Reflection type line focusing super lens and preparation method thereof

Through the composite mold + cross-stepping imprinting process, the problems of insufficient phase modulation resolution of traditional line-focusing lenses and high cost of large-scale preparation of metasurface structures were solved, and the efficient and low-cost preparation of large-format and high-precision reflective line-focusing metalenses was achieved.

CN120595535APending Publication Date: 2025-09-05WUHAN UNIV OF TECH
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Patent Information

Application Number
CN202510965439.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-07-14
Publication Date
2025-09-05

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Abstract

The invention relates to the technical field of optics, in particular to a reflective line focusing super lens and a preparation method thereof.The preparation method comprises the steps that a micro-nano structure pattern of the reflective line focusing super lens is extracted to serve as a female mold pattern, and a super lens female mold is prepared on the surface of a mold substrate based on the female mold pattern; preparing a plurality of sub-molds based on the super-lens female mold, and fixing the sub-molds at equal intervals to form a composite working mold; sequentially preparing a metal reflecting layer, a transparent dielectric layer and a micro-nano structure layer on the surface of the substrate; the composite working die is adopted, and first-time cross stepping coining is carried out on the surface of the micro-nano structure layer; etching and cleaning for the first time; the composite working die is adopted, and second-time stepping coining is conducted on the interval area of the first-time cross stepping coining; and etching and cleaning for the second time to obtain the reflective line focusing super lens. The large-scale preparation of the super-surface linear super lens can be realized, and the preparation efficiency is improved.
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