A kind of coating equipment of TOPCon cell front surface film layer structure

Abstract

This invention discloses a coating equipment for the front film structure of TOPCon batteries, relating to the field of photovoltaic cell technology. It aims to solve the technical problem of poor gas input performance in existing coating equipment for the front film structure of TOPCon batteries. This invention employs a segmented air intake design, utilizing the cooperation of spacers and protrusions to precisely control the rhythm of the gaseous precursor entering the reaction chamber. This fundamentally solves the problem of difficulty in accurately controlling the reaction degree with traditional continuous air intake, ensuring a uniform and dense front film structure and significantly improving various key performance indicators of the battery. Furthermore, it utilizes the vibration force generated by steel balls impacting the inner wall of the inner rotating cylinder to remove moisture, abandoning the high-energy-consuming and complex temperature-controlled electric heating method. This not only reduces production costs but also avoids the adverse effects of improper temperature control on the reaction, ensuring stable equipment operation, reducing coating defects caused by moisture, and providing a reliable guarantee for high-quality coating.

Description

Technical Field

[0001] This invention relates to the field of photovoltaic cell technology, and more specifically, to a coating device for the front film structure of a TOPCon cell. Background Technology

[0002] As a representative of high-efficiency N-type photovoltaic cells, the uniformity and density of the front-side film structure (such as the alumina layer and silicon oxynitride layer) of TOPCon (Tunnel Oxide Passivated Contact) cells directly affect the cell's resistance to ultraviolet (UV) degradation, passivation effect, and photoelectric conversion efficiency. Currently, the mainstream coating process adopts atomic layer deposition (ALD) technology, which grows thin films layer by layer on the surface of the cell by periodically introducing gaseous precursors.

[0003] However, existing coating equipment often uses continuous gas pumping, making precise control of the reaction process difficult. For example, in preparing an alumina film, trimethylaluminum (TMA) is first introduced to form a monolayer on the surface of the solar cell, followed by the introduction of water (H2O) to react with TMA and generate alumina. However, with continuous gas pumping, it is difficult to precisely control the degree of reaction between H2O and TMA, easily leading to over- or under-reaction. Over-reaction results in a porous alumina film structure, reducing its protective and passivating effect on the solar cell; under-reaction prevents the formation of a complete and dense alumina film, affecting its performance. Furthermore, water easily condenses into a liquid state at room temperature, adhering to the inner wall of the gas pipeline, forming droplets or water films. Currently, to address the problem of water molecule adhesion to the pipeline, electric heating is commonly used for removal. However, this method has significant drawbacks. On the one hand, electric heating leads to a substantial increase in energy consumption, which undoubtedly increases production costs for enterprises in the context of rising energy costs. On the other hand, temperature control via electric heating is quite difficult. If the temperature is too high, excessive water vapor evaporation will occur, wasting energy and potentially affecting the normal progress of the reaction; conversely, if the temperature is too low, water molecules adhering to the inner wall of the pipe cannot be effectively removed, failing to achieve the desired effect. Therefore, we propose a coating device for the front-side film structure of TOPCon batteries. Summary of the Invention

[0004] The purpose of this invention is to provide a coating device for the front film structure of TOPCon batteries, so as to solve the technical problem of poor gas input effect in existing coating devices for the front film structure of TOPCon batteries.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a coating equipment for the front film structure of a TOPCon battery, comprising a housing, a conveying mechanism inside the housing, a lifting mechanism inside the housing near the output end of the conveying mechanism, a reaction chamber inside the housing at the top of the lifting mechanism, a moving end of the lifting mechanism being adapted to the bottom end of the reaction chamber, a top shell at the top of the housing directly above the reaction chamber, a gas conveying mechanism inside the top shell, an inlet end of the gas conveying mechanism passing through the top shell, an outlet end of the gas conveying mechanism being connected to the reaction chamber, a heating mechanism rotatably sleeved on the outer wall of the gas conveying mechanism, and a driving mechanism inside the top shell near the gas conveying mechanism, the output end of the driving mechanism being engaged with the heating mechanism;

[0006] The gas delivery mechanism includes an inner rotating cylinder, partitions, baffles, steel balls, and protrusions. One end of the inner rotating cylinder is connected to a motor. The partitions are hinged to the outer wall of the inner rotating cylinder in an annular shape with equal spacing. The baffles are arranged in an annular shape with equal spacing on the inner wall of the inner rotating cylinder. A number of steel balls are movably disposed inside the inner rotating cylinder. The protrusions are disposed on the inner wall of the premixing cylinder.

