Method and device for detecting air pressure inside a vacuum-encapsulated electric field sensor

Abstract

The application provides a method and device for detecting the air pressure in a vacuum-encapsulated electric field sensor, wherein the method comprises: obtaining a current quality factor value of the electric field sensor under a current set air pressure value; checking the current quality factor value and the current set air pressure value to determine whether the current set air pressure value is the same as the current air pressure value in the electric field sensor, and feeding back the determination result to the encapsulation process production line. The current quality factor value of the electric field sensor and the current set air pressure value are checked, the current air pressure value in the electric field sensor is obtained, and it is determined whether the current electric field sensor meets the vacuum encapsulation requirement, so that good products and defective products are distinguished.

Description

Technical Field

[0001] This invention relates to a method for detecting air pressure, and more particularly to a method and device for detecting air pressure inside a vacuum-encapsulated electric field sensor. Background Technology

[0002] Electric field sensors are widely used in aerospace, meteorology, power, industrial production and many other fields, and play an important role in safety assurance and scientific research.

[0003] During the packaging of an electric field sensor, a vacuum is evacuated inside. However, a certain amount of air pressure still exists inside the packaged sensor. If the air pressure exceeds the specified requirements, it will inevitably affect the practical application of the electric field sensor. Therefore, whether the air pressure inside the electric field sensor meets the packaging requirements is one of the conditions that determines whether the electric field sensor can accurately and stably measure the electric field in practical applications.

[0004] However, after the electric field sensor completes the vacuum packaging process, it is not convenient to detect the internal air pressure value, which makes it impossible to determine whether the internal air pressure value of the packaged electric field sensor meets the packaging requirements, and thus cannot distinguish between good and defective products.

[0005] Therefore, how to determine the internal air pressure of the encapsulated electric field sensor in order to judge whether the electric field sensor meets the vacuum encapsulation requirements is a technical problem that urgently needs to be solved. Summary of the Invention

[0006] To address the shortcomings mentioned above, this invention provides a method and device for detecting the internal air pressure of a vacuum-sealed electric field sensor, which can determine whether the current electric field sensor meets the requirements for vacuum sealing by knowing the air pressure value inside the sensor.

[0007] To achieve the above objectives, in a first aspect, the present invention provides a method for detecting the gas pressure inside a vacuum-encapsulated electric field sensor, comprising the following steps: Obtain the current quality factor value of the electric field sensor under the current set air pressure value; The current quality factor value is verified against the current set air pressure value to determine whether the current set air pressure value is the same as the air pressure value inside the current electric field sensor, and the determination result is fed back to the packaging process production line.

[0008] In one embodiment, the current quality factor value of the electric field sensor under the current set air pressure value includes: Place the electric field sensor in the fixture and evacuate the fixture until the interior reaches the set pressure value. The tooling section inputs the received sweep frequency signal into the electric field sensor and outputs the amplitude signal processed by the electric field sensor. The amplitude signal is analyzed according to the first preset condition, and the multiple first amplitude response values ​​obtained are summarized into a first amplitude response value set. A corresponding first waveform image is generated according to the first amplitude response value set, and the peak interval amplitude signal corresponding to the peak interval is obtained from the first waveform image. The amplitude signal of the peak interval is analyzed according to the second preset conditions, and the multiple second amplitude response values ​​obtained are summarized into a set of second amplitude response values. The corresponding second waveform image is generated according to the set of second amplitude response values. The resonant amplitude and bandwidth are determined based on the second waveform image and the second amplitude response value set to obtain the current quality factor of the electric field sensor.

[0009] In one embodiment, the process of placing the electric field sensor in the fixture and evacuating the fixture until the interior reaches a currently set pressure value includes: The currently set air pressure value is the air pressure value that the electric field sensor is required to achieve after packaging, or the air pressure value that is required when the electric field sensor is evacuated during the packaging process.

[0010] In one embodiment, the process of determining the resonant amplitude and bandwidth value based on the second waveform image and the second amplitude response value set, and obtaining the current quality factor value of the electric field sensor, includes the following steps: The peak value of the resonance amplitude U0, the initial value of the resonance amplitude U1, and the final value of the resonance amplitude U2 are determined from the second waveform image and the second set of amplitude response values. The resonant amplitude f0 is determined by the peak value U0 of the resonant amplitude. The corresponding response value U is determined by the initial value U1 of the resonance amplitude and the final value U2 of the resonance amplitude, respectively. L With corresponding response value U H ; The corresponding response value U L The corresponding response value U H Determine the corresponding amplitude f respectively L With the corresponding amplitude f H ; The current quality factor of the electric field sensor can be obtained using the following formula:

[0011] Where Q is the current quality factor, f0 is the resonance amplitude, and f L For the corresponding amplitude, f H For the corresponding amplitude, f H -f L This represents the bandwidth value.

