Microscopic system, method for adjusting an afocal system and adjusting device for an optical system

Abstract

The present application provides a kind of alignment method of micro system: first, make second ball and first ball calibration reference optical axis;Second, with objective optical axis and reference optical axis parallel coincidence;Finally, make reference optical axis and tube lens optical axis parallel, equivalent to realize reference optical axis and tube lens optical axis parallel, through the translation tube lens, tube lens optical axis and objective optical axis can be realized coaxial, and improve the precision of micro system optical axis consistency alignment.The present application also provides a kind of alignment method of afocal system: first, make second ball center and first ball all pass through target optical axis;Second, make the optical axis of autocollimator also calibrated to target optical axis;Finally, make afocal system optical axis and target optical axis parallel coincidence, realize afocal system optical axis and target optical axis coaxial, and improve the precision of afocal system optical axis consistency alignment.The present application also provides a kind of alignment device of optical system can guarantee the data consistency of optical system in optical axis consistency alignment.

Description

Technical Field

[0001] This invention relates to the field of optical adjustment, and in particular to a method for adjusting a microscope system and a focusless system, as well as an apparatus for adjusting an optical system. Background Technology

[0002] In an optical system, the optical coaxiality between the various optical modules has a significant impact on the system. Based on the light-gathering characteristics of the optical system, optical systems can be divided into focused optical systems and afocal optical systems.

[0003] Optical microscopy imaging systems are widely used focal optical systems, generally including microscope objectives and imaging tubes. The coaxiality of the optical axes between the objectives and the imaging tubes directly affects the imaging quality of the microscope system, especially in high-resolution microscope imaging systems. Micrometer-level optical axis deviations can lead to a serious decline in imaging quality. Therefore, it is necessary to strictly ensure the coaxiality between the various optical modules in the microscope system during the assembly and adjustment process.

[0004] Traditional methods for assembling and adjusting optical modules in a coaxial configuration involve mounting each optical module in the microscopy system onto machined reference surfaces and reference holes. However, the large tolerances in mechanical assembly significantly impact the final image quality. One approach uses an interferometer to achieve high-precision coaxial alignment and simultaneously monitor the transmitted wavefront. However, interferometers are bulky and generally suitable for assembling small optical modules individually; online alignment is difficult for medium and large optical modules. Another method uses an internal focusing telescope or centering instrument to achieve high-precision coaxial alignment. However, operating an internal focusing telescope requires repeated focusing to find the spherical center image of the lens surface, a complex and time-consuming process. Yet another method involves assembling and adjusting by detecting the spherical center image of the lens surface. This typically uses a vertical rotation method and requires an air-bearing turntable, making it more suitable for assembling small optical modules individually or for coaxial assembly between lenses, but unsuitable for medium and large optical modules. Therefore, for imaging modules in larger microscopy systems, the requirements for high-precision, online alignment, and flexible operation cannot yet be met.

[0005] A focalless optical system is an optical system where both the input and output light are collimated. It typically includes a laser beam expander, beam reducer, and magnifying lens. Focalless systems often serve as relays within the overall optical system, connecting other optical components. Therefore, the optical axis alignment of a transmissive focalless system is crucial to the final performance of the optical system. For example, if the magnifying lens in the imaging system is misaligned with the preceding or following optical imaging modules, it will introduce aberrations such as coma and astigmatism into the final image. Alignment deviations along the optical axis may introduce vignetting, all of which affect the final imaging effect. Therefore, the optical axis consistency of a focalless system is a critical factor in ensuring the imaging quality of the entire optical system.

[0006] As mentioned earlier, traditional methods for assembling and aligning optical modules in a coaxial manner cannot guarantee design requirements. One approach is to use a total station or collimator to achieve precise angle alignment of the afocal system, but these tools have poor accuracy, making it difficult to achieve precise alignment between the afocal system and the existing optical axis. Another method involves using an internal focusing telescope to align the lens positions. This method establishes a reference axis by fixing the internal focusing telescope on an air-bearing turntable, but it requires repeated focusing and observation of the reflected image on the lens surface, a cumbersome and complex process. Therefore, for afocal optical systems, it is currently not possible to precisely align the optical axis of the afocal optical system with the predetermined optical axis of the entire optical system.

[0007] In summary, how to accurately ensure the optical axis consistency of optical systems such as microscopic systems and afocal systems has become one of the technical problems that urgently need to be solved by those skilled in the art.

[0008] It should be noted that the above description of the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of the present invention and facilitating understanding by those skilled in the art. It should not be assumed that the above technical solutions are known to those skilled in the art simply because they have been described in the background section of this invention. Summary of the Invention

[0009] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide a method for assembling and adjusting a microscope system and a focusless system, as well as an assembly and adjustment device for an optical system, to solve the problem that it is difficult to accurately ensure the optical axis consistency of optical systems such as microscope systems and focusless systems in the prior art.

[0010] To achieve the above and other related objectives, the present invention provides a method for assembling and adjusting a microscope system, the method comprising at least the following steps: S1: providing a reference optical axis, an autocollimator, and a first sphere, the center of the first sphere being on the reference optical axis, such that the center of the first sphere is on the optical axis of the autocollimator; providing a second sphere, the second sphere being located between the first sphere and the autocollimator, such that the center of the second sphere also passes through the reference optical axis; the position of the center of the first sphere is a first calibration position, and the position of the center of the second sphere is a second calibration position; S2: moving the first sphere and the second sphere out of the optical path, providing a first plane mirror, the first plane mirror being located on the side of the first sphere away from the autocollimator, such that the first plane mirror is perpendicular to the reference optical axis; S3: Provide an objective lens, which is located in the optical path between the first calibration position and the second calibration position, with the first calibration position located at the focal plane of the objective lens, so that the optical axis of the objective lens is parallel to the reference optical axis; move the first plane mirror out of the optical path and put the first small ball back into the optical path, so that the optical axis of the objective lens coincides with the reference optical axis; S4: Provide a second plane mirror, which is located between the objective lens and the autocollimating device, so that the second plane mirror is perpendicular to the reference optical axis; provide a tube mirror, which is located between the second plane mirror and the second calibration position, put the second small ball back into the optical path, so that the optical axis of the tube mirror is parallel to the optical axis of the objective lens; remove the second plane mirror and the second small ball from the optical path, and put the first plane mirror back into the optical path, so that the optical axis of the tube mirror coincides with the optical axis of the objective lens.

[0011] Optionally, step S1 includes steps S11 and S12; in step S11, the self-collimating device and the first small ball are provided, the self-collimating device emits collimated light, the self-collimating device translates along the X-axis, Y-axis, or Z-axis, and / or rotates around the X-axis, and / or rotates around the Y-axis, so that the center of the first small ball is on the optical axis of the self-collimating device; in step S12, the second small ball is provided, the self-collimating device emits collimated light, the second small ball translates along the X-axis, Y-axis, or Z-axis, and the center of the second small ball is also set on the optical axis of the self-collimating device; wherein, the reference optical axis is defined as the Z-axis, and any two mutually perpendicular lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively.

