Method and apparatus for measuring phase of optical wavefront based on rotating stack iteration engine

Abstract

The application discloses a kind of light wave front phase measurement method and device based on rotating stack iteration engine, the device includes laser, focusing lens, double optical wedge, electric precision rotary displacement table, random phase plate, light spot detector and computer;Along the direction of coherent light emitted by laser, focusing lens, double optical wedge, random phase plate and light spot detector are sequentially arranged, double optical wedge is placed by two identical optical wedge opposite 180 degrees reverse, double optical wedge is placed on electric precision rotary displacement table and is perpendicular to the incident direction of light beam, random phase plate is located behind the focal point of focusing lens and is perpendicular to the incident direction of light beam, the output end of light spot detector is connected with the input end of computer, the output end of computer is connected with the control end of electric precision rotary displacement table.The application overcomes the return error of reciprocating scanning of translation stage and the problem of low signal-to-noise ratio of single exposure, is less influenced by environment, simple structure, high resolution, meet the requirements of light wave front phase measurement.

Description

Technical Field

[0001] This invention relates to a method and apparatus for measuring the optical wavefront phase based on a rotating stacked iterative engine, belonging to the field of computational optical phase measurement technology. Background Technology

[0002] In optical wavefront phase measurement, coherent modulation imaging (CMI) technology acquires scattered light spots through a single exposure to recover the phase distribution of the optical field. However, single exposures are limited by environmental noise and detector dynamic range, resulting in a low signal-to-noise ratio for wavefront reconstruction, which is insufficient to meet the requirements of high-precision measurement. In addition, traditional stacked iterative engines rely on a translation stage to move a random phase plate or sample to obtain multiple light spots, but insufficient mechanical precision of the translation stage can introduce positional errors, affecting the iterative convergence speed and phase recovery accuracy.

[0003] Existing technologies, such as translation stages driven by piezoelectric ceramics, offer high accuracy but are expensive and poorly adaptable to complex optical paths. Therefore, there is an urgent need for a phase measurement scheme that is simple in structure, cost-effective, and can simultaneously improve both signal-to-noise ratio and accuracy. Summary of the Invention

[0004] To address the aforementioned issues, this invention provides a method and apparatus for measuring the wavefront phase of light based on a rotating stacked iterative engine. By rotating a double optical wedge to change the beam propagation path, and combining multiple exposures with a stacked iterative engine, the wavefront phase is measured by iterative calculations performed by a computer. This measurement method can eliminate the influence of mechanical errors of the translation stage on measurement accuracy, improve the signal-to-noise ratio compared to single exposure, is less affected by the environment, has a simple device structure, and high measurement resolution, thus meeting the requirements for wavefront phase measurement.

[0005] The technical solution of the present invention is as follows:

[0006] In a first aspect, the present invention provides an optical wavefront phase measurement device based on a rotating stacked iterative engine, comprising a laser, a focusing lens, a double optical wedge, an electrically driven precision rotary displacement stage, a random phase plate, a spot detector, and a computer; the focusing lens, the double optical wedge, the random phase plate, and the spot detector are arranged sequentially along the direction of the coherent light emitted by the laser, the double optical wedge consists of two identical wedges placed 180 degrees opposite each other, the double optical wedge is placed on the electrically driven precision rotary displacement stage and is perpendicular to the incident direction of the light beam, the random phase plate is located behind the focal point of the focusing lens and is perpendicular to the incident direction of the light beam, the output end of the spot detector is connected to the input end of the computer, and the output end of the computer is connected to the control end of the electrically driven precision rotary displacement stage.

[0007] In one embodiment of the present invention, the two optical wedges of the dual optical wedges have the same wedge angle, and the straight-line distance between the two optical wedges is adjustable.

[0008] In one embodiment of the present invention, when the dual optical wedges rotate, the light beam on the random phase plate can be translated laterally.

[0009] In one embodiment of the invention, the dual optical wedge is located between the lens and the random phase plate.

[0010] In one embodiment of the present invention, the random phase plate is located between the dual optical wedge and the spot detector.