[0012] In one embodiment, the corresponding response value U is determined by the initial value U1 of the resonance amplitude and the final value U2 of the resonance amplitude, respectively. L With corresponding response value U H Including: The corresponding response value U is obtained using the following formula. L :

[0013] Wherein, U0 is the peak value of the resonance amplitude, and U1 is the initial value of the resonance amplitude; The corresponding response value U is obtained using the following formula. H :

[0014] Where U0 is the peak value of the resonance amplitude and U2 is the final value of the resonance amplitude.

[0015] In one embodiment, the process of verifying the current quality factor value with the current set air pressure value to determine whether the current set air pressure value is the same as the air pressure value inside the current electric field sensor, and feeding the determination result back to the packaging process line, includes the following two cases: Scenario 1: The current set air pressure value includes a set of quality factor values ​​corresponding to it. When it is determined that the set of quality factor values ​​contains the current quality factor value, it is determined that the current set air pressure value is the same as the air pressure value inside the current electric field sensor, and the determination result is fed back to the packaging process production line. Scenario 2: The current set air pressure value includes a set of corresponding quality factor values. When it is determined that the set of quality factor values ​​does not contain the current quality factor value, it is determined that the current set air pressure value is different from the air pressure value inside the current electric field sensor. After determining the corresponding air pressure value corresponding to the set of quality factors based on the current quality factor value, the corresponding air pressure value is determined to be the air pressure value inside the current electric field sensor. The difference between the current set air pressure value and the corresponding air pressure value is calculated and fed back to the packaging process production line.

[0016] Secondly, the present invention also provides a detection device for implementing the above-described method for detecting the gas pressure inside a vacuum-encapsulated electric field sensor, comprising: at least one tooling part, a vacuum pumping device, a signal input part, and a processing device, wherein: The tooling part includes a sealed cavity and a test tooling. The sealed cavity is used to accommodate the test tooling in which the electric field sensor is placed. The test tooling inputs the power supply signal and the frequency sweep signal output by the signal input part into the electric field sensor and outputs the amplitude signal processed by the electric field sensor. The vacuum pumping device is connected to the sealed cavity and the processing equipment, and evacuates the inside of the sealed cavity to the current set air pressure value input by the processing equipment. The processing device analyzes the amplitude signal according to preset conditions, calculates the current quality factor of the electric field sensor based on the obtained resonant amplitude and bandwidth, and determines whether the current set air pressure value is the same as the air pressure value inside the electric field sensor based on the correspondence between the current quality factor value and the current set air pressure value.

[0017] In one embodiment, the processing device includes a control module, a first parsing module, a first waveform generation module, a second parsing module, a second waveform generation module, a calculation module, and a memory, wherein: The control module is used to input control signals to the signal input section to control the signal input section to generate and output the sweep frequency signal, and to input the current set air pressure value to the vacuum pumping device; The first parsing module is used to parse the amplitude signal input by the tooling part according to the first preset conditions, and summarize the multiple first amplitude response values ​​obtained into a first amplitude response value set; The first waveform generation module is used to generate a corresponding first waveform image based on the first amplitude response value set, and to determine the peak interval amplitude signal corresponding to the peak interval from the first waveform image; The second analysis module is used to analyze the peak interval amplitude signal according to the second preset conditions, and summarize the multiple second amplitude response values ​​obtained into a set of second amplitude response values; The second waveform generation module is used to generate a corresponding second waveform image based on the second amplitude response value set; The calculation module is used to determine the resonant amplitude and bandwidth value based on the second waveform image and the second amplitude response value set, and to obtain the current quality factor value of the electric field sensor. It is also used to determine whether the current set air pressure value is the same as the air pressure value inside the current electric field sensor based on the correspondence between the current quality factor value and the current set air pressure value. The memory stores multiple air pressure values ​​and a set of quality factor values ​​corresponding to each air pressure value.

[0018] Compared with the prior art, the present invention has one of the following advantages: By verifying the current quality factor value of the electric field sensor with the current set air pressure value, the air pressure value inside the electric field sensor can be determined, thereby determining whether the electric field sensor meets the vacuum sealing requirements and thus distinguishing between good and defective products. Attached Figure Description

[0019] Figure 1This is a flowchart of the detection method in this invention; Figure 2 The first waveform image is formed based on the first set of amplitude response values; Figure 3 This is a second waveform image formed based on the second amplitude response value set; Figure 4 This is a schematic diagram of the first embodiment of the testing equipment in this invention; Figure 5 for Figure 4 Block diagram of the signal source principle; Figure 6 for Figure 4 Top view of the test fixture; Figure 7 for Figure 6 Schematic diagram of the state changes of the test fixture; Figure 8 for Figure 7 Enlarged view of section A; Figure 9 for Figure 6 A 3D view of the test fixture in the open position.

