A method of processing a configuration file

Abstract

The embodiment of the present specification provides a processing method of a configuration file, by responding to the first configuration instruction carrying a device type, displaying a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool in a display page, so that a user can configure a target hierarchical relationship configuration tree by performing a configuration operation on a target sub-node and configuring the target sub-node under a first-level node of the default hierarchical relationship configuration tree, and after the target hierarchical relationship configuration tree is configured, the user can generate a configuration file by performing a saving operation on the target hierarchical relationship configuration tree, and the configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file. By this method, the configuration of the UI page does not need the user to compile the code level for various semiconductor process equipment, the purpose of simplifying the configuration process of the UI page is achieved, and the configuration efficiency of the UI page is improved.

Description

Technical Field

[0001] This specification relates to the field of semiconductor technology, specifically to page configuration technology in the field of semiconductor technology, and more specifically, to a method for processing configuration files. Background Technology

[0002] With the continuous development of semiconductor technology, various semiconductor process equipment has emerged. This equipment can be used to perform various semiconductor processes such as etching, chemical vapor deposition, and physical vapor deposition on process objects (e.g., wafers). Among these technologies, configuring the UI (User Interface Design, or human-computer interaction) page of semiconductor process equipment is relatively cumbersome. Summary of the Invention

[0003] This specification provides a configuration file processing method to simplify the configuration process of UI pages and improve the configuration efficiency of UI pages.

[0004] To achieve the above technical objectives, the embodiments of this specification provide the following technical solutions:

[0005] Firstly, one embodiment of this specification provides a configuration file processing method applied to semiconductor process equipment, the configuration file processing method comprising:

[0006] In response to a first configuration instruction carrying a device type, a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type are displayed on the display page; the device type is used to describe the type of the semiconductor process equipment; the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, and the first-level node corresponds to a subpage identifier of the human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes multiple sub-nodes, and the sub-nodes correspond to subpages in the UI page;

[0007] In response to a configuration operation targeting a target child node, the target child node is configured under the first-level node or other child nodes to obtain a target hierarchical relationship configuration tree; the target child node is a child node in the page navigation pool.

[0008] In response to a save operation for the target hierarchical relationship configuration tree, a configuration file corresponding to the target hierarchical relationship configuration tree is generated. The configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

[0009] Secondly, one embodiment of this specification provides a configuration file processing apparatus applied to semiconductor process equipment, the configuration file processing apparatus comprising:

[0010] A first display module is configured to, in response to a first configuration instruction carrying a device type, display a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type on a display page; the device type describes the type of the semiconductor process equipment; the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, and the first-level node corresponds to a subpage identifier of the human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes multiple sub-nodes, and the sub-nodes correspond to subpages in the UI page;

[0011] The hierarchical configuration module is used to respond to configuration operations on a target child node by configuring the target child node under the first-level node or other child nodes to obtain a target hierarchical relationship configuration tree; the target child node is a child node in the page navigation pool.

[0012] The file generation module is used to generate a configuration file corresponding to the target hierarchical relationship configuration tree in response to a save operation for the target hierarchical relationship configuration tree. The configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

[0013] Thirdly, one embodiment of this specification provides a semiconductor process apparatus, including: a process chamber and a controller having a communication connection with the process chamber, wherein the controller stores a UI page configuration tool, and the UI page configuration tool is configured to:

[0014] In response to a first configuration instruction carrying a device type, a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type are displayed on the display page; the device type is used to describe the type of the semiconductor process equipment; the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, and the first-level node corresponds to a subpage identifier of the human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes multiple sub-nodes, and the sub-nodes correspond to subpages in the UI page;

[0015] In response to a configuration operation targeting a target child node, the target child node is configured under the first-level node or other child nodes to obtain a target hierarchical relationship configuration tree; the target child node is a child node in the page navigation pool.

[0016] In response to a save operation for the target hierarchical relationship configuration tree, a configuration file corresponding to the target hierarchical relationship configuration tree is generated. The configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

[0017] Fourthly, one embodiment of this specification also provides a computing device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the configuration file processing method described above.

[0018] Fifthly, one embodiment of this specification also provides a computer-readable storage medium storing a computer program that, when executed by a processor, implements the configuration file processing method described above.

[0019] Sixthly, embodiments of this specification provide a computer program product or computer program, the computer program product including a computer program stored in a computer-readable storage medium; the processor of the computer device reads the computer program from the computer-readable storage medium, and when the processor executes the computer program, it implements the steps of the above-described configuration file processing method.