[0012] Optionally, step S2 includes steps S21, S22, and S23; in step S21, the first and second small balls are moved out of the optical path, the first plane mirror is provided, the autocollimating device emits collimated light, and the first plane mirror rotates about the X-axis and / or about the Y-axis so that the first plane mirror is perpendicular to the reference optical axis; in step S22, the objective lens is provided, the autocollimating device emits focused light, and the autocollimating device translates along the Z-axis so that the focused light is focused at the pupil of the objective lens. In the plane focusing process, the objective lens rotates around the X-axis and / or around the Y-axis to make the optical axis of the objective lens parallel to the reference optical axis; in step S23, the first plane mirror is moved out of the optical path and the first small ball is placed back into the optical path, the self-collimating device emits collimated light, and the objective lens translates along the X-axis, Y-axis, or Z-axis to make the optical axis of the objective lens coincide with the reference optical axis; wherein, the reference optical axis is defined as the Z-axis, and any two mutually perpendicular lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively.

[0013] Optionally, step S3 includes steps S31, S32, and S33; in step S31, a second plane mirror is provided, the first small ball is moved out of the optical path, collimated light is emitted from the autocollimating device, and the second plane mirror is rotated about the X-axis and / or about the Y-axis so that the second plane mirror is perpendicular to the reference optical axis; in step S32, the tube mirror is provided, the second small ball is placed back into the optical path, focused light is emitted from the autocollimating device, and the autocollimating device is translated along the Z-axis so that the focused light is focused on the sphere of the second small ball. In step S33, the first plane mirror and the second small ball are removed from the optical path, and the first plane mirror is placed back into the optical path. The self-collimating device emits collimated light, and the lens is translated along the X-axis, Y-axis, or Z-axis so that the optical axis of the objective lens and the optical axis of the lens are coaxial. The reference optical axis is defined as the Z-axis, and any two mutually perpendicular lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively.

[0014] Optionally, the assembly and adjustment method of the microscopic system further includes step S4: removing the first plane mirror from the optical path and placing the first sphere and the second sphere back into the optical path, so that the autocollimated image of the first sphere meets the target accuracy requirements.

[0015] To achieve the above and other related objectives, the present invention also provides a method for assembling and adjusting a focusless system, the method comprising at least the following steps: S1: providing a target optical axis, an autocollimator, and a first small ball, the center of the first small ball being on the target optical axis, and the autocollimator focusing the image onto the center of the first small ball; providing a second small ball, the second small ball being located between the autocollimator and the first small ball, and the center of the second small ball also being on the target optical axis; the position of the center of the first small ball being a first calibration position, and the position of the center of the second small ball being a second calibration position; S2: the autocollimator reflecting the image onto the second small ball and the first small ball. S3: A plane mirror is provided, located in the optical path away from the first ball and away from the autocollimator, so that the plane mirror is perpendicular to the target optical axis; an afocal system is provided, located in the optical path between the first calibration position and the second calibration position, with the first calibration position located at the entrance pupil of the afocal system and the second calibration position located at the exit pupil of the afocal system, so that the optical axis of the afocal system is parallel to the target optical axis; the plane mirror is removed from the optical path, and the first ball and the second ball are returned to the optical path, so that the optical axis of the afocal system is coaxial with the target optical axis.

[0016] Optionally, step S1 includes steps S11 and S12; in step S11, the autocollimating device and the first small ball are provided, the autocollimating device emits focused light, the autocollimating device translates along the X-axis, Y-axis, or Z-axis, and / or rotates around the X-axis, and / or rotates around the Y-axis, so that the autocollimating device focuses on the center of the first small ball; in step S12, the second small ball is provided, the autocollimating device emits focused light, the second small ball translates along the X-axis, Y-axis, or Z-axis, so that the autocollimating device also focuses on the center of the second small ball, so that the center of the second small ball is also on the target optical axis; wherein, the target optical axis is positioned as the Z-axis, and any two mutually perpendicular straight lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively.

[0017] Optionally, step S2 includes steps S21, S22, and S23; in step S21, the autocollimating device emits collimated light, and the autocollimating device translates along the X-axis, Y-axis, or Z-axis so that the center of the second ball passes through the optical axis of the autocollimating device; in step S22, the second ball is removed from the optical path, the autocollimating device emits collimated light, and the autocollimating device rotates around the X-axis and / or around the Y-axis so that the center of the first ball passes through the optical axis of the autocollimating device; in step S23, steps S21 and S22 are repeated until the optical axis of the autocollimating device coincides with the target optical axis; wherein, the target optical axis is positioned as the Z-axis, and any two mutually perpendicular straight lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively.

[0018] Optionally, step S3 includes steps S31, S32, and S33; in step S31, the plane mirror is provided, the first and second small balls are removed from the optical path, the autocollimating device emits collimated light, and the plane mirror rotates about the X-axis and / or about the Y-axis, such that the plane mirror is perpendicular to the target optical axis; in step S32, the afocal system is provided, the autocollimating device emits collimated light, and the afocal system rotates about the X-axis and / or about the Y-axis, such that the optical axis of the afocal system is aligned with the target. The optical axes are parallel; in step S33, the plane mirror is removed from the optical path, the first and second small balls are placed back into the optical path, the collimating device emits focused light, the collimating device is translated along the Z-axis to focus the focused light onto the center of the second small ball, the second small ball is removed from the optical path, and the afocal system is translated along the X-axis, Y-axis or Z-axis to make the optical axis of the afocal system coaxial with the target optical axis; wherein, the target optical axis is positioned on the Z-axis, and any two mutually perpendicular straight lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis respectively.

[0019] To achieve the above and other related objectives, the present invention also provides an optical system assembly and adjustment device for implementing the aforementioned microscopic system assembly and adjustment method or the aforementioned afocal system assembly and adjustment method. The optical system assembly and adjustment device includes at least: a parallel guide rail and a tooling system; the tooling system is disposed on the parallel guide rail and is used to establish a three-dimensional XYZ coordinate system, and to adjust the position of devices mounted on the parallel guide rail based on the XYZ three-dimensional coordinate system; the autocollimator, first sphere, second sphere, first plane mirror, second plane mirror, and microscopic system used in the microscopic system assembly and adjustment method are all mounted on the parallel guide rail; or, the autocollimator, first sphere, second sphere, plane mirror, and afocal system used in the afocal system assembly and adjustment method are all mounted on the parallel guide rail.

