一种环境自适应润滑同型异质结构薄膜的可控制备方法
By depositing MoS2-WS2 composite films on silicon substrates and utilizing the homogeneous heterostructure to control the target power ratio, the problem of easy oxidation of MoS2 films in humid atmospheric environments was solved, achieving adaptive lubrication performance with low friction coefficient and long life.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- LANZHOU UNIVERSITY OF TECHNOLOGY
- Filing Date
- 2025-06-11
- Publication Date
- 2026-07-17
AI Technical Summary
Existing MoS2 films are prone to oxidation in humid atmospheric environments, have a high coefficient of friction, and a short service life. The mismatch in the properties of the components in the composite film leads to limited lubrication adaptability.
A homogeneous heterostructure construction strategy was adopted, and a multi-target magnetron sputtering system was used to deposit MoS2-WS2 composite films on silicon substrates. By adjusting the target power ratio, MoS2-WS2 composite films with χ=0.4 and χ=0.8 were formed. Combined with a Ti transition layer, microstructure orientation control and adaptive lubrication performance were achieved.
The study achieved low friction coefficient and long lifespan of MoS2-WS2 composite films in humid atmospheres and vacuum environments, improved lubrication adaptability, and overcame microstructural defects caused by differences in component properties.
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Figure CN120555968B_ABST