[0007] The motor drives the inner rotating cylinder to rotate, which in turn drives the partition block to rotate. When the partition block is released from the limit of the protrusion, the hinged partition block rotates and flips, which intermittently blocks the input gaseous precursor, forming a segmented air intake state. The rotation of the inner rotating cylinder drives the baffle to rotate, and the baffle drives some steel balls to the highest point. The steel balls fall and hit the inner wall of the inner rotating cylinder. The vibration force shakes off the water adhering to the outer wall of the inner rotating cylinder, achieving the effect of removing water adhering.

[0008] Preferably, the gas delivery mechanism further includes a premixing cylinder and an inner cavity, the premixing cylinder being connected to the inner wall of the top shell, the inner rotating cylinder being rotatably inserted into the premixing cylinder, and the inner cavity being opened inside the inner rotating cylinder.

[0009] Preferably, the premixing cylinder is further provided with an air inlet and an air outlet. The air inlet is located near the back of the top shell of the premixing cylinder, and the air outlet is located on the protrusion. The air inlet is connected to the top shell through an air inlet pipe, and the air outlet is connected to the reaction chamber through an air outlet pipe. The air inlet and the air outlet are in communication.

[0010] Preferably, the inner rotating cylinder has a ring of equally spaced partition plates fixed on its outer wall, and one end of the partition block is hinged to the partition plate. The size and shape of the protrusion are adapted to the retracted shape of the partition block and the partition plate.

[0011] Preferably, the baffle is provided with an arc groove, which is adapted to the steel ball.

[0012] Preferably, the grinding and heating mechanism includes an outer rotating cylinder, an annular cavity, and friction balls. The outer rotating cylinder is rotatably sleeved on the outer wall of the gas conveying mechanism. The annular cavity is opened inside the outer rotating cylinder. A plurality of friction balls are movably disposed inside the annular cavity. The outer rotating cylinder is connected to the driving mechanism.

[0013] Preferably, an outer ring tooth is fixedly provided at one end of the outer wall of the outer rotating cylinder, and the output end of the drive mechanism is engaged with the outer ring tooth.

[0014] Preferably, the drive mechanism includes a servo motor, a drive shaft, and drive teeth. The servo motor is fixedly mounted on the inner wall of the top shell. One end of the drive shaft is rotatably connected to the inner wall of the top shell, and the other end of the drive shaft is fixedly connected to the output end of the servo motor. The drive teeth are fixedly sleeved on the outer wall of the drive shaft, and the drive teeth mesh with the outer ring teeth.

[0015] Preferably, the servo motor drives the drive shaft and drive teeth to rotate. The drive teeth mesh with the outer ring teeth to drive the outer rotating cylinder to rotate. The rotation of the outer rotating cylinder causes several friction balls inside the ring cavity to rub against each other and generate heat. The heat is generated by the friction balls and conducted to the outer rotating cylinder, and then conducted to the premixing cylinder to remove the water adhering to the inner wall of the premixing cylinder.

[0016] Preferably, the top of the reaction chamber is provided with a diffusion disk group, which is composed of several inverted conical disks arranged vertically and gradually increasing in size, and the inverted conical disks are provided with air holes.

[0017] The bottom end of the diffuser assembly is provided with a surrounding cylinder, the size of which is adapted to the size of the battery cell substrate.

[0018] The preheated and premixed gas is introduced into the reaction chamber through the gas outlet pipe. Several inverted conical disks and gas holes diffuse the gas evenly into the surrounding cylinder to contact the battery cell substrate and form a front film layer.

[0019] Compared with the prior art, the beneficial effects of the present invention are:

[0020] 1. This invention achieves segmented gas intake of the gaseous precursor through the cooperation of spacers and protrusions. Compared with existing methods of continuous gas pumping, this allows for more precise control of the reaction process. For example, in the preparation of the alumina film, the reaction degree between trimethylaluminum and water can be precisely controlled to avoid over- or under-reaction, thereby improving the uniformity and density of the front film structure and enhancing the battery's resistance to UV degradation, passivation effect, and photoelectric conversion efficiency.