[0020] As described above, the assembly and adjustment method of the microscope system, the focusless system, and the assembly and adjustment device of the optical system of the present invention have the following features:

[0021] Beneficial effects:

[0022] 1. This invention achieves optical axis parallelism adjustment by first rotating the optical system to be adjusted around the coordinate axis, and then translating the optical system along the coordinate axis. This can greatly accelerate the efficiency of optical axis consistency adjustment and improve the accuracy of optical axis consistency adjustment.

[0023] 2. The assembly and adjustment method of the microscope system of the present invention first aligns the optical axis of the objective lens with the optical axis of the reference lens. During the calibration of the tube lens, the optical axis of the tube lens is made parallel to the optical axis of the reference lens, thus cleverly achieving the parallelism of the optical axis of the tube lens and the optical axis of the objective lens. On this basis, the tube lens can be translated to achieve the coaxiality of the tube lens and the objective lens. Therefore, the present invention can reduce the difficulty of coaxial adjustment of the microscope system and improve the accuracy of coaxial adjustment.

[0024] 3. The assembly and adjustment method of the afocal system of the present invention first calibrates the target optical axis using the first and second small balls, and then calibrates the target optical axis using the optical axis of the autocollimation device. By utilizing the connection established between the two small balls, the autocollimation optical axis and the target optical axis, the present invention can make the afocal system parallel to the target optical axis based on the autocollimation image of the plane mirror, and then make the afocal system coaxial with the target optical axis based on the autocollimation image of the first small ball. Therefore, the present invention can reduce the difficulty of coaxial adjustment of the afocal system and improve the accuracy of coaxial adjustment.

[0025] 4. The optical system assembly and adjustment device of the present invention can ensure the consistency of the assembled optical system, thereby ensuring the industrial quality of the assembled optical system during mass production and improving the industrial productivity of optical system assembly and adjustment. Attached Figure Description

[0026] Figure 1 The diagram shows the focused light emitted from the self-collimating device of the present invention.

[0027] Figure 2 The diagram shows a schematic of the collimated light emitted from the self-collimating device of the present invention.

[0028] Figure 3 The diagram shown is a flowchart illustrating the assembly and adjustment method of the microscope system of the present invention.

[0029] Figure 4 The diagram shows the optical path of step S11 of the assembly and adjustment method of the microscope system of the present invention.

[0030] Figure 5 The diagram shows the optical path of step S12 of the assembly and adjustment method of the microscope system of the present invention.

[0031] Figure 6The diagram shows the optical path of step S21 of the assembly and adjustment method of the microscope system of the present invention.

[0032] Figure 7 The diagram shows the optical path of step S22 of the assembly and adjustment method of the microscope system of the present invention.

[0033] Figure 8 The diagram shows the optical path of step S23 of the assembly and adjustment method of the microscope system of the present invention.

[0034] Figure 9 The diagram shows the optical path of step S31 of the assembly and adjustment method of the microscope system of the present invention.

[0035] Figure 10 The diagram shows the optical path of step S32 of the assembly and adjustment method of the microscope system of the present invention.

[0036] Figure 11 The diagram shows the optical path of step S33 of the assembly and adjustment method of the microscope system of the present invention.

[0037] Figure 12 The diagram shows the optical path of step S4 in the assembly and adjustment method of the microscope system of the present invention.

[0038] Figure 13 The diagram shown is a flowchart illustrating the assembly and adjustment method of the coke-free system of the present invention.

[0039] Figure 14 The diagram shows the optical path of step S11 of the assembly and adjustment method of the focusless system of the present invention.

[0040] Figure 15 The diagram shows the optical path of step S12 of the assembly and adjustment method of the focusless system of the present invention.

[0041] Figure 16 The diagram shows the optical path of step S21 of the assembly and adjustment method of the focusless system of the present invention.

[0042] Figure 17 The diagram shows the optical path of step S22 of the assembly and adjustment method of the focusless system of the present invention.

[0043] Figure 18 The diagram shows the optical path of step S31 of the assembly and adjustment method of the focusless system of the present invention.

[0044] Figure 19 The diagram shows the optical path of step S32 of the assembly and adjustment method of the focusless system of the present invention.

[0045] Figure 20 The diagram shows the optical path of step S33 of the assembly and adjustment method of the focusless system of the present invention.

[0046] Figure 21 The diagram shown is a structural schematic of the assembly and adjustment device of the optical system of the present invention.

[0047] Component designation explanation

[0048] 1. Autocollimation device

[0049] 2. First ball

[0050] 3. The second ball

[0051] 4 First plane mirror

[0052] 5. Objective lens

[0053] 6. Second plane mirror

[0054] 7. Endoscope

[0055] 8. Plane mirror

[0056] 9. Coke-free system Detailed Implementation

[0057] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0058] Please see Figures 1-21 It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0059] Traditional methods struggle to achieve precise optical axis alignment in both microscopic and afocal systems. Given the generally poor accuracy of these methods, this invention provides an alignment method that utilizes the conjugate properties between the object and image during imaging with an autocollimator to calibrate the optical axes of both systems, enabling precise optical axis alignment adjustments. An autocollimator typically includes components such as a collimating light source, a converging lens, a beam splitter, and a detector. Figure 1 As shown, when the converging lens is located at the exit port within the autocollimator, the autocollimator can emit focused light, such as... Figure 2As shown, when the converging lens is removed from the exit port of the autocollimator, the autocollimator can emit collimated light. Therefore, by removing and installing the converging lens, the operating mode of the autocollimator can be switched. The conjugate characteristic between the object and the image refers to the fact that when the autocollimated image obtained inside the autocollimator is located on the optical axis of the autocollimator, the object forming the autocollimated image in the autocollimator is also located on the optical axis of the autocollimator. Based on the above principle, the specific implementation scheme of this invention is as follows:

[0060] Example 1

[0061] like Figure 3 As shown, this embodiment provides a method for assembling and adjusting a microscope system, including the following steps:

[0062] like Figure 3 As shown, in step S1, a reference optical axis, an autocollimation device 1, and a first ball 2 are provided. The center of the first ball 2 is on the reference optical axis, so that the center of the first ball 2 is on the optical axis of the autocollimation device 1. A second ball 3 is provided, which is located between the first ball 2 and the autocollimation device 1, so that the center of the second ball 3 is also on the reference optical axis. The position of the center of the first ball 2 is the first calibration position, and the position of the center of the second ball 3 is the second calibration position.

