first outer shell, a first spring, and a first support plate. The first spring and the first support plate are disposed inside the first outer shell. The first outer shell is bent and has a first opening. The first support plate abuts against one end of the first spring and is limited by the first outer shell. The slider passes through the first opening and compresses the first spring via the first support plate.
[0015] In one specific embodiment of the clamp disclosed herein, the first clamp and the second clamp are fan-shaped.
[0016] In one specific embodiment of the clamp disclosed herein, the clamp slide rail is arc-shaped.
[0017] In summary, the clamp disclosed herein can be manually opened and closed without touching the clamping plate, thus avoiding contamination of the semiconductor substrate surface and enabling single-person operation. Furthermore, due to the modular elastic elements, the clamp not only facilitates parts replacement or maintenance but also allows for control of the clamping force on the semiconductor substrate by changing different springs, preventing displacement of the semiconductor substrate and reducing scratches on the substrate surface. Attached Figure Description
[0018] Figure 1 This is an overall schematic diagram of the fixture of this disclosure mounted on a frame and clamping a carrier plate.
[0019] Figure 2A This is a side view of the second clamping component in the fixture disclosed herein.
[0020] Figure 2B This is a schematic diagram of the top surface of the second clamping member in the fixture disclosed herein.
[0021] Figure 3 This is a side view of the first clamping component in the fixture disclosed herein.
[0022] Figure 4 This is a top view of the fixture after the first clamp and the second clamp are assembled.
[0023] Figure 5 This is a side view of the locking mechanism in the fixture disclosed herein.
[0024] Figure 6 This is a schematic diagram of the clamp of this disclosure in the closed state.
[0025] Figure 7 This is a schematic diagram of the clamp of this disclosure in a half-open state.
[0026] Figure 8 This is a schematic diagram of the clamp of this disclosure in the open state.
[0027] The attached figures are labeled as follows:
[0028] 100 clamps
[0029] 200 frames
[0030] 300 carrier board
[0031] 1 First clamp
[0032] 11 Clamping slide rail
[0033] 111 First head end
[0034] 112 First tail end
[0035] 12 Lock head slide rail
[0036] 121 Second head end
[0037] 122 Second tail end
[0038] 2 Second clamp
[0039] 21 sliders
[0040] 22 plywood
[0041] 3 First elastic element
[0042] 31 First Outer Shell
[0043] 311 First Opening
[0044] 32 First Spring
[0045] 33 First Support Plate
[0046] 4 Locking components
[0047] 41 Lock cylinder
[0048] 42 Putter
[0049] 43 Adaptation Structure
[0050] 5 Second elastic element
[0051] 51 Second outer shell
[0052] 511 Second Opening
[0053] 52 Second Spring
[0054] 53 Second support plate
[0055] 6. Third elastic element
[0056] 61 Third Shell
[0057] 611 Third Opening
[0058] 62 Third Spring
[0059] 63 Third Support Plate
[0060] 631 First Plate
[0061] 632 Second Plate
[0062] 633 Column
[0063] 7. Hinge components
[0064] 8 Cams Detailed Implementation
[0065] The following specific embodiments illustrate the implementation of this disclosure. Those skilled in the art can easily understand other advantages and effects of this disclosure from the content disclosed in this specification.
[0066] It should be understood that the structures, proportions, sizes, etc., shown in the accompanying drawings are only for illustrative purposes to aid those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the implementation conditions of this disclosure. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effectiveness and purpose of this disclosure, should still fall within the scope of the technical content disclosed herein. Furthermore, the terms such as "first," "second," and "third" used in this specification are merely for clarity of description and are not intended to limit the scope of this disclosure. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of this disclosure's implementation.
[0067] Please see Figure 1 The clamp 100 disclosed herein is mounted on a frame 200, which is used to transport the carrier plate 300. In this embodiment, a clamp 100 may be provided on each side of the carrier plate 300 so that the clamp 100 can clamp the carrier plate 300.
[0068] Please see Figure 2A , Figure 2B , Figure 3 , Figure 4 , Figure 5 and Figure 6 The clamp 100 disclosed herein includes a first clamp 1, a second clamp 2, two first elastic members 3, a locking member 4, a second elastic member 5, a third elastic member 6, two hinge members 7, and a cam 8.
[0069] The first clamp 1 is fixed to the frame 200 and includes a clamp slide rail 11 and a lock head slide rail 12. In this embodiment, the first clamp 1 is fan-shaped and has a certain thickness, but this disclosure is not limited thereto. The first clamp 1 can be formed as a hollow shell to reduce weight and material usage. Furthermore, the first clamp 1 can be directly mounted to the frame 200 via, for example, screws or hinges 7, but this disclosure is not limited thereto.