[0021] 2. This invention utilizes the rotation of the inner rotating cylinder to drive the baffle, causing steel balls to impact the inner wall of the inner rotating cylinder and generate vibration force, shaking off the water adhering to the outer wall of the inner rotating cylinder. This method of removing water is more energy-efficient than traditional electric heating methods, avoiding the problem of significantly increased energy consumption caused by electric heating. At the same time, it does not have the disadvantage of difficult temperature control, ensuring stable operation of the equipment and reducing coating quality problems caused by moisture.

[0022] 3. This invention also employs a structure where baffles, arc grooves, and steel balls work together. When the steel ball reaches a certain height, due to the continuous rotation of the inner rotating cylinder and the effect of gravity, the steel ball will detach from the arc groove and fall. Because the arc groove design ensures that the trajectory and force of the falling steel ball are relatively stable, the vibration generated by the falling steel ball hitting the inner wall of the inner rotating cylinder can dislodge the water adhering to the outer wall of the inner rotating cylinder, thereby further improving the effect of removing water adhering.

[0023] 4. This invention designs an outer rotating cylinder and an annular cavity structure. The annular cavity inside the outer rotating cylinder provides space for the friction balls to move. As the outer rotating cylinder rotates, the friction balls inside the annular cavity will move continuously and rub against each other under the action of centrifugal force and mutual extrusion force. Heat will be generated during the friction process, thereby heating the water adhering to the inner wall of the premixing cylinder, causing it to vaporize and evaporate, thus achieving the purpose of further removing moisture.

[0024] 5. This invention designs a structure of diffusion disk assembly, inverted conical disk, and surrounding cylinder. The preheated and premixed gas enters the reaction chamber through the gas outlet pipe, is uniformly dispersed by the diffusion disk assembly composed of vertically oriented, gradually changing in size and with air holes, and is then guided by the surrounding cylinder adapted to the battery cell substrate to uniformly contact the battery cell substrate, thereby forming a uniform and dense front film layer and improving battery performance. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 This is a schematic diagram of the overall internal structure of the present invention;

[0027] Figure 3 This is a schematic diagram of the reaction chamber, top shell, gas delivery mechanism, and grinding and heating mechanism of the present invention.

[0028] Figure 4 This is a schematic diagram of the reaction chamber, gas delivery mechanism, and grinding and heating mechanism of the present invention.

[0029] Figure 5 This is a schematic diagram of the gas conveying mechanism and the grinding and heating mechanism of the present invention;

[0030] Figure 6 This is a cross-sectional view of the gas delivery mechanism of the present invention.

[0031] Figure 7 This is a schematic diagram of the gas delivery mechanism of the present invention in its retracted state;

[0032] Figure 8 This is a cross-sectional schematic diagram of the internal structure of the inner rotating cylinder of the present invention;

[0033] Figure 9 This is a schematic diagram illustrating the principle of water molecule removal in this invention.

[0034] Figure 10 This is a cross-sectional view of the grinding and heating mechanism of the present invention;

[0035] Figure 11 This is a physical image of the product of the present invention.

[0036] Explanation of the labels in the diagram:

[0037] 1. Outer shell; 2. Conveying mechanism; 3. Lifting mechanism; 4. Reaction chamber; 5. Top shell; 6. Gas delivery mechanism; 7. Grinding and heating mechanism; 8. Drive mechanism;

[0038] 601. Premixing cylinder; 602. Inner rotating cylinder; 603. Partition block; 604. Inner cavity; 605. Baffle; 606. Steel ball; 607. Protrusion;

[0039] 6011, Air inlet; 6012, Air outlet;

[0040] 6021, board splitting;

[0041] 6051, arc groove;

[0042] 701. Outer rotating cylinder; 702. Annular cavity; 703. Friction ball; 704. Outer ring tooth;

[0043] 801. Servo motor; 802. Drive shaft; 803. Drive gear;

[0044] 401. Diffuser assembly; 402. Inverted cone disc; 403. Vent; 404. Enclosing cylinder. Detailed Implementation

