Laser optical processing device and processing method thereof

Abstract

The application relates to a laser optical processing device and a processing method thereof. The device comprises a laser emission unit for emitting a scanning processing laser beam, a frequency domain optical coherence tomography unit for emitting an imaging laser beam, an optical transmission unit for transmitting and focusing the scanning processing laser beam and the imaging laser beam to a set first sample target area to generate first sample image information, a laser galvanometer scanning unit for scanning a sample to be detected to record position and orientation information of a first scanning point, an indication light imaging unit for taking a first sample photo, and an image processing display unit for obtaining a first imaging deviation according to the first sample image information, the position and orientation information of the first scanning point, and the first sample photo. The application can provide sample position information or image information in real time at a high resolution and a high speed in a short imaging time, and can control the operation of the laser optical processing device in real time by adjusting imaging parameters and scanning parameters in real time.

Description

Technical Field

[0001] This invention belongs to the field of optical processing technology, and specifically relates to a laser optical processing device and its processing method. Background Technology

[0002] In the optical processing, it is necessary to detect samples in real time along the line, from surface scratches, irregular spherical and curved surfaces to internal damage. Real-time imaging provides sample position information or image information so that unqualified samples can be quickly detected and reprocessed before entering the inspection line for re-inspection.

[0003] Traditional sample inspection techniques mainly include manually operated coordinate measuring machine (CMM) systems and handheld inspection devices. CMM systems require the sample to be brought from the line edge to the inspection chamber, which cannot solve the problem of real-time inspection at the line edge. Furthermore, they cannot automatically re-enter the inspection line for inspection after reprocessing. Additionally, adjusting optical components during sample inspection affects imaging speed, making it impossible to provide real-time sample position or image information. While handheld inspection devices can perform real-time inspection at the line edge, their accuracy is low, prone to false positives and false negatives, and they also cannot automatically re-enter the inspection line for inspection after reprocessing.

[0004] With the rise of laser and optoelectronic technologies, optical detection technology has become a research hotspot in measurement technology. High-precision detection using laser technology and optical coherence tomography (OCT) combined with precise computer calculations for trajectory planning has enabled the automation and intelligentization of sample detection. However, due to the high energy of the laser beam and the short scanning duration, existing imaging systems cannot generate high-resolution, high-speed positional or image information of the sample from its surface to its interior in such a short time, nor can they analyze the image information from the sample's surface to its interior to provide or actively modify the ongoing laser scanning process. Summary of the Invention

[0005] This invention provides a laser optical processing apparatus and processing method thereof, which aims to at least partially solve one of the aforementioned technical problems in the prior art.

[0006] To address the above problems, the present invention provides the following technical solution:

[0007] A laser optical processing apparatus includes a laser emitting unit, an optical transmission unit, a frequency-domain optical coherence tomography (FOCT) unit, a laser galvanometer scanning unit, an indicator light imaging unit, an image processing and display unit, and a control unit. The laser emitting unit emits a scanning processing laser beam, and the FOCT unit shares an optical path with the laser emitting unit to emit an imaging laser beam. The optical transmission unit transmits and focuses the scanning processing laser beam and the imaging laser beam onto a predetermined first sample target area, generating first sample image information of the sample to be tested. The laser galvanometer scanning unit scans the sample to be tested and records the position and orientation information of a first scanning point. The indicator light imaging unit captures a first sample photograph of the first scanning point. The image processing and display unit analyzes the first sample image information, the position and orientation information of the first scanning point, and the first sample photograph to obtain a first imaging deviation. The control unit adjusts the scanning parameters of the laser emitting unit and the imaging parameters of the FOCT unit in real time according to the first imaging deviation, and generates a first scanning processing area based on the adjusted parameters.

[0008] The technical solution adopted in this embodiment of the invention further includes: an optical fiber transmission unit and an electrical transmission unit; the laser emitting unit is connected to the optical transmission unit via the optical fiber transmission unit and to the control unit via the electrical transmission unit; the optical transmission unit is disposed at the light output port of the laser emitting unit and is connected to the frequency domain optical coherence tomography unit via the optical fiber transmission unit; the laser galvanometer scanning unit is connected in the optical path of the optical transmission unit via the optical fiber transmission unit; the frequency domain optical coherence tomography unit is connected to the laser galvanometer scanning unit via the optical fiber transmission unit and to the control unit via the electrical transmission unit; the indicator light imaging unit is connected to the optical transmission unit via the optical fiber transmission unit and to the image processing and display unit via the electrical transmission unit; the image processing and display unit is connected to the laser galvanometer scanning unit, the indicator light imaging unit, and the control unit via the electrical transmission unit; the control unit is connected to the image processing and display unit, the laser emitting unit, and the frequency domain optical coherence tomography unit via the electrical transmission unit.