[0063] Specifically, in this embodiment, the reference optical axis is defined as the Z-axis, and any two mutually perpendicular lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively. The X-axis, Y-axis, and Z-axis can establish a three-dimensional coordinate system. Through the three-dimensional coordinate system, various optical devices can be more precisely controlled, achieving precise optical adjustment. Furthermore, both the first sphere 2 and the second sphere 3 have relatively perfect spherical surfaces, capable of reflecting relatively perfect spherical waves, thus forming an accurate autocollimated image in the autocollimating device. Moreover, the diameters of both the first sphere 2 and the second sphere 3 are larger than the collimating light diameter of the autocollimating device, so the conjugate characteristics of the autocollimating device 1 can be strictly guaranteed, and the error during adjustment can be reduced, improving the accuracy of adjustment. As an example, both the first sphere 2 and the second sphere 3 are made of high-precision stainless steel or silicon carbide, with a precision of grade 5 or higher. In practical applications, any material that can provide reflection and whose reflected wave is a relatively perfect sphere can be used to make the first sphere 2 and the second sphere 3, not limited to this embodiment.

[0064] Specifically, in this embodiment, in step S11, as follows: Figure 4As shown, an autocollimation device 1 and a first sphere 2 are provided. The autocollimation device 1 emits collimated light, which is directed towards and reflected by the first sphere 2. The autocollimation device 1 can obtain an autocollimated image of the first sphere 2. The autocollimation device 1 is translated along the X-axis, Y-axis, or Z-axis, and / or rotated around the X-axis, and / or rotated around the Y-axis. When the position of the autocollimated image of the center of the first sphere 2 in the autocollimation device 1 remains unchanged and coincides with the reference point of the autocollimation device 1, it is considered that the center of the first sphere 2 is also on the optical axis of the autocollimation device 1. The reference point in the autocollimation device 1 refers to the reference point on the detector in the autocollimation device 1, and the reference point in the autocollimation device 1 is on the optical axis of the autocollimation device 1.

[0065] Specifically, in this embodiment, in step S12, as follows: Figure 5 As shown, a second sphere 3 is provided. Collimated light is emitted from the autocollimation device 1. The collimated light is directed towards the second sphere 3 and reflected by the second sphere 3. The autocollimation device 1 obtains an autocollimated image of the second sphere 3. By translating the second sphere 3 along the X-axis, Y-axis, or Z-axis, when the position of the autocollimated image of the center of the second sphere 3 in the autocollimation device 1 remains unchanged and coincides with the reference point in the autocollimation device 1, it is considered that the center of the second sphere 3 is also on the optical axis of the autocollimation device. During this process, since the position of the autocollimation device 1 remains unchanged, the centers of the first sphere 2 and the second sphere 3 are both on the reference optical axis. The reference optical axis can be calibrated by the first sphere 2 and the second sphere 3 so that the objective lens 5 and the tube lens 7 can be adjusted to the reference optical axis, thereby achieving coaxiality of the microscope system.

[0066] like Figure 3 As shown, in step S2, the first ball 2 and the second ball 3 are removed from the optical path, and a first plane mirror 4 is provided. The first plane mirror 4 is located on the side of the first ball 2 away from the autocollimator 1, so that the first plane mirror 4 is perpendicular to the reference optical axis. An objective lens 5 is provided, which is located in the optical path between the first calibration position and the second calibration position, and the first calibration position is located at the focal plane of the objective lens 5, so that the optical axis of the objective lens 5 is parallel to the reference optical axis. The first plane mirror 4 is removed from the optical path, and the first ball 2 is placed back into the optical path, so that the optical axis of the objective lens 5 coincides with the reference optical axis.

[0067] Specifically, in this embodiment, in step S21, as follows: Figure 6As shown, the first ball 2 and the second ball 3 are removed from the optical path, and the first plane mirror 4 is placed in the optical path. The first plane mirror 4 is farther away from the autocollimator 1 than the first ball 2. After removing the first ball 2 and the second ball 3 from the optical path, the autocollimator 1 emits collimated light, which is directed towards the first plane mirror 4 and reflected by the first plane mirror 4. The autocollimator 1 obtains the autocollimated image of the first plane mirror 4, which exhibits star-like characteristics. The first plane mirror 4 is rotated around the X-axis and / or around the Y-axis. When the autocollimated image of the first plane mirror 4 coincides with the reference point of the autocollimator 1, it is considered that the first plane mirror 4 is perpendicular to the optical axis of the autocollimator 1 at this time. Since the position of the autocollimator 1 remains unchanged at this time, it is considered that the first plane mirror 4 is perpendicular to the reference optical axis.

[0068] Specifically, in this embodiment, in step S22, as follows: Figure 7 As shown, objective lens 5 is placed in the optical path, and the center of the first small ball 2 is located at the focal plane of the objective lens. Focused light is emitted from the autocollimating device 1, which is directed towards objective lens 5 and transmitted to the first plane mirror 4. After being reflected by the first plane mirror 4, the autocollimating device 1 obtains the autocollimated image of the first plane mirror 4. The autocollimating device 1 is translated along the Z-axis, and the focused light is focused on the pupil plane of objective lens 5. Then, objective lens 5 is rotated around the X-axis and / or around the Y-axis. When the autocollimated image of the first plane mirror 4 coincides with the reference point of the autocollimating device 1, it is considered that the optical axis of objective lens 5 is perpendicular to the first plane mirror 4, that is, the optical axis of objective lens 5 is parallel to the reference optical axis.

[0069] Specifically, in this embodiment, in step S23, as follows: Figure 8 As shown, the first plane mirror 4 is removed from the optical path, and the first small ball 2 is placed back into the optical path. Collimated light is emitted from the collimating device 1, which then strikes the objective lens 5 and is transmitted to the first small ball 2. After reflection by the first small ball 2, the collimating device 1 obtains the autocollimated image of the first small ball 3. The objective lens 5 is translated along the X-axis, Y-axis, or Z-axis. When the autocollimated image of the center of the first small ball 3 coincides with the reference point of the autocollimating device 1, it is considered that the optical axis of the objective lens 5 coincides with the reference optical axis traversed by the center of the first small ball 2. Furthermore, during the objective lens adjustment process, such as... Figure 7 As shown, first rotate objective lens 5 around the X-axis and / or around the Y-axis, as follows: Figure 8 As shown, objective lens 5 is then translated along the X, Y, or Z axis. The purpose is to first make the optical axis of the objective lens parallel to the reference optical axis, and then achieve optical axis coincidence through translation, which can greatly improve the accuracy of adjustment. In practical applications, the specific method of objective lens 5 assembly and adjustment can be selected according to needs, and is not limited to this embodiment.

[0070] like Figure 1As shown, in step S3, a second plane mirror 6 is provided, which is located between the objective lens 5 and the autocollimating device 1, so that the second plane mirror 6 is perpendicular to the reference optical axis; a tube mirror 7 is provided, which is located between the second plane mirror 6 and the second calibration position; the second ball 3 is returned to the optical path, so that the optical axis of the tube mirror 7 is parallel to the optical axis of the objective lens 5; the second plane mirror 6 and the second ball 3 are removed from the optical path, and the first plane mirror 4 is returned to the optical path, so that the optical axis of the tube mirror 7 coincides with the optical axis of the objective lens 5.