[0020] As can be seen from the above technical solution, the configuration file processing method provided in this specification, in response to a first configuration instruction carrying a device type, displays a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type on the display page. This allows the user to configure the target child node under the first-level node of the default hierarchical relationship configuration tree through configuration operations on the target child node, thereby obtaining the target hierarchical relationship configuration tree. After the target hierarchical relationship configuration tree is configured, the user can generate a configuration file through a save operation on the target hierarchical relationship configuration tree. This configuration file is used to render the UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file. Thus, during the configuration file generation process, the configuration of the UI page of the semiconductor process equipment can be achieved through configuration operations on the target child node and a save operation on the target hierarchical relationship configuration tree, without requiring the user to perform code-level compilation for various semiconductor process equipment. This simplifies the UI page configuration process and improves the configuration efficiency of the UI page. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments or prior art of this specification, the drawings used in the description of the embodiments or prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this specification. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0022] Figure 1 A flowchart illustrating a configuration file processing method provided for one embodiment of this specification;

[0023] Figure 2 A schematic diagram of a display page provided for one embodiment of this specification;

[0024] Figure 3 A schematic diagram of a display page provided for another embodiment of this specification;

[0025] Figure 4 A schematic diagram of a display page provided for yet another embodiment of this specification;

[0026] Figure 5 A schematic diagram of a display page provided for another embodiment of this specification;

[0027] Figure 6 A schematic diagram of an interface for displaying a page, provided as an alternative embodiment of this specification;

[0028] Figure 7 A schematic diagram of an example configuration file structure provided for one embodiment of this specification;

[0029] Figure 8 This is a schematic diagram of the structure of a computing device provided for one embodiment of this specification. Detailed Implementation

[0030] Unless otherwise defined, the technical or scientific terms used in the embodiments of this specification shall have the ordinary meaning understood by one of ordinary skill in the art to which this specification pertains. The terms "first," "second," and similar terms used in the embodiments of this specification do not indicate any order, quantity, or importance, but are merely used to avoid confusion of constituent elements.

[0031] Unless the context otherwise requires, throughout this specification, "a plurality of" means "at least two," and "including" is interpreted as open-ended or encompassing, that is, "including, but not limited to." In the description of this specification, terms such as "one embodiment," "some embodiments," "exemplary embodiment," "example," "specific example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this specification. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example.

[0032] The technical solutions in the embodiments of this specification will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this specification, and not all embodiments. Based on the embodiments in this specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this specification.

[0033] Overview

[0034] The fabrication process of semiconductor devices involves several key technological steps, such as etching and film deposition. Various types of semiconductor process equipment are essential for implementing these steps. Because the fabrication process involves diverse technological steps, there are also various types of semiconductor process equipment corresponding to each step. Furthermore, to meet the fabrication requirements of various semiconductor devices, multiple types of semiconductor process equipment may be used to perform the same technological step. For example, in the etching process, multiple types of etching equipment may be needed to meet the etching requirements of wafers of different sizes or different device types. Therefore, a semiconductor process equipment manufacturer may have a large number of semiconductor process equipment available for sale.

[0035] To improve the usability of semiconductor process equipment and make it easier to operate and understand, manufacturers can incorporate a user interface (UI) into the equipment. This allows users to access various parameters and control the equipment through the UI. However, currently, users need to compile separate code for different equipment types to render the UI. Since the UI may differ between equipment types, users must compile the relevant code individually for each equipment type. Furthermore, if adjustments to the UI are needed after compilation, the code must be recompiled, making the entire process quite complex.

[0036] To reduce the difficulty of generating and adjusting UI pages, the inventors discovered through research that a UI page configuration tool can be provided in semiconductor process equipment. This UI page configuration tool can be configured to provide a display page at runtime. Upon receiving a first configuration instruction carrying the device type, the display page shows a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type. The device type describes the type of the semiconductor process equipment. The default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, and the first-level node corresponds to the subpage identifier of the human-computer interaction UI page of the semiconductor process equipment. The page navigation pool includes multiple sub-nodes, and the sub-nodes correspond to the U... The UI page configuration tool allows users to configure target child nodes. Specifically, it responds to configuration operations on target child nodes by placing them under the first-level node or other child nodes. This provides a visual interface for configuring child nodes under each first-level node, thus setting the hierarchical relationship of nodes in the target hierarchical configuration tree. Finally, in response to saving the target hierarchical configuration tree, the tool generates a configuration file corresponding to it. This configuration file is used to render the UI page corresponding to the target hierarchical configuration tree when the semiconductor process equipment loads the configuration file. Therefore, this UI page configuration tool enables the configuration of UI pages for semiconductor process equipment without requiring users to compile code at the code level for various semiconductor process equipment, simplifying the UI page configuration process and improving configuration efficiency.

[0037] Based on the above concept, this specification provides a method for processing configuration files. The following will describe the method for processing configuration files provided by this specification in conjunction with the accompanying drawings.

[0038] Exemplary methods

[0039] To be applied Figure 1 Taking the controller in the example, the controller can be a host computer in the semiconductor process equipment, or it can be a processor in the host computer. This specification does not limit it in this way, and it depends on the actual situation. Some embodiments in this specification illustrate the processing method of the configuration file. The processing method of the configuration file includes:

[0040] S101: In response to a first configuration instruction carrying a device type, a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type are displayed on the display page; the device type is used to describe the type of the semiconductor process equipment; the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment; the first-level node corresponds to a subpage identifier of the human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes multiple sub-nodes; the sub-nodes correspond to subpages in the UI page.

