A dicing machine head

Abstract

This invention relates to the field of chip processing technology and discloses a dicing machine cutter head, comprising: a cutter head frame; a cutter head structure rotatably mounted on the cutter head frame; and a weight adjustment structure having a driving end. The driving end of the weight adjustment structure acts on the cutter head structure, which is not collinear with the rotation center of the cutter head structure, to adjust the swing position of the cutter head structure, thereby changing the pressure exerted by the cutter head structure on the workpiece to be diced. This invention achieves weight adjustment of the dicing cutter's action on the chip through the weight adjustment structure, thus meeting the requirements for dicing and slotting the chip. The design of this weight adjustment structure allows the operator to precisely control the pressure of the dicing cutter on the chip surface, avoiding chip damage due to excessive pressure or ineffective dicing due to insufficient pressure.

Description

Technical Field

[0001] This invention relates to the field of chip processing technology, and more specifically to a dicing cutter head. Background Technology

[0002] Gallium arsenide (GaAs) and indium phosphide (InP) are currently the most produced, most widely used, and therefore most important compound semiconductor materials. Due to their excellent performance and band structure, GaAs and InP optoelectronic chips are key components in fields such as data communication and lasers.

[0003] During the cleaving process of optical communication semiconductor chips, due to the inherent characteristics of the chip material, diamond scribing tools are used to scribe lines and grooves at the cleaving paths. The chips are then split using a cleaving machine to produce bars or chips. Because the chip material is relatively fragile and its thickness is typically around 100μm, precise basis weight, sensitive feedback, and stable scribing are crucial during the scribe-grooving process. Failure to adjust the basis weight during scribing will negatively impact the scribing quality.

[0004] Therefore, it is particularly important to design a dicing cutter head suitable for dicing optical communication semiconductor chips. Summary of the Invention

[0005] In view of this, the present invention provides a dicing cutter head to solve the problem that the lack of a weight adjustment structure during the chip dicing and slotting process affects the dicing quality.

[0006] The present invention also provides a dicing cutter head, comprising:

[0007] Cutter head frame;

[0008] A cutting head structure, wherein the cutting head structure is rotatably mounted on a cutting head frame;

[0009] The weight adjustment structure has a driving end, which acts on the cutter head structure that is not collinear with the rotation center of the cutter head structure, so as to adjust the swing position of the cutter head structure and thereby change the pressure of the cutter head structure on the workpiece to be scribed.

[0010] The beneficial effects of the aforementioned dicing cutter head are as follows: the weight adjustment structure allows for adjustment of the weight applied by the cutter to the chip, thereby meeting the requirements for dicing and slotting the chip. This weight adjustment structure design enables operators to precisely control the pressure of the cutter on the chip surface, avoiding chip damage due to excessive pressure or ineffective dicing due to insufficient pressure.

[0011] In one optional implementation, the weight adjustment structure includes:

[0012] A spring, the first end of which is connected to the cutter head structure, and the second end of which has a gap with the cutter head structure;

[0013] A weight adjustment bracket, which is connected to the cutter head frame;

[0014] The weight adjustment component is the driving end of the weight adjustment structure. The weight adjustment component is disposed on the weight adjustment bracket and abuts against the second end of the spring piece. When the weight adjustment component moves away from or towards the second end of the spring piece, the cutter head structure is adjusted through the spring piece.

[0015] The beneficial effects of the above technical solution are as follows: the high elastic modulus and linear deformation characteristics of the spring sheet, combined with the micro-displacement control of the weight adjustment component, can stably adjust the weight to the target range of 1.5 grams, and the error is strictly controlled within ±0.3 grams, which meets the stringent requirements of brittle thin chips for weight accuracy.

[0016] In one optional embodiment, the weight adjustment component is a weight adjustment screw, which is threadedly fitted with a weight adjustment bracket.

[0017] In one alternative embodiment, the spring is a metal spring made of spring steel.

[0018] In one optional embodiment, the cutter head structure has a first step and a second step on the side near the weight adjustment member, the first step protruding from the second step, the first end of the spring piece being disposed on the first step, and the second end of the spring piece being disposed on the second step.

[0019] In one optional embodiment, the cutter head structure is provided with a counterweight, and the counterweight and the weight adjustment structure are located on both sides of the cutter head structure.

[0020] In one optional embodiment, the cutter head structure includes:

[0021] A tool head displacement bracket, which is rotatably mounted on a tool head frame via a swing structure;

[0022] The cutter shaft is positioned on the cutter head displacement frame, and a positioning cavity is provided at the front section of the cutter shaft;

[0023] The scriber is inserted and positioned within the positioning cavity of the scriber shaft.