[0009] The technical solution adopted in this embodiment of the invention further includes: the optical transmission unit is also used to guide and focus the scanning processing laser beam and the imaging laser beam to a set second sample target area to generate a second scanning processing area; the generation method of the second scanning processing area is as follows: the scanning processing laser beam and the imaging laser beam are transmitted and focused to a set second sample target area through the optical transmission unit to generate second sample image information of the sample to be tested; the sample to be tested is scanned by the laser galvanometer scanning unit, the position and orientation information of the second scanning point are recorded, and the second sample photograph of the second scanning point is captured by the indicator light imaging unit; the image processing and display unit analyzes the second imaging deviation between the first scanning point and the second scanning point based on the first sample photograph of the first scanning point, the first sample image information, the position and orientation information of the first scanning point, and the second sample photograph of the second scanning point, the second sample image information, and the position and orientation information of the second scanning point; the control unit adjusts the scanning parameters of the laser emission unit, the imaging parameters of the frequency domain optical coherence tomography unit, and the shooting parameters of the indicator light imaging unit in real time based on the second imaging deviation to generate the second scanning processing area.

[0010] The technical solution adopted in this embodiment of the invention further includes: the optical transmission unit includes a beam shaper, a laser flash switch, a first grating, a first dichroic mirror, a second dichroic mirror, and a first focusing lens connected sequentially through the optical fiber transmission unit; the beam shaper acquires a circular spot of the scanning processing laser beam; the laser flash switch is connected to the control unit and is used to control the on / off state of the scanning processing laser beam; the first grating is used to increase the energy of the scanning processing laser beam; the first dichroic mirror is used to transmit the circular spot to the second dichroic mirror and transmit the first reference beam generated by the frequency domain optical coherence tomography unit to the reference mirror; and the first reference beam generated by the frequency domain optical coherence tomography unit is transmitted to the reference mirror. The second reference beam returned by the reference mirror is transmitted back to the frequency domain optical coherence tomography unit. The first image beam generated by the frequency domain optical coherence tomography unit is transmitted to the laser galvanometer scanning unit for position adjustment. The first image beam after position adjustment is then transmitted to the second dichroic mirror. The second dichroic mirror is used to combine the optical path of the indicator light imaging unit into the main optical path and transmit the first image beam to the first focusing lens. The first focusing lens is used to focus the first image beam and the scanning processing laser beam onto the sample to be tested and transmit the second image beam reflected by the sample to the frequency domain optical coherence tomography unit and the indicator light imaging unit.

[0011] The technical solution adopted in this embodiment of the invention further includes: the beam shaper is a field stop, the first grating is a Bragg grating, and the first focusing lens is a scanning lens.

[0012] The technical solution adopted in this embodiment of the invention further includes: the frequency domain optical coherence tomography unit further includes a swept frequency light source, an interferometer, an isolator, a second focusing lens, a second grating, a polarizer, a detector, and a reference mirror, wherein the swept frequency light source is used to emit an imaging laser beam, the interferometer is used to split the imaging laser beam into a first image beam and a first reference beam, and guides the first reference beam to the reference mirror through the first dichroic mirror, the reference mirror is used to combine the optical paths of the first reference beam into the main optical path, and conduct the returning second reference beam back to the interferometer; the first image beam is transmitted to the laser beam through the second dichroic mirror. After the optical galvanometer scanning unit adjusts its position, it transmits the first image beam to the sample to be tested and returns the second image beam reflected from the sample to the interferometer through the original optical path. After the polarity of the second image beam is rotated by the isolator, the interferometer interferes with the second reference beam and the second image beam to generate interference light of the sample to be tested. The interference light is then transmitted to the second grating and polarizer to generate a trigger signal for priority detection of the interference light. The detector is used to start acquiring the interference light signal according to the trigger signal and convert it into an electrical signal, which is then transmitted to the image processing and display unit.

[0013] The technical solution adopted in this embodiment of the invention also includes: the interferometer is a Michelson interferometer, the reference mirror is a reflecting mirror, the isolation plate is a Faraday isolation plate, the second grating is a diffraction grating, the polarizer is a linear gate polarizer, and the detector is a photodetector or an avalanche diode.

[0014] The technical solution adopted in this embodiment of the invention further includes: the indicator light imaging unit includes an indicator light source and a high-speed camera, the indicator light source is a visible light source used to emit visible light, and the high-speed camera is used to capture a first sample photograph at the first scanning point and a second sample photograph at the second scanning point.

[0015] Another technical solution adopted in this embodiment of the invention is: a processing method of a laser optical processing device, comprising the following steps:

[0016] A laser emitting unit is used to emit a scanning processing laser beam, and a frequency domain optical coherence tomography unit is used to emit an imaging laser beam, wherein the frequency domain optical coherence tomography unit and the laser emitting unit share the same optical path;

[0017] The scanning laser beam and the imaging laser beam are transmitted and focused onto a set first sample target area through an optical transmission unit to generate first sample image information of the sample to be tested.

[0018] The sample to be tested is scanned by a laser galvanometer scanning unit, the position and orientation information of the first scanning point are recorded, and a first sample photograph of the first scanning point is captured by an indicator light imaging unit.

