A sintering furnace temperature measuring device fault diagnosis method based on multi-source data

Abstract

A sintering furnace temperature measuring device fault diagnosis method based on multi-source data, combining the power of three heating bodies inside the furnace body and the temperature displayed by the three temperature measuring devices to judge the fault of the temperature measuring device. Specifically, the following steps are included: first, calculate the power P3 of the heating body p3 according to the situation in the sintering furnace, and then calculate the power P1 and P2 of p1 and p2 according to the mutual relationship among p1, p2 and p3; second, detect whether the data T1, T2 and T3 deviate beyond the engineering allowable value, if so, correct the temperature data of the corresponding temperature measuring device, and record the probability of deviation of each temperature measuring device data; third, if the data of the corrected temperature measuring device still deviates beyond the engineering allowable value, calculate the power proportion of the corresponding heating body, and judge the fault temperature measuring device according to the probability of deviation of the temperature measuring device data and the corresponding heating body power proportion.

Description

Technical Field

[0001] This invention relates to a fault diagnosis method for a sintering furnace temperature measuring device, specifically a fault diagnosis method for a sintering furnace temperature measuring device based on multi-source data. Background Technology

[0002] As a crucial piece of equipment for the preparation of functional ceramic materials, industrial high-temperature sintering furnaces face increasingly stringent performance requirements due to the rapid development of the semiconductor industry. High-performance functional ceramic materials necessitate a stable and uniform sintering temperature field. Therefore, achieving precise and intelligent temperature control within high-temperature sintering furnaces, anticipating potential malfunctions of temperature measuring devices, and ensuring the sintering quality of functional ceramics have become challenges in the intelligent manufacturing of high-temperature sintering furnaces.

[0003] Temperature control within high-temperature sintering furnaces is primarily achieved through temperature monitoring at specific locations within the furnace and control of the heating element power. Current heating element power control strategies in high-temperature sintering furnaces are mainly based on decisions made under normal operating conditions of the temperature measuring device. However, due to changes in sintering conditions, the temperature measuring device cannot fully adapt to all changes in operating conditions in a timely manner. Unlike heating element malfunctions, which are diagnosed by real-time measurement of resistance values, temperature measuring device malfunctions are influenced by numerous factors and exhibit significant randomness. Therefore, identifying malfunctions in the temperature measuring device within the sintering furnace using a single data point is extremely difficult. Furthermore, if the malfunction of the temperature measuring device in the sintering furnace cannot be accurately identified, subsequent errors in heating element power control can lead to temperature uniformity exceeding permissible limits within the sintering furnace, ultimately resulting in a decline in the performance of the sintered functional ceramic materials. Simultaneously, directly observing the malfunction status of the heating element within the sintering furnace is difficult and costly.

[0004] Therefore, how to identify the corresponding faults of the temperature measuring devices in the sintering furnace by using the power data of each temperature measuring device and heating element has become a breakthrough point for the intelligent and accurate development of temperature control in industrial high-temperature sintering furnaces. Summary of the Invention

[0005] This invention addresses the problem of difficulty in identifying faults in temperature measuring devices inside high-temperature sintering furnaces and the low accuracy of such identification. It proposes a fault diagnosis method for sintering furnace temperature measuring devices based on multi-source data. The method uses an intelligent algorithm to identify faults in temperature measuring devices based on power data from multiple temperature measuring devices and heating elements, thereby improving the reliability of the identification.

[0006] The technical means adopted by this invention to solve the above problems is as follows: a fault diagnosis method for sintering furnace temperature measuring devices based on multi-source data. Temperature measuring devices t1, t2, and t3 are respectively set near heating elements p1, p2, and p3. Fault judgment is performed by combining the power P1, P2, and P3 of heating elements p1, p2, and p3 with the temperatures T1, T2, and T3 displayed by the measuring devices t1, t2, and t3. The method includes the following steps: First, calculate the power P3 of heating element p3 based on the conditions inside the sintering furnace, and then... The first step involves calculating the power P1 and P2 of p1 and p2 based on the interrelationships between bodies p1, p2, and p3. The second step involves checking whether the data T1, T2, and T3 deviate from the allowable engineering values. If so, the temperature data of the corresponding temperature measuring device is corrected, and the probability of deviation for each temperature measuring device is recorded. The third step involves calculating the power ratio of the corresponding heating element if the corrected temperature measuring device data still deviates from the allowable engineering values. Based on the probability of deviation in the temperature measuring device data and the corresponding power ratio of the heating element, the faulty temperature measuring device is identified.

[0007] Furthermore, in the first step, the power P3 of the heating element p3 is calculated as follows:

[0008] P3 = 0.6F 0.76 (T / 1000) 2.53 ,

[0009] Where F is the effective working space outer surface area of ​​the sintering furnace (dm²) 2 The value of T is related to the size of the sintering furnace and the quantity and arrangement of the sintered products; T is the sintering temperature (°C).