[0024] In one optional embodiment, the cutting edge of the scriber is a tetrahedral structure, the positioning cavity is a square cavity, and the scriber and the positioning cavity are in clearance fit; and / or

[0025] The cutter shaft is provided with a positioning hole, and the cutter shaft and the scribing blade are connected by a positioning screw passing through the positioning hole.

[0026] In one alternative implementation, the swing structure includes:

[0027] A rotating shaft passes through the cutter head frame and the cutter head displacement frame, and the rotating shaft is fixedly connected to the cutter head displacement frame;

[0028] Two bushings, a portion of which is disposed on the cutter head frame and has a rotating shaft positioning cavity, and the other portion of which extends out from the cutter head frame, and the rotating shaft is inserted into the rotating shaft positioning cavity;

[0029] Two nuts are connected to the portion of the bushing that extends out of the cutter head frame, and the two nuts are adapted to limit the axial position of the bushing and the shaft.

[0030] In one optional embodiment, the bushing is provided with a threaded hole communicating with the positioning cavity of the rotating shaft; each of the two bushings is provided with a ball-end positioning screw, the ball-end positioning screw passes through the threaded hole and abuts against the end of the rotating shaft, and the two ball-end positioning screws adjust the axial position of the rotating shaft when rotating, so as to control the clearance of the cutter head structure in the axial position.

[0031] In one optional embodiment, the dicing cutter head further includes a weight feedback mechanism, the weight feedback mechanism comprising:

[0032] A contact bracket is connected to the rear section of the cutter head frame;

[0033] A first conductive element is disposed on a contact support and extends from the contact support. A first contact is disposed on the first conductive element. The first conductive element is connected to the controller through a first wire.

[0034] The second conductive element is located at the rear end of the cutter head structure and extends from the cutter head structure. The second conductive element is provided with a second contact. The first contact and the second contact are arranged opposite to each other. The second conductive element is connected to the controller through a second wire.

[0035] When the weight adjustment structure adjusts the swing position of the cutter head structure, the second conductive element moves in the opposite direction to the weight adjustment structure, so that the first contact and the second contact touch or separate. When the first contact and the second contact touch, a closed signal circuit is formed between the first conductive element, the first wire, the controller, the second wire, and the second conductive element. When the first contact and the second contact separate, an open signal circuit is formed between the first conductive element, the first wire, the controller, the second wire, and the second conductive element.

[0036] The beneficial effects of the above technical solution are as follows: The gram weight feedback mechanism realizes the real-time monitoring of the gram weight state through the on / off of the electrical signals of the first contact and the second contact, significantly improving the automation and precision control capabilities of the dicing machine. The specific advantages are as follows: The combination of the mechanical touch / detachment action of the contacts and the electrical signal transmission ensures the instantaneous feedback of the gram weight adjustment result, meeting the real-time control requirements of high-frequency dicing. The physical signal transmission method of direct contact of the double contacts ensures the reliability of the feedback result. The position design of the contacts matches the displacement accuracy of the gram weight adjustment structure, realizing the linkage of gram weight adjustment.

[0037] In an optional embodiment, an indicator light is connected to the output end of the controller. The controller controls the lighting and extinguishing of the indicator light based on the closed signal loop information or the open signal loop information to achieve gram weight feedback; and / or

[0038] The first contact and / or the second contact is a gold-plated contact; and / or

[0039] One of the first contact and the second contact is a ball head contact, and the other is a flat contact; and / or

[0040] An insulating washer is provided between the first conductive member and the contact bracket and / or between the second conductive member and the tool head structure.

[0041] In summary, the present invention has the following advantages:

[0042] In the present invention, by designing the tool head of the dicing machine, the scribing quality is improved during the cleavage process of the optical communication chip, reducing the phenomena such as chipping, corner breakage, and cracking of the surface grooves during the dicing of the chip. The high-stability dicing improves the yield rate of chip cleavage. Through this structure, the scribing gram weight can be maintained at the 1.5-gram scribing state; the gram weight can be stabilized within an error of ±0.3 grams. Ensure that the fixed cutting edge of the cutting tool is perpendicular to the chip surface, ensuring the integrity of the front and back states of the cleavage surface. The present invention mainly improves the yield rate of chip cleavage by adopting the designed elastic sheet配合 the tool head swing structure and then performing feedback through gold-plated contacts to precisely control the scribing state of the cutting tool. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0044] Figure 1 FIG. 1 is a schematic structural diagram of a first perspective of a tool head of a dicing machine provided by the present invention;