[0071] Specifically, in this embodiment, in step S31, as follows: Figure 9 As shown, the first ball 2 is removed from the optical path, and the second plane mirror 6 is placed in the optical path. Collimated light is emitted from the autocollimating device 1, and the collimated light is directed towards the second plane mirror 6 and reflected by the second plane mirror 6. The autocollimating device 1 obtains the autocollimated image of the second plane mirror 6. The second plane mirror 6 is rotated around the X-axis and / or around the Y-axis. When the autocollimated image of the second plane mirror 6 coincides with the reference point of the autocollimating device 1, it is considered that the second plane mirror 6 is perpendicular to the optical axis of the autocollimating device 1 at this time. Since the autocollimating device 1 is always performing translational motion, it is considered that the second plane mirror 6 is perpendicular to the reference optical axis.

[0072] Specifically, in this embodiment, in step S32, as follows: Figure 10 As shown, the second ball 3 is placed back into the optical path, and the tube lens 7 is placed in the optical path. The autocollimating device 1 emits focused light, and the autocollimating device 1 is translated along the Z-axis so that the focused light is focused at the center of the second ball 3. The second ball 3 is removed from the optical path, and the focused light is transmitted sequentially to the tube lens 7 and the second plane mirror 6 and reflected by the second plane mirror 6. The autocollimating device 1 obtains the autocollimated image of the second plane mirror 6. By rotating the tube lens 7 around the X-axis and / or around the Y-axis, when the autocollimated image of the second plane mirror 6 coincides with the reference point in the autocollimating device 1, it is considered that the optical axis of the tube lens is perpendicular to the second plane mirror 6, that is, the optical axis of the tube lens is parallel to the reference optical axis where the objective lens is located.

[0073] Specifically, in this embodiment, in step S33, as follows: Figure 11 As shown, the second plane mirror 6 and the second small ball 3 are removed from the optical path, and the first plane mirror 4 is placed back into the optical path. Collimated light is emitted from the collimating device 1, directed towards the tube mirror 7, and transmitted to the objective lens 5 and the first plane mirror 4. After reflection by the first plane mirror 4, the collimating device 1 obtains the autocollimated image of the first plane mirror 4. The tube mirror 7 is translated along the X-axis, Y-axis, or Z-axis. When the autocollimated image of the first plane mirror 4 coincides with the reference point of the collimating device 1, it is considered that the optical axis of the tube mirror coincides with the reference optical axis of the objective lens. Furthermore, during the objective lens adjustment process, such as... Figure 10 As shown, first rotate the endoscope 7 around the X-axis and / or around the Y-axis, as follows: Figure 11As shown, the scope 7 is then translated along the X, Y, or Z axis. The purpose is to first make the optical axis of the scope parallel to the reference optical axis where the objective lens is located, and then achieve optical axis coincidence through translation, which can greatly improve the accuracy of adjustment. In practical applications, the specific method of mounting and adjusting the scope 7 can be selected according to the needs, and is not limited to this embodiment.

[0074] Specifically, in this embodiment, such as Figure 12 As shown, the assembly and adjustment method of the microscope system also includes step S4: removing the first plane mirror 4 from the optical path, placing the first small ball 2 and the second small ball 3 back into the optical path, emitting focused light from the autocollimating device 1, and having the focused light pass sequentially through the second small ball 3, the tube mirror 7, and the objective lens 5 to reach the first small ball 2 and be reflected by the first small ball 2. The autocollimating device 1 obtains the autocollimated image of the first small ball 2. By translating or rotating the objective lens 5 and / or translating or rotating the tube mirror 7, when it is observed that the autocollimated image of the first small ball 2 meets the target accuracy requirements of the star point test, it is considered that the accuracy of the coaxial adjustment of the objective lens 5 and the tube mirror 7 has also met the target requirements. Therefore, the accuracy of the optical axis adjustment of the microscope system can be improved through step S4.

[0075] It should be noted that, because the incident light direction during actual use of the microscope system is opposite to that during assembly and adjustment, the objective lens 5 is farther from the autocollimator than the tube lens 7, and the focal plane of the objective lens is farther from the autocollimator than the image plane of the tube lens. Furthermore, since the first sphere 2 and the second sphere 3 serve as objects that can be actually adjusted to calibrate the reference optical axis, the conjugate characteristic of the autocollimator 1 can be used to align the objective optical axis with the reference optical axis. In addition, by making the reference optical axis parallel to the tube lens optical axis, the parallelism of the tube lens optical axis and the objective lens optical axis is cleverly achieved equivalently, which greatly reduces the difficulty of coaxial adjustment, realizes coaxiality between the tube lens optical axis and the objective lens optical axis, and improves the accuracy of coaxial adjustment of the microscope system's optical axes.

[0076] Example 2

[0077] like Figure 13 As shown, this embodiment provides a method for assembling and adjusting a coke-free system, including the following steps:

[0078] like Figure 13 As shown, in step S1, a target optical axis, an autocollimation device 1, and a first ball 2 are provided. The center of the first ball 2 passes through the target optical axis, so that the autocollimation device 1 focuses on the center of the first ball 2. A second ball 3 is provided, which is located between the autocollimation device 1 and the first ball 2, so that the center of the second ball 3 is also on the target optical axis. The position of the center of the first ball 2 is the first calibration position, and the position of the center of the second ball 3 is the second calibration position.

[0079] Specifically, in this embodiment, the target optical axis is defined as the Z-axis, and any two mutually perpendicular lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively. The X-axis, Y-axis, and Z-axis can establish a three-dimensional coordinate system. Through the three-dimensional coordinate system, various optical devices can be more precisely controlled, achieving precise optical adjustment. Furthermore, both the first sphere 2 and the second sphere 3 have relatively perfect spherical surfaces, capable of reflecting relatively perfect spherical waves, thus forming an accurate self-collimated image in the self-collimating device. Moreover, the diameters of both the first sphere 2 and the second sphere 3 are larger than the collimating light diameter of the self-collimating device, so the conjugate characteristics of the self-collimating device can be strictly guaranteed, and the error during adjustment can be reduced, improving the accuracy of adjustment. As an example, both the first sphere 2 and the second sphere 3 are made of high-precision stainless steel or silicon carbide, with a precision of grade 5 or higher. In practical applications, any material that can provide reflection and whose reflected wave is a relatively perfect sphere can be used to make the first sphere 2 and the second sphere 3, not limited to this embodiment.

[0080] Specifically, in this embodiment, in step S11, as follows: Figure 14 As shown, an autocollimation device 1 and a first sphere 2 are provided. The autocollimation device 1 emits focused light, which is directed toward the first sphere 2 and reflected by the first sphere 2. The autocollimation device 1 obtains an autocollimated image of the first sphere 2. By translating the autocollimation device 1 along the X-axis, Y-axis, or Z-axis, and / or rotating it around the X-axis, and / or rotating it around the Y-axis, when the autocollimated image of the center of the first sphere 2 coincides with the reference point of the autocollimation device 1, it is considered that the emitted light from the autocollimation device 1 is focused onto the center of the first sphere 2.