[0019] The image processing and display unit analyzes the image information of the first sample, the position and orientation information of the first scanning point, and the photograph of the first sample to obtain the first imaging deviation.

[0020] The control unit adjusts the scanning parameters of the laser emission unit and the imaging parameters of the frequency domain optical coherence tomography unit in real time according to the first imaging deviation, and generates the first scanning processing area based on the adjusted parameters.

[0021] The technical solution adopted in this embodiment of the invention further includes: after generating the first scanning processing area according to the adjusted parameters, it further includes:

[0022] The scanning laser beam and the imaging laser beam are transmitted and focused onto the set second sample target area through the optical transmission unit to generate the second sample image information of the sample to be detected.

[0023] The laser galvanometer scanning unit scans the sample to be tested, records the position and orientation information of the second scanning point, and captures a second sample photograph at the second scanning point using the indicator light imaging unit.

[0024] The image processing and display unit analyzes the second imaging deviation between the first and second scanning points based on the first sample photograph, first sample image information, position and orientation information of the first scanning point, and the second sample photograph, second sample image information, and position and orientation information of the second scanning point.

[0025] The control unit adjusts the scanning parameters of the laser emission unit, the imaging parameters of the frequency domain optical coherence tomography unit, and the shooting parameters of the indicator light imaging unit in real time based on the second imaging deviation to generate a second scanning processing area.

[0026] Compared with the prior art, the beneficial effects of the embodiments of the present invention are as follows: The laser optical processing apparatus and processing method of the present invention utilize a frequency domain optical coherence tomography unit for rapid scanning imaging, use beam modulation technology to change the polarity of the sample return light, prioritize the detection of interference light returned by the sample and suppress the scattered light of optical components to improve resolution and complete real-time imaging of the sample, and achieve high-resolution, high-speed real-time provision of sample position information or image information in a short imaging time through image processing technology, and use a three-dimensional galvanometer scanning unit to scan the sample from the surface to different depths, widths and axial positions in real time while recording the position and orientation information of the scanning points, and provide real-time feedback to adjust the imaging parameters of the frequency domain optical coherence tomography unit and the scanning parameters of the laser emission unit, thereby controlling the operation of the laser optical processing apparatus in real time. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of the laser optical processing device according to an embodiment of the present invention;

[0028] Figure 2 yes Figure 1 A flowchart of the processing method of the laser optical processing device shown;

[0029] Explanation of icon numbers:

[0030] 1. Laser emitting unit, 21. Beam shaper, 22. Laser flash switch, 23. First grating, 24. First dichroic mirror, 25. Second dichroic mirror, 26 / 34. Focusing lens, 31. Sweep light source, 32. Interferometer, 33. Isolator, 26 / 34. Focusing lens, 35. Second grating, 36. Polarizer, 37. Detector, 38. Reference mirror, 4. Laser galvanometer scanning unit, 51. Indicator light source, 52. High-speed camera, 6. Image processing and display unit, 7. Control unit, 8. Fiber optic transmission unit, 9. Electrical transmission unit. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0032] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0033] It should also be noted that when a component is referred to as "fixed to" or "set on" another component, it can be directly on the other component or may have an intervening component present. When a component is referred to as "connected to" another component, it can be directly connected to the other component or may have an intervening component present.

[0034] Furthermore, the use of terms such as "first" and "second" in this invention is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this invention.

[0035] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of the invention. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0036] Specifically, please refer to Figure 1 This is a schematic diagram of the structure of a laser optical processing apparatus according to an embodiment of the present invention. The laser optical processing apparatus of this embodiment includes a laser emitting unit 1, an optical transmission unit (not shown), a frequency domain optical coherence tomography (not shown), a laser galvanometer scanning unit 4, an indicator light imaging unit (not shown), an image processing and display unit 6, a control unit 7, an optical fiber transmission unit 8, and an electrical transmission unit 9. The laser emitting unit 1 is connected to the optical transmission unit via the optical fiber transmission unit 8 and to the control unit 7 via the electrical transmission unit 9. The optical transmission unit is located at the light outlet of the laser emitting unit 1 and is connected to the frequency domain optical coherence tomography (not shown) via the optical fiber transmission unit 8. The laser galvanometer scanning unit 4 transmits light through an optical fiber tomography unit 1. The fiber transmission unit 8 is connected in the optical path of the optical transmission unit; the frequency domain optical coherence tomography unit is connected to the laser galvanometer scanning unit 4 through the fiber transmission unit 8, and to the control unit 7 through the electrical transmission unit 9; the indicator light imaging unit is connected to the optical transmission unit through the fiber transmission unit 8, and to the image processing and display unit 6 through the electrical transmission unit 9; the image processing and display unit 6 is connected to the laser galvanometer scanning unit 4, the indicator light imaging unit, and the control unit 7 through the electrical transmission unit 9, and the control unit 7 is connected to the image processing and display unit 6, the laser emission unit 1, and the frequency domain optical coherence tomography unit through the electrical transmission unit 9.

