Thin film deposition apparatus, thin film deposition method, and display panel

Abstract

The invention discloses thin film deposition equipment, a thin film deposition method and a display panel. The problem that in the prior art, film forming equipment is high in cost is solved. The thin film deposition equipment comprises a first equipment electrode and a second equipment electrode, the first equipment electrode comprises a supporting part and a protruding part, the protruding part is located on one side of the supporting part and comprises a bearing surface away from the supporting part, the surface, close to the supporting part, of the protruding part makes contact with the surface, close to the protruding part, of the supporting part, and the side wall of the protruding part is provided with a first step; the protruding part further comprises grooves, openings of the grooves are located in the bearing surface, the grooves are communicated with the first steps, the grooves and the first steps enclose the bearing surface to form a plurality of bearing areas, and the bearing areas are used for bearing substrates. The insulation structure is embedded into the groove and the first step; the second equipment electrode is opposite to the first equipment electrode; the shielding frame is located between the first equipment electrode and the second equipment electrode, the shielding frame is provided with an opening, and the opening exposes the bearing area; the spraying head is located on the side, away from the first equipment electrode, of the shielding frame.

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