[0020] The main reference numerals are as follows: 1-Test fixture; 100-Upper cover; 101-Pressure block; 102-Elastic buckle; 110-Lower cover; 111-Placement slot; 112-Through hole; 113-Probe; 114-First shaft; 115-Spring; 116-Second shaft; 2-Sealed cavity; 3-Vacuum pump; 4-Processing equipment; 5-Signal input section; 6-Power supply; 7-Signal source; 701-DC power supply; 702-AC power supply; 8-Circuit board; 800-Terminal block; 9-Communication interface; 10-Processor; 11-Memory; 12-Bus system; 13-Placement structure. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0022] In the description of this invention, it should be understood that the terms "upper," "lower," "top surface," "bottom surface," and "inner," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a component positioned centrally. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Example 1

[0023] like Figure 1 As shown, this embodiment provides a method for detecting the gas pressure inside a vacuum-encapsulated electric field sensor, including the following steps: S1. Obtain the current quality factor value of the electric field sensor under the current set air pressure value; S2. Verify the current quality factor value with the current set air pressure value to determine whether the current set air pressure value is the same as the air pressure value inside the current electric field sensor, and feed the judgment result back to the packaging process production line.

[0024] Specifically, step S1 includes the following steps: S101. Place the electric field sensor in the fixture and evacuate the fixture until the interior of the fixture reaches the currently set air pressure value. S102. The tooling part inputs the received sweep frequency signal into the electric field sensor and outputs the amplitude signal processed by the electric field sensor. S103. Analyze the amplitude signal according to the first preset condition, summarize the multiple first amplitude response values ​​obtained into a first amplitude response value set, generate a corresponding first waveform image according to the first amplitude response value set, and obtain the peak interval amplitude signal corresponding to the peak interval from the first waveform image. S104. Analyze the peak interval amplitude signal according to the second preset conditions, summarize the multiple second amplitude response values ​​obtained into a second amplitude response value set, and generate a corresponding second waveform image according to the second amplitude response value set; S105. Determine the resonant amplitude and bandwidth value based on the second waveform image and the second amplitude response value set to obtain the current quality factor value of the electric field sensor.

[0025] Furthermore, in step S101, the currently set air pressure value can be the air pressure value that is required to be reached inside the electric field sensor after packaging, or the air pressure value that is required when the inside of the electric field sensor is evacuated during the packaging process.

[0026] Preferably, the current set pressure value is the internal pressure value that the electric field sensor is designed to reach after encapsulation. This design makes it easier to determine the internal pressure value of the electric field sensor and thus determine whether the electric field sensor meets the vacuum encapsulation requirements.

[0027] Further, step S102 includes the following steps: S1021, The tooling part inputs the power supply signal and the sweep frequency signal output by the signal source and the power supply to the electric field sensor respectively; S1022. After the electric field sensor is put into working state by the power supply signal, it processes the sweep frequency signal to output the amplitude signal.

[0028] Further, step S103 includes: S1031. The first analysis module analyzes the input amplitude signal according to the preset amplitude range and the preset amplitude step size value to obtain multiple first amplitudes; S1032. Calculate the corresponding first amplitude response value based on each first amplitude value; S1033. According to the parsing order, summarize multiple first amplitude response values ​​into a first amplitude response value set; S1034. Input the first amplitude response value set into the first waveform generation module, and mark corresponding anchor points on the coordinate graph according to multiple first amplitude response values ​​in the first amplitude response value set. Connect multiple anchor points to form the first waveform image (see...). Figure 2 ); S1035. In the first waveform image, obtain the corresponding peak interval amplitude signal according to the peak interval.

[0029] Furthermore, in step S1032, when deriving the corresponding first amplitude response value based on each first amplitude value, each first amplitude value includes a set of corresponding first amplitude response values, and the set of first amplitude response values ​​includes multiple first amplitude response values. The derived first amplitude response value can be the average of multiple first amplitude response values ​​(i.e., the first amplitude average response value), or the derived first amplitude response value can be a first amplitude response value randomly extracted from the set of first amplitude response values.

[0030] Further, step S104 includes: S1041, The second analysis module analyzes the peak interval amplitude signal according to the amplitude range of the peak interval amplitude signal and the preset amplitude step value to obtain multiple second amplitudes; S1042. Calculate the corresponding second amplitude response value based on each second amplitude value; S1043. According to the analytical order, summarize multiple second amplitude response values ​​into a second amplitude response value set; S1044. Input the set of second amplitude response values ​​into the second waveform generation module, mark the corresponding anchor points on the coordinate graph according to the multiple second amplitude response values, and connect the multiple anchor points to form the second waveform image (see...). Figure 3 ).

[0031] Further, in step S1042, when deriving the corresponding second amplitude response value based on each second amplitude value, each second amplitude value includes a set of corresponding second amplitude response values, and the set of second amplitude response values ​​includes multiple second amplitude response values. The derived second amplitude response value can be the average of multiple second amplitude response values ​​(i.e., the average second amplitude response value), or the derived second amplitude response value can be a second amplitude response value randomly extracted from the set of second amplitude response values.