[0041] refer to Figure 2 , Figure 2 This diagram illustrates the display page before the first configuration command is received. Figure 2 In this embodiment, the user can trigger the first configuration instruction by touching or clicking the device type drop-down box and selecting the device type from the drop-down list. For example, in some embodiments, the user can touch or click the device type drop-down box to display the drop-down list on the display page. The drop-down list can use Etch, CVD, and PVD to represent semiconductor process equipment such as etching equipment, chemical vapor deposition equipment, and physical vapor deposition equipment, respectively. When there are multiple types of the same type of semiconductor process equipment, these semiconductor process equipment can be distinguished by serial numbers. For example, taking etching equipment as an example, assuming there are three types of etching equipment, they can be represented by Etch1, Etch2, and Etch3, respectively. That is, in this embodiment, the device type can be represented by the device identifier (e.g., Etch, CVD, PVD, etc.) in the drop-down list. In addition, in some embodiments, the first configuration instruction may also include voice instructions (e.g., the user can input the voice instruction by sending the voice message "Device type is CVD" to the controller with voice reception function). This specification does not limit this and depends on the actual situation.

[0042] A subpage identifier is an identifier used to identify a subpage, and can be used to uniquely identify a subpage. In one embodiment, the subpage identifier may include the subpage name; in another embodiment, the subpage identifier may include the subpage ID, etc. This specification does not limit the specific implementation.

[0043] The default hierarchical configuration tree and page navigation pool can both correspond to the device type. For example, taking an etching device as an example, when the device type carried in the first configuration instruction is an etching device, the page diagram of the displayed page is shown below. Figure 3 The default hierarchical tree configuration can include a root node (UI) and multiple first-level nodes (e.g., Figure 3The system includes nodes for Operation (main operation node), Service (service node), Recipes (recipe node), Diagnose (fault diagnosis node), Datalog (data log node), Settings (setting parameter node), Host (host control node), and Alarm (alarm node). These first-level nodes correspond to the main operation subpage, service subpage, recipe subpage, fault diagnosis subpage, data log subpage, settings subpage, host control subpage, and alarm subpage in the UI page, respectively. The page navigation pool displays some or all of the sub-nodes corresponding to the device type (e.g., etching equipment). These sub-nodes may include, for example, Process Job sub-nodes (corresponding to process task subpages) and Control Job sub-nodes (corresponding to control task subpages). It is understood that for different types of semiconductor process equipment, their respective default hierarchical relationship configuration trees may be the same, but their respective sub-nodes in the page navigation pool may be different. However, this specification does not limit this; in some implementations, the default hierarchical relationship configuration trees for different types of semiconductor process equipment may be different, while their respective sub-nodes in the page navigation pool may be the same. This specification does not exhaustively list these examples.

[0044] In one embodiment of this specification, the default hierarchical relationship configuration tree and the page navigation pool corresponding to each device type are pre-established and stored in the semiconductor process equipment. That is, before generating and rendering the configuration file, the default hierarchical relationship configuration tree and page navigation pool corresponding to each device type of the semiconductor process equipment can be pre-established and stored in the semiconductor process equipment. When it is necessary to modify the default hierarchical relationship configuration tree and page navigation pool, operations such as adding, modifying, and deleting content can be performed on the stored default hierarchical relationship configuration tree and page navigation pool to correct or update them. The default hierarchical relationship configuration tree is not empty and can include at least a root node and one first-level node to meet the basic generation requirements of the configuration file.

[0045] S102: In response to a configuration operation for a target child node, the target child node is configured under the first-level node or other child nodes to obtain a target hierarchical relationship configuration tree; the target child node is a child node in the page navigation pool.

[0046] After displaying the default hierarchical relationship configuration tree corresponding to the device type and the page navigation pool corresponding to the device type, users can configure the hierarchical relationship between various subpages in the UI page through configuration operations.

[0047] refer to Figure 4 and Figure 5 Configuration operations for the target child node can be as follows: Figure 4 The click action on the "+" sign to the right of the selected target child node can also be as follows: Figure 5 The drag-and-drop operation for the selected target child node can also be, in some implementations, a voice operation for the target child node (e.g., issuing a voice command such as "Add Process Job to Hardware"). This specification does not limit this; it depends on the specific circumstances.