[0037] Based on the above structure, the working principle of the laser optical processing device in this embodiment of the invention includes: a scanning processing laser beam is emitted by the laser emitting unit 1 according to set scanning parameters; a frequency domain optical coherence tomography (FCT) unit shares the same optical path with the laser emitting unit 1 and is used to emit an imaging laser beam according to set imaging parameters under the control of the control unit 7; after the scanning processing laser beam and the imaging laser beam are positioned by the laser galvanometer scanning unit 4, the scanning processing laser beam and the imaging laser beam are transmitted and focused onto a set first sample target area by the optical transmission unit, generating first sample image information of the sample to be tested; and the laser galvanometer scanning unit 4 scans the sample to be tested in real time from the surface to the interior at different depths, widths, and axial positions, recording the position of the first scanning point. Simultaneously, the first sample image is captured by the indicator light imaging unit at the first scanning point, and the first sample image information, the position and orientation information of the first scanning point, and the first sample image are transmitted to the image processing and display unit 6. The image processing and display unit 6 analyzes the first sample image information, the position and orientation information of the first scanning point, and the first sample image to obtain and display the first imaging deviation, and transmits the first imaging deviation to the control unit 7. The control unit 7 adjusts the scanning parameters such as the energy and scanning position of the laser emitting unit 1 and the imaging parameters such as the output wavelength and focusing position of the frequency domain optical coherence tomography unit in real time according to the first imaging deviation, and generates the first scanning processing area according to the adjusted parameters.

[0038] As an improvement, the optical transmission unit in this embodiment of the invention is further used to guide and focus the scanning processing laser beam and the imaging laser beam onto a set second sample target area to generate a second scanning processing area. The generation of the second scanning processing area specifically includes: emitting a scanning processing laser beam by the laser emitting unit 1 according to set scanning parameters; emitting an imaging laser beam by the frequency domain optical coherence tomography unit under the control of the control unit 7 according to set imaging parameters; adjusting the positions of the scanning processing laser beam and the imaging laser beam by the laser galvanometer scanning unit 4; then guiding and focusing the scanning processing laser beam and the imaging laser beam onto the set second sample target area by the optical transmission unit to generate second sample image information of the sample to be tested; and scanning the sample to be tested in real time from its surface to its interior at different depths, widths, and axial positions by the laser galvanometer scanning unit 4, recording the position and orientation of the second scanning point. The system simultaneously captures a second sample image at the second scanning point using the indicator light imaging unit, and transmits the second sample image information, the position and orientation information of the second scanning point, and the second sample image to the image processing and display unit 6. The image processing and display unit 6 analyzes and displays the second imaging deviation between the first and second scanning points based on the first sample image, the first sample image information, the position and orientation information of the first scanning point, and the second sample image, the second sample image information, the position and orientation information of the second scanning point, and transmits the second imaging deviation to the control unit 7. The control unit 7 adjusts the scanning parameters such as the energy and scanning position of the laser emission unit 1, the imaging parameters such as the output wavelength and focus position of the frequency domain optical coherence tomography unit, and the shooting parameters of the indicator light imaging unit based on the real-time feedback of the second imaging deviation to form the second scanning processing area.

[0039] In one embodiment of the present invention, the image processing and display unit 6 analyzes the first sample photograph, the first sample image information and the position and orientation information of the first scanning point to obtain the first imaging deviation of the sample to be detected. Specifically, the image processing and display unit 6 analyzes and displays the deviation between the first sample image information and the first sample photograph, transmits the deviation as the first imaging deviation to the control unit 7, and the control unit 7 adjusts the imaging parameters of the frequency domain optical coherence tomography unit in real time according to the first imaging deviation.

[0040] In one embodiment of the present invention, the image processing and display unit 6 analyzes and displays the second imaging deviation between the first scanning point and the second scanning point based on the first sample photograph, the first sample image information, the position and orientation information of the first scanning point, and the second sample photograph, the second sample image information, the position and orientation information of the second scanning point. Specifically, this includes: analyzing and displaying the deviation between the first sample image information and the second sample image information through the image processing and display unit 6, transmitting the deviation as the second imaging deviation to the control unit 7, and adjusting the imaging parameters of the frequency domain optical coherence tomography unit in real time through the control unit 7.

[0041] In one embodiment of the present invention, the image processing and display unit 6 analyzes and displays the second imaging deviation between the first scanning point and the second scanning point based on the first sample photograph, the first sample image information, the position and orientation information of the first scanning point, and the second sample photograph, the second sample image information, the position and orientation information of the second scanning point. The analysis and display of the deviation between the first sample photograph and the second sample photograph by the image processing and display unit 6, and transmitting the deviation as the second imaging deviation to the control unit 7, and adjusting the shooting parameters of the indicator light imaging unit in real time by the control unit 7.