[0032] Specifically, step S105 includes the following steps: S1051. Determine the peak value U0, the first value U1, and the last value U2 of the resonance amplitude from the second waveform image and the second amplitude response value set; S1052. Determine the resonant amplitude f0 from the peak value U0 of the resonant amplitude. S1053. Determine the corresponding response value U from the initial value U1 and the final value U2 of the resonance amplitude, respectively. L With corresponding response value U H ; S1054, based on the corresponding response value U L With corresponding response value U H Determine the corresponding amplitude f respectively L With the corresponding amplitude f H ; S1055. Obtain the current quality factor value of the current electric field sensor using the following formula:

[0033] Where Q is the current quality factor, f0 is the resonance amplitude, and f L For the corresponding amplitude, f H For the corresponding amplitude, f H -f L This represents the bandwidth value.

[0034] Furthermore, in step S1053, based on the peak value U0 of the resonance amplitude and the initial value U1 of the resonance amplitude, the corresponding response value U is obtained using the following formula. L :

[0035] Based on the peak resonance amplitude U0 and the final resonance amplitude U2, the corresponding response value U is obtained using the following formula. H : .

[0036] In this embodiment, see Figure 3 The second waveform image is generated based on each second amplitude response value in the second amplitude response value set. The resonant amplitude peak value U0 is the peak value in the second waveform image (i.e., the maximum value in the second amplitude response value set), the first resonant amplitude value U1 is the value closest to "0" on the first side of the peak value in the second waveform image, and the last resonant amplitude value U2 is the value closest to "0" on the other side of the peak value in the second waveform image, corresponding to the response value U. L The midpoint of the first curve from the initial resonant amplitude U1 to the peak resonant amplitude U0 in the second waveform image corresponds to the response value U. H This represents the midpoint of the second curve in the second waveform image, from the initial value U1 of the resonant amplitude to the peak value U0 of the resonant amplitude. The resonant amplitude f0 is the value perpendicular to the peak value U0 on the horizontal axis, corresponding to the amplitude f L The horizontal axis is perpendicular to the corresponding response value U. L The value, corresponding to the amplitude f H The horizontal axis is perpendicular to the corresponding response value U. H The value of .

[0037] Specifically, step S2 includes the following two cases: Scenario 1: The current set air pressure value includes a set of quality factor values ​​corresponding to it. When it is determined that the set of quality factor values ​​contains the current quality factor value, it is determined that the current set air pressure value is the same as the air pressure value inside the current electric field sensor, and the determination result is fed back to the packaging process production line. Scenario 2: The current set air pressure value includes a set of corresponding quality factor values. When it is determined that the set of quality factor values ​​does not contain the current quality factor value, it is determined that the current set air pressure value is different from the air pressure value inside the current electric field sensor. After determining the corresponding air pressure value corresponding to the set of quality factors based on the current quality factor value, the corresponding air pressure value is determined to be the air pressure value inside the current electric field sensor. The difference between the current set air pressure value and the corresponding air pressure value is calculated and fed back to the packaging process production line.

[0038] In this embodiment, step S103, exemplarily, includes: The amplitude signal is analyzed according to a preset amplitude range (0Hz-10Hz) and a preset amplitude step size (0.5Hz) to obtain 21 first amplitude values ​​(0Hz, 0.5Hz, 1Hz, 1.5Hz, 2Hz, 2.5Hz, 3Hz, 3.5Hz, 4Hz, 4.5Hz, 5Hz, 5.5Hz, 6Hz, 6.5Hz, 7Hz, 7.5Hz, 8Hz, 8.5Hz, 9Hz, 9.5Hz, 10Hz). Based on the aforementioned 21 first amplitude values, 21 first amplitude response values ​​are derived respectively (0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 2V, 6V, 4V, 1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V). The 21 first amplitude response values ​​mentioned above are summarized into a first amplitude response value set ({0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 2V, 6V, 4V, 1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V}) according to the parsing order. The first amplitude response value set {0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 2V, 6V, 4V, 1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V} is input into the first waveform generation module, and 21 corresponding anchor points are marked on the coordinate graph according to the 21 first amplitude response values. Connect the above 21 anchor points to form the first waveform image (see...). Figure 2 ).

[0039] In this embodiment, in step S104, exemplarily, the first waveform image (see...) Figure 2 As can be seen from the data, the amplitude signal of the peak interval corresponding to the peak region is 4.5Hz-7Hz.