[0081] Specifically, in this embodiment, in step S12, as follows: Figure 15 As shown, a second sphere 3 is provided. Focused light is emitted from the autocollimation device 1. The focused light is directed towards the second sphere 3 and reflected by the second sphere 3. The autocollimation device obtains an autocollimated image of the second sphere 3. By translating the second sphere 3 along the X-axis, Y-axis, or Z-axis, when the autocollimated image of the center of the second sphere 3 coincides with the reference point of the autocollimation device, it is considered that the emitted light from the autocollimation device 1 is also focused on the center of the second sphere 3. Since the position of the autocollimation device 1 does not change during this process, the center of the second sphere 3 is also marked on the target optical axis.

[0082] like Figure 13 As shown, in step S2, the autocollimating device 1 repeatedly switches between the second ball 3 and the first ball 2, so that the optical axis of the autocollimating device 1 coincides with the optical axis of the target.

[0083] Specifically, in this embodiment, in step S21, as follows: Figure 16As shown, collimated light is emitted from the autocollimating device 1, directed towards the second sphere 3, and reflected by the second sphere 3. The autocollimating device obtains an autocollimated image of the second sphere 3. The autocollimating device 1 is translated along the X-axis, Y-axis, or Z-axis. When the autocollimated image of the center of the second sphere 3 coincides with the reference point of the autocollimating device 1, it is considered that the center of the second sphere 3 passes through the optical axis of the autocollimating device 1 at this time. Further, as... Figure 17 As shown, the second ball 3 is removed from the optical path, and collimated light is emitted from the collimator 1. This collimated light is directed towards the first ball 2 and reflected by it. The collimator 1 obtains a collimated image of the first ball 2. By rotating the collimator 1 about the X-axis and / or about the Y-axis, when the collimated image of the center of the first ball 2 coincides with the reference point of the collimator 1, it is considered that the center of the first ball 2 passes through the optical axis of the collimator 1 at this time. Furthermore, since in Figure 17 If the position of the autocollimator 1 changes, then it needs to be adjusted back. Figure 16 After passing through the optical path, the center of the second ball 3 will deviate from the optical axis of the autocollimator 1, therefore it needs to be repeated. Figure 16 The required steps and Figure 17 The required steps continue until, with the position of the autocollimator 1 unchanged, the autocollimated images of the centers of the first ball 2 and the second ball 3 both coincide with the reference point of the autocollimator 1. At this point, it is considered that the optical axis of the autocollimator 1 has passed through the centers of the first ball and the second ball simultaneously, that is, the optical axis of the autocollimator 1 coincides with the target optical axis.

[0084] like Figure 13 As shown, in step S3, a plane mirror 8 is provided, which is located in the optical path away from the first ball 2 and away from the autocollimator 1, so that the plane mirror 8 is perpendicular to the target optical axis; an afocal system 9 is provided, which is located in the optical path between the first calibration position and the second calibration position, with the first calibration position located at the entrance pupil of the afocal system 9 and the second calibration position located at the exit pupil of the afocal system 9, so that the optical axis of the afocal system 9 is parallel to the target optical axis; the plane mirror 8 is removed from the optical path, and the first ball 2 and the second ball 3 are placed back into the optical path, so that the optical axis of the afocal system 9 is coaxial with the target optical axis.

[0085] Specifically, in this embodiment, in step S31, as follows: Figure 18 As shown, the first ball 2 and the second ball 3 are removed from the optical path, and a plane mirror 8 is provided. The plane mirror 8 is farther away from the autocollimator 1 than the first ball 2. The autocollimator 1 emits collimated light, which is directed at the plane mirror 8 and reflected by the plane mirror 8. The autocollimator 1 obtains the autocollimated image of the plane mirror 8. The plane mirror 8 is rotated around the X-axis and / or around the Y-axis. When the autocollimated image of the plane mirror 8 coincides with the reference point of the autocollimator 1, it is considered that the plane mirror 8 is perpendicular to the optical axis of the autocollimator 1 at this time, that is, the plane mirror 8 is perpendicular to the target optical axis.

[0086] Specifically, in this embodiment, in step S32, as follows: Figure 19 As shown, an afocal system 9 is provided. The autocollimating device 1 emits collimated light, which is directed towards the afocal system 9 and transmitted to the plane mirror 8. After being reflected by the plane mirror 8, the autocollimating device 1 obtains the autocollimated image of the plane mirror 8. The afocal system 9 is rotated around the X-axis and / or around the Y-axis. When the autocollimated image of the plane mirror 8 coincides with the reference point of the autocollimating device 1, it is considered that the optical axis of the afocal system 9 is perpendicular to the plane mirror, that is, the optical axis of the afocal system 9 is also parallel to the target optical axis.

[0087] Specifically, in this embodiment, in step S33, as follows: Figure 20 As shown, the plane mirror 8 is removed from the optical path, and the first ball 2 and the second ball 3 are placed back into the optical path. Focused light is emitted from the autocollimating device 1, which is then translated along the Z-axis to focus the light onto the center of the second ball 3. The second ball 3 is then removed from the optical path, and the focused light is sequentially transmitted to the afocal system 9 and the first ball 2, and reflected by the first ball 2. The autocollimating device 1 obtains the autocollimated image of the first ball 2. The afocal system 9 is translated along the X-axis, Y-axis, or Z-axis. When the autocollimated image of the center of the first ball 2 coincides with the reference point of the autocollimating device 1, it is considered that the optical axis of the afocal system 9 coincides with the target optical axis traversed by the first ball 2, thus achieving coaxiality between the optical axis of the afocal system 9 and the target optical axis. Furthermore, during the debugging process of the afocal system 9, as... Figure 19 As shown, first rotate the focusless system 9 about the X-axis and / or about the Y-axis, as follows: Figure 20 As shown, the afocal system 9 is then translated along the X, Y, or Z axis. The purpose is to first make the optical axis of the afocal system 9 parallel to the target optical axis, and then achieve optical axis coincidence through translation, which can greatly improve the accuracy of the adjustment. In practical applications, the specific method of assembling and adjusting the afocal system 9 can be selected according to the needs, and is not limited to this embodiment.