[0011] Secondly, the present invention provides a method for measuring the optical wavefront phase based on a rotating stacked iterative engine, which uses an optical wavefront phase measurement device based on a rotating stacked iterative engine for measurement, and includes the following steps:

[0012] Step 1: Using the coherent light beam emitted by the laser as a reference, determine the optical axis. Place the random phase plate in the optical path, making the random phase plate perpendicular to the incident direction of the beam. Place the double optical wedges on the electric precision rotary translation stage and place them in the optical path, making the double optical wedges perpendicular to the incident direction of the beam. At the same time, ensure that each optical element is perpendicular to the beam and its center is kept on the optical axis. The phase distribution of the random phase plate is known. The distance between the double optical wedges is determined so that the emitted beam deviates from the optical axis. The computer controls the electric precision rotary translation stage to rotate the double optical wedges. The size of the random phase plate is such that all the beams passing through the double optical wedges pass through the random phase plate.

[0013] Step 2: Use a ruler to measure the straight-line distance L0 from the focusing lens to the random phase plate, the straight-line distance L1 from the focal point of the focusing lens after the light passes through the double optical wedge to the random phase plate, and the straight-line distance L2 from the random phase plate to the target surface of the light spot detector.

[0014] Step 3: The computer-controlled electric precision rotary displacement stage rotates the double optical wedges, and the scattered light spot is recorded by the light spot detector after each rotation of the double optical wedges;

[0015] Step 4: The intensity distribution of the light spot recorded by the light spot detector is input into the computer, and the computer uses the light spot data to perform phase processing on the wavefront of the light to be measured.

[0016] In one embodiment of the present invention, in step 3, a computer-controlled electric precision rotary displacement stage is used to rotate the double optical wedge. Every time the double optical wedge rotates by i degrees, the computer records the scattered light spot once. The double optical wedge is rotated m times in total. Every two rotations of the double optical wedge illuminate the light spot on the random phase plate with 30% to 70% overlap and redundancy. The computer records the scattered light spot m times, so that m*i is 360 degrees.

[0017] In one embodiment of the present invention, in step 4, a computer is used to iteratively calculate the m scattered light spots recorded by the light spot detector. The specific iterative process is as follows:

[0018] Step 41: Assign an initial random guess to the light wave distribution at the focal point of the focusing lens.

[0019] Step 42, the illumination light function propagating to the random phase plate surface for the nth time is:

[0020] Step 43: On the random phase plate surface, the distribution function of the random phase plate illuminated by the nth light wave is P. n The outgoing wave function of the nth illumination light after passing through the random phase plate is exit. n =illu n *P n ;

[0021] Step 44: Complex amplitude distribution of scattered light spot on the target surface of the nth light spot detector The nth iteration of the light wave exits. n The process of propagating a distance L2;

[0022] Step 45: The actual light spot distribution recorded by the light spot detector is I, and the complex amplitude distribution is diff. n and error

[0023] Step 46: Update the complex amplitude distribution of the scattered light spot on the target surface of the light spot detector, that is, update its amplitude to the amplitude of the actual recorded light spot of the light spot detector. Get diff' n , ψ n diff n Phase distribution;

[0024] Step 47, propagate diff in the reverse direction n Obtained on the random phase plate surface The nth light wave diff' represents n The process of propagating a distance L2 in the opposite direction;

[0025] Step 48: Update the illumination light function on the random phase plate. * indicates complex conjugation;

[0026] Step 49: The updated random phase panel distribution is illu n+1 =illu' n As the initial illumination light function of the light wave after the (n+1)th rotation of the double wedge;

[0027] Step 410: Rotate the double-wedge by i degrees, perform the (n+1)th iteration, and repeat steps 43 to 49 until the error is reached. nWhen the change is very small or even constant, the iteration process stops, and the illumination light function on the updated random phase plate is illu;

[0028] Step 411: Using the Fresnel diffraction integral formula, the light field distribution is obtained by observing the light propagating in the opposite direction to the focusing lens surface.

[0029]

[0030] Where λ is the wavelength of the coherent light emitted by the laser, k is the wave vector, k = 2π / λ, and U(x',y') is the wavefront distribution on the focusing lens surface.