[0045] Figure 2 This invention provides a second-view structural diagram of a dicing cutter head;

[0046] Figure 3 This invention provides a schematic diagram of the structure of a dicing machine cutter head removing a weight adjustment bracket;

[0047] Figure 4 This invention provides a schematic diagram of the structure of a spring in a dicing machine cutter head;

[0048] Figure 5 A cross-sectional view of the oscillating structure in the dicing cutter head provided by the present invention;

[0049] Figure 6 A partial structural schematic diagram of a weight feedback mechanism for a dicing mill cutter head provided by the present invention;

[0050] Figure 7 This is a schematic diagram of the structure of a dicing machine cutter head removing a contact support, as provided by the present invention.

[0051] Figure 8 A schematic diagram of the structure of the first and second conductive components of a dicing machine cutter head provided by the present invention;

[0052] Figure 9 A schematic diagram of the swing structure of a dicing cutter head provided by the present invention;

[0053] Figure 10 A cross-sectional view of the swing structure of a dicing cutter head provided by the present invention;

[0054] Figure 11 A partial structural schematic diagram of the swing structure of a dicing cutter head provided by the present invention;

[0055] Figure 12 A schematic diagram illustrating the positioning of the cutter shaft and the dicing blade in a dicing machine cutter head, provided by the present invention;

[0056] Figure 13 This is a partial structural diagram of the cutter shaft of a dicing machine cutter head provided by the present invention.

[0057] Explanation of reference numerals in the attached figures:

[0058] 1. Scribing blade; 2. Weight adjustment bracket; 3. Weight adjustment screw; 4. Blade head displacement bracket; 41. First step; 42. Second step; 5. Counterweight; 6. Blade head frame; 61. Column head; 7. Insulating washer; 8. First conductive element; 81. First contact; 9. Spring; 10. Bushing; 11. Shaft; 12. Ball head positioning screw; 13. Nut; 14. Blade shaft; 141. Positioning cavity; 15. Positioning screw; 16. Second conductive element; 161. Second contact; 17. Contact bracket; 18. Positioning hole; 19. Micrometer. Detailed Implementation

[0059] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0060] During the cleaving process of optical communication semiconductor chips, due to the inherent characteristics of the chip material, diamond scribing tools are used to scribing and grooving the chip at the cleaving path. The chips are then split using a cleaving machine to produce bars or chips. Because the chip material is relatively fragile and its thickness is typically around 100μm, precise weight measurement, sensitive feedback, and stable scribing are essential during the scribing and grooving process.

[0061] Based on this, the present invention provides a scribing cutter head, which uses a rigid spring as the main method for weight adjustment. Gold-plated contacts are used as the control unit for weight feedback via electrical connection switching. The minimum scribing weight can be 1.5 grams, with an error controllable within ±0.3 grams. It exhibits high sensitivity and stability. Precision fitting of a metal shaft and bushing is used to achieve minute oscillation of the cutter head for scribing and grooving. The coordination of these main structures ensures the stability of the scribing structure, significantly improving scribing quality.

[0062] This invention is mainly applied to the cleaving of compound semiconductor chips. By accurately and stably controlling the scriber cutting quality of the die-cutting machine, the yield of chip cleaving is greatly improved.

[0063] According to an embodiment of the present invention, a dicing cutter head is provided, combined with... Figures 1 to 13As shown, the device includes a cutter head frame 6, a cutter head structure, and a weight adjustment structure. The cutter head structure is rotatably mounted on the cutter head frame 6, which can be positioned on an external structure. The weight adjustment structure has a driving end that acts on the cutter head structure, which is not collinear with the rotation center of the cutter head structure, to adjust the swing position of the cutter head structure, thereby changing the pressure exerted by the cutter head structure on the workpiece to be scribed. The workpiece to be scribed can be a chip or other components.

[0064] The aforementioned dicing cutter head uses a weight adjustment structure to adjust the weight of the cutter acting on the chip, thereby meeting the requirements for dicing and slotting the chip.

[0065] More specifically, the weight adjustment structure includes a spring 9, a weight adjustment bracket 2, and a weight adjustment component. The first end of the spring 9 is connected to the cutter head structure, and the second end of the spring 9 has a gap with the cutter head structure. The weight adjustment bracket 2 is connected to the cutter head frame 6 by screws. The weight adjustment component is the driving end of the weight adjustment structure; it is mounted on the weight adjustment bracket 2 and abuts against the second end of the spring 9. When the weight adjustment component moves away from or towards the second end of the spring 9, the cutter head structure is adjusted via the spring 9.