[0045] Example 1: As Figures 1 to 10As shown, the present invention relates to a coating equipment for the front film structure of a TOPCon battery, comprising a housing 1, a conveying mechanism 2 inside the housing 1, a lifting mechanism 3 inside the housing 1 near the output end of the conveying mechanism 2, a reaction chamber 4 inside the housing 1 at the top of the lifting mechanism 3, the moving end of the lifting mechanism 3 being adapted to the bottom end of the reaction chamber 4, a top shell 5 at the top of the housing 1 directly above the reaction chamber 4, a gas conveying mechanism 6 inside the top shell 5, the gas inlet end of the gas conveying mechanism 6 passing through the top shell 5, the gas outlet end of the gas conveying mechanism 6 being connected to the reaction chamber 4, a grinding and heating mechanism 7 rotatably sleeved on the outer wall of the gas conveying mechanism 6, and a driving mechanism 8 inside the top shell 5 near the gas conveying mechanism 6, the output end of the driving mechanism 8 being engaged with the grinding and heating mechanism 7;

[0046] The gas delivery mechanism 6 includes an inner rotating cylinder 602, a partition block 603, a baffle 605, steel balls 606, and a protrusion 607. One end of the inner rotating cylinder 602 is connected to a motor. The partition block 603 is connected to the outer wall of the inner rotating cylinder 602 in an annular and equally spaced manner. The baffle 605 is arranged in an annular and equally spaced manner on the inner wall of the inner rotating cylinder 602. Several steel balls 606 are movably arranged inside the inner rotating cylinder 602. The protrusion 607 is arranged on the inner wall of the premixing cylinder 601.

[0047] The motor drives the inner rotating cylinder 602 to rotate, which in turn drives the partition block 603 to rotate. When the partition block 603 is disengaged from the limit of the protrusion 607, the hinged partition block 603 rotates and flips, which intermittently blocks the input gaseous precursor, forming a segmented air intake state. The rotation of the inner rotating cylinder 602 drives the baffle 605 to rotate. The baffle 605 drives some of the steel balls 606 to the highest point. The steel balls 606 fall and hit the inner wall of the inner rotating cylinder 602. The vibration force shakes off the water attached to the outer wall of the inner rotating cylinder 602, achieving the effect of removing water attachment.

[0048] In this invention, the inner rotating cylinder 602 is first driven to rotate by a motor, and the inner rotating cylinder 602 drives the partition block 603 to rotate synchronously. During the rotation, the partition block 603 is limited by the protrusion 607. When the partition block 603 is disengaged from the protrusion 607, since it is hinged to the outer wall of the inner rotating cylinder 602, it will rotate and flip, thereby intermittently blocking the input gaseous precursor, achieving a segmented air intake state, which helps to accurately control the reaction process.

[0049] Meanwhile, the rotation of the inner rotating cylinder 602 causes the baffle 605 on the inner wall to rotate, and the baffle 605 carries some of the steel balls 606 located inside the inner rotating cylinder 602 to a high point. As the inner rotating cylinder 602 continues to rotate, the steel balls 606 fall from the high point under the action of gravity and hit the inner wall of the inner rotating cylinder 602. The vibration force generated by this impact will shake off the water adhering to the outer wall of the inner rotating cylinder 602, thereby achieving the effect of removing water adhering and avoiding the adverse effects of water on the coating process.

[0050] In an embodiment of the present invention, the gas delivery mechanism 6 further includes a premixing cylinder 601 and an inner cavity 604. The premixing cylinder 601 is connected to the inner wall of the top shell 5, and the inner rotating cylinder 602 is rotatably inserted into the premixing cylinder 601. The inner cavity 604 is formed inside the inner rotating cylinder 602. The premixing cylinder 601, connected to the inner wall of the top shell 5, serves to fix and guide the gas. When the gas enters the inner cavity of the premixing cylinder 601, the motor drives the inner rotating cylinder 602 to rotate, causing the partition block 603 to rotate synchronously. When the partition block 603 rotates to the point where it is disengaged from the limit of the protrusion 607, the partition block 603 will rotate and flip, blocking the gas passage, thereby achieving intermittent blocking of the gaseous precursor and forming a segmented gas intake state.