[0040] In this embodiment, step S104, exemplarily, includes: The peak amplitude signal (with an amplitude range of 4.5Hz-7Hz) is analyzed according to a preset amplitude step size (preset amplitude step size is 0.1Hz) to obtain 26 second amplitude values ​​(4.5Hz, 4.6Hz, 4.7Hz, 4.8Hz, 4.9Hz, 5Hz, 5.1Hz, 5.2Hz, 5.3Hz, 5.4Hz, 5.5Hz, 5.6Hz, 5.7Hz, 5.8Hz, 5.9Hz, 6Hz, 6.1Hz, 6.2Hz, 6.3Hz, 6.4Hz, 6.5Hz, 6.6Hz, 6.7Hz, 6.8Hz, 6.9Hz, 7Hz). Based on the aforementioned 26 second amplitude values, 26 second amplitude response values ​​are derived (0.5V, 0.8V, 1V, 1.2V, 1.6V, 1.8V, 2V, 2.1V, 2.6V, 4V, 6V, 6.3V, 7.2V, 7.6V, 8V, 10V, 14V, 11V, 9V, 7.5V, 7.3V, 6V, 5V, 4.5V, 4.2V, 3V). The 26 second amplitude response values ​​mentioned above are summarized into a set of second amplitude response values ​​according to the analytical order ({0.5V, 0.8V, 1V, 1.2V, 1.6V, 1.8V, 2V, 2.1V, 2.6V, 4V, 6V, 6.3V, 7.2V, 7.6V, 8V, 10V, 14V, 11V, 9V, 7.5V, 7.3V, 6V, 5V, 4.5V, 4.2V, 3V}). The set of the second amplitude response values ​​{0.5V, 0.8V, 1V, 1.2V, 1.6V, 1.8V, 2V, 2.1V, 2.6V, 4V, 6V, 6.3V, 7.2V, 7.6V, 8V, 10V, 14V, 11V, 9V, 7.5V, 7.3V, 6V, 5V, 4.5V, 4.2V, 3V} is input into the second waveform generation module, and 26 corresponding anchor points are marked on the coordinate graph according to the 26 second amplitude response values. Connect the above 26 anchor points to form the second waveform image (see...). Figure 3 ).

[0041] In this embodiment, in step S105, exemplarily, the resonant amplitude peak value U0 is the peak anchor point (i.e., value 14) in the second waveform image, the resonant amplitude initial value U1 is the first anchor point (i.e., value 0.5) on the first side of the peak anchor point in the second waveform image that is closest to "0", and the resonant amplitude initial value U2 is the 26th anchor point (i.e., value 3) on the other side of the peak anchor point in the second waveform image that is closest to "0". The corresponding response value U is obtained based on the resonant amplitude peak value U0 (i.e., value 14) and the resonant amplitude initial value U1 (i.e., value 0.1). LThe corresponding response value U is obtained based on the peak resonance amplitude U0 (i.e., the value 14) and the initial resonance amplitude U2 (i.e., the value 3). H The resonant amplitude f0 is the value perpendicular to the peak resonant amplitude U0 on the horizontal coordinate axis, corresponding to the amplitude f L The horizontal axis is perpendicular to the corresponding response value U. L The value, corresponding to the amplitude f H The horizontal axis is perpendicular to the corresponding response value U. H The current quality factor Q is based on the resonant amplitude f0 and the bandwidth f. H -f L The absolute value of the obtained value.

[0042] In this embodiment, in step S2, for example, case one: According to the specific implementation steps in step S1, the current quality factor value of the electric field sensor (i.e., 451.5) is obtained. The current set pressure value is the internal pressure value that the electric field sensor is required to reach after packaging (i.e., 10 Pa). The set of quality factor values ​​corresponding to the current set pressure value (i.e., 10 Pa) is {445~455}. Based on the current quality factor value (i.e., 451.5), it can be seen that the quality factor value set {445~455} includes the current quality factor value (i.e., 451.5). It is determined that the current set pressure value (i.e., 10 Pa) is the same as the internal pressure value (i.e., 10 Pa) of the current electric field sensor, and the current electric field sensor meets the packaging requirements. The determination result is then fed back to the packaging process production line.

[0043] Scenario 2: According to the specific implementation steps in step S1, the current quality factor value of the electric field sensor (i.e., 463.5) is obtained. The current set pressure value is the internal pressure value of the packaged electric field sensor (i.e., 10 Pa). The set of quality factor values ​​corresponding to the current set pressure value (i.e., 10 Pa) is {445~455}. Based on the current quality factor value (i.e., 463.5), it can be seen that the set of quality factor values ​​{445~455} does not include the current quality factor value (i.e., 463.5). Therefore, it is determined that the current set pressure value (i.e., 10 Pa) is different from the current internal pressure value of the electric field sensor. In the memory, the current quality factor value (i.e., 463.5) is matched with other quality factor value sets. After finding the corresponding quality factor value set {462~465} that includes the current quality factor value (i.e., 463.5), the corresponding air pressure value (i.e., 12Pa) is determined according to the corresponding quality factor value set {456~465} to obtain the air pressure value inside the current electric field sensor (i.e., 12Pa), and it is determined that the current electric field sensor does not meet the packaging requirements. The difference between the current set air pressure value (i.e., 10 Pa) and the current air pressure value inside the electric field sensor (i.e., 12 Pa) is calculated (i.e., 2 Pa), and this difference is fed back to the packaging process production line along with the 2 Pa difference required for packaging.