[0066] The weight adjustment component is a weight adjustment screw 3, which is threadedly fitted with the weight adjustment bracket 2. Therefore, weight adjustment can be achieved simply by turning the weight adjustment screw 3, which is very convenient.

[0067] When it is necessary to adjust the weight applied to the chip by the cutting head, the weight is increased or decreased by operating the weight adjustment mechanism. Weight increase: The weight adjustment mechanism moves towards the second end of the spring, compressing it and causing elastic deformation. Since the first end of the spring is connected to the cutting head structure, the deformation of the spring is transmitted to the cutting head structure, pushing the front end of the cutting head structure closer to the chip surface, thereby increasing the pressure (weight) applied to the chip. Weight decrease: The weight adjustment mechanism moves away from the second end of the spring, reducing the compressive force at the second end. The spring gradually returns to its original position due to elastic restoring force, and the cutting head structure moves away from the chip surface as the spring returns to its original position, thus decreasing the pressure (weight) applied to the chip.

[0068] In this embodiment, the spring 9 is a metal spring made of spring steel with an elastic modulus of up to 200 GPa. The high elastic modulus and linear deformation characteristics of the spring, combined with the minute displacement control of the weight adjustment component, allow the weight to be stably adjusted to the target range of 1.5 grams, with the error strictly controlled within ±0.3 grams, meeting the stringent weight accuracy requirements of brittle thin chips. Continuous and precise weight adjustment can be achieved by rotating the weight adjustment component without disassembling the cutting head or replacing parts, making it suitable for scribing and grooving chips of different materials and thicknesses. This precise pressure control effectively avoids chip surface chipping, missing corners, or cracking caused by excessive or fluctuating weight, significantly improving the quality of scribing and grooving.

[0069] The cutter head structure has a first step 41 and a second step 42 on the side near the weight adjustment component. The first step 41 protrudes from the second step 42. The first end of the spring 9 is disposed on the first step 41, and the second end of the spring 9 is disposed on the second step 42, thereby creating a gap between the second end of the spring 9 and the second step 42.

[0070] The spring 9 is configured in the shape of a fork, including a straight piece and a U-shaped piece that are integrally connected. The U-shaped piece is the first end of the spring 9, and the straight piece is the second end of the spring 9.

[0071] The cutter head structure is equipped with a counterweight 5. The counterweight 5 and the weight adjustment structure are located on both sides of the cutter head structure. The counterweight 5 is located at the lower rear section of the cutter head structure. The counterweight 5 and the slicing blade 1 of the cutter head structure are located on both sides of the rotating shaft 11, and the counterweight 5 is set at an angle.

[0072] When adjusting the weight of the dicing cutter head, a metal spring is mounted on the cutter head displacement frame, with the rotating shaft 11 as the fulcrum. One end is balanced by adding a counterweight 5 to balance the weight of the front section of the cutter head, while the other end is adjusted by rotating the weight adjustment screw 3 mounted on the weight adjustment bracket 2 at the front section of the cutter head to change the pressure acting on the chip. The metal spring, designed with load calculation, can adjust the weight to a stable range of 1.5 grams. At the same time, the metal spring has good guiding performance and is less affected by interference from other directions, so that the weight change can be stabilized within ±0.3 grams during the scribing process.

[0073] Method for calculating elastic force: Formula for calculating spring constant: Spring constant (N / mm) = Ebh 3 / 4L 3 E = 186000; b = plate width; h = plate thickness; L = plate length. The load calculation formula is: Load (N) = Spring constant × Displacement. Using the above formula, the minimum weight can be adjusted to a stable range of 1.5g.

[0074] In some embodiments, the cutter head structure includes a cutter head displacement frame 4, a cutter shaft 14, and a scribing blade 1. The cutter head displacement frame 4 is rotatably mounted on the cutter head frame 6 via a swing structure. The cutter shaft 14 is positioned on the cutter head displacement frame 4 and serves as the direct positioning component for the scribing blade 1. A positioning cavity 141 is formed at the front end of the cutter shaft 14. The scribing blade 1 is a diamond-material scribing tool, with its shank inserted into the positioning cavity 141 of the cutter shaft 14. The cutting edge directly acts on the chip cleaving path to perform scribing and grooving. The material and geometry of the scribing blade determine its ability to scribing brittle chips.

