Mechanical arm for testing various types of wafer products and wafer cleaning process

By designing a multifunctional robotic arm, the problem that the existing device cannot adapt to stacked wafer containers was solved, and stable clamping and cleaning of wafers of different specifications were achieved, which improved the operational convenience and precision and reduced the risk of damage.

CN120674377AActive Publication Date: 2025-09-19WUHAN BAIZHEN SEMICON TECH CO LTD
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Patent Information

Application Number
CN202510823203.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-06-19
Publication Date
2025-09-19
Estimated Expiration
2045-06-19

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Abstract

The invention relates to the technical field of wafer preparation, and provides a mechanical arm for testing various types of wafer products and a wafer cleaning technology.The mechanical arm comprises two side clamping jaws, a middle clamping jaw, a first power piece and a second power piece, and each side clamping jaw is provided with an elastic clamping part and a rigid clamping part; the middle clamping jaw is arranged between the two side clamping jaws and is provided with a rigid clamping part; the first power piece is used for adjusting the Y-axis distance between the two side clamping jaws and synchronously adjusting the X-axis distance between the side clamping jaws and the middle clamping jaw. The second power piece is used for driving the side clamping jaw to rotate with the Z axis as the axis. By arranging the first power part, the distance between the two side clamping jaws can be adjusted, so that clamping work of wafers of different sizes and specifications can be adapted, the wafers can be taken out from a stacking container, and application is very convenient; and meanwhile, the clamping direction of the side clamping jaws can be conveniently adjusted, and the application convenience is further improved.
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Citation Information

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