[0048] In the hierarchy tree section, the hierarchical relationships between nodes represent the hierarchical relationships between the child pages corresponding to each node. For example, in Figures 4-5 In the configuration tree, the first-level node Service includes three sub-nodes: Module Mode, Material Movement, and Hardware. These three sub-nodes are parallel sub-nodes under the first-level node Service (also known as second-level nodes). Among these three second-level nodes, the Hardware sub-node includes two sub-nodes: LoadPorts and VTM (vacuum robot), which are parallel sub-nodes. The hierarchical relationship configuration tree displays the hierarchical relationship between the corresponding sub-pages in the UI page through the above-mentioned node hierarchy. This visually helps users understand the hierarchical relationship between the sub-pages in the UI page during the configuration process, simplifying the configuration method. It is understood that when a sub-node has no lower-level node in the target hierarchical relationship tree, this sub-node can also be called a leaf node (e.g., ...). Figure 5 In this context, Module Mode, Material Movement, LoadPorts, and VTM child nodes are all leaf nodes. When a child node has a lower-level node, it can be called an N-level node based on its hierarchy. For example... Figure 5 In this context, the Hardware child node can be called a secondary node.

[0049] It is understandable that if the hierarchical configuration tree section only includes the root node and first-level nodes, this hierarchical configuration tree can be called the default hierarchical configuration tree. This default hierarchical configuration tree can be automatically loaded and generated after the user selects the device type, thereby simplifying user operations. In some implementations, the order of multiple first-level nodes can be adjusted according to user needs. When child nodes are added to the default hierarchical configuration tree, this default hierarchical configuration tree can be called the target hierarchical configuration tree. After the user completes the configuration of at least one child node under a first-level node, the target hierarchical configuration tree can be saved through the save operation.

[0050] S103: In response to the save operation for the target hierarchical relationship configuration tree, a configuration file corresponding to the target hierarchical relationship configuration tree is generated. The configuration file is used to render the UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

[0051] refer to Figures 4-5 When the target hierarchical configuration tree displayed in the hierarchy configuration tree column meets the user's UI page configuration requirements for the semiconductor process equipment of that device type, the configuration file corresponding to the target hierarchical configuration tree can be generated by clicking the Save button. In some embodiments, the save operation can refer to a click or touch operation on the Save button. In other embodiments, the save operation can also refer to an operation that emits voice information containing "save" or similar information. This specification does not limit this.

[0052] In step S103, the generated configuration file can render and save the UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file, thereby realizing the configuration operation of the UI page of the semiconductor process equipment. In some embodiments, the configuration file can be one of the startup items of the semiconductor process equipment, that is, the semiconductor process equipment will automatically load the configuration file during the startup process, without the need for the user to manually open the configuration file, which helps to simplify user operation and optimize user experience.

[0053] To support user configuration requirements for the default page loaded in the UI, in some implementations, before generating the configuration file corresponding to the target hierarchical relationship configuration tree in response to a save operation for the target hierarchical relationship configuration tree, the method further includes:

[0054] In response to the selection operation of the child node, the subpage corresponding to the selected child node is set as the default loading page, which is the subpage displayed after the semiconductor process equipment is started.

[0055] Similarly, the selection operation for the child node includes, but is not limited to, at least one of the following: click operation, touch operation, and voice operation. When a user selects a child node in the target hierarchy configuration tree, that child node can be configured as the default loading page. The default loading page can be considered as the page that is displayed by default after the UI page is rendered, or it can be considered as the first page displayed after the UI page is rendered.

[0056] In this embodiment, the default loading page can be configured simply by selecting it, which simplifies the UI page configuration process and improves configuration efficiency.

[0057] Still referencing Figure 6 In some implementations, to ensure that the user is aware of which subpage is configured as the default loading page, the configuration file processing method further includes:

[0058] The display page shows the name and / or path of the default loaded page.

[0059] For example in Figure 6 If the selected child node is the LoadPorts child node, then the displayed page will show the path of this child node: Service / Hardware / LoadPorts, and its name (LoadPorts). Thus, by displaying the name and / or path of the default loading page, users can clearly identify which child node has been selected and its hierarchical relationship with other child nodes. This provides users with more information from the displayed page, helping them to better configure the UI page.

[0060] To meet the configuration requirements of subpage loading animations, in some implementations, the method for processing the configuration file further includes:

[0061] In response to a second configuration instruction carrying an animation type, the animation effect corresponding to the animation type is set as the loading animation of the subpage.

[0062] refer to Figure 6 The second configuration command can be triggered by triggering the animation type drop-down list and selecting the animation type from the drop-down list. This animation type can be mainly used for subpages containing robotic arms, for example, to set the actions and animations of the robotic arm when it is performing processes in the chamber. Figure 6 The key-6 in the code represents the animation type, indicating a specific animation type. Selecting the animation type allows you to configure the loading animation. This animation type includes, but is not limited to, fade-in, translation, and rotation. This manual does not impose any restrictions on this type; the specific choice depends on the actual situation.

[0063] In some implementations, to enable users to explicitly configure the animation type, which corresponds to the type of the semiconductor process equipment, the configuration file processing method further includes:

[0064] The animation type is displayed on the display page.

[0065] In this implementation, by setting the animation type, the loading effect of the subpage can be optimized on the one hand, and the different types of machines can be distinguished by the animation type. For example, for a 6K machine, the animation type corresponding to key-6 can be selected as the loading animation of the subpage, and for an 8K machine, the animation type corresponding to key-8 can be selected as the loading animation of the subpage, and so on, so as to help users distinguish the machine type through the animation type.