[0075] In this embodiment, the blade displacement frame 4 swings flexibly on the blade frame 6 via a swing structure. This swing is driven by a weight adjustment structure (such as the deformation of the spring 9), which can adjust the tilt angle of the blade displacement frame, thereby changing the contact pressure (weight) between the scribing blade 1 and the chip.

[0076] Since the cutting edge of the diamond scribing tool has a tetrahedral structure, to ensure that the cutting edge is perpendicular to the chip surface after the scribing tool is fixed, the positioning cavity 141 is designed as a square cavity, and the scribing tool 1's shaft is designed as a square structure, with the scribing tool 1's shaft and the positioning cavity 141 having a clearance fit.

[0077] The scribing blade 1 has a positioning hole 18 on its shaft 14, and the shaft 14 and the scribing blade 1 are connected by a positioning screw 15 passing through the positioning hole 18.

[0078] In some embodiments, the oscillating structure includes a rotating shaft 11, a bushing 10, and a nut 13. The rotating shaft 11 passes through the cutter head frame 6 and the cutter head displacement frame 4, and is fixedly connected to the cutter head displacement frame 4. The function of the rotating shaft 11 is to act as a rotation center, directly driving the cutter head displacement frame 4 to oscillate through its own rotation, thereby adjusting the contact position and pressure between the scribing blade 1 and the chip. Two bushings 10 are provided. One part of the bushing 10 is set on the cutter head frame 6 and has a rotating shaft positioning cavity. The rotating shaft 11 is inserted into the rotating shaft positioning cavity. The other part of the bushing 10 extends out of the cutter head frame 6, and an external thread is formed on the outer wall of the bushing 10 extending out of the cutter head frame 6. Two nuts 13 are provided. The nuts 13 are connected to the part of the bushing 10 that extends out of the cutter head frame 6. The two nuts 13 are adapted to limit the axial position of the bushing 10 and the rotating shaft 11. The rotating shaft 11 is inserted into the rotating shaft positioning cavity of the bushing 10. The two are fitted with a radial tolerance clearance, which not only ensures the flexible rotation of the rotating shaft 11 in the bushing 10, but also avoids radial wobble through clearance control.

[0079] The bushing 10 is provided with a threaded hole that communicates with the positioning cavity of the rotating shaft. Each of the two bushings 10 is provided with a ball head positioning screw 12. The ball head positioning screw 12 passes through the threaded hole and abuts against the end of the rotating shaft 11. When the two ball head positioning screws 12 rotate, they adjust the axial position of the rotating shaft 11 to control the clearance of the cutter head structure in the axial position.

[0080] The function of the ball-end locating screw 12 is to control the axial position of the rotating shaft 11 within the bushing 10 through rotational adjustment, thereby precisely adjusting the axial clearance of the cutter head structure. The specific adjustment process is as follows: When the ball-end locating screw 12 is rotated clockwise, it advances along the threaded hole towards the rotating shaft 11, and the ball end gradually presses against the end of the rotating shaft 11. Since the two ball-end locating screws 12 are symmetrically distributed, synchronous rotation allows the rotating shaft 11 to be pushed evenly towards the center, thus reducing the axial clearance. When the ball-end locating screw 12 is rotated counterclockwise, it retracts away from the rotating shaft 11, and the pressure exerted by the ball end on the rotating shaft 11 decreases. At this time, the rotating shaft 11 can move slightly axially within the locating cavity of the bushing 10, and the axial clearance increases accordingly.

[0081] Because the dicing weight is relatively small during the dicing process, the cutting head requires high flexibility, and there are also requirements for service life, daily maintenance, and stability. A dicing machine can perform tens of thousands of cuts per day in daily use, meaning the cutting head needs to oscillate stably and flexibly tens of thousands of times. Verification has shown that stable and flexible oscillation of the cutting head is achieved through clearance fits between machining parts and point contact between these parts. First, the cutting head displacement frame 4 is fixed to the rotating shaft 11, allowing the dicing cutter to rotate with the shaft. The rotating shaft is fitted with a bushing 10 mounted on the cutting head frame 6, ensuring a clearance fit for the radial tolerance of the entire cutting head movement, allowing the rotating shaft 11 to rotate flexibly within the bushing 10. Secondly, two ball-head locating screws 12 are fixed to both ends of the rotating shaft 11, controlling the clearance of the cutting head's position along the rotating shaft. The ball-head locating screws have balls at their tips, ensuring point contact with the rotating shaft and slight movement of the balls during shaft oscillation. These two points ensure the flexible and stable oscillation of the cutting head.

