一种半导体前驱体精馏用集液回流组件及精馏装置
By designing the overflow buffer chamber and temperature control component of the liquid collection and reflux assembly for semiconductor precursor distillation, the problem of liquid film rupture caused by condensate flow fluctuations was solved, achieving stable liquid film existence and improved gas-liquid phase balance, thereby increasing distillation separation efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- JIANGSU RONGDAO SEMICON TECH CO LTD
- Filing Date
- 2025-06-24
- Publication Date
- 2026-07-17
AI Technical Summary
In existing distillation units, the liquid film is easily disrupted when the condensate flow rate fluctuates, affecting the gas-liquid phase balance and resulting in poor distillation separation.
Design a liquid collection and reflux assembly for semiconductor precursor distillation, including an overflow buffer chamber and a temperature control assembly. The buffer chamber slows down the liquid descent speed, and an inner overflow pipe and distribution plate are provided to ensure stable liquid reflux and form a continuous liquid film, thereby enhancing the gas-liquid contact area.
It effectively prevents high-speed droplet impact, ensures stable liquid film existence, improves gas-liquid phase balance, and enhances the separation efficiency and stability of the distillation system.
Smart Images
Figure CN120661957B_ABST