[0051] In an embodiment of the present invention, the premixing cylinder 601 is further provided with an air inlet 6011 and an air outlet 6012. The air inlet 6011 is located near the back of the top shell 5, and the air outlet 6012 is located on the protrusion 607. The air inlet 6011 is connected to the top shell 5 via an air inlet pipe, and the air outlet 6012 is connected to the reaction chamber 4 via an air outlet pipe. The air inlet 6011 and the air outlet 6012 are in communication. Gas enters the inner cavity of the premixing cylinder 601 through the air inlet 6011, which is connected to an external gas source to provide the required gaseous precursor for the coating process.

[0052] In an embodiment of the present invention, a ring-shaped, equally spaced partition plate 6021 is fixedly provided on the outer wall of the inner rotating cylinder 602. One end of a spacer block 603 is hinged to the partition plate 6021. The size and shape of the protrusion 607 are adapted to the retracted shape of the spacer block 603 and the partition plate 6021. The ring-shaped, equally spaced partition plate 6021 fixed on the outer wall of the inner rotating cylinder 602 provides a mounting base for the spacer block 603. One end of the spacer block 603 is hinged to the partition plate 6021, allowing the spacer block 603 to rotate about the hinge point.

[0053] When the inner rotating cylinder 602 rotates under the drive of the motor, it drives the partition block 603 to rotate synchronously. During the rotation, the partition block 603 will contact the protrusion 607. At this time, due to the fit between their shapes and sizes, the partition block 603 will remain in the retracted state, and the gas can pass through the gas delivery mechanism normally. When the partition block 603 rotates to the point where it is no longer limited by the protrusion 607, the partition block 603 will rotate and flip under its own gravity and centrifugal force, changing the gas passage, thereby achieving intermittent blocking of the input gaseous precursor, forming a segmented gas intake state, and achieving the purpose of precise control of the reaction process.

[0054] In an embodiment of the present invention, an arc groove 6051 is provided on the baffle 605, and the arc groove 6051 is adapted to the steel ball 606.

[0055] When the motor drives the inner rotating cylinder 602 to rotate, the baffles 605, which are installed on the inner wall of the inner rotating cylinder 602 in a ring with equal spacing, rotate accordingly. The arc groove 6051 is adapted to the steel ball 606, which allows the steel ball 606 to be stably located within the arc groove 6051. As the baffles 605 rotate, the steel ball 606 is carried to the highest point under the constraint of the arc groove 6051.

[0056] Once the steel ball 606 reaches a certain height, due to the continuous rotation of the inner rotating cylinder 602 and the effect of gravity, the steel ball 606 will detach from the arc groove 6051 and fall. Because the design of the arc groove 6051 ensures that the trajectory and force of the falling steel ball 606 are relatively stable, the falling steel ball 606 will hit the inner wall of the inner rotating cylinder 602. The vibration force generated by the impact can shake off the water adhering to the outer wall of the inner rotating cylinder 602, thereby achieving the effect of removing water adhering.

[0057] In another embodiment of the present invention, the grinding and heating mechanism 7 includes an outer rotating cylinder 701, an annular cavity 702 and friction balls 703. The outer rotating cylinder 701 is rotatably sleeved on the outer wall of the gas supply mechanism 6. The annular cavity 702 is opened inside the outer rotating cylinder 701. A plurality of friction balls 703 are movably disposed inside the annular cavity 702. The outer rotating cylinder 701 is connected to the driving mechanism 8.

[0058] In another embodiment of the present invention, an outer ring tooth 704 is fixedly provided at one end of the outer wall of the outer rotating cylinder 701, and the output end of the drive mechanism 8 is engaged with the outer ring tooth 704.

[0059] In another embodiment of the present invention, the drive mechanism 8 includes a servo motor 801, a drive shaft 802 and a drive gear 803. The servo motor 801 is fixedly mounted on the inner wall of the top shell 5. One end of the drive shaft 802 is rotatably connected to the inner wall of the top shell 5, and the other end of the drive shaft 802 is fixedly connected to the output end of the servo motor 801. The drive gear 803 is fixedly sleeved on the outer wall of the drive shaft 802 and meshes with the outer ring gear 704.