[0082] In some embodiments, a column head 61 extends upward from the rear end of the cutter shaft 14. A groove is provided on one side of the column head 61. A micrometer 19 is provided at the rear end of the cutter head frame 6. The detection head of the micrometer 19 abuts against the groove wall of the column head 61. The micrometer 19 has high precision and can accurately detect the minute displacement of the cutter shaft 14 during its swing. When the cutter shaft 14 swings, the groove wall of the column head 61 will have a minute relative displacement with the detection head of the micrometer 19. This displacement will be accurately captured by the micrometer 19 and converted into a reading. The operator can understand the swing state of the cutter shaft by reading the reading of the micrometer 19.

[0083] In some embodiments, during the dicing process and when making contact scribing and grooving with the chip, it is necessary to maintain a stable gram weight for operation, which requires a feedback mechanism. Therefore, the cutter head of the dicing machine in this embodiment further includes a gram weight feedback mechanism, and the gram weight feedback mechanism includes a contact bracket 17, a first conductive member 8, and a second conductive member 16. The contact bracket 17 is connected to the rear section of the cutter head frame 6. The first conductive member 8 is disposed on the contact bracket 17 and extends from the contact bracket 17. A first contact 81 is provided on the first conductive member 8, and the first conductive member 8 is connected to the controller through a first wire. The second conductive member 16 is disposed at the rear section of the cutter head structure and extends from the cutter head structure. A second contact 161 is provided on the second conductive member 16. The first contact 81 and the second contact 161 are arranged opposite to each other. The second conductive member 16 is connected to the controller through a second wire. Here, the controller is a PLC controller.

[0084] When the gram weight adjustment structure adjusts the swing position of the cutter head structure, the second conductive member 16 moves along the movement direction opposite to the gram weight adjustment structure, so that the first contact 81 and the second contact 161 touch or separate from each other. When the first contact 81 and the second contact 161 touch each other, a closed signal loop is formed among the first conductive member 8, the first wire, the controller, the second wire, and the second conductive member 16. When the first contact 81 and the second contact 161 separate from each other, an open signal loop is formed among the first conductive member 8, the first wire, the controller, the second wire, and the second conductive member 16.

[0085] The gram weight feedback mechanism realizes the real-time monitoring of the gram weight state through the on / off of the electrical signals of the first contact 81 and the second contact 161, significantly improving the automation and precision control capabilities of the dicing machine. The specific advantages are as follows: The combination of the mechanical touch / separation action of the contacts and the electrical signal transmission ensures the instantaneous feedback of the gram weight adjustment result and meets the real-time control requirements of high-frequency dicing. The physical signal transmission method of direct contact between the two contacts ensures the reliability of the feedback result. The position design of the contacts matches the displacement accuracy of the gram weight adjustment structure, realizing the linkage of the gram weight adjustment.

[0086] The contacts adopt a replaceable design. The first conductive member 8 is connected to the contact bracket 17 by a thread, and the second conductive member 16 is connected to the cutter head structure by a thread. If the contacts are worn after long-term use, they can be quickly disassembled and replaced without replacing the entire feedback mechanism, reducing the maintenance cost.

[0087] To better achieve the feedback detection of the gram weight, an indicator light is connected to the output end of the controller. The controller controls the on / off of the indicator light based on the information of the closed signal loop or the open signal loop to achieve the gram weight feedback.

[0088] The first contact 81 and / or the second contact 161 are gold-plated contacts. Gold-plated contacts have excellent conductivity, and gold plating provides greater stability in circuits without forming any resistive compounds. Therefore, in applications requiring extremely low resistance changes and high stability, such as high-frequency communication equipment and precision electronic instruments, gold-plated connectors can ensure high-quality signal transmission. Due to their excellent corrosion resistance and abrasion resistance, gold-plated contacts exhibit better durability in various environments.

[0089] To ensure the sensitivity of the feedback from the two contacts, one of the first contact 81 and the second contact 161 is set as a ball-head contact, and the other as a planar contact, forming a point contact between the two contacts. When the cutter head structure swings to the target weight position, the ball-head contact moves with the cutter head structure, and its apex detaches from the surface of the planar contact, breaking the signal circuit. When the cutter head structure swings away from the target weight position, the apex of the ball-head contact contacts the surface of the planar contact, closing the signal circuit through point-to-surface contact.