[0042] In one embodiment of the present invention, the image processing and display unit 6 analyzes and displays the second imaging deviation between the first scanning point and the second scanning point based on the first sample photograph, the first sample image information, the position and orientation information of the first scanning point, and the second sample photograph, the second sample image information, the position and orientation information of the second scanning point. The analysis and display of the deviation between the position and orientation information of the first scanning point and the position and orientation information of the second scanning point by the image processing and display unit 6, and transmits the deviation as the second imaging deviation to the control unit 7, and adjusts the scanning parameters of the laser emitting unit 1 in real time by the control unit 7.

[0043] Further, in one embodiment of the present invention, the optical transmission unit includes a beam shaper 21, a laser flash switch 22, a first grating 23, a first dichroic mirror 24, a second dichroic mirror 25, and a first focusing lens 26, which are sequentially connected through an optical fiber transmission unit 8. The focusing process of the optical transmission unit for the scanning processing laser beam and the imaging laser beam specifically includes: the beam shaper 21 is a field stop used to filter out non-circular portions of the scanning processing laser beam, thereby obtaining a circular spot, ensuring that the focused spot is evenly distributed radially, thus improving the quality of the focused spot; the laser flash switch 22 is connected to the control unit 7 and used to control the on / off state of the scanning processing laser beam during operation; the first grating 23 is a Bragg grating used to increase the energy of the scanning processing laser beam; the first dichroic mirror 24 is used to transmit the obtained circular spot to the second dichroic mirror 25, thus improving the frequency domain... The first reference beam generated by the optical coherence tomography unit is transmitted to the reference mirror 38. The second reference beam returned from the reference mirror 38 is transmitted back to the frequency domain optical coherence tomography unit. The first image beam generated by the frequency domain optical coherence tomography unit is transmitted to the laser galvanometer scanning unit 4 for position adjustment. The first image beam after position adjustment is then transmitted to the second dichroic mirror 25. The second dichroic mirror 25 is used to combine the optical path of the indicator light imaging unit into the main optical path and transmit the first image beam to the first focusing lens 26. The first focusing lens 26 is a scanning lens, which is set in the output optical path of the first image beam and the scanning processing laser beam. It is used to focus the first image beam after position adjustment by the laser galvanometer scanning unit 3 and the scanning processing laser beam onto the sample to be detected, and transmit the second image beam reflected by the sample to the frequency domain optical coherence tomography unit and the indicator light imaging unit.

[0044] In one embodiment of the present invention, the frequency domain optical coherence tomography unit further includes a swept-frequency light source 31, an interferometer 32, a septum 33, a second focusing lens 34, a second grating 35, a polarizer 36, a detector 37, and a reference mirror 38. The swept-frequency light source 31 emits an imaging laser beam. The interferometer 32 is a Michelson interferometer used to split the imaging laser beam into a first image beam and a first reference beam. The first reference beam is guided to the reference mirror 38 via a first dichroic mirror 24. The reference mirror 38 is a reflector used to combine the light path of the first reference beam into the main optical path and to transmit the second reference beam returned from the reference mirror 38 back to the interferometer 32. The first image beam is transmitted to the laser galvanometer scanning unit 4 for position adjustment via the second dichroic mirror 25. The first image beam is then transmitted to the sample to be detected, and the second image beam reflected from the sample is transmitted through the original optical path. Returning to interferometer 32; the isolator 33 is a Faraday isolator. After rotating the polarity of the second image beam reflected by the sample to be detected by the isolator 33, the second reference beam and the second image beam are interfered by the interferometer 32 to generate interference light of the sample to be detected, and the interference light is transmitted to the second grating 35 and the polarizer 36; the second grating 35 is a diffraction grating, used to reduce the influence of sample scattering on the imaging accuracy of the frequency domain optical coherence tomography unit, and the polarizer 36 is a linear grid polarizer, used to suppress the scattered light of the optical components of the optical transmission unit and the frequency domain optical coherence tomography unit, generate a trigger signal for priority detection of the interference light, and transmit the trigger signal to the detector 37; the detector 37 is a photodetector or avalanche diode, used to start collecting the interference light signal according to the trigger signal and convert it into an electrical signal, and transmit the electrical signal to the image processing and display unit 6.

[0045] Understandably, the second grating 35, polarizer 36, and detector 37 reduce the impact of optical component scattering and sample scattering on imaging and improve imaging resolution by prioritizing the detection of interference light returning from the sample to be detected.

[0046] It is understood that the first focusing lens 26 and the second focusing lens 34 can be fixed directly above the sample to be tested, and are used to focus the imaging laser beam and the scanning laser beam onto the sample to be tested, while focusing the scanning lens of the laser emitting unit 1, the imaging lens of the frequency domain optical coherence tomography unit, and the shooting lens of the indicator light imaging unit, respectively.

[0047] In one embodiment of the present invention, the indicator light imaging unit includes an indicator light source 51 and a high-speed camera 52. The indicator light source 51 is a visible light source, including LED beads, incandescent lamps and fluorescent lamps, for emitting visible light to enable the indicator light imaging unit to form an image. The high-speed camera 52 is used to capture a first sample photograph at a first scanning point and a second sample photograph at a second scanning point.