[0060] When the drive mechanism 8 is running, it will drive the outer rotating cylinder 701 connected to it to rotate. Because the outer rotating cylinder 701 is rotated and sleeved on the outer wall of the gas delivery mechanism 6, it can rotate freely relative to the gas delivery mechanism 6.

[0061] The annular cavity 702 inside the outer rotating cylinder 701 provides space for the friction balls 703 to move. As the outer rotating cylinder 701 rotates, the friction balls 703 inside the annular cavity 702 move and rub against each other under the action of centrifugal force and mutual extrusion force. Heat is generated during the friction process. This heat is first generated by the friction balls 703. Since the friction balls 703 are in direct contact with the outer rotating cylinder 701, the heat is conducted to the outer rotating cylinder 701. Furthermore, since the outer rotating cylinder 701 is fitted outside the premixing cylinder 601 and other components of the gas conveying mechanism 6, the heat can then be conducted from the outer rotating cylinder 701 to the premixing cylinder 601, thereby heating the moisture adhering to the inner wall of the premixing cylinder 601, causing it to vaporize and evaporate, thus achieving a further purpose of removing moisture.

[0062] In another embodiment of the present invention, the drive servo motor 801 drives the drive shaft 802 and drive gear 803 to rotate. The drive gear 803 meshes with the outer ring gear 704 to drive the outer rotating cylinder 701 to rotate. The rotation of the outer rotating cylinder 701 causes several friction balls 703 inside the ring cavity 702 to rub against each other and generate heat. The heat is generated by the friction balls 703 and conducted to the outer rotating cylinder 701, and then conducted to the premixing cylinder 601 to remove the water adhering to the inner wall of the premixing cylinder 601.

[0063] As another embodiment of the present invention, a diffusion disk group 401 is provided at the top of the interior of the reaction chamber 4. The diffusion disk group 401 is composed of several inverted cone disks 402 arranged vertically and gradually increasing in size. The several inverted cone disks 402 are provided with air holes 403.

[0064] The bottom of the diffuser assembly 401 is provided with a surrounding cylinder 404, the size of which is adapted to the size of the battery cell substrate.

[0065] The preheated and premixed gas is introduced into the reaction chamber 4 through the gas outlet pipe. Several inverted conical disks 402 and gas holes 403 diffuse the gas evenly into the surrounding cylinder 404 to contact the battery cell substrate and form a front film layer.

[0066] When gas impacts the inverted conical disk 402, due to the inclined surface of the disk, the gas cannot pass through in a straight line but diffuses outwards along the surface of the disk. Simultaneously, the vents 403 on the inverted conical disk 402 further disperse the gas. Gas enters a smaller space from a larger space through the vents 403, and during this process, the gas is further and more evenly dispersed into the space below the diffuser assembly 401. As the gas passes through multiple layers of inverted conical disks 402 sequentially, its dispersion increases and its uniformity improves.

[0067] The surrounding cylinder 404 is located at the bottom of the diffuser assembly 401 and its size is adapted to the size of the solar cell substrate. Gas, after being uniformly diffused by the diffuser assembly 401, flows downwards into the surrounding cylinder 404. The surrounding cylinder 404 serves to confine and guide the gas, allowing it to contact the solar cell substrate in a concentrated and uniform manner. Because the gas already possesses good uniformity after diffusion through the diffuser assembly 401, under the constraint of the surrounding cylinder 404, this gas can contact the solar cell substrate in a stable and uniform state, thereby forming a uniform and dense front-side film layer on the solar cell substrate, ensuring the quality and performance of the TOPCon solar cell's front-side film layer structure.

[0068] Example 2: This example provides a method for using a coating equipment for the front film structure of a TOPCon battery, including the following steps:

[0069] Step 1: Place the TOPCon solar cell to be coated onto the conveying mechanism 2. The conveying mechanism 2 is started and smoothly transports the solar cell to the output position of the lifting mechanism 3.

[0070] Step 2: The lifting mechanism 3 starts working, and its moving end rises to precisely position itself with the reaction chamber 4, so that the bottom of the reaction chamber 4 is closely matched with the moving end of the lifting mechanism 3, creating a stable environment for the subsequent coating reaction.