[0070] The clamping slide rail 11 has a first head end 111 and a first tail end 112, which are arc-shaped and roughly match the fan-shaped arc of the first clamping member 1. The locking slide rail 12 has a second head end 121 and a second tail end 122, which extend roughly along the center of the fan shape, such that the second head end 121 is adjacent to the clamping slide rail 11, while the second tail end 122 is away from the clamping slide rail 11.
[0071] The second clamp 2 is arranged side by side with the first clamp 1 on the frame 200, and includes a slider 21 and a clamping plate 22. Figure 6 In this embodiment, the second clamp 2 is fan-shaped and has a certain thickness, but this disclosure is not limited thereto. The second clamp 2 can be formed as a hollow shell to reduce weight and material usage. Furthermore, the second clamp 2 can be mounted on the frame 200 via a hinge 7, but this disclosure is not limited thereto.
[0072] The slider 21 protrudes outward from the surface of the second clamp 2 and slides in the clamp slide rail 11. Figure 6 It has an arc-shaped cross-section that roughly matches the curvature of the clamping slide rail 11. The second clamp 2 is slidably mounted on the clamping slide rail 11 via the slider 21, allowing it to rotate relative to the first clamp 1. Figure 6 As shown, the clamping plate 22 generally has a long cross-section and is located on the side of the second clamping member 2 away from the frame 200, that is, on the side of the fan-shaped structure with an arc. This disclosure does not limit the shape of the clamping plate 22, as long as it is located on the side of the second clamping member 2 away from the frame 200 and moves together with the second clamping member 2. Figure 2A and Figure 2B For ease of explanation, the specific outline of the clamp 22 is omitted.
[0073] The first elastic element 3 is disposed on the first clamping member 1 and is located at the first head end 111 and the first tail end 112 of the clamping member slide rail 11, respectively. Each of the first elastic elements 3 includes a first outer shell 31, a first spring 32, and a first support plate 33, such as... Figure 6As shown. The first outer shell 31 is generally bent, hollow inside, and has a first opening 311. A first spring 32 is disposed inside the first outer shell 31, with one end abutting against the first outer shell 31. A first support plate 33 is disposed inside the first outer shell 31 and abuts against the other end of the first spring 32; its size is approximately equal to the cross-section of the hollow interior of the first outer shell 31. Because the size of the first opening 311 is smaller than the cross-section of the hollow interior of the first outer shell 31, the first support plate 33 is limited by the first outer shell 31 and will not detach from the first outer shell 31.
[0074] In this embodiment, when the slider 21 is slidably disposed on the clamping slide rail 11, depending on whether the slider 21 is located at the first head end 111 or the first tail end 112 of the clamping slide rail 11, it can pass through the first opening 311 of different first elastic members 3 and abut against different first support plates 33, thereby compressing different first springs 32, such as... Figure 6 or Figure 8 As shown.
[0075] The lock cylinder 4 includes a lock cylinder 41, a push rod 42, and an adapter structure 43 (e.g., a circular concave arc to correspond to the surface of the slider 21). The lock cylinder 41 is generally cylindrical. The push rod 42 extends radially outward from one end of the lock cylinder 41 and passes through the lock cylinder slide rail 12, allowing the lock cylinder 4 to slide on the lock cylinder slide rail 12. The adapter structure 43 is formed at the end of the lock cylinder 41, away from the push rod 42.
[0076] The second elastic element 5 is disposed on the first clamping member 1 and corresponds to the lock head slide rail 12, and includes a second outer shell 51, a second spring 52 and a second support plate 53, as follows: Figure 6 As shown. The second outer shell 51 is generally cylindrical, hollow inside, and has a second opening 511. The second spring 52 is disposed inside the second outer shell 51, with one end abutting against the second outer shell 51. The second support plate 53 is disposed inside the second outer shell 51 and abuts against the other end of the second spring 52; its size is approximately equal to the cross-section of the hollow interior of the second outer shell 51. Because the size of the second opening 511 is smaller than the cross-section of the hollow interior of the second outer shell 51, the second support plate 53 is limited by the second outer shell 51 and will not detach from the second outer shell 51.
[0077] In this embodiment, the lock cylinder 41 passes through the second opening 511 and abuts against the second support plate 53. Depending on whether the push rod 42 is located at the second head end 121 or the second tail end 122 of the lock head slide rail 12, the second spring 52 can be released or compressed, causing the lock cylinder 41 to be positioned on the clamping slide rail 11, thus limiting the slider 21 (e.g., ...). Figure 6 or Figure 8 (as shown), or the lock cylinder 41 is not positioned on the clamping slide rail 11 and thus the slider 21 is not limited (as shown). Figure 7 (As shown).