[0031] Compared with the prior art, the technical effects of the present invention are as follows:

[0032] 1. The wavefront phase measurement method and apparatus based on a rotating stacked iterative engine provided by this invention changes the beam propagation path by rotating dual optical wedges. Combined with multiple exposures and a stacked iterative engine, the wavefront phase is measured by computer through iterative calculation. It does not require a traditional mechanical translation stage, overcomes the translation stage displacement error problem, and can eliminate the influence of translation stage mechanical error on measurement accuracy. Compared with single exposure, it can improve the signal-to-noise ratio, is less affected by the environment, has a simple structure, and high measurement resolution, meeting the requirements for wavefront phase measurement.

[0033] 2. The present invention has a simple structure, small size, and short acquisition time, which can meet the requirements of optical wavefront phase measurement.

[0034] 3. This invention does not require a more precise translation stage, has lower cost and higher resolution. Since it has very important applications in the field of wavefront phase measurement and the demand is relatively large, this device has a very broad market prospect. Attached Figure Description

[0035] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 A schematic diagram of the optical wavefront phase measurement device based on a rotating stacked iterative engine provided by the present invention.

[0037] In the figure: 1. Laser; 2. Focusing lens; 3. Double optical wedge; 4. Electric precision rotary displacement stage; 5. Random phase plate; 6. Spot detector; 7. Computer; where the straight-line distance from the focusing lens 2 to the random phase plate 5 is L0; the straight-line distance from the focal point of the focusing lens 2 to the random phase plate 5 is L1; and the straight-line distance from the random phase plate 5 to the target surface of the spot detector 6 is L2. Detailed Implementation

[0038] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0039] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0040] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and connections within two components. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0041] Please see Figure 1 The present invention provides an optical wavefront phase measurement device based on a rotating stacked iterative engine, comprising a laser 1, a focusing lens 2, a double optical wedge 3, an electric precision rotating displacement stage 4, a random phase plate 5, a spot detector 6, and a computer 7.

[0042] A focusing lens 2, a double optical wedge 3, a random phase plate 5, and a spot detector 6 are sequentially arranged along the coherent light direction emitted by the laser 1. The double optical wedge 3 consists of two identical optical wedges placed 180 degrees opposite each other. The double optical wedge 3 is placed on the electric precision rotary displacement stage 4 and is perpendicular to the incident direction of the light beam. The random phase plate 5 is located behind the focal point of the focusing lens 2 and is perpendicular to the incident direction of the light beam. The output end of the spot detector 6 is connected to the input end of the computer 7, and the output end of the computer 7 is connected to the control end of the electric precision rotary displacement stage 4.

[0043] The coherent light emitted by the laser 1 of the present invention is focused by a focusing lens 2. A double optical wedge 3 fixed by an electric precision rotary displacement stage 4 is placed behind the focusing lens 2. A random phase plate 5 is placed near the focal point to form a scattered light spot. A light spot detector 6 is used to record the scattered light spot. The electric precision rotary displacement stage 4 and the light spot detector 6 are respectively connected to a computer 7.

[0044] Optionally, the dual optical wedges 3 use two identical optical wedges with an angle of 4 degrees, and the two optical wedges are 2 mm apart in a straight line. The random phase plate 5 uses phase plates with 0 and π randomly distributed P, and the smallest unit is 18 μm. The straight line distance L0 from the focusing lens 2 to the random phase plate 5, measured by a ruler, is 9.3 cm. The distance L1 from the focal point of the focusing lens 2 to the plane of the random phase plate 5 is 3.8 cm. The distance L2 from the plane of the random phase plate 5 to the spot detector 6 is 2.8 cm. The resolution of the spot detector 6 is 2048 pixels × 2048 pixels, and the smallest unit is 7.4 μm. The computer 7 controls the electric precision rotary displacement stage 4 to rotate the dual optical wedges 3. After each rotation of the dual optical wedges 3, the spot detector 6 records the scattered light spot. The intensity distribution of the light spot recorded by the spot detector 6 is input into the computer 7, and the computer 7 uses the light spot data to perform phase processing on the wavefront of the light to be measured.

