Miniature peristaltic pump and its manufacturing method

Abstract

This application relates to a micro peristaltic pump and its manufacturing method. The micro peristaltic pump includes a flow channel layer and at least one micro phase change actuator. The flow channel layer includes a flow channel layer body, microchannels disposed within the flow channel layer body, and an elastic film for sealing the microchannels. The micro phase change actuator includes a base layer, a chamber layer, and an elastic barrier film sequentially stacked along a first direction. The base layer includes a substrate and electrodes disposed on the substrate. The electrodes are made of a thermosensitive material. The chamber layer includes a cavity and a phase change material contained within the cavity formed by the cavity. The electrodes are used to heat the phase change material. When the phase change material expands due to heat, it compresses the elastic barrier film to deform, thereby compressing the elastic film to deform and drive the fluid flow within the microchannels. This can improve the integration, manufacturing feasibility, and process adaptability of the micro peristaltic pump.

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