[0088] It should be noted that, since the incident light direction of the afocal system 9 during actual use is opposite to that during the assembly and adjustment process, the entrance pupil of the afocal system 9 is farther from the autocollimator than the exit pupil. Furthermore, since the first ball 2 and the second ball 3, as objects for actual adjustment, can calibrate the target optical axis, and the autocollimator 1, as an object that can be actually adjusted, can calibrate the target optical axis again, this embodiment can, through the first ball 2, the second ball 3, and the autocollimator 1, first achieve parallelism between the optical axis of the afocal system and the target optical axis, and then achieve coincidence between the optical axis of the afocal system and the target optical axis, greatly reducing the difficulty of coaxial optical axis adjustment and improving the accuracy of afocal system optical axis consistency adjustment.

[0089] It should be further explained that the first ball 2, the second ball 3, and the autocollimation device 1 used in this embodiment can be the same as or different from the first ball 2, the second ball 3, and the autocollimation device 1 in Embodiment 1. The first ball 2 and the second ball 3 can be highly symmetrical spheres, and the autocollimation device 1 can emit focused light and collimated light, and satisfy the conjugate characteristics between the object and the image. No specific restrictions are imposed here.

[0090] Example 3

[0091] like Figure 21 As shown, this embodiment provides an assembly and adjustment device for an optical system, including a parallel guide rail and an adjustment system.

[0092] like Figure 21 As shown, the adjustment system is set on the parallel guide rail to establish a three-dimensional coordinate system of XYZ, and to adjust the position of the device mounted on the parallel guide rail based on the three-dimensional coordinate system of XYZ.

[0093] Specifically, in this embodiment, the autocollimator 1, the first small ball 2, the second small ball 3, the first plane mirror 4, the second plane mirror 6, and the microscope system used in the assembly and adjustment method of the microscope system can all be mounted on a parallel guide rail. The reference optical axis can be set to the direction of the parallel guide rail, thus facilitating the movement of each component in the Z-axis direction and improving adjustment efficiency. In practical applications, the specific mechanical structure of the parallel guide rail can be selected as needed, without specific limitations. Furthermore, the adjustment system can perform translation along the X-axis, Y-axis, or Z-axis, and / or rotation around the X-axis, and / or rotation around the Y-axis on each component mounted on the parallel guide rail, achieving multi-dimensional adjustment of the components mounted on the parallel guide rail. In practical applications, the specific mechanical structure of the adjustment system can be selected as needed, without specific limitations. Even further, the assembly and adjustment device of the optical system can ensure data consistency when the assembled microscope system is coaxial with the target optical axis, improving industrial productivity.

[0094] Specifically, in this embodiment, the autocollimator 1, the first ball 2, the second ball 3, the plane mirror 8, and the afocal system 9 used in the assembly and adjustment method of the afocal system can all be mounted on a parallel guide rail. The target optical axis can be set to the direction of the parallel guide rail, which facilitates the movement of each component in the Z-axis direction, improving adjustment efficiency. In practical applications, the specific mechanical structure of the parallel guide rail can be selected as needed, without specific limitations. Furthermore, the adjustment system can perform translation on the X-axis, Y-axis, or Z-axis, and / or rotation around the X-axis, and / or rotation around the Y-axis on each component mounted on the parallel guide rail. In practical applications, the specific mechanical structure of the adjustment system can be selected as needed, without specific limitations. Even further, the assembly and adjustment device of the optical system can ensure data consistency when the assembled and adjusted afocal system is coaxial with the target optical axis, improving industrial productivity.

[0095] It should be noted that the optical system assembly and adjustment device of this embodiment can be used to implement the microscopic system assembly and adjustment method of Embodiment 1, the afocal system assembly and adjustment method of Embodiment 2, and other microscopic systems or afocal systems assembly and adjustment methods. No specific limitations are made here.

[0096] In summary, the assembly and adjustment method of the microscope system of the present invention is as follows: First, the centers of the second sphere and the first sphere are both aligned with the reference optical axis; second, the objective optical axis is aligned with the reference optical axis by using the first plane mirror and the first sphere; finally, the reference optical axis is aligned with the tube lens optical axis by using the second plane mirror and the second sphere, which is equivalent to achieving parallelism between the reference optical axis and the tube lens optical axis. By translating the tube lens, the coaxiality of the tube lens optical axis and the objective optical axis can be achieved, thereby improving the accuracy of the optical axis consistency assembly and adjustment of the microscope system. The assembly and adjustment method of the afocal system of the present invention is as follows: First, the centers of the second and first small spheres are both made to pass through the target optical axis; second, the optical axis of the autocollimation device is also calibrated to the target optical axis; finally, the self-collimated image of the plane mirror is used to make the optical axis of the afocal system parallel to the target optical axis, and then the first and second small spheres are used to make the optical axis of the afocal system coincide with the target optical axis, thereby achieving coaxiality between the optical axis of the afocal system and the target optical axis and improving the accuracy of the optical axis consistency assembly and adjustment of the afocal system. The assembly and adjustment device of the optical system of the present invention can realize the assembly and adjustment method of a microscope system or afocal system, and ensure the data consistency of the optical system during optical axis consistency assembly and adjustment. In addition, the present invention also has the advantages of online assembly and adjustment, and convenience and speed. Therefore, the present invention effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0097] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A method for assembling and adjusting a microscopic system, characterized in that, The assembly and adjustment method of the microscope system includes at least the following steps: S1: Provide a reference optical axis, an autocollimation device, and a first sphere, the center of the first sphere being on the reference optical axis, such that the center of the first sphere is on the optical axis of the autocollimation device; provide a second sphere, the second sphere being located between the first sphere and the autocollimation device, such that the center of the second sphere also passes through the reference optical axis; the position of the center of the first sphere is a first calibration position, and the position of the center of the second sphere is a second calibration position; S2: Remove the first and second spheres from the optical path; provide a first plane mirror located on the side of the first sphere away from the autocollimator, making the first plane mirror perpendicular to the reference optical axis; provide an objective lens located in the optical path between the first calibration position and the second calibration position, with the first calibration position located at the focal plane of the objective lens, making the optical axis of the objective lens parallel to the reference optical axis; remove the first plane mirror from the optical path and return the first sphere to the optical path, making the optical axis of the objective lens coincide with the reference optical axis; S3: Provide a second plane mirror, located between the objective lens and the autocollimator, such that the second plane mirror is perpendicular to the reference optical axis; provide a tube mirror, located between the second plane mirror and the second calibration position, return the second small ball to the optical path, such that the optical axis of the tube mirror is parallel to the optical axis of the objective lens; remove the second plane mirror and the second small ball from the optical path, and return the first plane mirror to the optical path, such that the optical axis of the tube mirror coincides with the optical axis of the objective lens; Step S1 includes steps S11 and S12. In step S11, the self-collimating device and the first small ball are provided. The self-collimating device emits collimated light. The self-collimating device translates along the X-axis, Y-axis, or Z-axis, and / or rotates around the X-axis, and / or rotates around the Y-axis, so that the center of the first small ball is on the optical axis of the self-collimating device. In step S12, the second ball is provided, the self-collimating device emits collimated light, and the second ball is translated along the X-axis, Y-axis or Z-axis so that the center of the second ball is also set on the optical axis of the self-collimating device. The reference optical axis is defined as the Z-axis, and any two mutually perpendicular lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively. Step S2 includes steps S21, S22 and S23; In step S21, the first ball and the second ball are moved out of the optical path, the first plane mirror is provided, the collimating device emits collimated light, and the first plane mirror rotates about the X-axis and / or about the Y-axis so that the first plane mirror is perpendicular to the reference optical axis. In step S22, the objective lens is provided, the self-collimated focused light is emitted, the self-collimating device is translated along the Z-axis to focus the focused light on the pupil plane of the objective lens, and the objective lens is rotated about the X-axis and / or about the Y-axis to make the optical axis of the objective lens parallel to the reference optical axis. In step S23, the first plane mirror is moved out of the optical path and the first ball is put back into the optical path. The collimating device emits collimated light, and the objective lens is translated along the X-axis, Y-axis or Z-axis so that the optical axis of the objective lens coincides with the reference optical axis. The reference optical axis is defined as the Z-axis, and any two mutually perpendicular lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively. Step S3 includes steps S31, S32 and S33; In step S31, a second plane mirror is provided, the first ball is moved out of the optical path, the collimating device emits collimated light, and the second plane mirror rotates about the X-axis and / or about the Y-axis so that the second plane mirror is perpendicular to the reference optical axis. In step S32, the tube is provided, the second small ball is placed back into the optical path, the autocollimating device emits focused light, the autocollimating device translates along the Z-axis to focus the focused light on the center of the second small ball, and the tube rotates around the X-axis and / or around the Y-axis to make the optical axis of the tube parallel to the optical axis of the objective lens. In step S33, the second plane mirror and the second small ball are removed from the optical path, and the first plane mirror is placed back into the optical path. The collimating device emits collimated light, and the tube mirror is translated along the X-axis, Y-axis or Z-axis so that the optical axis of the objective lens and the optical axis of the tube mirror are coaxial. The reference optical axis is defined as the Z-axis, and any two mutually perpendicular lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively.