[0045] Optionally, the two optical wedges of the dual optical wedges 3 have the same wedge angle, and the straight-line distance between the two optical wedges is adjustable.

[0046] Optionally, when the dual optical wedge 3 rotates, the beam on the random phase plate 5 can be translated laterally.

[0047] Optionally, the dual optical wedge 3 is located between the lens 2 and the random phase plate 5.

[0048] Furthermore, this invention provides a method for measuring the optical wavefront phase based on a rotating stacked iterative engine, using an optical wavefront phase measurement device based on a rotating stacked iterative engine, comprising the following steps:

[0049] Step 1: Using the coherent light beam emitted by laser 1 as a reference, determine the optical axis, place the random phase plate 5 in the optical path, making the random phase plate 5 perpendicular to the incident direction of the beam, place the double optical wedges 3 on the electric precision rotary translation stage 4 and place them in the optical path, making the double optical wedges 3 perpendicular to the incident direction of the beam, and at the same time, ensure that each optical element is perpendicular to the beam and the center is kept on the optical axis. The phase distribution of the random phase plate 5 is known, and the double optical wedges 3 are spaced at a certain distance, so that the outgoing beam is deflected from the optical axis by a certain distance. The computer 7 controls the electric precision rotary translation stage 4 to rotate the double optical wedges 3. The size of the random phase plate 5 is such that all the beams transmitted through the double optical wedges 3 pass through the random phase plate 5.

[0050] Step 2: Use a ruler to measure the straight-line distance L0 from the focusing lens 2 to the random phase plate 5, the straight-line distance L1 from the focal point of the focusing lens 2 after it passes through the double optical wedge 3 to the random phase plate 5, and the straight-line distance L2 from the random phase plate 5 to the target surface of the spot detector 6.

[0051] Step 3: Computer 7 controls electric precision rotary displacement stage 4 to rotate double light wedge 3. After each rotation of double light wedge 3, light spot detector 6 records the scattered light spot.

[0052] Step 4: The intensity distribution of the light spot recorded by the light spot detector 6 is input into the computer 7, and the computer 7 uses the light spot data to perform phase processing on the wavefront of the light to be measured.

[0053] Optionally, in step 3, the computer 7 controls the electric precision rotary displacement stage 4 to rotate the double optical wedge 3. Every time the double optical wedge rotates 3i degrees, the computer 7 records the scattered light spot once. The double optical wedge is rotated a total of 3m times. The light spot that illuminates the random phase plate 5 after every two rotations of the double optical wedge 3 should have about 70% overlap. The computer 7 records the scattered light spot m times, so that m*i is 360 degrees.

[0054] Optionally, in step 4, the computer 7 performs iterative calculations on the m scattered light spots recorded by the light spot detector 6, and the specific iterative process is as follows:

[0055] Step 41: Assign an initial random guess to the light wave distribution at the focal point of focusing lens 2.

[0056] Step 42, the illumination light function propagating to the surface 5 of the random phase plate for the nth time is:

[0057] Step 43: On the surface of the random phase plate 5, the distribution function of the random phase plate 5 illuminated by the nth light wave is P. n The outgoing wave function of the nth illumination light after passing through the random phase plate is exit. n =illu n *P n ;

[0058] Step 44: Complex amplitude distribution of scattered light spot on the target surface of the nth light spot detector. The nth iteration of the light wave exits. n The process of propagating a distance L2;

[0059] Step 45: The actual light spot distribution recorded by the light spot detector 6 is I, and the complex amplitude distribution is diff. n and error

[0060] Step 46: Update the complex amplitude distribution of the scattered light spot on the target surface of the light spot detector 6, that is, update its amplitude to the amplitude of the actual recorded light spot of the light spot detector 6. Get diff' n , ψ n diff n Phase distribution;

[0061] Step 47, propagate diff in the reverse direction n Obtained on the surface of the random phase plate 5 The nth light wave diff' represents n The process of propagating a distance L2 in the opposite direction;

[0062] Step 48: Update the illumination light function on face 5 of the random phase plate. * indicates complex conjugation;

[0063] Step 49, the updated random phase panel 5 distribution is illu n+1 =illu' n As the initial illumination light function of the light wave after the (n+1)th rotation of the double wedge;

[0064] Step 410: Rotate the double light wedge by 3i degrees, perform the (n+1)th iteration, and repeat steps 43 to 49 until the error is reached. n When the change is very small or even constant, the iteration process stops, and the illumination light function on the updated random phase plate 5 is illu.