[0048] In one embodiment of the present invention, the optical paths of the laser galvanometer scanning unit 4, the frequency domain optical coherence tomography unit, the laser emission unit 1, and the indicator light imaging unit are coaxial, so that the sample to be detected can be simultaneously within the scanning range of the laser galvanometer scanning unit 4 and the laser emission unit 1, the imaging range of the frequency domain optical coherence tomography unit, and the imaging range of the indicator light imaging unit.

[0049] Please see Figure 2 ,yes Figure 1 A flowchart of a processing method using the laser optical processing apparatus shown. The processing method includes the following steps:

[0050] S10: The laser emitting unit emits a scanning processing laser beam according to the set scanning parameters, and the frequency domain optical coherence tomography unit emits an imaging laser beam according to the set imaging parameters.

[0051] S20: After the position of the scanning laser beam and the imaging laser beam are adjusted by the laser galvanometer scanning unit, the scanning laser beam and the imaging laser beam are transmitted and focused onto the set first sample target area by the optical transmission unit to generate the first sample image information of the sample to be detected.

[0052] S30: The laser galvanometer scanning unit scans the sample to be tested in real time, records the position and orientation information of the first scanning point, and simultaneously captures a first sample image of the first scanning point through the indicator light imaging unit. The first sample image information, the position and orientation information of the first scanning point, and the first sample image are transmitted to the image processing and display unit.

[0053] S40: The image processing and display unit analyzes the image information of the first sample, the position and orientation information of the first scanning point, and the photograph of the first sample to obtain the first imaging deviation of the sample to be detected and displays the first imaging deviation, and transmits the first imaging deviation to the control unit.

[0054] In one embodiment of the present invention, the analysis of the first sample image information, the position and orientation information of the first scanning point, and the first sample photograph by the image processing and display unit specifically includes: analyzing and displaying the deviation between the first sample image information and the first sample photograph by the image processing and display unit, transmitting the deviation as a first imaging deviation to the control unit, and adjusting the imaging parameters of the frequency domain optical coherence tomography unit in real time according to the first imaging deviation.

[0055] S50: The control unit adjusts the scanning parameters such as the energy and scanning position of the laser emission unit and the imaging parameters such as the output wavelength and focusing position of the frequency domain optical coherence tomography unit in real time according to the feedback of the first imaging deviation, and generates the first scanning processing area according to the adjusted parameters.

[0056] As an improvement, the S50 also includes the following steps:

[0057] S60: The scanning laser beam and the imaging laser beam are transmitted and focused onto the set second sample target area through the optical transmission unit to generate second sample image information of the sample to be detected;

[0058] S70: The laser galvanometer scanning unit scans the sample under test in real time from the surface to the interior at different depths, widths and axial positions, records the position and orientation information of the second scanning point, and simultaneously captures a second sample photo of the second scanning point through the indicator light imaging unit. The second sample image information, the position and orientation information of the second scanning point and the second sample photo are then transmitted to the image processing and display unit.

[0059] S80: The image processing and display unit analyzes and displays the second imaging deviation between the first scanning point and the second scanning point based on the first sample photograph, the first sample image information, the position and orientation information of the first scanning point, and the second sample photograph, the second sample image information, and the position and orientation information of the second scanning point, and transmits the second imaging deviation to the control unit.

[0060] S90: The control unit adjusts the scanning parameters such as the energy and scanning position of the laser emission unit and the imaging parameters such as the output wavelength and focusing position of the frequency domain optical coherence tomography unit in real time based on the feedback of the second imaging deviation, thereby forming the second scanning processing area;

[0061] In one embodiment of the present invention, the image processing and display unit analyzes and displays a second imaging deviation between the first and second scanning points based on the first sample photograph, the first sample image information, the position and orientation information of the first scanning point, and the second sample photograph, the second sample image information, the position and orientation information of the second scanning point. Specifically, this includes: analyzing and displaying the deviation between the first and second sample image information through the image processing and display unit, transmitting the deviation as a second imaging deviation to the control unit, and adjusting the imaging parameters of the frequency domain optical coherence tomography unit in real time through the control unit.

[0062] In one embodiment of the present invention, the image processing and display unit analyzes and displays a second imaging deviation between the first scanning point and the second scanning point based on the first sample photograph, the first sample image information, the position and orientation information of the first scanning point, and the second sample photograph, the second sample image information, the position and orientation information of the second scanning point. The analysis and display of the deviation between the first sample photograph and the second sample photograph by the image processing and display unit, and transmitting the deviation as a second imaging deviation to the control unit, and adjusting the shooting parameters of the indicator light imaging unit in real time by the control unit.

[0063] In one embodiment of the present invention, the image processing and display unit analyzes and displays a second imaging deviation between the first scanning point and the second scanning point based on the first sample photograph, the first sample image information, the position and orientation information of the first scanning point, and the second sample photograph, the second sample image information, the position and orientation information of the second scanning point. This further includes: analyzing and displaying the deviation between the position and orientation information of the first scanning point and the position and orientation information of the second scanning point through the image processing and display unit; transmitting this deviation as a second imaging deviation to the control unit; and adjusting the scanning parameters of the laser emitting unit in real time through the control unit.