2. The assembly and adjustment method of the microscope system according to claim 1, characterized in that: The assembly and adjustment method of the microscopic system further includes step S4: removing the first plane mirror from the optical path and placing the first sphere back into the optical path, so that the autocollimated image of the first sphere meets the target accuracy requirements.

3. A method for assembling and adjusting a coke-free system, characterized in that, The assembly and adjustment method of the coke-free system includes at least the following steps: S1: Provide a target optical axis, an autocollimator, and a first sphere, the center of the first sphere being on the target optical axis, such that the autocollimator focuses on the center of the first sphere; provide a second sphere, the second sphere being located between the autocollimator and the first sphere, such that the center of the second sphere is also on the target optical axis; the position of the center of the first sphere is a first calibration position, and the position of the center of the second sphere is a second calibration position; S2: The autocollimation device repeatedly switches between shooting at the second ball and the first ball, so that the optical axis of the autocollimation device coincides with the optical axis of the target; S3: Provide a plane mirror located in the optical path away from the autocollimator on the side of the first sphere, making the plane mirror perpendicular to the target optical axis; provide a focusless system located in the optical path between the first calibration position and the second calibration position, with the first calibration position located at the entrance pupil of the focusless system and the second calibration position located at the exit pupil of the focusless system, making the optical axis of the focusless system parallel to the target optical axis; remove the plane mirror from the optical path, and return the first sphere and the second sphere to the optical path, making the optical axis of the focusless system coaxial with the target optical axis; Step S1 includes steps S11 and S12. In step S11, the autocollimating device and the first small ball are provided. The autocollimating device emits focused light. The autocollimating device translates along the X-axis, Y-axis or Z-axis, and / or rotates around the X-axis, and / or rotates around the Y-axis, so that the autocollimating device focuses on the center of the first small ball. In step S12, the second small ball is provided, the autocollimation device emits focused light, and the second small ball is translated along the X-axis, Y-axis or Z-axis so that the autocollimation device also focuses on the center of the second small ball, so that the center of the second small ball is also on the target optical axis; Specifically, the target optical axis is positioned as the Z-axis, and any two mutually perpendicular straight lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively. Step S2 includes steps S21, S22 and S23; In step S21, the self-collimating device emits collimated light, and the self-collimating device translates along the X-axis, Y-axis or Z-axis so that the center of the second ball passes through the optical axis of the self-collimating device; In step S22, the second ball is removed from the optical path, the self-collimating device emits collimated light, and the self-collimating device rotates around the X-axis and / or around the Y-axis so that the center of the first ball passes through the optical axis of the self-collimating device. In step S23, steps S21 and S22 are repeated until the optical axis of the autocollimating device coincides with the target optical axis; Specifically, the target optical axis is positioned as the Z-axis, and any two mutually perpendicular straight lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively. Step S3 includes steps S31, S32 and S33; In step S31, the plane mirror is provided, the first ball and the second ball are removed from the optical path, the collimating device emits collimated light, and the plane mirror rotates about the X-axis and / or about the Y-axis so that the plane mirror is perpendicular to the target optical axis. In step S32, the afocal system is provided, the self-collimating device emits collimated light, and the afocal system rotates about the X-axis and / or about the Y-axis so that the optical axis of the afocal system is parallel to the optical axis of the target. In step S33, the plane mirror is removed from the optical path, the first and second spheres are placed back into the optical path, the collimating device emits focused light, the collimating device is translated along the Z-axis to focus the focused light onto the center of the second sphere, the second sphere is removed from the optical path, and the afocal system is translated along the X-axis, Y-axis or Z-axis to make the optical axis of the afocal system coaxial with the target optical axis; Specifically, the target optical axis is positioned as the Z-axis, and any two mutually perpendicular straight lines in any plane perpendicular to the Z-axis are defined as the X-axis and Y-axis, respectively.

4. An optical system assembly and adjustment apparatus for implementing the assembly and adjustment method of the microscope system according to any one of claims 1-2 or the assembly and adjustment method of the afocal system according to claim 3, characterized in that, The assembly and adjustment device of the optical system includes at least: a parallel guide rail and a tooling system; The adjustment system is set on the parallel guide rail and is used to establish a three-dimensional coordinate system of XYZ, and to adjust the position of the device installed on the parallel guide rail based on the three-dimensional coordinate system of XYZ. The autocollimating device, the first ball, the second ball, the first plane mirror, the second plane mirror, and the microscope system used in the assembly and adjustment method of the microscope system are all mounted on the parallel guide rail; Alternatively, the autocollimating device, the first ball, the second ball, the plane mirror, and the afocal system used in the assembly and adjustment method of the afocal system are all mounted on the parallel guide rail.

Images