[0065] Step 411: Using the Fresnel diffraction integral formula, the light field distribution is obtained by observing the light propagating in the opposite direction to the surface of the focusing lens 2.

[0066]

[0067] Where λ is the wavelength of the coherent light emitted by laser 1, k is the wave vector, k = 2π / λ, and U(x',y') is the wavefront distribution on the surface of focusing lens 2.

[0068] In summary, the wavefront phase measurement method and apparatus based on a rotating stacked iterative engine provided by this invention involves focusing coherent light emitted from a laser through a focusing lens. The beam then passes through a double wedge composed of two identical optical wedges and converges to a single point. A scattered light spot is then formed on a detector via a random phase plate. The double wedges are rotated multiple times using an electrically driven precision rotary displacement stage, causing the illumination beam on the phase plate to be translated laterally multiple times. The detector records the scattered light spot formed each time. The illumination light field distribution on the random phase plate is calculated iteratively using the scattered light spot sequence, and the light field distribution on the focusing lens surface can be obtained by calculating using the Fresnel diffraction integral formula. This invention overcomes the problems of hysteresis error in reciprocating scanning by the translation stage and low signal-to-noise ratio in a single exposure. It is less affected by the environment, has a simple structure, and high measurement resolution, meeting the requirements for wavefront phase measurement.

[0069] Experimental results show that the device of this invention successfully realizes optical wavefront phase measurement based on a rotating stacked iterative engine. This device overcomes the displacement error problem of the translation stage, obtains multiple overlapping scattered light spots by rotating the optical wedge, and performs iterative calculations by computer to achieve optical wavefront phase measurement, thus improving the signal-to-noise ratio compared to single exposure. It has a simple structure, small size, and short acquisition time, meeting the requirements of optical wavefront phase measurement. It does not require a more precise translation stage, resulting in lower cost and higher resolution. Due to the crucial applications in wavefront phase measurement and the large demand, this device has a very broad market prospect.

[0070] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should all be included within the protection scope of the present invention.