[0010] Furthermore, in the first step, P1 is determined as follows: P1:P3 = 0.6 - 0.7.

[0011] Furthermore, in the first step, P2 is determined as follows: P1:P2 = 0.9 - 1.1.

[0012] Furthermore, in the second step, the detection and correction methods for temperature data t1, t2, and t3 are as follows:

[0013] If △Ti / max(T1,T2,T3)>0.05, then: change the temperature data Ti to the average of the other two temperature data, where i=1,2 or3.

[0014] Furthermore, △Ti is calculated as follows: when i = 1, △T1 = max(|T1-T2|,|T1-T3|); when i = 2, △T2 = max(|T1-T2|,|T2-T3|); when i = 3, △T3 = max(|T1-T3|,|T2-T3|).

[0015] Furthermore, in the second step, the probability P of the temperature data from the temperature measuring device ti being deviated is... Hi The calculation method is as follows:

[0016]

[0017] Among them, t s This represents the current sintering time.

[0018] Furthermore, in the third step, after the temperature measuring device data is corrected, the t1, t2, and t3 data are checked again 5 minutes later to see if they deviate from the allowable engineering values.

[0019] Furthermore, in the third step, the power ratio Wi of the heating element pi is calculated as follows:

[0020]

[0021] Furthermore, in the third step, the method for determining whether the temperature measuring device is malfunctioning is as follows:

[0022] calculate p(P i The temperature measuring device ti corresponding to the maximum value of i ( / e) is malfunctioning.

[0023] The beneficial effects of this invention are:

[0024] 1. This invention determines the fault status of the temperature measuring device by integrating single and historical temperature detection data with parameter settings, avoiding misjudgments based on single data, reducing cost expenditures, realizing real-time monitoring of the temperature measuring device in the high-temperature sintering furnace, improving work efficiency, and ensuring high reliability.

[0025] 2. This invention uses direct observation to judge the operation of the temperature measuring device in real time under high temperature environment and provides data for subsequent updates to the temperature control strategy in the sintering furnace; and it judges the fault of the temperature measuring device in the sintering furnace by using multi-source data, which are mutually verified and have high reliability. Attached Figure Description

[0026] Figure 1 This is a schematic diagram showing the distribution of the heating element and temperature measuring device in the sintering furnace of Example 1;

[0027] Figure 2 The flowchart of the fault diagnosis algorithm for the sintering furnace temperature measuring device with multi-source data is shown in Example 1. Detailed Implementation

[0028] The present invention will be further described below with reference to the accompanying drawings. The drawings are for illustrative purposes only, representing schematic diagrams rather than actual physical objects, and should not be construed as limiting the scope of this patent. To better illustrate the embodiments of the present invention, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0029] Example 1

[0030] A fault diagnosis method for sintering furnace temperature measuring devices based on multi-source data, such as Figure 1 As shown, temperature measuring devices t1, t2, and t3 are respectively installed near the three heating elements p1, p2, and p3 inside the furnace body. These three devices are used to measure the temperature of the three heating elements p1, p2, and p3. The power values ​​P1, P2, and P3 of the three heating elements are combined with the temperatures T1, T2, and T3 displayed by the three measuring devices t1, t2, and t3 to diagnose any malfunctions in the temperature measuring devices. Figure 2 As shown, the specific steps are as follows:

[0031] The first step is to calculate the power P3 of the exothermic body p3 based on the conditions inside the sintering furnace using empirical formulas:

[0032] P3 = 0.6F 0.76 (T / 1000) 2.53 Where F is the effective working space external surface area of ​​the sintering furnace (unit: dm²) 2 The value of T is related to the size of the sintering furnace and the quantity and arrangement of the sintered products; T is the sintering temperature (in °C).

[0033] Then, based on the relationships between P1, P2, and P3, the powers P1 and P2 of p1 and p2 are calculated:

[0034] P1:P3 = r1, P1:P2 = r2, requiring r2 > r1. Generally, r1 = 0.6 to 0.7, r2 = 0.9 to 1.1. The specific values ​​are selected according to the product type and sintering requirements inside the furnace.

[0035] The second step is to check whether the data of t1, t2, and t3 deviate from the engineering allowable value (generally taken as 0.05) according to △Ti / max(T1,T2,T3). If △Ti / max(T1,T2,T3)>0.05 is not true, it means that each temperature measuring device is normal. If △Ti / max(T1,T2,T3)>0.05 is true, then the temperature data Ti of the temperature measuring device ti is corrected to the average of the other two temperature data, where i = 1, 2, or 3, and the calculation method of △Ti is as follows: when i = 1, △T1 = max(|T1-T2|,|T1-T3|); when i = 2, △T2 = max(|T1-T2|,|T2-T3|); when i = 3, △T3 = max(|T1-T3|,|T2-T3|).

[0036] And record the probability P of deviation in the measurement data of each temperature measuring device ti. Hi :

[0037] Where t s This represents the current sintering time.