[0044] Example 2 like Figures 4 to 9 As shown, this embodiment provides an apparatus for implementing the gas pressure detection method inside the vacuum-encapsulated electric field sensor in Embodiment 1 above, comprising: at least one tooling part, a vacuum pumping device 3, a signal input part 5, and a processing device 4, wherein: The tooling part includes a sealed cavity 2 and a test tooling 1. The sealed cavity 2 is used to accommodate the test tooling 1, which contains an electric field sensor. The test tooling 1 inputs the power supply signal and the sweep frequency signal output by the signal input part 5 into the electric field sensor and outputs the amplitude signal processed by the electric field sensor. The vacuum pumping device 3 is connected to the sealed cavity 2 and the processing equipment 4, and the vacuum is pumped until the inside of the sealed cavity 2 reaches the current set air pressure value input by the processing equipment 4; The processing device 4 analyzes the amplitude signal according to preset conditions, and calculates the current quality factor of the electric field sensor based on the obtained resonant amplitude and bandwidth. It also determines whether the current set air pressure value is the same as the air pressure value inside the electric field sensor based on the correspondence between the current quality factor value and the current set air pressure value.

[0045] Specifically, the test fixture 1 includes a placement structure 13 and a circuit board 8, wherein the circuit board 8 is fixed to the bottom end face of the placement structure 13 by screws and is electrically connected to the placement structure 13.

[0046] Specifically, the placement structure 13 includes an upper cover 100 and a lower cover 110 that are rotatably connected, wherein: A placement groove 111 for accommodating a vacuum-sealed electric field sensor is formed on the top end face of the lower cover 110, and multiple through holes 112 are formed on the bottom end face of the placement groove 111. Multiple probes 113 are provided inside the lower cover 110. The upper ends of the probes 113 correspond to the positions of the through holes 112 and extend into the through holes 112. The lower ends of the probes 113 penetrate the bottom end face of the upper cover 100 and connect to the circuit board 8. When the electric field sensor is placed in the placement groove 111, solder joints extending to the outer side of the bottom end face of the electric field sensor are embedded in the through holes 112. The electric field sensor is connected to the circuit board 8 via the solder joints, through holes 112, and probes 113.

[0047] A pressure block 101 is formed on the bottom end face of the upper cover 100, extending to the area below it and corresponding to the placement groove 111.

[0048] When the electric field sensor is placed in the placement slot 111, the upper cover 100 is fastened to the top end face of the lower cover 110, and a part of the pressure block 101 is placed in the placement slot 111 and contacts the top end face of the electric field sensor to fix the electric field sensor in the placement slot 111, thereby ensuring the connection performance of each solder joint and each probe 113 and improving the stability of signal transmission.

[0049] Furthermore, the end of the upper cover 100 and the end of the lower cover 110 are rotatably connected by a first shaft 114. A spring 115 is sleeved on the shaft, which facilitates the opening and closing of the upper cover 100 and the lower cover 110. One end of the spring 115 abuts against the upper cover 100, and the other end of the spring 115 abuts against the lower cover 110.

[0050] An elastic buckle 102 is provided on the front end face of the upper cover 100, and a second shaft 116 that cooperates with the elastic buckle 102 is provided on the front end face of the lower cover 110. When the upper cover 100 and the lower cover 110 are closed, the upper cover 100 and the lower cover 110 are fixed when the lower end of the elastic buckle 102 contacts the second shaft 116. When the lower end of the elastic buckle 102 is separated from the second shaft 116, the upper cover 100 and the lower cover 110 are opened under the action of the spring 115.

[0051] Specifically, the terminal block 200 is fixed on the circuit board 8, and the external signal source 75 and power supply 64 are respectively connected to the terminal block 200 through lines, so that the power supply signal and frequency sweep signal are input to the placement structure 13 through the circuit board 8.

[0052] In this embodiment, after the electric field sensor is fixed inside the placement slot 111 in the lower cover 110, it is connected to the circuit board 8 through the probe 113. After the power supply signal is input to the placement structure 13 through the circuit board 8, the electric field sensor enters the working state. After the frequency sweep signal is input to the placement structure 13 through the circuit board 8, the electric field sensor processes the frequency sweep signal to form an amplitude signal.

[0053] Specifically, the signal input section 5 includes a power supply 6 and a signal source 7. The signal source 7 includes a DC power supply 701 and an AC power supply 702. The DC power supply 701 outputs a constant voltage signal, and the AC power supply 702 outputs an alternating voltage signal within a set range under the control of the control signal input to the processing device 4. The constant voltage signal and the alternating voltage signal are combined to form a sweep frequency signal for the input electric field sensor.