[0066] Furthermore, displaying the animation type on the actual page helps users clearly identify the configured animation type, enabling them to better configure the UI page.

[0067] In one feasible implementation, a viable method for generating a configuration file is provided, specifically, generating a configuration file corresponding to the target hierarchical relationship configuration tree includes:

[0068] The device type is added as a UI type element value in the target file, which includes a file in Extensible Markup Language (XML) format. The UI type element value is used to describe the type of semiconductor process equipment corresponding to the configuration file in XML format.

[0069] Traverse all nodes in the target hierarchical relationship configuration tree, and add the node values ​​of each node to the elements of the target file to obtain the configuration file.

[0070] The target file can refer to an intermediate file in the process of generating the configuration file, or the state before the configuration file is generated. In the process of generating the configuration file, a blank XML file can be created first as the target file. After adding the device type as the UI type element value and the node values ​​of each level of nodes as elements in the target file, the target file becomes the final configuration file.

[0071] In this embodiment, once the target hierarchical relationship configuration tree is determined, a save operation can be performed to trigger the generation of a configuration file corresponding to the target hierarchical relationship configuration tree. This configuration file can be in XML format. Data recorded in an XML configuration file is saved in text form, offering good readability. Furthermore, custom tags and data structures can be defined in an XML configuration file, allowing it to accommodate data of different types and structures. This makes it suitable for storing complex configuration information and improves the scalability of the configuration file.

[0072] In this embodiment, the device type is recorded in the target file using a UIType element value, so that the semiconductor process equipment can distinguish the device type by the UIType element value when loading the configuration file. Furthermore, by traversing each level of the target hierarchical configuration tree, the node values ​​of each level are added as elements in the target file, thereby recording the hierarchical relationship between the various subpages in the UI page. After all elements in the target file are configured, the target file can be saved as a configuration file.

[0073] In one implementation, when an animation type is configured, the step of generating the configuration file corresponding to the target hierarchical relationship configuration tree further includes:

[0074] The animation type is added as an animation type element value in the target file, and the animation type element value is used to describe the loading animation type of the subpage.

[0075] Similar to device type, in this embodiment, the animation type can be recorded as an animation type element value, so that when the semiconductor process equipment loads the configuration file, it can identify the animation type through the animation type element value and load each subpage with the corresponding animation effect.

[0076] refer to Figure 7 , Figure 7 An example of an XML-formatted configuration file (UIConfig.xml) is shown below. A brief introduction to this configuration file follows:

[0077] a) <?xml version="1.0"?>

[0078] <UIConfig xmlns:xsd="http: / / www.w3.org / 2001 / XMLSchema"xmlns:xsi="http: / / www.w3.org / 2001 / XMLSchema-instance"> To standardize the format of XML configuration files.

[0079] b) The AnimationType element value is used to identify the selected animation type. Key_6 and Key_8 correspond to different animations. The UI page will use the animation type identified by this element value for rendering when it loads.

[0080] c) The UIType element value is used to identify the device type. When loading the configuration file for semiconductor process equipment, the dynamic link library corresponding to the device type to be loaded can be determined based on this element value. This element value can be configured as an abbreviation such as Etch, PVD, and CVD. When the UI page is rendered, it is mapped to the fully named dynamic link library (e.g., Naura.Framework.UI.Components.Etch.dll).

[0081] d) The UITypeAndNames field contains the entire target hierarchy configuration tree.

[0082] e) The HeadLine field corresponds to the tree root (or root node), that is... Figures 3-6 UI in the middle.

[0083] f) The content of the UIName field is Figures 3-6 The first-level nodes in the table include Operation, Service, and Alarm (each first-level node contains child nodes).

[0084] g) The FirstAliasNames field is the alias for nodes such as Operation, Service, and Alarm. This is the custom name that the user needs to display on the UI page. In other words, the user can name the first-level node with a custom name.

[0085] h) The FirstKeyNames field contains the key name for nodes such as Operation, Service, and Alarm. It cannot be modified and is used as the index for instantiating the page during UI rendering. This field name and its processing logic reside in the backend and do not need to be displayed on the main page.

[0086] i) The SubNames field contains all the second-level nodes under the corresponding first-level node (second-level nodes can contain child nodes).

[0087] j) The UISubName field is Figures 3-6 The secondary nodes, such as Hardware, are included (a secondary node can contain child nodes).

[0088] k) The SecondAliasName field is the alias for nodes such as Hardware, which is the custom name that the user needs to display on the UI page. In other words, the user can name the second-level node with a custom name.

[0089] The SecondKeyNames field contains the key name for nodes such as Hardware. It cannot be modified and is used as an index when the UI page is instantiated. This field name and its processing logic reside in the backend and do not need to be displayed on the main page.

[0090] The content of the LeafNames field is all the third-level nodes (leaf nodes, i.e., excluding the next level nodes) under the corresponding second-level node.