[0078] The third elastic element 6 is located in the frame 200 and near the center of the fan-shaped first clamp 1, and includes a third outer shell 61, a third spring 62, and a third support plate 63, as shown below. Figure 6 As shown. The third outer shell 61 is generally cylindrical, hollow inside, and has a third opening 611. The third spring 62 is disposed inside the third outer shell 61, with one end abutting against the third outer shell 61. The third support plate 63 has a first plate 631, a second plate 632, and a column 633 connecting the first plate 631 and the second plate 632, making the third support plate 63 generally H-shaped. The first plate 631 is disposed inside the third outer shell 61 and abuts against the other end of the third spring 62, and its size is approximately equal to the cross-section of the hollow interior of the third outer shell 61. The column 633 passes through the third opening 611, and the second plate 632 is exposed outside the third outer shell 61. Since the size of the third opening 611 is smaller than the cross-section of the hollow interior of the third outer shell 61, the first plate 631 is limited by the third outer shell 61 and will not detach from the third outer shell 61.
[0079] The hinge 7 consists of two chain plates and a screw passing through the two chain plates, allowing the two chain plates to rotate relative to each other about the screw as an axis. The two chain plates can be respectively connected to the second clamping member 2 and the frame 200, allowing the second clamping member 2 to rotate relative to the first clamping member 1 about the screw of the hinge 7. Similarly, the two chain plates can also be respectively connected to the first clamping member 1 and the frame 200, allowing the first clamping member 1 to rotate relative to the second clamping member 2 about the screw of the hinge 7. The cam 8 is fixed to the second clamping member 2 and roughly corresponds to the hinge 7, being coaxial with the hinge 7, so that when the second clamping member 2 rotates relative to the first clamping member 1, the cam 8 moves in sync with the second clamping member 2.
[0080] In one embodiment, the cam 8 may be integrally formed with the second clamp 2, but this disclosure is not limited thereto. The cam 8 may also be detachably connected to the second clamp 2 as needed.
[0081] In this embodiment, the cam 8 abuts against the second plate 632 of the third support plate 63 in the third elastic member 6, and when the second clamp 2 rotates relative to the first clamp 1, the third spring 62 can be compressed or released via the third support plate 63, such as... Figure 6 or Figure 8 As shown.
[0082] Please see Figures 6 to 8 The clamp 100 disclosed herein can be in a closed state ( Figure 6 ) and an open state ( Figure 8The slider 21 moves between the two states. In the closed state, the slider 21 is adjacent to the first end 111 of the clamping slide rail 11 and compresses the first spring 32 via the first support plate 33 in the first elastic member 3 located at the first end 111, so that the clamping plate 22 of the second clamping member 2 can clamp the fixed plate 300. At the same time, the push rod 42 of the lock head member 4 is located at the second end 121 of the lock head slide rail 12, so that the lock cylinder 41 is located on the clamping slide rail 11 and limits the slider 21 located at the first end 111. The cam 8 abuts against the second plate 632 of the third support plate 63 and does not compress the third spring 62.
[0083] When the clamp 100 changes from the closed state to the open state, the lock head 4 first slides on the lock head slide rail 12, causing the push rod 42 to move from the second head end 121 to the second tail end 122. At the same time, the lock cylinder 41 compresses the second spring 52 of the second elastic member 5 via the second support plate 53. At this time, the lock cylinder 41 is not located on the clamp slide rail 11 and does not limit the slider 21. Figure 7 As shown, the slider 21 can move to the middle of the clamping slide rail 11 by the return of the first spring 32, and the clamp 100 is in a half-open state. Then, as... Figure 8 As shown, the second clamp 2 is rotated relative to the first clamp 1, causing the slider 21 to move to the first tail end 112. The first spring 32 is compressed via the first support plate 33 in the first elastic member 3 located at the first tail end 112, allowing the clamping plate 22 of the second clamp 2 to move away from and not clamp the fixed plate 300. Simultaneously, the cam 8 compresses the third spring 62 via the second plate 632. Then, the push rod 42 is moved from the second tail end 122 to the second head end 121, causing the lock cylinder 41 to not compress the second spring 52 and to be positioned on the clamping rail 11, thereby limiting the slider 21 located at the first tail end 112.
[0084] To change the clamp 100 from the open state to the closed state, that is, from the state of not clamping the support plate 300 to the state of clamping the support plate 300, simply move the push rod 42 from the second head end 121 to the second tail end 122, causing the lock cylinder 41 to compress the second spring 52 and not be located on the clamping slide rail 11. The slider 21 located at the first tail end 112 can then move away from the first tail end 112 due to the rebound of the first spring 32. At the same time, the third spring 62 also rebounds, causing the cam 8 to drive the second clamping member 2 to rotate, making the slider 21 move further away from the first tail end 112. The second clamping member 2 can be further rotated relative to the first clamping member 1, causing the slider 21 to move to the first head end 111 and compress the first spring 32 in the first elastic member 3 located at the first head end 111, so that the clamping plate 22 clamps the support plate 300. Next, the push rod 42 can be moved from the second tail end 122 to the second head end 121, so that the lock cylinder 41 is located on the clamping slide rail 11 and limits the slider 21 located at the first head end 111, so that the clamping plate 22 is maintained in the state of clamping the carrier plate 300.