[0054] Specifically, the processing device 4 includes a control module, a first analysis module, a first waveform generation module, a second analysis module, a second waveform generation module, a calculation module, and a memory, wherein: The control module is used to input control signals to the signal input section 5 to control the signal source 7 in the signal input section 5 to generate and output sweep frequency signals. At the same time, the control module also inputs the current set air pressure value to the vacuum pumping device 3, so that the vacuum pumping device 3 evacuates the tooling part to the current set air pressure value. The first parsing module executes the specific implementation steps in steps S1031 to S1033 above, and is used to parse the amplitude signal input by the tooling part according to the first preset conditions, and summarize the multiple first amplitude response values ​​obtained into a first amplitude response value set. The first waveform generation module executes the specific implementation steps in steps S1034 and S1035 above, and is used to generate a corresponding first waveform image based on the first amplitude response value set, and determine the peak interval amplitude signal corresponding to the peak interval from the first waveform image. The second analysis module executes the specific implementation steps in steps S1041 to S1043 above, and is used to analyze the peak interval amplitude signal according to the second preset conditions, and summarize the multiple second amplitude response values ​​obtained into a set of second amplitude response values. The second waveform generation module executes the specific implementation steps in step S1044 above, and is used to generate a corresponding second waveform image based on the second amplitude response value set. The calculation module executes the specific implementation steps in steps S1051 to S1055 above, and is used to determine the resonant amplitude and bandwidth value based on the second waveform image and the second amplitude response value set, and obtain the current quality factor value of the electric field sensor. In addition, the calculation module also executes the specific implementation steps in step S2 above, verifies the current quality factor value and the current set air pressure value, in order to determine whether the current set air pressure value is the same as the air pressure value inside the current electric field sensor, and feeds back the determination result to the packaging process production line. The memory stores multiple air pressure values ​​and a set of quality factor values ​​corresponding to each air pressure value.

[0055] Specifically, the vacuum pumping device 3 receives the current set air pressure value input by the control module, so that the vacuum pumping device 3 evacuates the tooling part to the current set air pressure value.

[0056] Preferably, the current set pressure value is the pressure value that the electric field sensor is designed to achieve inside after packaging. Therefore, after completing the vacuuming operation, it is preliminarily determined that the pressure value in the sealed cavity is the same as the pressure value that the electric field sensor is designed to achieve inside after packaging.

[0057] In addition, in Embodiment 1 and Embodiment 2, preferably, the processing device 4 is a computer.

[0058] Furthermore, in Embodiments 1 and 2, the control module, the first analysis module, the first waveform generation module, the second analysis module, the second waveform generation module, the calculation module, and the memory are integrated to form a processing model placed in the processing device 4. The processing model processes the amplitude signal input from the electric field sensor as described above to obtain the current quality factor value of the electric field sensor. Simultaneously, it can also verify whether the current electric field sensor meets the vacuum packaging requirements based on the current quality factor value.

[0059] In the above embodiments one and two, the quality factor value is preferably a sensitivity value, and the set of quality factor values ​​is preferably a set of sensitivity values.

[0060] The above description is merely a preferred embodiment of the present invention and is illustrative rather than restrictive. Those skilled in the art will understand that many changes, modifications, and even equivalents can be made within the spirit and scope defined by the claims of the present invention, all of which will fall within the protection scope of the present invention.

Claims

1. A method for detecting air pressure inside a vacuum-encapsulated electric field sensor, characterized in that, Includes the following steps: Obtain the current quality factor value of the electric field sensor under the current set air pressure value, where: Place the electric field sensor in the fixture and evacuate the fixture until the interior reaches the set pressure value. The tooling section inputs the received sweep frequency signal into the electric field sensor and outputs the amplitude signal processed by the electric field sensor. The amplitude signal is analyzed according to the first preset condition, and the multiple first amplitude response values ​​obtained are summarized into a first amplitude response value set. A corresponding first waveform image is generated according to the first amplitude response value set, and the peak interval amplitude signal corresponding to the peak interval is obtained from the first waveform image. The amplitude signal of the peak interval is analyzed according to the second preset conditions, and the multiple second amplitude response values ​​obtained are summarized into a set of second amplitude response values. The corresponding second waveform image is generated according to the set of second amplitude response values. The resonant amplitude and bandwidth are determined based on the second waveform image and the second amplitude response value set to obtain the current quality factor value of the electric field sensor; The current quality factor value is verified against the current set air pressure value to determine whether the current set air pressure value is the same as the air pressure value inside the current electric field sensor, and the determination result is fed back to the packaging process production line.

2. The method for detecting air pressure inside a vacuum-encapsulated electric field sensor according to claim 1, characterized in that, The process of placing the electric field sensor in the fixture and evacuating the fixture to the point where the internal pressure reaches the currently set value includes: The currently set air pressure value is the air pressure value that the electric field sensor is required to achieve after packaging, or the air pressure value that is required when the electric field sensor is evacuated during the packaging process.