[0090] Insulating washers 7 are provided between the first conductive element 8 and the contact support 17 and / or between the second conductive element 16 and the cutting head structure. The insulating washers 7 prevent short circuits between the two contacts. More specifically, insulating washers 7 may be provided between the first conductive element 8 and the contact support 17, or between the second conductive element 16 and the cutting head structure, or both the first conductive element 8 and the contact support 17 and the second conductive element 16 and the cutting head structure may be provided simultaneously. When an insulating washer 7 is provided between the first conductive element 8 and the contact support 17, the first contact 81 is isolated individually by the insulating washer 7.

[0091] The specific working process of the dicing machine cutter head is as follows:

[0092] S1. Initial State Preparation. The initial position of the weight adjustment screw 3 is determined by the chip process requirements (such as thickness and material). The first end of the spring 9 is fixed to the first step 41 of the cutter head displacement bracket 4, and the second end maintains an initial distance from the second step 42. The counterweight 5 is installed on the other side of the cutter head structure to balance the weight of the front section of the cutter head and avoid initial weight deviation due to its own weight.

[0093] S2. Adjust the weight. According to the chip dicing process requirements, the weight can be increased or decreased by rotating the weight adjustment screw 3.

[0094] Weight increase operation: Rotate the weight adjustment screw 3 clockwise. The screw 3 is pushed along the thread of the weight adjustment bracket 2 towards the second end of the spring 9. The weight adjustment screw 3 presses the straight end of the spring 9, causing it to undergo elastic deformation. The U-shaped end of the spring 9 is fixed to the cutter head displacement bracket 4. The deformation is transmitted to the cutter head displacement bracket 4 through the spring, pushing it to swing around the rotating shaft 11 towards the chip surface.

[0095] The tool head displacement holder 4 drives the tool shaft 14 and the scribing tool 1 to approach the chip. The contact pressure (weight) between the scribing tool 1 and the chip surface gradually increases until the target value is reached.

[0096] Weight reduction operation: Rotate the weight adjustment screw 3 counterclockwise, moving the screw 3 away from the second end of the spring 9. The spring 9 gradually returns to its original position due to its elastic restoring force, reducing the thrust on the cutter head displacement bracket 4. The cutter head displacement bracket 4 swings around the axis 11 away from the chip as the spring returns to its original position. The contact pressure between the scribing blade 1 and the chip surface decreases, and the weight gradually decreases.

[0097] S3. During the weight adjustment process, the weight feedback mechanism monitors the weight status in real time to ensure adjustment accuracy.

[0098] When the cutter head displacement bracket 4 swings, the second conductive element 16 installed at its rear section moves. The direction of movement of the second conductive element 16 is opposite to the direction of advancement of the weight adjustment screw 3: if the weight increases, the cutter head sinks and the second conductive element 16 moves upward.

[0099] Initially, the weight is below standard (closed signal). At this time, the second contact 161 of the second conductive element 16 touches the first contact 81 of the first conductive element 8. At this time, the first conductive element 8, the first wire, the controller, the second wire, and the second conductive element 16 form a closed signal loop. After detecting the signal, the controller determines that the weight is below standard and the controller control indicator light illuminates.

[0100] When the cutter head swings to the target weight position, the second contact 161 disengages from the first contact 81, and the signal circuit is broken. At this time, the signal circuit between the first conductive element 8, the first wire, the controller, the second wire, and the second conductive element 16 is broken. The controller determines that the weight meets the standard and the controller control indicator light to turn off.

[0101] The controller controls the indicator light to turn on and off via a closed / open signal, allowing operators to visually confirm the weight status.

[0102] S4. After the weight adjustment is completed, the dicing machine enters the high-frequency dicing stage: the dicing blade 1 stabilizes the weight contact position of the chip cleaving channel, and the diamond tetrahedral blade cuts the chip surface.

[0103] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A dicing saw head, characterized by, include: Cutter head frame (6); The cutter head structure is rotatably mounted on the cutter head frame (6); The weight adjustment structure has a driving end, which acts on the cutter head structure that is not collinear with the rotation center of the cutter head structure, so as to adjust the swing position of the cutter head structure and thereby change the pressure of the cutter head structure on the workpiece to be scribed. The weight adjustment structure includes: A spring (9), the first end of which is connected to the cutter head structure, and the second end of which has a gap with the cutter head structure; Weight adjustment bracket (2), which is connected to the cutter head frame (6); The weight adjustment component is the driving end of the weight adjustment structure. The weight adjustment component is set on the weight adjustment bracket (2) and abuts against the second end of the spring (9). When the weight adjustment component moves away from or closer to the second end of the spring (9), the cutter head structure is adjusted through the spring (9). The cutter head structure is provided with a first step (41) and a second step (42) on the side near the weight adjustment component. The first step (41) protrudes from the second step (42). The first end of the spring piece (9) is provided on the first step (41), and the second end of the spring piece (9) is provided on the second step (42). The cutter head structure is provided with a counterweight (5), and the counterweight (5) and the weight adjustment structure are located on both sides of the cutter head structure.