[0071] Step 3: Start the motor to drive the inner rotating cylinder 602 to rotate. The inner rotating cylinder 602 drives the spacer 603 to rotate synchronously. When the spacer 603 is disengaged from the limit of the protrusion 607, the spacer 603 rotates and flips, realizing the segmented intake of trimethylaluminum gas and water vapor. Trimethylaluminum enters the inner cavity of the premixing cylinder 601 through the air inlet 6011, and is then transported to the reaction chamber 4 through the air outlet 6012. Water reacts chemically with the trimethylaluminum on the surface of the battery cell to form an aluminum oxide layer. Following the above steps, trimethylaluminum gas is passed through first, followed by water vapor, and this process is repeated twice to successfully generate two layers of aluminum oxide on the surface of the battery cell.

[0072] Step 4: The rotation of the inner rotating cylinder 602 drives the baffle 605 on the inner wall to rotate. The baffle 605 carries some of the steel balls 606 inside the inner rotating cylinder 602 to the highest point. As the inner rotating cylinder 602 continues to rotate, the steel balls 606 fall from the highest point under the action of gravity and hit the inner wall of the inner rotating cylinder 602. The vibration force generated by this impact will shake off the water adhering to the outer wall of the inner rotating cylinder 602, thereby achieving the effect of removing water adhering.

[0073] Step 5: After the trimethylaluminum monolayer on the surface of the battery cell has adhered, use an external gas extraction device to extract the remaining trimethylaluminum from reaction chamber 4 to prevent residual gas from affecting subsequent reactions.

[0074] Step Six: The substrate with the alumina coating remains in the reaction chamber 4. Silane, ammonia, and nitrous oxide are introduced into the reaction chamber 4 through the gas supply mechanism 6. Simultaneously, the servo motor 801 in the drive mechanism 8 is activated, driving the drive shaft 802 and drive gear 803 to rotate. The drive gear 803 meshes with the outer ring teeth 704 on the outer wall of the outer rotating cylinder 701, causing the outer rotating cylinder 701 to rotate. The friction balls 703 in the annular cavity 702 inside the outer rotating cylinder 701 generate heat through mutual friction. The heat is conducted to the premixing cylinder 601 to preheat the introduced gas, promoting the full fusion and reaction of the gas in the reaction chamber 4.

[0075] Step 7: The silicon oxynitride particles generated by the reaction move in the reaction chamber 4 and fall evenly onto the aluminum oxide film under the action of the diffusion disk group 401, gradually forming a silicon oxynitride film. The diffusion disk group 401 is composed of several inverted conical disks 402 arranged vertically and gradually increasing in size. The pores 403 on the inverted conical disks 402 diffuse the gas evenly. The surrounding cylinder 404 guides the gas and particles to concentrate and evenly contact the battery cell substrate, ensuring that silicon oxynitride is evenly covered on the aluminum oxide layer and forms a thin film.

[0076] Step 8: After the silicon oxynitride thin film coating is completed, the moving end of the lifting mechanism 3 descends to remove the coated battery cell.

[0077] The embodiments disclosed in this invention are preferred embodiments, but are not limited thereto. Those skilled in the art can easily understand the spirit of this invention based on the above embodiments and make different extensions and variations, but as long as they do not depart from the spirit of this invention, they are all within the protection scope of this invention.