[0064] It should be noted that the laser optical processing device and processing method provided in the above embodiments of the present invention can be used for processing industrial samples from the surface to the internal structure, and can also be applied to imaging, detection and scanning of human or animal tissues, etc., with a wider range of applications.

[0065] Based on the above, the laser optical processing apparatus and method of this invention utilize the characteristics of high scanning speed and large scanning depth of the frequency domain optical coherence tomography unit, and use beam modulation technology to change the polarity of the sample return light, prioritize the detection of interference light returned by the sample and suppress the scattered light of the optical components to improve resolution and complete real-time imaging of the sample. Through image processing technology, high-resolution and high-speed real-time provision of sample position information or image information is achieved in a short imaging time. The three-dimensional galvanometer scanning unit scans the sample from the surface to different depths, widths and axial positions from the interior, and simultaneously records the position and orientation information of the scanning points. The imaging parameters of the frequency domain optical coherence tomography unit and the scanning parameters of the laser emission unit are adjusted in real time, thereby controlling the operation of the laser optical processing apparatus in real time.

[0066] It should be noted that the information interaction and execution process between the steps in the above method embodiments are based on the same concept as the device embodiments of the present invention. For details on their specific functions and technical effects, please refer to the device embodiments section, which will not be repeated here.

[0067] In the embodiments provided by this invention, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. For example, the system embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection through some interfaces, apparatuses, or units, and may be electrical, mechanical, or other forms.

[0068] Furthermore, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated units described above can be implemented in hardware or as software functional units. The above are merely embodiments of the present invention and do not limit the patent scope of the present invention. Any equivalent structural or procedural transformations made based on the description and drawings of the present invention, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of the present invention.

Claims

1. A laser optical processing apparatus, characterized in that, The system includes a laser emitting unit, an optical transmission unit, a frequency-domain optical coherence tomography (FOCT) unit, a laser galvanometer scanning unit, an indicator light imaging unit, an image processing and display unit, and a control unit. The laser emitting unit emits a scanning processing laser beam, and the FOCT unit shares an optical path with the laser emitting unit to emit an imaging laser beam. The optical transmission unit transmits and focuses the scanning processing laser beam and the imaging laser beam onto a predetermined first sample target area, generating first sample image information of the sample to be tested. The laser galvanometer scanning unit scans the sample to be tested and records the position and orientation information of the first scanning point. The indicator light imaging unit captures a first sample photograph of the first scanning point. The image processing and display unit analyzes the first sample image information, the position and orientation information of the first scanning point, and the first sample photograph to obtain a first imaging deviation. The control unit adjusts the scanning parameters of the laser emitting unit and the imaging parameters of the FOCT unit in real time according to the first imaging deviation, and generates a first scanning processing area based on the adjusted parameters. The optical transmission unit is further configured to guide and focus the scanning processing laser beam and the imaging laser beam onto a set second sample target area to generate a second scanning processing area. Specifically, the second scanning processing area is generated as follows: the optical transmission unit guides and focuses the scanning processing laser beam and the imaging laser beam onto the set second sample target area to generate second sample image information of the sample to be tested; the laser galvanometer scanning unit scans the sample to be tested, records the position and orientation information of the second scanning point, and the indicator light imaging unit captures a second sample photograph of the second scanning point; the image processing and display unit analyzes the second imaging deviation between the first scanning point and the second scanning point based on the first sample photograph, the first sample image information, the position and orientation information of the first scanning point, and the second sample photograph, the second sample image information, and the position and orientation information of the second scanning point; the control unit adjusts the scanning parameters of the laser emission unit, the imaging parameters of the frequency domain optical coherence tomography unit, and the shooting parameters of the indicator light imaging unit in real time based on the second imaging deviation to generate the second scanning processing area. The optical transmission unit includes a beam shaper, a laser flash switch, a first grating, a first dichroic mirror, a second dichroic mirror, and a first focusing lens connected in sequence. The beam shaper acquires a circular spot of the scanning laser beam. The laser flash switch is connected to the control unit and is used to control the on / off state of the scanning laser beam. The first grating is used to increase the energy of the scanning laser beam. The first dichroic mirror is used to transmit the circular spot to the second dichroic mirror, transmit the first reference beam generated by the frequency domain optical coherence tomography unit to the reference mirror, and transmit the second reference beam returned from the reference mirror. The image beam generated by the frequency-domain optical coherence tomography unit is transmitted back to the laser galvanometer scanning unit for position adjustment. The position-adjusted first image beam is then transmitted to the second dichroic mirror. The second dichroic mirror is used to combine the optical path of the indicator light imaging unit into the main optical path and transmit the first image beam to the first focusing lens. The first focusing lens is used to focus the first image beam and the scanning processing laser beam onto the sample to be detected and transmit the second image beam reflected by the sample to the frequency-domain optical coherence tomography unit and the indicator light imaging unit. The frequency-domain optical coherence tomography unit further includes a swept-frequency light source, an interferometer, a isolator, a second focusing lens, a second grating, a polarizer, a detector, and a reference mirror. The swept-frequency light source emits an imaging laser beam. The interferometer splits the imaging laser beam into a first image beam and a first reference beam, and guides the first reference beam to the reference mirror via a first dichroic mirror. The reference mirror combines the first reference beam into the main optical path and transmits the returning second reference beam back to the interferometer. The first image beam is transmitted to the laser galvanometer scanning unit via the second dichroic mirror for scanning. After the position is adjusted, the first image beam is transmitted to the sample to be tested, and the second image beam reflected by the sample to be tested is returned to the interferometer through the original optical path. After the polarity of the second image beam is rotated by the isolator, the second reference beam and the second image beam are interfered by the interferometer to generate interference light of the sample to be tested. The interference light is transmitted to the second grating and polarizer to generate a trigger signal for priority detection of the interference light. The detector is used to start collecting the interference light signal according to the trigger signal and convert it into an electrical signal, and transmit the electrical signal to the image processing and display unit.