2. The dicing saw according to claim 1, wherein The weight adjustment component is a weight adjustment screw (3), which is threadedly fitted with the weight adjustment bracket (2); and / or The spring (9) is a metal spring made of spring steel.

3. The dicing cutter head according to claim 1, characterized in that, The cutter head structure includes: The cutter head displacement bracket (4) is rotatably mounted on the cutter head frame (6) via a swing structure; The cutter shaft (14) is positioned on the cutter head displacement frame (4), and the front section of the cutter shaft (14) is provided with a positioning cavity (141). The scribing blade (1) is inserted and positioned in the positioning cavity (141) of the blade shaft (14).

4. The dicing cutter head according to claim 3, characterized in that, The blade of the scriber (1) has a tetrahedral structure, the positioning cavity (141) is a square cavity, and the scriber (1) and the positioning cavity (141) are in clearance fit; and / or The cutter shaft (14) is provided with a positioning hole (18), and the cutter shaft (14) and the scriber (1) are connected by a positioning screw (15) passing through the positioning hole (18).

5. The dicing cutter head according to claim 3, characterized in that, The swing structure includes: A rotating shaft (11) passes through the cutter head frame (6) and the cutter head displacement frame (4), and the rotating shaft (11) is fixedly connected to the cutter head displacement frame (4); Two bushings (10), a part of which is disposed on the cutter head frame (6) and has a rotating shaft positioning cavity, the other part of which extends out from the cutter head frame (6), and the rotating shaft (11) is inserted into the rotating shaft positioning cavity; Two nuts (13) are connected to the part of the bushing (10) that extends out of the cutter head frame (6), and the two nuts (13) are adapted to restrict the axial position of the bushing (10) and the shaft (11).

6. The dicing cutter head according to claim 5, characterized in that, The bushing (10) is provided with a threaded hole that communicates with the positioning cavity of the rotating shaft; the two bushings (10) are respectively provided with ball head positioning screws (12), the ball head positioning screws (12) pass through the threaded hole and abut against the end of the rotating shaft (11), and the two ball head positioning screws (12) adjust the axial position of the rotating shaft (11) when rotating, so as to control the gap of the cutter head structure in the axial position.

7. The dicing cutter head according to any one of claims 1-6, characterized in that, The dicing cutter head also includes a weight feedback mechanism, which includes: Contact bracket (17), the contact bracket (17) is connected to the rear section of the cutter head frame (6); The first conductive element (8) is disposed on the contact bracket (17) and extends out from the contact bracket (17). The first conductive element (8) is provided with a first contact (81). The first conductive element (8) is connected to the controller through a first wire. The second conductive element (16) is located at the rear end of the cutter head structure and extends out from the cutter head structure. The second conductive element (16) is provided with a second contact (161). The first contact (81) and the second contact (161) are arranged opposite to each other. The second conductive element (16) is connected to the controller through a second wire. When the weight adjustment structure adjusts the swing position of the cutter head structure, the second conductive element (16) moves in the opposite direction to the weight adjustment structure so that the first contact (81) and the second contact (161) touch or separate from each other; when the first contact (81) and the second contact (161) touch, a closed signal circuit is formed between the first conductive element (8), the first wire, the controller, the second wire and the second conductive element (16); when the first contact (81) and the second contact (161) separate from each other, an open signal circuit is formed between the first conductive element (8), the first wire, the controller, the second wire and the second conductive element (16).

8. The dicing cutter head according to claim 7, characterized in that, The controller's output is connected to an indicator light. The controller controls the indicator light's on / off state based on closed or open signal loop information to achieve weight feedback; and / or The first contact (81) and / or the second contact (161) are gold-plated contacts; and / or One of the first contact (81) and the second contact (161) is a ball-head contact, and the other is a planar contact; and / or An insulating gasket (7) is provided between the first conductive element (8) and the contact support (17) and / or between the second conductive element (16) and the blade structure.

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