[0085] In the above embodiments, the movement of the lock head 4 and the rotation of the second clamp 2 can be operated manually. In automated devices, manual intervention can increase the overall flexibility of the production line. Furthermore, the rotation of the second clamp 2 can also be operated manually, for example, by having one end of the slider 21 abut against the adapter structure 43 of the lock head 4 (reducing the length of the lock cylinder 41 so that the adapter structure 43 can correspond to the slider), thereby pushing the lock cylinder 41 away from the clamp slide rail 11 to release the function of limiting the slider 21.
[0086] In summary, the clamp disclosed herein can be manually opened and closed without touching the clamping plate, thus avoiding contamination of the semiconductor substrate surface and enabling single-person operation. Furthermore, due to the modular elastic elements, the clamp not only facilitates parts replacement or maintenance but also allows for control of the clamping force on the semiconductor substrate by changing different springs, preventing displacement of the semiconductor substrate and reducing scratches on the substrate surface.
[0087] The above embodiments are illustrative of the principles and effects of this disclosure and are not intended to limit this disclosure. Those skilled in the art can modify the above embodiments without departing from the spirit and scope of this disclosure. Therefore, the scope of protection of this disclosure should be as set forth in the claims.
Claims
1. A clamp disposed on a frame for transporting a carrier plate, characterized in that, include: A first clamp is fixed to the frame, and the first clamp includes a clamp slide rail having a first head end and a first tail end opposite to each other and a lock head slide rail. The second clamp is connected to the first clamp, and the second clamp includes a slider that slides in the clamp slide rail, so that the second clamp can rotate relative to the first clamp and the clamp can switch between a closed state and an open state. Two first elastic members are disposed on the first clamp and are respectively located at the first head end and the first tail end of the clamp slide rail; A locking head is slidably mounted on the locking head slide rail. In the closed state, the slider is adjacent to the first head end and compresses the first elastic member located at the first head end. At this time, the locking head limits the slider so that the second clamp can clamp the carrier plate. In the open state, the slider is adjacent to the first tail end and compresses the first elastic member located at the first tail end. At this time, the locking head limits the slider so that the second clamp is away from and does not clamp the carrier plate. The second elastic member is disposed on the first clamp and corresponds to the lock head slide rail, wherein the lock head slide rail has a second head end and a second tail end opposite to each other. When the lock head is located at the second head end, it limits the slider and does not compress the second elastic member, while when the lock head is located at the second tail end, it does not limit the slider and compresses the second elastic member. The cam is connected to the second clamp. A third elastic element is provided in the frame, wherein when the slider changes from the closed state to the open state, the cam compresses the third elastic element, and when the slider changes from the open state to the closed state, the cam releases the third elastic element; and A hinge component connects the second clamping member and the frame, wherein the second clamping member rotates relative to the first clamping member with the hinge component as its axis, and the cam corresponds to and is coaxial with the hinge component.
2. The clamp as described in claim 1, characterized in that, The second elastic member includes a second outer shell, a second spring, and a second support plate. The second spring and the second support plate are disposed inside the second outer shell. The second outer shell is cylindrical and has a second opening. The second support plate abuts against one end of the second spring and is limited by the second outer shell. The locking member passes through the second opening and compresses the second spring through the second support plate.
3. The clamp as described in claim 1, characterized in that, The end of the lock head has an adapter structure to align with the surface of the slider.
4. The clamp as described in claim 1, characterized in that, The third elastic element includes a third housing, a third spring, and a third support plate. The third spring is disposed inside the third housing. The third housing is cylindrical and has a third opening. The third support plate is H-shaped and passes through the third opening. It has a first plate and a second plate opposite to each other. The first plate abuts against one end of the third spring and is limited by the third housing. The second plate is exposed outside the third housing and is abutted by the cam.
5. The clamp as described in claim 1, characterized in that, The cam is integrally formed with the second clamp or is detachably connected to the second clamp.
6. The clamp as described in claim 1, characterized in that, The first elastic element includes a first outer shell, a first spring, and a first support plate. The first spring and the first support plate are disposed inside the first outer shell. The first outer shell is bent and has a first opening. The first support plate abuts against one end of the first spring and is limited by the first outer shell. The slider passes through the first opening and compresses the first spring through the first support plate.
7. The clamp as described in claim 1, characterized in that, The first clamp and the second clamp are fan-shaped.
8. The clamp as described in claim 1, characterized in that, The clamp slide rail is curved.