[0091] n) The UILeafName field is Figure 6 Leaf nodes such as LoadPort and VTM.

[0092] o) The ThirdAliasNames field is the alias for nodes such as LoadPort, which is the custom name that the user needs to display on the UI page. In other words, the user can name the third-level node with a custom name.

[0093] p) The ThirdKeyNames field contains the key name for nodes such as LoadPort. It cannot be modified and is used as an index for instantiating the page during UI rendering. This field name and its processing logic reside in the backend and do not need to be displayed on the page.

[0094] Accordingly, in one embodiment of this specification, after generating the configuration file corresponding to the target hierarchical relationship configuration tree, the method further includes:

[0095] In response to the startup operation, the configuration file is loaded, and the UI page corresponding to the target hierarchical relationship configuration tree is rendered.

[0096] In this embodiment, once the configuration file is generated, the semiconductor process equipment can render the UI page corresponding to the target hierarchical configuration tree by loading the configuration file upon startup. The method for generating the configuration file can be found in the relevant description above, and will not be repeated here.

[0097] In some implementations, loading the configuration file and rendering the UI page corresponding to the target hierarchical relationship configuration tree specifically includes:

[0098] Load the configuration file, select the interface in the dynamic link library corresponding to the UI type element value according to the UI type element value in the configuration file, determine whether the loaded interface includes the target interface, the target interface includes the interface corresponding to the type of semiconductor process equipment described by the UI type element value, if so, use the simple factory pattern to create the main frame view of the UI page, parse the parameter information in the configuration file to render the UI page corresponding to the target hierarchical relationship configuration tree;

[0099] If not, render the default UI page.

[0100] A Dynamic Link Library (DLL) is a library of code and data that can be shared by multiple programs at runtime. DLLs can include functions and interfaces. In a DLL, a function is a piece of code that performs a specific task, accepts input, and returns a result; an interface is an abstract type that defines a set of function signatures. If a type implements an interface, it must provide the methods implemented by all the functions in the interface.

[0101] The type of semiconductor process equipment can refer to the processes or functions that the semiconductor process equipment can perform. The types of semiconductor process equipment can include etching equipment, film deposition equipment, and cleaning equipment, etc. Among them, etching equipment can be further subdivided into ICP (Inductively Coupled Plasma) equipment and CCP (Capacitively Coupled Plasma) equipment, etc. Film deposition equipment can be further subdivided into PVD (Physical Vapor Deposition) equipment and CVD (Chemical Vapor Deposition) equipment, etc.

[0102] In this embodiment, the target interface corresponds to the target type of semiconductor process equipment, which is the type of semiconductor process equipment described by the UI type element value. The target interface is used to define the method implemented by the target type of semiconductor process equipment. Therefore, by determining whether the dynamic link library includes the target interface, it can be determined whether the configuration file corresponds to the type of the current semiconductor process equipment. When the interface of the loaded dynamic link library includes the target interface, it can be clearly determined that the type of the current semiconductor process equipment corresponds to the configuration file. Thus, the UI page can be rendered based on the parameter information of the configuration file, avoiding the situation where the rendered UI page does not correspond to the type of semiconductor process equipment (for example, if the UI page of the etching equipment shows control options related to the film deposition equipment, it is called that the UI page does not correspond to the type of semiconductor process equipment).

[0103] If the target interface is not included in the loaded dynamic link library, it indicates that the type of the current semiconductor process equipment does not correspond to the configuration file. In this case, the default UI page can be rendered. The default UI page can include pages common to semiconductor process equipment, and these pages can include modules common to semiconductor process equipment (such as alarm modules).

[0104] The Simple Factory pattern is a design pattern whose main goal is to provide a mechanism for creating objects, thereby separating the concrete product instantiation process from the user. This allows users to create the desired product objects without needing to know the specific details of product creation. The Simple Factory pattern can include a factory class, an abstract product class, and concrete product classes. The factory class provides a static method (or a non-static method) to create a product object. This method typically determines which concrete product object to create based on a parameter (such as a string or an enumeration value). The abstract product class defines the common interface for all concrete products, and the factory class's method returns an object of this interface or class. The concrete product classes implement the abstract product class or interface; they are the objects to be created. The factory class's creation method instantiates one of these concrete product classes based on the input parameters and returns an object of the abstract product class or interface.

[0105] In this implementation, by using the Simple Factory pattern, when creating the main frame view of the UI page, it is only necessary to call the creation method of the factory class and pass in the corresponding parameters to obtain the main frame view of the UI page. This separates the user of the product (i.e., the client code) from the product creation process, making the code more modular and reusable, which is beneficial to improving the modularity and reusability of the code.

[0106] In this embodiment, by determining whether the target interface is implemented or inherited in the dynamic link library, the problem of forcibly rendering the UI page corresponding to the configuration file when the target interface is not implemented or inherited is avoided, which may cause errors, thus improving the robustness of the configuration file processing method.