[0038] In this step, if at a certain time point the readings of the various temperature measuring devices are: T1 = 900℃, T2 = 950℃, T3 = 1000℃, then since (T3-T1) / T3 = (1000-900) / 1000 = 0.1 > 0.05, the value of T1 is corrected to 975℃. In some cases, a temperature measuring device may show an abnormal reading at a particular time, but after correction, it can display normally again. In this case, the temperature measuring device is not truly malfunctioning; it may simply have experienced an anomaly at a specific point in time. After correction, it can continue to work normally, avoiding erroneous conclusions and incorrect operations.

[0039] The third step is to determine the fault of the temperature measuring device ti: After 5 minutes, check again whether △Ti / max(T1,T2,T3)>0.05 holds true. If it does, calculate the power ratio Wi of each heating element p1, p2, p3 (i.e., pi):

[0040]

[0041] Then, based on the probability P of deviation in the data from each temperature measuring device... Hi The corresponding power ratio of the heating element is used to determine the faulty temperature measuring device: calculation. p(P i The temperature measuring device ti corresponding to the maximum value of i ( / e) is malfunctioning.

[0042] The above embodiments are for illustrative purposes only and are not intended to limit the invention. Those skilled in the art can make various changes or modifications without departing from the spirit and scope of the invention. Therefore, all equivalent technical solutions should also fall within the protection scope of the invention, which should be defined by the claims.

Claims

1. A fault diagnosis method for sintering furnace temperature measuring devices based on multi-source data, wherein temperature measuring devices t1, t2, and t3 are respectively installed near heating elements p1, p2, and p3, characterized in that: Fault diagnosis is performed by combining the power values ​​P1, P2, and P3 of heating elements p1, p2, and p3 with the temperatures T1, T2, and T3 displayed by temperature measuring devices t1, t2, and t3. The steps include: First, calculating the power P3 of heating element p3 based on the conditions inside the sintering furnace, and then calculating the powers P1 and P2 of p1 and p2 based on the relationships between heating elements p1, p2, and p3. Second, checking whether the data T1, T2, and T3 deviate from the allowable engineering values. If so, correcting the temperature data of the corresponding temperature measuring devices and recording the probability of deviation for each device. Third, if the corrected temperature measuring device data still deviates from the allowable engineering values, calculating the corresponding heating element power ratio, and determining the faulty temperature measuring device based on the probability of deviation and the corresponding heating element power ratio.

2. The fault diagnosis method for sintering furnace temperature measuring device based on multi-source data as described in claim 1, characterized in that: In the first step, the power P3 of the heating element p3 is calculated as follows: P3=0.6F 0.76 (T / 1000) 2.53 , Where F is the effective working space external surface area of ​​the sintering furnace, in dm². 2 Its value is related to the size of the sintering furnace and the quantity and arrangement of the sintered products; T is the sintering temperature, in °C.

3. The fault diagnosis method for sintering furnace temperature measuring device based on multi-source data as described in claim 2, characterized in that: In the first step, P1 is determined as follows: P1:P3 = 0.6 - 0.

7.

4. The fault diagnosis method for sintering furnace temperature measuring device based on multi-source data as described in claim 3, characterized in that: In the first step, P2 is determined as follows: P1:P2 = 0.9 - 1.

1.

5. The fault diagnosis method for sintering furnace temperature measuring device based on multi-source data as described in claim 1, characterized in that: In the second step, the detection and correction methods for temperature data t1, t2, and t3 are as follows: If △Ti / max(T1,T2,T3)>0.05, then: change the temperature data Ti to the average of the other two temperature data, where i=1,2 or3.

6. The fault diagnosis method for sintering furnace temperature measuring device based on multi-source data as described in claim 5, characterized in that: The calculation method for △Ti is as follows: when i = 1, △T1 = max(|T1-T2|,|T1-T3|); when i = 2, △T2 = max(|T1-T2|,|T2-T3|); when i = 3, △T3 = max(|T1-T3|,|T2-T3|).

7. The fault diagnosis method for a sintering furnace temperature measuring device based on multi-source data as described in claim 6, characterized in that: In the second step, the probability P of temperature data deviation from the temperature measuring device ti is... Hi The calculation method is as follows: Among them, t s This represents the current sintering time.

8. The fault diagnosis method for sintering furnace temperature measuring device based on multi-source data as described in claim 7, characterized in that: In the third step, after the temperature measuring device data is corrected, the t1, t2, and t3 data are checked again 5 minutes later to see if they deviate from the allowable engineering values.

9. The fault diagnosis method for a sintering furnace temperature measuring device based on multi-source data as described in claim 7, characterized in that: In the third step, the power ratio Wi of the heating element pi is calculated as follows:

10. The fault diagnosis method for a sintering furnace temperature measuring device based on multi-source data as described in claim 9, characterized in that: In the third step, the method for determining whether the temperature measuring device is malfunctioning is as follows: calculate p(P i The temperature measuring device ti corresponding to the maximum value of i ( / e) is malfunctioning.

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