3. The method for detecting air pressure inside a vacuum-encapsulated electric field sensor according to claim 2, characterized in that, The process of determining the resonant amplitude and bandwidth value based on the second waveform image and the second amplitude response value set, and obtaining the current quality factor value of the electric field sensor, includes the following steps: The peak value of the resonance amplitude U0, the initial value of the resonance amplitude U1, and the final value of the resonance amplitude U2 are determined from the second waveform image and the second set of amplitude response values. The resonant amplitude f0 is determined by the peak value U0 of the resonant amplitude. The corresponding response value U is determined by the initial value U1 of the resonance amplitude and the final value U2 of the resonance amplitude, respectively. L With corresponding response value U H ; The corresponding response value U L The corresponding response value U H Determine the corresponding amplitude f respectively L With the corresponding amplitude f H ; The current quality factor of the electric field sensor can be obtained using the following formula: ; Where Q is the current quality factor, f0 is the resonance amplitude, and f L For the corresponding amplitude, f H For the corresponding amplitude, f H -f L This represents the bandwidth value.

4. The method for detecting air pressure inside a vacuum-encapsulated electric field sensor according to claim 3, characterized in that, The corresponding response value U is determined by the first value U1 of the resonance amplitude and the last value U2 of the resonance amplitude. L With corresponding response value U H Including: The corresponding response value U is obtained using the following formula. L : ， Wherein, U0 is the peak value of the resonance amplitude, and U1 is the initial value of the resonance amplitude; The corresponding response value U is obtained using the following formula. H : ， Where U0 is the peak value of the resonance amplitude and U2 is the final value of the resonance amplitude.

5. The method for detecting air pressure inside a vacuum-encapsulated electric field sensor according to claim 1, characterized in that, The process of verifying the current quality factor value against the current set air pressure value to determine whether the current set air pressure value is the same as the air pressure value inside the current electric field sensor, and feeding the determination result back to the packaging process line, includes the following two cases: Scenario 1: The current set air pressure value includes a set of quality factor values ​​corresponding to it. When it is determined that the set of quality factor values ​​contains the current quality factor value, it is determined that the current set air pressure value is the same as the air pressure value inside the current electric field sensor, and the determination result is fed back to the packaging process production line. Scenario 2: The current set air pressure value includes a set of corresponding quality factor values. When it is determined that the set of quality factor values ​​does not contain the current quality factor value, it is determined that the current set air pressure value is different from the air pressure value inside the current electric field sensor. After determining the corresponding air pressure value corresponding to the set of quality factors based on the current quality factor value, the corresponding air pressure value is determined to be the air pressure value inside the current electric field sensor. The difference between the current set air pressure value and the corresponding air pressure value is calculated and fed back to the packaging process production line.

6. A detection device for implementing the gas pressure detection method inside the vacuum-encapsulated electric field sensor according to any one of claims 1 to 5, characterized in that, include: At least one tooling component, a vacuum pumping device, a signal input component, and a processing device, wherein: The tooling part includes a sealed cavity and a test tooling. The sealed cavity is used to accommodate the test tooling in which the electric field sensor is placed. The test tooling inputs the power supply signal and the frequency sweep signal output by the signal input part into the electric field sensor and outputs the amplitude signal processed by the electric field sensor. The vacuum pumping device is connected to the sealed cavity and the processing equipment, and evacuates the inside of the sealed cavity to the current set air pressure value input by the processing equipment. The processing device analyzes the amplitude signal according to preset conditions, calculates the current quality factor of the electric field sensor based on the obtained resonant amplitude and bandwidth, and determines whether the current set air pressure value is the same as the air pressure value inside the electric field sensor based on the correspondence between the current quality factor value and the current set air pressure value.

7. The apparatus according to claim 6, characterized in that, The processing device includes a control module, a first analysis module, a first waveform generation module, a second analysis module, a second waveform generation module, a calculation module, and a memory, wherein: The control module is used to input control signals to the signal input section to control the signal input section to generate and output the sweep frequency signal, and to input the current set air pressure value to the vacuum pumping device; The first parsing module is used to parse the amplitude signal input by the tooling part according to the first preset conditions, and summarize the multiple first amplitude response values ​​obtained into a first amplitude response value set; The first waveform generation module is used to generate a corresponding first waveform image based on the first amplitude response value set, and to determine the peak interval amplitude signal corresponding to the peak interval from the first waveform image; The second analysis module is used to analyze the peak interval amplitude signal according to the second preset conditions, and summarize the multiple second amplitude response values ​​obtained into a set of second amplitude response values; The second waveform generation module is used to generate a corresponding second waveform image based on the second amplitude response value set; The calculation module is used to determine the resonant amplitude and bandwidth value based on the second waveform image and the second amplitude response value set, and to obtain the current quality factor value of the electric field sensor. It is also used to determine whether the current set air pressure value is the same as the air pressure value inside the current electric field sensor based on the correspondence between the current quality factor value and the current set air pressure value. The memory stores multiple air pressure values ​​and a set of quality factor values ​​corresponding to each air pressure value.

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