Claims

1. A coating apparatus for the front film structure of a TOPCon battery, characterized in that, The device includes an outer casing, within which a conveying mechanism is provided. A lifting mechanism is located inside the outer casing near the output end of the conveying mechanism. A reaction chamber is located inside the outer casing at the top of the lifting mechanism. The moving end of the lifting mechanism is adapted to the bottom end of the reaction chamber. A top shell is located at the top of the outer casing directly above the reaction chamber. A gas conveying mechanism is located inside the top shell. The inlet end of the gas conveying mechanism passes through the top shell, and the outlet end of the gas conveying mechanism is connected to the reaction chamber. A grinding and heating mechanism is rotatably fitted onto the outer wall of the gas conveying mechanism. A driving mechanism is located inside the top shell near the gas conveying mechanism, and the output end of the driving mechanism is engaged with the grinding and heating mechanism. The gas delivery mechanism includes an inner rotating cylinder, partitions, baffles, steel balls, and protrusions. One end of the inner rotating cylinder is connected to a motor. The partitions are hinged to the outer wall of the inner rotating cylinder in an annular shape with equal spacing. The baffles are arranged in an annular shape with equal spacing on the inner wall of the inner rotating cylinder. A number of steel balls are movably disposed inside the inner rotating cylinder. The protrusions are disposed on the inner wall of the premixing cylinder. The motor drives the inner rotating cylinder to rotate, which in turn drives the partition block to rotate. When the partition block is disengaged from the limit of the protrusion, the hinged partition block rotates and flips, which intermittently blocks the input gaseous precursor, forming a segmented air intake state. The rotation of the inner rotating cylinder drives the baffle to rotate, and the baffle drives some steel balls to the highest point. The steel balls fall and hit the inner wall of the inner rotating cylinder. The vibration force shakes off the water adhering to the outer wall of the inner rotating cylinder, achieving the effect of removing water adhering. The gas delivery mechanism also includes a premixing cylinder and an inner cavity. The premixing cylinder is connected to the inner wall of the top shell, the inner rotating cylinder is rotatably inserted into the premixing cylinder, and the inner cavity is opened inside the inner rotating cylinder. The premixing cylinder is also provided with an air inlet and an air outlet. The air inlet is located near the back of the top shell of the premixing cylinder, and the air outlet is located on the protrusion. The air inlet is connected to the top shell through an air inlet pipe, and the air outlet is connected to the reaction chamber through an air outlet pipe. The air inlet and the air outlet are in communication. The inner rotating cylinder has a ring of equally spaced partition plates fixed on its outer wall. One end of the partition block is hinged to the partition plate, and the size and shape of the protrusion are adapted to the folded shape of the partition block and the partition plate.

2. The coating equipment for the front surface film layer structure of the TOPCon cell according to claim 1, characterized in that, The baffle is provided with an arc groove, which is adapted to the steel ball.

3. The coating equipment for the front film structure of a TOPCon battery according to claim 2, characterized in that, The grinding and heating mechanism includes an outer rotating cylinder, an annular cavity, and friction balls. The outer rotating cylinder is rotatably sleeved on the outer wall of the gas conveying mechanism. The annular cavity is opened inside the outer rotating cylinder. A plurality of friction balls are movably disposed inside the annular cavity. The outer rotating cylinder is connected to the driving mechanism.

4. The coating equipment for the front film structure of a TOPCon battery according to claim 3, characterized in that, One end of the outer wall of the outer rotating cylinder is fixedly provided with an outer ring tooth, and the output end of the drive mechanism is engaged with the outer ring tooth.

5. The coating equipment for the front film structure of a TOPCon battery according to claim 4, characterized in that, The drive mechanism includes a servo motor, a drive shaft, and drive teeth. The servo motor is fixedly mounted on the inner wall of the top shell. One end of the drive shaft is rotatably connected to the inner wall of the top shell, and the other end of the drive shaft is fixedly connected to the output end of the servo motor. The drive teeth are fixedly sleeved on the outer wall of the drive shaft, and the drive teeth mesh with the outer ring teeth.

6. The coating equipment for the front surface film layer structure of the TOPCon cell according to claim 5, characterized in that, The servo motor drives the drive shaft and drive teeth to rotate. The drive teeth mesh with the outer ring teeth to drive the outer rotating cylinder to rotate. The rotation of the outer rotating cylinder causes several friction balls inside the ring cavity to rub against each other and generate heat. The heat is generated by the friction balls and conducted to the outer rotating cylinder, and then conducted to the premixing cylinder to remove the water adhering to the inner wall of the premixing cylinder.

7. The coating equipment for the front surface film layer structure of the TOPCon cell according to claim 6, characterized in that, The top of the reaction chamber is provided with a diffusion disk group, which is composed of several inverted conical disks arranged vertically and gradually increasing in size, and the inverted conical disks are provided with air holes. The bottom end of the diffuser assembly is provided with a surrounding cylinder, the size of which is adapted to the size of the battery cell substrate. The preheated and premixed gas is introduced into the reaction chamber through the gas outlet pipe. Several inverted conical disks and gas holes diffuse the gas evenly into the surrounding cylinder to contact the battery cell substrate and form a front film layer.

Images