[0107] Exemplary device

[0108] In one exemplary embodiment of this specification, a configuration file processing apparatus is also provided, applied to a semiconductor process apparatus, the configuration file processing apparatus comprising:

[0109] A first display module is configured to, in response to a first configuration instruction carrying a device type, display a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type on a display page; the device type describes the type of the semiconductor process equipment; the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, and the first-level node corresponds to a subpage identifier of the human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes multiple sub-nodes, and the sub-nodes correspond to subpages in the UI page;

[0110] The hierarchical configuration module is used to respond to configuration operations on a target child node by configuring the target child node under the first-level node or other child nodes to obtain a target hierarchical relationship configuration tree; the target child node is a child node in the page navigation pool.

[0111] The file generation module is used to generate a configuration file corresponding to the target hierarchical relationship configuration tree in response to a save operation for the target hierarchical relationship configuration tree. The configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

[0112] Specific limitations regarding the configuration file processing device can be found in the limitations regarding the configuration file processing method described above, and will not be repeated here. Each module in the aforementioned configuration file processing device can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in hardware or independently of the processor in the computer device, or stored in software in the memory of the computer device, so that the processor can call and execute the operations corresponding to each module.

[0113] Exemplary device

[0114] One embodiment of this specification provides a semiconductor process apparatus, including: a process chamber and a controller having a communication connection with the process chamber, the controller storing a UI page configuration tool, the UI page configuration tool being configured to:

[0115] In response to a first configuration instruction carrying a device type, a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type are displayed on the display page; the device type is used to describe the type of the semiconductor process equipment; the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, and the first-level node corresponds to a subpage identifier of the human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes multiple sub-nodes, and the sub-nodes correspond to subpages in the UI page;

[0116] In response to a configuration operation targeting a target child node, the target child node is configured under the first-level node or other child nodes to obtain a target hierarchical relationship configuration tree; the target child node is a child node in the page navigation pool.

[0117] In response to a save operation for the target hierarchical relationship configuration tree, a configuration file corresponding to the target hierarchical relationship configuration tree is generated. The configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

[0118] The controller can be the host computer of the semiconductor process equipment, and the UI page configuration tool can be a software program. When running, the UI page configuration tool can implement the configuration file processing method described in any of the above embodiments. For details on the configuration file processing method, please refer to the relevant descriptions above; this specification will not repeat them here.

[0119] Another embodiment of this application also proposes a computing device, see [link to relevant documentation] Figure 8 As shown, an exemplary embodiment of this specification also provides a computing device, including: a memory and a processor, the memory storing a computer program, the processor executing the computer program and performing steps in the configuration file processing method according to various embodiments of this specification described above.

[0120] The internal structure of the computing device can be as follows: Figure 8 As shown, the computing device includes a processor, memory, network interface, and input devices connected via a system bus. The processor provides computing and control capabilities. The memory includes a non-volatile storage medium and internal memory. The non-volatile storage medium stores an operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage medium. The network interface is used to communicate with external terminals via a network connection. When the computer program is executed by the processor, it follows the steps of the configuration file processing methods according to various embodiments of this specification as described in the above embodiments.

[0121] The processor may include the main processor, as well as baseband chips, modems, etc.

[0122] The memory stores a program that executes the technical solution of this invention, and may also store an operating system and other critical business functions. Specifically, the program may include program code, which includes computer operation instructions. More specifically, the memory may include read-only memory (ROM), other types of static storage devices capable of storing static information and instructions, random access memory (RAM), other types of dynamic storage devices capable of storing information and instructions, disk storage, flash memory, etc.

[0123] The processor can be a general-purpose processor, such as a general-purpose central processing unit (CPU), a microprocessor, etc., or an application-specific integrated circuit (ASIC), or one or more integrated circuits used to control the execution of the program of the present invention. It can also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), an off-the-shelf programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components.

[0124] Input devices may include devices that receive data and information input by the user, such as keyboards, mice, cameras, scanners, light pens, voice input devices, touch screens, pedometers, or gravity sensors.

[0125] Output devices may include devices that allow information to be output to the user, such as displays, printers, speakers, etc.

[0126] The communication interface may include any transceiver-like device for communicating with other devices or communication networks, such as Ethernet, Radio Access Network (RAN), Wireless Local Area Network (WLAN), etc.

[0127] The processor executes programs stored in memory and calls other devices, which can be used to implement various steps of any of the configuration file processing methods provided in the above embodiments of this application.

[0128] The computing device may also include a display component and a voice component. The display component may be a liquid crystal display screen or an e-ink display screen. The input device of the computing device may be a touch layer covering the display component, or a button, trackball or touchpad set on the casing of the computing device, or an external keyboard, touchpad or mouse, etc.

[0129] Those skilled in the art will understand that Figure 8 The structures shown are merely block diagrams of some structures related to the solutions in this specification and do not constitute a limitation on the computing devices on which the solutions in this specification are applied. Specific computing devices may include more or fewer components than those shown in the figures, or combine certain components, or have different component arrangements.

