一种生产电子级三氟化磷联产高纯氯化氢的装置及方法
By combining distillation columns and control parameters, the problems of low conversion rate and insufficient purity in the production of electronic-grade phosphorus trifluoride were solved, achieving efficient co-production of high-purity hydrogen chloride and phosphorus trifluoride, thus improving production efficiency and product purity.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- HUBEI SINOPHORUS ELECTRONIC MATERIALS CO LTD
- Filing Date
- 2025-07-21
- Publication Date
- 2026-07-17
AI Technical Summary
Existing technologies for the production of electronic-grade phosphorus trifluoride suffer from problems such as low raw material conversion rate, byproducts affecting purity and efficiency, equipment corrosion, and resource waste, making it difficult to achieve continuous production and obtain high-purity products.
A combined unit consisting of a reactive distillation column, a pre-separation column, a PF3 purification column, and an HCl heavy and light residue removal column is used to achieve efficient reaction and distillation purification of phosphorus trichloride and hydrogen fluoride by controlling temperature, pressure, and reflux ratio, thereby co-producing high-purity hydrogen chloride.
The conversion rates of phosphorus trichloride and hydrogen fluoride were improved, resulting in electronic-grade phosphorus trifluoride with a purity of ≥99.999% and high-purity hydrogen chloride with a purity of ≥99.99%, reducing equipment corrosion and resource waste, and enabling continuous production.
Smart Images
Figure CN120661950B_ABST