2. The laser optical processing apparatus according to claim 1, characterized in that, It also includes an optical fiber transmission unit and an electrical transmission unit. The laser emitting unit is connected to the optical transmission unit via the optical fiber transmission unit and to the control unit via the electrical transmission unit. The optical transmission unit is located at the light output port of the laser emitting unit and is connected to the frequency domain optical coherence tomography unit via the optical fiber transmission unit. The laser galvanometer scanning unit is connected in the optical path of the optical transmission unit via the optical fiber transmission unit. The frequency domain optical coherence tomography unit is connected to the laser galvanometer scanning unit via the optical fiber transmission unit and to the control unit via the electrical transmission unit. The indicator light imaging unit is connected to the optical transmission unit via the optical fiber transmission unit and to the image processing and display unit via the electrical transmission unit. The image processing and display unit is connected to the laser galvanometer scanning unit, the indicator light imaging unit, and the control unit via the electrical transmission unit. The control unit is connected to the image processing and display unit, the laser emitting unit, and the frequency domain optical coherence tomography unit via the electrical transmission unit.

3. The laser optical processing apparatus according to claim 2, characterized in that, The beam shaper is a field stop, the first grating is a Bragg grating, and the first focusing lens is a scanning lens.

4. The laser optical processing apparatus according to claim 3, characterized in that, The interferometer is a Michelson interferometer, the reference mirror is a reflecting mirror, the isolator is a Faraday isolator, the second grating is a diffraction grating, the polarizer is a wire grid polarizer, and the detector is a photodetector or an avalanche diode.

5. The laser optical processing apparatus according to claim 4, characterized in that, The indicator light imaging unit includes an indicator light source and a high-speed camera. The indicator light source is a visible light source used to emit visible light, and the high-speed camera is used to capture a first sample photograph at the first scanning point and a second sample photograph at the second scanning point.

6. A processing method using the laser optical processing apparatus of claim 1, characterized in that, Includes the following steps: A laser emitting unit is used to emit a scanning processing laser beam, and a frequency domain optical coherence tomography unit is used to emit an imaging laser beam, wherein the frequency domain optical coherence tomography unit and the laser emitting unit share the same optical path; The scanning laser beam and the imaging laser beam are transmitted and focused onto a set first sample target area through an optical transmission unit to generate first sample image information of the sample to be tested. The sample to be tested is scanned by a laser galvanometer scanning unit, the position and orientation information of the first scanning point are recorded, and a first sample photograph of the first scanning point is taken by an indicator light imaging unit. The image processing and display unit analyzes the image information of the first sample, the position and orientation information of the first scanning point, and the photograph of the first sample to obtain the first imaging deviation. The control unit adjusts the scanning parameters of the laser emission unit and the imaging parameters of the frequency domain optical coherence tomography unit in real time according to the first imaging deviation, and generates the first scanning processing area according to the adjusted parameters. After generating the first scanning processing area based on the adjusted parameters, the process further includes: The scanning laser beam and the imaging laser beam are transmitted and focused onto the set second sample target area through the optical transmission unit to generate the second sample image information of the sample to be detected. The laser galvanometer scanning unit scans the sample to be tested, records the position and orientation information of the second scanning point, and captures a second sample image at the second scanning point using the indicator light imaging unit. The image processing and display unit analyzes the second imaging deviation between the first and second scanning points based on the first sample photograph, first sample image information, position and orientation information of the first scanning point, and the second sample photograph, second sample image information, and position and orientation information of the second scanning point. The control unit adjusts the scanning parameters of the laser emission unit, the imaging parameters of the frequency domain optical coherence tomography unit, and the shooting parameters of the indicator light imaging unit in real time based on the second imaging deviation to generate a second scanning processing area.

Images