[0130] Exemplary computer program products and storage media

[0131] In addition to the methods and devices described above, the configuration file processing methods provided in the embodiments of this specification can also be computer program products, which include computer program instructions that, when executed by a processor, cause the processor to perform the steps in the configuration file processing methods according to various embodiments of this specification as described in the "Exemplary Methods" section above.

[0132] The computer program product described herein can be written in any combination of one or more programming languages ​​to perform the operations of the embodiments described herein. These programming languages ​​include object-oriented programming languages ​​such as Java and C++, as well as conventional procedural programming languages ​​such as C or similar languages. The program code can be executed entirely on the user's computing device, partially on the user's computing device, as a standalone software package, partially on the user's computing device and partially on a remote computing device, or entirely on a remote computing device or server.

[0133] Furthermore, embodiments of this specification also provide a computer-readable storage medium having a computer program stored thereon, the computer program being executed by a processor of the steps in the configuration file processing methods according to various embodiments of this specification as described in the "Exemplary Methods" section above.

[0134] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the methods described above. Any references to memory, storage, databases, or other media used in the embodiments provided in this specification can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), dual data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), RAMbus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and RAMbus dynamic RAM (RDRAM), etc.

[0135] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0136] The embodiments described above are merely illustrative of several implementation methods outlined in this specification. While the descriptions are specific and detailed, they should not be construed as limiting the scope of the solutions provided in this specification. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this specification, and these all fall within the scope of protection of this specification. Therefore, the scope of protection for this patent should be determined by the appended claims.

Claims

1. A method for processing configuration files, characterized in that, The method for processing the configuration file, applicable to semiconductor process equipment, includes: In response to a first configuration instruction carrying a device type, a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type are displayed on the display page; the device type is used to describe the type of the semiconductor process equipment; the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, and the first-level node corresponds to a subpage identifier of the human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes multiple sub-nodes, and the sub-nodes correspond to subpages in the UI page; In response to a configuration operation targeting a target child node, the target child node is configured under the first-level node or other child nodes to obtain a target hierarchical relationship configuration tree; the target child node is a child node in the page navigation pool. In response to a save operation for the target hierarchical relationship configuration tree, a configuration file corresponding to the target hierarchical relationship configuration tree is generated. The configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

2. The method according to claim 1, characterized in that, Before generating the configuration file corresponding to the target hierarchical relationship configuration tree in response to a save operation for the target hierarchical relationship configuration tree, the method further includes: In response to the selection operation of the child node, the subpage corresponding to the selected child node is set as the default loading page, which is the subpage displayed after the semiconductor process equipment is started.

3. The method according to claim 2, characterized in that, Also includes: The display page shows the name and / or path of the default loaded page.

4. The method according to claim 1, characterized in that, Also includes: In response to a second configuration instruction carrying an animation type, the animation effect corresponding to the animation type is set as the loading animation of the subpage.

5. The method according to claim 4, characterized in that, The animation type corresponds to the type of the semiconductor process equipment, and the configuration file processing method further includes: The animation type is displayed on the display page.

6. The method according to claim 1, characterized in that, The configuration file corresponding to the target hierarchical relationship configuration tree includes: Add the device type as a UI type element value in the target file, the target file including a file in Extensible Markup Language (XML) format, the UI type element value being used to describe the type of the semiconductor process device corresponding to the configuration file in XML format; Traverse all nodes in the target hierarchical relationship configuration tree and add the node values ​​of each node to the elements of the target file to obtain the configuration file.

7. The method according to claim 6, characterized in that, When an animation type is configured, the process of generating the configuration file corresponding to the target hierarchical relationship configuration tree further includes: The animation type is added as an animation type element value in the target file, and the animation type element value is used to describe the loading animation type of the subpage.

8. The method according to any one of claims 1 to 6, characterized in that, The default hierarchical relationship configuration tree corresponding to each device type and the page navigation pool corresponding to each device type are pre-established and stored in the semiconductor process equipment.

9. The method according to any one of claims 1 to 6, characterized in that, Also includes: In response to the startup operation, the configuration file is loaded, and the UI page corresponding to the target hierarchical relationship configuration tree is rendered.

10. The method according to claim 9, characterized in that, The step of loading the configuration file and rendering the UI page corresponding to the target hierarchical relationship configuration tree includes: Load the configuration file, select the interface in the dynamic link library corresponding to the UI type element value according to the UI type element value in the configuration file, determine whether the loaded interface includes the target interface, the target interface includes the interface corresponding to the type of semiconductor process equipment described by the UI type element value, if so, use the simple factory pattern to create the main frame view of the UI page, parse the parameter information in the configuration file to render the UI page corresponding to the target hierarchical relationship configuration tree; If not, render the default UI page.

11. A computing device, characterized in that, The system includes a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the configuration file processing method according to any one of claims 1 to 10.

12. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program, which, when executed by a processor, implements the configuration file processing method according to any one of claims 1 to 10.

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