Claims

1. A method for measuring the phase of an optical wavefront based on a rotating stacked iterative engine, comprising using an optical wavefront phase measurement device based on a rotating stacked iterative engine, characterized in that, The optical wavefront phase measurement device based on the rotating stacked iterative engine includes a laser (1), a focusing lens (2), a double optical wedge (3), an electric precision rotary displacement stage (4), a random phase plate (5), a spot detector (6), and a computer (7). The focusing lens (2), double optical wedge (3), random phase plate (5), and spot detector (6) are arranged sequentially along the coherent light direction emitted by the laser (1). The double optical wedge (3) consists of two identical optical wedges placed 180 degrees opposite each other. The double optical wedge (3) is placed on the electric precision rotary displacement stage (4) and is perpendicular to the incident direction of the light beam. The random phase plate (5) is located behind the focal point of the focusing lens (2) and is perpendicular to the incident direction of the light beam. The output end of the spot detector (6) is connected to the input end of the computer (7), and the output end of the computer (7) is connected to the control end of the electric precision rotary displacement stage (4). The two optical wedges of the double optical wedge (3) have the same wedge angle, and the linear distance between the two optical wedges is adjustable. The optical wavefront phase measurement method based on a rotating stacked iterative engine includes the following steps: Step 1: Using the coherent light beam emitted by the laser (1) as a reference, determine the optical axis, place the random phase plate (5) in the optical path, making the random phase plate (5) perpendicular to the incident direction of the beam, place the double optical wedge (3) on the electric precision rotary displacement stage (4) in the optical path, making the double optical wedge (3) perpendicular to the incident direction of the beam, and at the same time, ensure that each optical element is perpendicular to the beam and the center is kept on the optical axis. The phase distribution of the random phase plate (5) is known, and the distance between the double optical wedges (3) is such that the outgoing beam deviates from the optical axis. The computer (7) controls the electric precision rotary displacement stage (4) to rotate the double optical wedge (3). The size of the random phase plate (5) is such that all the beams passing through the double optical wedges (3) pass through the random phase plate (5). Step 2: Use a ruler to measure the straight distance L0 from the focusing lens (2) to the random phase plate (5), the straight distance L1 from the focal point of the focusing lens (2) after passing through the double optical wedge (3) to the random phase plate (5), and the straight distance L2 from the random phase plate (5) to the target surface of the spot detector (6). Step 3: The computer (7) controls the electric precision rotary displacement stage (4) to rotate the double light wedge (3). After each rotation of the double light wedge (3), the scattered light spot is recorded by the light spot detector (6). Step 4: The intensity distribution of the light spot recorded by the light spot detector (6) is input into the computer (7), and the computer (7) uses the light spot data to perform phase processing on the wavefront of the light to be measured. In step 3, the computer (7) controls the electric precision rotary displacement stage (4) to rotate the double light wedge (3). Every time the double light wedge (3) rotates by i degrees, the computer (7) records the scattered light spot once. The double light wedge (3) is rotated m times in total. Every two rotations of the double light wedge (3) illuminate the light spot on the random phase plate (5) with 30%~70% overlap and redundancy. The computer (7) records the scattered light spot m times, so that m*i is 360 degrees. In step 4, the computer (7) performs iterative calculations on the m scattered light spots recorded by the light spot detector (6). The specific iterative process is as follows: Step 41: Give an initial random guess to the light wave distribution at the focal point of the focusing lens (2). ; Step 42, the illumination light function propagating to the surface of the random phase plate (5) for the nth time is: ; Step 43: On the surface of the random phase plate (5), the distribution function of the random phase plate (5) illuminated by the nth light wave is: The outgoing wave function of the nth illumination light after passing through the random phase plate is: ; Step 44, Complex amplitude distribution of scattered light spot on the target surface of the nth light spot detector (6) , Represents the light wave in the nth iteration. Transmission distance The process; Step 45, the actual recorded light spot distribution of the light spot detector (6) is I, and the complex amplitude distribution is... and error ; Step 46: Update the complex amplitude distribution of the scattered light spot on the target surface of the light spot detector (6), that is, update its amplitude to the amplitude of the actual recorded light spot of the light spot detector (6). ,get , , for Phase distribution; Step 47, Reverse propagation Obtained on the surface of the random phase plate (5) , Represents the nth light wave Reverse propagation distance The process; Step 48: Update the illumination light function on the surface of the random phase plate (5). , Indicates complex conjugation; Step 49, the updated random phase plate (5) distribution is as follows As the initial illumination light function of the light wave after the (n+1)th rotation of the double light wedge (3); Step 410: Rotate the double light wedge (3)i degrees, perform the (n+1)th iteration, and repeat steps 43 to 49 until the error... When the change is very small or even constant, the iteration process stops, and the illumination light function on the updated random phase plate (5) is: ; Step 411: From the Fresnel diffraction integral formula, The light propagates in the opposite direction to the surface of the focusing lens (2) to obtain the light field distribution. in, It is the wavelength of the coherent light emitted by the laser (1), and k is the wave vector. , This refers to the wavefront distribution on the plane of the focusing lens (2).

2. The optical wavefront phase measurement method based on a rotating stacked iterative engine according to claim 1, characterized in that, When the double optical wedge (3) rotates, the beam on the random phase plate (5) can be translated laterally.

3. The optical wavefront phase measurement method based on a rotating stacked iterative engine according to claim 1, characterized in that, The dual-wedge (3) is located between the lens (2) and the random phase plate (5).

4. The optical wavefront phase measurement method based on a rotating stacked iterative engine according to claim 1, characterized in that, The random phase plate (5) is located between the dual optical wedge (3) and the spot detector (6).

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